WO2001081896B1 - An ultra-fast nucleic acid sequencing device and a method for making and using the same - Google Patents

An ultra-fast nucleic acid sequencing device and a method for making and using the same

Info

Publication number
WO2001081896B1
WO2001081896B1 PCT/US2001/013101 US0113101W WO0181896B1 WO 2001081896 B1 WO2001081896 B1 WO 2001081896B1 US 0113101 W US0113101 W US 0113101W WO 0181896 B1 WO0181896 B1 WO 0181896B1
Authority
WO
WIPO (PCT)
Prior art keywords
component
detecting
opening
region
detecting region
Prior art date
Application number
PCT/US2001/013101
Other languages
French (fr)
Other versions
WO2001081896A1 (en
Inventor
Jon Sauer
Bart Zeghbroeck
Original Assignee
Eagle Res & Dev Llc
Jon Sauer
Bart Zeghbroeck
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/653,543 external-priority patent/US6413792B1/en
Priority to EP01932615A priority Critical patent/EP1285252A1/en
Priority to US10/258,439 priority patent/US7001792B2/en
Priority to AU2001259128A priority patent/AU2001259128A1/en
Priority to JP2001578932A priority patent/JP4719906B2/en
Application filed by Eagle Res & Dev Llc, Jon Sauer, Bart Zeghbroeck filed Critical Eagle Res & Dev Llc
Publication of WO2001081896A1 publication Critical patent/WO2001081896A1/en
Publication of WO2001081896B1 publication Critical patent/WO2001081896B1/en
Priority to US11/301,259 priority patent/US8232582B2/en
Priority to US11/929,794 priority patent/US9063081B2/en
Priority to US13/409,800 priority patent/US8426232B2/en
Priority to US13/617,626 priority patent/US8546168B2/en
Priority to US14/039,142 priority patent/US9228976B2/en
Priority to US14/745,753 priority patent/US9410923B2/en
Priority to US15/231,480 priority patent/US9758824B2/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6813—Hybridisation assays
    • C12Q1/6816—Hybridisation assays characterised by the detection means
    • C12Q1/6825—Nucleic acid detection involving sensors
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6869—Methods for sequencing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Abstract

A system and method employing at least one semiconductor device, or an arrangement of insulating and metal layers, having at least one detecting region which can include, for example, a recess or opening therein, for detecting a charge representative of a component of a polymer, such as a nucleic acid strand, proximate to the detecting region, and a method for manufacturing such a semiconductor device. The system and method can thus be used for sequencing individual nucleotides or bases of ribonucleic acid (RNA) or deoxyribonucleic acid (DNA). The semiconductor device includes at least two doped regions, such as two n-typed regions implanted in a p-typed semiconductor layer or two p-typed regions implanted in an n-typed semiconductor layer. The detecting region permits a current to pass between the two doped regions in response to the presence of the component of the polymer, such as a base of a DNA or RNA strand. The current has characteristics representative of the component of the polymer, such as characteristics representative of the detected base of the DNA or RNA strand.

Claims

- 36 -
AMENDED CLAIMS
[received by the International Bureau on 6 November 2001 (06.11.01); original claims 1-55 replaced by new claims 1-76 (12 pages)]
1. A system for detecting at least one polymer, comprising: at least one semiconductor device having at least one detecting region, adapted to passively detect a charge of a component of said polymer proximate to said detecting region.
2. A system as claimed in claim 1, wherein: said component includes a base in a nucleic acid strand: and said detecting region is adapted to detect said charge representative of said base in said nucleic acid strand.
3. A system as claimed in claim 1 , wherein: said detecting region is further adapted to generate a signal representative of said detected charge.
4. A system as claimed in claim 1 , wherein: said detecting region includes a region of said semiconductor device defining an opening in said semiconductor device having a cross-section sufficient to enable said polymer to enter said opening, such that said detecting region is adapted to detect said charge of said component in said opening.
5. A system as claimed in claim 4, further comprising: an excitation device, adapted to generate movement in said semiconductor device to facilitate movement of said polymer through said opening.
6. A system as claimed m claim 4, wherein: said opening has a diameter within the range of about 1 am to about 10 run.
7. A system as claimed in claim 4, wherein: said opening has a diameter of about 1 run.
8. A system as claimed in claim 4, wherein: said region of said detecting region includes an insulating layer defining said opening.
9. A system as claimed in claim 8, whereb: said insulating layer includes an oxide layer.
10. A system as claimed m claim 4, wherein: said region of said detecting region includes an undoped semiconductor layer.
11. A system as claimed in claim 4, wherein: said region of said detecting region includes an oxide layer defining sa d opening, said oxide layer including at least one silicon nanocrystal.
12. A system as claimed in claim 4, wherein: said opening is non-circular.
13. A system as claimed in claim , wherein: said detectmg region includes a region of said semiconductor device defining a recess in said semiconductor device, such that said detecting region is adapted to detect said charge of said component m said recess.
14. A system as claimed in claim 1, wherein: said semiconductor device includes a plurality of said detectmg regions; and each said detecting region is adapted to detect a charge representative of a component of said at least one polymer proximate thereto .
15. A system as claimed in claim 1, wherein: said semiconductor device further includes at least two doped regions; and said detecting region is adapted to pass a current between said two doped regions in response to a presence of said component proximate to said detecting region. - 38 -
16. A system as claimed m claim 1 , wherein: said semiconductor device includes a plurality of doped regions, and a respective detectmg region associated with each respective pair of said doped regions, such that each said respective detecting region is adapted, in response to a presence of a component proximate thereto, to pass a respective current between its said respective pair of doped regions.
17. A system as claimed in claim 1, further comprising: a plurality of said semiconductor devices.
18. A system as claimed in claim 1 , further comprising: a detector, adapted to detect a signal generated by said detecting region in response to said component proximate thereto.
19. A system as claimed in claim 1 , wherein: said at least one semiconductor device is adapted to passively detect said charge of said component without a portion of said semiconductor device binding with said component or chemically reacting with said component.
20. A system as claimed in claim 1 , wherein: said at least one semiconductor device is adapted to passively detect a single said charge of said component.
21. A system as claimed in claim 1, wherein: said at least one semiconductor device is adapted to passively detect said charge of said component while said component is moving.
22. A method for detecting at least one polymer, comprising the steps of: positioning a portion of said polymer proximate to a detecting region of at least one semiconductor device; and at said detecting region, passively detecting a charge of a component of said polymer proximate to said detecting region. - 39 -
23. A method as claimed in claim 22, wherein: said component includes a base in a nucleic acid strand; and said detecting step detects said charge representative of said base in said nucleic acid strand.
24. A method as claimed in claim 22, further comprising the step of: generating at said detectmg region a signal representative of said detected charge.
25. A method as claimed in claim 22, wherein: said detecting region includes a region of said semiconductor device defining an opening in said semiconductor device having a cross-section sufficient to enable said polymer to enter said opening; and said detecting step detects said charge of said component in said opening.
26. A method as claimed in claim 25, further comprising the step of: generating movement in said semiconductor device to facilitate movement of said polymer through said opening.
27. A method as claimed in claim 25, wherem: said opening has a diameter within the range of about 1 nm to about 10 nm.
28. A method as claimed in claim 25, wherein: said opening has a diameter of about 1 nm.
29. A method as claimed in claim 22, wherein: said detecting region includes a region of said semiconductor device defining a recess in said semiconductor device; and said detecting step detects said charge of said component in said recess.
30. A method as claimed in claim 22, wherein: said semiconductor device includes a plurality of said detecting regions; and - 40 -
said detecting step includes the step of detecting, at each said detecting region, a charge representative of a component of said at least one polymer proximate thereto.
3 . A method as claimed in claim 22, wherein: said semiconductor device further includes at least two doped regions; and said method further includes the step of passing a current between said two doped regions in response to a presence of said component proximate to said detecting region.
32. A method as claimed in claim 22, wherein: said semiconductor device includes a plurality of doped regions, and a respective detecting region associated with each respective pair of said doped regions; and said method further includes the step of passing, at each said respective detecting region in response to a presence of a component proximate thereto, a respective current between its said respective pair of doped regions.
33. A method as claimed in claim 22, wherein: said positioning step positions a respective portion of each of a plurality of said polymers proximate to a respective detecting region of a respective semiconductor device; and said detecting step detects, at each said respective detecting region, a charge representative of a component of said respective polymer proximate to said respective detecting region.
34. A method as claimed in claim 22, further comprising the step of: detecting a signal generated by said detecting region in response to said component proximate thereto.
35. A method as claimed in claim 22, wherein: said detecting passively detects said charge of said component without a portion of said semiconductor device binding with said component or chemically reacting with said component. - 41 -
36. A method as claimed in claim 22, wherein: said detecting passively detects a single said charge of said component.
37. A method for manufacturing a device for detecting a polymer, comprising the steps of: providing a semiconductor structure comprising at least one semiconductor layer; and creating a detecting region in said semiconductor structure, said detecting region being adapted to passively detect a charge of a component of said polymer proximate to said detecting region.
38. A method as claimed in claim 37, wherem: said component includes a base in a nucleic acid strand; and said creating step creates said detecting region which is adapted to detect said charge representative of said base in said nucleic acid strand.
39. A method as claimed in claim 37, further comprising the step of: creating an opening in said semiconductor structure, said opening having a cross- section sufficient to enable a portion of said polymer to pass theretlirough, and being positioned in relation to said detecting region such that said detecting region is adapted to detect said charge representative of said component in said opening.
40. A method as claimed in claim 39, wherein said opening creating step includes the step of: forming an undoped semiconductor layer on a wall of said semiconductor layer forming said opening to decrease said cross-section of said opening.
41. A method as claimed in claim 39, wherein said opening creating step includes the step of: forming an oxide layer on a wall of said semiconductor layer forming said opening to decrease said cross-section of said opening, said oxide layer including at least one silicon nanocrystal. - 42 -
42. A method as claimed in claim 39, wherein said opening creating step includes the step of: forming an insulating layer on a wall of said semiconductor layer forming said opening to decrease said cross-section of said opening.
43. A method as claimed in claim 42, wherem said opening creating step further includes: forming said insulating layer including an oxide.
44. A method as claimed in claim 39, wherein: said opening has a diameter within the range of about 1 nm to about 10 nm.
45. A method as claimed in claim 39, wherem: said opening has a diameter of about 1 nm.
46. A method as claimed m claim 37, further comprising the step of: creating a recess m said semiconductor structure, positioned in relation to said detecting region such that said detecting region is adapted to detect said charge representative of said component in said recess.
47. A method as claimed in claim 37, further comprising the steps of: creating at least two doped regions in said semiconductor layer, said doped regions being positioned with respect to said detecting region such that said detecting region is adapted to pass a current between said doped regions in response to said component of said polymer proximate thereto.
48. A method as claimed in claim 47, wherein: said doped region creating step creates said doped regions having a first doping such that said doped regions are separated by a portion of said semiconductor layer having a second doping. - 43 -
49. A method as claimed in claim 47, wherein: said doped region creating step creates said doped regions as a stack of doped regions, each having a first doping and being separated by a layer having a second doping.
50. A method as claimed in claim 47, wherein: each of said doped regions includes a -type doping.
51. A method as claimed in claim 47, wherein: each of said doped regions includes anjn-type doping.
52. A method as claimed in claim 37, wherein: said detecting region is adapted to passively detect said charge of said component without a portion of said semiconductor clevice binding with said component or chemically reacting with said component.
53. A method as claimed in claim 37, wherein: said detecting region is adapted to passively detect a single said charge of said component.
54. A system for detecting at least one polymer, comprising: at least one structure comprising an insulating layer and at least one metal layer, arranged to form at least one detecting region adapted to passively detect a charge of a component of said polymer proximate to said detecting region.
55. A system as claimed in claim 54, wherein: said insulating layer contacts said metal layer.
56. A system as claimed in claim 54, wherein: said structure comprises two metal layers, said insulating layer being disposed between said two metal layers. - 44 -
Figure imgf000010_0001
said detecting region is adapted to detect said harge of said component in said
58. A system as claimed in claim 5:7, further comprising: an excitation device, adapted to generjate movement in said structure to facilitate movement of said polymer through said opening.
59. A system as claimed in claim 57, wherein: said opening is non-circular.
60. A system as claimed in claim 5-4, wherein: said detecting region includes a region of said structure defining a recess in said structure, such that said detecting region is adapted to detect said charge of said component in said recess.
61. A system as claimed in claim 54, wherein: said at least one structure is adapted to passively detect said charge of said component without a portion of said semiconductor device binding with said component or chemically reacting with said component.
62. A system as claimed in claim 54, wherein: said at least one structure is adapted to passively detect a single said charge of said component.
63. A method for manufacturing a device for detecting a polymer, comprising the steps of: providing a structure comprising an insulating layer and at least one metal layer; and - 45 -
creating a detecting region in said structure, said detecting region being adapted to passively detect a charge of a component of said polymer proximate to said detecting region.
Figure imgf000011_0001
id i i charge representative of said base in said nucleic acid strand.
65. A method as claimed in claim 63, further comprising the step of: creating an opening in said structure, said opening having a cross-section sufficient to enable a portion of said polymer to pass therethrough, and being positioned in relation to said detecting region such that] said detecting region is adapted to detect said charge representative of said component in said opening.
66. A method as claimed in claim 65, wherein: said opening is non-circular.
67. A method as claimed in claim 63, further comprising the step of: creating a recess in said structure, positioned in relation to said detectmg region such that said detecting region is adapted to] detect said charge representative of said component in said recess.
68. A method as claimed in claim ώ, wherein: said detecting region passively detects! said charge of said component without a portion of said semiconductor device binding with said component or chemically reacting with said component.
69. A method as claimed in claim 63, wherein: said detecting region passively detects a single said charge of said component.
70. A system for detecting at least one polymer, comprising: - 46 -
a plurality of detecting devices, each having at least one detecting region, adapted to passively detect a charge of a component of said polymer proximate to said detecting region; and a reader, adapted to selectably obtain a respective reading from each of said detecting devices, said respective readings representing respective charges detected by said detecting devices.
71. A system as claimed in claim 170, wherem at least one of said detectmg devices comprises: at least one semiconductor device having at least one said detecting region, adapted to detect a charge representative of a component of said polymer proximate to said detecting region.
72. A system as claimed in claim 170, wherein at least one of said detecting devices comprises: a structure comprising an insulating layer and at least one metal layer arranged to define at least one said detecting region, adapted to detect a charge representative of a component of said polymer proximate to said detecting region.
73. A system as claimed in claim 70, wherein: said detecting devices are each adapted to passively detect said charge of said component without a portion of said semiconductor device binding with said component or chemically reacting with said component.
74. A system as claimed in claim 70, wherein: said detectmg devices are each adaptedito passively detect a single said charge of said component.
75. A system for detecting at least one polymer, comprising: at least one semiconductor device having at least one detecting region, adapted to detect a charge representative of a component of said polymer proximate to said detecting region, said detecting region including a region of said semiconductor device - 47 -
defining an opening in said semiconductor device having a cross-section sufficient to enable said polymer to enter said opening, such that said detecting region is adapted to detect said charge of said component in said opening; and said region of said detecting region includes an oxide layer defining said opening, said oxide layer including at least one silicon nanocrystal.
76. A method for manufacturing a;|device for detecting a polymer, comprising the steps of: providing a semiconductor structure comprising at least one semiconductor layer; creating a detecting region in said semiconductor structure, said detecting region being adapted to detect a charge representative of a component of said polymer proximate to said detecting region; and creating an opening in said semiconductor structure, said opening having a cross- section sufficient to enable a portion of said] polymer to pass therethrough, and being positioned in relation to said detecting region] such that said detecting region is adapted to detect said charge representative of said component in said opening; wherein said opening creating step includes the step of forming an oxide layer on a wall of said semiconductor layer forming said opening to decrease said cross-section of said opening, said oxide layer including at leask one silicon nanocrystal.
PCT/US2001/013101 2000-04-24 2001-04-24 An ultra-fast nucleic acid sequencing device and a method for making and using the same WO2001081896A1 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
EP01932615A EP1285252A1 (en) 2000-04-24 2001-04-24 An ultra-fast nucleic acid sequencing device and a method for making and using the same
US10/258,439 US7001792B2 (en) 2000-04-24 2001-04-24 Ultra-fast nucleic acid sequencing device and a method for making and using the same
AU2001259128A AU2001259128A1 (en) 2000-04-24 2001-04-24 An ultra-fast nucleic acid sequencing device and a method for making and using the same
JP2001578932A JP4719906B2 (en) 2000-04-24 2001-04-24 Field effect transistor device for ultrafast nucleic acid sequencing
US11/301,259 US8232582B2 (en) 2000-04-24 2005-12-13 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US11/929,794 US9063081B2 (en) 2000-04-24 2007-10-30 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US13/409,800 US8426232B2 (en) 2000-04-24 2012-03-01 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US13/617,626 US8546168B2 (en) 2000-04-24 2012-09-14 Method and apparatus for detecting nucleotides
US14/039,142 US9228976B2 (en) 2000-04-24 2013-09-27 Method and apparatus for detecting nucleotides
US14/745,753 US9410923B2 (en) 2000-04-24 2015-06-22 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US15/231,480 US9758824B2 (en) 2000-04-24 2016-08-08 Ultra-fast nucleic acid sequencing device and a method for making and using the same

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US19913000P 2000-04-24 2000-04-24
US60/199,130 2000-04-24
US21768100P 2000-07-12 2000-07-12
US60/217,681 2000-07-12
US09/653,543 2000-08-31
US09/653,543 US6413792B1 (en) 2000-04-24 2000-08-31 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US25958401P 2001-01-04 2001-01-04
US60/259,584 2001-01-04

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
US09/653,543 Continuation-In-Part US6413792B1 (en) 2000-04-24 2000-08-31 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US14/745,753 Continuation-In-Part US9410923B2 (en) 2000-04-24 2015-06-22 Ultra-fast nucleic acid sequencing device and a method for making and using the same

Related Child Applications (3)

Application Number Title Priority Date Filing Date
US10/258,439 A-371-Of-International US7001792B2 (en) 2000-04-24 2001-04-24 Ultra-fast nucleic acid sequencing device and a method for making and using the same
US10258439 A-371-Of-International 2001-04-24
US11/301,259 Division US8232582B2 (en) 2000-04-24 2005-12-13 Ultra-fast nucleic acid sequencing device and a method for making and using the same

Publications (2)

Publication Number Publication Date
WO2001081896A1 WO2001081896A1 (en) 2001-11-01
WO2001081896B1 true WO2001081896B1 (en) 2002-02-14

Family

ID=27498237

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/013101 WO2001081896A1 (en) 2000-04-24 2001-04-24 An ultra-fast nucleic acid sequencing device and a method for making and using the same

Country Status (4)

Country Link
EP (1) EP1285252A1 (en)
JP (1) JP4719906B2 (en)
AU (1) AU2001259128A1 (en)
WO (1) WO2001081896A1 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8692298B2 (en) 2006-12-14 2014-04-08 Life Technologies Corporation Chemical sensor array having multiple sensors per well
US8858782B2 (en) 2010-06-30 2014-10-14 Life Technologies Corporation Ion-sensing charge-accumulation circuits and methods
US8963216B2 (en) 2013-03-13 2015-02-24 Life Technologies Corporation Chemical sensor with sidewall spacer sensor surface
US8962366B2 (en) 2013-01-28 2015-02-24 Life Technologies Corporation Self-aligned well structures for low-noise chemical sensors
US8983783B2 (en) 2010-06-30 2015-03-17 Life Technologies Corporation Chemical detection device having multiple flow channels
US9039888B2 (en) 2006-12-14 2015-05-26 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
US9110015B2 (en) 2010-09-24 2015-08-18 Life Technologies Corporation Method and system for delta double sampling
US9109251B2 (en) 2004-06-25 2015-08-18 University Of Hawaii Ultrasensitive biosensors
US9116117B2 (en) 2013-03-15 2015-08-25 Life Technologies Corporation Chemical sensor with sidewall sensor surface
US9128044B2 (en) 2013-03-15 2015-09-08 Life Technologies Corporation Chemical sensors with consistent sensor surface areas
US9194000B2 (en) 2008-06-25 2015-11-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9228971B2 (en) 2004-11-12 2016-01-05 The Board Of Trustees Of The Leland Stanford Junior University Charge perturbation detection system for DNA and other molecules
US9269708B2 (en) 2006-12-14 2016-02-23 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9270264B2 (en) 2012-05-29 2016-02-23 Life Technologies Corporation System for reducing noise in a chemical sensor array

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6413792B1 (en) * 2000-04-24 2002-07-02 Eagle Research Development, Llc Ultra-fast nucleic acid sequencing device and a method for making and using the same
US7250115B2 (en) 2003-06-12 2007-07-31 Agilent Technologies, Inc Nanopore with resonant tunneling electrodes
US7347921B2 (en) 2003-07-17 2008-03-25 Agilent Technologies, Inc. Apparatus and method for threading a biopolymer through a nanopore
US7138672B2 (en) 2003-09-25 2006-11-21 Agilent Technologies, Inc. Apparatus and method for making a tensile diaphragm with an insert
US6846702B1 (en) 2003-10-24 2005-01-25 Agilent Technologies, Inc. Nanopore chip with N-type semiconductor
US7279337B2 (en) 2004-03-10 2007-10-09 Agilent Technologies, Inc. Method and apparatus for sequencing polymers through tunneling conductance variation detection
AU2005272823B2 (en) 2004-08-13 2012-04-12 President And Fellows Of Harvard College An ultra high-throughput opti-nanopore DNA readout platform
US7888013B2 (en) 2004-08-27 2011-02-15 National Institute For Materials Science Method of analyzing DNA sequence using field-effect device, and base sequence analyzer
US8563237B2 (en) * 2004-09-30 2013-10-22 Agilent Technologies, Inc. Biopolymer resonant tunneling with a gate voltage source
ATE529734T1 (en) * 2005-04-06 2011-11-15 Harvard College MOLECULAR CHARACTERIZATION WITH CARBON NANOTUBE CONTROL
US20100291548A1 (en) 2006-03-12 2010-11-18 Applera Corporation Methods of Detecting Target Nucleic Acids
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
GB0625070D0 (en) * 2006-12-15 2007-01-24 Imp Innovations Ltd Characterization of molecules
US8003319B2 (en) 2007-02-02 2011-08-23 International Business Machines Corporation Systems and methods for controlling position of charged polymer inside nanopore
US9034637B2 (en) * 2007-04-25 2015-05-19 Nxp, B.V. Apparatus and method for molecule detection using nanopores
US8192600B2 (en) 2007-09-27 2012-06-05 The Board Of Trustees Of The University Of Illinois Solid state device
US20100137143A1 (en) 2008-10-22 2010-06-03 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US20100301398A1 (en) 2009-05-29 2010-12-02 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US8776573B2 (en) 2009-05-29 2014-07-15 Life Technologies Corporation Methods and apparatus for measuring analytes
US20120261274A1 (en) 2009-05-29 2012-10-18 Life Technologies Corporation Methods and apparatus for measuring analytes
JP5586001B2 (en) * 2009-08-26 2014-09-10 独立行政法人物質・材料研究機構 Nanoribbon and manufacturing method thereof, FET using nanoribbon and manufacturing method thereof, base sequence determination method using nanoribbon and apparatus thereof
WO2011108540A1 (en) 2010-03-03 2011-09-09 国立大学法人大阪大学 Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide
US8354336B2 (en) 2010-06-22 2013-01-15 International Business Machines Corporation Forming an electrode having reduced corrosion and water decomposition on surface using an organic protective layer
US8598018B2 (en) 2010-06-22 2013-12-03 International Business Machines Corporation Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer
US8940148B2 (en) 2010-06-22 2015-01-27 International Business Machines Corporation Nano-fluidic field effective device to control DNA transport through the same
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
WO2012006222A1 (en) 2010-07-03 2012-01-12 Life Technologies Corporation Chemically sensitive sensor with lightly doped drains
WO2012036679A1 (en) 2010-09-15 2012-03-22 Life Technologies Corporation Methods and apparatus for measuring analytes
GB201113309D0 (en) * 2011-08-02 2011-09-14 Izon Science Ltd Characterisation of particles
EP2574923A1 (en) * 2011-09-28 2013-04-03 Koninklijke Philips Electronics N.V. Apparatus for the processing of single molecules
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US9758821B2 (en) 2012-04-17 2017-09-12 International Business Machines Corporation Graphene transistor gated by charges through a nanopore for bio-molecular sensing and DNA sequencing
CN103424457B (en) * 2012-05-18 2016-02-10 中国科学院微电子研究所 Biosensor and DNA sequencing method thereof
JP6033602B2 (en) * 2012-08-08 2016-11-30 株式会社日立ハイテクノロジーズ Biomolecule detection method, biomolecule detection apparatus, and analytical device
JP6276182B2 (en) 2012-08-17 2018-02-07 クオンタムバイオシステムズ株式会社 Sample analysis method
JP6282036B2 (en) 2012-12-27 2018-02-21 クオンタムバイオシステムズ株式会社 Method and control apparatus for controlling movement speed of substance
US9080968B2 (en) 2013-01-04 2015-07-14 Life Technologies Corporation Methods and systems for point of use removal of sacrificial material
US9841398B2 (en) 2013-01-08 2017-12-12 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
CN103193189B (en) * 2013-02-21 2015-08-26 东南大学 A kind of multi-electrode nanopore device for DNA detection and manufacture method thereof
US8841217B1 (en) 2013-03-13 2014-09-23 Life Technologies Corporation Chemical sensor with protruded sensor surface
JP6671274B2 (en) 2013-03-15 2020-03-25 ライフ テクノロジーズ コーポレーション Chemical device with thin conductive element
US9835585B2 (en) 2013-03-15 2017-12-05 Life Technologies Corporation Chemical sensor with protruded sensor surface
CN105264366B (en) 2013-03-15 2019-04-16 生命科技公司 Chemical sensor with consistent sensor surface area
US20140336063A1 (en) 2013-05-09 2014-11-13 Life Technologies Corporation Windowed Sequencing
US10458942B2 (en) 2013-06-10 2019-10-29 Life Technologies Corporation Chemical sensor array having multiple sensors per well
US9377431B2 (en) 2013-07-24 2016-06-28 Globalfoundries Inc. Heterojunction nanopore for sequencing
EP3578987A1 (en) 2013-09-18 2019-12-11 Quantum Biosystems Inc. Biomolecule sequencing devices, systems and methods
JP2015077652A (en) 2013-10-16 2015-04-23 クオンタムバイオシステムズ株式会社 Nano-gap electrode and method for manufacturing same
JP6208253B2 (en) * 2013-11-08 2017-10-04 株式会社日立ハイテクノロジーズ DNA transport control device, manufacturing method thereof, and DNA sequencing apparatus
JP2015154750A (en) * 2014-02-20 2015-08-27 国立大学法人大阪大学 Electrode for biomolecule sequencing apparatus, and biomolecule sequencing apparatus, method, and program
US10438811B1 (en) 2014-04-15 2019-10-08 Quantum Biosystems Inc. Methods for forming nano-gap electrodes for use in nanosensors
WO2015170782A1 (en) 2014-05-08 2015-11-12 Osaka University Devices, systems and methods for linearization of polymers
JP6434744B2 (en) * 2014-08-07 2018-12-05 ローラス株式会社 Semiconductor biosensor
US10338057B2 (en) * 2014-09-11 2019-07-02 Hitachi, Ltd. Device and method for forming same
JP6259929B2 (en) * 2014-11-12 2018-01-10 株式会社日立製作所 Biological polymer analyzer and biological polymer analyzing method
US10077472B2 (en) 2014-12-18 2018-09-18 Life Technologies Corporation High data rate integrated circuit with power management
KR102593647B1 (en) 2014-12-18 2023-10-26 라이프 테크놀로지스 코포레이션 High data rate integrated circuit with transmitter configuration
CN111505087A (en) 2014-12-18 2020-08-07 生命科技公司 Method and apparatus for measuring analytes using large scale FET arrays
US11124827B2 (en) * 2016-06-23 2021-09-21 Roche Sequencing Solutions, Inc. Period-to-period analysis of AC signals from nanopore sequencing
KR101737946B1 (en) 2016-08-16 2017-05-19 서울대학교산학협력단 Method of manufacturing sample for film property measurement and analysis, and sample manuvactured by the method
WO2018067457A1 (en) * 2016-10-03 2018-04-12 So Daniel Wai Cheong Method and apparatus for the analysis and identification of molecules
US20180334697A1 (en) * 2017-05-16 2018-11-22 Sensor Kinesis Corporation Method for isothermal dna detection using a modified crispr/cas system and the apparatus for detection by surface acoustic waves for gene editing
WO2019160925A1 (en) 2018-02-16 2019-08-22 Illumina, Inc. Device for sequencing
CN110191760B (en) * 2019-04-16 2022-09-27 京东方科技集团股份有限公司 Micro-channel device, manufacturing method thereof and micro-fluidic system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8522785D0 (en) * 1985-09-14 1985-10-16 Emi Plc Thorn Chemical-sensitive semiconductor device
US5846708A (en) * 1991-11-19 1998-12-08 Massachusetts Institiute Of Technology Optical and electrical methods and apparatus for molecule detection
US5871918A (en) * 1996-06-20 1999-02-16 The University Of North Carolina At Chapel Hill Electrochemical detection of nucleic acid hybridization
JPH08278281A (en) * 1995-04-07 1996-10-22 Hitachi Ltd Field effect type chemical substance detection device and dna sequanator using it
WO1997021094A1 (en) * 1995-12-01 1997-06-12 Innogenetics N.V. Impedimetric detection system and method of production thereof
US6060327A (en) * 1997-05-14 2000-05-09 Keensense, Inc. Molecular wire injection sensors
WO1999036573A1 (en) * 1998-01-20 1999-07-22 Schichman Steven A Detection of genetic information
JP3245124B2 (en) * 1998-02-19 2002-01-07 インターナショナル・ビジネス・マシーンズ・コーポレーション Field effect transistor having vertical gate sidewalls and method of manufacturing the same
JP3233207B2 (en) * 1998-03-20 2001-11-26 日本電気株式会社 Method for manufacturing field effect transistor
US6002131A (en) * 1998-03-25 1999-12-14 The Board Of Trustees Of The Leland Stanford Junior University Scanning probe potentiometer
EP1192103A1 (en) * 1999-06-22 2002-04-03 President And Fellows of Harvard College Control of solid state dimensional features

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9109251B2 (en) 2004-06-25 2015-08-18 University Of Hawaii Ultrasensitive biosensors
US9228971B2 (en) 2004-11-12 2016-01-05 The Board Of Trustees Of The Leland Stanford Junior University Charge perturbation detection system for DNA and other molecules
US9134269B2 (en) 2006-12-14 2015-09-15 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9404920B2 (en) 2006-12-14 2016-08-02 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
US9269708B2 (en) 2006-12-14 2016-02-23 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US8692298B2 (en) 2006-12-14 2014-04-08 Life Technologies Corporation Chemical sensor array having multiple sensors per well
US9023189B2 (en) 2006-12-14 2015-05-05 Life Technologies Corporation High density sensor array without wells
US9039888B2 (en) 2006-12-14 2015-05-26 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
US9194000B2 (en) 2008-06-25 2015-11-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US8983783B2 (en) 2010-06-30 2015-03-17 Life Technologies Corporation Chemical detection device having multiple flow channels
US9164070B2 (en) 2010-06-30 2015-10-20 Life Technologies Corporation Column adc
US9239313B2 (en) 2010-06-30 2016-01-19 Life Technologies Corporation Ion-sensing charge-accumulation circuits and methods
US8858782B2 (en) 2010-06-30 2014-10-14 Life Technologies Corporation Ion-sensing charge-accumulation circuits and methods
US9110015B2 (en) 2010-09-24 2015-08-18 Life Technologies Corporation Method and system for delta double sampling
US9270264B2 (en) 2012-05-29 2016-02-23 Life Technologies Corporation System for reducing noise in a chemical sensor array
US8962366B2 (en) 2013-01-28 2015-02-24 Life Technologies Corporation Self-aligned well structures for low-noise chemical sensors
US8963216B2 (en) 2013-03-13 2015-02-24 Life Technologies Corporation Chemical sensor with sidewall spacer sensor surface
US9128044B2 (en) 2013-03-15 2015-09-08 Life Technologies Corporation Chemical sensors with consistent sensor surface areas
US9116117B2 (en) 2013-03-15 2015-08-25 Life Technologies Corporation Chemical sensor with sidewall sensor surface

Also Published As

Publication number Publication date
WO2001081896A1 (en) 2001-11-01
AU2001259128A1 (en) 2001-11-07
JP4719906B2 (en) 2011-07-06
JP2003533676A (en) 2003-11-11
EP1285252A1 (en) 2003-02-26

Similar Documents

Publication Publication Date Title
WO2001081896B1 (en) An ultra-fast nucleic acid sequencing device and a method for making and using the same
EP2521796B1 (en) Dna sequencing methods and detectors and systems for carrying out the same
US7803542B2 (en) Signal-on architecture for electronic, oligonucleotide-based detectors
CN101668866B (en) Apparatus and method for molecule detection using nanopores
TWI287041B (en) An ultra-rapid DNA sequencing method with nano-transistors array based devices
US20060275779A1 (en) Method and apparatus for molecular analysis using nanowires
US20030231531A1 (en) Electronic gain cell based charge sensor
US20080187915A1 (en) Systems and Methods for Controlling the Position of a Charged Polymer Inside a Nanopore
US20060275778A1 (en) Method and apparatus for molecular analysis using nanoelectronic circuits
US20050100938A1 (en) Vertical impedance sensor arrangement and method for producing a vertical impedance sensor arrangement
WO2001018247A2 (en) Optical system for rapid polymer analysis
US8622223B2 (en) Membrane assemblies and methods of making and using the same
RU2003118328A (en) ELECTROCHEMICAL ELEMENT
CA2379711A1 (en) Organic semiconductor recognition complex and system
EP0810430A3 (en) A sensor and method for measuring nitrogen oxide concentration
WO2001079419A3 (en) Cellular arrays for the identification of altered gene expression
US20050202446A1 (en) Methods for biopolymer sequencing using metal inclusions
US9177769B2 (en) Interdigitated electrode configuration for ion filter
CN100403021C (en) Ionized gas sensor microarray structure based on micro-electronic fabrication technology
WO2017087908A1 (en) Nanochannel devices and methods for analysis of molecules
US20040060822A1 (en) Nanolaminate microfluidic device for mobility selection of particles
EP1020902A3 (en) Method of fabricating a split gate memory cell
Rawtani et al. Charge transfer in DNA and its diverse modelling approaches
CN105820947A (en) DNA sequencing device and use method
WO2007033283A3 (en) Disposable electrode system for detection of selected nucleic acid sequences

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ CZ DE DE DK DK DM DZ EE EE ES FI FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
AK Designated states

Kind code of ref document: B1

Designated state(s): AE AG AL AM AT AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ CZ DE DE DK DK DM DZ EE EE ES FI FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: B1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

B Later publication of amended claims
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWE Wipo information: entry into national phase

Ref document number: 2001932615

Country of ref document: EP

ENP Entry into the national phase in:

Ref country code: JP

Ref document number: 2001 578932

Kind code of ref document: A

Format of ref document f/p: F

WWE Wipo information: entry into national phase

Ref document number: 10258439

Country of ref document: US

WWP Wipo information: published in national office

Ref document number: 2001932615

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 2001932615

Country of ref document: EP