WO1994004285A1 - Vacuum deposition and curing of liquid monomers - Google Patents

Vacuum deposition and curing of liquid monomers Download PDF

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Publication number
WO1994004285A1
WO1994004285A1 PCT/US1993/007209 US9307209W WO9404285A1 WO 1994004285 A1 WO1994004285 A1 WO 1994004285A1 US 9307209 W US9307209 W US 9307209W WO 9404285 A1 WO9404285 A1 WO 9404285A1
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WO
WIPO (PCT)
Prior art keywords
monomer
depositing
onto
layer
curing
Prior art date
Application number
PCT/US1993/007209
Other languages
French (fr)
Inventor
John David Affinito
Original Assignee
Battelle Memorial Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute filed Critical Battelle Memorial Institute
Priority to JP50630394A priority Critical patent/JP3560608B2/en
Priority to CA002142895A priority patent/CA2142895C/en
Priority to EP93918541A priority patent/EP0655954B1/en
Priority to DE69320971T priority patent/DE69320971T2/en
Priority to DK93918541T priority patent/DK0655954T3/en
Publication of WO1994004285A1 publication Critical patent/WO1994004285A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/06Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
    • B05D5/067Metallic effect
    • B05D5/068Metallic effect achieved by multilayers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0493Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates generally to a method of making multilayer laminate structures from polymers and metals and/or oxides. More specifically, the present invention relates to forming solid polymer laminate layers under vacuum. Additional layers of polymer or metal or oxide may be added under vacuum as well.
  • Laminate structures are used in many applications including but not limited to electronic devices, packag- ing material, and solar reflectors. Laminate structures in electronic devices are found in devices including but not limited to circuit elements and electrochromic devices wherein conductive polymer layers are combined and may include a metal layer and/or an oxide layer. Electrochromic devices include but are not limited to switchable mirrors and switchable windows. Circuit elements include active elements, for example fuel cells and batteries, and passive elements, for example capacitors. Presently, many laminate structures are made with solid polymer laminate layers. In packaging material and solar reflectors, a metal layer may be added to enhance optical reflectance. In electronic devices, a metal layer may be added to enhance electrical conductivity.
  • the polymer layer or layers In packaging material and solar reflectors, it is not necessary that the polymer layer or layers be conductive, whereas in electronic devices, especially batteries, the polymer layers must be conductive to act as electrolytes, anodes, and cathodes.
  • Certain polymers when doped with selected salts are known to make suitable solid polymer ion conductive layers. Polymers known to be useful include but are not limited to polyethyleneoxide, polypropyleneoxide, polyorgansulfides, and polyanaline.
  • Suitable salts include but are not limited to lithium salts, for example lithium perchlorate, and lithium hexafluoroarsenate.
  • the anode, cathode, and electrolyte layers may all be of solid polymer material, when making a lithium polymer battery, it is preferred to have a layer of lithium metal as an anode.
  • Laminate structures further include electrochromic devices wherein an electrolyte is sandwiched between electrochromic oxide layers. Conductive layers are placed on the electrochromic oxide layers for connection to an electrical power source. Additional structural or protective layers may be added to enclose an electro ⁇ chromic assembly. Other polymers having added compounds, including but not limited to conductive powders and dyes, may be made by the present invention.
  • Polymer layers are formed in production quantities by depositing a thin layer of a monomer onto a moving substrate that carries the monomer layer while and until it is cured.
  • Many means for forming polymer layers are available, including but not limited to physical or mechanical liquid-monomer spreading apparati; for example, roll coaters, gravure roll coaters, wire wound rods, doctor blades, and slotted dies, as well as means for evaporation and deposition of a monomer vapor, for example polymer multilayer deposi ⁇ tion.
  • the substrate has a velocity different from a nozzle or bath that deposits the liquid monomer onto the substrate.
  • the term "moving substrate” as used herein excludes a situation wherein there is no relative motion or velocity differential between substrate and liquid- monomer dispensing means.
  • the polymer multilayer deposition technique is distinct from liquid-monomer spreading techniques because polymer multilayer deposition requires flash evaporation of the monomer.
  • a monomer is atomized into a heated chamber that is under vacuum. Within the heated chamber the monomer droplets are evaporated, then exit the heated chamber, and monomer vapor condenses upon a substrate and is subsequently cured. Curing may be done by any means including but not limited to heat, infrared light, ultraviolet light, electron beam, and other radiation.
  • a thin metal layer with a conductive polymer layer When fabricating a battery, several techniques are used to combine a thin metal layer with a conductive polymer layer.
  • One technique of battery fabrication is to combine a metal foil with a conductive polymer layer by press bonding a metal foil layer to a solid conductive polymer layer.
  • Another technique is to spread uncured conductive monomer onto a metal foil and subsequently cure the conductive monomer to form a solid conductive polymer layer.
  • Use of metal foil, especially lithium metal foil results in minimum metal thicknesses of from about 1.5 mils (40 micrometers) to about 2 mils
  • battery fabrication techniques include making a thin metal layer by sputtering, plating, or vacuum depositing metal onto a metal substrate. A conductive polymer is then placed in contact with the metal. Either solid conductive polymer or uncured conductive monomer may be brought into contact with the metal to form the battery.
  • Polymer laminate structures including but not limited to batteries, are made by a procedure wherein individual layers are sequentially and separately formed then combined.
  • the performance and lifetime of polymer/polymer and polymer/metal laminate structures depend upon the quality of bonding between laminate layers. Bonding quality is affected by the presence of small, even microscale, areas of non-bonding at an interface between laminate layers. The bonding is especially critical between dissimilar layers; for example, polymer and metal layers. In bat ⁇ teries, reduced bond quality between polymer and lithium metal layers results in greater internal resistance of a battery produced with the laminate material and potential for "hot spots" upon recharging. In any structure, another problem with bonding dissimilar materials is chemical interaction between the materials. Areas of non-bonding can enhance chemical interaction because they may contain non-inert species or provide different surface characteristics at a boundary between bonded and unbonded areas.
  • Bonding between layers is therefore of great impor ⁇ tance and is enhanced by several means, including but not limited to mechanical presses, and application of a second layer as a liquid with subsequent solidification upon a first solid layer at atmospheric pressure.
  • the difficulty with these methods is that the low cost assembly of pressing or liquid application leads to low quality bonding as identified in U.S. Pat. No. 4,098,965, issued July 4, 1976, to Kinsman, column 1, lines 47-50, wherein he states "[g]ases usually air, [that] are included in the void regions of the battery during assembly . . .”.
  • the present invention is the formation of solid polymer layers under vacuum. More specifically, accord ⁇ ing to a first aspect of the present invention, "standard" polymer-layer making equipment that is gen- erally used in an atmospheric environment is placed in a vacuum, with an additional step of degassing the monomer material prior to injection into the vacuum. Addition ⁇ ally, other layers of polymer or metal or oxide may be vacuum deposited onto solid polymer layers. Advantages of forming polymer layers in a vacuum include use of less to no photoinitiator for curing, faster curing, and fewer impurities in the polymer. Further advantages are improvement in material proper ⁇ ties, including no trapped gas, resulting in greater density and reduced monomer wetting angle that facili ⁇ tates spreading of the monomer and provides a smoother finished surface.
  • fabrication of laminate structures are carried out nearly simultaneously within a single vacuum chamber.
  • the method of the present invention is making a solid polymer layer by utilizing two known steps in combination with two additional steps that had not been combined prior to the present invention.
  • the known steps of depositing a thin layer of liquid monomer onto a moving substrate followed by curing said monomer and forming the solid polymer layer, are combined with the steps of (a) placing the moving substrate into a vacuum chamber, and (b) degassing the monomer prior to deposi ⁇ ting the degassed monomer onto the moving substrate in the vacuum chamber.
  • the substrate may be a temporary substrate from which the solid polymer layer product is removed after curing, or the substrate may be a permanent substrate forming part of the final product.
  • the permanent sub ⁇ strate can be as simple as a base polymer layer having a metalized surface, for example, a solar reflector.
  • the present invention may be used to place a protective coat- ing upon the metallic surface.
  • the permanent substrate may be as complex as a many-layered monolithic electronic device, for example, a capacitor in which the present invention may be used to place multiple polymer and metal layers to construct the device. According to the present invention, any polymer- layer making method done in air or other atmosphere may be adapted to be carried out in a vacuum.
  • the apparatus of the present invention is a combi ⁇ nation of known means with additional means that had not been combined prior to the present invention.
  • Apparatus for making a solid polymer layer includes a moving sub ⁇ strate together with means for depositing a thin layer of liquid monomer onto the moving substrate, followed by means for curing the liquid monomer and forming the solid polymer. These means are combined with (a) means for creating a vacuum about the moving substrate, and (b) means for degassing the liquid monomer prior to deposi ⁇ ting the degassed liquid monomer onto the moving sub ⁇ strate in the vacuum.
  • the metal is vacuum deposited onto a cured solid polymer layer.
  • the metal may be vacuum deposited onto a substrate, then liquid monomer deposited and spread under vacuum onto the metal surface.
  • Any vacuum deposition technique may be used, but electron beam evaporation is preferred, especially for vacuum deposi ⁇ tion of lithium metal. While any metal thickness is achievable with vacuum deposition techniques, a practical range of thickness is from about 10 angstroms to about 0.4 mils (10 micrometers).
  • the cathode and electrolyte are conductive polymer layers and that the anode is lithium metal.
  • the oxide is vacuum deposited onto a cured solid polymer layer. Any oxide vacuum deposition technique may be used, but reactive sputtering is preferred to maintain composition of the oxide layer and improved control over film structure.
  • Creating a vacuum about a moving substrate may be done in many ways, including housing an entire solid polymer-making apparatus in a vacuum chamber. Alterna ⁇ tively, a vacuum chamber may contain a moving substrate and a nozzle or coating head penetrating a wall of the vacuum chamber for admitting liquid monomer material.
  • Degassing of the liquid monomer may be carried out in any way, but it is preferred that the monomer be degassed by stirring it in a sealed vessel and removing residual gas with a vacuum pump.
  • the vacuum pump draws a vacuum of a pressure that removes a sufficient quantity of gas from the liquid monomer to permit smooth flow of the liquid monomer through a nozzle into the vacuum chamber with reduced entrained gas expansion, thereby preventing intermittent nozzle discharge, or spitting.
  • the amount of entrained gas must also be sufficiently low to result in an acceptable quality polymer. Acceptable quality includes but is not limited to the final polymer being free of void spaces and exhibiting a smooth surface.
  • the vacuum chamber may admit several liquid-monomer and other material inlets for permitting multiple monomer/polymer layers, curing means, as well as metal and/or oxide vacuum deposition means.
  • laminate structures are made in one pass through the chamber. For example, a polymer layer may be cured, then a second metallic or oxide layer deposited, and a subsequent polymer layer covering the second surface put in place, all within the vacuum chamber.
  • Multiple passes of a product through the vacuum chamber can develop stacks of layered sets.
  • the substrate velocity may be adjusted to accom ⁇ modate both processes. Additionally, the flow of mate ⁇ rial through a nozzle may be adjusted to accommodate both processes.
  • vacuum pressure is set low enough to permit metal and/or oxide deposition.
  • a lithium polymer battery requires a minimum of three layers, anode (lithium metal) electrolyte polymer, and cathode polymer, respectively. Additional layers include a cathode current collector metal layer, and an anode current collector metal layer.
  • the metal layers can be of any metal or metal alloy but are preferably metals or alloys that are chemically compatible and highly electrically conductive, for example gold, silver and copper.
  • first and second polymer insulating layers may be deposited onto the current collectors to form a cell. Cells may be stacked with or without intervening polymer insulating material.
  • a method of making a lithium polymer battery has a minimum of six steps.
  • the first three steps are equipment arrangement steps of (a) placing a moving substrate into a vacuum chamber, (b) placing a mechanical liquid-monomer spread ⁇ ing apparatus into the vacuum chamber, and (c) degassing a liquid monomer cathode material.
  • the next three steps are material deposition steps of (d)depositing a thin layer of the liquid monomer cathode material onto the moving substrate, (e) curing the monomer cathode material and forming a solid cathode polymer, and (f) depositing and curing a thin layer of monomer electrolyte material onto said cathode, forming a solid polymer electrolyte with subsequent deposition of lithium metal onto said electrolyte, forming an anode.
  • two steps may precede the material deposition steps. Specifically, the additional steps of (g) depositing a first monomer insulating material layer onto the moving substrate and curing the first monomer insulating material layer in advance of step (d) deposition of monomer cathode, and (h) depositing a cathode current collector metal onto the cured insulating material in advance of step (d) depo ⁇ sition of monomer cathode. Additionally, two steps may follow the material deposition steps, vis the steps of (i) depositing an anode current collector onto the anode, and (j) depositing a second monomer insulating layer onto the anode current collector and curing the second monomer insulating layer.
  • Electrochromic devices are similar to lithium polymer batteries in the aspect of an electrolyte layer combined with conductive layers. However, the specific layers are distinct so that the method of making electrochromic devices according to the present invention has the same equipment arrangement steps of (a) placing a moving substrate into a vacuum chamber, (b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber, and (c) degassing a liquid monomer electrolyte material.
  • the material deposition steps are (d) depositing a first conductive oxide layer onto the moving substrate, (e) depositing a first electrochromic oxide layer onto the first conductive oxide layer, (f) depositing the liquid monomer electro ⁇ lyte material onto the first electrochromic oxide layer, (g) curing the liquid monomer electrolyte to a solid polymer electrolyte, (h) depositing a second electro ⁇ chromic oxide layer onto the solid polymer electrolyte, and (i) depositing a second conductive oxide layer onto the second electrochromic oxide layer.
  • conductive oxide layer material Any conductive oxide layer material may be used, but preferred conductive oxide materials include, for example indium oxide, indium-tin oxide, tin oxide, and zinc oxide. Indium oxides are preferred. Electrochromic oxide materials include but are not limited to tungsten oxides, iridium oxides, and vanadium oxides.

Abstract

The present invention is the formation of solid polymer layers under vacuum. More specifically, the present invention is the use of 'standard' polymer layer-making equipment that is generally used in an atmospheric environment in a vacuum, and degassing the monomer material prior to injection into the vacuum. Additional layers of polymer or metal or oxide may be vacuum deposited onto solid polymer layers. Formation of polymer layers under a vacuum improves material and surface characteristics, and subsequent quality of bonding to additional layers. Further advantages include use of less to no photoinitiator for curing, faster curing, fewer impurities in the polymer electrolyte, as well as improvement in material properties including no trapped gas resulting in greater density, and reduced monomer wetting angle that facilitates spreading of the monomer and provides a smoother finished surface.

Description

VACUUM DEPOSITION AND CURING OF LIQUID MONOMERS
FIELD OF THE INVENTION
The present invention relates generally to a method of making multilayer laminate structures from polymers and metals and/or oxides. More specifically, the present invention relates to forming solid polymer laminate layers under vacuum. Additional layers of polymer or metal or oxide may be added under vacuum as well.
BACKGROUND OF THE INVENTION
Laminate structures are used in many applications including but not limited to electronic devices, packag- ing material, and solar reflectors. Laminate structures in electronic devices are found in devices including but not limited to circuit elements and electrochromic devices wherein conductive polymer layers are combined and may include a metal layer and/or an oxide layer. Electrochromic devices include but are not limited to switchable mirrors and switchable windows. Circuit elements include active elements, for example fuel cells and batteries, and passive elements, for example capacitors. Presently, many laminate structures are made with solid polymer laminate layers. In packaging material and solar reflectors, a metal layer may be added to enhance optical reflectance. In electronic devices, a metal layer may be added to enhance electrical conductivity. In packaging material and solar reflectors, it is not necessary that the polymer layer or layers be conductive, whereas in electronic devices, especially batteries, the polymer layers must be conductive to act as electrolytes, anodes, and cathodes. Certain polymers when doped with selected salts are known to make suitable solid polymer ion conductive layers. Polymers known to be useful include but are not limited to polyethyleneoxide, polypropyleneoxide, polyorgansulfides, and polyanaline. Suitable salts include but are not limited to lithium salts, for example lithium perchlorate, and lithium hexafluoroarsenate. Although the anode, cathode, and electrolyte layers may all be of solid polymer material, when making a lithium polymer battery, it is preferred to have a layer of lithium metal as an anode.
Laminate structures further include electrochromic devices wherein an electrolyte is sandwiched between electrochromic oxide layers. Conductive layers are placed on the electrochromic oxide layers for connection to an electrical power source. Additional structural or protective layers may be added to enclose an electro¬ chromic assembly. Other polymers having added compounds, including but not limited to conductive powders and dyes, may be made by the present invention.
Presently, mass production of polymer and metal laminate structures used for electronic devices, and especially batteries, relies upon assembling preformed layers of polymer with a thin metal foil. Polymer layers are formed in production quantities by depositing a thin layer of a monomer onto a moving substrate that carries the monomer layer while and until it is cured. Many means for forming polymer layers are available, including but not limited to physical or mechanical liquid-monomer spreading apparati; for example, roll coaters, gravure roll coaters, wire wound rods, doctor blades, and slotted dies, as well as means for evaporation and deposition of a monomer vapor, for example polymer multilayer deposi¬ tion. In any means having a moving substrate, the substrate has a velocity different from a nozzle or bath that deposits the liquid monomer onto the substrate. Hence, the term "moving substrate" as used herein excludes a situation wherein there is no relative motion or velocity differential between substrate and liquid- monomer dispensing means.
The polymer multilayer deposition technique is distinct from liquid-monomer spreading techniques because polymer multilayer deposition requires flash evaporation of the monomer. First, a monomer is atomized into a heated chamber that is under vacuum. Within the heated chamber the monomer droplets are evaporated, then exit the heated chamber, and monomer vapor condenses upon a substrate and is subsequently cured. Curing may be done by any means including but not limited to heat, infrared light, ultraviolet light, electron beam, and other radiation.
When fabricating a battery, several techniques are used to combine a thin metal layer with a conductive polymer layer. One technique of battery fabrication is to combine a metal foil with a conductive polymer layer by press bonding a metal foil layer to a solid conductive polymer layer. Another technique is to spread uncured conductive monomer onto a metal foil and subsequently cure the conductive monomer to form a solid conductive polymer layer. Use of metal foil, especially lithium metal foil, results in minimum metal thicknesses of from about 1.5 mils (40 micrometers) to about 2 mils
(50 micrometers) . Other battery fabrication techniques include making a thin metal layer by sputtering, plating, or vacuum depositing metal onto a metal substrate. A conductive polymer is then placed in contact with the metal. Either solid conductive polymer or uncured conductive monomer may be brought into contact with the metal to form the battery. Polymer laminate structures, including but not limited to batteries, are made by a procedure wherein individual layers are sequentially and separately formed then combined.
The performance and lifetime of polymer/polymer and polymer/metal laminate structures depend upon the quality of bonding between laminate layers. Bonding quality is affected by the presence of small, even microscale, areas of non-bonding at an interface between laminate layers. The bonding is especially critical between dissimilar layers; for example, polymer and metal layers. In bat¬ teries, reduced bond quality between polymer and lithium metal layers results in greater internal resistance of a battery produced with the laminate material and potential for "hot spots" upon recharging. In any structure, another problem with bonding dissimilar materials is chemical interaction between the materials. Areas of non-bonding can enhance chemical interaction because they may contain non-inert species or provide different surface characteristics at a boundary between bonded and unbonded areas.
Bonding between layers is therefore of great impor¬ tance and is enhanced by several means, including but not limited to mechanical presses, and application of a second layer as a liquid with subsequent solidification upon a first solid layer at atmospheric pressure. The difficulty with these methods is that the low cost assembly of pressing or liquid application leads to low quality bonding as identified in U.S. Pat. No. 4,098,965, issued July 4, 1976, to Kinsman, column 1, lines 47-50, wherein he states "[g]ases usually air, [that] are included in the void regions of the battery during assembly . . .".
Likewise, bonding between layers within electro¬ chromic devices and other laminate structures is directly related to the performance of the devices. It is of great interest to those skilled in the art, then, to make batteries and other laminate struc¬ tures having high bond quality while making them in a cost effective manner.
SUMMARY OF THE INVENTION
The present invention is the formation of solid polymer layers under vacuum. More specifically, accord¬ ing to a first aspect of the present invention, "standard" polymer-layer making equipment that is gen- erally used in an atmospheric environment is placed in a vacuum, with an additional step of degassing the monomer material prior to injection into the vacuum. Addition¬ ally, other layers of polymer or metal or oxide may be vacuum deposited onto solid polymer layers. Advantages of forming polymer layers in a vacuum include use of less to no photoinitiator for curing, faster curing, and fewer impurities in the polymer. Further advantages are improvement in material proper¬ ties, including no trapped gas, resulting in greater density and reduced monomer wetting angle that facili¬ tates spreading of the monomer and provides a smoother finished surface.
According to a second aspect of the invention, fabrication of laminate structures are carried out nearly simultaneously within a single vacuum chamber.
The subject matter of the present invention is particularly pointed out and distinctly claimed in the concluding portion of this specification. However, both the organization and method of operation, together with further advantages and objects thereof, may best be understood by reference to the following detailed description. DESCRIPTION OF THE PREFERRED EMBODIMENT(S)
The method of the present invention is making a solid polymer layer by utilizing two known steps in combination with two additional steps that had not been combined prior to the present invention. The known steps of depositing a thin layer of liquid monomer onto a moving substrate followed by curing said monomer and forming the solid polymer layer, are combined with the steps of (a) placing the moving substrate into a vacuum chamber, and (b) degassing the monomer prior to deposi¬ ting the degassed monomer onto the moving substrate in the vacuum chamber.
The substrate may be a temporary substrate from which the solid polymer layer product is removed after curing, or the substrate may be a permanent substrate forming part of the final product. The permanent sub¬ strate can be as simple as a base polymer layer having a metalized surface, for example, a solar reflector. The present invention may be used to place a protective coat- ing upon the metallic surface. The permanent substrate may be as complex as a many-layered monolithic electronic device, for example, a capacitor in which the present invention may be used to place multiple polymer and metal layers to construct the device. According to the present invention, any polymer- layer making method done in air or other atmosphere may be adapted to be carried out in a vacuum.
The apparatus of the present invention is a combi¬ nation of known means with additional means that had not been combined prior to the present invention. Apparatus for making a solid polymer layer includes a moving sub¬ strate together with means for depositing a thin layer of liquid monomer onto the moving substrate, followed by means for curing the liquid monomer and forming the solid polymer. These means are combined with (a) means for creating a vacuum about the moving substrate, and (b) means for degassing the liquid monomer prior to deposi¬ ting the degassed liquid monomer onto the moving sub¬ strate in the vacuum. For making a polymer/metal laminate structure, the metal is vacuum deposited onto a cured solid polymer layer. Alternatively, the metal may be vacuum deposited onto a substrate, then liquid monomer deposited and spread under vacuum onto the metal surface. Any vacuum deposition technique may be used, but electron beam evaporation is preferred, especially for vacuum deposi¬ tion of lithium metal. While any metal thickness is achievable with vacuum deposition techniques, a practical range of thickness is from about 10 angstroms to about 0.4 mils (10 micrometers). For making a lithium polymer battery, it is preferred that the cathode and electrolyte are conductive polymer layers and that the anode is lithium metal.
For making additional polymer/oxide laminate struc- ture, the oxide is vacuum deposited onto a cured solid polymer layer. Any oxide vacuum deposition technique may be used, but reactive sputtering is preferred to maintain composition of the oxide layer and improved control over film structure. Creating a vacuum about a moving substrate may be done in many ways, including housing an entire solid polymer-making apparatus in a vacuum chamber. Alterna¬ tively, a vacuum chamber may contain a moving substrate and a nozzle or coating head penetrating a wall of the vacuum chamber for admitting liquid monomer material.
Degassing of the liquid monomer may be carried out in any way, but it is preferred that the monomer be degassed by stirring it in a sealed vessel and removing residual gas with a vacuum pump. The vacuum pump draws a vacuum of a pressure that removes a sufficient quantity of gas from the liquid monomer to permit smooth flow of the liquid monomer through a nozzle into the vacuum chamber with reduced entrained gas expansion, thereby preventing intermittent nozzle discharge, or spitting. The amount of entrained gas must also be sufficiently low to result in an acceptable quality polymer. Acceptable quality includes but is not limited to the final polymer being free of void spaces and exhibiting a smooth surface.
The vacuum chamber may admit several liquid-monomer and other material inlets for permitting multiple monomer/polymer layers, curing means, as well as metal and/or oxide vacuum deposition means. With a multiple inlet vacuum chamber, laminate structures are made in one pass through the chamber. For example, a polymer layer may be cured, then a second metallic or oxide layer deposited, and a subsequent polymer layer covering the second surface put in place, all within the vacuum chamber. Multiple passes of a product through the vacuum chamber can develop stacks of layered sets. By placing liquid monomer spreading and vapor deposition of metal and/or oxide layer in the same vacuum chamber, the substrate velocity may be adjusted to accom¬ modate both processes. Additionally, the flow of mate¬ rial through a nozzle may be adjusted to accommodate both processes. Similarly, vacuum pressure is set low enough to permit metal and/or oxide deposition.
A lithium polymer battery requires a minimum of three layers, anode (lithium metal) electrolyte polymer, and cathode polymer, respectively. Additional layers include a cathode current collector metal layer, and an anode current collector metal layer. The metal layers can be of any metal or metal alloy but are preferably metals or alloys that are chemically compatible and highly electrically conductive, for example gold, silver and copper. Moreover, first and second polymer insulating layers may be deposited onto the current collectors to form a cell. Cells may be stacked with or without intervening polymer insulating material.
Thus, a method of making a lithium polymer battery, according to the present invention has a minimum of six steps. The first three steps are equipment arrangement steps of (a) placing a moving substrate into a vacuum chamber, (b) placing a mechanical liquid-monomer spread¬ ing apparatus into the vacuum chamber, and (c) degassing a liquid monomer cathode material. The next three steps are material deposition steps of (d)depositing a thin layer of the liquid monomer cathode material onto the moving substrate, (e) curing the monomer cathode material and forming a solid cathode polymer, and (f) depositing and curing a thin layer of monomer electrolyte material onto said cathode, forming a solid polymer electrolyte with subsequent deposition of lithium metal onto said electrolyte, forming an anode.
For particular applications requiring current collectors and protective insulating layers, two steps may precede the material deposition steps. Specifically, the additional steps of (g) depositing a first monomer insulating material layer onto the moving substrate and curing the first monomer insulating material layer in advance of step (d) deposition of monomer cathode, and (h) depositing a cathode current collector metal onto the cured insulating material in advance of step (d) depo¬ sition of monomer cathode. Additionally, two steps may follow the material deposition steps, vis the steps of (i) depositing an anode current collector onto the anode, and (j) depositing a second monomer insulating layer onto the anode current collector and curing the second monomer insulating layer.
Electrochromic devices are similar to lithium polymer batteries in the aspect of an electrolyte layer combined with conductive layers. However, the specific layers are distinct so that the method of making electrochromic devices according to the present invention has the same equipment arrangement steps of (a) placing a moving substrate into a vacuum chamber, (b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber, and (c) degassing a liquid monomer electrolyte material. However, the material deposition steps are (d) depositing a first conductive oxide layer onto the moving substrate, (e) depositing a first electrochromic oxide layer onto the first conductive oxide layer, (f) depositing the liquid monomer electro¬ lyte material onto the first electrochromic oxide layer, (g) curing the liquid monomer electrolyte to a solid polymer electrolyte, (h) depositing a second electro¬ chromic oxide layer onto the solid polymer electrolyte, and (i) depositing a second conductive oxide layer onto the second electrochromic oxide layer.
Any conductive oxide layer material may be used, but preferred conductive oxide materials include, for example indium oxide, indium-tin oxide, tin oxide, and zinc oxide. Indium oxides are preferred. Electrochromic oxide materials include but are not limited to tungsten oxides, iridium oxides, and vanadium oxides.
While a preferred embodiment of the present inven¬ tion has been shown and described, it will be apparent to those skilled in the art that many changes and modifica¬ tions may be made without departing from the invention in its broader aspects. The appended claims are therefore intended to cover all such changes and modifications as fall within the true spirit and scope of the invention.

Claims

I claim:
1. A method of making a solid polymer layer, comprising the steps of:
(a) placing a moving substrate into a vacuum chamber;
(b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber;
(c) degassing a first liquid monomer,
(d) depositing a first thin layer of the degassed liquid monomer from said liquid-monomer spreading apparatus onto the moving substrate within the vacuum chamber; and
(i) curing said first thin layer.
2. A method as recited in claim 1, further com- prising the step of:
(e) vacuum depositing metal or oxide onto said solid polymer layer.
3. A method of making a lithium polymer battery, comprising the steps of: (a) placing a moving substrate into a vacuum chamber;
(b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber;
(c) degassing a liquid monomer cathode material;
(d) depositing a thin layer of said liquid monomer cathode material onto the moving substrate;
(e) curing said monomer cathode material forming a solid cathode polymer; and (f) depositing and curing a thin layer of monomer electrolyte material onto said cathode, forming a solid polymer electrolyte with subsequent deposition of lithium metal onto said electrolyte, forming an anode.
4. The method as recited in claim 3, further comprising the steps of:
(g) depositing a first monomer insulating material layer onto said moving substrate and curing the first monomer insulating material layer in advance of step (d) deposition of monomer cathode; and
(h) depositing a cathode current collector metal onto the cured insulating material in advance of step (d) deposition of monomer cathode.
5. The method as recited in claim 6, further comprising the steps of:
(i) depositing an anode current collector onto the anode; and
(j) depositing a second monomer insulating layer onto the anode current collector and curing the second monomer insulating layer.
6. A method of making a lithium polymer battery, comprising the steps of:
(a) placing a moving substrate into a vacuum chamber;
(b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber;
(c) degassing a liquid monomer electrolyte material; (d) depositing a thin layer of lithium metal onto the moving substrate and forming an anode;
(e) depositing a thin layer of degassed monomer electrolyte material onto the lithium metal;
(f) curing said monomer electrolyte material forming a solid electrolyte polymer; and
(g) depositing and curing a thin layer of monomer cathode material onto said electrolyte, forming a solid polymer cathode.
7. The method as recited in claim 6, further comprising the steps of:
(h) depositing a first monomer insulating material layer onto said moving substrate and curing the first monomer insulating material layer in advance of step (d) deposition of lithium metal; and
(i) depositing an anode current collector metal onto the cured insulating material in advance of step (d) deposition of lithium metal.
8. The method as recited in claim 7, further comprising the steps of:
(j) depositing a cathode current collector onto the cathode; and
(k) depositing a second monomer insulating layer onto the cathode current collector and curing the second monomer insulating layer.
9. A method of making electrochromic devices comprising the steps of:
(a) placing a moving substrate into a vacuum chamber;
(b) placing a mechanical liquid-monomer spreading apparatus into the vacuum chamber;
(c) degassing a liquid monomer electrolyte material; (d) depositing a first conductive oxide layer onto the moving substrate;
(e) depositing a first electrochromic oxide layer onto the first conductive oxide layer;
(f) depositing the liquid monomer electrolyte material onto the first electrochromic oxide layer;
(g) curing the liquid monomer electrolyte to a solid polymer electrolyte;
(h) depositing a second electrochromic oxide layer onto the solid polymer electrolyte; and (i) depositing a second conductive oxide layer onto the second electrochromic oxide layer.
10. An apparatus for making a solid polymer layer, comprising: (a) a moving substrate,
(b) means for creating a vacuum about said moving substrate,
(c) means for degassing the liquid monomer, and (d) means for depositing a first thin layer of degassed liquid monomer onto said moving substrate followed by means for curing said liquid monomer and forming a first solid polymer layer.
11. The apparatus as recited in claim 10, further comprising:
(e) additional means for vacuum depositing metal, means for depositing oxide, or means for depositing further layers of degassed liquid monomer together with means for curing the degassed liquid monomer.
12. The apparatus as recited in claim 10, wherein said means for depositing is a mechanical liquid monomer spreading apparatus.
13. The apparatus as recited in claim 12 wherein said mechanical liquid monomer spreading apparatus is selected from the group of roll coaters, wire wound rods, doctor blade coaters, and slotted die coaters.
PCT/US1993/007209 1992-08-21 1993-07-30 Vacuum deposition and curing of liquid monomers WO1994004285A1 (en)

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JP50630394A JP3560608B2 (en) 1992-08-21 1993-07-30 Vacuum deposition and curing of liquid monomers
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EP93918541A EP0655954B1 (en) 1992-08-21 1993-07-30 Vacuum deposition and curing of liquid monomers
DE69320971T DE69320971T2 (en) 1992-08-21 1993-07-30 VACUUM COATING AND CURING OF LIQUID MONOMERS
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Families Citing this family (142)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6524698B1 (en) 1990-09-27 2003-02-25 Helmuth Schmoock Fluid impermeable foil
JP2841923B2 (en) * 1991-06-07 1998-12-24 日本製紙株式会社 Manufacturing method of coated paper for printing
US5260095A (en) * 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers
US20040241454A1 (en) * 1993-10-04 2004-12-02 Shaw David G. Barrier sheet and method of making same
US5554470A (en) * 1994-12-09 1996-09-10 Xerox Corporation Process and apparatus for manufacturing migration imaging members
US5576129A (en) * 1994-12-09 1996-11-19 Xerox Corporation Migration imaging members
US5567544A (en) * 1995-05-26 1996-10-22 Boundless Corp. Battery
US5681615A (en) * 1995-07-27 1997-10-28 Battelle Memorial Institute Vacuum flash evaporated polymer composites
CH692135A5 (en) * 1997-08-20 2002-02-28 Tradition Establishment A process for the metalizing coating of artifacts.
US5902641A (en) * 1997-09-29 1999-05-11 Battelle Memorial Institute Flash evaporation of liquid monomer particle mixture
US6224948B1 (en) 1997-09-29 2001-05-01 Battelle Memorial Institute Plasma enhanced chemical deposition with low vapor pressure compounds
KR100312395B1 (en) 1998-03-23 2001-11-03 프레스텍, 인크. Lithographic Imaging With Constructions Having Mixed Organic/Inorganic Layers
US6251334B1 (en) 1998-03-23 2001-06-26 Presstek, Inc. Composite constructions having mixed organic/inorganic layers
US6146225A (en) * 1998-07-30 2000-11-14 Agilent Technologies, Inc. Transparent, flexible permeability barrier for organic electroluminescent devices
US20030178734A1 (en) * 1998-10-23 2003-09-25 Karl Josephy Process for making angstrom scale and high aspect functional platelets
EP1131473B1 (en) * 1998-10-23 2004-01-02 Avery Dennison Corporation Process for making metal flakes
US6863851B2 (en) * 1998-10-23 2005-03-08 Avery Dennison Corporation Process for making angstrom scale and high aspect functional platelets
WO2000026973A1 (en) * 1998-11-02 2000-05-11 Presstek, Inc. Transparent conductive oxides for plastic flat panel displays
US6217947B1 (en) 1998-12-16 2001-04-17 Battelle Memorial Institute Plasma enhanced polymer deposition onto fixtures
TW439308B (en) 1998-12-16 2001-06-07 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6228434B1 (en) * 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making a conformal coating of a microtextured surface
US6274204B1 (en) 1998-12-16 2001-08-14 Battelle Memorial Institute Method of making non-linear optical polymer
US6268695B1 (en) 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6228436B1 (en) 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making light emitting polymer composite material
US6207238B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition for high and/or low index of refraction polymers
US6207239B1 (en) 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition of conjugated polymer
US6110588A (en) 1999-02-05 2000-08-29 3M Innovative Properties Company Microfibers and method of making
US6630231B2 (en) 1999-02-05 2003-10-07 3M Innovative Properties Company Composite articles reinforced with highly oriented microfibers
US6172810B1 (en) 1999-02-26 2001-01-09 3M Innovative Properties Company Retroreflective articles having polymer multilayer reflective coatings
US6503564B1 (en) 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
US6506461B2 (en) * 1999-03-31 2003-01-14 Battelle Memorial Institute Methods for making polyurethanes as thin films
US6358570B1 (en) 1999-03-31 2002-03-19 Battelle Memorial Institute Vacuum deposition and curing of oligomers and resins
US20070196682A1 (en) * 1999-10-25 2007-08-23 Visser Robert J Three dimensional multilayer barrier and method of making
US6623861B2 (en) 2001-04-16 2003-09-23 Battelle Memorial Institute Multilayer plastic substrates
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US7198832B2 (en) * 1999-10-25 2007-04-03 Vitex Systems, Inc. Method for edge sealing barrier films
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US6573652B1 (en) * 1999-10-25 2003-06-03 Battelle Memorial Institute Encapsulated display devices
US6413645B1 (en) * 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6548912B1 (en) 1999-10-25 2003-04-15 Battelle Memorial Institute Semicoductor passivation using barrier coatings
US20090191342A1 (en) * 1999-10-25 2009-07-30 Vitex Systems, Inc. Method for edge sealing barrier films
US6521324B1 (en) 1999-11-30 2003-02-18 3M Innovative Properties Company Thermal transfer of microstructured layers
FR2806076B1 (en) 2000-03-08 2002-09-20 Saint Gobain Vitrage TRANSPARENT SUBSTRATE COATED WITH A POLYMER LAYER
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
US6352744B1 (en) * 2000-05-31 2002-03-05 Owens Corning Fiberglas Technology, Inc. Vacuum treatment of asphalt coating
EP1344265B1 (en) 2000-12-21 2008-02-13 Sion Power Corporation Lithium anodes for electrochemical cells
US6468595B1 (en) * 2001-02-13 2002-10-22 Sigma Technologies International, Inc. Vaccum deposition of cationic polymer systems
CA2352567A1 (en) * 2001-07-06 2003-01-06 Mohamed Latreche Translucent material displaying ultra-low transport of gases and vapors, and method for its production
US20090208754A1 (en) 2001-09-28 2009-08-20 Vitex Systems, Inc. Method for edge sealing barrier films
US6888305B2 (en) * 2001-11-06 2005-05-03 Universal Display Corporation Encapsulation structure that acts as a multilayer mirror
US6597111B2 (en) 2001-11-27 2003-07-22 Universal Display Corporation Protected organic optoelectronic devices
US6765351B2 (en) * 2001-12-20 2004-07-20 The Trustees Of Princeton University Organic optoelectronic device structures
US7012363B2 (en) * 2002-01-10 2006-03-14 Universal Display Corporation OLEDs having increased external electroluminescence quantum efficiencies
US7138014B2 (en) * 2002-01-28 2006-11-21 Applied Materials, Inc. Electroless deposition apparatus
TW200304955A (en) * 2002-04-05 2003-10-16 Matsushita Electric Ind Co Ltd Method and apparatus for producing resin thin film
US6897474B2 (en) 2002-04-12 2005-05-24 Universal Display Corporation Protected organic electronic devices and methods for making the same
US6835950B2 (en) 2002-04-12 2004-12-28 Universal Display Corporation Organic electronic devices with pressure sensitive adhesive layer
US8900366B2 (en) 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
KR100475849B1 (en) * 2002-04-17 2005-03-10 한국전자통신연구원 Organic electroluminescent devices having encapsulation thin film formed by wet processing and methods for manufacturing the same
US6933051B2 (en) * 2002-08-17 2005-08-23 3M Innovative Properties Company Flexible electrically conductive film
US6818291B2 (en) * 2002-08-17 2004-11-16 3M Innovative Properties Company Durable transparent EMI shielding film
US7215473B2 (en) * 2002-08-17 2007-05-08 3M Innovative Properties Company Enhanced heat mirror films
US6929864B2 (en) * 2002-08-17 2005-08-16 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
US6890588B2 (en) * 2002-09-05 2005-05-10 Intel Corporation Method and apparatus for applying a gel
US6994933B1 (en) 2002-09-16 2006-02-07 Oak Ridge Micro-Energy, Inc. Long life thin film battery and method therefor
CN1176565C (en) * 2002-11-25 2004-11-17 清华大学 Package layer for organic electroluminescent device and its prepn method and application
US7510913B2 (en) 2003-04-11 2009-03-31 Vitex Systems, Inc. Method of making an encapsulated plasma sensitive device
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
JP4917741B2 (en) * 2003-05-01 2012-04-18 ノードソン コーポレーション Method for applying and drying electrode ink
JP2005002448A (en) * 2003-06-13 2005-01-06 Tokyo Electron Ltd Electroless plating equipment and electroless plating method
US6998648B2 (en) * 2003-08-25 2006-02-14 Universal Display Corporation Protected organic electronic device structures incorporating pressure sensitive adhesive and desiccant
JP4787173B2 (en) * 2003-12-30 2011-10-05 スリーエム イノベイティブ プロパティズ カンパニー Color-shifting retroreflector and method for manufacturing the same
US20050269943A1 (en) * 2004-06-04 2005-12-08 Michael Hack Protected organic electronic devices and methods for making the same
US7292408B2 (en) * 2004-07-30 2007-11-06 Hitachi Global Storage Technologies Netherlands B.V. Bilayer coil insulation for magnetic write heads to minimize pole recession
US20060040091A1 (en) * 2004-08-23 2006-02-23 Bletsos Ioannis V Breathable low-emissivity metalized sheets
US7195360B2 (en) * 2004-12-28 2007-03-27 3M Innovative Properties Company Prismatic retroreflective article and method
CN100526917C (en) * 2004-12-28 2009-08-12 3M创新有限公司 Prismatic retroreflective article with fluorine- or silicon-containing prisms
US20060153997A1 (en) * 2005-01-07 2006-07-13 Eastman Kodak Company Method of varying wavelengths of liquid crystals
US7767498B2 (en) 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
US8323801B2 (en) * 2006-01-18 2012-12-04 E I Du Pont De Nemours And Company Process for forming a durable low emissivity moisture vapor permeable metallized sheet including a protective metal oxide layer
JPWO2007111075A1 (en) 2006-03-24 2009-08-06 コニカミノルタエムジー株式会社 Transparent barrier sheet and method for producing transparent barrier sheet
WO2007111074A1 (en) 2006-03-24 2007-10-04 Konica Minolta Medical & Graphic, Inc. Transparent barrier sheet and method for producing transparent barrier sheet
WO2007111092A1 (en) 2006-03-24 2007-10-04 Konica Minolta Medical & Graphic, Inc. Transparent barrier sheet and method for producing transparent barrier sheet
JPWO2007111076A1 (en) 2006-03-24 2009-08-06 コニカミノルタエムジー株式会社 Transparent barrier sheet and method for producing transparent barrier sheet
JPWO2007111098A1 (en) 2006-03-24 2009-08-06 コニカミノルタエムジー株式会社 Transparent barrier sheet and method for producing the same
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
BRPI0721299B1 (en) 2006-12-28 2018-07-24 3M Innovative Properties Company. METHOD FOR FORMATION OF A CONDUCTIVE FILM ON A FLEXIBLE POLYMER HOLDER, CONDUCTORY FILM AND METHOD FOR THE MANUFACTURE OF A VITRIFICATION ARTICLE
KR20170019491A (en) * 2006-12-29 2017-02-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Method of making inorganic or inorganic/organic hybrid films
US8084102B2 (en) * 2007-02-06 2011-12-27 Sion Power Corporation Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions
WO2009002892A1 (en) 2007-06-22 2008-12-31 The Regents Of The University Of Colorado Protective coatings for organic electronic devices made using atomic layer deposition and molecular layer deposition techniques
US10035932B2 (en) 2007-09-25 2018-07-31 Aero Advanced Paint Technology, Inc. Paint replacement films, composites therefrom, and related methods
US20090162667A1 (en) * 2007-12-20 2009-06-25 Lumination Llc Lighting device having backlighting, illumination and display applications
JP2011508062A (en) * 2007-12-28 2011-03-10 スリーエム イノベイティブ プロパティズ カンパニー Flexible encapsulated film system
US10981371B2 (en) 2008-01-19 2021-04-20 Entrotech, Inc. Protected graphics and related methods
WO2009132651A1 (en) * 2008-04-30 2009-11-05 Danfoss A/S A pump powered by a polymer transducer
US20110186759A1 (en) * 2008-04-30 2011-08-04 Danfoss Polypower A/S Power actuated valve
US8350451B2 (en) 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
EP2304069A4 (en) * 2008-06-30 2012-01-04 3M Innovative Properties Co Method of making inorganic or inorganic/organic hybrid barrier films
US9790318B2 (en) * 2008-09-26 2017-10-17 entrotech, inc Methods for polymerizing films in-situ
US9337446B2 (en) 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
US9184410B2 (en) 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US20100167002A1 (en) * 2008-12-30 2010-07-01 Vitex Systems, Inc. Method for encapsulating environmentally sensitive devices
US7985188B2 (en) * 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
ES2452519T3 (en) 2009-05-13 2014-04-01 Sio2 Medical Products, Inc. Container holder
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US10544502B2 (en) 2009-11-30 2020-01-28 Xefco Pty Ltd Functional composite garment materials
US8460762B2 (en) * 2009-12-16 2013-06-11 Ideon Llc Electron beam curable composition for curing in a vacuum chamber
JP5611812B2 (en) * 2009-12-31 2014-10-22 三星ディスプレイ株式會社Samsung Display Co.,Ltd. Barrier film composite, display device including the same, and method for manufacturing the display device
US8590338B2 (en) 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
JP5611811B2 (en) 2009-12-31 2014-10-22 三星ディスプレイ株式會社Samsung Display Co.,Ltd. Barrier film composite and display device including the same
JP5290268B2 (en) * 2009-12-31 2013-09-18 三星ディスプレイ株式會社 Barrier / film composite, display device including the same, method for manufacturing barrier / film composite, and method for manufacturing display device including the same
EP2522034A1 (en) * 2010-01-06 2012-11-14 Dow Global Technologies LLC Moisture resistant photovoltaic devices with elastomeric, polysiloxane protection layer
US8828303B2 (en) 2010-03-31 2014-09-09 Entrotech, Inc. Methods for polymerizing films in-situ using a radiation source
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
DE112011102927T5 (en) * 2010-09-03 2013-07-04 Ulvac, Inc. Method for forming a protective film and method for surface flattening
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
EP2508646A1 (en) 2011-04-05 2012-10-10 Bayer Material Science AG A process for multi-layer continuous roll-to-roll coating
US8590479B2 (en) * 2011-07-25 2013-11-26 Transform Pack Inc. Preserving seasoning flavour profiles during the manufacturing of food-seasoning sheets
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
CN103930595A (en) 2011-11-11 2014-07-16 Sio2医药产品公司 Passivation, ph protective or lubricity coating for pharmaceutical package, coating process and apparatus
CN103998230B (en) 2011-12-16 2015-11-25 柯尼卡美能达株式会社 Gas barrier film
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US11058161B2 (en) 2012-02-16 2021-07-13 Xefco Pty Ltd Heat reflecting composites with knitted insulation
CA2887352A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
WO2014061627A1 (en) 2012-10-19 2014-04-24 コニカミノルタ株式会社 Gas barrier film and method for manufacturing gas barrier film
CN104854257B (en) 2012-11-01 2018-04-13 Sio2医药产品公司 coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US20160015898A1 (en) 2013-03-01 2016-01-21 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
KR102336796B1 (en) 2013-03-11 2021-12-10 에스아이오2 메디컬 프로덕츠, 인크. Coated Packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
CN104134756A (en) * 2013-04-30 2014-11-05 成均馆大学校产学协力团 Multilayer encapsulation thin-film
US10160184B2 (en) 2013-06-03 2018-12-25 Xefco Pty Ltd Insulated radiant barriers in apparel
EP3693493A1 (en) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
CA3204930A1 (en) 2015-08-18 2017-02-23 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
EP3419826A4 (en) 2016-09-20 2019-12-18 Entrotech, Inc. Paint film appliques with reduced defects, articles, and methods
FR3104038B1 (en) * 2019-12-04 2022-11-25 Metalizz Method of surface treatment of a three-dimensional object

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2245484A1 (en) * 1973-09-28 1975-04-25 Jones & Laughlin Steel Corp
EP0357859A1 (en) * 1988-09-09 1990-03-14 Hydro-Quebec Process for the production of a thin electrode supported by a sheet
EP0390307A2 (en) * 1989-03-27 1990-10-03 Ford Motor Company Limited Flexible solid electrolyte useful in electrochromic devices
EP0424827A1 (en) * 1989-10-26 1991-05-02 Alcatel Cross-linked polymeric electrolyte

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3489593A (en) * 1965-03-24 1970-01-13 Nat Res Corp Method of sealing vacuum-deposited metal coatings
US3467060A (en) * 1967-10-19 1969-09-16 Longacre Press Inc The Apparatus for coating and curing epoxy resin on sheets
USRE31532E (en) * 1970-06-01 1984-03-06 Catalyst Research Corporation Primary cells and iodine containing cathodes therefor
US4098965A (en) * 1977-01-24 1978-07-04 Polaroid Corporation Flat batteries and method of making the same
JPS6053858B2 (en) * 1979-02-16 1985-11-27 シャープ株式会社 Method for manufacturing electrochromic display device
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
JPS58156848A (en) * 1982-03-15 1983-09-17 Fuji Photo Film Co Ltd Ion selective electrode and its manufacture
JPS5912576A (en) * 1982-07-12 1984-01-23 Nippon Denso Co Ltd Electrode forming method of organic battery
US4557978A (en) * 1983-12-12 1985-12-10 Primary Energy Research Corporation Electroactive polymeric thin films
US4551349A (en) * 1983-12-16 1985-11-05 The United States Of America As Represented By The Secretary Of The Navy Bis(pentafluorosulfur)diacetylene polymer therefrom and preparations thereof
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US4685415A (en) * 1984-04-06 1987-08-11 Tiegel Manufacturing Co. Apparatus for enveloping a battery plate by a dip process
US4844851A (en) * 1984-08-28 1989-07-04 Polyplastics Co., Ltd. Surface metallizing method
JPS6237247A (en) * 1985-05-08 1987-02-18 Nissan Motor Co Ltd Nonglaring mirror
US4772940A (en) * 1985-05-22 1988-09-20 Regents Of The University Of California Polymer having isothianaphthene structure and electrochromic display
JPS6289907A (en) * 1985-06-19 1987-04-24 Sumitomo Bakelite Co Ltd Transparent conductive film united with polarizing film
JPS62129846A (en) * 1985-12-02 1987-06-12 Dainippon Screen Mfg Co Ltd Method and apparatus for coating photoresist
IT1199795B (en) * 1986-12-17 1988-12-30 Ausimont Spa PROCESS FOR THE CONSOLIDATION OF MATERIALS WITH DISCONTINUOUS STRUCTURE
JP2692816B2 (en) * 1987-11-13 1997-12-17 株式会社きもと Thin primary battery
KR970011644B1 (en) * 1988-04-08 1997-07-12 고다까 토시오 Coating device
US4933129A (en) * 1988-07-25 1990-06-12 Ultrafibre, Inc. Process for producing nonwoven insulating webs
GB8829118D0 (en) * 1988-12-14 1989-01-25 Atomic Energy Authority Uk Electrochemical cell manufacture
US4997732A (en) * 1989-03-30 1991-03-05 Mhb Joint Venture Battery in a vacuum sealed enveloping material and a process for making the same
US4935317A (en) * 1989-06-21 1990-06-19 Mhb Joint Venture Method for producing solid state electrochemical laminar cell utilizing cathode rolling step
US5089027A (en) * 1990-11-26 1992-02-18 Gould Inc. Method for producing a solid electrolyte cell
JP2948678B2 (en) * 1991-04-24 1999-09-13 玄々化学工業株式会社 Vacuum coating equipment
US5131460A (en) * 1991-10-24 1992-07-21 Applied Materials, Inc. Reducing particulates during semiconductor fabrication
US5262253A (en) * 1992-07-22 1993-11-16 Valence Technology, Inc. Solid electrolytes derived by polymerization of vinyl sulfonate polyalkylene oxides
US5260095A (en) * 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2245484A1 (en) * 1973-09-28 1975-04-25 Jones & Laughlin Steel Corp
EP0357859A1 (en) * 1988-09-09 1990-03-14 Hydro-Quebec Process for the production of a thin electrode supported by a sheet
EP0390307A2 (en) * 1989-03-27 1990-10-03 Ford Motor Company Limited Flexible solid electrolyte useful in electrochromic devices
EP0424827A1 (en) * 1989-10-26 1991-05-02 Alcatel Cross-linked polymeric electrolyte

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
C.A.C. SEQUEIRA ET AL: "A Li/Nb2O5 cell employing (PEO)9LiCF3SO3as electrolyte", CHEMTRONICS, vol. 1, no. 3, September 1986 (1986-09-01), GUILDFORD GB, pages 137 - 138 *
Z.-I.TAKEHARA ET AL.: "Thin Film Solid-State Lithium Batteries Prepared by Consecutive Vapor-Phase Processes", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 138, no. 6, June 1991 (1991-06-01), MANCHESTER, NEW HAMPSHIRE US, pages 1574 - 1582, XP000305854 *

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CA2142895C (en) 2002-06-18
CA2142895A1 (en) 1994-03-03
US5547508A (en) 1996-08-20
DK0655954T3 (en) 1999-06-07
EP0655954A1 (en) 1995-06-07
US5395644A (en) 1995-03-07
JPH08503099A (en) 1996-04-02
US5260095A (en) 1993-11-09
DE69320971D1 (en) 1998-10-15
DE69320971T2 (en) 1999-05-27
ATE170779T1 (en) 1998-09-15
EP0655954B1 (en) 1998-09-09

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