WO1991004573A2 - Excimer laser ablation method and apparatus for microcircuit device fabrication - Google Patents
Excimer laser ablation method and apparatus for microcircuit device fabrication Download PDFInfo
- Publication number
- WO1991004573A2 WO1991004573A2 PCT/US1990/004899 US9004899W WO9104573A2 WO 1991004573 A2 WO1991004573 A2 WO 1991004573A2 US 9004899 W US9004899 W US 9004899W WO 9104573 A2 WO9104573 A2 WO 9104573A2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/42—Bombardment with radiation
- H01L21/423—Bombardment with radiation with high-energy radiation
- H01L21/428—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Definitions
- the present invention generally relates to excim laser ablation of materials, and more specifically to method and apparatus which uses excimer laser ablation form devices and delineate patterns for electronic micr circuit fabrication and the like.
- the present invention provides a method and apparat for excimer laser ablation of materials, and is especial suitable for the fabrication of electronic microcircu devices.
- the present method is capable of surface lay removal of semiconductor materials such as CdTe, HgCdT and CdZnTe, at rates in excess of 10 Angstroms per puls using low fluence, pulsed excimer laser irradiatio Reproducible control and reversible changes of the surfa composition are attainable as functions of laser fluenc
- the method has been demonstrated to possess a high degr of material selectivity for removing epitaxial layers group CdTe from GaAs substrates, thereby facilitating t fabrication of integrated electro-optical microcircu structures.
- the invention is further applicable composition grading of semiconductor surfaces for infrar and other devices.
- the present method enables the preparation of semico ductors for epitaxial deposition, and the patterning a etching of surfaces for device fabrication.
- the method h been demonstrated to reproducibly control the surfa stoichiometry, to remove impurities from the near-surfa region, and to reversibly change the surface composition
- the present invention also enables direct surfa patterning using non-contact projection imaging, for the fabrication of advanced electronic and electro-optical structures such as focal plane arrays and other infrared devices.
- the invention combines excimer laser projection imaging, intensity profile control, and ablation, so that microstructures can be fabricated with either vertical sidewalls (large aspect ratios) , or continuous sidewalls (positive or negative curvature) , without the use of photolithography.
- the present method removes surface layers in a single step, and defines many device structures simultaneously, with resolution of less than 0.5 microns.
- a pulse beam from an excimer laser is used for precision ablatio of cadmium telluride (CdTe) and other materials to fabri cate and delineate devices in electronic microcircui structures.
- the fluence of the beam may be adjusted t selectively remove one constituent of the material, such a cadmium vs. tellurium, at a higher rate than the othe constituent, while maintaining the quality of the materia surface.
- the beam may selectively remove an epitaxia layer of CdTe, CdZnTe, or HgCdTe from a GaAs substrate.
- the beam may be directed through a projection mask an optical system onto a material to form an image fo patterned ablation.
- the optical system may focus an imag of the mask on the material to form vertical sidewal patterns, or slightly defocus the image to form curve sidewall patterns and/or concave and convex lens structure for optical arrays.
- FIG. 1 is a diagram illustrating an apparatus f practicing a laser ablation method embodying the prese invention
- FIG. 2 is a sectional view illustrating a materi ablated by the method of the invention
- FIG. 3 is a graph illustrating a material ablati rate for cadmium telluride as a function of laser fluen for the present method
- FIG. 4 is a graph illustrating the surface compositi control of cadmium telluride attainable with the prese ablation method
- FIG. 5 is a graph illustrating the surface compositi as a function of applied laser pulses for cadmium telluri obtained with the present method
- FIG. 6 is a diagram illustrating an apparatus f practicing a modified laser ablation method embodying t present invention
- FIG. 7 is a diagram illustrating patterned ablatio using a focussed projection image with the apparatus o
- FIG. 6 is a diagrammatic representation of FIG. 6
- FIG. 8 is a diagram illustrating patterned ablatio using a de-focussed projection image with the apparatus o FIG. 6; and FIGs. 9a to 9c are diagrams illustrating the formatio of concave and convex lens shapes using the de-focusse projection method of the invention.
- a lase ablation apparatus embodying the present invention i generally designated as 10, and includes an excimer lase 12 which may typically be of the KrF or ArF type. Th laser 12 generates a coherent optical beam 14 having wavelength which is selected to be in the ultraviole region, between approximately 157 nm or 351 nm. A material 16 which is to be patterned -by laser ablation is mounted on a holder 18 such that the surface of the material 16 is preferably perpendicular to the laser beam 14.
- FIG. 2 illustrates the material 16 which has bee ablated by the laser beam 14 in accordance with the presen invention.
- the material 16 preferably comprises a firs component in the form of an epitaxial layer 16a of material such as cadmium telluride (CdTe) , which is a grou II-VI material, deposited on a second component in the for of a layer 16b of a material such as gallium arsenid (GaAs) , which is a group -I I-V material.
- the layer 16b ma be a substrate.
- the layer 16a may include a third constituent such a mercury or zinc.
- the combination of CdTe on GaAs i especially desirable for high speed optoelectronic applica tions.
- Relative movement in a predetermined pattern is cause between the material 16 and the laser beam 14 so that corresponding desired pattern is etched or ablated into th upper surface of the layer 16a as viewed in FIG. 2.
- Th material 16 may be irradiated with the beam 14 in the for of pulses having a predetermined duration. The greater th duration and number of applied pulses, the more material i removed.
- the CdTe layer 16a ma be removed all the way down to the GaAs layer 16b i selected areas designated at 16c. It is further within t scope of the invention to remove only external surfa portions of the layer 16a to a desired, precisely control able depth, in selected areas designated as 16d.
- Ablation of material in accordance with the prese invention is primarily due to localized heating of t irradiated material caused by absorption of photons fr the laser beam 14.
- Each pulse causes the temperature the material in the irradiated area to be increased by incremental amount. Irradiation by a sufficient number pulses of sufficient fluence causes the temperature increase above the point at which the material sublime When this occurs, the material in the irradiated ar vaporizes, and dissipates into the ambient surrounding
- the main mechanism for excimer laser ablation accordance with the present invention is thermal, oth mechanisms may contribute to produce the ablative effec Excimer laser ablation has variously been described being caused by transient vaporization, electronic excit tions, hydrodynamic effects, exfoliation, etc.
- the ablation process is most efficient if the i radiated material is maintained in a vacuum, although t process is operative at atmospheric pressure. Satisfacto results have been demonstrated experimentally at a pressu of approximately 10 "3 Torr.
- the thermal ablation process depends on matching the laser beam wavelength with the quantum levels of t material such that incident photons of specific energy excess of the bandgap radiation cause excitation electrons to higher energy states.
- a conventional excimer laser capab of producing an output energy of 5 eV has the prop wavelength and sufficient power for practicing the meth of the invention with this material.
- the fluence of the laser beam, or t energy per unit area must be above an ablation fluence threshold of the material for ablation to occur.
- the threshold value is different for each material.
- the ablation fluence threshold for CdTe for irradiation with a KrF laser beam (248 nm) is approximately 15 mJ/cm 2 . Above this value, the rate at which material is removed by thermally induced ablation increases as a function of fluence in a non-linear manner.
- the present method is capable of ablating cadmium tellurid surfaces using a pulsed excimer laser at a rate in exces of 10 Angstroms per pulse.
- the ablation fluence threshold for GaAs is on th • order of 100 mJ/cm 2 . Therefore, irradiation of the materia 16 as shown in FIG. 2 with a laser beam having a fluenc between 15 and 100 mJ/cm 2 enables selective removal of th entire thickness of the CdTe epitaxial layer 16a a illustrated at 16c without having any significant effect o the underlying GaAs substrate layer 16b.
- the Cd and Te con stituents of the component layer 16a it is possible to cause the Cd and Te con stituents of the component layer 16a to be ablated a different rates, while maintaining the quality of th underlying surface, and controlling the relative con stituent composition or stoichiometry of the underlyin surface. This is because the rate at which each con stituent is ablated from the material varies as a function of irradiation fluence, and further because the function are unequal. As illustrated in FIG. 4, the Cd/Te ratio o constituent proportion in the surface of the material 1 which remains after ablation is plotted as a function o laser beam fluence.
- FIG. 4 illustrates surface compositi control for a two constituent material (CdTe)
- the meth of the invention is equally applicable to a three or mo constituent material such as HgCdTe or CdZnTe.
- FIG. 5 illustrates experimental data obtained b Auger analysis of KrF irradiated CdTe (100) samples unde varying laser beam fluence.
- the laser was an excimer K unit operating at a wavelength of 248 nm, and generatin pulses with a duration of 30 ns.
- Composition control in accordance with the presen invention further enables composition grading of th material surface.
- a surface having a composition which i graded in a stepwise manner may be produced by irradiatin a selected area with a laser beam having a first fluence moving the material relative to the beam so that a adjacent area is irradiated with a second fluence, and s on until a desired number of adjacent areas of suitabl differing composition are created.
- the present invention further enables reversible control of surface stoichiometry.
- the CdTe material 16 for example, may be made tellurium rich by ablation using a relatively high fluence.
- the surface may be converted to equal proportion or cadmium rich by subsequent ablation with a relatively low fluence. It is further possible to perform rapid etching at a high fluence, and adjust the surface stoichiometry to a desired ratio by subsequent slow ablation at a low fluence.
- the laser ablation method of the present invention may be adapted to perform patterned ablation or etching using a projection mask.
- a laser ablation apparatus 30 includes the excimer laser 12 which may be the same unit used in the apparatus 10.
- the beam 14 produced by the laser 12 is directed through a projection mask 32 onto a material 34 which is mounted on a stationar holder 36.
- the beam 14 is patterned by the mask 32 to for an image of the mask on the material 16.
- An optional bea expander 38 may be provided to increase the cross-sectiona area of the beam 14 sufficiently to illuminate the entir mask 32.
- an optica element such as a converging lens 40 is preferably provide between the mask 32 and material 34 to minimize diffractio effects.
- the lens 40 may be selected to reduce or enlarg the image, if desired.
- the material 34 may have one or more constituents.
- the material 34 be capable of being ablated b irradiation with the laser beam 14.
- the mask 32 is formed wit a pattern of areas 32a and 32b, having low (transparent) and high (opaque) optical densities respectively. It i further within the scope of the invention to provide mask 32 with areas of intermediate optical density accordance with a desired grey scale, although not sho Typically, the opaque areas 32b are formed by printing painting an opaque substance on a transparent carrier sh 32c.
- the fo length of the lens 40 and the relative spacings of the l 40, mask 32, and material 34 are selected such that lens 40 focusses the image of the mask 32 onto the mater 34.
- the fluence of the beam 14 is selected such that fluence in the areas of the image corresponding to the l density or transparent areas 32a of the mask 32 is ab the ablation fluence threshold of the material 34.
- laser beam fluence is further selected to be below ablation fluence threshold of the material 34 in the ar of the image corresponding to the high density or opa areas 32b of the mask 32.
- the walls between adjacent areas 34a and 34b may made essentially perpendicular or vertical (high aspe ratio) due to the high resolution of the apparatus 30.
- FIG. 8 illustrates how the apparatus 30 may be adapt to produce patterns having sloping or curved sidewalls (l aspect ratio) . This is accomplished by adjusting the foca length of the lens 40, and the relative spacings of th lens 40, mask 32, and a material 34 ', such that the lens 4 projects an image of the mask 32 onto the material 34 which is de-focussed to a desired extent.
- the de-focussing of the image creates a continuou fluence gradient at the edges of adjacent high and lo fluence areas of the image, as opposed to a sharp discon tinuity in the focussed arrangement.
- the fluence gradien results in a continuously varying amount of ablation in th edge regions, resulting in the formation sloping, or curve edges between adjacent areas 34a' and 34b' which correspon to high and low fluence areas -of the image respectively
- the degree of curvature, or the aspect ratio of the edges may be selected by adjusting the extent of de-focussing o the image to a corresponding value.
- exemplary projection mask 50 has an opaque area 50a and transparent area 50b.
- a plurality of circular transpare areas 50c are formed in the opaque area 50a, whereas plurality of circular opaque areas 50d are formed in t transparent area 50b.
- the areas 50c and 50d may be ma very small and packed closely together as desired to for for example, a focal plane optical array.
- FIGs. 9b and 9c illustrate a material 52 subjected ablation by a de-focussed image of the mask 50.
- T material 52 includes an area 52a corresponding to t opaque area 50a of the mask 50, which received low or fluence, and was essentially unablated except in the ima areas corresponding to the transparent areas 50c of t mask 50.
- the high fluence in the latter areas produc ablation in areas 52c of the material 52.
- the areas 5 have concave shapes, which are usable as diverging lens in an opto-electronic array. The concave shapes are form due to the maximum laser beam fluence in the centers of t areas 52c, and continuously decreasing fluence toward t edges of the areas 52c.
- T areas 52d have convex shapes, which are usable as conver ing lenses in an opto-electronic array. The convex shap are formed due to the minimum laser beam fluence in t centers of the areas 52d, and continuously increasi fluence toward the edges of the areas 52d.
- lenses formed as illustrated in FIGs. 9 to 9c are circular, it is possible to form elongated tw dimensional, or other non-circular optical surfaces withi the scope of the invention.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US405,940 | 1989-09-12 | ||
US07/405,940 US5018164A (en) | 1989-09-12 | 1989-09-12 | Excimer laser ablation method and apparatus for microcircuit fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1991004573A2 true WO1991004573A2 (en) | 1991-04-04 |
WO1991004573A3 WO1991004573A3 (en) | 1991-05-02 |
Family
ID=23605858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1990/004899 WO1991004573A2 (en) | 1989-09-12 | 1990-08-29 | Excimer laser ablation method and apparatus for microcircuit device fabrication |
Country Status (4)
Country | Link |
---|---|
US (1) | US5018164A (en) |
EP (1) | EP0443023A1 (en) |
JP (1) | JPH04501829A (en) |
WO (1) | WO1991004573A2 (en) |
Families Citing this family (41)
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DE4004736C2 (en) * | 1990-02-15 | 1995-12-14 | Laser Lab Goettingen Ev | Device for the controlled removal of material from a given processing point, in particular in hollow organs or vascular stenoses, by laser ablation |
FR2670021B1 (en) * | 1990-12-04 | 1994-03-04 | Thomson Csf | PROCESS FOR PRODUCING MICROLENTILES FOR OPTICAL APPLICATIONS. |
US5195163A (en) * | 1991-09-27 | 1993-03-16 | The United States Of America As Represented By The Secretary Of The Navy | Fabrication and phase tuning of an optical waveguide device |
US5454902A (en) * | 1991-11-12 | 1995-10-03 | Hughes Aircraft Company | Production of clean, well-ordered CdTe surfaces using laser ablation |
GB2263582B (en) * | 1992-01-21 | 1995-11-01 | Dale Electronics | Laser-formed electrical component and method for making same |
US5446755A (en) * | 1993-02-24 | 1995-08-29 | Matsushita Electric Industrial Co., Ltd. | Laser ablation apparatus |
JPH07308788A (en) * | 1994-05-16 | 1995-11-28 | Sanyo Electric Co Ltd | Optical machining method and production of photovoltaic power device |
JP4180654B2 (en) | 1995-04-26 | 2008-11-12 | スリーエム カンパニー | Method and apparatus for step-and-repeat exposure |
US5878072A (en) * | 1997-03-25 | 1999-03-02 | Seh America, Inc. | Laser alignment cross hair |
US8071384B2 (en) | 1997-12-22 | 2011-12-06 | Roche Diagnostics Operations, Inc. | Control and calibration solutions and methods for their use |
US5853960A (en) * | 1998-03-18 | 1998-12-29 | Trw Inc. | Method for producing a micro optical semiconductor lens |
US6355270B1 (en) | 1999-01-11 | 2002-03-12 | The Regents Of The University Of California | Particles for oral delivery of peptides and proteins |
US6662439B1 (en) | 1999-10-04 | 2003-12-16 | Roche Diagnostics Corporation | Laser defined features for patterned laminates and electrodes |
US7073246B2 (en) | 1999-10-04 | 2006-07-11 | Roche Diagnostics Operations, Inc. | Method of making a biosensor |
US6645359B1 (en) | 2000-10-06 | 2003-11-11 | Roche Diagnostics Corporation | Biosensor |
US20060078847A1 (en) * | 2000-09-29 | 2006-04-13 | Kwan Norman H | Dental implant system and additional methods of attachment |
US6540890B1 (en) * | 2000-11-01 | 2003-04-01 | Roche Diagnostics Corporation | Biosensor |
US6814844B2 (en) * | 2001-08-29 | 2004-11-09 | Roche Diagnostics Corporation | Biosensor with code pattern |
US6577448B2 (en) | 2001-09-25 | 2003-06-10 | Siemens Dematic Electronic Assembly Systems, Inc. | Laser system by modulation of power and energy |
US7150811B2 (en) * | 2002-11-26 | 2006-12-19 | Pei Company | Ion beam for target recovery |
US7718439B2 (en) | 2003-06-20 | 2010-05-18 | Roche Diagnostics Operations, Inc. | System and method for coding information on a biosensor test strip |
US7452457B2 (en) | 2003-06-20 | 2008-11-18 | Roche Diagnostics Operations, Inc. | System and method for analyte measurement using dose sufficiency electrodes |
US8148164B2 (en) | 2003-06-20 | 2012-04-03 | Roche Diagnostics Operations, Inc. | System and method for determining the concentration of an analyte in a sample fluid |
US7645373B2 (en) | 2003-06-20 | 2010-01-12 | Roche Diagnostic Operations, Inc. | System and method for coding information on a biosensor test strip |
US7645421B2 (en) | 2003-06-20 | 2010-01-12 | Roche Diagnostics Operations, Inc. | System and method for coding information on a biosensor test strip |
PL1639354T3 (en) | 2003-06-20 | 2018-11-30 | F.Hoffmann-La Roche Ag | Test strip with slot vent opening |
US7488601B2 (en) | 2003-06-20 | 2009-02-10 | Roche Diagnostic Operations, Inc. | System and method for determining an abused sensor during analyte measurement |
US8058077B2 (en) | 2003-06-20 | 2011-11-15 | Roche Diagnostics Operations, Inc. | Method for coding information on a biosensor test strip |
US8206565B2 (en) | 2003-06-20 | 2012-06-26 | Roche Diagnostics Operation, Inc. | System and method for coding information on a biosensor test strip |
US7084014B2 (en) * | 2003-10-07 | 2006-08-01 | Endicott Interconnect Technologies, Inc. | Method of making circuitized substrate |
WO2005078118A1 (en) | 2004-02-06 | 2005-08-25 | Bayer Healthcare Llc | Oxidizable species as an internal reference for biosensors and method of use |
US7569126B2 (en) | 2004-06-18 | 2009-08-04 | Roche Diagnostics Operations, Inc. | System and method for quality assurance of a biosensor test strip |
WO2007013915A1 (en) | 2005-07-20 | 2007-02-01 | Bayer Healthcare Llc | Gated amperometry |
CN101273266B (en) | 2005-09-30 | 2012-08-22 | 拜尔健康护理有限责任公司 | Gated voltammetry |
US7510985B1 (en) | 2005-10-26 | 2009-03-31 | Lpkf Laser & Electronics Ag | Method to manufacture high-precision RFID straps and RFID antennas using a laser |
US7583444B1 (en) * | 2005-12-21 | 2009-09-01 | 3M Innovative Properties Company | Process for making microlens arrays and masterforms |
JP2009537870A (en) | 2006-05-18 | 2009-10-29 | スリーエム イノベイティブ プロパティズ カンパニー | Method for manufacturing light guide with extraction structure and light guide manufactured by the method |
JP5110830B2 (en) * | 2006-08-31 | 2012-12-26 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
WO2009076302A1 (en) | 2007-12-10 | 2009-06-18 | Bayer Healthcare Llc | Control markers for auto-detection of control solution and methods of use |
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US8818145B2 (en) | 2011-08-03 | 2014-08-26 | Tyco Electronics Corporation | Optical interposer with transparent substrate |
-
1989
- 1989-09-12 US US07/405,940 patent/US5018164A/en not_active Expired - Lifetime
-
1990
- 1990-08-29 EP EP90915129A patent/EP0443023A1/en not_active Withdrawn
- 1990-08-29 JP JP3500353A patent/JPH04501829A/en active Pending
- 1990-08-29 WO PCT/US1990/004899 patent/WO1991004573A2/en not_active Application Discontinuation
Non-Patent Citations (4)
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Appl. Phys. Lett., vol. 48, no. 11, 17 March 1986, American Institute of Physics, C. Arnone et al.: "Laser etching of 0.4 ~m structures in CdTe by dynamic light guiding", pages 736-738 * |
J. Appl. Phys., vol. 58, no. 5, 1 September 1985, American Institute of Physics, J.H. Brannon et al.: "Excimer laser etching of polyimide", pages 2036-2043 * |
Proceedings of the SPIE, Conference: "Laser Assisted Processing", Hamburg, 19-20 September 1988, vol. 1022, SPIE, (Washington, US), P. Gaucherel et al.: "ArF excimer laser ablation of mercury cadmium telluride semiconductor (MCT)", pages 124-128 * |
Proceedings of the SPIE, Conference: "Laser/Optical Processing of Electronic Materials", Santa Clara, 10-11 October 1989, vol. 1190, G.L. OLson et al.: "Excimer laser-assisted deposition and etching of II-VI materials", pages 2-16 * |
Also Published As
Publication number | Publication date |
---|---|
WO1991004573A3 (en) | 1991-05-02 |
JPH04501829A (en) | 1992-04-02 |
US5018164A (en) | 1991-05-21 |
EP0443023A1 (en) | 1991-08-28 |
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