WO1994024609A3 - Photocurable compositions - Google Patents

Photocurable compositions Download PDF

Info

Publication number
WO1994024609A3
WO1994024609A3 PCT/US1993/003717 US9303717W WO9424609A3 WO 1994024609 A3 WO1994024609 A3 WO 1994024609A3 US 9303717 W US9303717 W US 9303717W WO 9424609 A3 WO9424609 A3 WO 9424609A3
Authority
WO
WIPO (PCT)
Prior art keywords
compositions
compound bearing
photocurable compositions
groups
photoresists
Prior art date
Application number
PCT/US1993/003717
Other languages
French (fr)
Other versions
WO1994024609A2 (en
Inventor
Donald L Schmidt
Gene D Rose
Edward E Flagg
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US07/814,846 priority Critical patent/US5238747A/en
Priority claimed from US07/814,846 external-priority patent/US5238747A/en
Priority to US07/920,029 priority patent/US5310581A/en
Priority claimed from US07/920,029 external-priority patent/US5310581A/en
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Priority to EP93909603A priority patent/EP0695437A1/en
Priority to AU40331/93A priority patent/AU4033193A/en
Priority to JP6523086A priority patent/JPH08509820A/en
Publication of WO1994024609A2 publication Critical patent/WO1994024609A2/en
Publication of WO1994024609A3 publication Critical patent/WO1994024609A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Abstract

Novel photocurable, adherent coating compositions and method for preparing such compositions are described. A substrate can be coated with a first compound bearing a plurality of onium groups and a second compound bearing a plurality of nucleophilic groups. The resulting coating cures readily upon exposure to actinic radiation. These compositions can be used in preparation of photoresists, composite membranes, and modifying surfaces either for accepting adhesives or releasing oily soil.
PCT/US1993/003717 1989-12-29 1993-04-20 Photocurable compositions WO1994024609A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US07/814,846 US5238747A (en) 1989-12-29 1991-12-30 Photocurable compositions
US07/920,029 US5310581A (en) 1989-12-29 1992-07-27 Photocurable compositions
EP93909603A EP0695437A1 (en) 1991-12-30 1993-04-20 Photocurable compositions
AU40331/93A AU4033193A (en) 1991-12-30 1993-04-20 Photocurable compositions
JP6523086A JPH08509820A (en) 1991-12-30 1993-04-20 Photocurable composition

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/814,846 US5238747A (en) 1989-12-29 1991-12-30 Photocurable compositions
US07/920,029 US5310581A (en) 1989-12-29 1992-07-27 Photocurable compositions

Publications (2)

Publication Number Publication Date
WO1994024609A2 WO1994024609A2 (en) 1994-10-27
WO1994024609A3 true WO1994024609A3 (en) 1995-03-09

Family

ID=27123886

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/003717 WO1994024609A2 (en) 1989-12-29 1993-04-20 Photocurable compositions

Country Status (4)

Country Link
EP (1) EP0695437A1 (en)
JP (1) JPH08509820A (en)
AU (1) AU4033193A (en)
WO (1) WO1994024609A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4285020B2 (en) * 2003-02-14 2009-06-24 コニカミノルタホールディングス株式会社 Image forming method using actinic ray curable ink
US8187991B2 (en) 2008-06-11 2012-05-29 General Electric Company Methods for regeneration of adsorbent material
JP5658932B2 (en) * 2009-07-14 2015-01-28 住友化学株式会社 Novel compound, resist composition and pattern forming method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3462274A (en) * 1965-04-08 1969-08-19 Agfa Gevaert Ag Light-sensitive layers for graphic arts purposes using polyvinyl benzyl n-(4-vinylpyridinium) salts
GB2006231A (en) * 1977-10-06 1979-05-02 Eastman Kodak Co Copolymer gelatin hardeners
EP0164100A2 (en) * 1984-06-06 1985-12-11 Polaroid Corporation Polymeric pyridinium ylide and products from same
US4704324A (en) * 1985-04-03 1987-11-03 The Dow Chemical Company Semi-permeable membranes prepared via reaction of cationic groups with nucleophilic groups
US4941972A (en) * 1984-12-06 1990-07-17 The Dow Chemical Company Chlorine-stable membrane compositions
US5006624A (en) * 1987-05-14 1991-04-09 The Dow Chemical Company Fluorocarbon containing, reactive polymeric surfactants and coating compositions therefrom
US5238747A (en) * 1989-12-29 1993-08-24 The Dow Chemical Company Photocurable compositions

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3462274A (en) * 1965-04-08 1969-08-19 Agfa Gevaert Ag Light-sensitive layers for graphic arts purposes using polyvinyl benzyl n-(4-vinylpyridinium) salts
GB2006231A (en) * 1977-10-06 1979-05-02 Eastman Kodak Co Copolymer gelatin hardeners
EP0164100A2 (en) * 1984-06-06 1985-12-11 Polaroid Corporation Polymeric pyridinium ylide and products from same
US4941972A (en) * 1984-12-06 1990-07-17 The Dow Chemical Company Chlorine-stable membrane compositions
US4704324A (en) * 1985-04-03 1987-11-03 The Dow Chemical Company Semi-permeable membranes prepared via reaction of cationic groups with nucleophilic groups
US5006624A (en) * 1987-05-14 1991-04-09 The Dow Chemical Company Fluorocarbon containing, reactive polymeric surfactants and coating compositions therefrom
US5238747A (en) * 1989-12-29 1993-08-24 The Dow Chemical Company Photocurable compositions

Also Published As

Publication number Publication date
WO1994024609A2 (en) 1994-10-27
AU4033193A (en) 1994-11-08
EP0695437A1 (en) 1996-02-07
JPH08509820A (en) 1996-10-15

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