WO1999035893A3 - Paraelectric gas flow accelerator - Google Patents
Paraelectric gas flow accelerator Download PDFInfo
- Publication number
- WO1999035893A3 WO1999035893A3 PCT/US1999/000447 US9900447W WO9935893A3 WO 1999035893 A3 WO1999035893 A3 WO 1999035893A3 US 9900447 W US9900447 W US 9900447W WO 9935893 A3 WO9935893 A3 WO 9935893A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrodes
- gas
- plasma
- flow
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2439—Surface discharges, e.g. air flow control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2270/00—Control
- F05D2270/01—Purpose of the control system
- F05D2270/17—Purpose of the control system to control boundary layer
- F05D2270/172—Purpose of the control system to control boundary layer by a plasma generator, e.g. control of ignition
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU31800/99A AU3180099A (en) | 1998-01-08 | 1999-01-08 | Paraelectric gas flow accelerator |
US09/357,403 US6200539B1 (en) | 1998-01-08 | 1999-07-20 | Paraelectric gas flow accelerator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7077998P | 1998-01-08 | 1998-01-08 | |
US60/070,779 | 1998-01-08 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO1999035893A2 WO1999035893A2 (en) | 1999-07-15 |
WO1999035893A3 true WO1999035893A3 (en) | 1999-10-07 |
WO1999035893A9 WO1999035893A9 (en) | 1999-11-11 |
Family
ID=22097342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/000447 WO1999035893A2 (en) | 1998-01-08 | 1999-01-08 | Paraelectric gas flow accelerator |
Country Status (3)
Country | Link |
---|---|
US (1) | US6200539B1 (en) |
AU (1) | AU3180099A (en) |
WO (1) | WO1999035893A2 (en) |
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Citations (6)
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US4381965A (en) * | 1982-01-06 | 1983-05-03 | Drytek, Inc. | Multi-planar electrode plasma etching |
US4472756A (en) * | 1981-09-30 | 1984-09-18 | Senichi Masuda | Duct type charge eliminator |
SU1282366A1 (en) * | 1985-02-08 | 1987-01-07 | Предприятие П/Я Г-4345 | Multielectrode plasma accelerator |
GB2254185A (en) * | 1991-03-26 | 1992-09-30 | British Aerospace | A surface discharge corona plasma cathode assembly. |
EP0588486A2 (en) * | 1992-08-26 | 1994-03-23 | Tektronix, Inc. | Bi-channel electrode configuration for an addressing structure using an ionizable gaseous medium and method of operating it |
DE19605226A1 (en) * | 1996-02-13 | 1997-08-14 | Gericke Karl Heinz Prof Dr | Process for producing a plasma and use of a plasma produced in this way |
Family Cites Families (5)
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EP0063273B1 (en) | 1981-04-02 | 1986-02-12 | The Perkin-Elmer Corporation | Discharge system for plasma processing |
JPH03291082A (en) | 1990-04-09 | 1991-12-20 | Mitsubishi Electric Corp | Still picture television telephone set |
US5938854A (en) | 1993-05-28 | 1999-08-17 | The University Of Tennessee Research Corporation | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure |
JP2741745B2 (en) | 1995-03-24 | 1998-04-22 | 工業技術院長 | Semiconductor electrode forming method and apparatus |
US5779991A (en) | 1996-11-12 | 1998-07-14 | Eastern Digital Inc. | Apparatus for destroying hazardous compounds in a gas stream |
-
1999
- 1999-01-08 WO PCT/US1999/000447 patent/WO1999035893A2/en active Application Filing
- 1999-01-08 AU AU31800/99A patent/AU3180099A/en not_active Abandoned
- 1999-07-20 US US09/357,403 patent/US6200539B1/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4472756A (en) * | 1981-09-30 | 1984-09-18 | Senichi Masuda | Duct type charge eliminator |
US4381965A (en) * | 1982-01-06 | 1983-05-03 | Drytek, Inc. | Multi-planar electrode plasma etching |
SU1282366A1 (en) * | 1985-02-08 | 1987-01-07 | Предприятие П/Я Г-4345 | Multielectrode plasma accelerator |
GB2254185A (en) * | 1991-03-26 | 1992-09-30 | British Aerospace | A surface discharge corona plasma cathode assembly. |
EP0588486A2 (en) * | 1992-08-26 | 1994-03-23 | Tektronix, Inc. | Bi-channel electrode configuration for an addressing structure using an ionizable gaseous medium and method of operating it |
DE19605226A1 (en) * | 1996-02-13 | 1997-08-14 | Gericke Karl Heinz Prof Dr | Process for producing a plasma and use of a plasma produced in this way |
Non-Patent Citations (1)
Title |
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DATABASE WPI Section EI Week 8739, Derwent World Patents Index; Class X14, AN 87-275756, XP002107932 * |
Also Published As
Publication number | Publication date |
---|---|
AU3180099A (en) | 1999-07-26 |
WO1999035893A9 (en) | 1999-11-11 |
US6200539B1 (en) | 2001-03-13 |
WO1999035893A2 (en) | 1999-07-15 |
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