WO1996027814A1 - Laser scanning system with reflective optics - Google Patents
Laser scanning system with reflective optics Download PDFInfo
- Publication number
- WO1996027814A1 WO1996027814A1 PCT/US1996/003208 US9603208W WO9627814A1 WO 1996027814 A1 WO1996027814 A1 WO 1996027814A1 US 9603208 W US9603208 W US 9603208W WO 9627814 A1 WO9627814 A1 WO 9627814A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mirror
- laser beam
- scanning system
- mirrors
- optical path
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/124—Details of the optical system between the light source and the polygonal mirror
Definitions
- This invention relates to laser equipment which can both scan a laser beam and adjust the optical path to achieve a variable focal length of the laser beam.
- Laser scanning systems typically utilize galvanometer motors to change the angle of scanning mirrors. Usually the X and Y direction is scanned by separate motors. In many applications a laser beam is scanned on a work piece. To achieve a high power density, the laser beam is usually focused on this work piece. Specialized lens have been developed to achieve a good focus on a flat surface work piece even at a high transmission angle. However, some applications require that the laser beam can be independently focused to accommodate a contoured surface. Normally this focusing is accomplished by translating one or more lenses in an optical system to achieve a variable focal length. Unfortunately, high powered C0 2 lasers can cause a thermal distortion in lenses which degrades the quality of the laser beam. Furthermore, lenses are not as durable as metal mirrors for high power laser beam applications.
- the present invention is a laser scanning system with reflective optics. To achieve an adjustable focal length on the scanned laser beam it is necessary to produce an optical path length change between two mirrors which exhibit optical power (curved mirror surfaces) . To achieve this, two additional flat mirrors oriented perpendicular to each other, are placed in the optical path between the curved mirrors. A displacement of the two perpendicular mirrors in a predetermined direction will change the optical path length between the curved mirrors and in turn produce an adjustable focus in the scanned beam without producing additional deviation to the scanned beam.
- Fig. 1 is a perspective view of an all reflective laser scanning system.
- Fig. 2 is a top view of an all reflective laser scanning system illustrating the optical components prior to the scanning mirrors.
- Fig. 1 shows a perspective view of an all reflective scanning system 10.
- a laser beam 20 propagating in the direction of arrow 28 strikes a curved reflector 11.
- reflector 11 is preferably an off axis parabola which focuses laser beam 20 to a focal point 21.
- This laser beam then strikes flat mirrors 12 and 13.
- the laser beam then strikes curved mirror 14.
- This curved mirror 14 is preferably an off axis ellipse.
- the laser beam then proceeds to strike scanning mirrors 15 and 16.
- These scanning mirrors can be rotated to steer the beam.
- mirror 15 can be rotated around the axis 25 and mirror 16 can be rotated around axis 26.
- a single scanning mirror could also be used.
- FIG. 1 illustrates the laser beam coming to a focus at three alternative focal spots designated 22A, 22B, or 22C. These are just used for illustration.
- the laser beam would only strike one point at a time.
- the actual focus point (22) will e referred to as the "external focus" because is lies outside the optical components.
- work piece 30 is illustrated as being a generally flat plate. To bring a laser beam to a focus, on even a flat surface, requires a focal length adjustment to compensate for the path length change introduced by a change in the deflection angle. If the work piece 30 had a contoured surface, the range of the focal length adjustments would be even greater.
- mirrors 12 and 13 are approximately perpendicular to each other and mounted on base 17.
- Fig. 2 is the top view of a portion of the scanning system depicted in Fig. 1.
- laser 19 can be seen.
- laser beam 20 is shown to have a ray 20A which will be referred to as the "center line optical path”.
- mirrors 12 and 13 as well as base 17 are shown in two different possible positions. These two positions are differentiated by adding the letters N or M to the numbers 12, 13 and 17.
- Fig. 2 also shows point 23 which is defined as being the point at which the center line optical path 20A strikes mirror 14. Also, the distance from the focal point 21 to mirror 12 along the center line optical path is shown as being distance B. Furthermore, the center line optical path distance between mirror 13 and mirror 14 is defined as being distance D. The center line optical path between mirrors 12N and 13N or 12 M and 13M is shown as being distance C. Finally, the center line optical path between the fourth mirror (point 23) and the external focal point 22M is shown being distance S(M) . This focal point occurs when the mirror positions 12M and 13M are used.
- the focal point 22N is obtained at a distance of S (N) from point 23.
- the distance between focal points 22N and 22M [S(N)-S(M)] is not shown to scale when compared to displacement distance E depicted in Fig. 2.
- one of the advantages of placing the folding mirrors 12 and 13 in the optical path between mirror 11 and mirror 14, is that this location produces the largest possible change in focal length [S(N)-S(M)] for the smallest change in distance E.
- scanning mirrors 15 and 16 are shown in Fig. 1 but not shown in Fig. 2.
- the center line optical path length between focus 21 and point 23 will be referred to as "s".
- Concave mirror 14 has an effective focal length "F" which is defined as being the focal length of a mirror when focusing parallel light. When the incident light is not parallel then the formula is:
- the object of this invention is to prevent the focus adjustment from introducing a substantial scanning of this predetermined portion of the laser beam.
- the angle steering introduced by a change in the external focus should be kept less than 3 milliradians for each 10% change in distance S.
- Properly translating mirrors 12 and 13 in direction 27 (Fig. 1) while maintaining the perpendicular orientation will achieve this goal.
- mirror 11 is a concave off axis parabola.
- mirror 11 is a convex off axis parabola. If this was the case, then the rays reflecting off mirror 11 would appear to be diverging from mirror 11. These diverging rays would appear to come a virtual focus point behind mirror 11 and distance B would be measured from that virtual focus point. Focal point 21 would then be defined as this virtual focal point. Therefore, in either case it can be said that mirror 11 is a curved surface.
- Mirror 14 must always be a concave curved surface in order to function properly. It should also be understood that the preferred curvature for mirror 14 is an off axis ellipse.
- mirror 14 can be referred to as a concave curved surface.
- mirror 11 has been referred to as an off axis parabola. This is the preferred surface is laser beam 20 is generally parallel as illustrated. An off axis ellipse would be the preferred surface if laser beam 20 was either convergent or divergent.
- other curved surfaces such as a spherical surface could also produce acceptable results.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8527069A JPH11501738A (en) | 1995-03-06 | 1996-03-06 | Laser scanner with reflective optics |
DE69636668T DE69636668T2 (en) | 1995-03-06 | 1996-03-06 | LASER DEFLECTION SYSTEM WITH REFLECTION OPTICS |
EP96908730A EP0813696B8 (en) | 1995-03-06 | 1996-03-06 | Laser scanning system with reflective optics |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/398,738 | 1995-03-06 | ||
US08/398,738 US5561544A (en) | 1995-03-06 | 1995-03-06 | Laser scanning system with reflecting optics |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996027814A1 true WO1996027814A1 (en) | 1996-09-12 |
Family
ID=23576607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/003208 WO1996027814A1 (en) | 1995-03-06 | 1996-03-06 | Laser scanning system with reflective optics |
Country Status (8)
Country | Link |
---|---|
US (2) | US5561544A (en) |
EP (1) | EP0813696B8 (en) |
JP (1) | JPH11501738A (en) |
AT (1) | ATE344469T1 (en) |
DE (1) | DE69636668T2 (en) |
ES (1) | ES2276399T3 (en) |
PT (1) | PT813696E (en) |
WO (1) | WO1996027814A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9182595B2 (en) | 2011-06-02 | 2015-11-10 | Nec Corporation | Image display devices |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19654210C2 (en) * | 1996-12-24 | 1999-12-09 | Leica Microsystems | Optical arrangement for scanning a beam in two essentially perpendicular axes |
US6078420A (en) * | 1998-06-24 | 2000-06-20 | Optical Engineering, Inc. | Hole-coupled laser scanning system |
DE10033549A1 (en) * | 2000-07-11 | 2002-01-24 | Leica Microsystems | Optical structure for deflecting a beam of light in two directions lying perpendicular to each other has two mirrors each rotated by a rotating drive around x/y axes perpendicular to each other. |
KR100619365B1 (en) * | 2003-11-03 | 2006-09-12 | 삼성전기주식회사 | Scanning apparatus using diffraction multi-beam |
JP4299185B2 (en) * | 2004-04-27 | 2009-07-22 | 株式会社ディスコ | Laser processing equipment |
EP1695787A1 (en) * | 2005-02-25 | 2006-08-30 | Trumpf Laser- und Systemtechnik GmbH | Laser working method using a plurality of working stations |
JP2008203434A (en) * | 2007-02-19 | 2008-09-04 | Fujitsu Ltd | Scanning mechanism, method of machining material to be machined and machining apparatus |
US8294062B2 (en) * | 2007-08-20 | 2012-10-23 | Universal Laser Systems, Inc. | Laser beam positioning systems for material processing and methods for using such systems |
GB0809003D0 (en) * | 2008-05-17 | 2008-06-25 | Rumsby Philip T | Method and apparatus for laser process improvement |
DE102013226614A1 (en) * | 2013-12-19 | 2015-06-25 | Osram Gmbh | lighting device |
JP6399913B2 (en) | 2014-12-04 | 2018-10-03 | 株式会社ディスコ | Wafer generation method |
JP6358941B2 (en) | 2014-12-04 | 2018-07-18 | 株式会社ディスコ | Wafer generation method |
JP6391471B2 (en) | 2015-01-06 | 2018-09-19 | 株式会社ディスコ | Wafer generation method |
JP6395633B2 (en) | 2015-02-09 | 2018-09-26 | 株式会社ディスコ | Wafer generation method |
JP6395632B2 (en) | 2015-02-09 | 2018-09-26 | 株式会社ディスコ | Wafer generation method |
JP6425606B2 (en) | 2015-04-06 | 2018-11-21 | 株式会社ディスコ | Wafer production method |
JP6494382B2 (en) | 2015-04-06 | 2019-04-03 | 株式会社ディスコ | Wafer generation method |
JP6429715B2 (en) | 2015-04-06 | 2018-11-28 | 株式会社ディスコ | Wafer generation method |
MX2017014307A (en) * | 2015-05-08 | 2018-06-28 | Ikergune A I E | Method and apparatus for heat treatment of a ferrous material using an energy beam. |
JP6472333B2 (en) | 2015-06-02 | 2019-02-20 | 株式会社ディスコ | Wafer generation method |
JP6482423B2 (en) * | 2015-07-16 | 2019-03-13 | 株式会社ディスコ | Wafer generation method |
JP6472347B2 (en) | 2015-07-21 | 2019-02-20 | 株式会社ディスコ | Thinning method of wafer |
JP6482425B2 (en) | 2015-07-21 | 2019-03-13 | 株式会社ディスコ | Thinning method of wafer |
JP6690983B2 (en) | 2016-04-11 | 2020-04-28 | 株式会社ディスコ | Wafer generation method and actual second orientation flat detection method |
KR102603393B1 (en) * | 2016-12-06 | 2023-11-17 | 삼성디스플레이 주식회사 | Laser processing apparatus |
JP6858587B2 (en) | 2017-02-16 | 2021-04-14 | 株式会社ディスコ | Wafer generation method |
US11904620B2 (en) * | 2017-11-22 | 2024-02-20 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser marking system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4232960A (en) * | 1979-02-21 | 1980-11-11 | Xerox Corporation | Scanning system |
US4388651A (en) * | 1981-05-28 | 1983-06-14 | Lincoln Laser Co. | Method and apparatus for generating a scanned optical output signal |
US5184012A (en) * | 1991-12-26 | 1993-02-02 | Olympus Optical Co., Ltd. | Optical scanning apparatus with axis deviation correction |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4160939A (en) * | 1977-09-13 | 1979-07-10 | Xerox Corporation | Motor speed control system |
US4461947A (en) | 1982-08-24 | 1984-07-24 | Allied Corporation | Rotating laser beam with coincident gas jet |
US4469931A (en) | 1982-09-13 | 1984-09-04 | Macken John A | Laser assisted saw device |
US4755999A (en) | 1985-03-25 | 1988-07-05 | Macken John A | Laser apparatus utilizing a magnetically enhanced electrical discharge |
FR2580870B1 (en) * | 1985-04-23 | 1987-09-25 | Arnaud Jean | APPARATUS FOR REGULATING CHARACTERISTICS OF A LIGHT BEAM, IN PARTICULAR OF A POWER LASER |
DE3709351A1 (en) * | 1987-03-21 | 1988-09-29 | Heraeus Gmbh W C | RADIATION GUIDE OPTICS FOR LASER RADIATION |
US4941731A (en) | 1987-07-01 | 1990-07-17 | John Macken | Corner cube utilizing generally spherical surfaces |
US4921338A (en) | 1989-05-09 | 1990-05-01 | Macken John A | Corrective optics for rectangular laser beams |
US5206763A (en) | 1989-05-09 | 1993-04-27 | Macken John A | Corrective optics for rectangular laser beams |
US5089683A (en) * | 1990-09-18 | 1992-02-18 | Union Carbide Coatings Service Technology Corporation | Device for producing a constant length laser beam and method for producing it |
JP2736182B2 (en) | 1991-02-28 | 1998-04-02 | ファナック株式会社 | Laser device and laser welding method |
US5142119A (en) | 1991-03-14 | 1992-08-25 | Saturn Corporation | Laser welding of galvanized steel |
US5155323A (en) | 1991-05-16 | 1992-10-13 | John Macken | Dual focus laser welding |
US5173796A (en) * | 1991-05-20 | 1992-12-22 | Palm Steven G | Three dimensional scanning system |
US5237149A (en) | 1992-03-26 | 1993-08-17 | John Macken | Laser machining utilizing a spacial filter |
US5274492A (en) * | 1992-07-02 | 1993-12-28 | Mahmoud Razzaghi | Light spot size and shape control for laser projector |
JPH0679484A (en) | 1992-07-14 | 1994-03-22 | Mitsubishi Electric Corp | Laser welding method |
US5528613A (en) | 1993-04-12 | 1996-06-18 | Macken; John A. | Laser apparatus utilizing a magnetically enhanced electrical discharge with transverse AC stabilization |
DE9407288U1 (en) * | 1994-05-02 | 1994-08-04 | Trumpf Gmbh & Co | Laser cutting machine with focus position adjustment |
-
1995
- 1995-03-06 US US08/398,738 patent/US5561544A/en not_active Ceased
-
1996
- 1996-03-06 ES ES96908730T patent/ES2276399T3/en not_active Expired - Lifetime
- 1996-03-06 JP JP8527069A patent/JPH11501738A/en active Pending
- 1996-03-06 AT AT96908730T patent/ATE344469T1/en active
- 1996-03-06 WO PCT/US1996/003208 patent/WO1996027814A1/en active IP Right Grant
- 1996-03-06 PT PT96908730T patent/PT813696E/en unknown
- 1996-03-06 EP EP96908730A patent/EP0813696B8/en not_active Expired - Lifetime
- 1996-03-06 DE DE69636668T patent/DE69636668T2/en not_active Expired - Lifetime
-
1998
- 1998-08-19 US US09/136,710 patent/USRE38165E1/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4232960A (en) * | 1979-02-21 | 1980-11-11 | Xerox Corporation | Scanning system |
US4388651A (en) * | 1981-05-28 | 1983-06-14 | Lincoln Laser Co. | Method and apparatus for generating a scanned optical output signal |
US5184012A (en) * | 1991-12-26 | 1993-02-02 | Olympus Optical Co., Ltd. | Optical scanning apparatus with axis deviation correction |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9182595B2 (en) | 2011-06-02 | 2015-11-10 | Nec Corporation | Image display devices |
Also Published As
Publication number | Publication date |
---|---|
EP0813696A4 (en) | 1998-10-14 |
EP0813696A1 (en) | 1997-12-29 |
ES2276399T3 (en) | 2007-06-16 |
ATE344469T1 (en) | 2006-11-15 |
EP0813696B1 (en) | 2006-11-02 |
DE69636668T2 (en) | 2007-09-06 |
PT813696E (en) | 2007-02-28 |
USRE38165E1 (en) | 2003-07-01 |
JPH11501738A (en) | 1999-02-09 |
EP0813696B8 (en) | 2007-01-17 |
DE69636668D1 (en) | 2006-12-14 |
US5561544A (en) | 1996-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5561544A (en) | Laser scanning system with reflecting optics | |
US8139294B2 (en) | Techniques for steering an optical beam | |
US6875951B2 (en) | Laser machining device | |
KR100206095B1 (en) | Method and device for focusing laser beam | |
EP1090321B1 (en) | Hole-coupled laser scanning system | |
JPH0727125B2 (en) | Optical scanning device | |
JPH1096859A (en) | Optical structure | |
JPH07199109A (en) | Raster scanning system | |
US5004311A (en) | Beam scanning method and apparatus | |
US5828481A (en) | Mid-objective laser scanner | |
US3873180A (en) | Light beam scanning system with scan angle demagnification | |
US11112615B2 (en) | Device and method for the generation of a double or multiple spot in laser material processing | |
US4643516A (en) | Laser beam scanning apparatus | |
US7297898B2 (en) | Laser processing machine | |
US4953926A (en) | Scanning optical system for use in a laser beam printer | |
JP3528101B2 (en) | Scanning system | |
JP3003065B2 (en) | Optical scanning device | |
RU2049629C1 (en) | Laser manufacturing installation | |
JPH02100014A (en) | Astigmatism compensation optical system | |
JPH01108519A (en) | Luminous flux adjusting method for scan type optical device | |
JPH07113981A (en) | Optical scanner | |
JPH0580269A (en) | Light beam scanning device | |
EP0835714A1 (en) | Laser focusing unit for laser beam devices | |
JP2002318360A (en) | Optical element for synthesizing beams, method for synthesizing beams, light source device, and multibeam scanner | |
JPH04212121A (en) | Optical scanner |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1996908730 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref country code: JP Ref document number: 1996 527069 Kind code of ref document: A Format of ref document f/p: F |
|
WWP | Wipo information: published in national office |
Ref document number: 1996908730 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1996908730 Country of ref document: EP |