WO1996015450A1 - A partitioned microelectronic device array - Google Patents
A partitioned microelectronic device array Download PDFInfo
- Publication number
- WO1996015450A1 WO1996015450A1 PCT/US1995/014589 US9514589W WO9615450A1 WO 1996015450 A1 WO1996015450 A1 WO 1996015450A1 US 9514589 W US9514589 W US 9514589W WO 9615450 A1 WO9615450 A1 WO 9615450A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- array
- well
- channel
- wells
- substrate
- Prior art date
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
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Definitions
- This invention relates to a system comprising a partitioned microelectronic and fluidic array. More particularly, this invention relates to a system including an array of microelectronic and fluid transfer devices for carrying out various processes, including syntheses, screening and chemical diagnostic assays, in parallel, and method of making the array.
- Another step forward is the ability to separate materials in a microchannel, and the ability to move fluids through such microchannels.
- electro-kinetic processes such as electrophoresis or electro-osmosis. Fluids may be propelled through very small channels by electro-osmotic forces.
- An electro-osmotic force is built up in the channel via surface charge buildup by means of an external voltage that can "repel" fluid and cause flow. This surface charge and external voltage produces an electro-kinetic cu ⁇ ent that results in fluid flow along the channel.
- electro-kinetic processes are the basis for a device is described by Pace in US Patent 4,908,112 for example.
- the system of the invention comprises a device array of micron sized wells and connecting channels in a substrate that interfaces with a station for dispensing fluids to and collecting fluids from, the array, and for performing electro-optic measurements of material in the wells.
- the station is also connected to control apparatus means to control the fluid flow to the channels and wells and to collect measurement data from the substrate.
- the above system can be used to perform various clinical diagnostics, such as assays for DNA in parallel, using the known protocols of the polymerase chain reaction (PCR), primers and probe technology for DNA assay.
- the above system can be used for immunoassays for antibodies or antigens in parallel for screening purposes.
- the synthesis of a series of chemical compounds, or a series of peptides or oligonucleotides can be performed in parallel.
- Each well in the array is designed so to accomplish a selected task in appropriate modules on a substrate, each module containing the number of wells required to complete each task.
- the wells are connected to each other, to a sample source and to a source of reagent fluids by means of connecting microchannels.
- This capability permits broad based clinical assays for disease not possible by sequential assay, permits improvement in statistics of broad based clinical assays such as screening of antibodies because of the parallelism, permits a reduction in costs and an improvement in the speed of testing, and permits improved patient treatments for rapidly advancing disease.
- the array is formed in a suitable dielectric substrate and the channels and wells are formed therein using maskless semiconductor patterning techniques.
- the station and control means such as a computer, use existing technology that includes commercially available apparatus.
- the present device array uses active processing to move fluids across the array, reducing the time required for synthesis and screening. Further, large biopolymers of all types can be synthesized and processed while maintaining high purity of the synthesized compounds.
- the present microlaboratory arrays may be fully automated, enabling the rapid transfer of samples, precursors and other movement of fluids into the array, from one well to another well, and to enable the measurement of assays and the complete control of processing parameters such as temperature control. T he teachings of the present invention can be readily understood by considering the following detailed description in conjunction with the accompanying drawing, in which:
- Fig. IA is an exploded schematic diagram of the parts of the system of the invention adapted for performing clinical assays.
- Fig. 3 is an exploded cross sectional view of the optical transmission and detection system of the invention.
- Fig. 4A is a cross sectional view of a well embodiment of a microlaboratory disc of the invention.
- Fig. 4B is a cross sectional view of another well embodiment of a microlaboratory disc of the invention.
- Fig. 5A is a cross sectional view of a portion of a module of a microlaboratory disc illustrating devices in typical wells.
- Fig. 5B is a cross sectional view of a portion of a module of a microlaboratory disc covered with a cover plate.
- Fig. 6A is a cross sectional view of a microlaboratory disc illustrating additional wells having preformed devices therein together with an optical system interface.
- Figs. 6B and 6C illustrate a valve situate in a channel adjacent to a well in the open and closed positions respectively.
- Fig. 7A is an exploded schematic view of another embodiment of the present invention adapted to perform immunological assays.
- Fig. 7B is a top view illustrating a module on the microlaboratory disc of Fig. 7 A.
- Fig. 7C is a cross sectional view of a control means for moving fluids in the channels and from one well to another.
- Fig. 8 is a schematic view of another embodiment of a microlaboratory array suitable for carrying out the parallel synthesis of proteins and oligonucleotides.
- Fig. 9 is a schematic view illustrating a modified station for the system of Fig. 8.
- Fig. 10 is a schematic view of a further embodiment of a microlaboratory array suitable for carrying out the synthesis of a large number of small molecules in parallel.
- Figs. 11A, 11B and 11C are cross sectional views illustrating the steps needed to form cross over channels in the substrate.
- Fig. 1 ID is a top view of a cross-over channel in the substrate.
- Fig. 12 is a top view of a channel "gate" electrode to control flow in a channel by electro-osmosis.
- Fig. IA illustrates the parts of an illustrative system of the invention configured to perform DNA screening diagnostics.
- the system of Fig. LA includes a computer 10, electrically connected via line 11 to peripheral apparatus, such as a modem or printer 12, which computer 10 is programmed to give instructions to a microlaboratory disc 14 and to record test results obtained therefrom.
- the computer 10 is electrically connected to a station 16 via line 15.
- the station 16 includes a microlaboratory disc support 18, support tubing 20 for loading test materials and reagents onto the microlaboratory disc 14, pumps 22 for moving fluids to particular destinations on the disk 14, one or more light sources 24, an optical fiber 25 and one or more light detectors 26.
- the optical fiber 25 is operative to transmit light from the light source 24 to the detector 26.
- One or more containers 28 for waste fluids and the like are also housed in the station 16.
- a small volume of a fluid to be tested is loaded into the system via a loading system 30.
- the system 30 may house one or more capillary tubes 32 containing a sample which is connected to a loading capillary channel 34 etched into the surface of the microlaboratory disc 14.
- the loading capillary tube 32 is inserted into the capillary loading channel 34 horizontally.
- the sample is moved into the capillary loading channel 34 and the fluid sample is then moved to a first well 36 on the disc 14.
- a loading channel 50 for vertical insertion into the loading channel 34 can also be used to load the sample.
- FIG. 2 illustrate a particular module comprising a plurality of wells 36, 40, 42 and 44 connected by a channel 38, shown by a dashed line, on a microlaboratory disc 14 of the invention.
- Each module is connected to a well 46 that collects excess or waste fluids from the respective module. These waste fluids are collected and moved to the waste containers 28 in the station 16.
- the sample is treated sequentially in a series of wells including first well 36.
- first well 36 the whole blood sample is transferred from the capillary loading channel 34, filtered and lysed to separate the white and red corpuscles, and the DNA is isolated from the white blood cells.
- the DNA sample is then moved out of the first well 36 through a connecting channel 38 that connects all of the wells of a single module, and into a second well 40.
- the DNA is separated into single strains and , amplified using the well known PCR method.
- the treated sample is then moved out of the second well 40 via the connecting channel 38 and into a third well 42.
- the DNA is assayed by known probe hybridization techniques.
- the DNA assay is detected and evaluated in the fourth well 44.
- the determination of DNA in a particular blood sample is performed in a series of four wells connected by a channel.
- excess reagents and the like are collected in the fifth well 46 that is common to all of the modules in the microlaboratory array 14, and is transferred into the waste collection system 28 of the station 16.
- the combination of a loading channel 34 or 50, the wells 36, 40, 42, 44 and 46 and the connecting channel 38 make up one module 48 on the test microlaboratory disc 14.
- a single module on a microlaboratory disc 14 is shown in top view in Fig. IB within the dashed lines. As will be explained hereinbelow, a plurality of modules are formed in the microlaboratory disc 14 so that tests can be performed on a large number of the modules 48 in parallel.
- Figs. IA, IB and Fig. 2 lends itself to the detection of pathogenic bacteria in blood or other DNA-containing fluids using the DNA assay protocols of Greisen et al, see "PCR Primers and Probes for the 16S rRNA Gene of Most Species of
- the station 16 includes a fiber optic assembly 25 and one or more light sources 24 and one or more detectors 26 (not shown) that address the system loading channel 34 or 50 and measures the transmittance or absorbance of material in the channel 34 or 50 and the first well 36, such as a blood or other fluid sample.
- the fiber optic assembly 25 can verify the presence or absence of materials in the channel 34 or 50 or the well 36, and quantify their amounts by transmitting the measurement data to the computer 10. Suitable lasers and photodetectors are available commercially.
- Fiber optic adaptors to support the optical fiber are commercially available. These adaptors may also include a lens for efficient transfer of light from the light source into the fiber.
- a circuit of thin film transistors can be formed on the front or back of the glass or other substrate 14 to provide power to the wells via leads and electrodes explained further hereinafter, and to connect them with the driving means such as the computer 10, so as to move liquids along the array.
- Pins can also be formed in the glass substrate which are addressable by logic circuits on the support 18 that are connected to the computer 10 for example. These transistors and logic circuits will also be in contact with the substrate 14 on the support 18 to provide an interface between the microlaboratory disc 14 and the computer 10.
- the system loader 30 is situated outside of the station 16 and may be connected to a loading capillary tube 32, as shown in Fig. 3, suitably having an inner diameter of about 200 microns and an outer diameter of about 600-
- a sealant which can be adhered to the edge of the capillary sample tube 32 or to the loading channel 34, seals the capillary tube 32 to the channel 34.
- the sample capillary tube 32 can be inserted into a separate loading channel 50 vertically, which permits a smaller loading channel to be used, but the , sample may enter into the connecting channel 38 through force of gravity rather than via a controlled pump feed from the pumps 22 in the station 16. This alternate configuration 50 is also shown in Figs. 1-3.
- Fig. IA The heart of the present system is the parallel modular microlaboratory disc 14, shown in a side view in Fig. IA and in a top view in Fig. IB.
- Figs. IB and 2 illustrate a single module on a microlaboratory disc 14, which is suitably about 8.5 cm in diameter.
- Each module of the microlaboratory array is made up of one or more wells connected by a channel, in turn connected to the loading capillary tube.
- the microlaboratory disc 14 itself can be made from glass, fused silica, quartz or a silicon wafer for example, suitably about 1 millimeter thick, that is able to be finely and controllably etched using semiconductor techniques and a suitable etchant such as HF.
- High quality glasses such as a high melting borosilicate glass or a fused silica, will be preferred for their UV transmission properties when any of the processes or measurements carried out in the wells or channels use light based technologies.
- the module 48 illustrated in Fig. IB comprises four connecting wells, but this is by way of example only, and more or fewer wells can be present depending on the tests or syntheses to be performed in each module, and the number of steps required to perform them, as will be further described hereinbelow.
- the desired number of wells are etched into the microlaboratory disk sufficient to perform the sequence of steps to be used for testing or synthesis for that particular microlaboratory disc. All of the wells in each module are connected together via one or more channels.
- the modular design permits efficient placement of each module on the disc substrate. When only a few wells are required for each module, two modules can be formed in each radial slice of the disc (not shown), thereby doubling the number of modules that can be etched into a single microlaboratory disk 14. Thus for an 8.5 cm diameter disk, an array of 267 single modules or 534 double modules can be readily made.
- modules When the sample is inserted vertically into the loading channel 50, which takes up less area of the substrate, additional modules can be accommodated on a single microlaboratory disc, and up to 1500 modules can be formed on a single microlaboratory disk 14. Each of the modules is connected to the system loading system 30, thus permitting parallel processing in all of the modules.
- Excess fluids and waste materials for all of the modules are passed into a center well 46.
- a plurality of wells 46 may be connected to each other by means of a common channel 47 (Fig. IB).
- a sealed tubing on the back of the substrate 14 provides an exit channel for these excess fluids that can be passed into the waste container 28 in the station 16. Thus only one exit channel 47 needs to be provided for each microlaboratory array.
- the wells of the microlaboratory disc 14 can be made by the following procedure.
- a glass substrate disc 14 is coated sequentially on both sides with a thin chromium layer and a gold film about 1000 angstroms thick in known manner, as by evaporation or chemical vapor deposition (CVD), to protect the disc from subsequent etchants.
- a two micron layer of a photoresist such as Dynakem EPA of Hoechst-Celanese Corp. is spun on and the photoresist is exposed, either using a mask or using square or rectangular images, suitably using an MRS 4500 panel stepper of MRS Technology, Inc.
- the gold layer in the openings is etched away using a standard etch of 4 grams of KI and 1 gram of iodine (I2) in 25 ml of water.
- the underlying chromium layer is then separately etched using an acid chromium etch, such as KTI Chrome Etch of KTI Chemicals, Inc.
- the glass substrate is then etched in an ultrasonic bath of HF-HNO3-H2O in a ratio by volume of
- Fluid material may be transmitted to the various wells from the first well 36 or from the loading channel 34 by various methods.
- An external mechanical pumping system 22 that can deliver fluid in reproducible and accurately controlled amounts and that can maintain the purity and sterility of test liquids can be employed.
- the 205U multichannel cassette pump available from Watson-Marlow, Inc is a suitable pump.
- miniaturized mechanical pumps, based on microelectromechanical systems (MEMS) can be used. These miniature pumps may be internal or external to each well 36, 40, 42 and 44. Such pumps have been reported by Shoji et al, "Fabrication of a Micropump for Integrated Chemical Analyzing Systems",
- Suitable pumping means to move fluids through microchannels include electrokinetic pumps as reported by Dasgupta et al, see “Electroosmosis: A Reliable Fluid Propulsion System for Flow Injection Analysis", Anal. Chem. 6J2, ppl792-1798 (1994), or electrophoresis methods, which require inert metal electrodes, can also be used.
- a gold electrode can be deposited in the various wells of a module, as shown for example as metal layer 54 in the bottom of the first well 36, as shown in Fig. 4A.
- the electrode 54 is connected via leads 55 to a circuit or other electrical connection 56.
- an external mechanical pump 22 in the station 16 will be used to pass these solutions through the channel 38 into the desired well.
- an on-disk internal pumping system can be used for greater efficiency.
- prepackaged chemicals sealed in plastic release containers can be deposited in the various wells for particular tests, as required. In the case where the temperature of a particular well is to be monitored or changed, a means of heating or cooling the well is built into the well, as will be further explained below with reference to Fig. 4B.
- the first well 36 in this example is the sample preparation well.
- a thin film of a suitable metal oxide 57 such as tin oxide or indium tin oxide, is deposited onto the well material and is connected by means of an electrically conductive metal connection 58 to the end or outer edge of the well 36.
- the tin oxide coating 57 serves as a heater element for the well 36.
- the well 36 also has a surface bimetal film 59 and leads 60, suitably made of chromel-alumel alloys, forming a thermocouple to measure the temperature in the well when a source of current is applied to the tin oxide coating 57 and to the leads 58.
- the amount of current applied can be regulated by the computer 10 in response to the temperature measured through the leads 60.
- the first well 36 of the present module 48 also contains a blood affinity binding material, (not shown) such as Leukosorb available from Pall Co. and commercially available solutions to lyse the red and white blood cells of the sample and to carry the DNA from the first well 36.
- a blood affinity binding material such as Leukosorb available from Pall Co. and commercially available solutions to lyse the red and white blood cells of the sample and to carry the DNA from the first well 36.
- a blood affinity binding material such as Leukosorb available from Pall Co. and commercially available solutions to lyse the red and white blood cells of the sample and to carry the DNA from the first well 36.
- Fluids can be preloaded into the well either from a reservoir in the station 16 leading to the loading capillary tube 32 connected to the microlaboratory disc 14, or a reservoir and channel into the well may be formed adjacent to the well in which the fluids will be used.
- Additional devices can be built into the wells.
- a means of stirring reactants can also be built into a well using alternating fields.
- two or more electrodes can be evaporated into each side of a well and connected to external leads, in turn connected to a source of alternating current.
- the alternating fields will provide reversible magnetic fields to move paramagnetic particles in the wells and to cause, as well, fluid movement in the well.
- a glass cover plate 63 is affixed to the microlaboratory disc 14, as shown in Fig. 5B, to complete a capillary structure for the connecting channel 38 and to ensure that fluids in the wells do not evaporate.
- the cover plate 63 can be made of the same or different material as the microlaboratory disc, but the thermal coefficient of expansion of the cover plate 63 and the material used to make the microlaboratory disc 14 must be similar.
- the sealing temperature required to seal the cover plate 63 to the disc 14 must also be below the flow temperature of the disk material to prevent distortion of the etched channels and wells.
- Example 1 DNA Analysis
- the sample fluid is passed into the loading channel 34 or the loading channel 50 as explained above.
- the sample then moves by application of an electric field or is moved by a pump 22 into the first well 36 through the channel 38, where the separation of the sample, e.g., filtration, lysation and DNA separation, takes place.
- the first well 36 is fitted with a means of heating and temperature control, as shown in more detail in Fig. 5.
- a layer of tin oxide 57 is first deposited in the well 36 by CVD.
- a bilayer film 59 is deposited over the tin oxide film 57 in the well 36, and a metal connection 60 is deposited along a sidewall of the well.
- Electrodes 56 and 60 are formed on the backside of the microlaboratory disc 14, and leads 58 and 60 connect the thermocouple 59 to the external contacts 56.
- the current in the leads 58 and the voltage from the leads 60 are monitored and controlled by the computer 10.
- the well 36 is also preloaded or post loaded with a blood affinity binding material such as Leukosorb ⁇ M media from Pall BioSupport Div.
- Leukosorb B The amount of Leukosorb B employed depends on the area in the first well 36.
- the Leukosorb B filters the blood cells from the blood serum sample.
- a known buffer solution is then passed into the first well 36 by means of the channel 38 in an amount sufficient to assist in lysing and washing the red corpuscles in the sample.
- Optical fibers transmitting at 250-260 nm are commercially available.
- the optical fiber 25 of Fig. 6A which is connected to the detector 26 collects and transmits the light measured in the well 40 to an ultraviolet sensitive silicon photodetector 26 having good stability.
- Suitable detectors include thermoelectrically cooled UV enhanced silicon photodetectors, or miniaturized UV sensitive photomultipliers which are also commercially available.
- the photomultiplier-type detector has greater sensitivity.
- the absorbance of DNA is known and is set forth in the Table below. TABLE
- the third well 42 is used for this purpose.
- the well 42 will be fitted by hybridization probes which are unique to the source of DNA and its diagnostic scope.
- the desired probes may be directly synthesized in the well 42 or commercial sources can be used.
- the method most suitable for the microlaboratory array disc 14 for assaying DNA is the use of a non-radioactive tag, which can contain a fluorescent dye, for example for the Phycobiliprotein, or other class of protein. These materials absorb light above 600 nm.
- a compact solid state laser 24 emitting in the 600-650 nm range situate in the station 16 can be used to produce fluorescence in the tag.
- the probe in this example will emit above the exciting wavelength of 600 nm, i.e., in the 600-800 nm range.
- the Phycobiliprotein fluorescent tag agents are commercially available, e.g., Cy5TM ( f rom Jackson Immuno-Research Labs. Inc of West Grove PA.
- the fluorescence will be detected by means of the detector 26 also in the station 16.
- a filter 68 will also be inserted between the photomultiplier photodetector 26 and the laser 24 as shown in Fig. 6 to block the laser radiation.
- a suitable detector for the fluorescence emitted by the fluorescent tag is one having high sensitivity and optimum long term stability.
- Other commercially available means for detection of antibodies other than that described above can also be employed.
- enzymes that form highly colored products, resulting in detection having excellent sensitivity, or chemiluminescent compounds can be employed and detected optically. Radioisotopes can also be used, but their use is being discouraged to prevent adverse effects on the operator of the tests, and they present disposal problems.
- the light transmission detection system itself is also located in the station 16.
- Example 2 Immunological Assay A second example illustrating the design and utility of a microlaboratory disc 114 is shown in Figs. 7A and 7B and is one suitable for carrying out a plurality of immunological assays, also in parallel.
- the station 16, sample loading channel 134, and plurality of wells 136, 140, 142 and 144 connected by a channel 138 are similar to those of Example 1, but the materials and processes carried out in the wells, and the number of wells required
- a blood sample or other fluid sample of about 100 nanoliters is filtered to obtain a material having sufficient antibodies so that an assay can be determined using standard methods for detection of select antibodies.
- the microlaboratory disc 114 is able to process
- a series of different antibodies can be placed in additional wells 140, 142, 144 and 146 for sequential testing for various antibodies in successive wells, as shown in Fig. 7B.
- the number of wells required will be determined by the number of appropriate reagents and the number of antibodies to be tested.
- a control means 171 to control the fluid flow of reagents and solvents will be enabled by element 162, which is a switch or valve that controls the flow of fluid into the channel 138 and into the first well 136.
- element 162 is a switch or valve that controls the flow of fluid into the channel 138 and into the first well 136.
- a magnetic sphere can form a ball valve 162 by activation of an electric field by means of the computer 10.
- a ball valve 162 is fitted into the channel 138 on both sides of the well 136.
- a source of current 170 is placed adjacent the channel 138 to control the flow into or out of the well 136, and the backside of the microlaboratory disc 114 will have a lead 172 that connects to the driving method employed, such as the computer 10.
- FIG. 8 illustrates a microlaboratory disc 214 that has a modular design that permits the synthesis of a large array of proteins or oligonucleotides in parallel. Such synthesis is a great time saver for drug testing for example, when a whole series of related compounds can be synthesized in each well of an array, and then tested for biologic activity.
- Step 3 washing the well with acetonitrile
- Step 5 washing the well with acetonitrile
- Step 6 capping with Ac2 ⁇ -2,6-lutidine-THF (1:1:8) and 6.5% 4-
- Step 7 oxidizing with 1.1M
- Step 8 washing the well with acetonitrile to remove excess acid.
- additional reagents or solvents can be used to remove protective groups used for synthesis prior to disassociating the synthesized oligomers from their support.
- the various oligomers in each well can then be prepared for screening.
- a screening cell 274 can also be built into the well 236 as shown in Fig. 8. In this design, as shown in Fig.
- a plurality of modules or wells 236 are connected by means of various channels, and a complete synthesis of different compounds will be carried out in a single well 236.
- the additional features of this microlaboratory 214 design are in the array design which permits controllable and sequential dehvery of various reagents and solvents to each of the wells in parallel.
- the reagents and solvents can be stored in reservoirs
- Figure 8 illustrates a suitable design for a microlaboratory array wherein reservoirs 276, 278, 280, 282 for reagents and solvents are included in the substrate; and Fig. 9 is a partial schematic view of a system for synthesis wherein reservoirs 276, 279, 280 and 282 are added to the station 16, each connected to a fluid pump 22 for delivery to the wells of each module.
- Each well in this array has a plurality of horizontal channels 238, 239, 241, 243, 245 entering and exiting each well 236, and a plurality of vertical channels 248, 250, 252 and 254, each of which leads to a different reservoir.
- the reagents and solvents move along the channels by means of gating electrodes, as shown in Fig. 7C, that move the fluid along the channels.
- reagents are delivered in parallel from the different reservoirs 276, 278, 280 and 282 into channels 238, 239, 241, 243 respectively.
- Each of these channels has a built in gating electrode 162 to monitor the flow of fluids from the different reservoirs into the wells 236 as required.
- each well 236 is placed in an array and one or more channels lead into and out of each well 236 for dehvery of reagents in parallel or serially.
- the syntheses can be monitored or screening can be conducted by passing a sample into a screening cell 274 which can be built into the well 236.
- This microlaboratory array of this example 314 is also designed to produce an array of small molecules, such as a plurality of different alkyl compounds. Since such an array depends on the delivery of a different starting material for each compound, e.g., methyl-substituted, ethyl- substituted, n-propyl-substituted, iso-propyl substituted compounds and the like, a large array of starting material reservoirs or supply sources will be needed so that a different starting material will be delivered to each well.
- the reactants and solvents and reaction conditions, e.g., heating, will be delivered as required, see Examples 1 and 2.
- FMOC 9-fluorenyl methoxy carbonyl
- the "reservoir" for the alkylating agent is in reality a source of a whole series of alkylating agents that can be delivered selectively to a particular well in the array.
- the fluid dehvery to the wells can be controlled by a control means 171 as shown in Fig. 7C. In this manner, a different compound is made in each well.
- several wells may be employed to synthesize each of the compounds and this microlaboratory disc 314 may comprise a plurality of modules as well.
- cross-over channels that permit high density arrangements of wells modules in an array that can be serviced from more than one channel either to transmit fluids into the well, out of the well, or to transmit the material being treated to a succeeding well.
- Such cross over channels can be formed in the following manner. Referring to Fig. llA, a substrate 314 is coated on both sides with a first chromium-gold layer 310A and 310B and a photoresist layer 312A and 312B as described above. The photoresist layer 312A is exposed and developed to form openings 313 for a first channel and the chromium layer
- the 312A is etched away in the opening 313.
- the glass substrate 314 is then etched through to the chromium-gold layer 310B forming openings 315.
- the photoresist layers 312A and 312B are re-exposed and developed to form a second pair of openings 316 and 317 on each side of the glass substrate 314.
- the second opening 316 in the layer 312A is perpendicular to the opening 317 in the layer 312B, which is parallel to the openings 315 made originally.
- the opening 317 is formed adjacent to the openings 315 already formed in the glass substrate 314, as shown in Fig. 11B.
- the glass substrate is next etched to open a passage between the openings 315 and 317, thereby forming a continuous channel that extends through the glass substrate 314 and across beneath the second perpendicular channel 316 as shown in Fig. 11C.
- a cover plate 318 will be bonded to both sides of the substrate 314 to enclose the cross-over channels 315-317-315 and 316 on both sides of the substrate 314 and to complete the substrate having crossing but non- intersecting channels, as shown in Fig. 11D.
- the material from the reservoir can be injected into one or more the channels 316.
- the material in each channel moves along the channel 316 via capillary action.
- the material flow in the channels preferably can be controlled by means of a drain electrode deposited in each well, and in each reservoir and in the channel leading from the reservoir to the respective well. By creating a negative charge at the well, the flow along the channel will be stopped, thereby permitting control of reagent feed into each well. This is shown in Fig. 12 which is a top view which shows a drain electrode 440 deposited in the well 436, in a channel 438, and in the reservoir 442.
- a desired microlaboratory array can be designed to carry out a wide variety of tests and syntheses rapidly, reliably, inexpensively and in parallel, greatly reducing costs. Further, because of the integration of the microlaboratory array and means of regulating, measuring and recording information, records of tests and screening data are reliably generated and stored. Since genetic screening may become the blood tests of the future, the ability to perform DNA testing rapidly, reliably and at low cost, will be highly advantageous.
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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DE69530796T DE69530796T2 (en) | 1994-11-10 | 1995-11-09 | METHOD FOR PRODUCING CROSS-CROSSING, NON-CUTTING CHANNELS IN DIELECTRIC SUBSTRATE MATRICES, DIELECTRIC SUBSTRATE MATRICES AND THEIR USE |
AT95940666T ATE240155T1 (en) | 1994-11-10 | 1995-11-09 | METHOD FOR PRODUCING CROSS-OVER, NON-CUTTING CHANNELS IN DIELECTRIC SUBSTRATE MATRICES, DIELECTRIC SUBSTRATE MATRICES AND THE USE THEREOF |
EP95940666A EP0808456B1 (en) | 1994-11-10 | 1995-11-09 | Method of forming cross-over, non-intersecting channels in dielectric substrate arrays, dielectric substrate arrays, and uses thereof |
AU42337/96A AU705659B2 (en) | 1994-11-10 | 1995-11-09 | A partitioned microelectronic device array |
JP8516200A JPH11500602A (en) | 1994-11-10 | 1995-11-09 | Fractionated microelectronic device array |
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US08/338,703 US5585069A (en) | 1994-11-10 | 1994-11-10 | Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis |
US08/338,703 | 1994-11-10 |
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WO1996015450A1 true WO1996015450A1 (en) | 1996-05-23 |
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PCT/US1995/014589 WO1996015450A1 (en) | 1994-11-10 | 1995-11-09 | A partitioned microelectronic device array |
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EP (1) | EP0808456B1 (en) |
JP (1) | JPH11500602A (en) |
KR (1) | KR970707442A (en) |
AT (1) | ATE240155T1 (en) |
AU (1) | AU705659B2 (en) |
CA (1) | CA2205066A1 (en) |
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- 1995-11-09 JP JP8516200A patent/JPH11500602A/en active Pending
- 1995-11-09 CA CA002205066A patent/CA2205066A1/en not_active Abandoned
- 1995-11-09 WO PCT/US1995/014589 patent/WO1996015450A1/en not_active Application Discontinuation
- 1995-11-09 AU AU42337/96A patent/AU705659B2/en not_active Ceased
- 1995-11-09 KR KR1019970703200A patent/KR970707442A/en not_active Application Discontinuation
- 1995-11-09 EP EP95940666A patent/EP0808456B1/en not_active Expired - Lifetime
- 1995-11-09 DE DE69530796T patent/DE69530796T2/en not_active Expired - Lifetime
- 1995-11-09 AT AT95940666T patent/ATE240155T1/en not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
US5863708A (en) | 1999-01-26 |
EP0808456A1 (en) | 1997-11-26 |
AU4233796A (en) | 1996-06-06 |
EP0808456A4 (en) | 1998-09-02 |
KR970707442A (en) | 1997-12-01 |
JPH11500602A (en) | 1999-01-19 |
ATE240155T1 (en) | 2003-05-15 |
DE69530796D1 (en) | 2003-06-18 |
AU705659B2 (en) | 1999-05-27 |
US5643738A (en) | 1997-07-01 |
US5585069A (en) | 1996-12-17 |
DE69530796T2 (en) | 2003-11-27 |
CA2205066A1 (en) | 1996-05-23 |
US5593838A (en) | 1997-01-14 |
US5755942A (en) | 1998-05-26 |
US5681484A (en) | 1997-10-28 |
US5858804A (en) | 1999-01-12 |
EP0808456B1 (en) | 2003-05-14 |
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