WO1998050773A2 - Microcantilever biosensor - Google Patents
Microcantilever biosensor Download PDFInfo
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- WO1998050773A2 WO1998050773A2 PCT/US1998/009338 US9809338W WO9850773A2 WO 1998050773 A2 WO1998050773 A2 WO 1998050773A2 US 9809338 W US9809338 W US 9809338W WO 9850773 A2 WO9850773 A2 WO 9850773A2
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- Prior art keywords
- microbeam
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- chemical
- response
- cantilever
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
Definitions
- the present invention relates to the field of biosensors. More particularly, the present invention is a biosensor formed using MEMS technology.
- MEMS microelectromechanical
- the most significant costs are the so-called front-end which include specimen procurement and nucleic acid extraction.
- collection of blood from the patient is an invasive procedure which requires a trained medical technician.
- Large specimen sizes are convenient for manual processing, but necessitate a large scale nucleic acid extractions which use costly reagents.
- first generation automated DNA extractors have been available, these instruments use large quantities of toxic chemicals and are not applicable to small specimens.
- the test set-up namely the assembly of the chemical reactions involved in the DNA amplification procedure, are typically done manually.
- MEMS Microelectromechanical systems
- MEMS refers to the output of microfabricated devices including those for uses ranging from automotive parts to the airline industry.
- MEMS have a particular usefulness in biological applications due to their requirement for small sample sizes, low energy, and nominal forces.
- the increased efficiency of MEMS-based instruments has yet to be realized commercially in biomedical applications, where the need for economy in manufacture, ease of operation, reduction of consumables and the mobilization of the laboratory operation to point-of-care testing are evident.
- the biosensor of the present invention substantially meets the aforementioned needs of the industry.
- the biosensor of the present invention includes two piezoelectric cantilever microbeam structures.
- the first structure consists of a polygonal cantilever microbeam fabricated from a suitable structural support material such as silicon, silicon nitride, aluminum, or polycrystalline silicon. This structure forms a platform onto which a piezoelectric capacitor is fabricated.
- the piezoelectric capacitor is comprised of an upper an lower electrode surrounding a piezoelectric or ferroelectric thin film.
- the top electrode is covered with an encapsulation layer to electrically isolate the active electrode surfaces of the piezoelectric capacitor.
- the present invention is a cantilever microbeam which responds to a chemical stimulus, binding event or mass loading with an electrical output.
- Figs, la and lb through 9a and 9b are fabrication steps of the microcantilever biosensor of the present invention, with the figures designated a taken along the section line in the corresponding b figure in each case, as the line la - la in figure lb.
- Fig. 10 is the biosensor of Fig. 1 including metallic gold or additional layers of polymers such as polydiacetylene intercalate the receptors for binding the specific ligand.
- Figs 11a and lib are top and side elevational views of an alternative preferred embodiment of the microcantilever biosensor.
- Fig. 12a is a biosensor in a relaxed state.
- Fig. 12b is a biosensor in a stressed bound state.
- the present invention relates to a method and device for the detection of inorganic and inorganic chemical reactions, (including biochemical and the interaction between microparticulate and their cognate receptors), based on the detection of spontaneous charge produced in a piezoelectric ceramic (either thin film of bulk crystal) formed in a suitable geometry to take advantage of either or both mass loading or chemically-induced mechanical stress transduction.
- This device consists of a miniature cantilever suspended in a manner such as a microbeam diving board fabricated with a piezoelectric stress-sensitive crystal, laminated between several materials or on its surface, coupled with an appropriate molecular recognition surface constructed of a thin film containing multiple chemical reaction sites onto which an exposed chemical, biochemical, antigen, or particulate binds or sticks.
- the binding or sticking effect produces a change in mass or induces a stress in the composite materials comprising the cantilever.
- a desirable attribute of this device is its specificity to only respond to the single external variable in which it has been designed. Upon binding, the increased mass of the cantilever may cause a change in the mechanical or electrical properties of the free-standing beam.
- One example is an increase in mass which alters the mechanical resonant frequency of the beam. Another effect is the change in the beam's vibrational amplitude when subjected to a loading force, whether through the specific intermolecular binding or in the context of adding a known force.
- the second example is a deflection of the beam due to a mechanical stress, resulting from interactions on the surface of the beam and transduced throughout the beam, to affect an overall physical deformation. Consequently, a charge is produced from this stress-induced deflection, which in turn produces a quantifiable electrical signal, confirming the chemical or physical binding event.
- the microcantilever biosensor of the present invention is shown generally at 10 in the figures.
- a fabrication sequence of the microcantilever biosensor 10 is depicted.
- a trench 14 is etched in a silicon substrate 12.
- the trench 14 is preferably rectangular in shape and etched in the upper surface of the silicon substrate 12.
- a layer of doped poly-silicon 16 is deposited in the trench 14 and then planerized to be flush with the upper surface of the silicon substrate 12.
- a layer of low stress LPCBD nitride 18 is deposited on the upper surface of the silicon substrate 12.
- the LPCBD nitride 18 is depicted overlying the trench 14, depicted in phantom.
- a bottom electrode 20, a PZT layer 22, and a top electrode 24 are deposited and patterned on the upper surface of the LPCBD nitride layer 18.
- a layer of PECBD nitride is deposited over the full upper surface of the sensor 10. The PECBD nitride is patterned at 28 to provide electrode access to the bottom electrode 20 and the top electrode 24. The PECBD nitride layer is utilized to prevent shorting between the bottom electrode 20 and the top electrode 24.
- Figures 6A and 6B depict the deposition and patterning of silver /chromium bonding pads for the bottom electrode 20 and the top electrode 24, the bottom bonding pad 30 is allowed to fill the pattern 28 to provide an electrical path to the bottom electrode 20.
- the top bonding pad 32 fills the pattern 28 to provide an electrical path to the top electrode 24.
- a PECBD nitride encapsulation layer 34 is deposited over the entire upper surface of the sensor 10. After deposition of the PECBD nitride encapsulation layer 34, a three sided parameter trench 36 is patterned in the PECBD nitride encapsulation layer 34. The trench 36 extends downward to intersect the doped poly-silicon 16 deposited in the trench 14.
- a deep well etch is performed on the sensor
- This etching is performed on the doped poly-silicon 16 that is exposed by the perimeter trench 36.
- the etching extends to the entire layer of doped poly-silicon 16 that is formed in the trench 14.
- a cantilever beam 38 is left extended over the exposed trench 14.
- the cantilever beam 38 is supported at support point 40 and is unsupported on the opposed end in the two opposed sides of the cantilever beam 38 as defined by the parameter trench 36.
- the final step in the formation of the microcantilever biosensor 10 is depicted in Figures 9 A and 9B.
- the final step is the removal of the
- PECBD nitride encapsulation layer 34 Such removal exposes the bottom bonding pad 30 and the top bonding pad 32 for electrical connection to the cantilever beam 38.
- Figure 10 is a diagrammatic representation of the cantilever beam 38 formed as depicted in Figures 1-9. In addition to the cantilever beam 38 as previously described, various surfaces which serve to immobilize the molecular recognition surface 42 are depicted. Metallic gold 44 or, alternatively, additional layers of polymers such as polydiacetylene intercalate the receptors 46 for binding the specific ligand 48.
- the sensor 10 is that of a silicon based microcantilever beam 38, freely suspended above the underlying substrate 12 through a fulcrum or root 40 which is electrically isolated.
- the beam structure 38 itself preferably has varying dimensions but ranging from 50 to 1500 ⁇ m in length, and widths ranging from 50 to 350 ⁇ m.
- Overlying the silicon nitride beam 38 are a series of laminations comprised of a bottom electrode 20, an electrical insulating layer, a thin film of ferroelectric material such as lead zirconite titanate (PZT) 22, a second insulating layer, a top electrode 24, and ultimately a biomolecular recognition surface 42.
- PZT lead zirconite titanate
- aspects of this described sensor 10 include processing of the microbeam structure through a process which includes encapsulation with polysilicon glass (PSG) 34 followed by release of a beam structure 38 by wet chemical etching resulting in a free standing beam structure 38 overlying an electrically insulated silicon substrate 12.
- PSG polysilicon glass
- FIG. 11A and 11B An alternative embodiment of the microcantilever biosensor 10 is depicted in Figures 11A and 11B.
- the structure is comprised of two electrodes, top electrode 50 and bottom electrode 52.
- Either electrode 50 or 52 is capable of harboring the molecular recognition surface 42.
- the molecular recognition surface 42 is deposited on the top electrode 50.
- the arrow A of Figure 11B indicates the movement of the deflected beam 54. This deflection is the result of either mass loading such as from a ligand 48, depicted in Figure 10, or stress induced transduction of the beam 54 through the immobilized recognition surface 42.
- FIG. 12A and 12B the effective change in confirmation of the polymer polydiacetylene, intercalated with a biomolecular receptor molecule is depicted.
- the change in the shape of the recognition surface 42 induces a stress into the underlying microbeam structure 38 causing the microbeam structure 38 to flex.
- the flexure of the beam 38 transduces force to the PZT layer 22 of the beam 38 thereby creating an electrical charge.
- a portion (typically the surface of the top electrode 24) of the cantilever 38 is further coated with a molecular recognition coating such as metallic gold 44, or, alternatively, polymeric materials, organic layer, or fractionated biomolecular materials, onto which the desired analyte will bind.
- This molecular recognition surface 42 defines the region where the chemical reaction or the biochemical or microparticulate sensing occurs.
- the prescribed chemical, biochemical, cellular antigen, or particulate 48 to be sensed as a function of the incremental change in mass loading on the cantilever beam 38, changes which alter its resonant frequency and /or amplitude of vibration and /or mechanically deflects the beam 38 when subjected to a input mechanical or electrical stimulus.
- the physical principle upon which the sensor 10 operates relies on the change in the dielectric constant of the piezoelectric material 22 consequent to the mass loading at the end of or on the surface of the cantilever microbeam 38.
- a second related structure is based on the incorporation of an additional thin film of a chimeric organic material 42 such as polymer, polydiacetylene, which contains a specific biomolecular receptor 46 intercalated into the lattice structure of the polymer 42.
- This molecular recognition material 42 undergoes a conformational change (shape change through relative shrinking or expansion) eliciting a mechanical strain specifically when the cognate molecule (ligand 48) binds to the embedded biomolecular receptor (Figure 12b).
- this strain-sensitive thin film 42 is attached to the composite microbeam structure 38 described in the previous paragraph, the binding induced strain is transduced to the piezoelectric 22 thin film coated microbeam structure 38 which spontaneously generates a charge due to the deformation of beam 38.
- This detection mode therefore shows momentary piezoelectric charge induction (or voltage) response due to a specific chemical reaction.
- a feature of the above invention is the use of integrated circuit processing methods to realize small biochemical detectors which can be manufactured in large batch quantities with the feasibility on on-chip electronics for most efficient electrical detection.
- the molecular recognition microcantilever device 10 therefore incorporates materials common to the production of both integrated circuits and piezoelectric sensors.
- the molecular recognition microcantilever 10 furthermore is realized using standard manufacturing methods based on thin film deposition, photolithography, chemical etching, and packaging.
- the described invention embodies a microcantilever structure which is design in both a two electrode as a well as a four electrode device.
- the two electrode system involves a single layer of ferroelectric material electrically connected to leads and bonding pads. In this configuration, the ferroelectric material serves both as means of physical actuating the beam, as well as a source of force sensation.
- a second configuration involves a series of two ferroelectric elements, the first a driving element which is connected to a series of two electrodes and bonding pads. The second element, a sensing element is derived from a similar ferroelectric material connected to a distinct and separate set of two electrodes and bonding pads.
- a third configuration of the invention includes a series of three or more microbeam structures which are each electrically isolated from the other, but share a common electrical ground.
- the embodiment of the invention involves the creation of a unique biomolecular recognition surface.
- the cantilever beam structure responds to a force loading event such as a chemical binding reaction, through the deformation of the beam structure from its unloaded state, and resulting in an output of electrical charge.
- a force loading event such as a chemical binding reaction
- This phenomenon is accomplished through the effects of static mass loading of the microbeam structure consequent to the force event.
- a second configuration of biomolecular sensing is accomplished through the same structure, however, in this setting the beam is actuated at its mechanical resonance or at its electrical resonance.
- actuation of the structure to its resonance is achieved by the input of an applied voltage.
- the amplitude of the output voltage as measured through the output electrode is markedly increased as compared to the voltage at nonresonant frequencies. It is at this frequency (frequency range) that the beam structure can be deemed to be most efficient in its capacity to sense masses bound to it's surface.
- the overall mass of the beam structure is increased, resulting in a change in the intrinsic resonance frequency of oscillation.
- the characteristic increase in output voltage at the new resonant frequency is proportional to the mass loaded to the microbeam structure.
- these biomolecular microcantilever sensors can operate in both a fluid as well as a gaseous environment.
- the cantilever sensor In the case of sensing a mass loading in a fluid environment, the cantilever sensor is submerged in a prescribed volume of fluid confined by a fluid cell which surrounds the sensing element.
- a reference sensor which lacks the biomolecular recognition surface, is subjected to the same fluid environment, defines the baseline or index resonant frequency of the beam structure(s) in the fluid submerged state.
- a second sensor (test sensor) containing the specific biomolecular recognition surface is oscillated in a same fluid environment, is permitted to react with the cognate analyte, through a mass loading event. The consequent resonant frequency of the test is measured.
- the measurement of quantity of specific binding is determined as the difference from the reference frequency and the resonant frequency of the bound sensor.
- bioanalyte or chemical interaction of the test sensor in the gaseous state is achieved in a similar manner, namely as the difference of the resonant frequency of the reference sensor minus the resonant frequency of the bound (test sensor).
- monomeric film coatings are deposited onto the gold surface 44 through the combining of their bifunctional reactive groups wherein one end of the molecule serves as an anchoring group to the elemental gold.
- the surface anchoring group may be selected from a large group of active chemical moeties including thiols, disulfides, trichlorosilanes, trialkoxysilanes, trialcohol and amines.
- receptor 46 Central to the creation of the molecular recognition surface is the inclusion of a specific (receptor 46) which serves as the specific binding molecule for the analyte of interest.
- receptors 46 can include a large series of organic molecules such as biotin, avidin, proteins, antibodies, carbohydrates, nucleic acids, natural or synthetic drugs, other types of antigens, chelating compounds or combinations thereof. These receptors 46 have a known or unknown affinity for the analyte of interest.
- the monomeric films which are anchored to the elemental gold surface 44 through one of their active functional groups also serve to bind the receptor molecules 46 through the second active chemical group.
- the anchoring of the receptor molecules 46 through the second active group can be achieved through a number of common chemical processes including reactions with amines, carboxylic acids, thiols, succinicanhydrides, alcohols, maleic anhydrides or combinations thereof. Additionally, these active groups which bind and anchor the receptor molecules 46 can be reacted to the monomeric films before or after anchoring of these films to the elemental gold surface 44. Additionally, chemical conversion as well as blocking reactions can be accomplished through processes that occur prior to or after anchoring of these monomeric films to the microbeam structure 38.
- a further embodiment of the molecular recognition surface 42 involves polymeric film coatings.
- the use of polymeric film coatings provide an alternative mechanism of force transduction achieved through mass loading to the underlying beam structure.
- the creation of force in this case, is mitigated by the change in conformational structure of these polymeric films which are chemically adsorbed to the elemental gold 44 in an irreversible manner.
- the change in conformational structure of these polymers is associated with a quantifiable force and or stress which is efficiently transduced to the underlying beam structure 38.
- the transduction of these forces to the beam structure 38 results in the mechanical deformation of the beam 38, alteration of the crystalline lattice of the ferroelectric PZT material 22, and hence the creation of electric charge.
- polymeric films are also bifunctional wherein one region of these polymers comprises a surface adhesive functionality and the other portion comprises a molecular recognition for the receptor molecule.
- the surface adhesive characteristic of these various polymers is mitigated through reactive chemical groups including thiols, disulfides, trichlorocylines, trialcheoloxilines, triolsilanes, and amines.
- the molecular recognition group, or receptor may be comprised of specific functional molecules including peptides, proteins, nucleic acids, drugs, antigens, chelating compounds, carbohydrates, complex sugars, gangliosides, sialic acid or combinations thereof. These receptors have known or unknown affinities for their cognate analytes.
- the combination of these receptors and polymeric thin films can occur before or after their deposition onto the microbeam structure, and may be mitigated through a serves of reactive groups including amines, carboxylic acids, thiols, succinicanhydrides, maleic anhydrides, alcohols or combinations thereof.
- Chemical conversion of these reactive groups similar to the case of monomeric thin films, may occur before or after deposition onto the microbeam structure and involves such reactions as gluteraldehyde coupling, disulfide formation, N-hydroxysuccinimide coupling, amide bond formation, protein A binding or other methods.
- polymeric film coatings examples include compounds such as polyethyl ⁇ namine, amino-polyethylene-glycol (amino-PEG), nucleophylic
- PEGs such as amino acid esters of PEG, thiol or disulfide PEG,
- PEG-succinate carboxyl PEGs
- NHSactive esters of PEG or PEG-glycidyl ether epoxide
- this microelectromechanical sensor 10 includes the integration of on-chip circuitry which serves to amplify the outgoing charge produced by the deformation of the ferroelectric PZT films 22.
Abstract
Description
Claims
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US85275897A | 1997-05-08 | 1997-05-08 | |
US08/852,758 | 1997-05-08 | ||
US5422398A | 1998-04-02 | 1998-04-02 | |
US09/054,223 | 1998-04-02 |
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