WO1996039547A3 - Multiple source deposition of shape-memory alloy thin films - Google Patents

Multiple source deposition of shape-memory alloy thin films Download PDF

Info

Publication number
WO1996039547A3
WO1996039547A3 PCT/IB1996/000766 IB9600766W WO9639547A3 WO 1996039547 A3 WO1996039547 A3 WO 1996039547A3 IB 9600766 W IB9600766 W IB 9600766W WO 9639547 A3 WO9639547 A3 WO 9639547A3
Authority
WO
WIPO (PCT)
Prior art keywords
shape
films
alloy thin
actuation
thin films
Prior art date
Application number
PCT/IB1996/000766
Other languages
French (fr)
Other versions
WO1996039547A2 (en
Inventor
Peter A Krulevitch
Philip B Ramsey
Daniel M Makowiecki
Abraham P Lee
George C Johnson
M Allen Northrup
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Publication of WO1996039547A2 publication Critical patent/WO1996039547A2/en
Publication of WO1996039547A3 publication Critical patent/WO1996039547A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details
    • H01H61/0107—Details making use of shape memory materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B34/00—Computer-aided surgery; Manipulators or robots specially adapted for use in surgery
    • A61B34/70—Manipulators specially adapted for use in surgery
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B34/00—Computer-aided surgery; Manipulators or robots specially adapted for use in surgery
    • A61B34/70—Manipulators specially adapted for use in surgery
    • A61B34/72—Micromanipulators
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/006—Resulting in heat recoverable alloys with a memory effect
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/065—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like using a shape memory element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay

Abstract

A method for simultaneously and controllably depositing multiple metals to create thin film alloys that have unique physical properties. In particular, the method involves the deposition of multiple alloy thin films with shape-memory effects, such as Ni-Ti-Cu. The Ni-Ti-Cu films were mixed-sputter deposited onto heated silicon substrates from individually powered Ni, Ti, and Cu targets, providing increased flexibility in film stoichiometry, and thus allowing for optimization of the shape-memory properties. The multiple metal films have particular application for micro actuators, such that actuation can be performed on miniature/micro devices with dimensions as small as 5νm x 5νm x 2νm, and can effectively operate in 250νm diameter areas. One application is for actuation of catheter/endoscopic-based medical devices for minimally-invasive surgical or therapeutic procedures. Another application is for use in miniaturized valves and pumps, or for cleaning of miniature pipes.
PCT/IB1996/000766 1995-06-01 1996-05-29 Multiple source deposition of shape-memory alloy thin films WO1996039547A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US45805195A 1995-06-01 1995-06-01
US08/458,051 1995-06-01

Publications (2)

Publication Number Publication Date
WO1996039547A2 WO1996039547A2 (en) 1996-12-12
WO1996039547A3 true WO1996039547A3 (en) 1997-02-20

Family

ID=23819160

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB1996/000766 WO1996039547A2 (en) 1995-06-01 1996-05-29 Multiple source deposition of shape-memory alloy thin films

Country Status (1)

Country Link
WO (1) WO1996039547A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11845081B2 (en) 2007-07-13 2023-12-19 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US11959126B2 (en) 2006-03-24 2024-04-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6596132B1 (en) 1999-09-22 2003-07-22 Delphi Technologies, Inc. Production of ternary shape-memory alloy films by sputtering using a hot pressed target
US6592724B1 (en) 1999-09-22 2003-07-15 Delphi Technologies, Inc. Method for producing NiTiHf alloy films by sputtering
EP1239151A1 (en) * 2001-03-05 2002-09-11 Abb Research Ltd. Actuator
US7829025B2 (en) 2001-03-28 2010-11-09 Venture Lending & Leasing Iv, Inc. Systems and methods for thermal actuation of microfluidic devices
US6454913B1 (en) 2001-07-12 2002-09-24 Delphi Technologies, Inc. Process for deposition of sputtered shape memory alloy films
US6832478B2 (en) * 2003-04-09 2004-12-21 Medtronic, Inc. Shape memory alloy actuators
US7690621B2 (en) 2003-04-15 2010-04-06 Board Of Trustees Operating Michigan State University Prestrained thin-film shape memory actuator using polymeric substrates
EP2402089A1 (en) 2003-07-31 2012-01-04 Handylab, Inc. Processing particle-containing samples
US8852862B2 (en) 2004-05-03 2014-10-07 Handylab, Inc. Method for processing polynucleotide-containing samples
US11806718B2 (en) 2006-03-24 2023-11-07 Handylab, Inc. Fluorescence detector for microfluidic diagnostic system
US7998708B2 (en) 2006-03-24 2011-08-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
EP2001990B1 (en) 2006-03-24 2016-06-29 Handylab, Inc. Integrated system for processing microfluidic samples, and method of using same
WO2008060604A2 (en) 2006-11-14 2008-05-22 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
EP3741869A1 (en) 2007-07-13 2020-11-25 Handylab, Inc. Polynucleotide capture materials and methods of using same
US8182763B2 (en) 2007-07-13 2012-05-22 Handylab, Inc. Rack for sample tubes and reagent holders
US8105783B2 (en) 2007-07-13 2012-01-31 Handylab, Inc. Microfluidic cartridge
US8287820B2 (en) 2007-07-13 2012-10-16 Handylab, Inc. Automated pipetting apparatus having a combined liquid pump and pipette head system
ES2769028T3 (en) 2011-04-15 2020-06-24 Becton Dickinson Co Real-time scanning microfluidic thermocycler
US20150004432A1 (en) * 2011-10-28 2015-01-01 Korea Institute Of Machinery & Materials Titanium-nickel alloy thin film, and preparation method of titanium-nickel alloy thin film using multiple sputtering method
EP2773892B1 (en) 2011-11-04 2020-10-07 Handylab, Inc. Polynucleotide sample preparation device
CN103160707A (en) * 2011-12-13 2013-06-19 西安赛特金属材料开发有限公司 Titanium-nickel-based shape memory alloy material used for fire-fighting automatic temperature control element
RU2658773C2 (en) 2012-02-03 2018-06-22 Бектон, Дикинсон Энд Компани System and method of implementation of automated assays on plurality of biological samples
CN103007361B (en) * 2012-12-21 2015-07-01 先健科技(深圳)有限公司 Medical apparatus coating and preparation method thereof and medical apparatus containing costing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0230652A1 (en) * 1985-12-30 1987-08-05 International Business Machines Corporation Apparatus for creating a vacuum deposited alloy or composition and application of such an apparatus
US4922462A (en) * 1984-12-28 1990-05-01 Kabushiki Kaisha Toshiba Reversible memory structure for optical reading and writing and which is capable of erasure
US5061914A (en) * 1989-06-27 1991-10-29 Tini Alloy Company Shape-memory alloy micro-actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4922462A (en) * 1984-12-28 1990-05-01 Kabushiki Kaisha Toshiba Reversible memory structure for optical reading and writing and which is capable of erasure
EP0230652A1 (en) * 1985-12-30 1987-08-05 International Business Machines Corporation Apparatus for creating a vacuum deposited alloy or composition and application of such an apparatus
US5061914A (en) * 1989-06-27 1991-10-29 Tini Alloy Company Shape-memory alloy micro-actuator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
SCRIPTIA METALLURGICA, 1991, Vol. 25, CHANG et al., "Elevation of Premartensitic Transformation Temperature by (Ni+Cu)2Ti Precipitation in Sputtered Ni (1-x)TiCu(x) Thin Films", pages 2079-2084. *
SHAPE MEMORY & SUPERELASTIC TECHNOLOGIES, ASILOMAR CONFERENCE CENTER, PACIFIC GROVE, CA, 1994, HUMBEECK et al., "The Present State of Shape Memory Materials and Barriers Still to be Overcome", pages 1-6. *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11959126B2 (en) 2006-03-24 2024-04-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US11845081B2 (en) 2007-07-13 2023-12-19 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples

Also Published As

Publication number Publication date
WO1996039547A2 (en) 1996-12-12

Similar Documents

Publication Publication Date Title
WO1996039547A3 (en) Multiple source deposition of shape-memory alloy thin films
US11213919B2 (en) Preparation of antimicrobial surface for medical devices
US6790298B2 (en) Method of fabrication of free standing shape memory alloy thin film
CA2456697C (en) Self-supporting metallic implantable grafts, compliant implantable medical devices and methods of making same
EP1733745A3 (en) Radioactively coated devices
EP1685861A3 (en) Stent coating for eluting medication
ES2119899T3 (en) ANTIMICROBIAL COATING FOR MEDICAL DEVICES.
WO2007033282A3 (en) Methods of making shape memory films by chemical vapor deposition and shape memory devices made thereby
EP1795215A3 (en) Absorbable stent comprising coating for controlling degradation and maintaining pH neutrality
WO2004030678A3 (en) Polymer compositions containing bioactive agents and methods for their use
WO2004056403A3 (en) Method for making medical devices having antimicrobial coatings thereon
AU2002321909A1 (en) Medical grafts having plurality of microperforations
WO2004037310A3 (en) Surface coating comprising bioactive compound
CN103031523B (en) The preparation method of the cupric compound coating on a kind of metal parts of medicine equipment and medicine equipment
WO2007048825A3 (en) A method for production of a coated endovascular device
JP2008522021A5 (en)
EP3806773A1 (en) Dental appliance with metal oxide coating
WO2007087269A3 (en) Antimicrobial coating methods
TW201239113A (en) Antibacterial article and method for making the same
WO2003015217A3 (en) Electric contact
EP1545379A1 (en) Dental braces and methods for coating
JP2008502373A5 (en)
DE4328999C2 (en) Medical device and method for silvering it
CN102453852A (en) Plated member and preparation method thereof
CN101490303A (en) Ultraviolet activated antimicrobial surfaces

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): CA JP KR SG

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

AK Designated states

Kind code of ref document: A3

Designated state(s): CA JP KR SG

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase