WO1998050773A3 - Microcantilever biosensor - Google Patents

Microcantilever biosensor Download PDF

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Publication number
WO1998050773A3
WO1998050773A3 PCT/US1998/009338 US9809338W WO9850773A3 WO 1998050773 A3 WO1998050773 A3 WO 1998050773A3 US 9809338 W US9809338 W US 9809338W WO 9850773 A3 WO9850773 A3 WO 9850773A3
Authority
WO
WIPO (PCT)
Prior art keywords
microbeam
biosensor
microcantilever
microcantilever biosensor
micrometer
Prior art date
Application number
PCT/US1998/009338
Other languages
French (fr)
Other versions
WO1998050773A2 (en
Inventor
Deborah H Charych
Ronald C Mcglennen
Dennis L Polla
Original Assignee
Univ Minnesota
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Minnesota filed Critical Univ Minnesota
Publication of WO1998050773A2 publication Critical patent/WO1998050773A2/en
Publication of WO1998050773A3 publication Critical patent/WO1998050773A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound

Abstract

A biosensor includes a cantilever microbeam which responds to a chemical stimulus, binding event or mass loading with an electrical output. The microbeam is formed using a series of microfabrication processes, in the micrometer to millimeter size range and using thin deposition of piezoelectric materials.
PCT/US1998/009338 1997-05-08 1998-05-07 Microcantilever biosensor WO1998050773A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US85275897A 1997-05-08 1997-05-08
US08/852,758 1997-05-08
US5422398A 1998-04-02 1998-04-02
US09/054,223 1998-04-02

Publications (2)

Publication Number Publication Date
WO1998050773A2 WO1998050773A2 (en) 1998-11-12
WO1998050773A3 true WO1998050773A3 (en) 1999-04-15

Family

ID=26732773

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/009338 WO1998050773A2 (en) 1997-05-08 1998-05-07 Microcantilever biosensor

Country Status (1)

Country Link
WO (1) WO1998050773A2 (en)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6682942B1 (en) 1998-07-14 2004-01-27 Zyomyx, Inc. Microdevices for screening biomolecules
US6576478B1 (en) * 1998-07-14 2003-06-10 Zyomyx, Inc. Microdevices for high-throughput screening of biomolecules
US6406921B1 (en) 1998-07-14 2002-06-18 Zyomyx, Incorporated Protein arrays for high-throughput screening
GB9819319D0 (en) * 1998-09-05 1998-10-28 Aea Technology Plc Assay of chemical binding
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
FR2795515B1 (en) * 1999-06-08 2004-02-20 Commissariat Energie Atomique MICRO-BALANCE CHEMICAL OR BIOLOGICAL ANALYSIS PLATFORM, ANALYSIS DEVICE AND METHOD USING THE PLATFORM
KR100517243B1 (en) 1999-11-03 2005-09-28 인터내셔널 비지네스 머신즈 코포레이션 Cantilever sensors and transducers
AU2001271400A1 (en) * 2000-06-23 2002-01-08 Bioelastics Research Ltd. Bioelastomer nanomachines and biosensors
GB2369436A (en) * 2000-07-28 2002-05-29 Marconi Applied Techn Ltd Chemical sensing micro-mechanical cantilever
JP2005504260A (en) 2000-08-09 2005-02-10 カリフォルニア インスティテュート オブ テクノロジー Active NEMS array for biochemical analysis
US7375321B2 (en) 2000-08-09 2008-05-20 California Institute Of Technology Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
DE60032772T2 (en) 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrated chemical microreactor with thermally insulated measuring electrodes and method for its production
EP1202046A1 (en) * 2000-10-25 2002-05-02 Abb Research Ltd. Method and apparatus for determining biological species
US8372139B2 (en) 2001-02-14 2013-02-12 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
DE10113254A1 (en) * 2001-03-19 2002-10-02 Infineon Technologies Ag Micromechanical sensor element and electrical circuit arrangement
US20030116552A1 (en) 2001-12-20 2003-06-26 Stmicroelectronics Inc. Heating element for microfluidic and micromechanical applications
EP1467948A1 (en) * 2002-01-24 2004-10-20 Cantion A/S A sensor
DE10209245B4 (en) 2002-03-04 2005-12-22 Concentris Gmbh Device and method for the detection of microorganisms
WO2003104784A1 (en) * 2002-06-07 2003-12-18 Cantion A/S A cantilever sensor with a current shield and a method for its production
JP4329322B2 (en) * 2002-10-04 2009-09-09 ソニー株式会社 INTERACTIVE ACTION DETECTION METHOD, BIO ASSAY DEVICE, AND BIO ASSY
US7344678B2 (en) 2002-11-15 2008-03-18 The Regents Of The University Of California Composite sensor membrane
DE10333972B4 (en) * 2003-07-25 2014-04-10 Robert Bosch Gmbh Method for producing a sensor for biochemical measurements
JP4247554B2 (en) 2003-07-30 2009-04-02 独立行政法人理化学研究所 Mechanochemical sensor
KR100613398B1 (en) * 2003-11-25 2006-08-17 한국과학기술연구원 Element detecting system using cantilever, method for fabrication of the same system and method for detecting micro element using the same system
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
DE602004030678D1 (en) 2004-07-19 2011-02-03 St Microelectronics Srl Device for the detection of biological molecules with increased detection speed and method for the rapid detection of biomolecules
DE102004046685B3 (en) * 2004-09-24 2006-06-29 Concentris Gmbh Measuring cell and method for liquid analysis
JP2006153831A (en) * 2004-10-27 2006-06-15 Mitsubishi Chemicals Corp Cantilever sensor, sensor system, and method for detecting substance to be detected in specimen liquid
WO2006076507A2 (en) * 2005-01-14 2006-07-20 Massachusetts Institute Of Technology Self-activated sensor
JP2006214744A (en) * 2005-02-01 2006-08-17 Gunma Univ Biosensor and biosensor chip
DE602006000724T2 (en) 2005-02-05 2009-04-23 Samsung Electronics Co., Ltd., Suwon Sensor switch and its use in a detection method
GB2432907A (en) * 2005-12-05 2007-06-06 Univ Basel Device for detecting the characteristics of organic molecules
CN101346627A (en) * 2005-12-23 2009-01-14 皇家飞利浦电子股份有限公司 Biosensor device
CN101371132B (en) * 2006-01-23 2013-05-01 德雷塞尔大学 Self-exciting, self-sensing piezoelectric cantilever sensor
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
US8286486B2 (en) 2006-05-10 2012-10-16 Drexel University Molecular control of surface coverage
JP5219014B2 (en) * 2006-10-24 2013-06-26 独立行政法人科学技術振興機構 Direct surface immobilization method of saccharide, method of detecting interaction between saccharide and protein
US8481335B2 (en) 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
WO2008067386A2 (en) 2006-11-28 2008-06-05 Drexel University Piezoelectric microcantilever sensors for biosensing
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
DE102007059977B4 (en) * 2006-12-12 2011-03-31 Concentris Gmbh Device for operating a micromechanical cantilever and measuring arrangement with such a cantilever
US7671511B2 (en) 2006-12-12 2010-03-02 Concentris Gmbh System for oscillating a micromechanical cantilever
AU2008223285A1 (en) 2007-02-01 2008-09-12 Drexel University A hand-held phase-shift detector for sensor applications
US8512947B2 (en) 2007-02-16 2013-08-20 Drexel University Detection of nucleic acids using a cantilever sensor
US7892759B2 (en) 2007-02-16 2011-02-22 Drexel University Enhanced sensitivity of a cantilever sensor via specific bindings
WO2009035732A2 (en) 2007-05-30 2009-03-19 Drexel University Detection and quantification of biomarkers via a piezoelectric cantilever sensor
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8236508B2 (en) 2008-01-29 2012-08-07 Drexel University Detecting and measuring live pathogens utilizing a mass detection device
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
EP2281192A4 (en) 2008-05-16 2014-02-05 Univ Drexel System and method for evaluating tissue
IT1392736B1 (en) * 2008-12-09 2012-03-16 St Microelectronics Rousset INTEGRATED TORSIONAL MICRO-BALANCE DEVICE IN MEMS TECHNOLOGY AND ITS MANUFACTURING PROCESS
US8722427B2 (en) 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US8479585B2 (en) 2010-09-08 2013-07-09 Micropen Technologies Corporation Pressure sensing or force generating device
US10266397B2 (en) 2014-08-13 2019-04-23 University Of South Carolina III-V nitride resonate structure based photoacoustic sensor
US10329396B2 (en) * 2015-07-14 2019-06-25 Nanosniff Technologies Pvt. Ltd. Process for immobilizing one or more receptor biomolecules on one or more solid surfaces
US20170089865A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Integrated Molecular Sensor System
DE102021107254A1 (en) 2021-03-23 2022-09-29 digid GmbH Digital sensor device for detecting an analyte in a sample

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789804A (en) * 1985-09-17 1988-12-06 Seiko Instruments & Electronics Ltd. Analytical device and method utilizing a piezoelectric crystal biosensor
US4906440A (en) * 1986-09-09 1990-03-06 The United States Of America As Represented By The Secretary Of The Air Force Sensor for detecting chemicals
US5209119A (en) * 1990-12-12 1993-05-11 Regents Of The University Of Minnesota Microdevice for sensing a force
WO1994005414A1 (en) * 1992-08-31 1994-03-17 The Regents Of The University Of California Microfabricated reactor
EP0657737A2 (en) * 1993-12-13 1995-06-14 Hewlett-Packard Company Method and reagents for binding chemical analytes to a substrate surface, and related analytical devices and diagnostic techniques
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5589136A (en) * 1995-06-20 1996-12-31 Regents Of The University Of California Silicon-based sleeve devices for chemical reactions
US5593838A (en) * 1994-11-10 1997-01-14 David Sarnoff Research Center, Inc. Partitioned microelectronic device array
US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789804A (en) * 1985-09-17 1988-12-06 Seiko Instruments & Electronics Ltd. Analytical device and method utilizing a piezoelectric crystal biosensor
US4906440A (en) * 1986-09-09 1990-03-06 The United States Of America As Represented By The Secretary Of The Air Force Sensor for detecting chemicals
US5209119A (en) * 1990-12-12 1993-05-11 Regents Of The University Of Minnesota Microdevice for sensing a force
WO1994005414A1 (en) * 1992-08-31 1994-03-17 The Regents Of The University Of California Microfabricated reactor
US5674742A (en) * 1992-08-31 1997-10-07 The Regents Of The University Of California Microfabricated reactor
EP0657737A2 (en) * 1993-12-13 1995-06-14 Hewlett-Packard Company Method and reagents for binding chemical analytes to a substrate surface, and related analytical devices and diagnostic techniques
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5593838A (en) * 1994-11-10 1997-01-14 David Sarnoff Research Center, Inc. Partitioned microelectronic device array
US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor
US5589136A (en) * 1995-06-20 1996-12-31 Regents Of The University Of California Silicon-based sleeve devices for chemical reactions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MIHAILOVIC R.E. ET AL: "Measurement of the elastic stress of thin films deposited on gallium arsenide", J.VAC.SCI.TECHNOL.A., vol. 14, no. 4, 1996, US, pages 2483 - 2487, XP002091883 *

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