WO2001091177A3 - Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback - Google Patents
Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback Download PDFInfo
- Publication number
- WO2001091177A3 WO2001091177A3 PCT/US2001/012358 US0112358W WO0191177A3 WO 2001091177 A3 WO2001091177 A3 WO 2001091177A3 US 0112358 W US0112358 W US 0112358W WO 0191177 A3 WO0191177 A3 WO 0191177A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- grain size
- recipe
- parameters based
- deposition parameters
- polysilicon layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01927067A EP1290727A2 (en) | 2000-05-24 | 2001-04-16 | Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback |
AU2001253553A AU2001253553A1 (en) | 2000-05-24 | 2001-04-16 | Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback |
JP2001587474A JP2003534661A (en) | 2000-05-24 | 2001-04-16 | Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/577,769 | 2000-05-24 | ||
US09/577,769 US6511898B1 (en) | 2000-05-24 | 2000-05-24 | Method for controlling deposition parameters based on polysilicon grain size feedback |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001091177A2 WO2001091177A2 (en) | 2001-11-29 |
WO2001091177A3 true WO2001091177A3 (en) | 2002-07-18 |
Family
ID=24310074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/012358 WO2001091177A2 (en) | 2000-05-24 | 2001-04-16 | Method and apparatus for controlling deposition parameters based on polysilicon grain size feedback |
Country Status (5)
Country | Link |
---|---|
US (1) | US6511898B1 (en) |
EP (1) | EP1290727A2 (en) |
JP (1) | JP2003534661A (en) |
AU (1) | AU2001253553A1 (en) |
WO (1) | WO2001091177A2 (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7102763B2 (en) * | 2000-07-08 | 2006-09-05 | Semitool, Inc. | Methods and apparatus for processing microelectronic workpieces using metrology |
US6428673B1 (en) * | 2000-07-08 | 2002-08-06 | Semitool, Inc. | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology |
US6747734B1 (en) | 2000-07-08 | 2004-06-08 | Semitool, Inc. | Apparatus and method for processing a microelectronic workpiece using metrology |
KR100979071B1 (en) * | 2002-02-22 | 2010-08-31 | 에이저 시스템즈 인크 | Chemical mechanical polishing of dual orientation polycrystalline materials |
US20040108212A1 (en) * | 2002-12-06 | 2004-06-10 | Lyndon Graham | Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces |
US20050031188A1 (en) * | 2003-08-10 | 2005-02-10 | Luu Victor Van | Systems and methods for characterizing a sample |
US6980873B2 (en) | 2004-04-23 | 2005-12-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment |
US7437404B2 (en) * | 2004-05-20 | 2008-10-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for improving equipment communication in semiconductor manufacturing equipment |
US7292906B2 (en) * | 2004-07-14 | 2007-11-06 | Tokyo Electron Limited | Formula-based run-to-run control |
US8352062B2 (en) * | 2009-03-11 | 2013-01-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Advanced process control for gate profile control |
JP5766647B2 (en) * | 2012-03-28 | 2015-08-19 | 東京エレクトロン株式会社 | Heat treatment system, heat treatment method, and program |
EP3801971A4 (en) * | 2018-04-06 | 2021-11-03 | Ivaldi Group, Inc. | Acoustic-energy based material deposition and repair |
JP6959190B2 (en) * | 2018-07-24 | 2021-11-02 | 旭化成エレクトロニクス株式会社 | Learning processing equipment, learning processing method, compound semiconductor manufacturing method and program |
JP6959191B2 (en) | 2018-07-25 | 2021-11-02 | 旭化成エレクトロニクス株式会社 | Learning processing equipment, learning processing method, compound semiconductor manufacturing method, and program |
CN110993523A (en) * | 2019-12-26 | 2020-04-10 | 上海华虹宏力半导体制造有限公司 | Method for measuring grain size |
US20230166329A1 (en) * | 2021-12-01 | 2023-06-01 | Keng Hsu | Intermittent material-tool interaction control enabling continuous deposition of solid metal voxels using local high-frequency, small-displacement oscillatory strain energy |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4571685A (en) * | 1982-06-23 | 1986-02-18 | Nec Corporation | Production system for manufacturing semiconductor devices |
US5719495A (en) * | 1990-12-31 | 1998-02-17 | Texas Instruments Incorporated | Apparatus for semiconductor device fabrication diagnosis and prognosis |
US5835225A (en) * | 1994-11-30 | 1998-11-10 | Micron Technology, Inc. | Surface properties detection by reflectance metrology |
US5993893A (en) * | 1997-02-19 | 1999-11-30 | Nec Corporation | Evaluation method for polycrystalline silicon film |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4332833A (en) * | 1980-02-29 | 1982-06-01 | Bell Telephone Laboratories, Incorporated | Method for optical monitoring in materials fabrication |
JPS6094757A (en) * | 1983-10-20 | 1985-05-27 | Fujitsu Ltd | Resistor |
JPH03229456A (en) * | 1990-02-05 | 1991-10-11 | Rohm Co Ltd | Manufacture of semiconductor device |
JP3209789B2 (en) * | 1992-03-28 | 2001-09-17 | 鐘淵化学工業株式会社 | Polysilicon thin film deposit and its manufacturing method |
JPH05308053A (en) * | 1992-04-08 | 1993-11-19 | Nec Corp | Chemical vapor growth equipment |
JPH0758031A (en) * | 1993-08-18 | 1995-03-03 | Nissin Electric Co Ltd | Ion deposition thin film forming apparatus and film forming method using the same |
US5633177A (en) * | 1993-11-08 | 1997-05-27 | Advanced Micro Devices, Inc. | Method for producing a semiconductor gate conductor having an impurity migration barrier |
JPH0817743A (en) * | 1994-06-29 | 1996-01-19 | Sony Corp | Cvd device and film formation method using it |
JP3658213B2 (en) * | 1998-11-19 | 2005-06-08 | 富士通株式会社 | Manufacturing method of semiconductor device |
US6160300A (en) * | 1999-01-26 | 2000-12-12 | Advanced Micro Devices, Inc. | Multi-layer gate conductor having a diffusion barrier in the bottom layer |
-
2000
- 2000-05-24 US US09/577,769 patent/US6511898B1/en not_active Expired - Fee Related
-
2001
- 2001-04-16 WO PCT/US2001/012358 patent/WO2001091177A2/en active Application Filing
- 2001-04-16 JP JP2001587474A patent/JP2003534661A/en active Pending
- 2001-04-16 EP EP01927067A patent/EP1290727A2/en not_active Withdrawn
- 2001-04-16 AU AU2001253553A patent/AU2001253553A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4571685A (en) * | 1982-06-23 | 1986-02-18 | Nec Corporation | Production system for manufacturing semiconductor devices |
US5719495A (en) * | 1990-12-31 | 1998-02-17 | Texas Instruments Incorporated | Apparatus for semiconductor device fabrication diagnosis and prognosis |
US5835225A (en) * | 1994-11-30 | 1998-11-10 | Micron Technology, Inc. | Surface properties detection by reflectance metrology |
US5993893A (en) * | 1997-02-19 | 1999-11-30 | Nec Corporation | Evaluation method for polycrystalline silicon film |
Also Published As
Publication number | Publication date |
---|---|
JP2003534661A (en) | 2003-11-18 |
AU2001253553A1 (en) | 2001-12-03 |
EP1290727A2 (en) | 2003-03-12 |
WO2001091177A2 (en) | 2001-11-29 |
US6511898B1 (en) | 2003-01-28 |
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