WO2000020899A3 - Flexible, modular, compact fiber optic switch - Google Patents

Flexible, modular, compact fiber optic switch Download PDF

Info

Publication number
WO2000020899A3
WO2000020899A3 PCT/US1999/021139 US9921139W WO0020899A3 WO 2000020899 A3 WO2000020899 A3 WO 2000020899A3 US 9921139 W US9921139 W US 9921139W WO 0020899 A3 WO0020899 A3 WO 0020899A3
Authority
WO
WIPO (PCT)
Prior art keywords
deflector
module
orientation
fiber optic
switch
Prior art date
Application number
PCT/US1999/021139
Other languages
French (fr)
Other versions
WO2000020899A2 (en
Inventor
Armand P Neukermans
Timothy G Slater
Tyler L Baughman
James P Downing
John S Forker
Gregory A Reznick
Sam Calmes
Steven M Clark
Jack D Foster
Marc R Schuman
Rajiv Ramaswami
Original Assignee
Xros Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xros Inc filed Critical Xros Inc
Priority to CA002344487A priority Critical patent/CA2344487C/en
Priority to KR1020017003390A priority patent/KR20010085809A/en
Priority to US09/446,540 priority patent/US6445844B1/en
Priority to JP2000574963A priority patent/JP2002526803A/en
Priority to EP99970167A priority patent/EP1121616A2/en
Publication of WO2000020899A2 publication Critical patent/WO2000020899A2/en
Publication of WO2000020899A3 publication Critical patent/WO2000020899A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/32Optical coupling means having lens focusing means positioned between opposed fibre ends
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/32Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G02B6/327Optical coupling means having lens focusing means positioned between opposed fibre ends with angled interfaces to reduce reflections
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04QSELECTING
    • H04Q11/00Selecting arrangements for multiplex systems
    • H04Q11/0001Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005Switch and router aspects
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/352Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35543D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3586Control or adjustment details, e.g. calibrating
    • G02B6/3588Control or adjustment details, e.g. calibrating of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3656Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04QSELECTING
    • H04Q11/00Selecting arrangements for multiplex systems
    • H04Q11/0001Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005Switch and router aspects
    • H04Q2011/0007Construction
    • H04Q2011/0026Construction using free space propagation (e.g. lenses, mirrors)
    • H04Q2011/003Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04QSELECTING
    • H04Q11/00Selecting arrangements for multiplex systems
    • H04Q11/0001Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005Switch and router aspects
    • H04Q2011/0037Operation
    • H04Q2011/0039Electrical control
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04QSELECTING
    • H04Q11/00Selecting arrangements for multiplex systems
    • H04Q11/0001Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005Switch and router aspects
    • H04Q2011/0037Operation
    • H04Q2011/0043Fault tolerance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106).
PCT/US1999/021139 1998-09-15 1999-09-15 Flexible, modular, compact fiber optic switch WO2000020899A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CA002344487A CA2344487C (en) 1998-09-15 1999-09-15 Flexible, modular, compact fiber optic switch
KR1020017003390A KR20010085809A (en) 1998-09-15 1999-09-15 Flexible, modular, compact fiber optic switch
US09/446,540 US6445844B1 (en) 1999-09-15 1999-09-15 Flexible, modular, compact fiber optic switch
JP2000574963A JP2002526803A (en) 1998-09-15 1999-09-15 Flexible modular compact optical fiber switch
EP99970167A EP1121616A2 (en) 1998-09-15 1999-09-15 Flexible, modular, compact fiber optic switch

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US10032698P 1998-09-15 1998-09-15
US60/100,326 1998-09-15
US13076599P 1999-04-23 1999-04-23
US60/130,765 1999-04-23
US14268599P 1999-07-07 1999-07-07
US60/142,685 1999-07-07
US14495399P 1999-07-21 1999-07-21
US60/144,953 1999-07-21

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US09/446,540 A-371-Of-International US6445844B1 (en) 1999-09-15 1999-09-15 Flexible, modular, compact fiber optic switch
US09/729,336 Continuation US6795602B2 (en) 1999-12-21 2000-12-01 Flexible, modular, compact fiber optic switch

Publications (2)

Publication Number Publication Date
WO2000020899A2 WO2000020899A2 (en) 2000-04-13
WO2000020899A3 true WO2000020899A3 (en) 2000-07-20

Family

ID=27493122

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/021139 WO2000020899A2 (en) 1998-09-15 1999-09-15 Flexible, modular, compact fiber optic switch

Country Status (5)

Country Link
EP (1) EP1121616A2 (en)
JP (1) JP2002526803A (en)
KR (1) KR20010085809A (en)
CA (1) CA2344487C (en)
WO (1) WO2000020899A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6792174B1 (en) 1999-11-02 2004-09-14 Nortel Networks Limited Method and apparatus for signaling between an optical cross-connect switch and attached network equipment
US6813407B2 (en) 1999-11-02 2004-11-02 Nortel Networks Limited Method and apparatus for bridging optical signals in an optical network

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6571030B1 (en) 1999-11-02 2003-05-27 Xros, Inc. Optical cross-connect switching system
KR20010051511A (en) * 1999-11-09 2001-06-25 윌리엄 비. 켐플러 Micromirror optical switch
DE60018883T2 (en) * 1999-11-17 2006-04-13 Lucent Technologies Inc. Optical cross connection system with micro-electromechanical tilting mirror arrangement
CA2300780C (en) * 2000-03-15 2007-08-07 Nortel Networks Corporation Integrated photonic switch
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6483961B1 (en) 2000-06-02 2002-11-19 Calient Networks, Inc. Dual refraction index collimator for an optical switch
US6728016B1 (en) 2000-06-05 2004-04-27 Calient Networks, Inc. Safe procedure for moving mirrors in an optical cross-connect switch
US6587611B1 (en) 2000-06-06 2003-07-01 Calient Networks, Inc. Maintaining path integrity in an optical switch
US6643425B1 (en) 2000-08-17 2003-11-04 Calient Networks, Inc. Optical switch having switch mirror arrays controlled by scanning beams
WO2002025358A2 (en) * 2000-09-22 2002-03-28 Movaz Networks, Inc. Variable transmission multi-channel optical switch
JP4064052B2 (en) 2000-11-29 2008-03-19 富士通株式会社 Optical switch using tilt mirror
JP4549413B2 (en) * 2000-12-07 2010-09-22 富士通株式会社 Control apparatus and control method for optical signal exchanger
US6522802B2 (en) * 2000-12-11 2003-02-18 Agilent Technologies, Inc. Optical switch using support structures with both fixed mirrors and pivotable mirrors
JP2002221673A (en) * 2001-01-26 2002-08-09 Olympus Optical Co Ltd Optical unit equipped with actuator
US6527965B1 (en) 2001-02-09 2003-03-04 Nayna Networks, Inc. Method for fabricating improved mirror arrays for physical separation
US6577427B1 (en) * 2001-02-20 2003-06-10 Nayna Networks, Inc. Process for manufacturing mirror devices using semiconductor technology
US6792177B2 (en) 2001-03-12 2004-09-14 Calient Networks, Inc. Optical switch with internal monitoring
US6529654B1 (en) 2001-05-02 2003-03-04 Nayna Networks, Inc. Method for transparent switching and controlling optical signals using mirror designs
US6882766B1 (en) 2001-06-06 2005-04-19 Calient Networks, Inc. Optical switch fabric with redundancy
US6567586B2 (en) * 2001-07-24 2003-05-20 Corning Incorporated Dual fiber collimator
JP3827977B2 (en) 2001-08-20 2006-09-27 富士通株式会社 Manufacturing method of micromirror element
US6477291B1 (en) 2001-09-13 2002-11-05 Nayna Networks, Inc. Method and system for in-band connectivity for optical switching applications
US6597510B2 (en) 2001-11-02 2003-07-22 Corning Incorporated Methods and apparatus for making optical devices including microlens arrays
US6836353B1 (en) 2001-11-20 2004-12-28 Nayna Networks, Inc. Redundant switch fabric methods and system for switching of telecommunication signals
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror
JP2005520202A (en) * 2002-03-14 2005-07-07 コーニング インコーポレイテッド Fiber array and fiber array manufacturing method
CN1653368A (en) * 2002-03-18 2005-08-10 连续光子学有限公司 Multiple-axis control system for an optical switch
JP4140816B2 (en) 2002-05-24 2008-08-27 富士通株式会社 Micro mirror element
JP4313987B2 (en) 2002-06-18 2009-08-12 富士通株式会社 Manufacturing method of fiber block
JP4038208B2 (en) 2002-06-21 2008-01-23 富士通株式会社 Micromirror unit, manufacturing method thereof, and optical switch using the micromirror unit
JP4627627B2 (en) 2004-03-31 2011-02-09 富士通株式会社 Micromirror element and optical switch
JP2005326620A (en) 2004-05-14 2005-11-24 Fujitsu Ltd Micromirror element
JP4566014B2 (en) * 2005-01-20 2010-10-20 株式会社リコー Optical scanning apparatus and image forming apparatus
JP4776498B2 (en) 2006-07-14 2011-09-21 富士通株式会社 Optical device using lens array

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4365863A (en) * 1979-05-30 1982-12-28 Le Materiel Telephonique Thomson-Csf Optical switch for a very large number of channels
US5440654A (en) * 1993-12-30 1995-08-08 Raytheon Company Fiber optic switching system
US5727098A (en) * 1994-09-07 1998-03-10 Jacobson; Joseph M. Oscillating fiber optic display and imager

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4365863A (en) * 1979-05-30 1982-12-28 Le Materiel Telephonique Thomson-Csf Optical switch for a very large number of channels
US5440654A (en) * 1993-12-30 1995-08-08 Raytheon Company Fiber optic switching system
US5727098A (en) * 1994-09-07 1998-03-10 Jacobson; Joseph M. Oscillating fiber optic display and imager

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6792174B1 (en) 1999-11-02 2004-09-14 Nortel Networks Limited Method and apparatus for signaling between an optical cross-connect switch and attached network equipment
US6813407B2 (en) 1999-11-02 2004-11-02 Nortel Networks Limited Method and apparatus for bridging optical signals in an optical network

Also Published As

Publication number Publication date
CA2344487C (en) 2004-11-30
KR20010085809A (en) 2001-09-07
JP2002526803A (en) 2002-08-20
EP1121616A2 (en) 2001-08-08
WO2000020899A2 (en) 2000-04-13
CA2344487A1 (en) 2000-04-13

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