WO2001009011A1 - Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module - Google Patents

Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module Download PDF

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Publication number
WO2001009011A1
WO2001009011A1 PCT/US2000/016288 US0016288W WO0109011A1 WO 2001009011 A1 WO2001009011 A1 WO 2001009011A1 US 0016288 W US0016288 W US 0016288W WO 0109011 A1 WO0109011 A1 WO 0109011A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
section
main
substrate processing
processing modules
Prior art date
Application number
PCT/US2000/016288
Other languages
French (fr)
Inventor
Christopher A. Hofmeister
Original Assignee
Brooks Automation Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc. filed Critical Brooks Automation Inc.
Priority to JP2001514221A priority Critical patent/JP2003506861A/en
Priority to AU57368/00A priority patent/AU5736800A/en
Publication of WO2001009011A1 publication Critical patent/WO2001009011A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Definitions

  • Substrate Transfer Chamber Having A Substrate Holder Vertically Aligned With A Substrate Processing Module
  • the present invention relates to substrate processing apparatus and, more particularly, to arranging components vertically to reduce the footprint of the apparatus.
  • U.S. Patents 5,562,383 and 5,882,413 disclose different types of substrate processing apparatus. It is known in the art to provide a substrate transport robot between a station holding a cassette of substrates and a load lock into a main transfer chamber of the substrate processing apparatus. A problem with this type of arrangement is that the footprint is relatively large because the cassette holding station, substrate transport robot and load lock are arranged in series along a horizontal plane.
  • a substrate processing apparatus substrate transfer chamber for transferring substrates between substrate processing modules attached to the substrate transfer chamber.
  • the substrate transfer chamber comprises a first section and a second section.
  • the first section has substrate processing module mounting areas for mounting the substrate processing modules to an exterior of the first section. Each mounting area has a hole through a wall of the transfer chamber for passing substrates between an interior of the first section and the processing modules.
  • the second section extends from the first section and has a portion which extends outward relative to the first section and has an interior which is in communication with the interior of the first section.
  • a vertical axis passing through at least one of the substrate processing modules passes through the portion of the second section.
  • the at least one substrate processing module and the interior of the portion of the second section are aligned, at least partially, one beneath the other.
  • a substrate processing apparatus comprising substrate processing modules, a housing, a first substrate transfer robot, and a substrate holder.
  • the housing has the substrate processing modules mounted on an exterior side of the housing.
  • the housing comprises an internal main transfer area.
  • the first substrate transfer robot is connected to the housing and has a movable arm assembly located in the main transfer area for moving substrates between the main transfer area and the substrate processing modules.
  • the substrate holder is mounted to the housing and located in the main transfer area. A portion of the main transfer area in which the substrate holder is located is vertically arranged with at least one of the substrate processing modules one beneath the other.
  • a substrate processing apparatus comprising a housing, a substrate transfer robot, substrate processing modules, and a sub-enclosure member.
  • the sub-enclosure member is mounted to the housing inside an interior main substrate transfer area of the housing.
  • the sub-enclosure member is movable in a horizontal plane between a first retracted position and a second extended position.
  • the second extended position comprises the sub-enclosure member contacting an interior wall of the housing surrounding an aperture into the interior main substrate transfer area such that a door covering the aperture can be opened and substrates transferred through the aperture into and out of the sub- enclosure member without exposing the entire interior main substrate transfer area to the open aperture.
  • a substrate processing apparatus comprising a housing, a substrate transfer robot, a substrate support, and substrate processing modules.
  • the housing has a substrate transfer area including a main section and an outwardly extending section intersecting the main section in a horizontal plane.
  • the substrate transfer robot is mounted to the housing and has a movable arm assembly located in the main section of the substrate transfer area.
  • the substrate support is movably mounted to the housing in the horizontal plane between a retracted position inside the outwardly extended section of the substrate transfer area and an extended position inside the main section of the substrate transfer area. In the retracted position the substrate support is at least partially vertically aligned with at least one of the substrate processing modules.
  • a method for moving substrates between a portable substrate container and a main substrate transfer area in a substrate processing apparatus comprising steps of locating the portable substrate container at a loading and unloading area at a substrate entrance aperture into the main substrate transfer area; transferring support of the substrates from the portable substrate container directly onto a substrate support; and moving the substrates directly into the main substrate transfer area from the loading and unloading area.
  • a method for moving substrates in a substrate transport chamber of a substrate processing apparatus comprising steps of moving the substrates from a portable substrate container directly onto a substrate support, the substrate support having a position in the chamber at least partially located in a vertical axis intersecting a substrate processing module connected to an exterior side of the chamber; and moving the substrates from the substrate support by a substrate transport robot, the substrate transport robot having a movable arm assembly located in the chamber, wherein the movable arm assembly stays within the chamber when moving the substrates onto and off of the substrate support.
  • a method for moving substrates in a substrate support chamber of a substrate processing apparatus comprising steps of moving a sub-enclosure can in the substrate transport chamber adjacent an aperture into the chamber; moving substrates through the aperture into the chamber inside the sub-enclosure can; and moving the sub-enclosure can away from the aperture to allow a transport robot access to the substrates in the chamber.
  • a method for moving a substrate in a substrate transport chamber to substrate processing modules of a substrate processing apparatus comprising steps of moving a substrate transport robot located in the substrate transport chamber from a first position to a second position to pick up the substrate onto an end effector of the robot, the step of moving between the first and second positions comprising a portion of the robot extending into a vertical axis passing through one of the substrate processing modules, but not in one of the substrate processing modules; and moving the robot to move the end effector from the second position into a first one of the substrate processing modules through a side aperture in the first module.
  • Fig. 1 is a top plan view of a substrate processing apparatus comprising features of the present invention
  • Fig. 2 is a schematic perspective view of the apparatus shown in Fig. 1, but with most of the substrate processing modules not shown;
  • Fig. 3 is a partial schematic cross-section view of the apparatus shown in Fig. 2 taken along line 3-3;
  • Fig. 4 is an exploded perspective view of a portable substrate container
  • Fig. 5a is a partial schematic cross-sectional view as in Fig. 3 with the sub-enclosure can and substrate holder moved to an extended position;
  • Fig. 5b is a partial schematic cross-sectional view as in Fig. 5a with the portable substrate container moved into the sub-enclosure can;
  • Fig. 5c is a partial schematic cross-sectional view as in Fig. 5b with the portable substrate container being removed and the door to the entrance aperture being closed;
  • Fig. 5d is a partial schematic cross-sectional view as in Fig. 5c with the sub-enclosure can moved to a retracted position;
  • Fig. 5e is a schematic top view of Fig. 5d;
  • Fig. 6 is a partial schematic cross-sectional view showing both the sub-enclosure can and substrate holder with substrates thereon moved to the retracted position;
  • Fig. 7 is a perspective view of an alternate embodiment of the portable substrate container support and door opener
  • Fig. 8 is a partial schematic cross-sectional view of the container and the support and door opener shown in Fig. 7 in use with a substrate holder that is moved into the container to transport the substrates;
  • Fig. 9 is a schematic perspective view of an alternate embodiment of the substrate transport chamber.
  • Fig. 10 is a schematic perspective view of another alternate embodiment of the substrate transport chamber.
  • FIG. 1 there is shown a top plan view of a substrate processing apparatus 10 incorporating features of the present invention.
  • a substrate processing apparatus 10 incorporating features of the present invention.
  • the present invention will be described with reference to the embodiments shown in the drawings, it should be understood that the present invention can be embodied in many alternate forms of embodiments.
  • any suitable size, shape or type of elements or materials could be used.
  • the apparatus 10 generally comprises a substrate transfer chamber 12, substrate processing modules 14, and two combined door opener and support 16 assemblies for portable substrate containers or pods 74.
  • the chamber 12 generally comprises a frame 20 and a robot 22 (see Fig. 1) connected to the frame 20.
  • the substrate processing modules 14 are well known in the art and are used for processing substrates such as semiconductor wafers or flat panel display substrates.
  • the frame 20 has a first section 26 and a second section 28.
  • the modules 14 are mounted to a back side 13 of the first section 26 of chamber 12.
  • the modules 14 could be mounted to other sides and/or more than one side.
  • the assemblies 16 are mounted to the front side 15 of the chamber 12.
  • the first section 26 of the frame 20 has vertically spaced apertures 24.
  • the processing modules 14 are mounted to the frame 20 at the apertures 24.
  • vertical arrays or columns of modules 14 are attached to the frame 20.
  • the chamber 12 also has the substrate transport robot 22 (see Fig. 1) located, at least partially, inside the frame 20 for transporting substrates into, through and out of the frame 20. Any suitable type of robot could be provided in the chamber 12, but it needs to be vertically movable in the first section 26 to access and pass through the vertically spaced apertures 24.
  • the chamber 12 could also have more than one robot located in main transfer area inside the frame 20.
  • FIG. 2 shown columns of four apertures 24 on a side of the frame 20, more or less apertures could be provided on various sides, the apertures 24 could be staggered on each side, and/or more than one column of apertures could be provided on a single side.
  • the interior of second section 28 is in communication with the interior of the first section 26.
  • the second section 28 extends from the first section 26 at the bottom of the first section 26.
  • a portion of the second section 28 extends outward relative to the first section along a horizontal plane beneath the modules 14.
  • vertical axes A passing through the modules 14 pass through the second section 28.
  • the outward extended portion of the second section could be located above one or more of the processing modules 14.
  • the portion of the second section 28 extends in a rearward direction.
  • the outward extending portion of the second section could alternatively or additionally extend in other directions and could have sections on different spaced horizontal planes.
  • the chamber 12 also includes two batch substrate movers 30.
  • the two movers 30 are arranged side-by-side in the second section 28 of the frame 20.
  • Each mover 30 has a substrate holder 32, a drive 34, and a sub-enclosure can or member 36.
  • the holder 32 and sub-enclosure member 36 are separately movable relative to each other.
  • the two members 32, 36 could be fixedly connected to each other to always extend and retract in unison with each other.
  • the holder 32 includes a plurality of spaced substrate support shelves 38 for supporting individual substrates thereon.
  • the sub-enclosure member 36 surrounds the holder 32.
  • the sub-enclosure member 36 has an open front end 40, but otherwise encloses the holder 32 on all other sides.
  • the sub-enclosure member 36 also includes a front end seal 42 and a rear end seal 44.
  • the holder 32 and sub-enclosure member 36 are connected to the drive 34 by a drive rod 46.
  • An expandable seal 48 extends between the rear end of the second section 28 and the sub-enclosure member 36 around the rod 46.
  • the drive 34 can be any suitable type of drive, such as an electro-mechanical drive, for horizontally extending the rod 46 as indicated by arrow B and retracting the rod in a reverse direction. Fig.
  • FIG. 3 shows the substrate mover 30 in a retracted position wherein the holder 38 and sub-enclosure member 36 are wholly contained within the second section 28 in area C and outside area D.
  • the robot 22 in the retraced position, the robot 22 (see Fig. 1) can move in area D without the holders 32 or sub-enclosure member 36 interfering with the movement or being in a possible path of movement of the robot 22.
  • the frame 20 includes two substrate entrance apertures 50 at the front side 15 of the chamber 12.
  • the entrance apertures 50 are located in the same horizontal plane as the movers 30 and second section 28. However, the entrance apertures 50 are located on an opposite side of area D from the movers 30.
  • Movable doors 52 are connected to the frame 20 for opening and closing the apertures 50.
  • Each combined door opener and support assembly 16 generally comprises a carrier door opener 94, a support frame 96, a movable arm 98, and a drive 100 for moving the movable arm 98.
  • the carrier door opener 94 is connected to the support frame 96 and is adapted to remove and replace the door 78 with the main housing 76 of the portable container 74 as described in U.S. patent application No. 09/243,516.
  • the movable arm 98 is adapted to have the container 74 removably mounted thereon.
  • the drive 100 is adapted to horizontally move the arm 94 to move the main housing 76 of the container 74 relative to the support frame 96, as indicated by arrow E, through the aperture 50 into and out of the area D.
  • the drive 100 is preferably also able to slightly move the arm 98 vertically up and down when the main housing 76 is in the area D as indicated by arrow F.
  • the movable door 52 must be out of the way of the aperture 50 for the arm 98 and main housing 76 of the container 74 to more into and out of the middle chamber 37.
  • the container 74 has a main housing 76 and a removable side door 78.
  • the container 74 is similar to that described in U.S. patent application No. 09/243,516 which is hereby incorporated by reference in its entirety.
  • the container 74 is a FOUP (Front Opening Unified Pod) design for supporting and transporting a plurality of wafers is spaced relationship in a substantially particle free environment.
  • the container 74 has a plurality of rack members 80 for supporting the wafers generally horizontally, in a generally vertically spaced relationship. At any one time, all or only some of the rack members 80 may actually be supporting wafers. In alternate embodiments other types of portable substrate holders could be used.
  • the container 74 includes the housing 76 with a carrier port 82 for providing access to the interior 84 thereof.
  • a carrier door 78 is removably connected to the housing 76 and is movable between a closed position overlying the carrier port 82 and an open position spaced from the carrier port 82.
  • the carrier door 78 is illustrated as including a generally rectangular plate and has a peripherally extending continuous raised flange.
  • a suitable seal 86 is interposed between the flange and the carrier port for sealing the interior of the carrier 74 from the surrounding atmosphere when the carrier door is in the closed position.
  • a plurality of latch members 88 are provided on the carrier door at peripheral spaced locations movable between an extended, locking position so as to be engaged with respectively positioned locking recesses 90 on the carrier adjacent the carrier port and a retracted release position disengaged from the locking recesses 90.
  • Suitable keyway mechanisms externally indicated by latch keyways 92 are operably connected to the latch members 88 for moving the latch members between the locking position and the release position.
  • the mechanisms may be linkages or may be solenoid operated or may be of other appropriate design.
  • the latch members 88 are extended such that the carrier door is closed and locked with the flange bearing firmly against the carrier port 82 with the seal 86 interposed between the flange and the port to maintain the particle free environment interior 84 of the carrier.
  • the latch keyways 92 are horizontally oriented the latch members 88 are retracted such that the carrier door is unlocked and capable of being removed from the carrier port 82.
  • FIG. 3 An operator places the container 74 on the arm 98 at a container loading and unloading area as shown in Fig. 3.
  • a controller such as a computer, controls movement of the mover 30, robot 22, doors 52, 94 and drive 100.
  • the drive 34 is actuated to extend the sub-enclosure member 36 and holder 32 from the retracted position shown in Fig. 3 to the extended position shown in Fig. 5a.
  • the holder 32 and sub-enclosure member 36 are horizontally extended into area D.
  • the front seal 42 makes a sealing contact with the inside surface of the front wall 15.
  • the rear seal 44 makes a sealing contact with a flange 45.
  • an area D' is formed inside area D which is sealed off from the rest of the area of D.
  • the carrier door opener 94 removes the door 78 from the container 74.
  • the arm 98 is extended through the entrance aperture 50 into the area D as indicated by arrow E.
  • the container main housing 76 and substrates S therein are moved with the arm 98 into area D' .
  • the shelves 38 are located under individual ones of the substrates S inside the main housing 76.
  • the arm 98 is then lowered as indicated by arrow F to move the main housing 76 downward.
  • the substrates S are thus deposited onto the shelves 38 and are no longer supported by the rack members 80 of the main housing 76.
  • the arm 98 is then withdrawn from area D' with the container main housing 76.
  • the substrates S are left supported on the holder 32 by the shelves 38.
  • the door 52 is then moved back to its closed position to seal area D' again.
  • the sub-enclosure member 36 is then retracted back to its retracted position inside area C. Area D' is thus reintegrated with the rest of the area D.
  • the area D' is connected to a source of vacuum to evacuate air from inside area D' before the sub-enclosure member 36 is retracted.
  • the holder 32 remains in area D.
  • the robot 22 can be moved to pick up and return substrates S on the holder 32 and move the substrates between the holder 32 and the substrate processing modules 14.
  • the holder 32 and sub- enclosure member 36 are returned to their extended position shown in Fig. 5.
  • the sub-enclosure member 36 once again forms the separated area D' which is isolated from the rest of the area D. Area D' is pressurized to atmospheric pressure.
  • the door 52 is opened.
  • the arm 98 moves the container main housing 76 back into area D' and picks up the processed substrates off of the shelves 38 onto the rack members 80.
  • the arm 98 is retracted.
  • the door 52 is closed.
  • the container door 78 is reconnected to the housing 76 by the door opener 94.
  • the operator then removes the container 74 from the arm 98 and replaces it with a new container of substrates to be processed. The method is then repeated.
  • the sub-enclosure members 36 in addition to keeping the entrance apertures 50 isolated from the majority of the environment in area D when the doors 52 are open, also provides the function of a load lock.
  • area D' can be evacuated and pressurized while the sub- enclosure member 36 is extended.
  • This load lock function is for transferring the substrates between the vacuum environment of area D and the atmospheric environment outside entrance aperture 50.
  • the present invention allows the load lock chamber/function between the environment in the main transfer chamber 12 and the environment outside the chamber 12 to be vertically aligned, at least partially, with at least a portion of the robot (s) 22 used to transfer the substrates to and from the substrate processing modules 14 and vertically aligned, at least sometimes, with the main transfer area D of the frame 20.
  • the combined door opener and support assembly 16' generally comprises a frame 162 and a door opener 164.
  • the portable container 74 is positioned on the frame 162.
  • a door opener 164 is connected to the frame 162 to remove the door of the container 74.
  • the main housing 76 remains stationary on the frame 162 as the robot 160 moves the substrates into and out of the main housing 76.
  • the robot 160 includes the substrate holder 32.
  • the rod 46 is long enough to extend the holder 32 past the entrance aperture 50 into the interior of the portable substrate container 74.
  • the robot 160 is then able to raise the holder 32 as indicated by arrow H, transferring support of the substrates S from the rack members 80 onto the shelves 38, and move the holder 32 with the substrates into area D' .
  • the door 52 can then be closed and the holder 32 and/or sub-enclosure member 36 can be retracted back to their retracted positions under the processing modules 14.
  • Fig. 9 shows a schematic perspective view of an alternate embodiment of the substrate transfer chamber 200.
  • the rear wall 213 of the first section 226 has two angled sides 213a, 213b.
  • the two lateral side walls 217a, 217b also have vertically spaced apertures 224.
  • Vertical arrays of the substrate processing modules can thus be mounted on the side walls 217a, 217b as well as the sides 213a, 213b,
  • Fig. 10 shows a schematic perspective view of another alternate embodiment of the substrate transfer chamber 300.
  • the second section 328 includes a portion 328a located in front of the first section 326.
  • the first section 326 can have substrate processing modules mounted on both is rear side 313 and on its front side 315.
  • the portion 328a of the second section 328 is vertically aligned, at least partially, with the processing modules attached to the front side 315.
  • the door opener and support assemblies 16' are located at the front of the second section 328 with the entrance apertures 350 into the frame 320 being located in the portion 328a.

Abstract

A substrate processing apparatus (10) having a substrate transfer chamber (12), substrate processing modules (14) attached to the exterior of the chamber, a substrate transfer robot (22) connected to the chamber, and a substrate holder (32) located in the chamber. The robot can transport substrates among the various processing modules and the substrate holder. The substrate holder can be movably connected to the chamber and include a position vertically above or below at least one of the processing modules. A sub-enclosure member (36) can be movably connected to the chamber for positioning at an entrance aperture into the chamber when the entrance is opened, to prevent the interior of the entire chamber from being exposed to the open entrance aperture.

Description

Substrate Transfer Chamber Having A Substrate Holder Vertically Aligned With A Substrate Processing Module
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to substrate processing apparatus and, more particularly, to arranging components vertically to reduce the footprint of the apparatus.
2. Prior Art
U.S. Patents 5,562,383 and 5,882,413 disclose different types of substrate processing apparatus. It is known in the art to provide a substrate transport robot between a station holding a cassette of substrates and a load lock into a main transfer chamber of the substrate processing apparatus. A problem with this type of arrangement is that the footprint is relatively large because the cassette holding station, substrate transport robot and load lock are arranged in series along a horizontal plane.
SUMMARY OF THE INVENTION
In accordance with one embodiment of the present invention a substrate processing apparatus substrate transfer chamber for transferring substrates between substrate processing modules attached to the substrate transfer chamber is provided. The substrate transfer chamber comprises a first section and a second section. The first section has substrate processing module mounting areas for mounting the substrate processing modules to an exterior of the first section. Each mounting area has a hole through a wall of the transfer chamber for passing substrates between an interior of the first section and the processing modules. The second section extends from the first section and has a portion which extends outward relative to the first section and has an interior which is in communication with the interior of the first section. A vertical axis passing through at least one of the substrate processing modules passes through the portion of the second section. The at least one substrate processing module and the interior of the portion of the second section are aligned, at least partially, one beneath the other.
In accordance with another embodiment of the present invention a substrate processing apparatus is provided comprising substrate processing modules, a housing, a first substrate transfer robot, and a substrate holder. The housing has the substrate processing modules mounted on an exterior side of the housing. The housing comprises an internal main transfer area. The first substrate transfer robot is connected to the housing and has a movable arm assembly located in the main transfer area for moving substrates between the main transfer area and the substrate processing modules. The substrate holder is mounted to the housing and located in the main transfer area. A portion of the main transfer area in which the substrate holder is located is vertically arranged with at least one of the substrate processing modules one beneath the other.
In accordance with another embodiment of the present invention a substrate processing apparatus is provided comprising a housing, a substrate transfer robot, substrate processing modules, and a sub-enclosure member. The sub-enclosure member is mounted to the housing inside an interior main substrate transfer area of the housing. The sub-enclosure member is movable in a horizontal plane between a first retracted position and a second extended position. The second extended position comprises the sub-enclosure member contacting an interior wall of the housing surrounding an aperture into the interior main substrate transfer area such that a door covering the aperture can be opened and substrates transferred through the aperture into and out of the sub- enclosure member without exposing the entire interior main substrate transfer area to the open aperture.
In accordance with another embodiment of the present invention a substrate processing apparatus is provided comprising a housing, a substrate transfer robot, a substrate support, and substrate processing modules. The housing has a substrate transfer area including a main section and an outwardly extending section intersecting the main section in a horizontal plane. The substrate transfer robot is mounted to the housing and has a movable arm assembly located in the main section of the substrate transfer area. The substrate support is movably mounted to the housing in the horizontal plane between a retracted position inside the outwardly extended section of the substrate transfer area and an extended position inside the main section of the substrate transfer area. In the retracted position the substrate support is at least partially vertically aligned with at least one of the substrate processing modules.
In accordance with one method of the present invention, a method for moving substrates between a portable substrate container and a main substrate transfer area in a substrate processing apparatus is provided comprising steps of locating the portable substrate container at a loading and unloading area at a substrate entrance aperture into the main substrate transfer area; transferring support of the substrates from the portable substrate container directly onto a substrate support; and moving the substrates directly into the main substrate transfer area from the loading and unloading area.
In accordance with another method of the present invention a method for moving substrates in a substrate transport chamber of a substrate processing apparatus is provided comprising steps of moving the substrates from a portable substrate container directly onto a substrate support, the substrate support having a position in the chamber at least partially located in a vertical axis intersecting a substrate processing module connected to an exterior side of the chamber; and moving the substrates from the substrate support by a substrate transport robot, the substrate transport robot having a movable arm assembly located in the chamber, wherein the movable arm assembly stays within the chamber when moving the substrates onto and off of the substrate support.
In accordance with another method of the present invention a method for moving substrates in a substrate support chamber of a substrate processing apparatus is provided comprising steps of moving a sub-enclosure can in the substrate transport chamber adjacent an aperture into the chamber; moving substrates through the aperture into the chamber inside the sub-enclosure can; and moving the sub-enclosure can away from the aperture to allow a transport robot access to the substrates in the chamber.
In accordance with another method of the present invention a method for moving a substrate in a substrate transport chamber to substrate processing modules of a substrate processing apparatus is provided comprising steps of moving a substrate transport robot located in the substrate transport chamber from a first position to a second position to pick up the substrate onto an end effector of the robot, the step of moving between the first and second positions comprising a portion of the robot extending into a vertical axis passing through one of the substrate processing modules, but not in one of the substrate processing modules; and moving the robot to move the end effector from the second position into a first one of the substrate processing modules through a side aperture in the first module.
BRIEF DESCRIPTION OF THE DRAWINGS
The foregoing aspects and other features of the present invention are explained in the following description, taken in connection with the accompanying drawings, wherein:
Fig. 1 is a top plan view of a substrate processing apparatus comprising features of the present invention;
Fig. 2 is a schematic perspective view of the apparatus shown in Fig. 1, but with most of the substrate processing modules not shown;
Fig. 3 is a partial schematic cross-section view of the apparatus shown in Fig. 2 taken along line 3-3;
Fig. 4 is an exploded perspective view of a portable substrate container;
Fig. 5a is a partial schematic cross-sectional view as in Fig. 3 with the sub-enclosure can and substrate holder moved to an extended position;
Fig. 5b is a partial schematic cross-sectional view as in Fig. 5a with the portable substrate container moved into the sub-enclosure can; Fig. 5c is a partial schematic cross-sectional view as in Fig. 5b with the portable substrate container being removed and the door to the entrance aperture being closed;
Fig. 5d is a partial schematic cross-sectional view as in Fig. 5c with the sub-enclosure can moved to a retracted position;
Fig. 5e is a schematic top view of Fig. 5d;
Fig. 6 is a partial schematic cross-sectional view showing both the sub-enclosure can and substrate holder with substrates thereon moved to the retracted position;
Fig. 7 is a perspective view of an alternate embodiment of the portable substrate container support and door opener;
Fig. 8 is a partial schematic cross-sectional view of the container and the support and door opener shown in Fig. 7 in use with a substrate holder that is moved into the container to transport the substrates;
Fig. 9 is a schematic perspective view of an alternate embodiment of the substrate transport chamber; and
Fig. 10 is a schematic perspective view of another alternate embodiment of the substrate transport chamber.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring to Fig. 1, there is shown a top plan view of a substrate processing apparatus 10 incorporating features of the present invention. Although the present invention will be described with reference to the embodiments shown in the drawings, it should be understood that the present invention can be embodied in many alternate forms of embodiments. In addition, any suitable size, shape or type of elements or materials could be used.
The apparatus 10 generally comprises a substrate transfer chamber 12, substrate processing modules 14, and two combined door opener and support 16 assemblies for portable substrate containers or pods 74. Referring also to Fig. 2, the chamber 12 generally comprises a frame 20 and a robot 22 (see Fig. 1) connected to the frame 20. The substrate processing modules 14 are well known in the art and are used for processing substrates such as semiconductor wafers or flat panel display substrates. In this embodiment the frame 20 has a first section 26 and a second section 28. In this embodiment, the modules 14 are mounted to a back side 13 of the first section 26 of chamber 12. In alternate embodiments the modules 14 could be mounted to other sides and/or more than one side. The assemblies 16 are mounted to the front side 15 of the chamber 12. In alternate embodiment only one or more than two assemblies 16 could be provided and, could be mounted to one or more sides of the main transfer chamber. The first section 26 of the frame 20 has vertically spaced apertures 24. The processing modules 14 are mounted to the frame 20 at the apertures 24. Thus, vertical arrays or columns of modules 14 are attached to the frame 20. The chamber 12 also has the substrate transport robot 22 (see Fig. 1) located, at least partially, inside the frame 20 for transporting substrates into, through and out of the frame 20. Any suitable type of robot could be provided in the chamber 12, but it needs to be vertically movable in the first section 26 to access and pass through the vertically spaced apertures 24. The chamber 12 could also have more than one robot located in main transfer area inside the frame 20. An example of one such robot is described in U.S. patent application No. 08/662,930 which is hereby incorporated by reference in its entirety. Although Fig. 2 shown columns of four apertures 24 on a side of the frame 20, more or less apertures could be provided on various sides, the apertures 24 could be staggered on each side, and/or more than one column of apertures could be provided on a single side.
The interior of second section 28 is in communication with the interior of the first section 26. In this embodiment the second section 28 extends from the first section 26 at the bottom of the first section 26. A portion of the second section 28 extends outward relative to the first section along a horizontal plane beneath the modules 14. Thus, vertical axes A passing through the modules 14 pass through the second section 28. In an alternate embodiment the outward extended portion of the second section could be located above one or more of the processing modules 14. In this embodiment the portion of the second section 28 extends in a rearward direction. In alternate embodiments the outward extending portion of the second section could alternatively or additionally extend in other directions and could have sections on different spaced horizontal planes.
Referring also to Fig. 3, the chamber 12 also includes two batch substrate movers 30. The two movers 30 are arranged side-by-side in the second section 28 of the frame 20. Each mover 30 has a substrate holder 32, a drive 34, and a sub-enclosure can or member 36. In this embodiment the holder 32 and sub-enclosure member 36 are separately movable relative to each other. However, in alternate embodiments the two members 32, 36 could be fixedly connected to each other to always extend and retract in unison with each other. The holder 32 includes a plurality of spaced substrate support shelves 38 for supporting individual substrates thereon. The sub-enclosure member 36 surrounds the holder 32. The sub-enclosure member 36 has an open front end 40, but otherwise encloses the holder 32 on all other sides. The sub-enclosure member 36 also includes a front end seal 42 and a rear end seal 44. The holder 32 and sub-enclosure member 36 are connected to the drive 34 by a drive rod 46. An expandable seal 48 extends between the rear end of the second section 28 and the sub-enclosure member 36 around the rod 46. The drive 34 can be any suitable type of drive, such as an electro-mechanical drive, for horizontally extending the rod 46 as indicated by arrow B and retracting the rod in a reverse direction. Fig. 3 shows the substrate mover 30 in a retracted position wherein the holder 38 and sub-enclosure member 36 are wholly contained within the second section 28 in area C and outside area D. Thus, in the retraced position, the robot 22 (see Fig. 1) can move in area D without the holders 32 or sub-enclosure member 36 interfering with the movement or being in a possible path of movement of the robot 22.
The frame 20 includes two substrate entrance apertures 50 at the front side 15 of the chamber 12. The entrance apertures 50 are located in the same horizontal plane as the movers 30 and second section 28. However, the entrance apertures 50 are located on an opposite side of area D from the movers 30. Movable doors 52 are connected to the frame 20 for opening and closing the apertures 50.
Each combined door opener and support assembly 16 generally comprises a carrier door opener 94, a support frame 96, a movable arm 98, and a drive 100 for moving the movable arm 98. The carrier door opener 94 is connected to the support frame 96 and is adapted to remove and replace the door 78 with the main housing 76 of the portable container 74 as described in U.S. patent application No. 09/243,516. The movable arm 98 is adapted to have the container 74 removably mounted thereon. The drive 100 is adapted to horizontally move the arm 94 to move the main housing 76 of the container 74 relative to the support frame 96, as indicated by arrow E, through the aperture 50 into and out of the area D. The drive 100 is preferably also able to slightly move the arm 98 vertically up and down when the main housing 76 is in the area D as indicated by arrow F. Of course, the movable door 52 must be out of the way of the aperture 50 for the arm 98 and main housing 76 of the container 74 to more into and out of the middle chamber 37.
Referring also to Fig. 4, an exploded perspective view of one embodiment of the portable substrate container 74 is shown. The container 74 has a main housing 76 and a removable side door 78. The container 74 is similar to that described in U.S. patent application No. 09/243,516 which is hereby incorporated by reference in its entirety. The container 74 is a FOUP (Front Opening Unified Pod) design for supporting and transporting a plurality of wafers is spaced relationship in a substantially particle free environment. The container 74 has a plurality of rack members 80 for supporting the wafers generally horizontally, in a generally vertically spaced relationship. At any one time, all or only some of the rack members 80 may actually be supporting wafers. In alternate embodiments other types of portable substrate holders could be used.
The container 74 includes the housing 76 with a carrier port 82 for providing access to the interior 84 thereof. A carrier door 78 is removably connected to the housing 76 and is movable between a closed position overlying the carrier port 82 and an open position spaced from the carrier port 82. The carrier door 78 is illustrated as including a generally rectangular plate and has a peripherally extending continuous raised flange. A suitable seal 86 is interposed between the flange and the carrier port for sealing the interior of the carrier 74 from the surrounding atmosphere when the carrier door is in the closed position. For selectively locking the carrier door 78 in place overlying the carrier port 82 and with the flange firmly engaged with the seal 86, a plurality of latch members 88 are provided on the carrier door at peripheral spaced locations movable between an extended, locking position so as to be engaged with respectively positioned locking recesses 90 on the carrier adjacent the carrier port and a retracted release position disengaged from the locking recesses 90. Suitable keyway mechanisms externally indicated by latch keyways 92 are operably connected to the latch members 88 for moving the latch members between the locking position and the release position. The mechanisms (not shown) may be linkages or may be solenoid operated or may be of other appropriate design. In a typical manner, when the latch keyways 92 are vertically oriented the latch members 88 are extended such that the carrier door is closed and locked with the flange bearing firmly against the carrier port 82 with the seal 86 interposed between the flange and the port to maintain the particle free environment interior 84 of the carrier. When the latch keyways 92 are horizontally oriented the latch members 88 are retracted such that the carrier door is unlocked and capable of being removed from the carrier port 82.
Referring now to Figs. 3 and 5a-5e one method of moving the substrates S from one of the containers 74 into the chamber 12 will be described. An operator places the container 74 on the arm 98 at a container loading and unloading area as shown in Fig. 3. A controller, such as a computer, controls movement of the mover 30, robot 22, doors 52, 94 and drive 100. The drive 34 is actuated to extend the sub-enclosure member 36 and holder 32 from the retracted position shown in Fig. 3 to the extended position shown in Fig. 5a. In the extended position shown in Fig. 5a the holder 32 and sub-enclosure member 36 are horizontally extended into area D. The front seal 42 makes a sealing contact with the inside surface of the front wall 15. The rear seal 44 makes a sealing contact with a flange 45. With the sub-enclosure member 36 in its extended position an area D' is formed inside area D which is sealed off from the rest of the area of D. With the sub-enclosure member 36 in its extended position the door 52 can now be moved from its closed position to its open position as indicated by arrow G. The carrier door opener 94 (see Fig. 3) removes the door 78 from the container 74. As seen in Fig. 5b, the arm 98 is extended through the entrance aperture 50 into the area D as indicated by arrow E. The container main housing 76 and substrates S therein are moved with the arm 98 into area D' . The shelves 38 are located under individual ones of the substrates S inside the main housing 76. The arm 98 is then lowered as indicated by arrow F to move the main housing 76 downward. The substrates S are thus deposited onto the shelves 38 and are no longer supported by the rack members 80 of the main housing 76. As seen in Fig. 5c, the arm 98 is then withdrawn from area D' with the container main housing 76. The substrates S are left supported on the holder 32 by the shelves 38. The door 52 is then moved back to its closed position to seal area D' again. As seen in Figs. 5d and 5e, with the door 52 closed, the sub-enclosure member 36 is then retracted back to its retracted position inside area C. Area D' is thus reintegrated with the rest of the area D. In a preferred embodiment the area D' is connected to a source of vacuum to evacuate air from inside area D' before the sub-enclosure member 36 is retracted. In this embodiment, the holder 32 remains in area D. However, in an alternate embodiment, as shown in Fig. 6, the holder 32 is retracted with the sub-enclosure member 36 and with the substrates S back to area C. In either position, the robot 22 can be moved to pick up and return substrates S on the holder 32 and move the substrates between the holder 32 and the substrate processing modules 14.
Once the unprocessed substrates S are removed from the shelves 38 and replaced with processed substrates from the processing modules 14, the holder 32 and sub- enclosure member 36 are returned to their extended position shown in Fig. 5. The sub-enclosure member 36 once again forms the separated area D' which is isolated from the rest of the area D. Area D' is pressurized to atmospheric pressure. The door 52 is opened. The arm 98 moves the container main housing 76 back into area D' and picks up the processed substrates off of the shelves 38 onto the rack members 80. The arm 98 is retracted. The door 52 is closed. The container door 78 is reconnected to the housing 76 by the door opener 94. The operator then removes the container 74 from the arm 98 and replaces it with a new container of substrates to be processed. The method is then repeated.
The sub-enclosure members 36, in addition to keeping the entrance apertures 50 isolated from the majority of the environment in area D when the doors 52 are open, also provides the function of a load lock. In particular, area D' can be evacuated and pressurized while the sub- enclosure member 36 is extended. This load lock function is for transferring the substrates between the vacuum environment of area D and the atmospheric environment outside entrance aperture 50. With the present invention the footprint of the apparatus 10, when compared to prior art substrate processing apparatus, can be reduced. More specifically, the present invention allows the load lock chamber/function between the environment in the main transfer chamber 12 and the environment outside the chamber 12 to be vertically aligned, at least partially, with at least a portion of the robot (s) 22 used to transfer the substrates to and from the substrate processing modules 14 and vertically aligned, at least sometimes, with the main transfer area D of the frame 20.
In the prior art, such as disclosed in U.S. Patent 5,512,320 the robot in the load locks were located totally horizontally outward from the frame 20 of the main transfer chamber. This increased the footprint of the processing apparatus. The present invention significantly reduces the size or footprint of the apparatus by vertically stacking components/functions which were horizontally spaced in the prior art. Moving the sub-enclosure member 36 and holder 32 under the processing modules 14 in area C, as in Fig. 6, further compacts the footprint of the apparatus while leaving the area D substantially open for substantially free movement of the robot (s) 22.
Referring now to Figs. 7 and 8 another alternate embodiment will be described. In this embodiment the combined door opener and support assembly 16' generally comprises a frame 162 and a door opener 164. The portable container 74 is positioned on the frame 162. A door opener 164 is connected to the frame 162 to remove the door of the container 74. The main housing 76 remains stationary on the frame 162 as the robot 160 moves the substrates into and out of the main housing 76. The robot 160 includes the substrate holder 32. However, the rod 46 is long enough to extend the holder 32 past the entrance aperture 50 into the interior of the portable substrate container 74. The robot 160 is then able to raise the holder 32 as indicated by arrow H, transferring support of the substrates S from the rack members 80 onto the shelves 38, and move the holder 32 with the substrates into area D' . The door 52 can then be closed and the holder 32 and/or sub-enclosure member 36 can be retracted back to their retracted positions under the processing modules 14.
Fig. 9 shows a schematic perspective view of an alternate embodiment of the substrate transfer chamber 200. In this embodiment the rear wall 213 of the first section 226 has two angled sides 213a, 213b. The two lateral side walls 217a, 217b also have vertically spaced apertures 224. Vertical arrays of the substrate processing modules can thus be mounted on the side walls 217a, 217b as well as the sides 213a, 213b,
Fig. 10 shows a schematic perspective view of another alternate embodiment of the substrate transfer chamber 300. In this embodiment the second section 328 includes a portion 328a located in front of the first section 326. The first section 326 can have substrate processing modules mounted on both is rear side 313 and on its front side 315. The portion 328a of the second section 328 is vertically aligned, at least partially, with the processing modules attached to the front side 315. The door opener and support assemblies 16' are located at the front of the second section 328 with the entrance apertures 350 into the frame 320 being located in the portion 328a. The sub-enclosure members and holders in the second sections 328 would be movable, such as rotating, to allow the robot in the first section 326 access to substrates on the holders in the second section 328. It should be understood that the foregoing description is only illustrative of the invention. Various alternatives and modifications can be devised by those skilled in the art without departing from the invention. Accordingly, the present invention is intended to embrace all such alternatives, modifications and variances which fall within the scope of the appended claims.

Claims

CLAIMSWhat is claimed is:
1. A substrate processing apparatus substrate transfer chamber for transferring substrates between substrate processing modules attached to the substrate transfer chamber, the substrate transfer chamber comprising:
a first section having substrate processing module mounting areas for mounting the substrate processing modules to an exterior of the first section, each mounting area having a hole through a wall of the transfer chamber for passing substrates between an interior of the first section and the processing modules; and
a second section extending from the first section, the second section having a portion which extends outward relative to the first section and has an interior which is in communication with the interior of the first section, wherein a vertical axis passing through at least one of substrate processing modules passes through the portion of the second section, and wherein the at least one substrate processing module and the interior of the portion of the second section are aligned, at least partially, one beneath the other.
2. A transfer chamber as in Claim 1 wherein the first section has multiple mounting areas vertically offset relative to each other.
3. A transfer chamber as in Claim 2 wherein at least two of the multiple mounting areas are aligned in a column.
4. A transfer chamber as in Claim 3 wherein the first section has multiple columns of the mounting areas for mounting the substrate processing modules and the interior of the portion of the second section one beneath the other.
5. A transfer chamber as in Claim 1 further comprising a substrate transport robot mounted to the first section for transporting substrates between the interior of the second section and through the holes in the mounting areas to the substrate processing modules.
6. A transfer chamber as in Claim 5 further comprising a substrate holder located in the interior of the portion of the second section.
7. A transfer chamber as in Claim 6 wherein the substrate holder is movably connected to the second section for extension into the interior of the first section.
8. A transfer chamber as in Claim 7 further comprising a sub-enclosure member located in the interior of the portion of the second section and extendable to a substrate entrance aperture into the interior of the first section.
9. A transfer chamber as in Claim 1 wherein the second section is horizontally aligned with a substrate entrance aperture into the substrate transfer chamber.
10. A transfer chamber as in Claim 9 wherein the second section is located at an opposite side of the first section from the substrate entrance aperture.
11. A substrate processing apparatus comprising:
substrate processing modules; a housing having the substrate processing modules mounted on an exterior side of the housing, the housing comprising an internal main transfer area;
a first substrate transfer robot connected to the housing having a movable arm assembly located in the main transfer area for moving substrates between the main transfer area and the substrate processing modules; and
a substrate holder mounted to the housing and located in the main transfer area, wherein a portion of the main transfer area in which the substrate holder is located is vertically arranged with at least one of the substrate processing modules one beneath the other.
12. An apparatus as in Claim 11 wherein at least two of the substrate processing modules are vertically offset relative to each other.
13. An apparatus as in Claim 12 wherein the at least two substrate processing modules are aligned in a column with the portion of the main transfer area.
14. An apparatus as in Claim 13 wherein the apparatus has multiple columns of the substrate processing modules.
15. An apparatus as in Claim 11 further comprising a second substrate transfer robot connected to the housing, the second robot comprising the substrate holder.
16. An apparatus as in Claim 15 further comprising a sub-enclosure member located in the portion of main transfer area and extendable to a substrate entrance aperture into the main transfer area.
17. An apparatus as in Claim 11 wherein the substrate holder is located opposite a substrate entrance aperture into the main transfer area.
18. A substrate processing apparatus comprising:
a housing;
a substrate transfer robot mounted to the housing;
substrate processing modules mounted to the housing; and
a sub-enclosure member movably mounted to the housing inside an interior main substrate transfer area of the housing,
wherein the sub-enclosure member is movable in a horizontal plane between a first retracted position and a second extended position, wherein the second extended position comprises the sub-enclosure member contacting an interior wall of the housing surrounding an aperture into the interior main substrate transfer area such that a door covering the aperture can be opened and substrates transferred through the aperture into and out of the sub-enclosure member without exposing the entire interior main substrate transfer area to the open aperture.
19. An apparatus as in Claim 18 further comprising a substrate holder inside the sub-enclosure member which is movable with the sub-enclosure member.
20. An apparatus as in Claim 18 wherein the first retracted position comprises the sub-enclosure member being located in a vertical axis with at least one of the substrate processing modules.
21. A substrate processing apparatus comprising:
a housing having a substrate transfer area including a main section and an outwardly extended section intersecting the main section in a horizontal plane;
a substrate transfer robot mounted to the housing and having a movable arm assembly located in the main section of the substrate transfer area;
a substrate support movably mounted to the housing in the horizontal plane between a retracted position inside the outwardly extended section of the substrate transfer area and an extended position inside the main section of the substrate transfer area; and
substrate processing modules connected to an exterior side of the housing;
wherein, in the retracted position, the substrate support is at least partially vertically aligned with at least one of the substrate processing modules .
22. A method for moving substrates between a portable substrate container and a main substrate transfer area in a substrate processing apparatus, the main substrate transfer area having a vacuum environment, the method comprising steps of:
locating the portable substrate container at a loading and unloading area at a substrate entrance aperture into the main substrate transfer area;
transferring support of the substrates from the portable substrate container directly onto a substrate support; and moving the substrates directly into the main substrate transfer area from the loading and unloading area.
23. A method as in Claim 22 wherein the step of moving the substrates directly into the main substrate transfer area comprises moving a main housing of the portable substrate container through the substrate entrance aperture, with the substrates supported in the main housing, into the main substrate transfer area.
24. A method as in Claim 22 wherein the step of moving the substrates directly into the main substrate transfer area comprises extending the substrate support directly into the portable substrate container.
25. A method as in Claim 24 wherein the substrate support is moved out of the main substrate transfer area into the loading and unloading area.
26. A method as in Claim 22 further comprising moving a sub-enclosure member in the main substrate transfer area adjacent the substrate entrance aperture and having the substrate support being located in the sub-enclosure member wherein the sub-enclosure member isolates the substrate support and an area inside the sub-enclosure member from the rest of the main substrate transfer area.
27. A method as in Claim 22 further comprising moving the substrate support with the substrates on the substrate support to an area inside the main substrate transfer area vertically beneath, at least partially, a substrate processing module of the substrate processing apparatus .
28. A method for moving substrates in a substrate transport chamber of a substrate processing apparatus comprising steps of:
moving the substrates from a portable substrate container directly onto a substrate support, the substrate support having a position in the chamber at least partially located in a vertical axis intersecting a substrate processing module connected to an exterior side of the chamber; and
moving the substrates from the substrate support by a substrate transport robot, the substrate transport robot having a movable arm assembly located in the chamber,
wherein the movable arm assembly stays within the chamber when moving the substrates onto and off of the substrate support.
29. A method for moving substrates in a substrate transport chamber of a substrate processing apparatus comprising steps of:
moving a sub-enclosure can in the substrate transport chamber adjacent an aperture into the chamber;
moving substrates through the aperture into the chamber inside the sub-enclosure can; and
moving the sub-enclosure can away from the aperture to allow a transport robot access to the substrates in the chamber.
30. A method for moving a substrate in a substrate transport chamber to substrate processing modules of a substrate processing apparatus comprising steps of: moving a substrate transport robot located in the substrate transport chamber from a first position to a second position to pick up the substrate onto an end effector of the robot, the step of moving between the first and second positions comprising a portion of the robot extending into a vertical axis passing through one of the substrate processing modules, but not in one of the substrate processing modules; and
moving the robot to move the end effector from the second position into a first one of the substrate processing modules through a side aperture in the first module.
31. A substrate processing apparatus comprising:
substrate processing modules;
a housing having the substrate processing modules mounted thereto, the housing comprising an internal main transfer area;
a first substrate transfer robot connected to the housing having a movable arm assembly located in the main transfer area for moving substrates between the main transfer area and at least one of the substrate processing modules; and
a substrate holder mounted to the housing and located in the main transfer area, wherein a portion of the main transfer area, in which the substrate holder is located, is at least partially vertically arranged above or below at least one of the substrate processing modules.
32. An apparatus as in Claim 31 wherein at least two of the substrate processing modules are vertically offset relative to each other.
33. An apparatus as in Claim 32 wherein the at least two substrate processing modules are aligned in a column with the portion of the main transfer area.
34. An apparatus as in Claim 33 wherein the apparatus has multiple columns of the substrate processing modules.
35. An apparatus as in Claim 31 further comprising a second substrate transfer robot connected to the housing, the second robot comprising the substrate holder.
36. An apparatus as in Claim 35 further comprising a sub-enclosure member located in the portion of main transfer area and extendable to a substrate entrance aperture into the main transfer area.
37. An apparatus as in Claim 31 wherein the substrate holder is located opposite a substrate entrance aperture into the main transfer area.
38. An apparatus as in Claim 31 wherein the housing comprises:
a first section having substrate processing module mounting areas for mounting the substrate processing modules to an exterior of the first section, each mounting area having a hole through a wall of the housing for passing substrates between an interior of the first section and the processing modules; and
a second section extending from the first section, the second section having a portion which extends outward relative to the first section and has an interior which is in communication with the interior of the first section, wherein a vertical axis passing through at least one of substrate processing modules passes through the portion of the second section, and wherein the at least one substrate processing module and the interior of the portion of the second section are aligned, at least partially, one beneath the other.
39. An apparatus as in Claim 38 wherein the first section has at least some of the mounting areas vertically offset relative to each other.
40. An apparatus as in Claim 39 wherein at least two of the mounting areas are aligned in a column.
41. An apparatus as in Claim 40 wherein the first section has multiple columns of the mounting areas for mounting the substrate processing modules and the interior of the portion of the second section one beneath the other.
42. An apparatus as in Claim 38 wherein the substrate holder is located in the interior of the portion of the second section.
43. An apparatus as in Claim 42 wherein the substrate holder is movably connected to the second section for extension into the interior of the first section.
44. An apparatus as in Claim 43 further comprising a sub-enclosure member located in the interior of the portion of the second section and extendable to a substrate entrance aperture into the interior of the first section.
45. An apparatus as in Claim 38 wherein the second section is horizontally aligned with a substrate entrance aperture into the substrate transfer chamber.
46. An apparatus as in Claim 45 wherein the second section is located at an opposite side of the first section from the substrate entrance aperture.
PCT/US2000/016288 1999-07-28 2000-06-14 Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module WO2001009011A1 (en)

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EP2366287A3 (en) * 2006-06-21 2012-05-16 Bayer CropScience AG Foam preparations for protecting plants
US10793433B2 (en) 2011-10-11 2020-10-06 Solvay Sa Process for producing hydrogen peroxide

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US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus

Patent Citations (1)

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US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus

Cited By (5)

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Publication number Priority date Publication date Assignee Title
WO2002073665A2 (en) * 2001-03-12 2002-09-19 Applied Materials, Inc. Workpiece distribution and processing in a high throughput stacked frame
WO2002073665A3 (en) * 2001-03-12 2003-02-27 Applied Materials Inc Workpiece distribution and processing in a high throughput stacked frame
EP2366287A3 (en) * 2006-06-21 2012-05-16 Bayer CropScience AG Foam preparations for protecting plants
US9215868B2 (en) 2006-06-21 2015-12-22 Bayer Intellectual Property Gmbh Low-foam preparations for crop protection
US10793433B2 (en) 2011-10-11 2020-10-06 Solvay Sa Process for producing hydrogen peroxide

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JP2003506861A (en) 2003-02-18

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