WO1998051506A1 - Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre - Google Patents
Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre Download PDFInfo
- Publication number
- WO1998051506A1 WO1998051506A1 PCT/JP1998/002108 JP9802108W WO9851506A1 WO 1998051506 A1 WO1998051506 A1 WO 1998051506A1 JP 9802108 W JP9802108 W JP 9802108W WO 9851506 A1 WO9851506 A1 WO 9851506A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nozzle
- etching
- subjecting
- cross
- resist film
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000001312 dry etching Methods 0.000 abstract 2
- 238000000059 patterning Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/043—Electrostatic transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14411—Groove in the nozzle plate
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/423,788 US6375858B1 (en) | 1997-05-14 | 1998-05-13 | Method of forming nozzle for injection device and method of manufacturing inkjet head |
EP98919579A EP0985534A4 (en) | 1997-05-14 | 1998-05-13 | NOZZLE FORMING METHOD FOR INJECTORS AND MANUFACTURING METHOD OF INK JET HEAD |
KR10-1999-7010457A KR100514711B1 (ko) | 1997-05-14 | 1998-05-13 | 분사 장치의 노즐 형성 방법 및 잉크 젯 헤드의 제조 방법 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12457397 | 1997-05-14 | ||
JP9/124573 | 1997-05-14 | ||
JP668798A JP3728906B2 (ja) | 1998-01-16 | 1998-01-16 | インクジェットヘッドの貫通孔形成方法 |
JP10/6687 | 1998-01-16 | ||
JP2055098A JPH11216870A (ja) | 1998-02-02 | 1998-02-02 | インクジェットヘッドの製造方法 |
JP10/20550 | 1998-02-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998051506A1 true WO1998051506A1 (fr) | 1998-11-19 |
Family
ID=27277290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1998/002108 WO1998051506A1 (fr) | 1997-05-14 | 1998-05-13 | Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre |
Country Status (4)
Country | Link |
---|---|
US (2) | US6375858B1 (ja) |
EP (1) | EP0985534A4 (ja) |
KR (1) | KR100514711B1 (ja) |
WO (1) | WO1998051506A1 (ja) |
Cited By (5)
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WO2000073856A2 (en) * | 1999-06-01 | 2000-12-07 | Bmc Industries, Inc. | Pattern forming process comprising chemical machining and electrical discharge machining |
EP1065059A3 (en) * | 1999-07-02 | 2001-10-04 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
EP1136270A3 (en) * | 2000-03-13 | 2002-03-20 | Seiko Epson Corporation | Ink-jet head and ink-jet printer |
US6402301B1 (en) | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
EP1453680A1 (en) * | 2001-12-11 | 2004-09-08 | Ricoh Company, Ltd. | Drop discharge head and method of producing the same |
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JP4690556B2 (ja) * | 2000-07-21 | 2011-06-01 | 大日本印刷株式会社 | 微細パターン形成装置と微細ノズルの製造方法 |
JP2002187284A (ja) * | 2000-12-22 | 2002-07-02 | Canon Inc | 液体噴射ヘッドの製造方法 |
US6637868B2 (en) * | 2001-01-12 | 2003-10-28 | Fuji Photo Film Co., Ltd. | Inkjet head and method of manufacturing the same |
EP1236517A1 (en) | 2001-02-23 | 2002-09-04 | Microflow Engineering SA | Method of manufacturing a liquid droplet spray device and such spray device |
EP1273355B1 (en) * | 2001-02-23 | 2010-03-31 | Microflow Engineering SA | Method of manufacturing a liquid droplet spray device and such spray device |
US6830325B2 (en) * | 2002-02-15 | 2004-12-14 | Brother Kogyo Kabushiki Kaisha | Ink-jet head |
US6846069B2 (en) | 2002-05-10 | 2005-01-25 | Brother Kogyo Kabushiki Kaisha | Ink-jet head |
US8202439B2 (en) * | 2002-06-05 | 2012-06-19 | Panasonic Corporation | Diaphragm and device for measuring cellular potential using the same, manufacturing method of the diaphragm |
US7052117B2 (en) | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
US6902867B2 (en) | 2002-10-02 | 2005-06-07 | Lexmark International, Inc. | Ink jet printheads and methods therefor |
TW561068B (en) * | 2002-11-29 | 2003-11-11 | Au Optronics Corp | Nozzle head with excellent corrosion resistance for dry etching process and anti-corrosion method thereof |
TW200418716A (en) * | 2003-03-21 | 2004-10-01 | Hon Hai Prec Ind Co Ltd | A cavity and the method for fabricating the same |
US6984015B2 (en) * | 2003-08-12 | 2006-01-10 | Lexmark International, Inc. | Ink jet printheads and method therefor |
US20050130075A1 (en) * | 2003-12-12 | 2005-06-16 | Mohammed Shaarawi | Method for making fluid emitter orifice |
US7281778B2 (en) | 2004-03-15 | 2007-10-16 | Fujifilm Dimatix, Inc. | High frequency droplet ejection device and method |
US8491076B2 (en) | 2004-03-15 | 2013-07-23 | Fujifilm Dimatix, Inc. | Fluid droplet ejection devices and methods |
TWI308886B (en) * | 2004-06-30 | 2009-04-21 | Ind Tech Res Inst | Inkjet printhead and process for producing the same |
US7347532B2 (en) * | 2004-08-05 | 2008-03-25 | Fujifilm Dimatix, Inc. | Print head nozzle formation |
US7165831B2 (en) | 2004-08-19 | 2007-01-23 | Lexmark International, Inc. | Micro-fluid ejection devices |
JP2006103167A (ja) * | 2004-10-06 | 2006-04-20 | Seiko Epson Corp | 液滴吐出ヘッド及びその製造方法並びに液滴吐出装置 |
KR100590558B1 (ko) * | 2004-10-07 | 2006-06-19 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
JP5004806B2 (ja) | 2004-12-30 | 2012-08-22 | フジフィルム ディマティックス, インコーポレイテッド | インクジェットプリント法 |
KR100682917B1 (ko) | 2005-01-18 | 2007-02-15 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 |
US7585423B2 (en) * | 2005-05-23 | 2009-09-08 | Canon Kabushiki Kaisha | Liquid discharge head and producing method therefor |
KR100687570B1 (ko) * | 2005-07-19 | 2007-02-27 | 삼성전기주식회사 | 잉크젯 헤드용 노즐 및 그 제조방법 |
US7578925B2 (en) * | 2005-12-07 | 2009-08-25 | Ford Global Technologies, Llc | System and method for updating a baseline output of a gas sensor |
ATE457873T1 (de) * | 2006-05-31 | 2010-03-15 | Konica Minolta Holdings Inc | Verfahren zur herstellung einer siliciumdüsenplatte und verfahren zur herstellung eines tintenstrahlkopfs |
US8236187B2 (en) * | 2006-12-22 | 2012-08-07 | Telecom Italia S.P.A. | Ink-jet printhead manufacturing process |
US7988247B2 (en) | 2007-01-11 | 2011-08-02 | Fujifilm Dimatix, Inc. | Ejection of drops having variable drop size from an ink jet printer |
JP2011121218A (ja) | 2009-12-09 | 2011-06-23 | Seiko Epson Corp | ノズルプレート、吐出ヘッド及びそれらの製造方法並びに吐出装置 |
US9050592B2 (en) * | 2013-01-08 | 2015-06-09 | Hewlett-Packard Development Company, L.P. | Liquid dispenser cassette |
JP6164908B2 (ja) * | 2013-04-23 | 2017-07-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP6418023B2 (ja) | 2015-03-24 | 2018-11-07 | ブラザー工業株式会社 | 液体吐出装置の製造方法 |
ITUB20156035A1 (it) | 2015-11-30 | 2017-05-30 | St Microelectronics Srl | Dispositivo di eiezione di fluido con canale di restringimento, e metodo di fabbricazione dello stesso |
US10123491B2 (en) | 2015-12-30 | 2018-11-13 | Stmicroelectronics, Inc. | Aeroponics system with microfluidic die and sensors for feedback control |
JP2018048926A (ja) * | 2016-09-23 | 2018-03-29 | 東芝テック株式会社 | 液滴噴射装置 |
JP6833425B2 (ja) * | 2016-09-23 | 2021-02-24 | 東芝テック株式会社 | 液滴噴射装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56135075A (en) | 1980-03-26 | 1981-10-22 | Ricoh Co Ltd | Nozzle plate |
JPS6198558A (ja) * | 1984-10-15 | 1986-05-16 | エーテイーアンドテイー テレタイプ コーポレーシヨン | ノズル及びそのノズル構造を形成するプロセス |
JPH04125159A (ja) * | 1990-09-17 | 1992-04-24 | Sharp Corp | エッチング穴加工方法 |
JPH0550601A (ja) | 1990-09-21 | 1993-03-02 | Seiko Epson Corp | インクジエツト記録装置及びインクジエツトヘツドの製造方法 |
JPH0911479A (ja) * | 1995-06-30 | 1997-01-14 | Canon Inc | インクジェットヘッドの製造方法 |
JPH09300630A (ja) | 1996-05-15 | 1997-11-25 | Seiko Epson Corp | インクジェットヘッドの製造方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US4047186A (en) * | 1976-01-26 | 1977-09-06 | International Business Machines Corporation | Pre-aimed nozzle for ink jet recorder and method of manufacture |
DE2728657A1 (de) * | 1977-06-24 | 1979-01-04 | Siemens Ag | Duesenplatte fuer tintenschreibeinrichtungen |
US4733823A (en) | 1984-10-15 | 1988-03-29 | At&T Teletype Corporation | Silicon nozzle structures and method of manufacture |
EP0344809B1 (en) * | 1988-06-03 | 1994-08-31 | Canon Kabushiki Kaisha | Liquid emission recording head, substrate therefor and liquid emission recording apparatus utilizing said head |
US4828184A (en) * | 1988-08-12 | 1989-05-09 | Ford Motor Company | Silicon micromachined compound nozzle |
KR0165677B1 (ko) * | 1989-01-20 | 1999-05-01 | 요하네스 야코부스 스모렌버그 | 잉크-제트 방식 인쇄기용 노즐 |
ATE146133T1 (de) * | 1989-09-18 | 1996-12-15 | Canon Kk | Tintenstrahlgerät |
US4957592A (en) * | 1989-12-27 | 1990-09-18 | Xerox Corporation | Method of using erodable masks to produce partially etched structures in ODE wafer structures |
US5259737A (en) * | 1990-07-02 | 1993-11-09 | Seiko Epson Corporation | Micropump with valve structure |
US5912684A (en) | 1990-09-21 | 1999-06-15 | Seiko Epson Corporation | Inkjet recording apparatus |
ATE144741T1 (de) * | 1991-01-30 | 1996-11-15 | Canon Information Syst Res | Strahldrucker mit bläschen für bildaufzeichnungsvorrichtung |
DE59209764D1 (de) * | 1992-05-20 | 1999-12-09 | Ibm | Verfahren zum Erzeugen einer mehrstufigen Struktur in einem Substrat |
JPH06238903A (ja) * | 1993-02-12 | 1994-08-30 | Ricoh Co Ltd | マルチノズル板およびその製造法 |
US5487483A (en) * | 1994-05-24 | 1996-01-30 | Xerox Corporation | Nozzles for ink jet devices and method for microfabrication of the nozzles |
US5519421A (en) * | 1994-07-18 | 1996-05-21 | Hewlett-Packard Company | Disruption of polymer surface of a nozzle member to inhibit adhesive flow |
EP1104698B1 (en) * | 1995-09-05 | 2003-07-02 | Seiko Epson Corporation | Ink jet recording head and method of producing the same |
US5738757A (en) * | 1995-11-22 | 1998-04-14 | Northrop Grumman Corporation | Planar masking for multi-depth silicon etching |
US6303274B1 (en) * | 1998-03-02 | 2001-10-16 | Hewlett-Packard Company | Ink chamber and orifice shape variations in an ink-jet orifice plate |
-
1998
- 1998-05-13 EP EP98919579A patent/EP0985534A4/en not_active Withdrawn
- 1998-05-13 US US09/423,788 patent/US6375858B1/en not_active Expired - Lifetime
- 1998-05-13 WO PCT/JP1998/002108 patent/WO1998051506A1/ja active IP Right Grant
- 1998-05-13 KR KR10-1999-7010457A patent/KR100514711B1/ko not_active IP Right Cessation
-
2001
- 2001-12-20 US US10/026,315 patent/US6863375B2/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56135075A (en) | 1980-03-26 | 1981-10-22 | Ricoh Co Ltd | Nozzle plate |
JPS6198558A (ja) * | 1984-10-15 | 1986-05-16 | エーテイーアンドテイー テレタイプ コーポレーシヨン | ノズル及びそのノズル構造を形成するプロセス |
JPH04125159A (ja) * | 1990-09-17 | 1992-04-24 | Sharp Corp | エッチング穴加工方法 |
JPH0550601A (ja) | 1990-09-21 | 1993-03-02 | Seiko Epson Corp | インクジエツト記録装置及びインクジエツトヘツドの製造方法 |
JPH0911479A (ja) * | 1995-06-30 | 1997-01-14 | Canon Inc | インクジェットヘッドの製造方法 |
JPH09300630A (ja) | 1996-05-15 | 1997-11-25 | Seiko Epson Corp | インクジェットヘッドの製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP0985534A1 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000073856A2 (en) * | 1999-06-01 | 2000-12-07 | Bmc Industries, Inc. | Pattern forming process comprising chemical machining and electrical discharge machining |
WO2000073856A3 (en) * | 1999-06-01 | 2001-07-19 | Bmc Ind Inc | Pattern forming process comprising chemical machining and electrical discharge machining |
EP1065059A3 (en) * | 1999-07-02 | 2001-10-04 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
US6569343B1 (en) | 1999-07-02 | 2003-05-27 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
EP1136270A3 (en) * | 2000-03-13 | 2002-03-20 | Seiko Epson Corporation | Ink-jet head and ink-jet printer |
US6419344B2 (en) | 2000-03-13 | 2002-07-16 | Seiko Epson Corporation | Ink-jet head and ink-jet printer |
US6402301B1 (en) | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
EP1453680A1 (en) * | 2001-12-11 | 2004-09-08 | Ricoh Company, Ltd. | Drop discharge head and method of producing the same |
EP1453680A4 (en) * | 2001-12-11 | 2007-10-24 | Ricoh Kk | DROP DISCHARGE HEAD AND METHOD FOR PRODUCING THE SAME |
Also Published As
Publication number | Publication date |
---|---|
EP0985534A4 (en) | 2001-03-28 |
US6863375B2 (en) | 2005-03-08 |
US6375858B1 (en) | 2002-04-23 |
KR20010012502A (ko) | 2001-02-15 |
KR100514711B1 (ko) | 2005-09-15 |
US20020056698A1 (en) | 2002-05-16 |
EP0985534A1 (en) | 2000-03-15 |
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