WO1997044686A2 - Active wavelength selection with resonant devices - Google Patents

Active wavelength selection with resonant devices Download PDF

Info

Publication number
WO1997044686A2
WO1997044686A2 PCT/IL1997/000151 IL9700151W WO9744686A2 WO 1997044686 A2 WO1997044686 A2 WO 1997044686A2 IL 9700151 W IL9700151 W IL 9700151W WO 9744686 A2 WO9744686 A2 WO 9744686A2
Authority
WO
WIPO (PCT)
Prior art keywords
electro
optical element
planar waveguide
optically
light transmissive
Prior art date
Application number
PCT/IL1997/000151
Other languages
French (fr)
Other versions
WO1997044686A3 (en
Inventor
Asher A. Friesem
Avner Zvi Sharon
Original Assignee
Yeda Research And Development Co. Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yeda Research And Development Co. Ltd. filed Critical Yeda Research And Development Co. Ltd.
Priority to EP97918328A priority Critical patent/EP0898799B1/en
Priority to DE69737855T priority patent/DE69737855T2/en
Priority to JP54195497A priority patent/JP3527513B2/en
Priority to US09/180,201 priority patent/US6215928B1/en
Priority to IL12681797A priority patent/IL126817A/en
Publication of WO1997044686A2 publication Critical patent/WO1997044686A2/en
Publication of WO1997044686A3 publication Critical patent/WO1997044686A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1326—Liquid crystal optical waveguides or liquid crystal cells specially adapted for gating or modulating between optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
    • G02F2201/305—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating diffraction grating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/05—Function characteristic wavelength dependent
    • G02F2203/055—Function characteristic wavelength dependent wavelength filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H01S5/0285—Coatings with a controllable reflectivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon

Definitions

  • the present invention relates to electro-optically controlled optical elements generally and also to electro-optical assemblies including such elements.
  • the present invention seeks to provide electro-optically controlled optical elements having a significantly greater dynamic range than is known from the prior art.
  • an electro-optically controlled optical element including a diffraction grating and a planar waveguide associated with the diffraction grating, the diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
  • the planar waveguide may include multiple layers having differing indices of refraction.
  • the element may have at least one light transmissive surface generally parallel to the planar waveguide and including an anti-reflection coating formed on at least one light transmissive surface.
  • a laser including a laser cavity, an active tunable mirror and an output coupler defining the laser cavity
  • the active tunable mirror includes an electro-optically controlled optical element including: a diffraction grating; and a planar waveguide associated with the diffraction grating, the diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
  • an electro-optically tunable laser which is tunable over a dynamic range of more than 0.1 nanometer, preferably more than 1 nanometer and even more preferably several tens of nanometers.
  • the optical element may function as an electro-optical tunable filter.
  • the electro-optically controlled optical element also includes a planar waveguide whose index of refraction is controlled by the electrical input.
  • the electro-optically controlled optical element also includes a light transmissive medium whose index of refraction is controlled by the electrical input.
  • the light transmissive material may be a liquid crystal material.
  • the electro-optically controlled optical element also includes transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
  • the electro-optically controlled optical element also includes transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
  • the diffraction grating and the planar waveguide are formed of semiconductor materials.
  • the planar waveguide whose index of refraction is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across the planar waveguide.
  • the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across the light transmissive medium.
  • the planar waveguide has an index of refraction which is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
  • the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
  • At least one of the diffraction grating and the planar waveguide are formed of a polymeric material having a range of selectable indices of refraction which is relatively wide.
  • the planar waveguide has an index of refraction which is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
  • the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
  • Fig. 1 is a simplified block diagram illustration of an electro-optically tunable laser constructed and operative in accordance with a preferred embodiment of the present invention
  • Fig. 2 is a simplified illustration of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention
  • Fig. 3 is a simplified illustration of a preferred embodiment of an electro- optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing semiconductor materials;
  • Fig. 4 is a simplified illustration of another preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing liquid crystal material;
  • Fig. 5 is a simplified block diagram illustration of an active tunable filter constructed and operative in accordance with a preferred embodiment of the present invention.
  • Fig. 1 is a simplified block diagram illustration of an electro-optically tunable laser constructed and operative in accordance with a preferred embodiment of the present invention.
  • the laser of Fig. 1 preferably includes a laser cavity 10 having a tunable lasing spectrum.
  • the laser cavity is defined at one end thereof by an electrically controllable active tunable mirror 12, which is preferably a resonant grating waveguide device constructed and operative in accordance with a preferred embodiment of the present invention.
  • the opposite end of laser cavity 10 is preferably defined by an output coupler 14, such as a laser mirror.
  • the laser of Fig. 1 is operative to output a laser beam of wavelength ( ⁇ k ) in response to the supply of a corresponding voltage V k to the active tunable mirror 12.
  • Fig. 2 is a simplified illustration of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 2 has many other potential uses, such as an active tunable filter. As an active filter, the optical element reflects only a selected resonance wavelength from among many wavelengths impinging thereon.
  • the optical element of Fig. 2 comprises a substrate 20, which typically is formed of a dielectric, transparent crystal, polymer or semiconductor material.
  • a waveguide 22 is formed onto the substrate 20.
  • the waveguide may be a single or multiple layer waveguide and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer, liquid crystal or semiconductor material.
  • n the refractive index of air and ni is the refractive index of the various layers of the electro-optically controlled optical element, where the index i defines the i-th layer of the device. Additionally, t. is the thickness of the i-th layer of the device, h is the height of the grating and ⁇ is the period of the grating.
  • Waveguide 22 may be a single mode or multiple mode waveguide. It may operate on TE or TM polarization. Where a multiple mode waveguide is provided, one mode may operate on TE or TM polarization and the remaining mode or modes may operate on the other polarization.
  • the optical element may operate at wavelengths extending from the far UV to the far IR. The structural parameters of the optical element are determined by the wavelength at which the optical element is sought to operate.
  • a diffraction grating 24 is formed over the waveguide 22.
  • the diffraction grating 24 may be formed of the same material as the waveguide 22 or of another material and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material. Although the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case.
  • the cladding is formed of a material different from that of the diffraction grating and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • an anti-reflection coating 29 may be formed on the opposite surface of substrate 20 from waveguide 22 on the opposite surface of substrate 20 from waveguide 22.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • At least two transparent conductors 30 are provided intermediate selected layers of the optical element of Fig. 2.
  • transparent conductors may be located at locations A and B, on opposite surfaces of the substrate.
  • the transparent conductors may be located at locations A and C, location C being intermediate the waveguide 22 and the grating 24.
  • the transparent conductors may be located at locations A and D, location D being intermediate the grating 24 and the cladding 26.
  • the transparent conductors may be located at locations A and E, location E being intermediate the cladding 26 and the optional anti-reflection coating 28.
  • transparent conductors may be located at locations B and C, B and D, and B and E or at location C and E.
  • a voltage or current source V k is coupled across the two transparent conductors.
  • An incident light beam 40 such as a plane wave, having a predetermined wavelength ( ⁇ o) impinges on the optical element as indicated generally in Fig. 2. It is appreciated that it may impinge on the optical element from either side of the substrate.
  • the impingement is preferably substantially pe ⁇ endicular to the surfaces of the substrate 20 and the waveguide 22.
  • the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the pe ⁇ endicular.
  • the operation of the optical element of Fig. 2 may be summarized as follows: Light of a predetermined wavelength impinging on the optical element at a predetermined angle is substantially reflected by the optical element, which is at resonance for this particular wavelength. Light of other than the predetermined wavelength or which impinges at other than the predetermined angle is mainly transmitted through the optical element in the direction of impingement.
  • the spectral behavior at wavelengths near the predetermined wavelength and at angles near the predetermined angle is generally Lorentzian.
  • the spectral bandwidth, ⁇ , of the optical element for transmission or reflection may be approximated as being proportionally related to the height of the diffraction grating and the difference between the refractive indices of the grating, n;, and the cladding, n k , by:
  • k is the first Fourier component of the grating; and h is the height of the grating.
  • indices "a"; "b”; and “c”, generally have the value of 2.
  • the spectral bandwidth can be selected to preferably be between the values of 0.01 nanometers to 1.0 nanometer.
  • the height of the diffraction grating and the difference in the indices of refraction between the grating and the cladding are the variables which are conveniently selected to choose the desired spectral bandwidth.
  • the mechanism which produces the above-described behavior can be summarized as follows: Light impinging on the optical element is partially diffracted into a mode in the waveguide for travel therealong and is diffracted out of the waveguide at intermittent locations along the waveguide. At resonance, the sum of the light diffracted out of the waveguide into the incident beam direction is substantially equal to zero, while the sum of the light diffracted out of the waveguide in the zero order direction of reflection with respect to the incident beam direction is substantially equal to unity. Substantially total reflection of the incident beam results.
  • the sum of the light diffracted out of the waveguide into the incident beam direction is substantially equal to unity less the usual Fresnel reflection, while the sum of the light diffracted out of the waveguide in the zero order direction of reflection with respect to the incident beam direction is substantially equal to the usual Fresnel reflection.
  • the lasing wavelength of the laser is determined by the active tunable mirror to be the resonance wavelength of the mirror. All other wavelengths suffer from strong losses due to their small amount of reflection, and thus do not lase.
  • the electro-optically controlled element When the electro-optically controlled element is working as an active tunable filter, only the light incident on the device at a wavelength which is the device resonant wavelength is selected by reflecting back from the device. All other incident wavelengths are generally transmitted through the device.
  • the resonant wavelength of the optical element of Fig. 2 and of the remaining optical elements described hereinbelow is selected by supplying to the optical element a suitably selected electrical voltage or current.
  • the suitably selected voltage or current is operative to the index of refraction of one or more layers by means of, for example, the linear electro-optic effect (Pockels), the quadratic electro-optic effect, the plasma effect in semiconductors, the band-filling effect in semiconductors or current injection.
  • the resonant wavelength may be shifted by varying the voltage or current supplied to the element.
  • Fig. 3 is a simplified illustration of a preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing semiconductor materials and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 3 has many other potential uses, such as a active tunable filter.
  • the optical element of Fig. 3 comprises a N- or P- doped substrate 120, which typically is formed of a semiconductor material such as gallium arsenide, indium phosphide, silicon or germanium.
  • a waveguide 122 is formed over the substrate 120.
  • the waveguide may be a single or multiple layer waveguide and may be formed of any suitable semiconductor material, such as, for example, aluminum gallium arsenide, indium gallium arsenide phosphide or silicon germanium.
  • the symbol "I" indicates an "intrinsic
  • I has doping values between 10 to 10 and in some cases “I” may have values up to 10 .
  • Fig. 3 illustrates a P-I-N device.
  • the device of Fig. 3 may also be a N-I-P device by reversing its relevant layers.
  • a first layer 124 is provided of a material identical or similar to that of substrate 120 but having a lesser amount of doping than the substrate 120.
  • An additional layer 126 may be provided intermediate layer 124 and waveguide 122.
  • Layer 126 is typically of a material identical or similar to that of substrate 120 and layer 124, but substantially without doping, that is an intrinsic layer "I". It is appreciated that additional layers of gradually lesser doping may be inte ⁇ osed between layers 124 and 126.
  • the gradual decrease in doping in successive layers between the substrate 120 and the waveguide 122 is intended to provide gradually increasing mode losses with increasing distance from the waveguide 122, thus decreasing the overall mode loss of the element.
  • layer 126 having substantially no doping, is intended to decrease the effective capacitance of the waveguide 122 and thus increase its operating speed.
  • a diffraction grating 130 is formed over the waveguide 122.
  • the diffraction grating 130 is integrally formed with the waveguide 122, although this need not be the case.
  • the diffraction grating 130 is formed of the same material as the waveguide 122, it being appreciated that the diffraction may be formed of another suitable semiconductor material.
  • the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case.
  • the cladding is formed of a material different from that of the diffraction grating and may be formed of any suitable semiconductor or other material, such as, for example, such as, for example, aluminum gallium arsenide, indium gallium arsenide phosphide, silicon germanium or transparent ITO.
  • any suitable semiconductor or other material such as, for example, such as, for example, aluminum gallium arsenide, indium gallium arsenide phosphide, silicon germanium or transparent ITO.
  • three cladding layers 132, 134 and 136 are provided. It is appreciated that a lesser or greater number of cladding layers may alternatively be provided, so long as at least one transparent electrode is present over the diffraction grating 130.
  • layer 134 is provided of a material identical or similar to that of layer 136 but having a lesser amount of doping.
  • Layer 132, intermediate layer 134 and diffraction grating 130, is typically of a material identical or similar to that of layer 134, but substantially without doping. It is appreciated that additional layers of gradually lesser doping may be inte ⁇ osed between layers 134 and 132.
  • the gradual decrease in doping in successive layers between layer 136 and diffraction grating 130 is intended to provide gradually increasing mode losses with increasing distance from the waveguide 122, thus decreasing the overall mode loss of the element.
  • layer 132 having substantially no doping, is intended to decrease the effective capacitance of the waveguide 122 and thus increase its operating speed.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • an anti-reflection coating 139 may be formed on the opposite surface of substrate 120 from waveguide 122 on the opposite surface of substrate 120 from waveguide 122.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • a conductor 140 is electrically associated with layer 136 and a conductor 142, also typically formed of a metal or semiconductor material, is electrically associated with the substrate 120.
  • At least two transparent conductors may be provided intermediate selected layers of the optical element.
  • a voltage or current source V k is coupled across the two conductors 140 and
  • the device optical and geometrical parameters illustrated in Fig. 3 allow the device to function as an active tunable mirror or as an active tunable filter for wavelengths in the region of 1.55 microns.
  • the impingement is preferably substantially pe ⁇ endicular to the surfaces of the substrate 120 and the waveguide 122.
  • the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the pe ⁇ endicular.
  • Fig. 4 is a simplified illustration of another preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing liquid crystal material and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 4 has many other potential uses, such as a active tunable filter.
  • the optical element of Fig. 4 comprises a substrate 220, which typically is formed of a dielectric, transparent crystal, polymer or semiconductor material.
  • a waveguide 222 is formed onto the substrate 220.
  • the waveguide may be a single or multiple layer waveguide and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material.
  • a diffraction grating 224 is formed over the waveguide 222.
  • the diffraction grating 224 may be formed of the same material as the waveguide 222 or of another material and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material. Although the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case
  • cladding layer 226 which at least fills the interstices of the diffraction grating 224
  • the cladding is formed of a liquid crystal material having a wide range of selectable indices of refraction
  • an anti- reflection coating 228 there may also optionally be formed over the cladding layer 226 an anti- reflection coating 228.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • the anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
  • At least two transparent conductors 230 are provided intermediate selected layers of the optical element of Fig. 4.
  • transparent conductors are seen to be located at locations A and B, on opposite surfaces of the liquid crystal cladding layer 226.
  • a voltage or current source V k is coupled across the two transparent conductors.
  • the device optical and geometrical parameters illustrated in Fig. 4 allow the device to function as an active tunable mirror or as an active tunable filter for wavelengths in the region of 0.6 microns.
  • the impingement is preferably substantially perpendicular to the surfaces of the substrate 220 and the waveguide 222.
  • the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the pe ⁇ endicular.
  • Fig. 5 illustrates the optical element of any of Figs. 2, 3 and 4 in operation as a active tunable filter. Radiation at various wavelengths ( ⁇ ;...; ⁇ character) impinges upon the optical element 300. Depending on the voltage or current V k applied to the optical element 300, the optical element reflects radiation only at a given wavelength( ⁇ k). Radiation at all other wavelengths passes through the optical element.

Abstract

This invention discloses an electro-optically controlled optical element (300) including a diffraction grating (130); and a planar waveguide (122) associated with the diffraction grating (130), the diffraction grating (130) and the planar waveguide (122) being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.

Description

ACTIVE WAVELENGTH SELECTION WITH RESONANT DEVICES
The present invention relates to electro-optically controlled optical elements generally and also to electro-optical assemblies including such elements.
Various types of electro-optically controlled optical elements are known in the art. U.S. Patents 5,157,537 and 5,337,183 describe examples of such elements. The elements described in U.S. Patents 5,157,537 and 5,337,183 have limited dynamic range and are thus proposed to be employed as optical modulators.
The present invention seeks to provide electro-optically controlled optical elements having a significantly greater dynamic range than is known from the prior art.
There is thus provided in accordance with a preferred embodiment of the present invention an electro-optically controlled optical element including a diffraction grating and a planar waveguide associated with the diffraction grating, the diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
The planar waveguide may include multiple layers having differing indices of refraction.
The element may have at least one light transmissive surface generally parallel to the planar waveguide and including an anti-reflection coating formed on at least one light transmissive surface.
There is also provided in accordance with a preferred embodiment of the present invention a laser including a laser cavity, an active tunable mirror and an output coupler defining the laser cavity, and wherein the active tunable mirror includes an electro-optically controlled optical element including: a diffraction grating; and a planar waveguide associated with the diffraction grating, the diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
There is additionally provided in accordance with a preferred embodiment of the present invention an electro-optically tunable laser which is tunable over a dynamic range of more than 0.1 nanometer, preferably more than 1 nanometer and even more preferably several tens of nanometers.
The optical element may function as an electro-optical tunable filter. In accordance with a preferred embodiment of the present invention, the electro-optically controlled optical element also includes a planar waveguide whose index of refraction is controlled by the electrical input.
Additionally or alternatively, the electro-optically controlled optical element also includes a light transmissive medium whose index of refraction is controlled by the electrical input. The light transmissive material may be a liquid crystal material.
In accordance with a preferred embodiment of the present invention, the electro-optically controlled optical element also includes transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
Additionally or alternatively, the electro-optically controlled optical element also includes transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
In accordance with one embodiment of the present invention, the diffraction grating and the planar waveguide are formed of semiconductor materials. Preferably, also includes a planar waveguide whose index of refraction is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across the planar waveguide.
Additionally or alternatively, the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across the light transmissive medium.
In accordance with a preferred embodiment of the present invention, at least one of the diffraction grating and the planar waveguide are formed of an electro-optical material. Preferably, the planar waveguide has an index of refraction which is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
Alternatively or additionally, the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
In accordance with a preferred embodiment of the invention at least one of the diffraction grating and the planar waveguide are formed of a polymeric material having a range of selectable indices of refraction which is relatively wide.
Preferably, the planar waveguide has an index of refraction which is controlled by the electrical input and also including transparent conductors arranged adjacent the planar waveguide and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the planar waveguide.
Alternatively or additionally, the element also includes a light transmissive medium whose index of refraction is controlled by the electrical input and transparent conductors arranged adjacent the light transmissive medium and electro-optically connected via electrodes to the electrical input, the transparent conductors being operative to apply electrical energy across the light transmissive medium.
The present invention will be understood and appreciated more fully from the following detailed description, taken in conjunction with the drawings in which:
Fig. 1 is a simplified block diagram illustration of an electro-optically tunable laser constructed and operative in accordance with a preferred embodiment of the present invention;
Fig. 2 is a simplified illustration of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention; Fig. 3 is a simplified illustration of a preferred embodiment of an electro- optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing semiconductor materials;
Fig. 4 is a simplified illustration of another preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing liquid crystal material; and
Fig. 5 is a simplified block diagram illustration of an active tunable filter constructed and operative in accordance with a preferred embodiment of the present invention.
Reference is now made to Fig. 1, which is a simplified block diagram illustration of an electro-optically tunable laser constructed and operative in accordance with a preferred embodiment of the present invention.
The laser of Fig. 1 preferably includes a laser cavity 10 having a tunable lasing spectrum. The laser cavity is defined at one end thereof by an electrically controllable active tunable mirror 12, which is preferably a resonant grating waveguide device constructed and operative in accordance with a preferred embodiment of the present invention. The opposite end of laser cavity 10 is preferably defined by an output coupler 14, such as a laser mirror.
The laser of Fig. 1 is operative to output a laser beam of wavelength (λk) in response to the supply of a corresponding voltage Vk to the active tunable mirror 12.
Reference is now made to Fig. 2, which is a simplified illustration of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 2 has many other potential uses, such as an active tunable filter. As an active filter, the optical element reflects only a selected resonance wavelength from among many wavelengths impinging thereon.
The optical element of Fig. 2 comprises a substrate 20, which typically is formed of a dielectric, transparent crystal, polymer or semiconductor material. A waveguide 22 is formed onto the substrate 20. The waveguide may be a single or multiple layer waveguide and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer, liquid crystal or semiconductor material.
In Fig. 2 and the other drawings of the present application, n„ the refractive index of air and ni is the refractive index of the various layers of the electro-optically controlled optical element, where the index i defines the i-th layer of the device. Additionally, t. is the thickness of the i-th layer of the device, h is the height of the grating and Λ is the period of the grating.
Waveguide 22 may be a single mode or multiple mode waveguide. It may operate on TE or TM polarization. Where a multiple mode waveguide is provided, one mode may operate on TE or TM polarization and the remaining mode or modes may operate on the other polarization. The optical element may operate at wavelengths extending from the far UV to the far IR. The structural parameters of the optical element are determined by the wavelength at which the optical element is sought to operate.
In accordance with a preferred embodiment of the present invention a diffraction grating 24 is formed over the waveguide 22. The diffraction grating 24 may be formed of the same material as the waveguide 22 or of another material and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material. Although the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case. There may optionally be formed over the diffraction grating 24 a cladding layer 26 which at least fills the interstices of the diffraction grating 24. The cladding is formed of a material different from that of the diffraction grating and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material.
There may also optionally be formed over the cladding layer 26 an anti- reflection coating 28. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
Additionally, on the opposite surface of substrate 20 from waveguide 22 there may optionally be formed an anti-reflection coating 29. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
In accordance with a preferred embodiment of the present invention, at least two transparent conductors 30 are provided intermediate selected layers of the optical element of Fig. 2.
For example, transparent conductors may be located at locations A and B, on opposite surfaces of the substrate. Alternatively, the transparent conductors may be located at locations A and C, location C being intermediate the waveguide 22 and the grating 24. As a further alternative, the transparent conductors may be located at locations A and D, location D being intermediate the grating 24 and the cladding 26. As still a further alternative, the transparent conductors may be located at locations A and E, location E being intermediate the cladding 26 and the optional anti-reflection coating 28.
As additional examples, transparent conductors may be located at locations B and C, B and D, and B and E or at location C and E.
A voltage or current source Vk is coupled across the two transparent conductors. An incident light beam 40, such as a plane wave, having a predetermined wavelength (λo) impinges on the optical element as indicated generally in Fig. 2. It is appreciated that it may impinge on the optical element from either side of the substrate. When the optical element of Fig. 2 is employed as a laser mirror, as, for example, in the embodiment of Fig. 1, the impingement is preferably substantially peφendicular to the surfaces of the substrate 20 and the waveguide 22. When the optical element of Fig. 2 is employed as a active tunable filter, the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the peφendicular.
The operation of the optical element of Fig. 2 may be summarized as follows: Light of a predetermined wavelength impinging on the optical element at a predetermined angle is substantially reflected by the optical element, which is at resonance for this particular wavelength. Light of other than the predetermined wavelength or which impinges at other than the predetermined angle is mainly transmitted through the optical element in the direction of impingement. The spectral behavior at wavelengths near the predetermined wavelength and at angles near the predetermined angle is generally Lorentzian.
The spectral bandwidth, Δλ, of the optical element for transmission or reflection may be approximated as being proportionally related to the height of the diffraction grating and the difference between the refractive indices of the grating, n;, and the cladding, nk, by:
2 2 a b c
Δλ oc (n - n^ ) k .h where k is the first Fourier component of the grating; and h is the height of the grating. The indices "a"; "b"; and "c", generally have the value of 2.
Thus, for a given laser or tunable filter structure, the spectral bandwidth can be selected to preferably be between the values of 0.01 nanometers to 1.0 nanometer. Usually, the height of the diffraction grating and the difference in the indices of refraction between the grating and the cladding are the variables which are conveniently selected to choose the desired spectral bandwidth.
The mechanism which produces the above-described behavior can be summarized as follows: Light impinging on the optical element is partially diffracted into a mode in the waveguide for travel therealong and is diffracted out of the waveguide at intermittent locations along the waveguide. At resonance, the sum of the light diffracted out of the waveguide into the incident beam direction is substantially equal to zero, while the sum of the light diffracted out of the waveguide in the zero order direction of reflection with respect to the incident beam direction is substantially equal to unity. Substantially total reflection of the incident beam results.
Away from resonance, the sum of the light diffracted out of the waveguide into the incident beam direction is substantially equal to unity less the usual Fresnel reflection, while the sum of the light diffracted out of the waveguide in the zero order direction of reflection with respect to the incident beam direction is substantially equal to the usual Fresnel reflection.
Thus, when the electro-optically controlled element is working as an active tunable mirror in a laser cavity, the lasing wavelength of the laser is determined by the active tunable mirror to be the resonance wavelength of the mirror. All other wavelengths suffer from strong losses due to their small amount of reflection, and thus do not lase.
When the electro-optically controlled element is working as an active tunable filter, only the light incident on the device at a wavelength which is the device resonant wavelength is selected by reflecting back from the device. All other incident wavelengths are generally transmitted through the device.
The resonant wavelength of the optical element of Fig. 2 and of the remaining optical elements described hereinbelow is selected by supplying to the optical element a suitably selected electrical voltage or current. The suitably selected voltage or current is operative to the index of refraction of one or more layers by means of, for example, the linear electro-optic effect (Pockels), the quadratic electro-optic effect, the plasma effect in semiconductors, the band-filling effect in semiconductors or current injection. The resonant wavelength may be shifted by varying the voltage or current supplied to the element.
Reference is now made to Fig. 3, which is a simplified illustration of a preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing semiconductor materials and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 3 has many other potential uses, such as a active tunable filter.
The optical element of Fig. 3 comprises a N- or P- doped substrate 120, which typically is formed of a semiconductor material such as gallium arsenide, indium phosphide, silicon or germanium. A waveguide 122 is formed over the substrate 120. The waveguide may be a single or multiple layer waveguide and may be formed of any suitable semiconductor material, such as, for example, aluminum gallium arsenide, indium gallium arsenide phosphide or silicon germanium. In Fig. 3 the symbol "I" indicates an "intrinsic
14 15 layer". Usually "I" has doping values between 10 to 10 and in some cases "I" may have values up to 10 .
Fig. 3 illustrates a P-I-N device. Alternatively, it is appreciated that the device of Fig. 3 may also be a N-I-P device by reversing its relevant layers.
In accordance with one embodiment of the invention there may be optionally provided one or more intermediate semiconductive layers. In the illustrated embodiment a first layer 124 is provided of a material identical or similar to that of substrate 120 but having a lesser amount of doping than the substrate 120. An additional layer 126 may be provided intermediate layer 124 and waveguide 122. Layer 126 is typically of a material identical or similar to that of substrate 120 and layer 124, but substantially without doping, that is an intrinsic layer "I". It is appreciated that additional layers of gradually lesser doping may be inteφosed between layers 124 and 126.
The gradual decrease in doping in successive layers between the substrate 120 and the waveguide 122 is intended to provide gradually increasing mode losses with increasing distance from the waveguide 122, thus decreasing the overall mode loss of the element.
The provision of layer 126, having substantially no doping, is intended to decrease the effective capacitance of the waveguide 122 and thus increase its operating speed.
In accordance with a preferred embodiment of the present invention a diffraction grating 130 is formed over the waveguide 122. In the illustrated embodiment of Fig. 3, the diffraction grating 130 is integrally formed with the waveguide 122, although this need not be the case. In a preferred embodiment of the invention, the diffraction grating 130 is formed of the same material as the waveguide 122, it being appreciated that the diffraction may be formed of another suitable semiconductor material. Although the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case.
There may optionally be formed over the diffraction grating 130 one or more cladding layers 132, 134 and 136, wherein cladding 132 at least fills the interstices of the diffraction grating 130. The cladding is formed of a material different from that of the diffraction grating and may be formed of any suitable semiconductor or other material, such as, for example, such as, for example, aluminum gallium arsenide, indium gallium arsenide phosphide, silicon germanium or transparent ITO. In the illustrated embodiment, three cladding layers 132, 134 and 136 are provided. It is appreciated that a lesser or greater number of cladding layers may alternatively be provided, so long as at least one transparent electrode is present over the diffraction grating 130.
In the illustrated embodiment layer 134 is provided of a material identical or similar to that of layer 136 but having a lesser amount of doping. Layer 132, intermediate layer 134 and diffraction grating 130, is typically of a material identical or similar to that of layer 134, but substantially without doping. It is appreciated that additional layers of gradually lesser doping may be inteφosed between layers 134 and 132.
The gradual decrease in doping in successive layers between layer 136 and diffraction grating 130 is intended to provide gradually increasing mode losses with increasing distance from the waveguide 122, thus decreasing the overall mode loss of the element.
The provision of layer 132, having substantially no doping, is intended to decrease the effective capacitance of the waveguide 122 and thus increase its operating speed.
There may also optionally be formed over cladding layer 136 an anti- reflection coating 138. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
Additionally, on the opposite surface of substrate 120 from waveguide 122 there may optionally be formed an anti-reflection coating 139. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
In the illustrated embodiment, a conductor 140, typically formed of a metal or semiconductor material, is electrically associated with layer 136 and a conductor 142, also typically formed of a metal or semiconductor material, is electrically associated with the substrate 120.
Alternatively, at least two transparent conductors (not shown) may be provided intermediate selected layers of the optical element.
A voltage or current source Vk is coupled across the two conductors 140 and
142.
The device optical and geometrical parameters illustrated in Fig. 3 allow the device to function as an active tunable mirror or as an active tunable filter for wavelengths in the region of 1.55 microns.
An incident light beam 150 having a predetermined wavelength (λD ~ 1.55 microns) impinges on the optical element as indicated generally in Fig. 3. It is appreciated that it may impinge on the optical element from either side of the substrate. When the optical element of Fig. 3 is employed as a laser mirror, as, for example, in the embodiment of Fig. 1, the impingement is preferably substantially peφendicular to the surfaces of the substrate 120 and the waveguide 122. When the optical element of Fig. 3 is employed as a active tunable filter, the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the peφendicular.
It will be appreciated that in the illustration of Fig. 3 the indices of refraction (n6 = 3.45) of the waveguide and the grating (layer 5) and (ru = 3.17) of the layer 4 above the grating, as well as the duty cycle of the grating and the grating height are selected to provide a spectral bandwidth, at full width half maximum of the Lorentzian of about 0.25 nm.
The operation of the optical element of Fig. 3 may be identical to that summarized hereinabove with reference to Fig. 2. Reference is now made to Fig. 4 which is a simplified illustration of another preferred embodiment of an electro-optically controlled optical element constructed and operative in accordance with a preferred embodiment of the present invention employing liquid crystal material and which is particularly useful as an active tunable mirror, such as active tunable mirror 12 (Fig. 1). It is appreciated that the optical element of Fig. 4 has many other potential uses, such as a active tunable filter.
The optical element of Fig. 4 comprises a substrate 220, which typically is formed of a dielectric, transparent crystal, polymer or semiconductor material. A waveguide 222 is formed onto the substrate 220. The waveguide may be a single or multiple layer waveguide and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material.
In accordance with a preferred embodiment of the present invention a diffraction grating 224 is formed over the waveguide 222. The diffraction grating 224 may be formed of the same material as the waveguide 222 or of another material and may be formed of any suitable material, such as, for example, a dielectric, transparent crystal, polymer or semiconductor material. Although the diffraction grating is shown to have a rectangular configuration, this need not necessarily be the case
There is formed over the diffraction grating 224 a cladding layer 226 which at least fills the interstices of the diffraction grating 224 The cladding is formed of a liquid crystal material having a wide range of selectable indices of refraction
There may also optionally be formed over the cladding layer 226 an anti- reflection coating 228. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional. Additionally, on the opposite surface of substrate 220 from waveguide 222 there may optionally be formed an anti-reflection coating 229. The anti-reflection coating may be a single or multiple layer coating and may be entirely conventional.
In accordance with a preferred embodiment of the present invention, at least two transparent conductors 230 are provided intermediate selected layers of the optical element of Fig. 4.
In the illustrated embodiment transparent conductors are seen to be located at locations A and B, on opposite surfaces of the liquid crystal cladding layer 226. A voltage or current source Vk is coupled across the two transparent conductors.
The device optical and geometrical parameters illustrated in Fig. 4 allow the device to function as an active tunable mirror or as an active tunable filter for wavelengths in the region of 0.6 microns.
An incident light beam 260 having a predetermined wavelength (λo « 0.6 microns) impinges on the optical element as indicated generally in Fig. 4. It is appreciated that it may impinge on the optical element from either side of the substrate. When the optical element of Fig. 4 is employed as a laser mirror, as, for example, in the embodiment of Fig. 1, the impingement is preferably substantially perpendicular to the surfaces of the substrate 220 and the waveguide 222. When the optical element of Fig. 4 is employed as a active tunable filter, the impingement is preferably non-perpendicular but lies within a predetermined angular limit of the peφendicular.
The operation of the optical element of Fig. 4 may identical to that summarized hereinabove with respect to Fig. 2. It will be appreciated that in the illustration of Fig. 4 the indices of refraction (n* = 1.65) of the grating and (n2 preferably about 1.5) of the layer above the grating as well as the duty cycle of the grating and the grating height are selected to provide a spectral bandwidth, at full width half maximum of the Lorentzian of about 0.1 nm.
Reference is now made to Fig. 5 which illustrates the optical element of any of Figs. 2, 3 and 4 in operation as a active tunable filter. Radiation at various wavelengths (λι;...;λ„) impinges upon the optical element 300. Depending on the voltage or current Vk applied to the optical element 300, the optical element reflects radiation only at a given wavelength(λk). Radiation at all other wavelengths passes through the optical element.
It will be appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the scope of the present invention is defined only by the claims which follow:

Claims

C L A I M S We claim:
1. An electro-optically controlled optical element comprising: a diffraction grating; and a planar waveguide associated with said diffraction grating, said diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
2. An electro-optically controlled optical element according to claim 1 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input.
3. An electro-optically controlled optical element according to claim 1 and wherein said planar waveguide has an index of refraction which is controlled by said electrical input.
4. An electro-optically controlled optical element according to claim 2 and also comprising transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
5. An electro-optically controlled optical element according to claim 3 and also comprising transparent conductors arranged adjacent said planar waveguide and electro- optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
6. An electro-optically controlled optical element according to claim 1 and wherein said diffraction grating and said planar waveguide are formed of semiconductor materials.
7. An electro-optically controlled optical element according to claim 6 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across said light transmissive medium.
8. An electro-optically controlled optical element according to claim 6 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across said planar waveguide.
9. An electro-optically controlled optical element according to claim 1 and wherein at least one of said diffraction grating and said planar waveguide are formed of an electro-optical material.
10. An electro-optically controlled optical element according to claim 9 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
11. An electro-optically controlled optical element according to claim 9 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
12. An electro-optically controlled optical element according to claim 1 and wherein at least one of said diffraction grating and said planar waveguide are formed of at least one of a polymeric material and a liquid crystal.
13. An electro-optically controlled optical element according to claim 12 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
14. An electro-optically controlled optical element according to claim 12 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
15. An electro-optically controlled optical element according to claim 2 and wherein said light transmissive medium is a liquid crystal material.
16. An electro-optically controlled optical element according to claim 15 and wherein said light transmissive medium has an index of refraction which is controlled by said electrical input and said optical element also comprises transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
17. An electro-optically controlled optical element according to any of claims 1 - 16 and wherein said planar waveguide comprises multiple layers having differing indices of refraction.
18. An electro-optically controlled optical element according to any of claims 1 - 16 and having at least one light transmissive surface generally parallel to said planar waveguide and comprising an anti-reflection coating formed on at least one light transmissive surface.
19. An electro-optically controlled optical element according to any of claims 1 - 16 and wherein said optical element is an electro-optical tunable filter.
20 An electro-optically controlled optical element according to any of claims 1 -
16 and wherein said optical element is a portion of a laser
21. A laser comprising : a laser cavity; and an active tunable mirror and an output coupler defining said laser cavity, and wherein said active tunable mirror comprises an electro-optically controlled optical element comprising a diffraction grating, and a planar waveguide associated with said diffraction grating, said diffraction grating and planar waveguide being configured to undergo resonance of at least one of transmitted or reflected light at a wavelength which is selectable by means of an electrical input.
22. An electro-optically controlled optical element according to claim 21 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input
23. An electro-optically controlled optical element according to claim 21 and wherein said planar waveguide has an index of refraction which is controlled by said electrical input.
24. An electro-optically controlled optical element according to claim 22 and also comprising transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
25. An electro-optically controlled optical element according to claim 23 and also comprising transparent conductors arranged adjacent said planar waveguide and electro- optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
26. An electro-optically controlled optical element according to claim 21 and wherein said diffraction grating and said planar waveguide are formed of semiconductor materials.
27. An electro-optically controlled optical element according to claim 26 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across said light transmissive medium.
28. An electro-optically controlled optical element according to claim 26 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy via suitably doped semiconductor material across said planar waveguide.
29. An electro-optically controlled optical element according to claim 21 and wherein at least one of said diffraction grating and said planar waveguide are formed of an electro-optical material.
30. An electro-optically controlled optical element according to claim 29 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
31. An electro-optically controlled optical element according to claim 29 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
32. An electro-optically controlled optical element according to claim 31 and wherein at least one of said diffraction grating and said planar waveguide are formed of at least one of a polymeric material and a liquid crystal.
33. An electro-optically controlled optical element according to claim 32 and also comprising a light transmissive medium whose index of refraction is controlled by said electrical input and transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
34. An electro-optically controlled optical element according to claim 32 wherein said planar waveguide has an index of refraction which is controlled by said electrical input and also comprising transparent conductors arranged adjacent said planar waveguide and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said planar waveguide.
35. An electro-optically controlled optical element according to claim 32 and wherein said light transmissive medium is a liquid crystal material.
36. An electro-optically controlled optical element according to claim 35 and wherein said light transmissive medium has an index of refraction which is controlled by said electrical input and said optical element also comprises transparent conductors arranged adjacent said light transmissive medium and electro-optically connected via electrodes to said electrical input, said transparent conductors being operative to apply electrical energy across said light transmissive medium.
37. An electro-optically controlled optical element according to any of claims 21
- 36 and wherein said planar waveguide comprises multiple layers having differing indices of refraction.
38. An electro-optically controlled optical element according to any of claims 21
- 36 and having at least one light transmissive surface generally parallel to said planar waveguide and comprising an anti-reflection coating formed on at least one light transmissive surface.
39. An electro-optically tunable laser which is tunable over a dynamic range of more than 0.1 nanometer.
40. An electro-optically tunable laser which is tunable over a dynamic range of more than 1 nanometer.
41. An electro-optically tunable laser which is tunable over a dynamic range of several tens of nanometers.
PCT/IL1997/000151 1996-05-09 1997-05-07 Active wavelength selection with resonant devices WO1997044686A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP97918328A EP0898799B1 (en) 1996-05-09 1997-05-07 Active wavelength selection with resonant devices
DE69737855T DE69737855T2 (en) 1996-05-09 1997-05-07 ACTIVE WAVELENGTH ELECTION WITH RESONANT DEVICES
JP54195497A JP3527513B2 (en) 1996-05-09 1997-05-07 Selection of Active Wavelength for Resonator
US09/180,201 US6215928B1 (en) 1996-05-09 1997-05-07 Active wavelength selection with resonant devices
IL12681797A IL126817A (en) 1996-05-09 1997-05-07 Active wavelength selection with resonant devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL11820996A IL118209A0 (en) 1996-05-09 1996-05-09 Active electro-optical wavelength-selective mirrors and active electro-optic wavelength-selective filters
IL118209 1996-05-09

Publications (2)

Publication Number Publication Date
WO1997044686A2 true WO1997044686A2 (en) 1997-11-27
WO1997044686A3 WO1997044686A3 (en) 1998-01-22

Family

ID=11068856

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL1997/000151 WO1997044686A2 (en) 1996-05-09 1997-05-07 Active wavelength selection with resonant devices

Country Status (6)

Country Link
US (1) US6215928B1 (en)
EP (1) EP0898799B1 (en)
JP (1) JP3527513B2 (en)
DE (1) DE69737855T2 (en)
IL (1) IL118209A0 (en)
WO (1) WO1997044686A2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000051212A2 (en) * 1999-01-27 2000-08-31 Northstar Photonics, Inc. Waveguide lasers
EP1158342A2 (en) * 2000-05-17 2001-11-28 Agere Systems Optoelectronics Guardian Corporation Tunable etched grating for WDM optical communication systems
WO2002031551A1 (en) * 2000-10-13 2002-04-18 Highwave Optical Technologies Marseille Optical filters, method for making same and use thereof for a multiplex system
FR2816063A1 (en) * 2000-10-27 2002-05-03 Shakticom Fibre optic telecommunications optical filter manufacture, having thin substrate deposited layer with inserted shaped sections forming pass band filter near normal incidence
US6493476B2 (en) 2000-11-27 2002-12-10 Teem Photonics Apparatus and method for integrated photonic devices having gain and wavelength-selectivity
US6813405B1 (en) 2002-03-29 2004-11-02 Teem Photonics Compact apparatus and method for integrated photonic devices having folded directional couplers
EP1795955A1 (en) * 2005-12-07 2007-06-13 Ricoh Company, Ltd. Optical switching element, optical switching device, and color image displaying apparatus
US8593630B2 (en) 2009-10-07 2013-11-26 The Board Of Trustees Of The University Of Illinois Discrete frequency spectroscopy and instrumentation

Families Citing this family (125)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6735016B1 (en) 1999-09-15 2004-05-11 Spectraswitch, Inc. Electro-optically controllable polarization insensitive optical device
US8111401B2 (en) * 1999-11-05 2012-02-07 Robert Magnusson Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
US6532326B1 (en) * 2000-09-21 2003-03-11 Ut-Battelle, Llc Transverse-longitudinal integrated resonator
US6795459B2 (en) 2000-10-18 2004-09-21 Fibera, Inc. Light frequency locker
US6858834B2 (en) * 2000-10-18 2005-02-22 Fibera, Inc. Light wavelength meter
US7306827B2 (en) * 2000-10-30 2007-12-11 Sru Biosystems, Inc. Method and machine for replicating holographic gratings on a substrate
US7300803B2 (en) * 2000-10-30 2007-11-27 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
US7023544B2 (en) * 2000-10-30 2006-04-04 Sru Biosystems, Inc. Method and instrument for detecting biomolecular interactions
US7094595B2 (en) * 2000-10-30 2006-08-22 Sru Biosystems, Inc. Label-free high-throughput optical technique for detecting biomolecular interactions
US7070987B2 (en) * 2000-10-30 2006-07-04 Sru Biosystems, Inc. Guided mode resonant filter biosensor using a linear grating surface structure
US7153702B2 (en) * 2000-10-30 2006-12-26 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
US7217574B2 (en) * 2000-10-30 2007-05-15 Sru Biosystems, Inc. Method and apparatus for biosensor spectral shift detection
US7175980B2 (en) * 2000-10-30 2007-02-13 Sru Biosystems, Inc. Method of making a plastic colorimetric resonant biosensor device with liquid handling capabilities
US20030113766A1 (en) * 2000-10-30 2003-06-19 Sru Biosystems, Llc Amine activated colorimetric resonant biosensor
US7264973B2 (en) * 2000-10-30 2007-09-04 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant optical biosensor
US7615339B2 (en) * 2000-10-30 2009-11-10 Sru Biosystems, Inc. Method for producing a colorimetric resonant reflection biosensor on rigid surfaces
US7875434B2 (en) * 2000-10-30 2011-01-25 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
US7575939B2 (en) * 2000-10-30 2009-08-18 Sru Biosystems, Inc. Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
US7142296B2 (en) * 2000-10-30 2006-11-28 Sru Biosystems, Inc. Method and apparatus for detecting biomolecular interactions
US7371562B2 (en) * 2000-10-30 2008-05-13 Sru Biosystems, Inc. Guided mode resonant filter biosensor using a linear grating surface structure
US7101660B2 (en) * 2000-10-30 2006-09-05 Sru Biosystems, Inc. Method for producing a colorimetric resonant reflection biosensor on rigid surfaces
US7202076B2 (en) * 2000-10-30 2007-04-10 Sru Biosystems, Inc. Label-free high-throughput optical technique for detecting biomolecular interactions
US6951715B2 (en) * 2000-10-30 2005-10-04 Sru Biosystems, Inc. Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
US20030092075A1 (en) * 2000-10-30 2003-05-15 Sru Biosystems, Llc Aldehyde chemical surface activation processes and test methods for colorimetric resonant sensors
WO2002043202A1 (en) * 2000-11-27 2002-05-30 Zhongshan Liu Multi-group multi-wavelength laser matrix
US6727520B2 (en) * 2000-12-29 2004-04-27 Honeywell International Inc. Spatially modulated reflector for an optoelectronic device
US6574390B2 (en) * 2001-02-15 2003-06-03 Infineon Technologies Ag Configuration to multiplex and/or demultiplex the signals of a plurality of optical data channels and method for the production of the configuration
US6628850B1 (en) * 2001-02-15 2003-09-30 General Photonics Corporation Dynamic wavelength-selective grating modulator
US6552842B2 (en) 2001-04-13 2003-04-22 Ut-Battelle, Llc Reflective coherent spatial light modulator
US6661952B2 (en) * 2001-05-04 2003-12-09 Ut Battelle, Llc Sub-wavelength efficient polarization filter (SWEP filter)
US6807339B1 (en) * 2001-09-14 2004-10-19 Fibera, Inc. Wavelength division multiplexing and de-multiplexing system
US6804060B1 (en) 2001-09-28 2004-10-12 Fibera, Inc. Interference filter fabrication
DE60102935T2 (en) * 2001-11-12 2004-11-04 Alcatel Tunable optical device and optical system using this device as a filter for coding
US7106920B2 (en) * 2001-11-13 2006-09-12 Zhongshan Liu Laser array for generating stable multi-wavelength laser outputs
US7027469B2 (en) * 2001-11-30 2006-04-11 Optitune Plc Tunable filter
US6947453B2 (en) 2002-01-17 2005-09-20 Optitune Plc Tunable diffractive device
US20030175030A1 (en) * 2002-03-18 2003-09-18 Shuqiang Chen Re-configurable optical add/drop multiplexer module and method
US6876784B2 (en) * 2002-05-30 2005-04-05 Nanoopto Corporation Optical polarization beam combiner/splitter
US7386205B2 (en) * 2002-06-17 2008-06-10 Jian Wang Optical device and method for making same
US7283571B2 (en) * 2002-06-17 2007-10-16 Jian Wang Method and system for performing wavelength locking of an optical transmission source
US20040047039A1 (en) * 2002-06-17 2004-03-11 Jian Wang Wide angle optical device and method for making same
CN100346196C (en) 2002-06-18 2007-10-31 纳诺普托公司 Optical components exhibiting enhanced functionality and method of making same
EP1535106A4 (en) 2002-08-01 2009-01-07 Api Nanofabrication And Res Co Precision phase retardation devices and method of making same
US7927822B2 (en) * 2002-09-09 2011-04-19 Sru Biosystems, Inc. Methods for screening cells and antibodies
US7429492B2 (en) * 2002-09-09 2008-09-30 Sru Biosystems, Inc. Multiwell plates with integrated biosensors and membranes
US6999156B2 (en) * 2002-09-30 2006-02-14 Chou Stephen Y Tunable subwavelength resonant grating filter
US6920272B2 (en) * 2002-10-09 2005-07-19 Nanoopto Corporation Monolithic tunable lasers and reflectors
US7013064B2 (en) * 2002-10-09 2006-03-14 Nanoopto Corporation Freespace tunable optoelectronic device and method
US6920159B2 (en) * 2002-11-29 2005-07-19 Optitune Plc Tunable optical source
US6917471B2 (en) * 2003-01-24 2005-07-12 Sumitomo Electric Industries, Ltd. Diffraction grating element
US20060193354A1 (en) * 2003-02-05 2006-08-31 Yehuda Rosenblatt External Cavity Tunable Laser and Control
US7268946B2 (en) * 2003-02-10 2007-09-11 Jian Wang Universal broadband polarizer, devices incorporating same, and method of making same
US7184625B2 (en) * 2003-02-11 2007-02-27 Luxtera, Inc Optical waveguide grating coupler incorporating reflective optical elements and anti-reflection elements
US7019904B2 (en) * 2003-02-18 2006-03-28 Sumitomo Electric Industries, Ltd. Diffraction grating element, production method of diffraction grating element, and method of designing diffraction grating element
CA2703171C (en) * 2003-02-18 2012-01-24 Sumitomo Electric Industries, Ltd. Diffraction grating element, production method of diffraction grating element, and method of designing diffraction grating element
US7352428B2 (en) * 2003-02-21 2008-04-01 Xtellus Inc. Liquid crystal cell platform
US7009680B2 (en) * 2003-06-02 2006-03-07 Xtellus Inc. Narrow band tunable filter with integrated detector
US7355671B2 (en) * 2003-02-21 2008-04-08 Xtellus Inc. Fabrication method for liquid crystal cell
US20060007386A1 (en) * 2003-02-21 2006-01-12 Extellus Usa Flat top tunable filter with integrated detector
US6943768B2 (en) * 2003-02-21 2005-09-13 Xtellus Inc. Thermal control system for liquid crystal cell
US20110043742A1 (en) * 2003-02-21 2011-02-24 Cavanaugh Shanti A Contamination prevention in liquid crystal cells
US20040201892A1 (en) * 2003-04-03 2004-10-14 Sumitomo Electric Industries, Ltd. Diffraction grating element, optical module and optical communications system
US20040258355A1 (en) * 2003-06-17 2004-12-23 Jian Wang Micro-structure induced birefringent waveguiding devices and methods of making same
US8298780B2 (en) * 2003-09-22 2012-10-30 X-Body, Inc. Methods of detection of changes in cells
KR101093661B1 (en) * 2003-09-30 2011-12-15 모사이드 테크놀로지스 인코퍼레이티드 Phase-Control In An External-Cavity Tuneable Laser
CA2544836A1 (en) * 2003-11-06 2005-05-26 Guo Bin Wang High-density amine-functionalized surface
JP2007510963A (en) * 2003-11-10 2007-04-26 テクノロジー イノヴェイションズ リミテッド ライアビリティ カンパニー Digital imaging assembly and method thereof
US20070071061A1 (en) * 2003-12-24 2007-03-29 Giulia Pietra Tunable resonant grating filters
US20050271325A1 (en) * 2004-01-22 2005-12-08 Anderson Michael H Liquid crystal waveguide having refractive shapes for dynamically controlling light
US7720116B2 (en) * 2004-01-22 2010-05-18 Vescent Photonics, Inc. Tunable laser having liquid crystal waveguide
US8989523B2 (en) 2004-01-22 2015-03-24 Vescent Photonics, Inc. Liquid crystal waveguide for dynamically controlling polarized light
US8860897B1 (en) 2004-01-22 2014-10-14 Vescent Photonics, Inc. Liquid crystal waveguide having electric field orientated for controlling light
US8463080B1 (en) 2004-01-22 2013-06-11 Vescent Photonics, Inc. Liquid crystal waveguide having two or more control voltages for controlling polarized light
US7454103B2 (en) * 2004-04-23 2008-11-18 Parriaux Olivier M High efficiency optical diffraction device
DE602004030166D1 (en) * 2004-06-30 2010-12-30 Pgt Photonics Spa TUNABLE LASER WITH THERMALLY CONTROLLED EXTERNAL RESONATOR
WO2006008873A1 (en) * 2004-07-15 2006-01-26 Nec Corporation External resonator variable wavelength laser
US7209212B2 (en) * 2004-09-15 2007-04-24 China Institute Of Technology Tunable optical integrated element using liquid crystal as active layer
WO2006069589A1 (en) * 2004-12-29 2006-07-06 Pirelli & C. S.P.A. Wiring method and device
US7991024B2 (en) 2005-07-01 2011-08-02 Nec Corporation External cavity wavelength tunable laser device and optical output module
US20090257460A1 (en) * 2005-07-13 2009-10-15 Nec Corporation External resonator variable wavelength laser and its packaging method
US7570320B1 (en) 2005-09-01 2009-08-04 Vescent Photonics, Inc. Thermo-optic liquid crystal waveguides
JP4945140B2 (en) * 2006-02-01 2012-06-06 テクダイヤ株式会社 Wavelength tunable optical filter and external resonator type semiconductor laser device using the same
JP2007240744A (en) * 2006-03-07 2007-09-20 Tecdia Kk Optical switch and optical add/drop multiplexer
JP2010508520A (en) * 2006-10-31 2010-03-18 エス アール ユー バイオシステムズ，インコーポレイテッド Method for blocking non-specific protein binding on functionalized surfaces
JP4596181B2 (en) * 2007-03-28 2010-12-08 日本電気株式会社 External cavity tunable semiconductor laser
US20080299673A1 (en) * 2007-04-19 2008-12-04 Sru Biosystems, Inc. Method for Employing a Biosensor to Detect Small Molecules ("Fragments") that Bind Directly to Immobilized Protein Targets
JP5621184B2 (en) 2007-05-22 2014-11-05 日本電気硝子株式会社 Transparent electrode
CA2693700A1 (en) * 2007-07-11 2009-01-15 Sru Biosystems, Inc. Methods for identifying modulators of ion channels
US9134307B2 (en) * 2007-07-11 2015-09-15 X-Body, Inc. Method for determining ion channel modulating properties of a test reagent
US8257936B2 (en) 2008-04-09 2012-09-04 X-Body Inc. High resolution label free analysis of cellular properties
WO2009149285A1 (en) * 2008-06-04 2009-12-10 Sru Biosystems, Inc. Detection of promiscuous small submicrometer aggregates
DE102008040188A1 (en) 2008-07-04 2010-01-14 Forschungsverbund Berlin E.V. Multimode laser i.e. laser diode, has optical element arranged at discharging surface for selectively filtering transverse modes of higher order, where thickness of optical element and wavelength of laser satisfies preset equation
US9366938B1 (en) * 2009-02-17 2016-06-14 Vescent Photonics, Inc. Electro-optic beam deflector device
US20100273185A1 (en) * 2009-04-27 2010-10-28 Sru Biosystems, Inc. Detection of Biased Agonist Activation
US20100291575A1 (en) * 2009-05-15 2010-11-18 Sru Biosystems, Inc. Detection of Changes in Cell Populations and Mixed Cell Populations
US20100322269A1 (en) * 2009-06-17 2010-12-23 Cogo Optronics, Inc. Tunable laser
US20110237535A1 (en) * 2010-03-26 2011-09-29 Sru Biosystems, Inc. Use of Induced Pluripotent Cells and other Cells for Screening Compound Libraries
US8995038B1 (en) 2010-07-06 2015-03-31 Vescent Photonics, Inc. Optical time delay control device
US10156722B2 (en) 2010-12-24 2018-12-18 Magic Leap, Inc. Methods and systems for displaying stereoscopy with a freeform optical system with addressable focus for virtual and augmented reality
JP5474844B2 (en) * 2011-02-03 2014-04-16 グーグル・インコーポレーテッド Tunable resonant grating filter
US9417394B2 (en) * 2012-08-08 2016-08-16 The Board Of Regents Of The University Of Texas System Spectrally dense comb-like filters fashioned with thick-guided-mode resonant gratings
US10161738B2 (en) * 2012-12-31 2018-12-25 Axsun Technologies, Inc. OCT swept laser with cavity length compensation
JP6047061B2 (en) * 2013-04-26 2016-12-21 日本電信電話株式会社 Variable performance diffraction grating
US9519163B2 (en) * 2013-09-24 2016-12-13 Oracle International Corporation Tunable silicon grating couplers
US9915826B2 (en) * 2013-11-27 2018-03-13 Magic Leap, Inc. Virtual and augmented reality systems and methods having improved diffractive grating structures
EP2905851B1 (en) * 2014-02-05 2022-04-06 Huawei Technologies Co., Ltd. Optical lasing device and method for generating a lasing mode in such device
AU2015266670B2 (en) 2014-05-30 2019-05-09 Magic Leap, Inc. Methods and systems for displaying stereoscopy with a freeform optical system with addressable focus for virtual and augmented reality
TWM507618U (en) 2014-07-04 2015-08-21 Ezconn Corp OPTO-electronic micro-module
JP6746590B2 (en) 2015-01-26 2020-08-26 マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． Virtual and augmented reality system and method with improved grating structure
JP6873041B2 (en) * 2015-03-05 2021-05-19 マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． A method of manufacturing an eyepiece containing a first diffractive optical element
JP2016178234A (en) * 2015-03-20 2016-10-06 株式会社東芝 Semiconductor light-receiving device
JP6700587B2 (en) 2016-03-22 2020-05-27 凸版印刷株式会社 Glass with high transmission ITO film
KR20180125600A (en) 2016-04-07 2018-11-23 매직 립, 인코포레이티드 Systems and methods for augmented reality
KR102020956B1 (en) * 2016-08-30 2019-10-18 삼성전자주식회사 Optical Filter and Optical device Using the Same
CN106292049B (en) * 2016-09-30 2017-11-24 京东方科技集团股份有限公司 Display panel and display device
CN107918233B (en) * 2016-10-24 2023-12-01 京东方科技集团股份有限公司 Display device
CN106444177B (en) * 2016-10-28 2019-03-15 京东方科技集团股份有限公司 Display panel and display device
CN106324897B (en) * 2016-10-28 2019-06-14 京东方科技集团股份有限公司 Display panel and display device
CN106292124B (en) * 2016-10-28 2017-10-17 京东方科技集团股份有限公司 Display panel and display device
CN106324898B (en) * 2016-10-28 2017-08-25 京东方科技集团股份有限公司 Display panel and display device
US10753908B2 (en) * 2017-02-22 2020-08-25 The Hong Kong Polytechnic University Resonator for force detection
CN107479253A (en) * 2017-08-31 2017-12-15 京东方科技集团股份有限公司 A kind of transparent display
CN114924413A (en) * 2022-04-28 2022-08-19 歌尔光学科技有限公司 Optical waveguide structure, preparation method of optical waveguide structure and head-mounted display device
DE102022117299A1 (en) * 2022-07-12 2024-01-18 Ams-Osram International Gmbh LASER COMPONENT AND METHOD FOR OPERATING A LASER COMPONENT

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157537A (en) * 1991-02-01 1992-10-20 Yeda Research And Development Co., Ltd. Distributed resonant cavity light beam modulator
US5253314A (en) * 1992-01-31 1993-10-12 At&T Bell Laboratories Tunable optical waveguide coupler

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4251137A (en) * 1977-09-28 1981-02-17 Rca Corporation Tunable diffractive subtractive filter
JPS60101990A (en) * 1983-11-08 1985-06-06 Sharp Corp Semiconductor laser element
US5337183A (en) 1991-02-01 1994-08-09 Yeda Research And Development Co. Ltd. Distributed resonant cavity light beam modulator
US5216680A (en) 1991-07-11 1993-06-01 Board Of Regents, The University Of Texas System Optical guided-mode resonance filter
US5412743A (en) * 1993-12-06 1995-05-02 Eastman Kodak Company Method and apparatus for amplitude modulation of a laser beam
US5598300A (en) * 1995-06-05 1997-01-28 Board Of Regents, The University Of Texas System Efficient bandpass reflection and transmission filters with low sidebands based on guided-mode resonance effects
US6041071A (en) * 1995-09-29 2000-03-21 Coretek, Inc. Electro-optically tunable external cavity mirror for a narrow linewidth semiconductor laser
US6035089A (en) * 1997-06-11 2000-03-07 Lockheed Martin Energy Research Corporation Integrated narrowband optical filter based on embedded subwavelength resonant grating structures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157537A (en) * 1991-02-01 1992-10-20 Yeda Research And Development Co., Ltd. Distributed resonant cavity light beam modulator
US5253314A (en) * 1992-01-31 1993-10-12 At&T Bell Laboratories Tunable optical waveguide coupler

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0898799A2 *

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6636678B1 (en) 1999-01-27 2003-10-21 Teem Photonics, Inc. Method and apparatus for waveguide optics and devices
WO2000052791A2 (en) * 1999-01-27 2000-09-08 Northstar Photonics, Inc. Rare-earth doped phosphate-glass lasers
WO2000052791A3 (en) * 1999-01-27 2001-05-03 Northstar Photonics Inc Rare-earth doped phosphate-glass lasers
WO2000051212A3 (en) * 1999-01-27 2001-09-07 Northstar Photonics Inc Waveguide lasers
WO2000051212A2 (en) * 1999-01-27 2000-08-31 Northstar Photonics, Inc. Waveguide lasers
US6330388B1 (en) 1999-01-27 2001-12-11 Northstar Photonics, Inc. Method and apparatus for waveguide optics and devices
US6970494B1 (en) 1999-01-27 2005-11-29 Teem Photonics, S.A. Rare-earth doped phosphate-glass lasers and associated methods
US6690873B2 (en) 1999-01-27 2004-02-10 Teem Photonics Method and apparatus for waveguide optics and devices
EP1158342A2 (en) * 2000-05-17 2001-11-28 Agere Systems Optoelectronics Guardian Corporation Tunable etched grating for WDM optical communication systems
EP1158342A3 (en) * 2000-05-17 2003-04-23 Agere Systems Optoelectronics Guardian Corporation Tunable etched grating for WDM optical communication systems
JP2002014307A (en) * 2000-05-17 2002-01-18 Agere Systems Optoelectronics Guardian Corp Tunable etching diffraction grating for wdm optical communication system
WO2002031551A1 (en) * 2000-10-13 2002-04-18 Highwave Optical Technologies Marseille Optical filters, method for making same and use thereof for a multiplex system
FR2816063A1 (en) * 2000-10-27 2002-05-03 Shakticom Fibre optic telecommunications optical filter manufacture, having thin substrate deposited layer with inserted shaped sections forming pass band filter near normal incidence
US6493476B2 (en) 2000-11-27 2002-12-10 Teem Photonics Apparatus and method for integrated photonic devices having gain and wavelength-selectivity
US6954564B2 (en) 2000-11-27 2005-10-11 Teem Photonics Apparatus and method for integrated photonic devices having high-performance waveguides and multicompositional substrates
US6813405B1 (en) 2002-03-29 2004-11-02 Teem Photonics Compact apparatus and method for integrated photonic devices having folded directional couplers
EP1795955A1 (en) * 2005-12-07 2007-06-13 Ricoh Company, Ltd. Optical switching element, optical switching device, and color image displaying apparatus
US7492990B2 (en) 2005-12-07 2009-02-17 Ricoh Company, Ltd. Optical switching element, optical switching device, and color image displaying apparatus
US8593630B2 (en) 2009-10-07 2013-11-26 The Board Of Trustees Of The University Of Illinois Discrete frequency spectroscopy and instrumentation

Also Published As

Publication number Publication date
WO1997044686A3 (en) 1998-01-22
IL118209A0 (en) 1998-02-08
US6215928B1 (en) 2001-04-10
EP0898799A4 (en) 2000-04-26
DE69737855T2 (en) 2008-02-28
JP2000514566A (en) 2000-10-31
EP0898799B1 (en) 2007-06-27
JP3527513B2 (en) 2004-05-17
DE69737855D1 (en) 2007-08-09
EP0898799A2 (en) 1999-03-03

Similar Documents

Publication Publication Date Title
US6215928B1 (en) Active wavelength selection with resonant devices
US6205159B1 (en) Discrete wavelength liquid crystal tuned external cavity diode laser
EP1704428B1 (en) Tunable resonant grating filters
US7720116B2 (en) Tunable laser having liquid crystal waveguide
US5345328A (en) Tandem resonator reflectance modulator
EP1465004A1 (en) Liquid crystal variable wavelength filter unit, and driving method thereof
US5101293A (en) Electrooptic device for modulation of intensity and phase of transmitted or reflected light at discrete operating wavelengths
JP5474844B2 (en) Tunable resonant grating filter
Goossen MEMS-based variable optical interference devices
US5022038A (en) Wavelength tunable diode laser
Pezeshki et al. Optical phase modulator utilizing electroabsorption in a Fabry–Perot cavity
CA2126882C (en) Tunable optical arrangement
JPH0992933A (en) Wavelength changeable semiconductor laser
IL126817A (en) Active wavelength selection with resonant devices
WO2002101895A2 (en) High power, high brightness wide area laser device
JPH0373583A (en) Semiconductor laser light source device
US20020093995A1 (en) Electro-optically tunable external cavity mirror for a narrow linewidth semiconductor laser
WO2001077748A2 (en) Method and apparatus for optical beam steering
EP0397690A1 (en) Electrooptic modulator
AU652479B2 (en) Electrooptic modulator
US5093746A (en) Current injection modulator
Li et al. Thin Ferroelectric Interferometer For Light Modulations And Optical Tunable Filters
JPH0996785A (en) Semiconductor optical modulator and optical modulation circuit
JPH06265833A (en) Wavelength filter
JPH024210A (en) Wavelength selecting element and its driving method

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): CA IL JP KR US

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

AK Designated states

Kind code of ref document: A3

Designated state(s): CA IL JP KR US

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 1997918328

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1997918328

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 09180201

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: CA

WWG Wipo information: grant in national office

Ref document number: 1997918328

Country of ref document: EP