WO2001098788A3 - Diagnosting reliability of vias by e-beam probing - Google Patents

Diagnosting reliability of vias by e-beam probing Download PDF

Info

Publication number
WO2001098788A3
WO2001098788A3 PCT/US2001/019943 US0119943W WO0198788A3 WO 2001098788 A3 WO2001098788 A3 WO 2001098788A3 US 0119943 W US0119943 W US 0119943W WO 0198788 A3 WO0198788 A3 WO 0198788A3
Authority
WO
WIPO (PCT)
Prior art keywords
failure
net
diagnosting
vias
reliability
Prior art date
Application number
PCT/US2001/019943
Other languages
French (fr)
Other versions
WO2001098788A2 (en
Inventor
William Xia
Martin Villafana
Jonathan Tappan
Tim Watson
Michael Campbell
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Priority to KR1020027017488A priority Critical patent/KR100912847B1/en
Priority to MXPA02012058A priority patent/MXPA02012058A/en
Priority to AU7583801A priority patent/AU7583801A/en
Priority to EP01953382A priority patent/EP1292838A2/en
Priority to IL15310501A priority patent/IL153105A0/en
Priority to JP2002504497A priority patent/JP2004507078A/en
Priority to AU2001275838A priority patent/AU2001275838B2/en
Priority to CA002409411A priority patent/CA2409411A1/en
Publication of WO2001098788A2 publication Critical patent/WO2001098788A2/en
Publication of WO2001098788A3 publication Critical patent/WO2001098788A3/en
Priority to HK03108208A priority patent/HK1056013A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/307—Contactless testing using electron beams of integrated circuits

Abstract

Electronic devices, such as IC devices, are tested by determining a failure net within the electronic device that is causing a device failure. After identifying the failure net, the failure net is locally stressed. The stress is applied so that only the net being tested is subjected to the stress, and the remaining nets and components of the device are not stressed. A change in a signal produced by the failure net is observed while the failure bet is being subjected to the stress. The testing in this manner assists in identifying the failure net as a failure source of the device.
PCT/US2001/019943 2000-06-22 2001-06-21 Diagnosting reliability of vias by e-beam probing WO2001098788A2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
KR1020027017488A KR100912847B1 (en) 2000-06-22 2001-06-21 Reliability of vias and diagnosis by e-beam probing
MXPA02012058A MXPA02012058A (en) 2000-06-22 2001-06-21 Reliability of vias and diagnosis by e-beam probing.
AU7583801A AU7583801A (en) 2000-06-22 2001-06-21 Reliability of vias and diagnosis by e-beam probing
EP01953382A EP1292838A2 (en) 2000-06-22 2001-06-21 Diagnosting reliability of vias by e-beam probing
IL15310501A IL153105A0 (en) 2000-06-22 2001-06-21 Reliability of vias and diagnosis by e-beam probing
JP2002504497A JP2004507078A (en) 2000-06-22 2001-06-21 E-beam probing for path and diagnostic reliability
AU2001275838A AU2001275838B2 (en) 2000-06-22 2001-06-21 Diagnosting reliability of vias by E-beam probing
CA002409411A CA2409411A1 (en) 2000-06-22 2001-06-21 Diagnosting reliability of vias by e-beam probing
HK03108208A HK1056013A1 (en) 2000-06-22 2003-11-12 Reliability of vias and diagnosis by electronic beam probing.

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US21357000P 2000-06-22 2000-06-22
US60/213,570 2000-06-22
US27368201P 2001-03-06 2001-03-06
US60/273,682 2001-03-06
US09/877,885 US6573735B2 (en) 2000-06-22 2001-06-08 Reliability of vias and diagnosis by e-beam probing
US09/877,885 2001-06-08

Publications (2)

Publication Number Publication Date
WO2001098788A2 WO2001098788A2 (en) 2001-12-27
WO2001098788A3 true WO2001098788A3 (en) 2002-08-29

Family

ID=27395888

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/019943 WO2001098788A2 (en) 2000-06-22 2001-06-21 Diagnosting reliability of vias by e-beam probing

Country Status (11)

Country Link
US (1) US6573735B2 (en)
EP (1) EP1292838A2 (en)
JP (1) JP2004507078A (en)
KR (2) KR100912847B1 (en)
CN (1) CN1186642C (en)
AU (2) AU2001275838B2 (en)
CA (1) CA2409411A1 (en)
HK (1) HK1056013A1 (en)
IL (1) IL153105A0 (en)
MX (1) MXPA02012058A (en)
WO (1) WO2001098788A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122753A (en) * 1990-12-20 1992-06-16 Microelectronics And Computer Technology Corporation Method of testing electrical components for defects
US5192913A (en) * 1990-12-20 1993-03-09 Microelectronics And Computer Technology Corporation Segmented charge limiting test algorithm for electrical components
US5231350A (en) * 1989-12-19 1993-07-27 Jurgen Frosien Method and apparatus for potential measurement on conductive tracks of a program-controlled integrated circuit
US5943346A (en) * 1995-09-28 1999-08-24 Nec Corporation Fault point estimating system using abnormal current and potential contrast images

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6472085A (en) * 1987-09-14 1989-03-16 Hitachi Ltd Method for testing semiconductor integrated circuit
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components
US5231135A (en) 1989-09-05 1993-07-27 Milliken Research Corporation Lightfast colored polymeric coatings and process for making same
JP3323572B2 (en) * 1993-03-15 2002-09-09 浜松ホトニクス株式会社 EO probe positioning method for voltage measurement device
JP2861849B2 (en) * 1994-08-31 1999-02-24 日本電気株式会社 Wiring test method and device on semiconductor integrated circuit chip

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231350A (en) * 1989-12-19 1993-07-27 Jurgen Frosien Method and apparatus for potential measurement on conductive tracks of a program-controlled integrated circuit
US5122753A (en) * 1990-12-20 1992-06-16 Microelectronics And Computer Technology Corporation Method of testing electrical components for defects
US5192913A (en) * 1990-12-20 1993-03-09 Microelectronics And Computer Technology Corporation Segmented charge limiting test algorithm for electrical components
US5943346A (en) * 1995-09-28 1999-08-24 Nec Corporation Fault point estimating system using abnormal current and potential contrast images

Also Published As

Publication number Publication date
HK1056013A1 (en) 2004-01-30
WO2001098788A2 (en) 2001-12-27
KR100912847B1 (en) 2009-08-18
KR20080081082A (en) 2008-09-05
CN1186642C (en) 2005-01-26
JP2004507078A (en) 2004-03-04
AU7583801A (en) 2002-01-02
EP1292838A2 (en) 2003-03-19
MXPA02012058A (en) 2003-06-06
US6573735B2 (en) 2003-06-03
CN1437710A (en) 2003-08-20
IL153105A0 (en) 2003-06-24
KR20030014723A (en) 2003-02-19
AU2001275838B2 (en) 2006-05-11
US20020186028A1 (en) 2002-12-12
CA2409411A1 (en) 2001-12-27

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