WO1999005728A1 - Nitride semiconductor device - Google Patents
Nitride semiconductor device Download PDFInfo
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- WO1999005728A1 WO1999005728A1 PCT/JP1998/003336 JP9803336W WO9905728A1 WO 1999005728 A1 WO1999005728 A1 WO 1999005728A1 JP 9803336 W JP9803336 W JP 9803336W WO 9905728 A1 WO9905728 A1 WO 9905728A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen characterised by the doping materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
Definitions
- Light emitting element such as the present invention is the light emitting Daiodo device, Les one Zadaiodo elements, solar cells, light-receiving element such as an optical sensor or transistors, nitride semiconductor used in an electronic Debai scan power devices such as (I, n x A 1 Y Ga 0 ⁇ X, 0 ⁇ Y, X
- Nitride semiconductors have already been put into practical use in various light sources such as full-color LED displays, traffic lights, and image scanner light sources as high-intensity pure green light-emitting LEDs and blue LEDs.
- These nitride semiconductor LED elements basically have a buffer layer on a sapphire substrate, an n-side contact layer made of S 1 -doped GaN, and a single quantum well structure of InGaN or InGaN. It has a structure in which an active layer having a multiple quantum well structure having N, a p-side cladding layer made of Mg-doped A 1 GaN, and a p-side contact layer made of Mg-doped GaN are sequentially stacked.
- the blue LED with the emission wavelength of 450 nm emits 5 mW
- the external quantum efficiency is 9.1%
- the green LED with 520 nm emits 3tnW and the external quantum efficiency is 6.3%.
- This laser device has a double heterostructure having an active layer of a multiple quantum well structure (MQW: Mu1ti-Quantum-We11) using InGaN. Oscillation with a threshold current of 610 mA and a threshold current density of 8.7 kA / cm 2 , 410 nm under the conditions of a pulse width of 2 ⁇ s and a pulse period of 2 ms.
- MQW multiple quantum well structure
- This laser device has 27 hours of continuous oscillation at 20 ° C with a threshold current density of 3.6 kA / cm 2 , a threshold voltage of 5.5 V, and a 1.5 mW output. did.
- nitride semiconductors have already been put to practical use in LEDs (Light Emitting Devices), and LDs (Laser Diodes) have reached continuous oscillation for several tens of hours.
- LEDs can be used, for example, for lighting sources, outdoors exposed to direct sunlight. Further improvements in output are required for use in displays and the like.
- LDs further improvements are needed to lower the threshold value and extend the lifespan, and to make them practical for light sources such as optical pickups and DVDs.
- the LED element has a Vf of about 3.6 V at 2 O mA. By further lowering V f, the heat generation of the element is reduced and reliability is improved. For laser devices, lowering the SJE at the threshold is very important for improving device lifetime.
- the present invention has been made in view of such circumstances, and its purpose is to mainly improve the output of nitride semiconductor devices such as LEDs and LDs, and reduce V f and threshold voltage.
- the first objective is to increase the carrier concentration of the N-type contact layer and reduce the resistivity thereof, in particular, in order to improve the reliability of the device.
- the nitride semiconductor device of the present invention is characterized in that the N-type contact layer has a special three-layer laminated structure or a superlattice structure,
- the first nitride semiconductor device includes, on a substrate, at least an N-type contact layer forming an N-electrode, an activity J1 for recombining electrons and holes, and a P-type contact layer forming a P-electrode.
- the N-type contact layer comprises a N-type impurity-doped nitride semiconductor layer having a first surface and a second surface, and the first surface and the second surface.
- a three-layer stacked structure in which an undoped nitride semiconductor layer not doped with an N-type impurity is formed in contact with the surface and stacked on the N-type contact layer.
- the undoped nitride semiconductor layer is not intentionally doped with impurities.
- Nitride semiconductor layer for example, impurities contained in the raw material, contamination in the reaction equipment, layers containing impurities due to unintentional diffusion from other layers intentionally doped with impurities, and small amounts of doping Layer that can be regarded as practically AND
- N-type impurities Si, Ge, Sn, and the like, which are Group IV elements, can be cited, but Si is preferable.
- nitride semiconductors including the N-type contact layer and laminated thereon GaN, InGaN, and AIGAN can be given as typical examples.
- G a N containing no i is preferable from the viewpoint of crystallinity.
- an undoped nitride semiconductor sandwiching the N-type contact layer will be described in detail below. If the N-type contact layer is a second layer having a three-layered structure, the first layer formed on the substrate side will be described.
- the third nitride semiconductor formed on the opposite side of the N-type contact layer from the substrate is G aN, InG aN or A 1 G aN.
- IG a N is preferred.
- an N-type contact layer (second layer) doped with Si is sandwiched between AND GaN.
- AND GaN (third layer) ZSi doped GaN (second layer) A typical example is a three-layer structure of Z undoped GaN (first layer).
- the second nitride semiconductor layer can have a carrier concentration of 3 ⁇ 10 18 / cm 3 or more, and considering the mobility of the layer, the resistivity is 8 ⁇ 1 and wherein the 0- 3 ⁇ ⁇ cm * is full.
- the resistivity of the conventional N-type contact layer 8 X 1 0- 3 ⁇ ⁇ cm has been a limit (e.g., U.S. Patent No. 5, 73 3, 7 96 No.) of force V f by a decrease in the resistivity Can be reduced. Resistivity that can realize 6 X 1 0- 3 ⁇ ⁇ cm ⁇ under, more preferably 4 X 1 0- 3 ⁇ ⁇ cmJ [ ⁇ lower and ing.
- the lower limit is not particularly limited, but is preferably adjusted to 1 X 1 ⁇ ⁇ ⁇ ⁇ cm or more. If the resistance is lower than the lower limit, the amount of impurities becomes too large, and the crystallinity of the nitride semiconductor tends to deteriorate.
- a buffer layer that is grown at a lower temperature than the first nitride semiconductor layer is provided between the substrate and the first nitride semiconductor layer.
- This buffer layer can grow, for example, A 1 N, GaN, A 1 GaN, etc. to a thickness of 0.5 ⁇ m or less at 400 to 900 ° C. Relax inconsistency It acts as a base layer for growing the sum or the first nitride semiconductor layer with good crystallinity.
- a GaN buffer is preferable.
- the thickness of the third nitride semiconductor layer is 0.5 / zm or less.
- the more preferable thickness of the third nitride semiconductor layer is 0.2 / m or less, most preferably 0.15 // m or less.
- the lower limit is not particularly limited, but is desirably adjusted to at least 100 angstroms, preferably at least 50 angstroms, and most preferably at least 100 angstroms. Since the third nitride semiconductor layer is an undoped layer and has a resistivity as high as 0.1 ⁇ cm or more, when this layer is grown as a thick layer, V f tends to be unlikely to decrease. It is in.
- a second nitride semiconductor device comprises: an N-type contact layer for forming at least an N electrode on a substrate; an active layer for recombining electrons and holes; and a P.-type contact for forming a P electrode.
- the N-type contact layer comprises a superlattice layer formed by stacking at least a nitride semiconductor layer doped with an N-type impurity and an undoped nitride semiconductor layer not doped with an N-type impurity.
- the N-type contact layer is, similarly to the first nitride semiconductor light-emitting device, formed of a GaN-doped or superlattice layer which is in contact with the first surface and the second surface and does not doped with N-type impurities. It is preferable to form first and third nitride semiconductor layers having a small amount of n-type impurities, and to stack them so as to sandwich the second nitride semiconductor layer (N-type contact layer).
- the superlattice structure refers to a multilayer of a nitride semiconductor layer having a thickness of 100 ⁇ or less, more preferably 70 ⁇ or less, and most preferably 50 ⁇ or less. , It refers to the structure that is laminated.
- the superlattice structure or superlattice layer referred to in the present specification includes a multilayer film in which layers having different compositions are stacked, and a layer having the same composition and different doping amounts of n-type impurities. It includes both of the laminated multilayer films.
- the “undoped” nitride semiconductor layer refers to a nitride semiconductor layer in which impurities are not intentionally doped, and has the same meaning as in the first light-emitting element.
- the substrate and the f! B first nitride semiconductor layer Between the first nitride semiconductor layer and the first nitride semiconductor layer.
- the buffer layer can grow, for example, A 1 N, GaN, A 1 GaN, etc. in a thickness of 0.5 / im or less at 4O 0 to 900 ° C. It acts as an underlayer for alleviating lattice mismatch with the nitride semiconductor or for growing the first nitride semiconductor layer with good crystallinity.
- the second nitride semiconductor layer can be formed by laminating two types of nitride semiconductor layers having different band gap energies, and another nitride semiconductor is provided between the two types of nitride semiconductor layers. Layers may be formed and laminated. In this case, in the two types of nitride semiconductor layers, it is preferable that n-type impurities are doped at different concentrations.
- modulation doping the difference in impurity concentration between the nitride semiconductor layers forming the superlattice layer.
- the n-type impurity may be doped more into a layer having a larger band gap energy.
- a layer having a smaller band gap energy may be heavily doped.
- the second nitride semiconductor layer is formed by laminating two types of layers having different band gap energies, it is preferable that one of the layers is not doped with an impurity, that is, undoped.
- the ti-type impurity may be doped into the layer having the larger bandgap energy, or may be doped into the layer having the smaller bandgap energy.
- the second nitride semiconductor layer is formed by laminating two types of nitride semiconductor layers having the same composition on a tile except that the n-type impurity concentrations are different from each other. It may be.
- one of the two types of nitride semiconductor layers is preferably an undoped layer, which is not doped with an n-type impurity.
- the superlattice layer constituting a typical N-type contact layer is composed of G aN / G aN, In G a N / G a N, A 1 G a N / G a N, and In G a N It is preferably formed of a superlattice layer in which nitride layers selected from combinations of A 1 G a N are alternately stacked, and one of them is doped with Si.
- the thickness is less than 0.1 / xm. More preferably, the thickness of the third nitride semiconductor layer is adjusted to 500 angstrom or less, more preferably, to 200 angstrom or less. The lower limit of the thickness of the third nitride semiconductor layer is not particularly limited, but is preferably adjusted to 10 ⁇ or more. If the third nitride semiconductors layer is undoped single layer non-superlattice structure, since the resistivity is high and usually 1 X 1 0 one 1 Omega ⁇ cm or more, the layer 0.
- N-type contact layer constituting the super lattice structure can have 3 X 1 0 1 8 / cm 3 or more carrier concentration, considering the mobility of the layer, the resistivity 8 X 1 0- 3 ⁇ ⁇ cm * will be full.
- the resistivity of the conventional n-type contact layer is 8 X 1 0- 3 ⁇ ⁇ cm has been the limit, as in the first nitride semiconductor device due to a decrease in the resistivity, so please low the V f be able to.
- Resistivity can be achieved following 6 X 1 0- 3 ⁇ ⁇ cm , further preferred properly becomes 4 X 1 0 one 3 ⁇ ⁇ cra3 ⁇ 4 under.
- the lower limit is not particularly limited, 1 X 1 0 - it is preferable to adjust the 5 ⁇ ⁇ cm ⁇ above. If the resistance is lower than below, the amount of impurities becomes too large, and the crystallinity of the nitride semiconductor tends to deteriorate.
- FIG. 1 is a schematic sectional view showing the structure of an LED element according to one embodiment of the present invention.
- FIG. 2 is a schematic sectional view showing the structure of an LD element according to another embodiment of the present invention.
- the first light emitting device of the present invention has a nitride semiconductor layer having at least a three-layer structure regardless of the activity and the substrate.
- the first nitride semiconductor layer is undoped in order to grow the second nitride semiconductor layer containing an N-type impurity with good crystallinity. If this layer is intentionally doped with impurities, the crystallinity deteriorates and it is difficult to grow the second nitride semiconductor layer with good crystallinity.
- the second nitride semiconductor layer is doped with N-type impurities to act as a contact layer for forming an N electrode having a low resistivity and a high carrier concentration.
- the resistivity of the second nitride semiconductor layer is N Electrode material and preferably Rere O lay desirable as small as possible in order to obtain an ohmic contact, preferably 8 X 1 0- 3 ⁇ 'en * fully.
- the third nitride semiconductor layer is also doped. The reason why this layer is undoped is that the second nitride semiconductor layer having a low resistivity and a high carrier concentration has not very good crystallinity. If an active layer, a cladding layer, or the like is grown directly on this, the crystallinity of those layers also deteriorates. Acts as a buffer layer before growing the conductive layer.
- the carrier concentration in the second nitride semiconductor layer is greater than 3 XI 0 l8 Zctf.
- a group 4 element can be used.
- Si or Ge is used, and more preferably, Si is used.
- the N-type impurity-doped second nitride semiconductor crystal is an AND-type first nitride semiconductor layer between the active layer and the substrate. Then, the second nitride semiconductor layer doped with an N-type impurity can be grown as a thick film with good crystallinity. Further, the undoped third nitride semiconductor is a good crystallinity for the nitride semiconductor layer grown on the layer. Therefore, the resistivity of the second nitride semiconductor layer can be reduced, and the carrier concentration increases, so that a highly efficient nitride semiconductor device can be realized. As described above, according to the present invention, a light-emitting element having a low V i and a threshold value can be realized, so that the amount of heat generated by the element is reduced, and an element with improved reliability and reproduction can be obtained.
- the second light emitting device of the present invention has a nitride semiconductor superlattice layer as a negative contact layer between the active and the substrate.
- the superlattice layer has a first surface and a second surface, and the first surface has an undoped or n-type impurity concentration higher than that of the second nitride semiconductor layer in order to grow the superlattice layer with good crystallinity. It has a small number of first nitride semiconductor layers.
- the first nitride semiconductor layer is most preferably undoped, but since the second nitride semiconductor layer has a superlattice structure, it may be doped with less ti-type impurity than the second nitride semiconductor layer.
- the n-type impurity includes a Group 4 element, but is preferably Si or Ge, more preferably Si is used.
- the thickness of each nitride semiconductor layer constituting the superlattice layer becomes less than the elastic critical thickness, so that nitride semiconductors with very few crystal defects grow. it can. Further, since the superlattice layer can stop a crystal defect generated from the substrate through the first nitride semiconductor layer, the crystal of the third nitride semiconductor layer grown on the superlattice layer can be stopped. Can be improved. Another notable effect is similar to HEMT.
- the superlattice layer is formed by laminating a nitride semiconductor layer having a large band gap energy and a nitride semiconductor layer having a bandgap energy smaller than that of the nitride semiconductor layer having a large band gap energy. It is preferable to have a superlattice structure having different impurity concentrations. Bandgap energy constituting the superlattice layer
- the nitride semiconductor layer having the largest bandgap energy and the nitride semiconductor layer having the smaller bandgap energy have a thickness of 100 ⁇ or less, more preferably 70 ⁇ or less, and most preferably 10 to 40 ⁇ . Adjust the thickness.
- the nitride semiconductor layer having a large band gap energy and the nitride semiconductor layer having a small band gap energy have a film thickness exceeding the elastic strain limit, and minute cracks or crystal defects enter the film. Tends to be easy.
- the lower limit of the film thickness of the nitride semiconductor layer having a large bandgap energy and the nitride semiconductor layer having a small bandgap energy is not particularly limited, and may be at least one atomic layer. Angstrom or more is most preferred.
- a nitride semiconductor layer having a large band gap energy be grown on a nitride semiconductor containing at least A1, preferably Al x Gai X N (0 ⁇ X ⁇ 1).
- I n z Ga ⁇ _ ⁇ ⁇ 2 element mixed crystal such as (0 ⁇ ⁇ 1), easy to grow a nitride semiconductor of ternary mixed crystals, also has good crystallinity Easy to obtain.
- a nitride semiconductor having a large band gap energy is particularly preferable.
- the second nitride semiconductor layer forms a cladding layer as an optical confinement layer and a carrier confinement layer, it is necessary to grow a nitride semiconductor having a larger band gap energy than the well layer of the active layer.
- the nitride semiconductor layer having a large band gap energy is a nitride semiconductor having a high A1 mixed crystal ratio. Conventionally, when nitride semiconductors with a high A 1 crystal ratio were grown in a thick film, cracks were easily formed and crystal growth was extremely difficult.
- the superlattice layer is formed as in the present invention, even if the single layer constituting the superlattice layer is a layer having a somewhat higher A1 mixed crystal ratio, cracks are formed because the layer is grown to a thickness less than the elastic criticality. Difficult to enter. Therefore, a layer having a high A1 mixed crystal ratio can be grown with good crystallinity, so that the light confinement and carrier confinement effects are enhanced, and the threshold voltage can be reduced in a laser device, and (forward voltage) can be reduced in a £ 0 device. .
- the ⁇ -type impurity concentration of the nitride semiconductor layer having a large band gap energy of the second nitride semiconductor layer is different from that of the nitride semiconductor layer having a small band gap energy.
- This is a so-called modulation doping, in which the n-type impurity concentration in one layer is reduced, and preferably the impurity is not doped. , V f, etc. can be reduced. This is because the mobility of the layer with a low impurity concentration is increased by allowing the layer to have a low impurity concentration in the superlattice layer, and the layer with a high impurity concentration is also present, so that the superlattice layer is maintained at a high carrier concentration.
- a layer can be formed.
- a layer having a high impurity concentration and a high mobility and a layer having a high impurity concentration and a high carrier concentration are present at the same time, so that a layer having a high carrier concentration and a high mobility becomes a cladding layer. It is assumed that the threshold values SE and Vf decrease.
- a two-dimensional electron gas is generated between the high impurity concentration layer and the low impurity concentration layer by the modulation doping. Inferred that resistivity will decrease due to influence Is done.
- a layer doped with an n-type impurity is used in a superlattice layer in which a nitride semiconductor layer with a large band gap doped with an n-type impurity and an undoped nitride semiconductor layer with a small band gap are stacked.
- the barrier layer side is depleted, and electrons (two-dimensional electron gas) accumulate at the interface around the layer with the smaller band gap before and after the thickness. Since the two-dimensional electron gas can have a small band gap, the electrons are not scattered by impurities when traveling, so that the mobility of electrons in the superlattice increases and the resistivity decreases.
- the p-side modulation doping is also assumed to be affected by the two-dimensional hole gas. In the p-layer, Al GaN has a higher resistivity than GaN. Therefore, the doping of more p-type impurities into A 1 GaN lowers the resistivity, causing the actual resistivity of the superlattice layer to decrease. Inferred.
- the A 1 GaN layer has a large Mg receptor level and a low activation rate.
- the depth of the acceptor ⁇ : in the GaN layer is shallower than that in the A 1 GaN layer, and the activation rate of Mg is high.
- GaN has a carrier concentration of about 1 ⁇ 10 ⁇ / cm 3
- a 1 GaN has a carrier concentration of 1 ⁇ 10 17 / cm 3 3 ⁇ 43 ⁇ 4
- a superlattice having a high carrier concentration can be obtained by forming a superlattice with AlGaNZGaN and doping a larger amount of impurities into the GaN layer which can obtain a high carrier concentration.
- the carrier is a superlattice
- the carrier moves through the A 1 GaN layer with a low impurity concentration due to the tunnel effect, so that the carrier is substantially not affected by the A 1 GaN layer, and the A 1 GaN
- the N layer acts as a cladding layer with high bandgap energy. Therefore, even if the nitride semiconductor layer with the smaller band gap energy is doped with a large amount of impurities, it is very effective in lowering the threshold value of the laser device and the LED device.
- a superlattice is formed on the P-type layer side has been described. However, a similar effect can be obtained when a superlattice is formed on the n-layer side.
- a preferable doping amount for the nitride semiconductor layer having a large band gap energy is 1 ⁇ 10 17 Zcm 3 to 1 ⁇ 10 2 ° / cm 3 , and more preferably 1 ⁇ 10 18 / cm 3 to 5 X Adjust to a range of 10 19 cm 3 .
- 1 X 10 17 / cm 3 less than the difference is running low of a small nitride semiconductor layer of the band formic Yap energy and a large layer obtained less likely the carrier concentration, also 1 X1 0 2 ° cm 3 If it is larger than this, the leak current of the element itself tends to increase.
- the n-type impurity concentration of the small nitride semiconductor layer of the bandgap energy is preferably smaller than that of the nitride semiconductor layer having a large bandgap energy, and is preferably 1/10 or less. Most preferably, if undoped, a layer having the highest mobility can be obtained. Since the film thickness is small, there is an n-type impurity diffused from the nitride semiconductor side having a large band gap energy, and its amount is 1 ⁇ 10 19 / cm 3 or less is desirable.
- n-type impurities elements of Group IVB and VIB of the periodic table such as Si, Ge, Se, S, and 0 are selected, and preferably, Si, Ge, and S are n-type impurities. This effect is the same when the nitride semiconductor layer having a large band gap energy is doped with a small amount of n-type impurities, and the nitride semiconductor layer having a small band gap energy is doped with a large amount of n-type impurities.
- the superlattice layer is preferably subjected to modulation doping with impurities.However, it is also possible to make the impurity concentration of the nitride semiconductor layer having a large band gap energy equal to that of the nitride semiconductor layer having a small band gap energy. it can.
- the layer in which impurities are doped at a high concentration has a higher impurity concentration near the center of the semiconductor layer and a higher impurity concentration near both ends in the thickness direction. It is desirable to make it small (preferably undoped). More specifically, for example, when a superlattice layer is formed of Al GaN doped with Si as an n-type impurity and an undoped GaN layer, A 1 GaN is doped with Si. Donna puts electrons into the conduction band, but the electrons fall into the low potential G a N conduction band. Since the GaN crystal is not doped with donor impurities, carriers are not scattered by the impurities.
- a similar effect can be obtained when a superlattice is formed on the p-layer side.
- the center region of the nitride semiconductor layer having a large band gap energy is doped with a large amount of P-type impurities, and both ends are doped. It is desirable to make it less or undoped.
- a layer in which a nitride semiconductor layer having a small band gap energy is doped with a large amount of n-type impurities may be configured to have the above-mentioned impurity concentration, but a superlattice doped with a large amount of impurities in the smaller band gap energy may be used. However, the effect tends to be small.
- the third nitride semiconductor layer is also undoped or has a lower n-type impurity concentration than the second nitride semiconductor layer.
- the reason for reducing the n-type impurity concentration in this layer is that if a third nitride semiconductor layer containing a large amount of impurities is grown directly on the uppermost layer of the superlattice layer, the crystallinity of the layer tends to deteriorate. Therefore, in order to grow the third nitride semiconductor layer with good crystallinity, the n-type impurity concentration is reduced, and most preferably undoped.
- I rixGa ⁇ X N (0 ⁇ X ⁇ 1), preferably, growing I rixGa ⁇ X N (0 ⁇ X ⁇ 0. 5)
- This acts as a buffer layer for a layer grown on the third nitride semiconductor, and grows an upper layer from the third nitride semiconductor layer.
- a relatively high resistivity layer such as an undoped single layer between the active layer and the second nitride semiconductor layer, it is possible to prevent leakage current of the device and increase the reverse breakdown voltage. Can be done.
- Undoped GaN / Si-doped GaN B
- Undoped GaN A
- Undoped GaN A
- FIG. 1 is a schematic cross-sectional view showing the structure of an LED element according to an example of the second embodiment of the present invention.
- a method of manufacturing the element of the present invention will be described with reference to FIG.
- substrate 1 made of sapphire (c-plane) in the reaction vessel and sufficiently replacing the inside of the vessel with hydrogen, raise the ⁇ 3 ⁇ 4 of the substrate to 1050 ° C while flowing hydrogen to clean the substrate.
- Another sapphire C face substrate 1, a sapphire having the principal R-plane, A plane, other, other insulating substrate such as spinel (MgA l 2 0 4), S i C (6H, 4H, Semiconductor substrates such as Si, ZnO, GaAs, and GaN can be used.
- the temperature was lowered to 510 ° C, and hydrogen was used as the carrier gas, ammonia and TMG (trimethylgallium) were used as the source gas, and a GaN buffer layer 2 was formed on the substrate 1 to a film thickness of about 200 ⁇ . Grow in thickness.
- the first nitride semiconductor layer 3 made of undoped GaN is grown to a thickness of 5 / Zm, also using TMG and ammonia gas as source gases.
- the first nitride semiconductor layer is grown at a higher temperature than the buffer layer, for example, 9003 ⁇ 4 to 1100, and In x A 1 Y Ga ⁇ — x ⁇ 0 (0 ⁇ , 0 ⁇ , ⁇ + ⁇ 1) in construction can, but its composition is not intended asks particularly preferably GaN, a nitride semiconductor layer force is easily obtained with less crystal defects and X value is to 0.2 the following a 1 X G a.
- the film is grown with a thickness larger than that of the buffer layer, and usually with a thickness of 0.1 ⁇ m or more. Since this layer is an undoped layer, it is close to an intrinsic semiconductor and has a resistivity greater than 0.2 ⁇ ⁇ cm, but it is doped with n-type impurities such as Si and Ge less than the second nitride semiconductor layer and has a resistivity. May be reduced.
- an undoped GaN layer is grown to a thickness of 20 angstroms using TMG and ammonia gas, and then at the same temperature, silane gas is added, and Si is increased by 1 ⁇ 10 19 / cm 3
- a doped GaN layer is grown to a thickness of 20 ⁇ .
- a pair of the A layer composed of the undoped GaN layer of 20 ⁇ and the B layer of 20 ⁇ having the Si doped GaN layer is grown.
- 250 layers are laminated to make 1 / zm thickness, A second nitride semiconductor layer 4 having a superlattice structure is grown.
- the third nitride semiconductor layer 5 can also be composed of In x A 1 Y Ga — x- Y N (0 ⁇ X, 0 ⁇ Y, X + Y ⁇ 1), and its composition is not particularly limited.
- GaN, Al x G ai with X value of 0.2 or less— X N or In n Y Ga to Y N with Y value of 0.1 or less can provide a nitride semiconductor layer with few crystal defects. Cheap.
- InGa a it is possible to prevent cracks in the nitride semiconductor layer containing A1 when growing a nitride semiconductor containing A1 thereon.
- a p-side cladding layer 7 of 9 N is grown to a thickness of 0.1 ⁇ m. This layer acts as a carrier confinement layer, nitride semiconductors containing A 1, preferably desirable to grow the Al Y G ai _ Y N ( 0 rather Y rather 1), growing a good crystallinity layer A 1 Y G a with a Y value of 0.3 or less
- the P-side cladding layer 7 may be a superlattice layer, and it is preferable that the p-side layer has a superlattice layer since the threshold value is further reduced.
- the layer that can be a superlattice layer in the p-side layer is not particularly limited.
- the p-side contact layer 8 made of p-type GaN doped with 10 2 Vcm 3 is grown to a thickness of 0.1 / xm.
- the p-side contact layer 8 can also be composed of In x A 1 Y Ga to x Y N (0 ⁇ , 0 ⁇ , ⁇ + ⁇ 1), and its composition is not particularly limited.
- G a ⁇ a nitride semiconductor layer with few crystal defects is easily obtained, and a favorable ohmic contact with a p-electrode material is easily obtained.
- the temperature is lowered to room temperature, and the wafer is annealed in a nitrogen atmosphere at 700 ° C. in a reaction vessel to further reduce the resistance of the p-type layer.
- the wafer is removed from the reaction vessel, a mask of a predetermined shape is formed on the surface of the uppermost p-side contact layer 8, and etching is performed from the P-side contact layer side by a RIE (reactive ion etching) apparatus. As shown in 1, the surface of the second nitride semiconductor layer 4 is exposed.
- RIE reactive ion etching
- the p pad electrode 10 made of Au is formed with a thickness of 0.5 ⁇ m.
- an n-electrode 11 containing W and A1 is formed on the surface of the second nitride semiconductor layer 4 exposed by etching.
- an insulating film 12 made of Si 02 is formed as shown in FIG. 1 to protect the surface of the p-electrode 9, and the wafer is separated by scribing to obtain a 350 / zm square LED element.
- This LED device emits pure green light of 520 nm at a voltage of about 20 mA in the direction of I.
- the buffer layer of GaN on sapphire, the n-side contact layer of Si-doped GaN, and the single quantum A conventional green light-emitting LED in which an active layer of InGaN with a well structure, a p-side cladding layer of Mg-doped A 1 GaN, and a p-side contact layer of Mg-doped GaN are stacked in this order.
- Vf at 2 OmA was reduced by 0.2 to 0.4 V, and output was improved by 40% to 50%.
- the electrostatic breakdown voltage was more than five times that of the conventional LED element.
- Example 1 was the same as Example 1 except that the second nitride semiconductor layer was formed as follows when growing the second nitride semiconductor layer.
- the S i dope G a N layer was 1 X 10 1 cm 3 doped with S i is 25 ⁇ growth, temperature followed by 800 ° C.
- the in-grown InGaN is grown to 75 / xm.
- 100 layers of the A layer composed of the Si doped GaN layer and 75 A of the B layer composed of the undoped InGaN are alternately laminated by 100 layers, and the total film thickness is 2
- a second nitride semiconductor layer having a superlattice structure of ⁇ m was formed.
- the superlattice structure LED of the third embodiment manufactured as described above had the same performance as that of the first embodiment.
- the A layer composed of an AND GaN layer is 40 ⁇ , and Si is uniformly doped with 1 ⁇ 10 18 Zcm 3 A 1. .
- the a 0. 9 N layer B layer by laminating a 60 ⁇ alternately 300 layers was obtained an LED element addition to the super lattice structure of total thickness 3 / xm in the same manner, Example 2 An LED element having substantially the same characteristics as was obtained.
- FIG. 2 is a schematic cross-sectional view showing a structure of a laser device according to another embodiment of the present invention, and shows a view when the device is cut in a direction parallel to a laser resonance surface.
- Embodiment 5 will be described with reference to FIG.
- a buffer layer 21 made of 200-angstrom GaN and a first layer made of 5 ⁇ In of undoped GaN are formed on a substrate 20 made of sapphire (C-plane).
- the nitride semiconductor layer 22 has a thickness of 3 to 2 ⁇ , and the GaN layer has a thickness of 3 ⁇ .
- a second nitride semiconductor layer 23 having a superlattice structure of ⁇ m (the configuration of the second nitride semiconductor layer 4 is the same as that of the first embodiment) is grown.
- a first GaN layer is grown on a substrate made of a material different from a nitride semiconductor, such as sapphire, and on the first GaN layer, A protective film, such as Si02, on which a nitride semiconductor is unlikely to grow on the surface is partially formed, and a second GaN is formed on the first GaN layer via the protective film.
- grown, by the second G a N layer is grown laterally over the S i 0 2, and the substrate and the second G a N layer a second G a N layer in the transverse direction is therefore ⁇ It is very preferable to use a nitrided semiconductor substrate in order to improve the crystallinity of the nitrided semiconductor.
- this nitride semiconductor substrate is used as a substrate, it is not necessary to particularly grow the buffer layer.
- n-type A 1 doped with 1 ⁇ 10 19 cm 3 of Si by changing it to 1550 ⁇ . . 2 G a 0, 8 N layer, 2 0 angstroms and an undoped (undope) G a N layer, 2 0 angstrom and the total thickness of laminated 2 0 0 layers alternately 0. 8 mu m super-rated Child structure.
- the n-side cladding layer 254 acts as a carrier confinement layer and a light confinement layer, and is preferably a nitride semiconductor containing A1, preferably a superlattice layer containing A1 GaN, and the entire superlattice layer.
- an n-side optical guide layer 26 of n-type GaN doped with 5 ⁇ 10 17 Zcni 3 of Si is grown to a thickness of 0.1 ⁇ m.
- the n-side light guide layer 26 functions as a light guide layer of the active layer, and is preferably used for growing GaN and InGaN. Usually, 100 ⁇ to 5 / zm, more preferably 200 ⁇ to 5 / zm. It is desirable to grow with a film thickness of 1 ⁇ m.
- the n-side light guide layer 5 is usually doped with an n-type impurity such as Si or Ge to have an n-type conductivity, but may be undoped.
- An active layer 27 of a multiple quantum well structure (MQW) having a total film thickness of 175 ⁇ is formed by alternately stacking barrier layers of 9 g N and 50 ⁇ .
- a p-side cap layer 28 of 7 N is grown to a thickness of 300 ⁇ . Since the p-side cap layer 28 is a layer doped with a p-type impurity and has a small thickness, the carrier may be i-type or n-type doped with an n-type impurity to compensate for the carrier. It is a layer doped with impurities.
- the thickness of the p-side cap layer 28 is adjusted to not more than 0, more preferably not more than 500 ⁇ , most preferably not more than 300 ⁇ . If the film is grown with a thickness greater than 0.1 / xm, cracks are easily formed in the p-type cap layer 28, and it is difficult to grow a nitride semiconductor layer having good crystallinity. When the composition ratio of A 1 is large and the thickness is small as A 1 G a N, the LD element easily oscillates. For example, Y values are adjusted to 500 ⁇ if 0.2 or more A 1 Y G a have Y N It is desirable. Although the lower limit of the thickness of the P-side cap layer 76 is not particularly limited, it is preferable that the P-side cap layer 76 be formed with a thickness of 10 ⁇ or more.
- a p-side light guide layer 29 made of p-type GaN doped with 1 ⁇ 10 19 / cm 3 Mg and having a band gap energy smaller than that of the p-side cap layer 28 is formed to a thickness of 0.1 ⁇ m. Let it grow.
- This layer acts as a light guide layer for the active layer, and is preferably grown on GaN or InGaN as with the n-side light guide layer 26.
- This layer also acts as a buffer layer when growing the P-side cladding layer 30, and is preferably grown at a film thickness of 100 angstroms to 5 // m, more preferably 200 angstroms to 1 / zm. Acts as a light guide layer.
- the p-side light guide layer is usually doped with a p-type impurity such as Mg to have a p-type conductivity, but need not be doped with an impurity.
- the thickness of the ⁇ -side cladding layer 30 is not particularly limited, either, but it is preferable that the ⁇ -side cladding layer 30 is grown to have a thickness of 100 ⁇ or more and 2 / xm or less, more preferably 500 ⁇ or more and 1 #m or less.
- the impurity concentration at the center of the (!) Side cladding layer can be increased and the impurity concentration at both ends can be decreased.
- Type A p-side contact layer 10 of GaN is grown to a thickness of 150 ⁇ . Adjusting the thickness of the p-side contact layer to 500 angstroms or less, more preferably 400 angstroms or less, and 20 angstroms or less h is advantageous in reducing the threshold voltage because the p-layer resistance is reduced.
- the wafer is subjected to aerating at 700 ° C in a nitrogen atmosphere in a reaction vessel to further reduce the resistance of the p-layer. After annealing, the wafer is taken out of the reaction vessel, and as shown in FIG. 2, the uppermost p-side contact layer 31 and the p-side cladding layer 30 are etched by an RIE apparatus to reduce the stripe width to 4 / zm. It has a ridge shape.
- the p-side cladding layer 30 exposed on both sides of the ridge stripe is etched around the ridge stripe as shown in FIG.
- the surface of the second nitride semiconductor layer 23 forming 1 is exposed, and the exposed surface is a superlattice layer having a high impurity concentration.
- a p-electrode 32 made of Ni_Au is formed on the entire surface of the ridge surface.
- a p-pad electrode 33 electrically connected to 2 is formed.
- an n-electrode 34 composed of W and A1 is formed on the surface of the n-side contact layer 4 exposed earlier.
- FIG. 2 shows the laser element shape. Note When this record monodentate element was laser oscillation at room temperature, as compared with the conventional 3 7 hours of continuous oscillated nitride semiconductor laser device, the threshold current density 2. 0 k A / cm 2 low down to near However, the threshold voltage was also close to 4 V, and the service life was improved to over 500 hours.
- the GaN layer doped with 1 ⁇ 10 19 Z cm 3 of Si is 20 ⁇ , and the undoped A 1 is formed.
- a 90 ⁇ layer of 10 G a o. Is grown to 20 ⁇ , and the pair is grown 250 times to form a second nitride semiconductor layer 4 having a superlattice structure with a total thickness of 1.0 ⁇ (10000 ⁇ ).
- Example 2 was performed in the same manner as in Example 1 except that Good results were obtained almost as in 1.
- the first nitride semiconductor layer having a low undoped or impurity concentration and the second nitride semiconductor having a 1 ⁇ superlattice layer having a high impurity concentration are provided.
- the layer and the undoped or third nitride semiconductor layer having a low impurity concentration By stacking the layer and the undoped or third nitride semiconductor layer having a low impurity concentration, an LED having a low Vf and a laser element having a low threshold can be obtained.
- the resistivity of the second nitride semiconductor layer is small, ohmic contact can be easily obtained between the n-electrode and the second nitride semiconductor layer, and Vf and the like are reduced.
- an LED and a laser element have been described.
- the present invention can be applied to any element using a nitride semiconductor, such as a light receiving element, a solar cell, and a power device using an output of a nitride semiconductor. it can.
- the first nitride semiconductor layer 3 made of undoped GaN is grown to a thickness of 1 using TMG and ammonia gas as the source gas.
- the first nitride semiconductor layer has a higher temperature than the buffer layer, for example, 900 to 1100. It can be grown in C and composed of In x A 1 Y G a! _ ⁇ _ ⁇ 0 (0 ⁇ , 0 ⁇ , X + ⁇ 1), and its composition is not particularly limited. GaN, X value ⁇ .
- the film thickness there is no particular limitation on the film thickness, and the film is grown with a thickness larger than that of the buffer layer, and usually with a thickness of 0.1 to 20 ⁇ . Since this layer is an undoped layer, it is close to an intrinsic semiconductor and has a resistivity greater than 0.1 ⁇ -cm. In addition, since the layer is grown at a higher temperature than the buffer layer, the undoped layer is also distinguished from the buffer layer.
- a Si / doped GaN layer is grown to a thickness of 3 / zm using silane gas as TMG, ammonia gas, and impurity gas.
- This second nitride semiconductor layer 4 can also be composed of In x A Ga to — Y N (0 ⁇ X 0 ⁇ Y, ⁇ + ⁇ 1), and ⁇ is not particularly limited, but is preferably Is GaN, Al x G ai — X N with X value of 0.2 or less, or In Y Y Ga ⁇ _ Y N with Y value of 0.1 or less, V with few crystal defects and nitride semiconductor layer Easy to get!
- the thickness of the film is not particularly limited, but it is preferable to grow the film in a thickness of usually 0.1 or more and 2 2 ⁇ or less because it is likely to form an N electrode.
- the carrier concentration 1 X 10 19 / cm one 3 the resistivity met 5 X 10- 3 ⁇ ⁇ cm was.
- the third nitride semiconductor layer 5 is also I nxA l yGa ⁇ Y N ( 0 ⁇ , 0 ⁇ , ⁇ + ⁇ l) with can be configured, the composition but should not be construed asks particularly preferably G aN, X value is 0.2 or less of a 1 x Ga X n or Y value is O. 1 following I n Y G a _ ⁇ ⁇ and easy fewer nitride semiconductor layer having crystal defects is obtained when,.
- Growing InGaN can prevent cracks in the nitride semiconductor layer containing Al when growing a nitride semiconductor containing Al. Note that when the second nitride semiconductor is grown from a single nitride semiconductor, the first nitride semiconductor layer, the second nitride semiconductor layer, and the third nitride semiconductor have the same composition. It is desirable to grow a nitride semiconductor, particularly GaN.
- This LED device emits pure green light of 520 nm at a forward voltage of 2 OmA, and has a buffer layer made of GaN on a sapphire substrate, an N-side contact layer made of Si-doped GaN, and a single quantum Compared with a conventional green light-emitting LED in which an active layer of InGaN with a well structure, a p-side cladding layer of Mg-doped AlGaN, and a P-side contact layer of Mg-doped GaN are stacked in this order.
- the Vf at 2 OmA was reduced by 0.1 to 0.2 V, and the output was improved by 5% to 10%.
- Example 8 Three-layer laminated structure LD
- Example 1 of the LD element of Embodiment 1 of the present invention is the same as Example 5 shown in FIG. 2 (a view when the element is cut in a direction parallel to the laser resonance plane) except for the configuration of the N-type contact layer. It is manufactured in.
- a buffer layer 21 made of 200 ⁇ of GaN was grown on a substrate 20 made of sapphire (C-plane), and the temperature was increased to 10 20 ° C. At 20, a first nitride semiconductor layer 22 of 5 um of undoped GaN is grown.
- a second nitride semiconductor layer 23 made of Si-doped N-type GaN is grown at 120 ° C. using silane gas as an impurity gas.
- the resistivity was 5 X 1 0- 3 ⁇ ⁇ cm .
- the third nitride semiconductor layer made of ⁇ is grown to the thickness of 500 Ongusuto port one arm.
- N-type A 1 was obtained by doping Si with 1 ⁇ 10 I 7 Zcm 3 . . 2 G a 0. 8 N layer, and 40 ⁇ , an undoped G a N layer, and laminating 40 layers alternating with 40 angstroms and superlattice structures.
- This n-side cladding layer acts as a carrier confinement layer and a light confinement layer.
- an n-side optical guide layer 26 of n-type GaN doped with 1 ⁇ 10 19 Zc m 3 of S ⁇ is grown to a thickness of 0.2 ⁇ m.
- the n-side light guide layer 26 functions as a light guide layer of the active layer, and is preferably used to grow GaN and InGaIn, usually 100 ⁇ to 5 ⁇ m, more preferably 200 ⁇ to 1 ⁇ m. It is desirable to grow with a thickness of / zm.
- the ⁇ -side light guide layer 5 may be an amp. (Live 27)
- the I n 0. Well layer made of 2 G a 0 8 N of S i-doped is grown to the thickness of 25 O Ngusutoromu. Then, only varying the molar ratio of TMI, S 1 De one flop I n 0. 01 G a 0 . 99 a barrier layer made of N is grown to the thickness of 50 angstroms. This operation is repeated twice, and finally a multi-quantum well structure (MQW) in which well layers are stacked.
- MQW multi-quantum well structure
- the Mg 1 X 1 0 20 / ctn 3 de one flop the P-type A 1 0 3 G a 0 7 the p-side cap layer 28 made of N is grown in 300 of angstroms.
- the p-side cap layer 28 is a layer doped with a p-type impurity, but may be an i-type doped with an n-type impurity to capture carriers due to its small thickness.
- the thickness of the P-side cap layer 28 is adjusted to 0.1 ⁇ or less, more preferably 500 angstrom or less, and most preferably 300 angstrom or less.
- the film is grown with a thickness greater than 0.1 ⁇ , cracks are easily formed in the p-type cap layer 28, and it is difficult to grow a nitride semiconductor layer with good crystallinity. In addition, carriers cannot pass through the energies due to the tunnel effect.
- the LD element When the ratio of A 1 is large and the thickness of A 1 G a N is small, the LD element easily oscillates.
- the Y value is adjusted to below 500 angstroms if 0.2 or more A 1 Y G a Y N, the lower limit of the thickness of the ⁇ -side cap layer 28 is not particularly limited, 1 0 Ongusuto Desirably, the thickness is not less than 1 ⁇ m as in the case of the laser device of the fourth embodiment.
- the side light guide layer 29 is grown to a thickness of 0.2 / xm.
- This layer like the n-side light guide layer 26, acts as a light guide layer for the active layer, and is preferably grown with G a N and In G a N, more preferably 100 ⁇ to 5 ⁇ m, more preferably Is preferably grown to a thickness of 200 ⁇ to 1 ⁇ .
- the ⁇ -side light guide layer is usually doped with a ⁇ -type impurity such as Mg to have a p-type conductivity type. In particular, it is not necessary to dope impurities.
- p-type A 1 obtained by doping Mg by 1 ⁇ 10 20 / cm 3 at 1020 ° C. 2 5 G a.
- a p-side cladding layer 30 composed of a superlattice layer formed by alternately stacking 40 ⁇ layers of 75 ⁇ and 40 ⁇ of an undoped p-type GaN layer is grown. This layer functions as a carrier confinement layer similarly to the n-side cladding layer 25, and the superlattice structure tends to lower the resistance of the P-type layer and lower the threshold.
- a p-side contact layer 31 of p-type GaN doped with 2 ⁇ 10 2 Vcm 3 of Mg is grown to a thickness of 150 ⁇ .
- the wafer is cleaned in a nitrogen atmosphere at 700 in a reaction vessel to further reduce the resistance of the p-layer.
- the ⁇ wafer is removed from the ⁇ container, and as shown in FIG. 2, the uppermost p-side contact layer 31 and the p-side cladding layer 30 are etched by an RIE device to have a stripe width of 4 / zm. Ridge shape.
- the nitride semiconductor layer containing A1 above the active layer 4 and higher layers into a ridge shape, the light emission of the active layer is concentrated at the lower portion of the ridge, and the transverse mode is a single layer. , The threshold value tends to decrease.
- a mask is formed on the ridge surface, and as shown in FIG. 2, the surface of the second nitride semiconductor layer 23 on which the N electrode 34 is to be formed is exposed so as to be bilaterally symmetric with respect to the stripe-shaped ridge. .
- a p-electrode 32 of NiZAu is formed on the entire surface of the ridge surface.
- An N electrode 34 composed of & ⁇ , Ti and A1 is formed on almost the entire surface of the second nitride semiconductor layer 23 in a stripe shape. Almost the whole area means 80% or more area.
- exposing the second nitride semiconductor layer 23 symmetrically with respect to the p-electrode 32 and providing ⁇ 3 ⁇ 43 ⁇ 4 over substantially the entire surface of the second layer 23 is also very advantageous in lowering the threshold value. is there.
- the back surface of the wafer sapphire substrate is polished to a thickness of about 50 ⁇ m.
- the polished surface is scribed and cleaved in a bar shape in a direction perpendicular to the stripe-shaped electrodes, and the cleaved surface is formed into a resonator.
- a dielectric film made of Si02 and Ti02 is formed on the cavity surface, and finally, the bar is cut in a direction parallel to the P electrode to form a laser element.
- the continuous oscillation power S of 405 nm was confirmed, and showed ⁇ of 500 hours or more, and the life was improved more than 10 times compared with the conventional nitride semiconductor laser device.
- Example 7 when the third nitride semiconductor layer 5 grown, TMG, TMI, ammonia used in the temperature to 800 3 ⁇ 4, undoped I n 0. 05 Ga 0. 95 N layer 20 0 ⁇ Ichimu membrane An LED element was obtained in the same manner as in Example 1 except that the element was grown to a thickness, and an element having substantially the same characteristics as in Example 7 was obtained.
- the main purpose is to improve the carrier concentration of the second nitride semiconductor layer serving as the N-type contact layer and to obtain a contact layer having the lowest possible resistivity as a result. This does not preclude doping the first nitride semiconductor layer with an N-type impurity within a range that does not substantially affect the reduction of the resistivity of the nitride semiconductor layer. Also, by doping a high-concentration N-type impurity into the second nitride semiconductor layer, the n-type cladding layer and the active layer formed on the second nitride semiconductor layer are prevented from growing with good crystallinity.
- the third nitride semiconductor layer is formed, it can be understood that even if an impurity is doped within a range that does not substantially hinder its purpose, it is within the technical scope of the present invention. Even if Si is substantially doped into the first or third nitride semiconductor in the range of 1 ⁇ 10 17 Z cm 3 or less, generation of a leak current and a slight decrease in output are observed as compared with undoped. However, it has been confirmed that it is not unusable (see Examples 9 to 11 below). Such a phenomenon can be said even when a superlattice structure is used as the N-type contact layer.
- the undoped In GaN S i -doped N-type GaN or superlattice structure undoped GaN and undoped GaNZS 1 -doped N-type GaN or superlattice structure In the GaN at least one of the first and the third can be doped with an n-type impurity as long as the second nitride semiconductor layer is not substantially hindered.
- the first nitride semiconductor layer 3 composed of the undoped GaN layer was formed under the same conditions as in Example 1. Grow to a thickness of 5 m.
- a Si doped GaN layer doped with 1 ⁇ 10 19 Zcm 3 of Si is grown at 2.25 / m using TMG, ammonia gas and Si gas. Thereby, the second nitride semiconductor layer 4 is formed.
- an undoped GaN layer is grown at a temperature of 800 ° C. by using TMG and ammonia gas at 20 angstrom, followed by undoped I 03] ⁇ using TMI, TMG and ammonia gas at a temperature of 800. Grow 10 m. In this way, 20 layers of the A layer consisting of the undoped GaN layer and 1 OA of the B layer consisting of the undoped InGaN layer are alternately laminated in 20 layers, and the total thickness of the layer is more than 60 OA. A third nitride semiconductor layer having a lattice structure was formed. Except for the above, the LED of Example 10 was produced in the same manner as Example 1.
- the superlattice structure LED of Example 10 manufactured as described above had the same performance as that of Example 7.
- Example 7 In Example 7, and S il X 10 17 Zcm 3 doped to a first nitride semiconductor layer 3, the S i to 8 X 10 18 / cm 3 doped second nitride semiconductor layer G a N4, third An element was formed in the same manner except that the nitride semiconductor layer 5 was fan-doped. Slight leakage current began to be generated from the device, and the output also decreased slightly.
- Example 7 the third nitride semiconductor layer 5 was doped with Si 1 X 10 1 cm 3 Then, an element was formed in the same manner as above except that the second nitride semiconductor layer G a N 4 was doped with 8 ⁇ 10 18 cm 3 of Si and the first nitride semiconductor layer 5 was undoped. The leak current S was generated from the device, and the output was slightly reduced.
- Example 7 Si was added to the first and third nitride semiconductor layers 3 and 5 by 8
- a device was formed in the same manner except that Zcm 3 was doped. Almost no leakage current was generated from the device, but the output was reduced.
- the first nitride semiconductor layer 3 composed of an AND GaN layer was formed under the same conditions as in Example 1. Grow to a thickness of 5 nm.
- the S i-doped GaN layer was 1 X 10 19 Zc m 3 doped with S i 2.
- the second nitrogen The semiconductor layer 4 is formed.
- undoped GaN is grown at 75 / im using TMG and ammonia gas, and at the same temperature, using TMG, ammonia gas and Si gas, Si is reduced to 1 ⁇ 10 19 / cm 3 dose.
- the grown GaN layer is grown by 25 angstroms. In this way, a layer of undoped GaN of 75 A and a layer of Si-doped GaN layer of 25 A are alternately laminated in 25 layers, and a third layer of a superlattice structure with a total thickness of 600 A is formed. A nitride semiconductor layer was formed.
- the superlattice structure LED of Example 14 manufactured as described above had the same performance as that of Example 7.
Description
Claims
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EP98933944A EP1014455B1 (en) | 1997-07-25 | 1998-07-27 | Nitride semiconductor device |
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US09/463,643 US7365369B2 (en) | 1997-07-25 | 1998-07-27 | Nitride semiconductor device |
CA002298491A CA2298491C (en) | 1997-07-25 | 1998-07-27 | Nitride semiconductor device |
DE69835216T DE69835216T2 (de) | 1997-07-25 | 1998-07-27 | Halbleitervorrichtung aus einer nitridverbindung |
US12/068,063 US8592841B2 (en) | 1997-07-25 | 2008-02-01 | Nitride semiconductor device |
US14/087,081 US20140077157A1 (en) | 1997-07-25 | 2013-11-22 | Nitride semiconductor device |
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JP34897397A JP3275810B2 (ja) | 1997-11-18 | 1997-12-18 | 窒化物半導体発光素子 |
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Also Published As
Publication number | Publication date |
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DE69835216D1 (de) | 2006-08-24 |
US20140077157A1 (en) | 2014-03-20 |
US20030010993A1 (en) | 2003-01-16 |
CN1142598C (zh) | 2004-03-17 |
US20080149955A1 (en) | 2008-06-26 |
CN1265228A (zh) | 2000-08-30 |
CA2298491A1 (en) | 1999-02-04 |
CA2298491C (en) | 2009-10-06 |
EP1014455B1 (en) | 2006-07-12 |
EP1014455A4 (en) | 2000-10-11 |
AU8358498A (en) | 1999-02-16 |
US8592841B2 (en) | 2013-11-26 |
DE69835216T2 (de) | 2007-05-31 |
EP1014455A1 (en) | 2000-06-28 |
US7365369B2 (en) | 2008-04-29 |
AU747260B2 (en) | 2002-05-09 |
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