WO1998033077A3 - Coatings, methods and apparatus for reducing reflection from optical substrates - Google Patents

Coatings, methods and apparatus for reducing reflection from optical substrates Download PDF

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Publication number
WO1998033077A3
WO1998033077A3 PCT/US1997/023231 US9723231W WO9833077A3 WO 1998033077 A3 WO1998033077 A3 WO 1998033077A3 US 9723231 W US9723231 W US 9723231W WO 9833077 A3 WO9833077 A3 WO 9833077A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating
coatings
reflection
multilayers
optical substrates
Prior art date
Application number
PCT/US1997/023231
Other languages
French (fr)
Other versions
WO1998033077A2 (en
Inventor
Peter D Haaland
B Vincent Mckoy
Original Assignee
Peter D Haaland
B Vincent Mckoy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CA002279425A priority Critical patent/CA2279425A1/en
Priority to BR9714213-1A priority patent/BR9714213A/en
Priority to JP53196798A priority patent/JP2001509910A/en
Priority to EP97952479A priority patent/EP1012635B1/en
Priority to IL13109097A priority patent/IL131090A/en
Priority to KR10-1999-7006783A priority patent/KR100495338B1/en
Application filed by Peter D Haaland, B Vincent Mckoy filed Critical Peter D Haaland
Priority to DE69735727T priority patent/DE69735727T2/en
Priority to AU56075/98A priority patent/AU733162B2/en
Priority to IL15379497A priority patent/IL153794A0/en
Publication of WO1998033077A2 publication Critical patent/WO1998033077A2/en
Publication of WO1998033077A3 publication Critical patent/WO1998033077A3/en
Priority to HK00104414A priority patent/HK1025152A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C03C17/256—Coating containing TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C03C17/328—Polyolefins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/681—Motion detection
    • H04N23/6812—Motion detection based on additional sensors, e.g. acceleration sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/681—Motion detection
    • H04N23/6815—Motion detection by distinguishing pan or tilt from motion
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682—Vibration or motion blur correction
    • H04N23/684—Vibration or motion blur correction performed by controlling the image sensor readout, e.g. by controlling the integration time
    • H04N23/6845—Vibration or motion blur correction performed by controlling the image sensor readout, e.g. by controlling the integration time by combination of a plurality of images sequentially taken
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/14—Picture signal circuitry for video frequency region
    • H04N5/144—Movement detection
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd

Abstract

A method of coating optical substrates with anti-reflection (AR) coatings is described. The thickness and composition of the coating is determined by minimizing the product of the Fresnel reflection coefficients for a coating with the angular- and wavelength-dependent sensitivity of the human visual system to minimize the perceived reflectance for the coated article. A compact chamber is evacuated and flushed with chemically inert gas such as argon or nitrogen. One or more molecular precursors are deposited using plasma enhanced chemical vapor deposition (PECVD) to form AR films. Single-layer AR coatings based on fluoropolymer films of controlled thickness, as well as organic, organosilicon, and/or inorganic multilayers are described. Also provided is a method for monitoring film growth optically, using a polarized, light-emitting diode, a polarizing optical filter, and a photodiode. Feedback from the monitor is used to control the precursor flow to produce single layers and multilayers with prescribed anti-reflection properties.
PCT/US1997/023231 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates WO1998033077A2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
BR9714213-1A BR9714213A (en) 1997-01-27 1997-12-12 Coatings, processes and apparatus to reduce the reflection of optical substrates.
JP53196798A JP2001509910A (en) 1997-01-27 1997-12-12 Coating, method and apparatus for suppressing reflection from optical substrate
EP97952479A EP1012635B1 (en) 1997-01-27 1997-12-12 Methods for reducing reflection from optical substrates
IL13109097A IL131090A (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates
KR10-1999-7006783A KR100495338B1 (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates
CA002279425A CA2279425A1 (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates
DE69735727T DE69735727T2 (en) 1997-01-27 1997-12-12 PROCESS FOR REDUCING THE REFLECTION OF OPTICAL SUBSTRATES
AU56075/98A AU733162B2 (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates
IL15379497A IL153794A0 (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates
HK00104414A HK1025152A1 (en) 1997-01-27 2000-07-19 Coatings, methods and apparatus for reducing reflection from optical substrates

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3723997P 1997-01-27 1997-01-27
US60/037,239 1997-01-27

Publications (2)

Publication Number Publication Date
WO1998033077A2 WO1998033077A2 (en) 1998-07-30
WO1998033077A3 true WO1998033077A3 (en) 1998-09-11

Family

ID=21893233

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/023231 WO1998033077A2 (en) 1997-01-27 1997-12-12 Coatings, methods and apparatus for reducing reflection from optical substrates

Country Status (15)

Country Link
US (4) US6096371A (en)
EP (1) EP1012635B1 (en)
JP (1) JP2001509910A (en)
KR (1) KR100495338B1 (en)
CN (1) CN1131441C (en)
AU (1) AU733162B2 (en)
BR (1) BR9714213A (en)
CA (1) CA2279425A1 (en)
DE (1) DE69735727T2 (en)
ES (1) ES2263184T3 (en)
HK (1) HK1025152A1 (en)
IL (1) IL131090A (en)
RU (1) RU2204153C2 (en)
TW (2) TW400437B (en)
WO (1) WO1998033077A2 (en)

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