WO1999016096A1 - Thermal arched beam microelectromechanical devices and associated fabrication methods - Google Patents
Thermal arched beam microelectromechanical devices and associated fabrication methods Download PDFInfo
- Publication number
- WO1999016096A1 WO1999016096A1 PCT/US1998/018038 US9818038W WO9916096A1 WO 1999016096 A1 WO1999016096 A1 WO 1999016096A1 US 9818038 W US9818038 W US 9818038W WO 9916096 A1 WO9916096 A1 WO 9916096A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microelectromechanical
- actuator
- mems
- arched beam
- actuator member
- Prior art date
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0054—For holding or placing an element in a given position
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0011—Gate valves or sliding valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0044—Electric operating means therefor using thermo-electric means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/054—Microvalves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K2099/0071—Microvalves with latching means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
- G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
- H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H67/00—Electrically-operated selector switches
- H01H67/22—Switches without multi-position wipers
- H01H67/26—Co-ordinate-type selector switches not having relays at cross-points but involving mechanical movement, e.g. cross-bar switch, code-bar switch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
- H01H9/14—Adaptation for built-in safety spark gaps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49105—Switch making
Abstract
Description
Claims
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020007003209A KR100333196B1 (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
DE69806487T DE69806487T2 (en) | 1997-09-24 | 1998-08-28 | MICROMECHANICAL DEVICES WITH THERMAL ARC CROSSBAR AND RELATED PRODUCTION PROCESS |
EP98944626A EP1008161B1 (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
AT98944626T ATE220474T1 (en) | 1997-09-24 | 1998-08-28 | MICROMECHANICAL DEVICES WITH THERMAL ARCH TRUSS AND ASSOCIATED MANUFACTURING METHODS |
AU92127/98A AU9212798A (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
CA002304655A CA2304655C (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical structure |
IL13518598A IL135185A0 (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
JP2000513300A JP2001518677A (en) | 1997-09-24 | 1998-08-28 | Thermally arched beam micro-electro-mechanical device and related manufacturing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/936,598 US5994816A (en) | 1996-12-16 | 1997-09-24 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US08/936,598 | 1997-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999016096A1 true WO1999016096A1 (en) | 1999-04-01 |
Family
ID=25468871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/018038 WO1999016096A1 (en) | 1997-09-24 | 1998-08-28 | Thermal arched beam microelectromechanical devices and associated fabrication methods |
Country Status (11)
Country | Link |
---|---|
US (5) | US5994816A (en) |
EP (1) | EP1008161B1 (en) |
JP (1) | JP2001518677A (en) |
KR (1) | KR100333196B1 (en) |
CN (1) | CN1126135C (en) |
AT (1) | ATE220474T1 (en) |
AU (1) | AU9212798A (en) |
CA (1) | CA2304655C (en) |
DE (1) | DE69806487T2 (en) |
IL (1) | IL135185A0 (en) |
WO (1) | WO1999016096A1 (en) |
Cited By (32)
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WO2000014415A2 (en) * | 1998-09-03 | 2000-03-16 | Lucas Novasensor | Proportional micromechanical device |
WO2000067268A1 (en) * | 1999-05-03 | 2000-11-09 | Cronos Integrated Microsystems, Inc. | Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays |
WO2000067063A1 (en) * | 1999-05-03 | 2000-11-09 | Cronos Integrated Microsystems, Inc. | Moveable microelectromechanical mirror structures |
WO2001009521A1 (en) * | 1999-07-30 | 2001-02-08 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
WO2001015184A1 (en) * | 1999-08-25 | 2001-03-01 | Cronos Integrated Microsystems, Inc. | Microelectromechanical device having single crystalline components and metallic components and associated fabrication methods |
WO2001022454A1 (en) * | 1999-08-04 | 2001-03-29 | Jds Uniphase Corporation | Dielectric links for microelectromechanical systems and associated fabrication methods |
EP1089109A2 (en) * | 1999-09-27 | 2001-04-04 | JDS Uniphase Inc. | Mems variable optical attenuator |
EP1119012A2 (en) * | 2000-01-20 | 2001-07-25 | Cronos Integrated Microsystems, Inc. | MEMS magnetically actuated switches and associated switching arrays |
WO2001071226A2 (en) * | 2000-03-22 | 2001-09-27 | Kelsey-Hayes Company | Thermally actuated microvalve assembly |
WO2001073805A1 (en) * | 2000-03-29 | 2001-10-04 | Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. | Microactuator arrangement |
US6316796B1 (en) | 1995-05-24 | 2001-11-13 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
WO2002012117A1 (en) * | 2000-08-09 | 2002-02-14 | Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V. | Assembly having a variable capacitance |
WO2002017339A1 (en) * | 2000-08-21 | 2002-02-28 | Jds Uniphase Corporation | Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
WO2002061781A1 (en) * | 2001-01-30 | 2002-08-08 | Advantest Corporation | Switch and integrated circuit device |
US6494804B1 (en) | 2000-06-20 | 2002-12-17 | Kelsey-Hayes Company | Microvalve for electronically controlled transmission |
US6523560B1 (en) * | 1998-09-03 | 2003-02-25 | General Electric Corporation | Microvalve with pressure equalization |
US6533366B1 (en) | 1996-05-29 | 2003-03-18 | Kelsey-Hayes Company | Vehicle hydraulic braking systems incorporating micro-machined technology |
US6540203B1 (en) | 1999-03-22 | 2003-04-01 | Kelsey-Hayes Company | Pilot operated microvalve device |
US6581640B1 (en) | 2000-08-16 | 2003-06-24 | Kelsey-Hayes Company | Laminated manifold for microvalve |
US6694998B1 (en) | 2000-03-22 | 2004-02-24 | Kelsey-Hayes Company | Micromachined structure usable in pressure regulating microvalve and proportional microvalve |
WO2004017351A2 (en) * | 2002-08-14 | 2004-02-26 | Intel Corporation | Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
EP1463899A2 (en) * | 2001-12-18 | 2004-10-06 | Ge Novasensor, Inc. | Proportional micromechanical valve |
US6887615B1 (en) | 1999-07-30 | 2005-05-03 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
US6962170B1 (en) | 1999-07-30 | 2005-11-08 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
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US9006844B2 (en) | 2010-01-28 | 2015-04-14 | Dunan Microstaq, Inc. | Process and structure for high temperature selective fusion bonding |
US9140613B2 (en) | 2012-03-16 | 2015-09-22 | Zhejiang Dunan Hetian Metal Co., Ltd. | Superheat sensor |
US9188375B2 (en) | 2013-12-04 | 2015-11-17 | Zhejiang Dunan Hetian Metal Co., Ltd. | Control element and check valve assembly |
US9702481B2 (en) | 2009-08-17 | 2017-07-11 | Dunan Microstaq, Inc. | Pilot-operated spool valve |
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US5994816A (en) * | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US6786420B1 (en) | 1997-07-15 | 2004-09-07 | Silverbrook Research Pty. Ltd. | Data distribution mechanism in the form of ink dots on cards |
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Also Published As
Publication number | Publication date |
---|---|
AU9212798A (en) | 1999-04-12 |
US5994816A (en) | 1999-11-30 |
KR20010024308A (en) | 2001-03-26 |
CN1126135C (en) | 2003-10-29 |
KR100333196B1 (en) | 2002-04-18 |
ATE220474T1 (en) | 2002-07-15 |
DE69806487T2 (en) | 2003-01-30 |
IL135185A0 (en) | 2001-05-20 |
EP1008161B1 (en) | 2002-07-10 |
US6324748B1 (en) | 2001-12-04 |
US6114794A (en) | 2000-09-05 |
CA2304655C (en) | 2005-03-22 |
DE69806487D1 (en) | 2002-08-14 |
EP1008161A1 (en) | 2000-06-14 |
US6023121A (en) | 2000-02-08 |
CA2304655A1 (en) | 1999-04-01 |
CN1277731A (en) | 2000-12-20 |
JP2001518677A (en) | 2001-10-16 |
US5955817A (en) | 1999-09-21 |
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