WO2001061400A3 - Two-dimensional micro-mirror array enhancements - Google Patents
Two-dimensional micro-mirror array enhancements Download PDFInfo
- Publication number
- WO2001061400A3 WO2001061400A3 PCT/US2001/005309 US0105309W WO0161400A3 WO 2001061400 A3 WO2001061400 A3 WO 2001061400A3 US 0105309 W US0105309 W US 0105309W WO 0161400 A3 WO0161400 A3 WO 0161400A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- deflection
- micro
- sensor
- dimensional micro
- conical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01934837A EP1342121A2 (en) | 2000-02-17 | 2001-02-16 | Two-dimensional micro-mirror array enhancements |
AU2001260986A AU2001260986A1 (en) | 2000-02-17 | 2001-02-16 | Two-dimensional micro-mirror array enhancements |
CA002400294A CA2400294A1 (en) | 2000-02-17 | 2001-02-16 | Two-dimensional micro-mirror array enhancements |
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18324600P | 2000-02-17 | 2000-02-17 | |
US18311700P | 2000-02-17 | 2000-02-17 | |
US60/183,246 | 2000-02-17 | ||
US60/183,117 | 2000-02-17 | ||
US20361700P | 2000-05-11 | 2000-05-11 | |
US60/203,617 | 2000-05-11 | ||
US20775200P | 2000-05-30 | 2000-05-30 | |
US60/207,752 | 2000-05-30 | ||
US71594500A | 2000-11-16 | 2000-11-16 | |
US09/715,945 | 2000-11-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2001061400A2 WO2001061400A2 (en) | 2001-08-23 |
WO2001061400A9 WO2001061400A9 (en) | 2002-10-10 |
WO2001061400A3 true WO2001061400A3 (en) | 2003-07-10 |
Family
ID=27539092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/005309 WO2001061400A2 (en) | 2000-02-17 | 2001-02-16 | Two-dimensional micro-mirror array enhancements |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1342121A2 (en) |
AU (1) | AU2001260986A1 (en) |
CA (1) | CA2400294A1 (en) |
WO (1) | WO2001061400A2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6788981B2 (en) | 2001-02-07 | 2004-09-07 | Movaz Networks, Inc. | Multiplexed analog control system for electrostatic actuator array |
EP1444543B1 (en) * | 2001-10-19 | 2008-04-23 | ION Geophysical Corporation | Digital optical switch apparatus and process for manufacturing same |
EP1518822A3 (en) * | 2001-12-06 | 2007-02-28 | Microfabrica Inc. | Complex microdevices and apparatus and methods for fabricating such devices |
CA2429508C (en) | 2002-05-28 | 2013-01-08 | Jds Uniphase Inc. | Piano mems micromirror |
US7110635B2 (en) | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Electrical x-talk shield for MEMS micromirrors |
US6968101B2 (en) | 2002-05-28 | 2005-11-22 | Jds Uniphase Inc. | Electrode configuration for piano MEMs micromirror |
US7110637B2 (en) | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Two-step electrode for MEMs micromirrors |
US7302131B2 (en) | 2002-05-28 | 2007-11-27 | Jds Uniphase Inc. | Sunken electrode configuration for MEMs Micromirror |
EP1479647B1 (en) * | 2003-05-23 | 2009-02-25 | JDS Uniphase Inc. | Electrical cross-talk shield for MEMs micromirrors |
CN1762177A (en) | 2003-07-28 | 2006-04-19 | 奥林巴斯株式会社 | Optical switch and method of controlling optical switch |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US5648618A (en) * | 1993-10-18 | 1997-07-15 | Armand P. Neukermans | Micromachined hinge having an integral torsion sensor |
-
2001
- 2001-02-16 AU AU2001260986A patent/AU2001260986A1/en not_active Abandoned
- 2001-02-16 WO PCT/US2001/005309 patent/WO2001061400A2/en not_active Application Discontinuation
- 2001-02-16 CA CA002400294A patent/CA2400294A1/en not_active Abandoned
- 2001-02-16 EP EP01934837A patent/EP1342121A2/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US5648618A (en) * | 1993-10-18 | 1997-07-15 | Armand P. Neukermans | Micromachined hinge having an integral torsion sensor |
Also Published As
Publication number | Publication date |
---|---|
EP1342121A2 (en) | 2003-09-10 |
WO2001061400A9 (en) | 2002-10-10 |
WO2001061400A2 (en) | 2001-08-23 |
CA2400294A1 (en) | 2001-08-23 |
AU2001260986A1 (en) | 2001-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4328441A (en) | Output circuit for piezoelectric polymer pressure sensor | |
WO2001061400A3 (en) | Two-dimensional micro-mirror array enhancements | |
CA2314125A1 (en) | Touch sensitive screen and its manufacturing method | |
WO2003060441A3 (en) | Sensor device having an integral bi-radial lens | |
EP0329436A3 (en) | Moisture and dew-detection sensor | |
DK0820585T3 (en) | Sensor arrays for detecting analytes in the fluid | |
EP0718632A3 (en) | Torsion beam accelerometer | |
WO2001009622A3 (en) | Micro-mechanical inertial sensors | |
DE69227050T2 (en) | Semiconductor sensor with electrostatic capacitance | |
EP1046917A3 (en) | Method of manufacturing an external force detection sensor | |
EP0611967A4 (en) | Acceleration sensor. | |
US5991990A (en) | Method for fabricating a tunneling sensor with linear force rebalance | |
WO2001025474A8 (en) | Sensor for measuring a bioanalyte such as lactate | |
JPH08240609A (en) | Capacitance-type acceleration sensor | |
EP0196839A3 (en) | Piezoelectric transducer and components therefor | |
EP0358390A3 (en) | Piezoelectric transducer | |
DE69408779T2 (en) | Semiconductor acceleration sensor with reduced deflection of the sensor disk | |
EP0340412A3 (en) | Semiconductor light beam position sensor, and image input device using this sensor | |
EP0341964A3 (en) | Silicon micro sensor and manufacturing method therefor | |
EP0388312A3 (en) | Chip carrier with improved flexing characteristic | |
SE9502063L (en) | Device for loading and processing image information | |
FR2646309B1 (en) | METHOD FOR MANUFACTURING AN ACOUSTIC SENSOR AND ACOUSTIC SENSOR THUS OBTAINED, WITH A PROTECTIVE LAYER | |
JPS5713784A (en) | Bimorph piezoelectric element | |
EP0999431B1 (en) | Method of manufacturing sensor and resistor element | |
EP0338711A3 (en) | A pyroelectric element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US US US US US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2400294 Country of ref document: CA |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2001934837 Country of ref document: EP |
|
AK | Designated states |
Kind code of ref document: C2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US US US US US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: C2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
COP | Corrected version of pamphlet |
Free format text: PAGES 1/35-35/35, DRAWINGS, REPLACED BY NEW PAGES 1/31-31/31 |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWP | Wipo information: published in national office |
Ref document number: 2001934837 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: JP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 2001934837 Country of ref document: EP |