WO2001043450A3 - Switching device and method of fabricating the same - Google Patents

Switching device and method of fabricating the same Download PDF

Info

Publication number
WO2001043450A3
WO2001043450A3 PCT/IL2000/000430 IL0000430W WO0143450A3 WO 2001043450 A3 WO2001043450 A3 WO 2001043450A3 IL 0000430 W IL0000430 W IL 0000430W WO 0143450 A3 WO0143450 A3 WO 0143450A3
Authority
WO
WIPO (PCT)
Prior art keywords
switching
switching device
signals
switch
substrate layers
Prior art date
Application number
PCT/IL2000/000430
Other languages
French (fr)
Other versions
WO2001043450A2 (en
Inventor
Roberto Igal Chertkow
Original Assignee
Memlink Ltd
Roberto Igal Chertkow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Roberto Igal Chertkow filed Critical Memlink Ltd
Priority to CA002394179A priority Critical patent/CA2394179A1/en
Priority to AU61784/00A priority patent/AU6178400A/en
Priority to EP00948227A priority patent/EP1348141A2/en
Priority to JP2001543026A priority patent/JP2003532130A/en
Priority to IL15019900A priority patent/IL150199A0/en
Publication of WO2001043450A2 publication Critical patent/WO2001043450A2/en
Publication of WO2001043450A3 publication Critical patent/WO2001043450A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H04Q2011/003—Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0056—Clos
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0058—Crossbar; Matrix

Abstract

A switch device that receives a plurality of input signals and provides a plurality of output signals has switch arranged in a two- or three-dimensional array configuration. At least two of the switches, which are preferably microelectromechanical or MEMS switches (100, 220, 330, 352), resides on distinct physical substrate layers (102, 802) in the switching device, and at least one of the signals travels through a penetrable zone (130, 140) of one of the physical substrate layers. Three dimensional switching device blocks can be conveniently arranged in a Cross configuration or other switching configurations to reduce blocking and avoid rearrangement. The switching devices may be used to switch optical signals and may include mirrors (106) as switching elements.
PCT/IL2000/000430 1999-12-13 2000-07-20 Switching device and method of fabricating the same WO2001043450A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CA002394179A CA2394179A1 (en) 1999-12-13 2000-07-20 Switching device and method of fabricating the same
AU61784/00A AU6178400A (en) 1999-12-13 2000-07-20 Switching device and method of fabricating the same
EP00948227A EP1348141A2 (en) 1999-12-13 2000-07-20 Switching device and method of fabricating the same
JP2001543026A JP2003532130A (en) 1999-12-13 2000-07-20 Switching device and method of assembling the same
IL15019900A IL150199A0 (en) 1999-12-13 2000-07-20 Switching device and method of fabricating the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US17049499P 1999-12-13 1999-12-13
US17048299P 1999-12-13 1999-12-13
US60/170,482 1999-12-13
US60/170,494 1999-12-13

Publications (2)

Publication Number Publication Date
WO2001043450A2 WO2001043450A2 (en) 2001-06-14
WO2001043450A3 true WO2001043450A3 (en) 2003-07-17

Family

ID=26866129

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2000/000430 WO2001043450A2 (en) 1999-12-13 2000-07-20 Switching device and method of fabricating the same

Country Status (6)

Country Link
EP (1) EP1348141A2 (en)
JP (1) JP2003532130A (en)
AU (1) AU6178400A (en)
CA (1) CA2394179A1 (en)
IL (1) IL150199A0 (en)
WO (1) WO2001043450A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2356793C (en) * 2000-09-05 2007-05-15 Schlumberger Canada Limited Micro-switches for downhole use
NO319947B1 (en) 2000-09-05 2005-10-03 Schlumberger Holdings Microswitches for downhole use
JP4911597B2 (en) * 2006-12-26 2012-04-04 独立行政法人情報通信研究機構 Optical path switching device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3503670A (en) * 1967-01-16 1970-03-31 Ibm Multifrequency light processor and digital deflector
US4927230A (en) * 1987-08-19 1990-05-22 Canon Kabushiki Kaisha Optical switch array provided with a mask having openings of a predetermined pattern and shutters corresponding to the pattern
US5963682A (en) * 1994-05-24 1999-10-05 Raytheon Company Optical beam steering system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3503670A (en) * 1967-01-16 1970-03-31 Ibm Multifrequency light processor and digital deflector
US4927230A (en) * 1987-08-19 1990-05-22 Canon Kabushiki Kaisha Optical switch array provided with a mask having openings of a predetermined pattern and shutters corresponding to the pattern
US5963682A (en) * 1994-05-24 1999-10-05 Raytheon Company Optical beam steering system

Also Published As

Publication number Publication date
JP2003532130A (en) 2003-10-28
AU6178400A (en) 2001-06-18
CA2394179A1 (en) 2001-06-14
WO2001043450A2 (en) 2001-06-14
IL150199A0 (en) 2002-12-01
EP1348141A2 (en) 2003-10-01

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