WO2000058029A1 - Vacuum deposition and curing of oligomers and resins - Google Patents
Vacuum deposition and curing of oligomers and resins Download PDFInfo
- Publication number
- WO2000058029A1 WO2000058029A1 PCT/US2000/003334 US0003334W WO0058029A1 WO 2000058029 A1 WO2000058029 A1 WO 2000058029A1 US 0003334 W US0003334 W US 0003334W WO 0058029 A1 WO0058029 A1 WO 0058029A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polymer
- curing
- thin layer
- depositing
- vacuum
- Prior art date
Links
- 239000011347 resin Substances 0.000 title claims description 17
- 229920005989 resin Polymers 0.000 title claims description 17
- 238000001771 vacuum deposition Methods 0.000 title description 7
- 229920000642 polymer Polymers 0.000 claims abstract description 77
- 239000007787 solid Substances 0.000 claims abstract description 36
- 239000011344 liquid material Substances 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000007872 degassing Methods 0.000 claims abstract description 11
- 230000006872 improvement Effects 0.000 claims abstract description 4
- 239000005518 polymer electrolyte Substances 0.000 claims abstract 3
- 239000000758 substrate Substances 0.000 claims description 31
- 239000000178 monomer Substances 0.000 claims description 29
- 238000000151 deposition Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 12
- 229910052744 lithium Inorganic materials 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- -1 oligomer Substances 0.000 claims description 7
- 239000003792 electrolyte Substances 0.000 claims description 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 3
- 239000010406 cathode material Substances 0.000 claims 5
- 239000002001 electrolyte material Substances 0.000 claims 4
- 238000003892 spreading Methods 0.000 abstract description 6
- 230000007480 spreading Effects 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000002347 injection Methods 0.000 abstract description 2
- 239000007924 injection Substances 0.000 abstract description 2
- 238000009736 wetting Methods 0.000 abstract description 2
- 229920001940 conductive polymer Polymers 0.000 description 8
- 239000011888 foil Substances 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 3
- 239000005022 packaging material Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- VOBUAPTXJKMNCT-UHFFFAOYSA-N 1-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound CCCCCC(OC(=O)C=C)OC(=O)C=C VOBUAPTXJKMNCT-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- MHCFAGZWMAWTNR-UHFFFAOYSA-M lithium perchlorate Chemical compound [Li+].[O-]Cl(=O)(=O)=O MHCFAGZWMAWTNR-UHFFFAOYSA-M 0.000 description 1
- 229910001486 lithium perchlorate Inorganic materials 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates generally to a method of vacuum deposition and curing of oligomers and resins useful for making multilayer laminate structures from polymers or polymers in combination with other materials. More specifically, the present invention relates to forming solid polymer laminate layers under vacuum. Additional layers of polymer or non-polymer material may be added under vacuum as well.
- the term "monomer” is defined as a molecule of simple structure and low molecular weight that is capable of combining with a number of like or unlike molecules to form a polymer. Examples include but are not limited to simple acrylated molecules, for example hexanedioldiacrylate, tetraethyleneglycoldiacrylate; styrene, methyl styrene; and combinations thereof. Monomer molecular weight is generally 1000 or less except for fluorinated monomers of about 2000 or more. Monomers may be combined to form oligomers but do not combine to form other monomers.
- oligomer is defined as a compound molecule of at least two monomers that is radiation curable. Oligomer includes low molecular weight resins. Low molecular weight is herein defined as about 1 ,000 to about 20,000 exclusive of fiuroinated monomers. Oligomers are usually liquid or easily liquifiable. Oligomers do not combine to form monomers.
- non-polymer includes but is not limited to inorganic materials for example metal, oxide, nitride, carbide, fluoride and combinations thereof.
- resin is defined as a compound having a higher molecular weight (generally greater than 20,000) and generally solid with no definite melting point, for example polystyrene, epoxy polyamine, phenolic, acrylic resin for example polymethylmethacrylate and combinations thereof.
- the term "material” is inclusive of oligomer, resin, oligomer plus monomer, resin plus monomer and combinations thereof, but exclusive of monomer.
- Laminate structures are used in many applications including but not limited to electronic devices, packaging material, and solar reflectors. Laminate structures in electronic devices are found in devices including but not limited to circuit elements and electrochromic devices wherein conductive polymer layers are combined and may include a non-polymer layer. Electrochromic devices include but are not limited to switchable mirrors and switchable windows. Circuit elements include active elements, for example fuel cells and batteries, and passive elements, for example capacitors. Presently, many laminate structures are made with solid polymer laminate layers. In packaging material and solar reflectors, a metal layer may be added to enhance optical reflectance. In electronic devices, a metal layer may be added to enhance electrical conductivity.
- the polymer layer or layers In packaging material and solar reflectors, it is not necessary that the polymer layer or layers be conductive, whereas in electronic devices, especially batteries, the polymer layers must be conductive to act as electrolytes, anodes, and cathodes.
- Certain polymers when doped with selected salts are known to make suitable solid polymer ion conductive layers. Polymers known to be useful include but are not limited to polyethyleneoxide, polypropyleneoxide, polyorgansulfides, and polyanaline.
- Suitable salts include but are not limited to lithium salts, for example lithium perchlorate, and lithium hexafluoroarsenate.
- the anode, cathode, and electrolyte layers may all be of solid polymer material, when making a lithium polymer battery, it is preferred to have a layer of lithium metal as an anode.
- polymers having added compounds including but not limited to conductive powders and dyes, may be made by the present invention.
- Polymer layers are formed in production quantities by depositing in an atomsphere a thin layer of a liquid mixture containing monomer, oligomer, resin and usually combinations thereof onto a moving substrate that carries the liquid material layer while and until it is cured.
- Many means for forming polymer layers in an atmosphere are available, including but not limited to physical or mechanical liquid-material spreading apparati; for example, roll coaters, gravure roll coaters, wire wound rods, doctor blades, and slotted dies.
- Vacuum deposition of monomer is shown in U.S. patent 5,260,095 using the physical or mechanical liquid-monomer spreading apparati previously set forth.
- means for evaporation and deposition of a monomer vapor, for example polymer multilayer deposition has been done in a vacuum as described in U.S. patent 5,681 ,615.
- the substrate has a velocity different from a nozzle or bath that deposits the liquid material onto the substrate.
- the term "moving substrate” as used herein excludes a situation wherein there is no relative motion or velocity differential between substrate and liquid material dispensing means.
- the polymer multilayer deposition technique is distinct from liquid- monomer spreading techniques because polymer multilayer deposition requires flash evaporation of the monomer.
- a monomer is atomized into a heated chamber that is under vacuum. Within the heated chamber the monomer droplets are evaporated, then exit the heated chamber, and monomer vapor condenses upon a substrate and is subsequently cured. Curing may be done by any means including but not limited to heat, infrared light, ultraviolet light, electron beam, and other radiation.
- a thin metal layer with a conductive polymer layer When fabricating a battery, several techniques are used to combine a thin metal layer with a conductive polymer layer.
- One technique of battery fabrication is to combine a metal foil with a conductive polymer layer by press bonding a metal foil layer to a solid conductive polymer layer.
- Another technique is to spread uncured liquid material onto a metal foil and subsequently cure the liquid material to form a solid conductive polymer layer.
- Use of metal foil, especially lithium metal foil results in minimum metal thicknesses of from about 1.5 mils (40 micrometers) to about 2 mils (50 micrometers).
- Other battery fabrication techniques include making a thin metal layer by sputtering, plating, or vacuum depositing metal onto a metal substrate.
- conductive polymer is then placed in contact with the metal.
- Either solid conductive polymer or uncured liquid material may be brought into contact with the metal to form the battery.
- Polymer laminate structures including but not limited to batteries, are made by a procedure wherein individual layers are sequentially and separately formed then combined. ° The performance and lifetime of polymer/polymer and polymer/non- polymer laminate structures depend upon the quality of bonding between laminate layers. Bonding quality is affected by the presence of small, even microscale, areas of non-bonding at an interface between laminate layers. The bonding is especially critical between dissimilar layers; for example, polymer and metal layers.
- Bonding between layers is therefore of great importance and is enhanced by several means, including but not limited to mechanical presses, and application of a second layer as a liquid with subsequent solidification upon a first solid layer at 5 atmospheric pressure.
- the difficulty with these methods is that the low cost assembly of pressing or liquid application leads to low quality bonding as identified in U.S. Pat. No. 4,098,965, issued July 4, 1976, to Kinsman, column 1 , lines 47-50, wherein he states "[g]ases usually air, [that] are included in the void regions of the battery during assembly . . .”. o It is of great interest to those skilled in the art, then, to make batteries and other products of polymer layers having high bond quality, low permeability, while making them in a cost effective manner.
- the present invention is the formation of solid polymer layers under vacuum. More specifically, according to a first aspect of the present invention, the use of "standard" polymer-layer making equipment, is generally used in an atmospheric environment in a vacuum, and degassing the material prior to injection into the vacuum. Additionally, other layers of polymer or non-polymer material may be vacuum deposited onto solid polymer layers. Non-polymer materials include but are not limited to inorganic materials for example metal, oxide, nitride, carbide, fluoride and combinations thereof.
- Advantages of forming polymer layers in a vacuum include use of less to no photoinitiator for curing, faster curing, and fewer impurities in the polymer. Further advantages are improvement in material properties, including no trapped gas, resulting in greater density and reduced material wetting angle that facilitates spreading of the material and provides a smoother finished surface.
- the method of the present invention is depositing a thin layer of material onto a moving substrate followed by curing the material and forming the solid polymer layer in a vacuum chamber, and degassing the material prior to depositing the degassed material onto the moving substrate in the vacuum chamber.
- the substrate may be a temporary substrate from which the solid polymer layer product is removed after curing, or the substrate may be a permanent substrate forming part of the final product.
- the permanent substrate can be as simple as a base polymer layer having a metalized surface, for example, a solar reflector.
- the present invention may be used to place a protective coating upon the metallic surface.
- the permanent substrate may be as complex as a many- layered monolithic electronic device, for example, a capacitor in which the present invention may be used to place multiple polymer and metal layers to construct the device.
- any polymer-layer making method done in air or other atmosphere may be adapted to be carried out in a vacuum.
- the apparatus of the present invention is a combination of known means with additional means that had not been combined prior to the present invention.
- Apparatus for making a solid polymer layer includes a moving substrate together with means for depositing a thin layer of liquid mate ⁇ al onto the moving substrate, followed by means for curing the liquid material and forming the solid polymer. These means are combined with (a) means for creating a vacuum about the moving substrate, and (b) means for degassing the liquid material prior to deposi- ting the degassed liquid material onto the moving substrate in the vacuum.
- the non-polymer is vacuum deposited onto a cured solid polymer layer.
- the non-polymer may be vacuum deposited onto a substrate, then liquid material deposited and spread under vacuum onto the non-polymer surface. Any vacuum deposition technique may be used for the non-polymer material. Vacuum deposition of metal results in metal thickness from about 10 angstroms to usually not more than about 1 mils (25 micrometers), although thickness greater than 1 mil may be desired in certain applications.
- the cathode and electrolyte are conductive polymer layers and that the anode is lithium metal.
- Creating a vacuum about a moving substrate may be done in many ways, including housing an entire solid polymer-making apparatus in a vacuum chamber.
- a vacuum chamber may contain a moving substrate and a nozzle or coating head penetrating a wall of the vacuum chamber for admitting liquid material.
- Degassing of the liquid material may be carried out in many ways, but it is preferred that the material be degassed by stirring it in a sealed vessel and removing residual gas with a vacuum pump.
- the vacuum pump draws a vacuum of a pressure that removes a sufficient quantity of gas from the liquid material to permit smooth flow of the liquid material through a nozzle into the vacuum chamber with reduced entrained gas expansion, thereby preventing nozzle spitting.
- the amount of entrained gas must also be sufficiently low to result in an acceptable quality polymer. Acceptable quality includes but is not limited to the final polymer being be free of void spaces and exhibiting a smooth surface.
- the vacuum chamber may admit several liquid material and other material inlets for permitting multiple monomer/polymer layers made from monomer, oligomer, resin and combinations thereof, curing means, as well as non-polymer vacuum deposition means.
- a multiple inlet vacuum chamber laminate structures are made in one pass through the chamber. For example, a polymer layer may be cured, then a non-polymer layer deposited, and a subsequent polymer layer covering the non-polymer surface put in place, all within the vacuum chamber. Multiple passes of a product through the vacuum chamber can develop stacks of layered sets.
- the substrate velocity may be adjusted to accommodate both processes. Additionally, the flow of liquid material through a nozzle may be adjusted to accommodate both processes.
- solid particles may be included as a filler in the liquid material.
- Filler includes but is not limited to solid monomer, solid oligomer, solid resin, ceramic, graphite, carbon black, and combinations thereof. The appended claims are therefore intended to cover all such changes and modifications as fall within the true spirit and scope of the invention.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000607770A JP2002540293A (en) | 1999-03-31 | 2000-02-08 | Vacuum deposition and curing of oligomers and resins |
EP00908557A EP1165253A1 (en) | 1999-03-31 | 2000-02-08 | Vacuum deposition and curing of oligomers and resins |
KR1020017012486A KR20010114238A (en) | 1999-03-31 | 2000-02-08 | Vacuum deposition and curing of oligomers and resins |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/283,075 US6358570B1 (en) | 1999-03-31 | 1999-03-31 | Vacuum deposition and curing of oligomers and resins |
US09/283,075 | 1999-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000058029A1 true WO2000058029A1 (en) | 2000-10-05 |
Family
ID=23084389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/003334 WO2000058029A1 (en) | 1999-03-31 | 2000-02-08 | Vacuum deposition and curing of oligomers and resins |
Country Status (6)
Country | Link |
---|---|
US (1) | US6358570B1 (en) |
EP (1) | EP1165253A1 (en) |
JP (1) | JP2002540293A (en) |
KR (1) | KR20010114238A (en) |
TW (1) | TW478203B (en) |
WO (1) | WO2000058029A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003072273A1 (en) * | 2002-02-26 | 2003-09-04 | Moltech Corporation | Methods and apparatus for vacuum thin film deposition |
WO2022132449A1 (en) * | 2020-12-15 | 2022-06-23 | Applied Materials, Inc. | Method of manufacturing an anode structure, vacuum deposition system, anode structure, and lithium battery layer stack |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100330748A1 (en) * | 1999-10-25 | 2010-12-30 | Xi Chu | Method of encapsulating an environmentally sensitive device |
US7198832B2 (en) | 1999-10-25 | 2007-04-03 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US6866901B2 (en) | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US6413645B1 (en) | 2000-04-20 | 2002-07-02 | Battelle Memorial Institute | Ultrabarrier substrates |
US20090191342A1 (en) * | 1999-10-25 | 2009-07-30 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US6623861B2 (en) * | 2001-04-16 | 2003-09-23 | Battelle Memorial Institute | Multilayer plastic substrates |
US20070196682A1 (en) * | 1999-10-25 | 2007-08-23 | Visser Robert J | Three dimensional multilayer barrier and method of making |
US6468595B1 (en) * | 2001-02-13 | 2002-10-22 | Sigma Technologies International, Inc. | Vaccum deposition of cationic polymer systems |
US20090208754A1 (en) * | 2001-09-28 | 2009-08-20 | Vitex Systems, Inc. | Method for edge sealing barrier films |
TW200304955A (en) * | 2002-04-05 | 2003-10-16 | Matsushita Electric Ind Co Ltd | Method and apparatus for producing resin thin film |
US8900366B2 (en) * | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US8808457B2 (en) | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US6804989B2 (en) * | 2002-10-31 | 2004-10-19 | General Atomics | Method and apparatus for measuring ultralow water permeation |
US7018713B2 (en) | 2003-04-02 | 2006-03-28 | 3M Innovative Properties Company | Flexible high-temperature ultrabarrier |
US7510913B2 (en) * | 2003-04-11 | 2009-03-31 | Vitex Systems, Inc. | Method of making an encapsulated plasma sensitive device |
US7648925B2 (en) * | 2003-04-11 | 2010-01-19 | Vitex Systems, Inc. | Multilayer barrier stacks and methods of making multilayer barrier stacks |
BRPI0413295A (en) * | 2003-08-04 | 2006-10-10 | Ciba Sc Holding Ag | process for producing strongly adherent coatings |
US7178384B2 (en) * | 2004-02-04 | 2007-02-20 | General Atomics | Method and apparatus for measuring ultralow permeation |
US7257990B2 (en) * | 2005-04-25 | 2007-08-21 | General Atomics | Accelerated ultralow moisture permeation measurement |
US20070020451A1 (en) | 2005-07-20 | 2007-01-25 | 3M Innovative Properties Company | Moisture barrier coatings |
US7767498B2 (en) | 2005-08-25 | 2010-08-03 | Vitex Systems, Inc. | Encapsulated devices and method of making |
KR100673543B1 (en) * | 2006-02-15 | 2007-01-25 | 노드슨상산 주식회사 | Apparatus for curing membrane of proton exchange type fuel cell |
US20080006819A1 (en) * | 2006-06-19 | 2008-01-10 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
US8088502B2 (en) * | 2006-09-20 | 2012-01-03 | Battelle Memorial Institute | Nanostructured thin film optical coatings |
KR20150015013A (en) * | 2006-12-29 | 2015-02-09 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | Method of making inorganic or inorganic/organic hybrid films |
CN101573471A (en) * | 2006-12-29 | 2009-11-04 | 3M创新有限公司 | Method of curing metal alkoxide-containing films |
US8084102B2 (en) * | 2007-02-06 | 2011-12-27 | Sion Power Corporation | Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions |
US8119500B2 (en) * | 2007-04-25 | 2012-02-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer bonding |
CN101945965A (en) * | 2007-12-28 | 2011-01-12 | 3M创新有限公司 | Flexible package film system |
EP2304069A4 (en) * | 2008-06-30 | 2012-01-04 | 3M Innovative Properties Co | Method of making inorganic or inorganic/organic hybrid barrier films |
US9337446B2 (en) * | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
US9184410B2 (en) | 2008-12-22 | 2015-11-10 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US20100167002A1 (en) * | 2008-12-30 | 2010-07-01 | Vitex Systems, Inc. | Method for encapsulating environmentally sensitive devices |
US8460762B2 (en) * | 2009-12-16 | 2013-06-11 | Ideon Llc | Electron beam curable composition for curing in a vacuum chamber |
US8590338B2 (en) * | 2009-12-31 | 2013-11-26 | Samsung Mobile Display Co., Ltd. | Evaporator with internal restriction |
US20110162705A1 (en) * | 2010-01-06 | 2011-07-07 | Popa Paul J | Moisture resistant photovoltaic devices with elastomeric, polysiloxane protection layer |
EP2508646A1 (en) | 2011-04-05 | 2012-10-10 | Bayer Material Science AG | A process for multi-layer continuous roll-to-roll coating |
US11058161B2 (en) | 2012-02-16 | 2021-07-13 | Xefco Pty Ltd | Heat reflecting composites with knitted insulation |
US10160184B2 (en) | 2013-06-03 | 2018-12-25 | Xefco Pty Ltd | Insulated radiant barriers in apparel |
SG11201600447YA (en) * | 2013-08-21 | 2016-03-30 | Applied Materials Inc | Variable frequency microwave (vfm) processes and applications in semiconductor thin film fabrications |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE704297A (en) * | 1965-09-13 | 1968-02-01 | ||
US5260095A (en) * | 1992-08-21 | 1993-11-09 | Battelle Memorial Institute | Vacuum deposition and curing of liquid monomers |
Family Cites Families (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3475307A (en) | 1965-02-04 | 1969-10-28 | Continental Can Co | Condensation of monomer vapors to increase polymerization rates in a glow discharge |
US3607365A (en) | 1969-05-12 | 1971-09-21 | Minnesota Mining & Mfg | Vapor phase method of coating substrates with polymeric coating |
US4055530A (en) * | 1975-02-27 | 1977-10-25 | Standard Oil Company (Indiana) | Aqueous dispersion of addition polymer of an alpha-beta-ethylenically unsaturated monomer and suspended polypropylene particles |
US4098965A (en) | 1977-01-24 | 1978-07-04 | Polaroid Corporation | Flat batteries and method of making the same |
JPS55129345A (en) | 1979-03-29 | 1980-10-07 | Ulvac Corp | Electron beam plate making method by vapor phase film formation and vapor phase development |
US4581337A (en) | 1983-07-07 | 1986-04-08 | E. I. Du Pont De Nemours And Company | Polyether polyamines as linking agents for particle reagents useful in immunoassays |
JPS58156848A (en) | 1982-03-15 | 1983-09-17 | Fuji Photo Film Co Ltd | Ion selective electrode and its manufacture |
US4521458A (en) * | 1983-04-01 | 1985-06-04 | Nelson Richard C | Process for coating material with water resistant composition |
US4557978A (en) | 1983-12-12 | 1985-12-10 | Primary Energy Research Corporation | Electroactive polymeric thin films |
US5032461A (en) | 1983-12-19 | 1991-07-16 | Spectrum Control, Inc. | Method of making a multi-layered article |
US4842893A (en) | 1983-12-19 | 1989-06-27 | Spectrum Control, Inc. | High speed process for coating substrates |
EP0155823B1 (en) | 1984-03-21 | 1989-07-26 | Nihon Shinku Gijutsu Kabushiki Kaisha | Improvements in or relating to the covering of substrates with synthetic resin films |
US4695618A (en) | 1986-05-23 | 1987-09-22 | Ameron, Inc. | Solventless polyurethane spray compositions and method for applying them |
US4954371A (en) | 1986-06-23 | 1990-09-04 | Spectrum Control, Inc. | Flash evaporation of monomer fluids |
JP2530350B2 (en) | 1986-06-23 | 1996-09-04 | スペクトラム コントロール,インコーポレイテッド | Monomer Flash evaporation of fluids |
JPH07105034B2 (en) | 1986-11-28 | 1995-11-13 | 株式会社日立製作所 | Magnetic recording body |
JP2627619B2 (en) | 1987-07-13 | 1997-07-09 | 日本電信電話株式会社 | Organic amorphous film preparation method |
US4847469A (en) | 1987-07-15 | 1989-07-11 | The Boc Group, Inc. | Controlled flow vaporizer |
JPH02183230A (en) | 1989-01-09 | 1990-07-17 | Sharp Corp | Organic nonlinear optical material and production thereof |
JP2678055B2 (en) | 1989-03-30 | 1997-11-17 | シャープ株式会社 | Manufacturing method of organic compound thin film |
US5792550A (en) | 1989-10-24 | 1998-08-11 | Flex Products, Inc. | Barrier film having high colorless transparency and method |
US5711816A (en) | 1990-07-06 | 1998-01-27 | Advanced Technolgy Materials, Inc. | Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same |
US5362328A (en) | 1990-07-06 | 1994-11-08 | Advanced Technology Materials, Inc. | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem |
JP2755844B2 (en) | 1991-09-30 | 1998-05-25 | シャープ株式会社 | Plastic substrate liquid crystal display |
US5372851A (en) | 1991-12-16 | 1994-12-13 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a chemically adsorbed film |
US5759329A (en) | 1992-01-06 | 1998-06-02 | Pilot Industries, Inc. | Fluoropolymer composite tube and method of preparation |
JP2958186B2 (en) | 1992-04-20 | 1999-10-06 | シャープ株式会社 | Plastic substrate liquid crystal display |
US5427638A (en) | 1992-06-04 | 1995-06-27 | Alliedsignal Inc. | Low temperature reaction bonding |
GB9215928D0 (en) | 1992-07-27 | 1992-09-09 | Cambridge Display Tech Ltd | Manufacture of electroluminescent devices |
DE4232390A1 (en) | 1992-09-26 | 1994-03-31 | Roehm Gmbh | Process for producing silicon oxide scratch-resistant layers on plastics by plasma coating |
JPH06182935A (en) | 1992-12-18 | 1994-07-05 | Bridgestone Corp | Gas barrier rubber laminate and manufacture thereof |
KR100241470B1 (en) | 1993-10-04 | 2000-02-01 | 지. 쇼 데이비드 | Cross-linked acrylate coating material useful for forming capacitor dielectric |
US5440446A (en) | 1993-10-04 | 1995-08-08 | Catalina Coatings, Inc. | Acrylate coating material |
US5654084A (en) | 1994-07-22 | 1997-08-05 | Martin Marietta Energy Systems, Inc. | Protective coatings for sensitive materials |
US6083628A (en) | 1994-11-04 | 2000-07-04 | Sigma Laboratories Of Arizona, Inc. | Hybrid polymer film |
US5607789A (en) | 1995-01-23 | 1997-03-04 | Duracell Inc. | Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same |
US5620524A (en) | 1995-02-27 | 1997-04-15 | Fan; Chiko | Apparatus for fluid delivery in chemical vapor deposition systems |
US5811183A (en) | 1995-04-06 | 1998-09-22 | Shaw; David G. | Acrylate polymer release coated sheet materials and method of production thereof |
US5554220A (en) | 1995-05-19 | 1996-09-10 | The Trustees Of Princeton University | Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
JPH08325713A (en) | 1995-05-30 | 1996-12-10 | Matsushita Electric Works Ltd | Formation of metallic film on organic substrate surface |
US5629389A (en) | 1995-06-06 | 1997-05-13 | Hewlett-Packard Company | Polymer-based electroluminescent device with improved stability |
EP0835279B1 (en) | 1995-06-30 | 2003-12-17 | Commonwealth Scientific And Industrial Research Organisation | Improved surface treatment of polymers |
US5681615A (en) | 1995-07-27 | 1997-10-28 | Battelle Memorial Institute | Vacuum flash evaporated polymer composites |
JPH0959763A (en) | 1995-08-25 | 1997-03-04 | Matsushita Electric Works Ltd | Formation of metallic film on surface of organic substrate |
US5723219A (en) | 1995-12-19 | 1998-03-03 | Talison Research | Plasma deposited film networks |
DE19603746A1 (en) | 1995-10-20 | 1997-04-24 | Bosch Gmbh Robert | Electroluminescent layer system |
US5686360A (en) | 1995-11-30 | 1997-11-11 | Motorola | Passivation of organic devices |
US5811177A (en) | 1995-11-30 | 1998-09-22 | Motorola, Inc. | Passivation of electroluminescent organic devices |
US5684084A (en) | 1995-12-21 | 1997-11-04 | E. I. Du Pont De Nemours And Company | Coating containing acrylosilane polymer to improve mar and acid etch resistance |
US5955161A (en) | 1996-01-30 | 1999-09-21 | Becton Dickinson And Company | Blood collection tube assembly |
US5731661A (en) | 1996-07-15 | 1998-03-24 | Motorola, Inc. | Passivation of electroluminescent organic devices |
US5902688A (en) | 1996-07-16 | 1999-05-11 | Hewlett-Packard Company | Electroluminescent display device |
US5693956A (en) | 1996-07-29 | 1997-12-02 | Motorola | Inverted oleds on hard plastic substrate |
US5844363A (en) | 1997-01-23 | 1998-12-01 | The Trustees Of Princeton Univ. | Vacuum deposited, non-polymeric flexible organic light emitting devices |
US5948552A (en) | 1996-08-27 | 1999-09-07 | Hewlett-Packard Company | Heat-resistant organic electroluminescent device |
WO1998010116A1 (en) | 1996-09-05 | 1998-03-12 | Talison Research | Ultrasonic nozzle feed for plasma deposited film networks |
KR19980033213A (en) | 1996-10-31 | 1998-07-25 | 조셉제이.스위니 | How to reduce the generation of particulate matter in the sputtering chamber |
US5821692A (en) | 1996-11-26 | 1998-10-13 | Motorola, Inc. | Organic electroluminescent device hermetic encapsulation package |
US5912069A (en) | 1996-12-19 | 1999-06-15 | Sigma Laboratories Of Arizona | Metal nanolaminate composite |
US5872355A (en) | 1997-04-09 | 1999-02-16 | Hewlett-Packard Company | Electroluminescent device and fabrication method for a light detection system |
US5902641A (en) | 1997-09-29 | 1999-05-11 | Battelle Memorial Institute | Flash evaporation of liquid monomer particle mixture |
US6224948B1 (en) | 1997-09-29 | 2001-05-01 | Battelle Memorial Institute | Plasma enhanced chemical deposition with low vapor pressure compounds |
US5965907A (en) | 1997-09-29 | 1999-10-12 | Motorola, Inc. | Full color organic light emitting backlight device for liquid crystal display applications |
EP0916394B1 (en) | 1997-11-14 | 2004-03-10 | Sharp Kabushiki Kaisha | Method of manufacturing modified particles and manufacturing device therefor |
US6045864A (en) | 1997-12-01 | 2000-04-04 | 3M Innovative Properties Company | Vapor coating method |
DE19802740A1 (en) | 1998-01-26 | 1999-07-29 | Leybold Systems Gmbh | Process for treating surfaces of plastic substrates |
US5996498A (en) | 1998-03-12 | 1999-12-07 | Presstek, Inc. | Method of lithographic imaging with reduced debris-generated performance degradation and related constructions |
US5904958A (en) | 1998-03-20 | 1999-05-18 | Rexam Industries Corp. | Adjustable nozzle for evaporation or organic monomers |
US6146225A (en) | 1998-07-30 | 2000-11-14 | Agilent Technologies, Inc. | Transparent, flexible permeability barrier for organic electroluminescent devices |
-
1999
- 1999-03-31 US US09/283,075 patent/US6358570B1/en not_active Expired - Lifetime
-
2000
- 2000-02-08 JP JP2000607770A patent/JP2002540293A/en active Pending
- 2000-02-08 EP EP00908557A patent/EP1165253A1/en not_active Withdrawn
- 2000-02-08 WO PCT/US2000/003334 patent/WO2000058029A1/en not_active Application Discontinuation
- 2000-02-08 KR KR1020017012486A patent/KR20010114238A/en not_active Application Discontinuation
- 2000-02-14 TW TW089102400A patent/TW478203B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE704297A (en) * | 1965-09-13 | 1968-02-01 | ||
US5260095A (en) * | 1992-08-21 | 1993-11-09 | Battelle Memorial Institute | Vacuum deposition and curing of liquid monomers |
US5395644A (en) * | 1992-08-21 | 1995-03-07 | Battelle Memorial Institute | Vacuum deposition and curing of liquid monomers |
US5547508A (en) * | 1992-08-21 | 1996-08-20 | Battelle Memorial Institute | Vacuum deposition and curing of liquid monomers apparatus |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003072273A1 (en) * | 2002-02-26 | 2003-09-04 | Moltech Corporation | Methods and apparatus for vacuum thin film deposition |
WO2022132449A1 (en) * | 2020-12-15 | 2022-06-23 | Applied Materials, Inc. | Method of manufacturing an anode structure, vacuum deposition system, anode structure, and lithium battery layer stack |
US11888143B2 (en) | 2020-12-15 | 2024-01-30 | Applied Materials, Inc. | Method of manufacturing an anode structure, vacuum deposition system, anode structure, and lithium battery layer stack |
Also Published As
Publication number | Publication date |
---|---|
EP1165253A1 (en) | 2002-01-02 |
KR20010114238A (en) | 2001-12-31 |
US6358570B1 (en) | 2002-03-19 |
TW478203B (en) | 2002-03-01 |
JP2002540293A (en) | 2002-11-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6358570B1 (en) | Vacuum deposition and curing of oligomers and resins | |
US5260095A (en) | Vacuum deposition and curing of liquid monomers | |
US6879481B2 (en) | Layered product and capacitor | |
US5032461A (en) | Method of making a multi-layered article | |
US8609239B2 (en) | Release film, ceramic part sheet and process for their production, and process for production of ceramic part | |
JP3197563B2 (en) | Vacuum flash evaporated polymer composites | |
EP1035553B1 (en) | Methods for producing a layered product | |
US20020158307A1 (en) | Laminated body, capacitor, electronic part, and method and device for manufacturing the laminated body, capacitor, and electronic part | |
EP3811389A1 (en) | Solid electrolytic capacitor | |
CN111971767A (en) | Solid electrolytic capacitor containing internal conductive polymer film deposited by sequential vapor phase deposition | |
EP0339844A2 (en) | Multi layer structure and process for making same | |
Affinito | Vacuum deposition and curing of liquid monomers | |
JP3956675B2 (en) | Capacitor | |
JPS5991129A (en) | Polymer article having conductive layer | |
WO2024014457A1 (en) | Thin film polymer laminated capacitor and manufacturing method therefor | |
US20210094226A1 (en) | Oxidation polymerization additive manufacturing | |
CN1085393C (en) | Structure and production of solid electrolytic capacitor | |
JP2023150741A (en) | solid electrolytic capacitor | |
Shaw et al. | Use of A New High Speed Acrylate Deposition Process to Make Novel Multilayer Structures | |
CN115136268A (en) | Capacitor element, electrolytic capacitor, insulating material, and method for manufacturing mounting substrate | |
JPH10315384A (en) | Film having coat formed thereon and manufacture thereof | |
FR2634314A1 (en) | METHOD FOR MANUFACTURING A HIGH VOLTAGE ELECTRICAL CAPACITOR AND CAPACITOR SO OBTAINED | |
JP2000296575A (en) | Gas barrier material and its manufacture | |
JP2002347050A (en) | Method for manufacturing porous resin thin film and method for manufacturing battery structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
ENP | Entry into the national phase |
Ref country code: JP Ref document number: 2000 607770 Kind code of ref document: A Format of ref document f/p: F |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2000908557 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020017012486 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 1020017012486 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2000908557 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 2000908557 Country of ref document: EP |
|
WWR | Wipo information: refused in national office |
Ref document number: 1020017012486 Country of ref document: KR |