WO1998044330A3 - Optical inspection module and method for detecting particles and defects on substrates in integrated process tools - Google Patents

Optical inspection module and method for detecting particles and defects on substrates in integrated process tools Download PDF

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Publication number
WO1998044330A3
WO1998044330A3 PCT/US1998/006222 US9806222W WO9844330A3 WO 1998044330 A3 WO1998044330 A3 WO 1998044330A3 US 9806222 W US9806222 W US 9806222W WO 9844330 A3 WO9844330 A3 WO 9844330A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
defects
optical inspection
inspection module
substrates
Prior art date
Application number
PCT/US1998/006222
Other languages
French (fr)
Other versions
WO1998044330A2 (en
Inventor
Patrick D Kinney
Nagaraja P Rao
Original Assignee
Microtherm Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtherm Llc filed Critical Microtherm Llc
Priority to KR1019997008951A priority Critical patent/KR100540314B1/en
Priority to AU69429/98A priority patent/AU6942998A/en
Priority to EP98915184.0A priority patent/EP1016126B1/en
Priority to JP54189498A priority patent/JP4527205B2/en
Publication of WO1998044330A2 publication Critical patent/WO1998044330A2/en
Publication of WO1998044330A3 publication Critical patent/WO1998044330A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

Abstract

An optical inspection module (10, 299, 408) detects defects on a substrate (28, 222, 310, 414) and includes a light beam path (38) which extends from a light source (14, 300) to a substrate holder (18, 220, 312) and has a grazing angle of incidence (44) with respect to the substrate (28, 222, 310, 414). The light beam path (38) illuminates substantially the entire substrate. A lens (60) is oriented to collect non-specularly reflected light scattered from the light beam path (38) by any defects on the substrate. A photodetector array (62) has a plurality of pixels which correspond to respective areas on the substrate. The plurality of pixels together form a field of view (66) that covers substantially the entire substrate.
PCT/US1998/006222 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools WO1998044330A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019997008951A KR100540314B1 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
AU69429/98A AU6942998A (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
EP98915184.0A EP1016126B1 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
JP54189498A JP4527205B2 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on a substrate in an integrated process tool

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4220297P 1997-03-31 1997-03-31
US60/042,202 1997-03-31

Publications (2)

Publication Number Publication Date
WO1998044330A2 WO1998044330A2 (en) 1998-10-08
WO1998044330A3 true WO1998044330A3 (en) 1998-12-23

Family

ID=21920611

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/006222 WO1998044330A2 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

Country Status (6)

Country Link
US (1) US5909276A (en)
EP (1) EP1016126B1 (en)
JP (1) JP4527205B2 (en)
KR (1) KR100540314B1 (en)
AU (1) AU6942998A (en)
WO (1) WO1998044330A2 (en)

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Also Published As

Publication number Publication date
US5909276A (en) 1999-06-01
WO1998044330A2 (en) 1998-10-08
JP4527205B2 (en) 2010-08-18
AU6942998A (en) 1998-10-22
KR20010005875A (en) 2001-01-15
KR100540314B1 (en) 2006-01-10
EP1016126A4 (en) 2009-04-01
JP2001519021A (en) 2001-10-16
EP1016126B1 (en) 2018-12-26
EP1016126A2 (en) 2000-07-05

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