WO1994009605A1 - Two-dimensional array ultrasonic transducers - Google Patents

Two-dimensional array ultrasonic transducers Download PDF

Info

Publication number
WO1994009605A1
WO1994009605A1 PCT/US1993/009520 US9309520W WO9409605A1 WO 1994009605 A1 WO1994009605 A1 WO 1994009605A1 US 9309520 W US9309520 W US 9309520W WO 9409605 A1 WO9409605 A1 WO 9409605A1
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
dimensional array
piezoelectric
electrode layers
elements
Prior art date
Application number
PCT/US1993/009520
Other languages
French (fr)
Inventor
Stephen W. Smith
Original Assignee
Duke University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Duke University filed Critical Duke University
Priority to AU53214/94A priority Critical patent/AU5321494A/en
Publication of WO1994009605A1 publication Critical patent/WO1994009605A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/064—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface with multiple active layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/092—Forming composite materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes
    • H10N30/874—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes embedded within piezoelectric or electrostrictive material, e.g. via connections

Abstract

A piezoelectric transducer chip (10) comprising a plurality of transducer elements (11, 12, 14) arranged in a two-dimensional array is disclosed. At leat one of the transducer elements is a multi-layer element which comprises a plurality of piezoelectric layers (24, 26, 28, 30, 32), each of which is separated from the adjacent piezoelectric layers by an electrode layer (34, 36, 38, 40) so that a plurality of capacitive elements is electrically connected in parallel. A first via (46) connects a first set of alternating electrode layers, and a second via (54) connects a second set of alternating electrode layers. The first via is insulated from the second set of alternating electrode layers, and the second via is insulated from the first set of alternating electrode layers. At least one of the plurality of multi-layer elements has an internal edge. At least one of the vias of a multi-layer element is an internal via. Also disclosed are an ultrasonic transducer (11) which includes such a piezoelectric chip, and an ultrasonic scanner (140) which includes such a transducer.
PCT/US1993/009520 1992-10-16 1993-10-01 Two-dimensional array ultrasonic transducers WO1994009605A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU53214/94A AU5321494A (en) 1992-10-16 1993-10-01 Two-dimensional array ultrasonic transducers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/962,455 US5329496A (en) 1992-10-16 1992-10-16 Two-dimensional array ultrasonic transducers
US962,455 1992-10-16

Publications (1)

Publication Number Publication Date
WO1994009605A1 true WO1994009605A1 (en) 1994-04-28

Family

ID=25505891

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/009520 WO1994009605A1 (en) 1992-10-16 1993-10-01 Two-dimensional array ultrasonic transducers

Country Status (3)

Country Link
US (2) US5329496A (en)
AU (1) AU5321494A (en)
WO (1) WO1994009605A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2357213A (en) * 1999-09-27 2001-06-13 Murata Manufacturing Co Piezoelectric sensor array having electrodes within individual piezoelectric elements
US7804228B2 (en) 2007-12-18 2010-09-28 Boston Scientific Scimed, Inc. Composite passive materials for ultrasound transducers
US11921200B1 (en) 2022-08-19 2024-03-05 Navico, Inc. Live down sonar view

Families Citing this family (134)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5325860A (en) * 1991-11-08 1994-07-05 Mayo Foundation For Medical Education And Research Ultrasonic and interventional catheter and method
US5704361A (en) * 1991-11-08 1998-01-06 Mayo Foundation For Medical Education And Research Volumetric image ultrasound transducer underfluid catheter system
US5713363A (en) * 1991-11-08 1998-02-03 Mayo Foundation For Medical Education And Research Ultrasound catheter and method for imaging and hemodynamic monitoring
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
US6216538B1 (en) * 1992-12-02 2001-04-17 Hitachi, Ltd. Particle handling apparatus for handling particles in fluid by acoustic radiation pressure
US20070016071A1 (en) * 1993-02-01 2007-01-18 Volcano Corporation Ultrasound transducer assembly
US5453575A (en) * 1993-02-01 1995-09-26 Endosonics Corporation Apparatus and method for detecting blood flow in intravascular ultrasonic imaging
US5625149A (en) * 1994-07-27 1997-04-29 Hewlett-Packard Company Ultrasonic transductor
US5677491A (en) * 1994-08-08 1997-10-14 Diasonics Ultrasound, Inc. Sparse two-dimensional transducer array
US5598051A (en) * 1994-11-21 1997-01-28 General Electric Company Bilayer ultrasonic transducer having reduced total electrical impedance
US6100626A (en) * 1994-11-23 2000-08-08 General Electric Company System for connecting a transducer array to a coaxial cable in an ultrasound probe
US5493541A (en) * 1994-12-30 1996-02-20 General Electric Company Ultrasonic transducer array having laser-drilled vias for electrical connection of electrodes
US5629578A (en) * 1995-03-20 1997-05-13 Martin Marietta Corp. Integrated composite acoustic transducer array
US5530683A (en) * 1995-04-06 1996-06-25 The United States Of America As Represented By The Secretary Of The Navy Steerable acoustic transducer
US5605154A (en) * 1995-06-06 1997-02-25 Duke University Two-dimensional phase correction using a deformable ultrasonic transducer array
JPH09526A (en) * 1995-06-22 1997-01-07 Toshiba Corp Ultrasonic diagnostic device
US5730113A (en) * 1995-12-11 1998-03-24 General Electric Company Dicing saw alignment for array ultrasonic transducer fabrication
US5732706A (en) * 1996-03-22 1998-03-31 Lockheed Martin Ir Imaging Systems, Inc. Ultrasonic array with attenuating electrical interconnects
US5818149A (en) * 1996-03-25 1998-10-06 Rutgers, The State University Of New Jersey Ceramic composites and methods for producing same
US5740806A (en) * 1996-03-29 1998-04-21 Siemens Medical Systems, Inc. Dynamic receive aperture transducer for 1.5D imaging
US5699805A (en) * 1996-06-20 1997-12-23 Mayo Foundation For Medical Education And Research Longitudinal multiplane ultrasound transducer underfluid catheter system
KR100197581B1 (en) * 1996-06-25 1999-06-15 이민화 Second dimension array structure of ultrasonic wave convert element for ultrasonic wave three-dimensional image
KR0180057B1 (en) * 1996-07-08 1999-04-01 이민화 Three dimensional image acquiring apparatus of ultrasonic system
US5704105A (en) * 1996-09-04 1998-01-06 General Electric Company Method of manufacturing multilayer array ultrasonic transducers
US5855049A (en) * 1996-10-28 1999-01-05 Microsound Systems, Inc. Method of producing an ultrasound transducer
US6046961A (en) * 1996-12-16 2000-04-04 The United States Of America As Represented By The Secretary Of The Navy Multi-layer tiled array
US5844349A (en) * 1997-02-11 1998-12-01 Tetrad Corporation Composite autoclavable ultrasonic transducers and methods of making
US5906580A (en) * 1997-05-05 1999-05-25 Creare Inc. Ultrasound system and method of administering ultrasound including a plurality of multi-layer transducer elements
US5938612A (en) * 1997-05-05 1999-08-17 Creare Inc. Multilayer ultrasonic transducer array including very thin layer of transducer elements
US6171247B1 (en) 1997-06-13 2001-01-09 Mayo Foundation For Medical Education And Research Underfluid catheter system and method having a rotatable multiplane transducer
US5945770A (en) * 1997-08-20 1999-08-31 Acuson Corporation Multilayer ultrasound transducer and the method of manufacture thereof
US5928151A (en) * 1997-08-22 1999-07-27 Acuson Corporation Ultrasonic system and method for harmonic imaging in three dimensions
JP3382831B2 (en) * 1997-11-11 2003-03-04 ジーイー横河メディカルシステム株式会社 Method of manufacturing ultrasonic transducer array, ultrasonic transducer array, ultrasonic probe, and ultrasonic imaging apparatus
US6266857B1 (en) * 1998-02-17 2001-07-31 Microsound Systems, Inc. Method of producing a backing structure for an ultrasound transceiver
US6121718A (en) * 1998-03-31 2000-09-19 Acuson Corporation Multilayer transducer assembly and the method for the manufacture thereof
US6359375B1 (en) 1998-05-06 2002-03-19 Siemens Medical Solutions Usa, Inc. Method to build a high bandwidth, low crosstalk, low EM noise transducer
US6099474A (en) * 1998-05-27 2000-08-08 Solek; Roman Ultrasound system for displaying real time simultaneous multiplane image
US6511426B1 (en) 1998-06-02 2003-01-28 Acuson Corporation Medical diagnostic ultrasound system and method for versatile processing
US6116244A (en) * 1998-06-02 2000-09-12 Acuson Corporation Ultrasonic system and method for three-dimensional imaging with opacity control
US6059731A (en) * 1998-08-19 2000-05-09 Mayo Foundation For Medical Education And Research Simultaneous side-and-end viewing underfluid catheter
US6552471B1 (en) * 1999-01-28 2003-04-22 Parallel Design, Inc. Multi-piezoelectric layer ultrasonic transducer for medical imaging
EP1737054B1 (en) * 1999-01-29 2012-04-11 Seiko Epson Corporation Piezoelectric transducer
US6894425B1 (en) * 1999-03-31 2005-05-17 Koninklijke Philips Electronics N.V. Two-dimensional ultrasound phased array transducer
US6398736B1 (en) 1999-03-31 2002-06-04 Mayo Foundation For Medical Education And Research Parametric imaging ultrasound catheter
US6288477B1 (en) 1999-12-03 2001-09-11 Atl Ultrasound Composite ultrasonic transducer array operating in the K31 mode
US6909686B2 (en) * 1999-12-20 2005-06-21 Pioneer Corporation Aberration correcting optical unit, optical pickup apparatus and information recording/reproducing apparatus with single and multi-layer electrodes
US6546803B1 (en) * 1999-12-23 2003-04-15 Daimlerchrysler Corporation Ultrasonic array transducer
US6384516B1 (en) 2000-01-21 2002-05-07 Atl Ultrasound, Inc. Hex packed two dimensional ultrasonic transducer arrays
US6286747B1 (en) * 2000-03-24 2001-09-11 Hong Kong Polytechnic University Ultrasonic transducer
US6654638B1 (en) 2000-04-06 2003-11-25 Cardiac Pacemakers, Inc. Ultrasonically activated electrodes
US6726631B2 (en) * 2000-08-08 2004-04-27 Ge Parallel Designs, Inc. Frequency and amplitude apodization of transducers
US7518284B2 (en) * 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
DE10054247C2 (en) * 2000-11-02 2002-10-24 Danfoss As Actuator and method for its manufacture
US8181338B2 (en) * 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
WO2004027970A1 (en) 2002-09-20 2004-04-01 Danfoss A/S An elastomer actuator and a method of making an actuator
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US6822374B1 (en) 2000-11-15 2004-11-23 General Electric Company Multilayer piezoelectric structure with uniform electric field
US6558330B1 (en) * 2000-12-06 2003-05-06 Acuson Corporation Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems
US7344501B1 (en) 2001-02-28 2008-03-18 Siemens Medical Solutions Usa, Inc. Multi-layered transducer array and method for bonding and isolating
US6429574B1 (en) 2001-02-28 2002-08-06 Acuson Corporation Transducer array using multi-layered elements having an even number of elements and a method of manufacture thereof
US6664717B1 (en) 2001-02-28 2003-12-16 Acuson Corporation Multi-dimensional transducer array and method with air separation
US6761688B1 (en) 2001-02-28 2004-07-13 Siemens Medical Solutions Usa, Inc. Multi-layered transducer array and method having identical layers
US6437487B1 (en) 2001-02-28 2002-08-20 Acuson Corporation Transducer array using multi-layered elements and a method of manufacture thereof
US6700314B2 (en) * 2001-06-07 2004-03-02 Purdue Research Foundation Piezoelectric transducer
US6589180B2 (en) 2001-06-20 2003-07-08 Bae Systems Information And Electronic Systems Integration, Inc Acoustical array with multilayer substrate integrated circuits
US6761692B2 (en) * 2001-06-25 2004-07-13 Eagle Ultrasound As High frequency and multi frequency band ultrasound transducers based on ceramic films
EP1462799B1 (en) * 2001-11-14 2011-01-19 Kabushiki Kaisha Toshiba Ultrasonograph with calculation of ultrasonic wave refraction
CN1263173C (en) * 2001-12-06 2006-07-05 松下电器产业株式会社 Composite piezoelectric body and making method thereof
AU2002351736A1 (en) * 2001-12-21 2003-07-15 Danfoss A/S Dielectric actuator or sensor structure and method of making it
US6780154B2 (en) 2002-01-17 2004-08-24 Siemens Medical Solutions Usa, Inc. Segmented handheld medical ultrasound system and method
US7371218B2 (en) * 2002-01-17 2008-05-13 Siemens Medical Solutions Usa, Inc. Immersive portable ultrasound system and method
US6673016B1 (en) 2002-02-14 2004-01-06 Siemens Medical Solutions Usa, Inc. Ultrasound selectable frequency response system and method for multi-layer transducers
US6558331B1 (en) 2002-05-29 2003-05-06 Koninklijke Philips Electronics N.V. Apparatus and method for harmonic imaging using an array transducer operated in the k31 mode
US6671230B1 (en) * 2002-06-10 2003-12-30 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric volumetric array
EP1616525A3 (en) * 2002-07-19 2006-02-01 Aloka Co., Ltd. Ultrasonic probe
US6826816B2 (en) * 2002-09-18 2004-12-07 Siemens Medical Solutions Usa, Inc. Multi-layer multi-dimensional transducer and method of manufacture
DE60328913D1 (en) * 2002-12-12 2009-10-01 Danfoss As TOUCH SENSOR ELEMENT AND SENSOR GROUP
US20040158154A1 (en) * 2003-02-06 2004-08-12 Siemens Medical Solutions Usa, Inc. Portable three dimensional diagnostic ultrasound imaging methods and systems
JP3867057B2 (en) * 2003-02-20 2007-01-10 三井造船株式会社 Acoustic sensor array, acoustic diagnostic apparatus, and acoustic diagnostic method
CN101098670B (en) * 2003-02-24 2011-07-27 丹福斯有限公司 Electro active elastic compression bandage
JP2005027752A (en) * 2003-07-08 2005-02-03 Toshiba Corp Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, ultrasonic probe, and ultrasonic diagnostic apparatus
GB0320168D0 (en) * 2003-08-28 2003-10-01 Univ Manchester A sensing device
DE602004004841T2 (en) * 2003-08-29 2007-11-08 Fujifilm Corp. Laminated structure, method of making same and multiple ultrasonic transducer array
US7156938B2 (en) * 2003-11-11 2007-01-02 General Electric Company Method for making multi-layer ceramic acoustic transducer
US7017245B2 (en) * 2003-11-11 2006-03-28 General Electric Company Method for making multi-layer ceramic acoustic transducer
DE10353171A1 (en) * 2003-11-14 2005-06-16 Robert Bosch Gmbh piezo actuator
US6985407B1 (en) * 2004-02-02 2006-01-10 The United States Of America As Represented By The Secretary Of The Navy Multi-layer composite transducer array
US20050277836A1 (en) * 2004-02-05 2005-12-15 Proulx Timothy L Transesophageal ultrasound transducer probe
US7230368B2 (en) * 2004-04-20 2007-06-12 Visualsonics Inc. Arrayed ultrasonic transducer
US20070222339A1 (en) * 2004-04-20 2007-09-27 Mark Lukacs Arrayed ultrasonic transducer
US7567016B2 (en) * 2005-02-04 2009-07-28 Siemens Medical Solutions Usa, Inc. Multi-dimensional ultrasound transducer array
JP2006247025A (en) * 2005-03-09 2006-09-21 Fuji Photo Film Co Ltd Ultrasonic probe for diagnosing body cavity
US20060253026A1 (en) * 2005-05-04 2006-11-09 Siemens Medical Solutions Usa, Inc. Transducer for multi-purpose ultrasound
US20070013263A1 (en) * 2005-06-06 2007-01-18 Siemens Medical Solutions Usa, Inc. Electrical isolation for ultrasound transducer stacks
US20070007863A1 (en) * 2005-07-11 2007-01-11 Siemens Medical Solutions Usa. Inc. Drilled multi-layer ultrasound transducer array
FR2889403B1 (en) * 2005-07-29 2007-11-09 Thales Sa PROCESS FOR PRODUCING AN ACOUTICAL TRANSDUCER
WO2007056104A2 (en) 2005-11-02 2007-05-18 Visualsonics Inc. High frequency array ultrasound system
US20100237747A1 (en) * 2005-12-19 2010-09-23 Physical Logic Ag Piezoelectric Composite Material
US7728492B2 (en) * 2005-12-19 2010-06-01 Physical Logic Ag Piezoelectric composite material
JP4253334B2 (en) * 2006-07-12 2009-04-08 株式会社東芝 Two-dimensional array type ultrasonic probe
JP4294678B2 (en) * 2006-10-30 2009-07-15 オリンパスメディカルシステムズ株式会社 Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
JP2009061112A (en) * 2007-09-06 2009-03-26 Ge Medical Systems Global Technology Co Llc Ultrasonic probe and ultrasonic imaging apparatus
US20110189027A1 (en) * 2008-04-30 2011-08-04 Morten Kjaer Hansen Pump powered by a polymer transducer
US20110186759A1 (en) * 2008-04-30 2011-08-04 Danfoss Polypower A/S Power actuated valve
US9173047B2 (en) 2008-09-18 2015-10-27 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
EP3309823B1 (en) 2008-09-18 2020-02-12 FUJIFILM SonoSite, Inc. Ultrasound transducers
US9184369B2 (en) 2008-09-18 2015-11-10 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
DE102008049544B4 (en) 2008-09-30 2011-01-27 Siemens Aktiengesellschaft Ultrasonic transducer with at least one fully active, monolithic piezoelectric element, method for contacting the ultrasonic transducer by means of lamination of an insulating film and use of the ultrasonic transducer
DE102008049541A1 (en) 2008-09-30 2010-04-15 Siemens Aktiengesellschaft Ultrasonic transducer for recording ultrasonic images, has monolithic, stacked piezo element which has two electrode layers and piezo ceramic layer arranged between electrode layers
DE102008049788A1 (en) 2008-09-30 2010-06-10 Siemens Aktiengesellschaft Ultrasonic transducer i.e. two-dimensional ultrasound antenna, for e.g. medical diagnostic purpose, involves providing recess in piezoelement for selective insulation of electrode and layer, where recess is filled with insulation material
US20100171395A1 (en) * 2008-10-24 2010-07-08 University Of Southern California Curved ultrasonic array transducers
KR101475114B1 (en) * 2008-12-13 2014-12-22 바이엘 머티리얼사이언스 아게 Ferroelectret multilayer composite and method for producing a ferroelectret multilayer composite with parallel tubular channels
US8176787B2 (en) * 2008-12-17 2012-05-15 General Electric Company Systems and methods for operating a two-dimensional transducer array
US20100168582A1 (en) * 2008-12-29 2010-07-01 Boston Scientific Scimed, Inc. High frequency transducers and methods of making the transducers
KR20120046177A (en) * 2009-06-19 2012-05-09 소나베이션, 인크. Method for manufacturing a piezoelectric ceramic body
US8299687B2 (en) 2010-07-21 2012-10-30 Transducerworks, Llc Ultrasonic array transducer, associated circuit and method of making the same
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8742646B2 (en) 2012-03-29 2014-06-03 General Electric Company Ultrasound acoustic assemblies and methods of manufacture
CN102723433A (en) * 2012-06-01 2012-10-10 广州市番禺奥迪威电子有限公司 Improved multilayer piezoelectric transduction element
US9826618B2 (en) * 2015-09-30 2017-11-21 Chiscan Holdings, Llc Devices for controlling non-thermal plasma emitters
US11102877B2 (en) 2015-09-30 2021-08-24 Chiscan Holdings, L.L.C. Apparatus and methods for deactivating microorganisms with non-thermal plasma
EP3737295A4 (en) 2018-01-08 2021-10-06 Rivanna Medical, LLC Three-dimensional imaging and modeling of ultrasound image data
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
WO2020024051A1 (en) * 2018-07-31 2020-02-06 Resonant Acoustics International Inc. Ultrasonic transducer
US11883846B2 (en) * 2019-06-14 2024-01-30 GE Precision Healthcare LLC Method for manufacturing an ultrasound transducer and ultrasound probe
KR20220055493A (en) 2019-09-12 2022-05-03 엑소 이미징, 인크. Increased MUT coupling efficiency and bandwidth through edge grooves, virtual pivots, and free boundaries
RU2751896C1 (en) * 2020-11-30 2021-07-19 федеральное государственное автономное образовательное учреждение высшего образования «Южный федеральный университет» Composite piezomaterial and method for its manufacture
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
CN114390424B (en) * 2021-09-02 2023-10-31 苏州清听声学科技有限公司 Directional sound production screen insulating layer silk-screen printing method

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4211948A (en) * 1978-11-08 1980-07-08 General Electric Company Front surface matched piezoelectric ultrasonic transducer array with wide field of view
US4217684A (en) * 1979-04-16 1980-08-19 General Electric Company Fabrication of front surface matched ultrasonic transducer array
US4296349A (en) * 1979-02-13 1981-10-20 Toray Industries, Inc. Ultrasonic transducer
US4489729A (en) * 1982-09-03 1984-12-25 Medtronic, Inc. Ultrasound imaging system
US4603276A (en) * 1984-05-22 1986-07-29 U.S. Philips Corporation Transducer comprising a network of piezoelectric elements
US4638468A (en) * 1984-08-03 1987-01-20 Raytheon Company Polymer hydrophone array with multilayer printed circuit wiring
US4747192A (en) * 1983-12-28 1988-05-31 Kabushiki Kaisha Toshiba Method of manufacturing an ultrasonic transducer
US4755708A (en) * 1984-05-30 1988-07-05 Siemens Aktiengesellschaft Hydrophone
US4773140A (en) * 1983-10-31 1988-09-27 Advanced Technology Laboratories, Inc. Phased array transducer construction
US4865042A (en) * 1985-08-16 1989-09-12 Hitachi, Ltd. Ultrasonic irradiation system
US4890268A (en) * 1988-12-27 1989-12-26 General Electric Company Two-dimensional phased array of ultrasonic transducers
US4945915A (en) * 1987-02-20 1990-08-07 Olympus Optical Co., Ltd. Ultrasonic diagnosis apparatus
US4958327A (en) * 1987-08-31 1990-09-18 Kabushiki Kaisha Toshiba Ultrasonic imaging apparatus
US5045746A (en) * 1989-02-22 1991-09-03 Siemens Aktiengesellschaft Ultrasound array having trapezoidal oscillator elements and a method and apparatus for the manufacture thereof
US5091893A (en) * 1990-04-05 1992-02-25 General Electric Company Ultrasonic array with a high density of electrical connections

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881466A (en) * 1973-08-20 1975-05-06 Advanced Diagnostic Res Ultrasonic cross-sectional imaging system
US4285010A (en) * 1973-10-29 1981-08-18 Advanced Diagnostic Research Corporation Ultrasonic interrogating system and exciter-detector circuit therefor
US4543960A (en) * 1983-04-11 1985-10-01 Advanced Technology Laboratories, Inc. Transesophageal echo cardiography scanhead
US4514247A (en) * 1983-08-15 1985-04-30 North American Philips Corporation Method for fabricating composite transducers
US4959998A (en) * 1986-04-11 1990-10-02 Kabushiki Kaisha Toshiba Ultrasonic imaging apparatus
US4917097A (en) * 1987-10-27 1990-04-17 Endosonics Corporation Apparatus and method for imaging small cavities
JP2794720B2 (en) * 1988-08-23 1998-09-10 松下電器産業株式会社 Composite piezoelectric vibrator
US4894013A (en) * 1988-10-13 1990-01-16 The United States Of America As Represented By The Department Of Health And Human Services Anthropomorphic cardiac ultrasound phantom
US5123415A (en) * 1990-07-19 1992-06-23 Advanced Technology Laboratories, Inc. Ultrasonic imaging by radial scan of trapezoidal sector
US5135486A (en) * 1990-08-31 1992-08-04 Endosonics Corporation Self-venting balloon dilitation catheter
US5167233A (en) * 1991-01-07 1992-12-01 Endosonics Corporation Dilating and imaging apparatus
US5183048A (en) * 1991-06-24 1993-02-02 Endosonics Corporation Method and apparatus for removing artifacts from an ultrasonically generated image of a small cavity
US5271403A (en) * 1991-09-05 1993-12-21 Paulos John J Ultrasound imaging system
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4211948A (en) * 1978-11-08 1980-07-08 General Electric Company Front surface matched piezoelectric ultrasonic transducer array with wide field of view
US4296349A (en) * 1979-02-13 1981-10-20 Toray Industries, Inc. Ultrasonic transducer
US4217684A (en) * 1979-04-16 1980-08-19 General Electric Company Fabrication of front surface matched ultrasonic transducer array
US4489729A (en) * 1982-09-03 1984-12-25 Medtronic, Inc. Ultrasound imaging system
US4773140A (en) * 1983-10-31 1988-09-27 Advanced Technology Laboratories, Inc. Phased array transducer construction
US4747192A (en) * 1983-12-28 1988-05-31 Kabushiki Kaisha Toshiba Method of manufacturing an ultrasonic transducer
US4603276A (en) * 1984-05-22 1986-07-29 U.S. Philips Corporation Transducer comprising a network of piezoelectric elements
US4755708A (en) * 1984-05-30 1988-07-05 Siemens Aktiengesellschaft Hydrophone
US4638468A (en) * 1984-08-03 1987-01-20 Raytheon Company Polymer hydrophone array with multilayer printed circuit wiring
US4865042A (en) * 1985-08-16 1989-09-12 Hitachi, Ltd. Ultrasonic irradiation system
US4945915A (en) * 1987-02-20 1990-08-07 Olympus Optical Co., Ltd. Ultrasonic diagnosis apparatus
US5014711A (en) * 1987-02-20 1991-05-14 Olympus Optical Co., Ltd. Ultrasonic diagnosis apparatus
US4958327A (en) * 1987-08-31 1990-09-18 Kabushiki Kaisha Toshiba Ultrasonic imaging apparatus
US4890268A (en) * 1988-12-27 1989-12-26 General Electric Company Two-dimensional phased array of ultrasonic transducers
US5045746A (en) * 1989-02-22 1991-09-03 Siemens Aktiengesellschaft Ultrasound array having trapezoidal oscillator elements and a method and apparatus for the manufacture thereof
US5091893A (en) * 1990-04-05 1992-02-25 General Electric Company Ultrasonic array with a high density of electrical connections

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2357213A (en) * 1999-09-27 2001-06-13 Murata Manufacturing Co Piezoelectric sensor array having electrodes within individual piezoelectric elements
GB2357213B (en) * 1999-09-27 2003-01-15 Murata Manufacturing Co Sensor array method for manufacturing sensor array and ultrasonic diagnostic apparatus using the same
US6603240B1 (en) 1999-09-27 2003-08-05 Murata Manufacturing Co., Ltd. Sensor array, method for manufacturing sensor array, and ultrasonic diagnostic apparatus using the same
US7804228B2 (en) 2007-12-18 2010-09-28 Boston Scientific Scimed, Inc. Composite passive materials for ultrasound transducers
US11921200B1 (en) 2022-08-19 2024-03-05 Navico, Inc. Live down sonar view

Also Published As

Publication number Publication date
US5329496A (en) 1994-07-12
US5548564A (en) 1996-08-20
AU5321494A (en) 1994-05-09

Similar Documents

Publication Publication Date Title
WO1994009605A1 (en) Two-dimensional array ultrasonic transducers
US5381385A (en) Electrical interconnect for multilayer transducer elements of a two-dimensional transducer array
US4686408A (en) Curvilinear array of ultrasonic transducers
EP1218115B1 (en) Ultrasonic linear or curvilinear transducer and connection technique therefore
EP1266346B1 (en) Piezoelectric biometric identification device and applications thereof
US7067962B2 (en) Multiplexer for a piezo ceramic identification device
US5629578A (en) Integrated composite acoustic transducer array
US7141918B2 (en) Method for obtaining biometric data for an individual in a secure transaction
EP1308878A2 (en) Capacitive sensor element for fingerprint sensor
US4640291A (en) Bi-plane phased array for ultrasound medical imaging
US6236144B1 (en) Acoustic imaging arrays
WO2004021404A3 (en) Ultrasonic imaging devices and methods of fabrication
WO2001023105A8 (en) An array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
EP1312424A3 (en) Piezoelectric transducer, manufacturing method of piezoelectric transducer and pulse wave detector
JPWO2010044312A1 (en) Array type ultrasonic transducer
US4592029A (en) Array apparatus for reading-out a two-dimensional charge image
US6288477B1 (en) Composite ultrasonic transducer array operating in the K31 mode
EP0779108B1 (en) Acoustic imaging arrays
JPH09187099A (en) Piezoelectric film element
EP0697258A2 (en) Ultrasound probe with banks of interconnected electrostrictive transducer elements
US20060173343A1 (en) Grounded interleaved flex for ultrasound transducer array
US6046961A (en) Multi-layer tiled array
EP3545565B1 (en) 2d ultrasound transducer array methods of making the same
AUPO358896A0 (en) Integrated electronic structure
JPH10336792A (en) Ultrasonic vibrator transducer and method for the same

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AT AU BB BG BR BY CA CH CZ DE DK ES FI GB HU JP KP KR KZ LK LU LV MG MN MW NL NO NZ PL PT RO RU SD SE SK UA US UZ VN

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: CA