WO1997021525A1 - Wide wrist articulated arm transfer device - Google Patents
Wide wrist articulated arm transfer device Download PDFInfo
- Publication number
- WO1997021525A1 WO1997021525A1 PCT/US1996/019903 US9619903W WO9721525A1 WO 1997021525 A1 WO1997021525 A1 WO 1997021525A1 US 9619903 W US9619903 W US 9619903W WO 9721525 A1 WO9721525 A1 WO 9721525A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- drive
- driven
- dπve
- members
- driven member
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52224097A JP4231552B2 (en) | 1995-12-15 | 1996-12-12 | Object transfer device with wide wrist and bending arm |
AU12904/97A AU1290497A (en) | 1995-12-15 | 1996-12-12 | Wide wrist articulated arm transfer device |
EP96943745A EP0866742A4 (en) | 1995-12-15 | 1996-12-12 | Wide wrist articulated arm transfer device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57350095A | 1995-12-15 | 1995-12-15 | |
US08/573,500 | 1995-12-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997021525A1 true WO1997021525A1 (en) | 1997-06-19 |
Family
ID=24292239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/019903 WO1997021525A1 (en) | 1995-12-15 | 1996-12-12 | Wide wrist articulated arm transfer device |
Country Status (6)
Country | Link |
---|---|
US (1) | US5743704A (en) |
EP (1) | EP0866742A4 (en) |
JP (1) | JP4231552B2 (en) |
KR (1) | KR100430885B1 (en) |
AU (1) | AU1290497A (en) |
WO (1) | WO1997021525A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7201078B2 (en) | 2003-02-07 | 2007-04-10 | Samsung Electronics Co., Ltd. | Transporting apparatus |
KR20130073834A (en) * | 2011-12-23 | 2013-07-03 | 팹웍스 솔루션스 인코포레이티드 | Extended wrist assembly for robotic arm |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6224319B1 (en) * | 1998-07-10 | 2001-05-01 | Equibe Technologies | Material handling device with overcenter arms and method for use thereof |
DE69931057T2 (en) | 1998-07-22 | 2006-11-23 | Tokyo Electron Ltd. | TRANSFER ARM |
US6120229A (en) * | 1999-02-01 | 2000-09-19 | Brooks Automation Inc. | Substrate carrier as batchloader |
US6322312B1 (en) | 1999-03-18 | 2001-11-27 | Applied Materials, Inc. | Mechanical gripper for wafer handling robots |
US6840732B2 (en) * | 2000-10-24 | 2005-01-11 | Ulvac, Inc. | Transport apparatus and vacuum processing system using the same |
US6499936B2 (en) * | 2001-02-17 | 2002-12-31 | Yokogawa Electric Corporation | Transfer system |
US6892618B2 (en) * | 2003-08-06 | 2005-05-17 | Chang Chin-Chin | Circular sawing machine having a link mechanism |
CN100404212C (en) * | 2006-03-15 | 2008-07-23 | 北京邮电大学 | Spherical walking robot with telescopic arm |
DE102006018590A1 (en) * | 2006-04-21 | 2007-10-25 | Schaeffler Kg | handling device |
CN101535010B (en) * | 2006-08-11 | 2013-02-27 | 应用材料公司 | Methods and apparatus for a robot wrist assembly |
JP4760675B2 (en) * | 2006-11-09 | 2011-08-31 | 株式会社Ihi | Frogleg arm robot and control method thereof |
US8459140B2 (en) * | 2007-04-18 | 2013-06-11 | Fabworx Solutions, Inc. | Adjustable wrist design for robotic arm |
JP5242345B2 (en) * | 2008-11-07 | 2013-07-24 | 株式会社アルバック | Substrate transfer device |
US20110154929A1 (en) * | 2009-12-30 | 2011-06-30 | United Microelectronics Corp. | Wafer transfer apparatus and shielding mechanism |
JP2017513036A (en) * | 2014-11-14 | 2017-05-25 | マッパー・リソグラフィー・アイピー・ビー.ブイ. | Cargo fixing system and method for transferring a substrate in a lithography system |
US10207345B2 (en) * | 2015-04-17 | 2019-02-19 | Robert Bosch Tool Corporation | Miter saw having an angled glide hinge |
KR101748040B1 (en) * | 2015-11-16 | 2017-06-14 | 한국원자력연구원 | Underwater drive apparatus for neutron transmutation doping apparatus |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3730595A (en) | 1971-11-30 | 1973-05-01 | Ibm | Linear carrier sender and receiver |
US3823836A (en) | 1973-05-22 | 1974-07-16 | Plat General Inc | Vacuum apparatus for handling sheets |
US3974525A (en) | 1974-02-19 | 1976-08-17 | Koninklijke Textielfabrieken | Method of knitting socks having a closed toe |
US4062463A (en) | 1976-05-11 | 1977-12-13 | Machine Technology, Inc. | Automated single cassette load mechanism for scrubber |
US4208159A (en) | 1977-07-18 | 1980-06-17 | Tokyo Ohka Kogyo Kabushiki Kaisha | Apparatus for the treatment of a wafer by plasma reaction |
US4666366A (en) | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
US4730976A (en) | 1983-02-14 | 1988-03-15 | Aeronca Electronics, Inc. | Articulated arm transfer device |
US4909701A (en) | 1983-02-14 | 1990-03-20 | Brooks Automation Inc. | Articulated arm transfer device |
JPH04122589A (en) * | 1990-09-14 | 1992-04-23 | Ulvac Japan Ltd | Articulated conveyor device in vacuum |
US5147175A (en) * | 1991-01-10 | 1992-09-15 | Sony Corporation | Wafer transfer device for a semiconductor device fabricating system |
US5180276A (en) * | 1991-04-18 | 1993-01-19 | Brooks Automation, Inc. | Articulated arm transfer device |
WO1995014555A1 (en) * | 1993-11-22 | 1995-06-01 | Sony Corporation | Multi-joint arm type carrying device |
US5447409A (en) * | 1989-10-20 | 1995-09-05 | Applied Materials, Inc. | Robot assembly |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US629698A (en) * | 1899-02-07 | 1899-07-25 | Ludvic M Miller | Drawer-equalizer. |
US1204276A (en) * | 1915-08-18 | 1916-11-07 | Hi Lo Jack Company | Jack. |
US2580829A (en) * | 1950-01-16 | 1952-01-01 | William J Peck | Automobile jack |
US3522838A (en) * | 1968-04-30 | 1970-08-04 | Respond Inc | Die casting extractor |
US3874525A (en) * | 1973-06-29 | 1975-04-01 | Ibm | Method and apparatus for handling workpieces |
US3921788A (en) * | 1974-05-21 | 1975-11-25 | Macronetics Inc | Processing apparatus for thin disc-like workpieces |
US4139104A (en) * | 1975-07-25 | 1979-02-13 | George Mink | Material handling apparatus |
FR2398347A1 (en) * | 1977-07-19 | 1979-02-16 | Crouzet Sa | ROBOT DEVELOPMENTS |
JPS608890B2 (en) * | 1978-09-24 | 1985-03-06 | 富士エンヂニアリング株式会社 | Automatic loading and unloading device for press work |
US4275978A (en) * | 1979-02-15 | 1981-06-30 | Brooks Norman B | Transport apparatus |
US4507044A (en) * | 1981-12-08 | 1985-03-26 | Zymark Corporation | Robot and control system |
US5431529A (en) * | 1992-12-28 | 1995-07-11 | Brooks Automation, Inc. | Articulated arm transfer device |
-
1996
- 1996-12-12 KR KR10-1998-0704515A patent/KR100430885B1/en not_active IP Right Cessation
- 1996-12-12 JP JP52224097A patent/JP4231552B2/en not_active Expired - Lifetime
- 1996-12-12 AU AU12904/97A patent/AU1290497A/en not_active Abandoned
- 1996-12-12 WO PCT/US1996/019903 patent/WO1997021525A1/en not_active Application Discontinuation
- 1996-12-12 EP EP96943745A patent/EP0866742A4/en not_active Withdrawn
-
1997
- 1997-04-09 US US08/833,768 patent/US5743704A/en not_active Expired - Lifetime
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3730595A (en) | 1971-11-30 | 1973-05-01 | Ibm | Linear carrier sender and receiver |
US3823836A (en) | 1973-05-22 | 1974-07-16 | Plat General Inc | Vacuum apparatus for handling sheets |
US3974525A (en) | 1974-02-19 | 1976-08-17 | Koninklijke Textielfabrieken | Method of knitting socks having a closed toe |
US4062463A (en) | 1976-05-11 | 1977-12-13 | Machine Technology, Inc. | Automated single cassette load mechanism for scrubber |
US4208159A (en) | 1977-07-18 | 1980-06-17 | Tokyo Ohka Kogyo Kabushiki Kaisha | Apparatus for the treatment of a wafer by plasma reaction |
US4730976A (en) | 1983-02-14 | 1988-03-15 | Aeronca Electronics, Inc. | Articulated arm transfer device |
US4666366A (en) | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
US4909701A (en) | 1983-02-14 | 1990-03-20 | Brooks Automation Inc. | Articulated arm transfer device |
US5447409A (en) * | 1989-10-20 | 1995-09-05 | Applied Materials, Inc. | Robot assembly |
JPH04122589A (en) * | 1990-09-14 | 1992-04-23 | Ulvac Japan Ltd | Articulated conveyor device in vacuum |
US5147175A (en) * | 1991-01-10 | 1992-09-15 | Sony Corporation | Wafer transfer device for a semiconductor device fabricating system |
US5180276A (en) * | 1991-04-18 | 1993-01-19 | Brooks Automation, Inc. | Articulated arm transfer device |
WO1995014555A1 (en) * | 1993-11-22 | 1995-06-01 | Sony Corporation | Multi-joint arm type carrying device |
Non-Patent Citations (1)
Title |
---|
See also references of EP0866742A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7201078B2 (en) | 2003-02-07 | 2007-04-10 | Samsung Electronics Co., Ltd. | Transporting apparatus |
KR20130073834A (en) * | 2011-12-23 | 2013-07-03 | 팹웍스 솔루션스 인코포레이티드 | Extended wrist assembly for robotic arm |
KR102065790B1 (en) | 2011-12-23 | 2020-01-13 | 팹웍스 솔루션스 인코포레이티드 | Extended wrist assembly for robotic arm |
Also Published As
Publication number | Publication date |
---|---|
AU1290497A (en) | 1997-07-03 |
EP0866742A1 (en) | 1998-09-30 |
JP4231552B2 (en) | 2009-03-04 |
JP2000501997A (en) | 2000-02-22 |
US5743704A (en) | 1998-04-28 |
EP0866742A4 (en) | 1999-03-03 |
KR19990072165A (en) | 1999-09-27 |
KR100430885B1 (en) | 2004-06-16 |
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