WO2000031550A1 - Proof mass support for accelerometers - Google Patents

Proof mass support for accelerometers Download PDF

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Publication number
WO2000031550A1
WO2000031550A1 PCT/US1999/027864 US9927864W WO0031550A1 WO 2000031550 A1 WO2000031550 A1 WO 2000031550A1 US 9927864 W US9927864 W US 9927864W WO 0031550 A1 WO0031550 A1 WO 0031550A1
Authority
WO
WIPO (PCT)
Prior art keywords
support
flexible supports
proof mass
housing
flexible
Prior art date
Application number
PCT/US1999/027864
Other languages
French (fr)
Inventor
Ho Jung Paik
Martin V. Moody
Original Assignee
University Of Maryland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University Of Maryland filed Critical University Of Maryland
Priority to AU16333/00A priority Critical patent/AU1633300A/en
Publication of WO2000031550A1 publication Critical patent/WO2000031550A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration

Definitions

  • the present invention relates to a proof mass support for accelerometers, and more particularly to a support for use with either angular or linear accelerometers.
  • accelerometers are adapted to be utilized in many applications such as gravimeters,
  • the present invention provides at least four different flexible supports for
  • These flexible supports include a first pair which are generally planar and are spaced from one another and
  • the flexible supports also include a second
  • the supports are all substantially disposed in planes passing through th axis of rotation of the body of the proof mass.
  • the planes are generally parallel with one another and are spaced from one another in the direction of motion of the device.
  • the present invention has a construction wherein the housing, the proof mass
  • the invention also provides a design which can be successfully employed at
  • each of the flexible supports includes at least one sheet of
  • Fig. 1 is a top perspective view of a proof mass support for an angular
  • Fig. 2 is a top view of the support shown in Fig. 1 ;
  • Fig. 3 is a sectional view taken along line 3-3 of Fig. 1;
  • Fig. 4 is a top perspective view of a modified support for an angular
  • Fig. 5 is a top view of the support shown in Fig. 4;
  • Fig. 6 is a sectional view taken along line 6-6 of Fig. 5;
  • Fig. 7 is a top perspective view of a proof mass support for a linear accelerometer
  • Fig. 8 is a front view of the support shown in Fig. 7;
  • Fig. 9 is a sectional view taken along line 9-9 of Fig. 8;
  • Fig. 10 is a top perspective view of a modified support for a linear accelerometer
  • Fig. 11 is a front view of the support shown in Fig. 10.
  • Fig. 12 is a sectional view taken along line 12-12 of Fig. 11.
  • FIG. 1-3 a single block of metal indicated generally by reference numeral 10 which includes a housing 12
  • the proof mass includes two mass portions 16 and 18 connected to one another by an intermediate
  • the proof mass is adapted to rotate about an axis of rotation 22 extending
  • the proof mass portions 16 and 18 are of exactly the same dimensions and weight.
  • proof mass will not respond to linear motion in any direction.
  • the proof mass is supported from the housing by four spaced flexible supports
  • the block of metal 10 is machined by electric discharge machining. Such machining produces four cut-outs 40, 42, 44, and 46 through the housing for receiving conventional sensors (not shown) which are usually in the form of capacitors or coils as is well-known in the art.
  • the machining also provides a plurality of wall portions on the housing which are generally parallel with the outer side walls 50 and 52 of the proof mass portion 16 and which are spaced therefrom with a small clearance.
  • the machining process produces four cut-outs 60, 62, 64 and 66 through the housing for receiving conventional sensors.
  • the machining also provides a plurality of wall portions which are generally parallel with the outer side walls 70 and 72 of the proof mass portion 18 and which are spaced therefrom with a small
  • flexible support 34 is formed by two parallel cut-out areas 80, 82 extending through the block of material 10 to define a sheet of material 84
  • the sheet of material 84 provides nearly pure bending movement during operation, thereby causing the flexible support to function like a highly linear spring.
  • Cut-out area 80 joins with a cut-out area 90 which in turn joins with a cut-out area 92 of the flexible support 30 which corresponds to the cutout area 80 of flexible support 34.
  • a cut-out area 94 defines with parallel cut-out area 92 a sheet of material
  • Sheet of material 96 also provides nearly pure bending movement during operation, thereby causing flexible support 30 to also function like a highly linear spring.
  • Cut-out area 90 defines one side of the intermediate portion 20 joining the proof mass
  • each flexible support being generally planar and being disposed substantially in a plane passing through axis 22.
  • supports 30 and 36 is substantially disposed in a first plane, and a second pair of
  • the four flexible supports 30, 32, 34, and 36 working together provide a flexible support which is compliant for rotation about the axis 22, but is stiff in the other degrees of freedom.
  • Figs. 4-6 a modified form of proof mass support for angular accelerometers is shown wherein parts identical to those in Fig. 1-3 have been given the same reference numerals.
  • the only difference in the structure shown in Figs. 4-6 lies in the structure of the modified flexible supports 30', 32', 34' and 36' wherein each of the supports includes two sheets of material which have pure bending movement
  • flexible support 34' includes parallel cut-out
  • Cut-out areas 100 and 104 are in communication with cut-out 64, while cut-out area 102 joins a cut-out area 114 defining one side of intermediate portion 20 of the proof mass. Cut-out area 114 joins with cut-out area 116 of flexible support 30', and cut-out area 116 corresponds to cut-out area 102 of flexible support 34'.
  • Flexible support 30' also includes a pair of cut-out areas 120 and 122 which are parallel with cut-out area 116 and which define a pair of parallel sheets of material 124
  • Flexible support 30' as well as flexible supports 32' and 36' are similar in construction and function to flexible support
  • the device shown in Figs. 4-6 includes four different flexible supports spaced from one another, each flexible support being generally planar and being disposed substantially in a plane passing through axis 22.
  • a first pair of flexible supports 30' and 36' is substantially disposed in a first plane
  • a second pair of flexible supports 32' and 34' is substantially disposed in a second plane, the first and
  • a proof mass support for a linear accelerometer is disclosed.
  • a single block of metal 150 includes a housing 152 and a proof mass 154.
  • the proof mass is supported from the housing by four spaced flexible supports 160, 162, 164, and 166.
  • the block of metal is machined by electric discharge machining to provide cutouts 170 and 172 for receiving conventional sensors.
  • Flexible support 160 is defined by two generally parallel cut-out areas 180 and 182 which define a sheet of material 184 therebetween for supporting the proof mass from the housing.
  • Flexible support 162 is defined by two generally parallel cut-out
  • Cut-out area 180 joins with a cut-out area 200 which in turn is in communication with cut-out 170 so that the proof mass has a small clearance
  • the sheets of material 184 and 194 have nearly pure bending movement when the proof mass is deflected with respect to the housing.
  • Cut-out areas 182 and 190 are joined by a cut-out area 202 which provides a small clearance between the proof mass and wall 152' of the housing. Cut-out area 192 joins with a cut-out area 204 which in turn is in communication with cut-out 172 so
  • a first pair of flexible supports 160 and 164 are spaced from one another and are disposed substantially in a first plane.
  • a second pair of flexible supports 162 and 166 are spaced from one another and are disposed in substantially a
  • first and second planes are spaced from one another in a direction of motion indicated by arrow X-X in Fig. 8. Motions in the direction X-X will be sensed by movement of the proof mass in nearly pure bending at the edges of the sheets of material to form a highly linear spring, while the flexible supports are stiff in
  • the flexible supports 160, 162, 164 and 166 may each extend the entire width W of the device as seen in Fig. 7, or they may extend less than half the width with four flexible supports at the back side of the device (hidden from view in Fig. 7) being
  • a modified form of proof mass support for linear accelerometers wherein similar parts have been given the same reference numerals.
  • the only difference in this form of the invention is that the modified flexible supports 160', 162', 164', and 166' each include two sheets of material rather than a single sheet as in embodiment of Figs. 7-9 to increase the linearity and compliance of
  • cut-out area 182 has been extended to intersect with a cut-out area 210
  • Cut-out areas 212 which joins with a cut-out area 212 parallel with cut-out area 182. Cut-out areas 212
  • cut-out area 190 has been extended to intersect with a cut-out area 220 which joins with a cut-out area 222 parallel with cut-out area 192.
  • Cut-out areas 222 and 192 define therebetween a sheet of material 224 which is parallel with sheet of material 194 and connected therewith by
  • each of the flexible supports being generally planar.
  • a first pair of flexible supports 160' and 164' are spaced from one another and are substantially disposed in a first plane.
  • a second pair of flexible supports 162' and 166' are spaced from one another and are substantially disposed in
  • first and second planes are spaced from one another in a direction of motion indicated by arrow Y-Y in Fig. 11. Motions in the direction Y-Y will be sensed by movement of the proof mass in pure bending at the edges of the sheets

Abstract

A housing (12) has a proof mass (14) mounted therein for movement relative thereto by at least four different flexible supports (30, 32, 34, 36) spaced from one another. The housing (12), proof mass (14) and flexible supports (30, 32, 34, 36) are formed of a single piece of material by forming cut-out areas (60, 62, 64, 66) in the material so as to define generally planar flexible supports. In an angular accelerometer embodiment, the proof mass (12) rotates about an axis of rotation (22). Each flexible support is disposed in a plane passing through the axis of rotation; and a first pair of flexible supports is disposed in a first plane, while a second pair of flexible supports is disposed in a second plane, the first and second planes being disposed perpendicular to one another. In a linear accelerometer embodiment, a first pair of flexible supports are spaced from one another and are disposed in a first plane, and a second pair of flexible supports are spaced from one another and are disposed in a second plane. The first and second planes are spaced from one another in the direction of relative motion of the proof mass and the housing.

Description

PROOF MASS SUPPORT FOR ACCELEROMETERS
CROSS-REFERENCE TO REI-ATED APPLICATIONS
The present application claims the benefit of the priority date of provisional application Serial No. 60/110,030, filed November 25, 1998.
BACKGROUND OF THE INVENTION
The present invention relates to a proof mass support for accelerometers, and more particularly to a support for use with either angular or linear accelerometers. Such accelerometers are adapted to be utilized in many applications such as gravimeters,
gravity gradiometers, seismometers and the like.
Prior art accelerometers for use in a superconducting gravity gradiometer such
as shown in U. S. patent No. 5,668,315 have employed constructions wherein the proof mass is supported by a single support in the form of a pivot spring. This type of
construction produces detrimental concentrations of stress at the pivot spring. As a
result, such constructions cause undesirable drifts in balance of the proof mass.
A further problem with prior art arrangements is that it is difficult to align the sensitive axes of the accelerometers. It is accordingly an object of the present
invention to provide improved alignment of such axes.
SUMMARY OF THE INVENTION
The present invention provides at least four different flexible supports for
supporting the proof mass from the housing of the device. These flexible supports include a first pair which are generally planar and are spaced from one another and
substantially disposed within a first plane. The flexible supports also include a second
pair which are generally planar and are spaced from one another and substantially disposed in a second plane. In the case of a proof mass support for an angular accelerometer, the supports are all substantially disposed in planes passing through th axis of rotation of the body of the proof mass. In the case of a proof mass support for a linear accelerometer, the planes are generally parallel with one another and are spaced from one another in the direction of motion of the device.
The present invention has a construction wherein the housing, the proof mass
and the flexible supports are formed of a single piece of material. This construction improves the alignment of sensitive axes of the device. The spacing of the flexible
supports distributes stress to multiple locations, thereby reducing drifts in proof mass balance. The invention also provides a design which can be successfully employed at
room temperature as well as in superconducting accelerometer and gravity gradiometer applications.
The construction of each of the flexible supports includes at least one sheet of
material which is integral with the housing and the proof mass body. During operation, when the proof mass moves relative to the housing, the sheet of material is deflected in
pure or nearly pure bending movement so that the flexible support forms a highly linear spring which is very desirable in accelerometer applications.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a top perspective view of a proof mass support for an angular
accelerometer;
Fig. 2 is a top view of the support shown in Fig. 1 ;
Fig. 3 is a sectional view taken along line 3-3 of Fig. 1;
Fig. 4 is a top perspective view of a modified support for an angular
accelerometer;
Fig. 5 is a top view of the support shown in Fig. 4; Fig. 6 is a sectional view taken along line 6-6 of Fig. 5;
Fig. 7 is a top perspective view of a proof mass support for a linear accelerometer;
Fig. 8 is a front view of the support shown in Fig. 7;
Fig. 9 is a sectional view taken along line 9-9 of Fig. 8;
Fig. 10 is a top perspective view of a modified support for a linear accelerometer;
Fig. 11 is a front view of the support shown in Fig. 10; and
Fig. 12 is a sectional view taken along line 12-12 of Fig. 11.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring now to the drawings wherein like reference characters designate corresponding parts throughout the several views, there is shown in Fig. 1-3 a single block of metal indicated generally by reference numeral 10 which includes a housing 12
and a proof mass indicated generally by reference character 14. The proof mass includes two mass portions 16 and 18 connected to one another by an intermediate
portion 20. The proof mass is adapted to rotate about an axis of rotation 22 extending
perpendicular to the flat upper surfaces of the housing and proof mass portions. The proof mass portions 16 and 18 are of exactly the same dimensions and weight. The
proof mass will not respond to linear motion in any direction.
The proof mass is supported from the housing by four spaced flexible supports
indicated generally by reference numerals 30, 32, 34 and 36 hereinafter described in detail. The block of metal 10 is machined by electric discharge machining. Such machining produces four cut-outs 40, 42, 44, and 46 through the housing for receiving conventional sensors (not shown) which are usually in the form of capacitors or coils as is well-known in the art. The machining also provides a plurality of wall portions on the housing which are generally parallel with the outer side walls 50 and 52 of the proof mass portion 16 and which are spaced therefrom with a small clearance.
In a similar manner, the machining process produces four cut-outs 60, 62, 64 and 66 through the housing for receiving conventional sensors. The machining also provides a plurality of wall portions which are generally parallel with the outer side walls 70 and 72 of the proof mass portion 18 and which are spaced therefrom with a small
clearance.
As seen in Figs. 2 and 3, flexible support 34 is formed by two parallel cut-out areas 80, 82 extending through the block of material 10 to define a sheet of material 84
which supports the proof mass portion 18 from the housing to provide a flexible support which is compliant for transverse acceleration, but is stiff in the other degrees of
freedom. The sheet of material 84 provides nearly pure bending movement during operation, thereby causing the flexible support to function like a highly linear spring.
Cut-out area 80 joins with a cut-out area 90 which in turn joins with a cut-out area 92 of the flexible support 30 which corresponds to the cutout area 80 of flexible support 34. A cut-out area 94 defines with parallel cut-out area 92 a sheet of material
96 of flexible support 30 which corresponds to the sheet of material 84 of flexible
support 34. Sheet of material 96 also provides nearly pure bending movement during operation, thereby causing flexible support 30 to also function like a highly linear spring.
Cut-out area 90 defines one side of the intermediate portion 20 joining the proof mass
portions 16 and 18. The opposite side of the intermediate portion is defined by a cut¬
out area 98 joining with cut out areas of flexible supports 32 and 36.
The structure and function of each of the other flexible supports 32 and 36 is
identical to that discussed above in connection with supports 34 and 30, and accordingly it is not necessary to describe each flexible support in detail.
It is noted that the device shown in Figs. 1-3 includes four different flexible supports spaced from one another, each flexible support being generally planar and being disposed substantially in a plane passing through axis 22. A first pair of flexible
supports 30 and 36 is substantially disposed in a first plane, and a second pair of
flexible supports 32 and 34 is substantially disposed in a second plane, the first and
second planes being disposed perpendicular to one another. The four flexible supports 30, 32, 34, and 36 working together provide a flexible support which is compliant for rotation about the axis 22, but is stiff in the other degrees of freedom.
Referring to Figs. 4-6, a modified form of proof mass support for angular accelerometers is shown wherein parts identical to those in Fig. 1-3 have been given the same reference numerals. The only difference in the structure shown in Figs. 4-6 lies in the structure of the modified flexible supports 30', 32', 34' and 36' wherein each of the supports includes two sheets of material which have pure bending movement
without stretching during operation to provide a completely linear spring of greater
compliance than the single sheet arrangement of Figs. 1-3. The total number of sheets
of material can be increased to provide greater compliance without altering the benefits
of the invention.
As seen particularly in Figs. 5 and 6, flexible support 34' includes parallel cut-out
areas 100, 102 and 104 which define therebetween sheets of material 106 and 108
which are joined along adjacent edges thereof by a connecting portion 110 such that the proof mass is supported from the housing by the pair of parallel sheets of material 106 and 108. Cut-out areas 100 and 104 are in communication with cut-out 64, while cut-out area 102 joins a cut-out area 114 defining one side of intermediate portion 20 of the proof mass. Cut-out area 114 joins with cut-out area 116 of flexible support 30', and cut-out area 116 corresponds to cut-out area 102 of flexible support 34'.
Flexible support 30' also includes a pair of cut-out areas 120 and 122 which are parallel with cut-out area 116 and which define a pair of parallel sheets of material 124
and 126 which are joined by connecting portion 128. Flexible support 30' as well as flexible supports 32' and 36' are similar in construction and function to flexible support
34', and accordingly, it is not necessary to describe each flexible support in detail. The
sheets of material all have pure bending movement when the proof mass moves relative to the housing.
It is noted that the device shown in Figs. 4-6 includes four different flexible supports spaced from one another, each flexible support being generally planar and being disposed substantially in a plane passing through axis 22. A first pair of flexible supports 30' and 36' is substantially disposed in a first plane, and a second pair of flexible supports 32' and 34' is substantially disposed in a second plane, the first and
second planes being disposed perpendicular to one another. The four flexible supports
30', 32', 34', and 36' working together provide a flexible support which is compliant for rotation about the axis 22, but is stiff in the other degrees of freedom.
Referring to Figs. 7-9, a proof mass support for a linear accelerometer is disclosed. A single block of metal 150 includes a housing 152 and a proof mass 154.
The proof mass is supported from the housing by four spaced flexible supports 160, 162, 164, and 166. The block of metal is machined by electric discharge machining to provide cutouts 170 and 172 for receiving conventional sensors.
Flexible support 160 is defined by two generally parallel cut-out areas 180 and 182 which define a sheet of material 184 therebetween for supporting the proof mass from the housing. Flexible support 162 is defined by two generally parallel cut-out
areas 190 and 192 defining a sheet of material 194 therebetween for supporting the
proof mass from the housing. Cut-out area 180 joins with a cut-out area 200 which in turn is in communication with cut-out 170 so that the proof mass has a small clearance
with the adjacent wall 152' of the housing. The sheets of material 184 and 194 have nearly pure bending movement when the proof mass is deflected with respect to the housing.
Cut-out areas 182 and 190 are joined by a cut-out area 202 which provides a small clearance between the proof mass and wall 152' of the housing. Cut-out area 192 joins with a cut-out area 204 which in turn is in communication with cut-out 172 so
that the proof mass has a small clearance with wall 152' of the housing.
The construction of the left-hand side of the housing and proof mass has been
described in detail. The construction of the right-hand side of the housing and proof
mass is similar to that of the left-hand side and need not be described in detail. It is noted that four different flexible supports are provided, each of the flexible supports being generally planar. A first pair of flexible supports 160 and 164 are spaced from one another and are disposed substantially in a first plane. A second pair of flexible supports 162 and 166 are spaced from one another and are disposed in substantially a
second plane. These first and second planes are spaced from one another in a direction of motion indicated by arrow X-X in Fig. 8. Motions in the direction X-X will be sensed by movement of the proof mass in nearly pure bending at the edges of the sheets of material to form a highly linear spring, while the flexible supports are stiff in
the other degrees of freedom. The flexible supports 160, 162, 164 and 166 may each extend the entire width W of the device as seen in Fig. 7, or they may extend less than half the width with four flexible supports at the back side of the device (hidden from view in Fig. 7) being
constructed in the same manner as flexible supports 160, 162, 164 and 166.
Referring to Figs. 10-12, a modified form of proof mass support for linear accelerometers is disclosed wherein similar parts have been given the same reference numerals. The only difference in this form of the invention is that the modified flexible supports 160', 162', 164', and 166' each include two sheets of material rather than a single sheet as in embodiment of Figs. 7-9 to increase the linearity and compliance of
the flexible supports.
As seen particularly in Figs. 11 and 12, with respect to modified flexible connector 160', cut-out area 182 has been extended to intersect with a cut-out area 210
which joins with a cut-out area 212 parallel with cut-out area 182. Cut-out areas 212
and 180 define therebetween a sheet of material 214 which is parallel with sheet of material 184 and connected therewith by a portion of material 216.
With respect to modified flexible connector 162', cut-out area 190 has been extended to intersect with a cut-out area 220 which joins with a cut-out area 222 parallel with cut-out area 192. Cut-out areas 222 and 192 define therebetween a sheet of material 224 which is parallel with sheet of material 194 and connected therewith by
a portion of material 226.
The construction of the left-hand side of the housing and proof mass has been described in detail. The construction of the right-hand side of the housing and proof
mass is similar to that of the left-hand side and need not be described in detail. It is
noted that four different flexible supports are provided, each of the flexible supports being generally planar. A first pair of flexible supports 160' and 164' are spaced from one another and are substantially disposed in a first plane. A second pair of flexible supports 162' and 166' are spaced from one another and are substantially disposed in
a second plane. These first and second planes are spaced from one another in a direction of motion indicated by arrow Y-Y in Fig. 11. Motions in the direction Y-Y will be sensed by movement of the proof mass in pure bending at the edges of the sheets
of material to form a completely linear spring, while the flexible supports are stiff in the other degrees of freedom.
The invention has been described with reference to a preferred embodiment. Obviously, various modifications, alternatives and other embodiments will occur to others upon reading and understanding this specification. It is my/our intention to
include all such modifications, alternatives and other embodiments insofar as they come within the scope of the appended claims or equivalents thereof.

Claims

What is claimed is:
1. A proof mass support for an accelerometer comprising, a housing, a proof mass mounted for movement with respect to said housing, said mass being supported
from the housing by at least four different flexible supports, each flexible support being
generally planar, a first pair of flexible supports being spaced from one another and substantially disposed in a first plane, and a second pair of flexible supports being spaced from one another and being substantially disposed in a second plane.
2. A support as defined in claim 1 wherein said housing and said proof mass and said flexible supports are formed of a single piece of material.
3. A support as defined in claim 2 wherein each of said flexible supports comprises a sheet of material to provide pure or nearly pure bending during operation to form a highly linear spring.
4. A support as defined in claim 2 wherein each of said flexible supports includes
a plurality of substantially parallel sheets of material to provide pure bending during
operation to form a completely linear spring.
5. A support as defined in claim 4 wherein said sheets of material are defined by
substantially parallel cut-out areas formed in said single piece of material.
6. A proof mass support for an angular accelerometer comprising, a housing, a
proof mass including an elongated body having a central axis of rotation, said proof mass being supported for angular movement relative to said housing by at least four different flexible supports spaced from one another, each flexible support being generally planar and being substantially disposed in a plane passing through said axis.
7. A support as defined in claim 6 wherein said flexible supports include a first
pair of flexible supports substantially disposed in a first plane, and a second pair of flexible supports substantially disposed in a second plane, said first and second planes being disposed perpendicular to one another.
8. A support as defined in claim 6 wherein said housing and said proof mass and said flexible supports are formed of a single piece of material.
9. A support as defined in claim 8 wherein each of said flexible supports includes a plurality of substantially parallel sheets of material to provide pure bending during operation to form a completely linear spring.
10. A support as defined in claim 9 wherein said sheets of material are defined by substantially parallel cut-out areas formed in said single piece of material.
11. A proof mass support for a linear accelerometer comprising, a housing, a
proof mass supported for linear movement relative to said housing in a direction of motion, said mass being supported by at least four different flexible supports, each
flexible support being generally planar, a first pair of flexible supports being spaced from one another and substantially disposed in a first plane, a second pair of flexible
supports being spaced from one another and substantially disposed in a second plane, said first and second planes being spaced from one another in said direction of motion.
12. A support as defined in claim 11 wherein said housing and said proof mass
and said flexible supports are formed of a single piece of material.
13. A support as defined in claim 12 wherein each of said flexible supports comprises a sheet of material to provide pure or nearly pure bending during operation
to form a highly linear spring.
14. A support as defined in claim 13 wherein each of said flexible supports includes a plurality of substantially parallel sheets of material to provide pure bending
during operation to form a completely linear spring.
15. A support as defined in claim 14 wherein said sheets of material are defined by substantially parallel cut-out areas formed in said single piece of material.
PCT/US1999/027864 1998-11-25 1999-11-24 Proof mass support for accelerometers WO2000031550A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU16333/00A AU1633300A (en) 1998-11-25 1999-11-24 Proof mass support for accelerometers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11003098P 1998-11-25 1998-11-25
US60/110,030 1998-11-25

Publications (1)

Publication Number Publication Date
WO2000031550A1 true WO2000031550A1 (en) 2000-06-02

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WO (1) WO2000031550A1 (en)

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WO2008061275A1 (en) * 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
WO2008061278A1 (en) * 2006-11-23 2008-05-29 Technological Resources Pty Limited Gravity gradiometer
WO2008061282A1 (en) 2006-11-23 2008-05-29 Technological Resources Pty Limited Gravity gradiometer
WO2008061276A1 (en) * 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
WO2008061273A1 (en) * 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
US7562460B2 (en) 2006-11-23 2009-07-21 Technological Resources Pty. Ltd. Gravity gradiometer
US7571547B2 (en) 2006-11-23 2009-08-11 Technological Resources Pty. Ltd. Gravity gradiometer
US7584544B2 (en) 2006-11-20 2009-09-08 Technological Resources Pty, Ltd. Gravity gradiometer
US7624635B2 (en) 2006-11-23 2009-12-01 Technological Resources Pty. Ltd. Gravity gradiometer
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JPWO2013161597A1 (en) * 2012-04-27 2015-12-24 株式会社村田製作所 Acceleration sensor

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