Search Images Maps Play YouTube News Gmail Drive More »
Advanced Patent Search | Web History | Sign in

Patents

Publication numberUSRE32449 E
Publication typeGrant
Application number06/821,650
Publication date30 Jun 1987
Filing date23 Jan 1986
Priority date
16 Jun 1983
Also published as
Inventors
Original Assignee
U.S. Classification
International Classification
Cooperative Classification
European Classification
C04B41/00V
C04B41/50P48
C04B35/488A
C04B41/87
C04B35/486
A61L27/04R
References
External Links
Ceramic body of zirconium dioxide (ZrO.sub.2) and method for its preparation
US RE32449 E
Abstract

A ceramic body of zirconium dioxide containing, if desired, aluminum oxide,nd partially stabilized with yttrium oxide and/or one or more rare earth oxides (e.g., cerium dioxide) and/or magnesium oxide and/or calcium oxide is partially stabilized with 0.5 to 5 mole-% of yttrium oxide and/or 5 to 12 mole-% of magnesium oxide and/or calcium oxide and/or cerium dioxide or one or more rare earth oxides, is 30 to 100% in the tetragonal lattice modification and has in the surface region a content of yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide that is 1 to 20 mole-% higher than the average content, such that the body is coated with a thin, PSZ-like layer in a more highly stabilized tetragonal or with a layer that is predominantly in the cubic lattice form. For preparation, the surface of an already sintered or only presolidified compact of partially stabilized zirconium oxide is brought into intimate contact with yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide and/or another rare earth powder or a zirconium dioxide powder containing at least 12 mole-% of yttrium oxide and/or other stabilizer oxides, and then annealed at 1000 stabilized tetragonal or predominantly cubic surface layer of 0.1 to 200 micrometers thickness and 2 to 20 mole-% higher content of yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide has formed.

Claims
We claim:

1. In a ceramic body of zirconium dioxide or zirconium dioxide containing aluminum oxide, the improvement comprising said ceramic body

being partially stabilized with 0.5 to 5 mole-% of yttrium oxide, 5 to 15 mole-% magnesium oxide, calcium oxide, 5 to 15 mole-% cerium oxide, 5 to 15 mole-% of one or more rare earth dioxides or 5 to 15 mole-% of a combination thereof;

being 30 to 100% in the tetragonal lattice modification; and

having, in the surface region, a content of yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide that is 2 to 20 mole-% higher than the average content in said ceramic body, such that the body is covered with a thin layer of a more highly stabilized tetragonal lattice form or one predominantly in the cubic lattice form.

2. The ceramic body of claim 1

partially stabilized with 0.5 to 5 mole-% yttrium oxide and having a content of 2 to 20 mole % higher than the average, of yttrium oxide in the surface region thereof.

3. A method for the preparation of a ceramic body which is partially stabilized with 0.5 to 5 mole-% of yttrium oxide, 5 to 15 mole-% of magnesium oxide, calcium oxide and/or cerium oxide or one or more rare earth dioxides; is 30 to 100% in the tetragonal lattice modification; and has in the surface region a content of yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide that is 2 to 20 mole-% higher than the average content, such that the body is covered with a thin layer of a more highly stabilized tetragonal lattice form of one predominantly in the cubic lattice form, comprising the steps of

placing the surface of an already sintered or only presolidified compact of partially stabilized zirconium dioxide in intimate contact with yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide and/or other rare earth powder, or a zirconium dioxide powder containing at least 12 mole-% yttrium oxide and/or other stabilizer oxides, and then

annealing said sintered or presolidified compact at 1000 1600 cubic surface layer of 0.1 to 200 micrometers thickness having a 2 to 20 mole-% higher content of yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide than the average content in the ceramic body.

4. The method of claim 3, wherein the surface contact with yttrium oxide, cerium dioxide, magnesium oxide, calcium oxide or rare earth oxide comprises placing the ceramic body in a powder bed, spraying or pressing a powder layer onto the ceramic body or treating the ceramic body with a suspension of the powder.

5. The method of claim 3 wherein the ceramic body is a body sintered at 1350 formed of partially stabilized zirconium dioxide.

6. The method of claim 3 wherein the ceramic body is an unsintered compact of partially stabilized zirconium dioxide, and is sintered at 1350 to 1550

7. The method of claim 3 wherein the ceramic body is a zirconium dioxide body, partially stabilized with 7 to 11 mole-% of magnesium oxide, sintered at temperatures between 1690 thereafter annealed at temperatures between 1350 C. in contact with yttrium oxide and/or cerium oxide and/or other rare earth oxide powders for 1 to 5 hours.

8. The method of claim 3 wherein the ceramic body is a sintered compact or green body containing 2 to 4 mole-% of yttrium oxide or rare earth oxide as stabilizer.

9. The method of claim 4 wherein the ceramic body is sintered at 1350 formed of partially stabilized zirconium dioxide.

10. The method of claim 4 wherein the ceramic body is unsintered compact of partially stabilized zirconium dioxide, sintered at 1350 1550

11. The method of claim 4 wherein the ceramic body is a zirconium dioxide body, partially stabilized with 7 to 11 mole-% of magnesium oxide, sintered at temperatures between 1690 thereafter annealed at temperatures between 1350 C. in contact with yttrium oxide and/or cerium oxide and/or other rare earth oxide powders for 1 to 5 hours.

12. The method of claim 11 wherein yttrium oxide, cerium oxide or a combination thereof, is used.

13. The method of claim 4 wherein the ceramic body is a sintered compact or green body containing 2 to 4 mole-% of yttrium oxide or rare earth oxide as stabilizer.

Description

Finely granular zirconium dioxide bodies partially stabilized with yttrium oxide, cerium dioxide and/or other rare earth oxides, and coarsely granular zirconium dioxide bodies partially stabilized with magnesium oxide or calcium oxide pertain to the polycrystalline ceramics which have the highest strengths and resistance to fracture which have been measured up to now. The chief reason for this lies in the tension-induced transformation of the tetragonal lattice modification to the monoclinic room-temperature modification. For example, bodies containing yttrium oxide are sintered, hot-pressed or hot-isostatically pressed ("hipped") usually with an yttrium oxide content between 1 and 6 mole-%, either in the tetragonal monophasic field or in the cubic/tetragonal two-phase region, at temperatures between 1400 structure then consists of a fine-grained (0.1-1.0 micrometer), tetragonal content (up to 100%) and somewhat coarser, cubic grains (1-10 micrometers) (3.5-6.0 mole-% for high yttrium oxide contents). To increase the hardness and modulus of elasticity the bodies can contain aluminum oxide in larger amounts.

Zirconium oxide bodies containing magnesium oxide or calcium oxide are usually sintered in the cubic monophasic region at temperatures between 1690 (50 to 70 micrometers).

The decisive disadvantage of these super-strong ceramic bodies, especially those containing yttrium oxide, is that they lose their strength drastically after relatively long heat treatment at temperatures between 200 accelerated with increasing atmospheric humidity or high steam pressure (O. T. Masaki, K. Kobayashi, Proc. Ann. Meeting Jap. Ceram. Soc. 1981). Even in warm, aqueous solutions, degradation of the bodies can occur. The reason for this is not yet understood. It is assumed, however, that the mechanical tensions of the tetragonal bodies are removed by tension crack corrosion at the grain boundaries, and thus a transformation to the monoclinic form occurs, or that other diffusion-controlled mechanisms cause martensite nuclei to form at the surface and thus initiate the transformation that ultimately results in the destruction of the bodies.

This decisive disadvantage makes the new class of the so-called TZP ceramics (TZP: Tetragonal Zirconia Polycrystals. A bibliography on TZP ceramics is contained in the book, "Science and Technology of Zirconia II", Advances in Ceramics, Vol. 11, 1984) suitable for use in air only for application temperatures up to about 200 ceramics would offer substantial advantages for use in internal combustion engines. This phenomenon would also be disadvantageous for use as a bioceramic (hip joint replacement).

Conventional zirconium dioxide ceramics partially stabilized with magnesium oxide (Mg-PSZ), when exposed to heat for long periods at somewhat higher temperatures (700 On account of the rapid diffusion or vaporization rate of magnesium oxide, surface degradation occurs, especially in a slightly reducing atmosphere.

Surprisingly, it has now been found--and the invention is based on it--that in sintered specimens which have been heat treated in a milieu rich in yttrium oxide, cerium oxide, magnesium oxide or calcium oxide, e.g., a powder bed of yttrium oxide or magnesium oxide, this degradation process does not occur, or occurs to a lesser degree.

The invention is therefore based on the problem of reducing or eliminating the above-described loss of strength or surface degradation in ceramic bodies of zirconium dioxide.

The problem is solved by a ceramic body partially stabilized with yttrium oxide and/or cerium oxide and/or one or more rare earth oxides and/or magnesium oxide and possibly containing aluminum oxide, which is characterized by being partially stabilized with 0.5 to 5 mole-% of yttrium oxide and/or 2 to 12 mole-% of magnesium oxide and/or calcium oxide and one or more rare earth oxides (e.g., cerium oxide), is 30 to 100% in the tetragonal lattice modification, and has in the surface region a content of yttrium oxide or rare earth oxide and/or magnesium oxide and/or calcium oxide, such that the body is covered by a thin layer that is mostly in the cubic lattice form or in a more highly stabilized tetragonal lattice form. It is obvious that a partially stabilized cubic layer can be transformed by tempering (peak aging) at temperatures commonly used in PSZ (1100 (i.e., cubic grains having tetragonal segregations).

The term, "thin surface layer," in the sense of the invention, is to be understood to mean a layer with a thickness of 0.1 to 200 micrometers, preferably 0.3 to 30 micrometers. The body on the basis of zirconium dioxide in accordance with the invention is prepared by firing it in a milieu which is rich in yttrium oxide, cerium oxide, magnesium oxide, calcium oxide and/or rare earth oxides. The invention is explained hereinbelow on the basis of the use of yttrium oxide, cerium oxide, magnesium oxide and calcium oxide. It is to be understood, however, that it applies likewise to other rare earth oxides. This surface stabilization or annealing is likewise advantageous for conventional zirconia ceramics partially stabilized with magnesium oxide or calcium oxide.

To prepare the ceramic body in accordance with the invention, it is possible to set out either from the finished sintered or hipped ceramic or from a green body presolidified at relatively low temperature (e.g., room temperature). The ceramic or the green body is now provided with a surface of yttrium oxide, cerium oxide, magnesium oxide, calcium oxide, etc., either in the form of a pressed-on layer of powder or of a slip containing yttrium oxide or magnesium oxide, which can be sprayed on, for example, or applied in the form of a bath for impregnating the surface. The bodies thus treated are then fired or sintered at temperatures between 1000 to be between about 10 minutes and about 100 hours. The desired surface stabilization is also achieved to special advantage by firing or sintering the ceramic or green body in a powder bed of yttrium oxide and/or cerium oxide and/or magnesium oxide and/or calcium oxide. Those conditions are preferred in which the desired diffusion is achieved in the shortest possible time, while at the same time achieving a PSZ-like layer.

For the preparation of the ceramic body itself, the body can be performed either by mixing the oxides, or by wet chemical methods such as sol gel, coprecipitation, spray reaction of aqueous solutions, or from fine, homogeneous powders obtained by fusion and prealloyed with yttrium oxide, cerium oxide, magnesium oxide and/or calcium oxide, and then sintering or hipping, or sintered and then hipped, at temperatures generally between 1350 mentioned above, coated with yttrium oxide, cerium oxide, magnesium oxide, calcium oxide, etc., or fired in a corresponding powder bed, until the surface layer enriched with yttrium, cerium, magnesium, or calcium oxide etc. is formed.

When a stabilizer-rich coating is applied to a green body, the body is commonly preformed at a low pressure, say of about 100 MPa, and then pressed again at higher pressure, e.g., 200 to 650 MPa. In most cases, however, the preferred method is the sintering of the pressed body or the firing of a finish-sintered and processed body in a powder bed containing magnesium oxide or yttrium oxide and/or cerium oxide.

The ceramic bodies of the invention, in comparison to specimens prepared under otherwise equal conditions but without the above-described surface treatment, in a treatment for accelerated aging, consisting of four hours of firing at temperatures between 250 steam pressures of 4 to 15 bar, show scarcely any effect.

In X-ray examination, in the case of the ceramic bodies of the invention, only the cubic and tetragonal reflections of the body subjected to the accelerated aging are detectable after this treatment, while the specimens used for comparison show strong monoclinic reflections which are an indication of incipient degradation. The best results were obtained when the thin surface layer was produced by firing the ready-sintered samples in magnesium oxide, yttrium oxide, cerium oxide or calcium oxide powder, or by treatment with yttrium oxide powder or a zirconium powder containing at least 12 mole-% of yttrium oxide, the surface layer being pressed onto the zirconium oxide compacts stabilized by a small addition (0.5 to 5, preferably 2 to 4 mole-%) of yttrium oxide, or being applied as an aqueous suspension of powder and sintered. But, no matter how the surface layer is produced, an important condition for the achievement of the protective action of the stabilizer-containing coating is very close contact with the surface of the zirconium oxide specimen to be heated or sintered.

The thin, generally 0.5 to 30 micrometers deep, stabilizer-rich zirconium oxide surface layer which is formed by the treatment of the invention, appears to constitute a protection against long-term thermal disintegration. This layer can also contain aluminum oxide for fining the grain. Presumably other rare earth oxides produce a similarly positive effect, as previously mentioned. On account of the extremely slow diffusion of yttrium oxide into zirconium oxide at temperatures below 1000 protection for TZP ceramics, but also for conventional zirconium oxide partially stabilized with magnesium or calcium (Mg-, Ca-PSZ).

The following examples further explain the invention.

EXAMPLE 1

Samples of reaction-sprayed powders (EDS powders: Evaporation Decomposition of Solutions, Am. Ceram. Soc. Bull 50 (1977) 1023) which contained 2 mole-% of yttrium oxide and 1.5 vol.-% of aluminum oxide, and had been ground for 4 hours in water in an attrition mill with alumina balls containing silica and spray dried, were isostatically pressed at 630 MPa and sintered in air for 2 hours at 1450 thereafter indicated a predominantly tetragonal structure (grain size approx. 0.4 micrometers). Flexural test samples indicate, in the polished surface state, a strength of 920 MPa (type I) and, after 36 h of firing at 1350 After all of the samples were cooked in the autoclave at 400 for 4 hours at 4 bar steam pressure, the strength of type I was only 420 MPa, while type II showed a strength of 740 MPa.

EXAMPLE 2

Samples of a powder which was prepared and treated as in Example 1, but contained only 2 mole-% of yttrium oxide by volume, were formed as in Example 1. An aqueous suspension of yttria powder was applied to the cylindrical compacts and some of it penetrated into the surface pores; then the coated compacts (type I) were sintered at 1500 hours, and then subjected to the autoclaving described in Example 1, together with identical samples with no coating (type II). After this treatment, type I showed only tetragonal and cubic X-ray reflections, but type II showed tetragonal and large monoclinic X-ray reflections which indicates the thermal degradation of the uncoated samples.

EXAMPLE 3

Samples from the powder of Example 1 were isostatically pressed at a pressure of 100 MPa, and then sprayed with a suspension of 12 mole-% zirconia powder containing 12 mole-% of yttrium oxide (coating thickness approx. 40 to 200 micrometers), then pressed again isostatically at 630 MPa, and sintered as in Example 1. After the autoclaving treatment (as in Example 1), no thermal degradation of the surface could be detected.

EXAMPLE 4

Samples in accordance with Example 2 were coated with the same suspension, but this time with the addition of 20% alumina by volume, and otherwise treated as in Example 1. Here, again, no degradation could be detected after the heat treatment in the autoclave.

EXAMPLE 5

50 volume-percent of alumina powder (Pechinee Ugine Kuhlman, A6) [was added] to the powder from Example 1 and ground in the attrition mill as in Example 1. Isostatically pressed cylinders (approx. 1 were sintered at 1500 (type II) a slip of 50 wt.-% of yttrium oxide and 50 wt.-% of cerium oxide. Then type I contained on the polished surface only tetragonal zirconium oxide plus aluminum oxide (measured by X-ray analysis), while type II additionally contained cubic forms. After autoclaving as in Example 8, with only 8 bar of steam pressure, the surface of type I had a high content of monoclinic zirconium oxide, while type II showed no measurable change.

EXAMPLE 6

A coprecipitated zirconia powder containing 2.2 mole-% of yttrium oxide was pressed isostatically at 620 MPa; the samples were then sintered in air for 2 hours at 1500 exclusively tetragonal grains of an average size of 0.4 micrometers (material type A). A similarly made commercial material with 3 mole-% of yttrium oxide contained approximate 80% of tetragonal grains (approximately 0.4 micrometers) and approximately 20% cubic grains (about 5 micrometers) (material type B).

Material types A and B were subjected to an autoclave test with a steam pressure of 5 bar at 250 greatly, i.e., show mostly monoclinic reflections at the surface; type A was even completely decomposed.

Types A and B were then fired each for 2 hours in powder beds of yttrium oxide, cerium oxide, titanium oxide, magnesium oxide and calcium oxide, at different temperatures. The heat treatment temperatures and the results of the autoclave test that followed are listed in Table 1. From this it appears that, with the exception of titanium oxide, all the other oxides have a positive effect, especially at higher temperatures. A firing in a magnesium oxide powder bed is effective even at relatively low temperatures (1120

Types A and B, in the form of unsintered compacts, were sintered for 2 h at 1500 oxide and magnesium oxide (in air). The above-described autoclave test again showed no surface degradation.

              TABLE 1______________________________________Sintering in a powder bed, followed by autoclave test for 2hours, 5 bar steam pressure, 250Powder bed  Yttrium  Cerium   Titanium                           Magnesium                                   CalciumSintering  oxide    oxide    oxide  oxide   oxidetempera-  Type of Materialture   A      B     A    B   A    B   A     B   A    B______________________________________1120   -      -     -    -   -    -   -     -   -    o1220   -      o     o    o   -    -   -     o   +    +1320   o      +     o    +   -    -   +     +   +    +1420   +      +     +    +   -    o   +     +   +    +______________________________________
EXAMPLE 7

A conventional zirconia partially stabilized with magnesia (Mg-PSZ), containing 3.3 wt.-% of magnesium oxide, was subjected to a solution anneal in air at 1700 room temperature, and was then subjected to two hours of sintering at 1420 surface in the untreated (as-received) sample increased, after 100 hours in a slightly reducing atmosphere at 920 to 32%, the monoclinic content in the sample sintered in yttria was below the measurable range, i.e., less than 4%.

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US406774524 Oct 197510 Jan 1978Commonwealth Scientific And Industrial Research OrganizationCeramic materials
US429838514 Jul 19803 Nov 1981Max-Planck-Gesellschaft Zur Forderung Wissenschaften E.V.High-strength ceramic bodies
US432224914 Jul 198030 Mar 1982Max Planck GesellschaftProcess for the preparation of dispersion ceramics
US435491218 Jan 198019 Oct 1982Robert Bosch GmbhSolid electrochemical sensor
US44193116 Jul 19816 Dec 1983Claussen; NilsProduction of high-strength ceramic bodies of alumina and unstabilized zirconia with controlled microfissures
US442186119 May 198020 Dec 1983Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V.High-strength and temperature-change resistant ceramic formed body, especially of mullite, its production and use
DE2904069A1 Title not available
EP0067327A125 May 198222 Dec 1982Kabushiki Kaisha ToshibaCeramic engine part with improved abrasion resistance
WO1983004247A127 May 19838 Dec 1983Commonwealth Scientific And Industrial Research OrZirconia ceramic materials and method of making same
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US501753212 May 198921 May 1991CsirSintered ceramic product
US504737324 Mar 198910 Sep 1991Corning IncorporatedCeramic materials exhibiting pseudo-plasticity at room temperature
US525803114 Dec 19922 Nov 1993Danek MedicalIntervertebral disk arthroplasty
US535092717 Jun 199227 Sep 1994Mitech Scientific Corp.Radiation emitting ceramic materials and devices containing same
US535891318 Aug 199325 Oct 1994Eastman Kodak CompanyZirconia ceramic articles having a tetragonal core and cubic casing
US540941529 Jun 199325 Apr 1995Nikkato Corp.Shot method
US54257735 Apr 199420 Jun 1995Danek Medical, Inc.Intervertebral disk arthroplasty device
US547272016 Oct 19925 Dec 1995Mitec Scientific CorporationTreatment of materials with infrared radiation
US556273812 Jan 19958 Oct 1996Danek Medical, Inc.Intervertebral disk arthroplasty device
US568348120 Aug 19964 Nov 1997Eastman Kodak CompanyMethod of making core shell structured articles based on alumina ceramics having spinel surfaces
US57024485 Jul 199530 Dec 1997Buechel; Frederick F.Prosthesis with biologically inert wear resistant surface
US57079116 Jun 199513 Jan 1998Mitech Scientific Corp.Infrared radiation generating ceramic compositions
US57233936 Mar 19973 Mar 1998Eastman Kodak CompanyZirconia ceramic article
US57261106 Mar 199710 Mar 1998Eastman Kodak CompanyZirconia-alumina ceramic article
US58490681 May 199715 Dec 1998Dentsply G.M.B.H.Dental prosthesis
US585415811 Jun 199729 Dec 1998Matsushita Electric Works, Ltd.ZrO.sub.2 based ceramic material and method of producing the same
US586585010 Mar 19972 Feb 1999Johnson & Johnson Professional, Inc.Coated load bearing surface for a prosthetic joint
US586879612 Aug 19979 Feb 1999Buechel; Fredrick F.Prosthesis with biologically inert wear resistant surface
US587940717 Jul 19979 Mar 1999Bank Of America, N.A., As Administrative Agent For The Secured PartiesWear resistant ball and socket joint
US617987423 Apr 199930 Jan 2001Cauthen Research Group, Inc.Articulating spinal implant
US635278822 Feb 20005 Mar 2002General Electric CompanyThermal barrier coating
US638713230 Nov 199814 May 2002Ceramtec Ag Innovative Ceramic EngineeringArtificial joint of a prosthesis
US64401682 Sep 199927 Aug 2002Sdgi Holdings, Inc.Articulating spinal implant
US667991528 Feb 200020 Jan 2004Sdgi Holdings, Inc.Articulating spinal implant
US684632818 Apr 200325 Jan 2005Sdgi Holdings, Inc.Articulating spinal implant
US70836513 Mar 20041 Aug 2006Joint Synergy, LlcSpinal implant
US71151442 Mar 20043 Oct 2006Joint Synergy, LlcSpinal implant
US719564415 Feb 200527 Mar 2007Joint Synergy, LlcBall and dual socket joint
US720566226 Feb 200417 Apr 2007Symmorphix, Inc.Dielectric barrier layer films
US723862820 May 20043 Jul 2007Symmorphix, Inc.Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
US726213116 Sep 200528 Aug 2007Symmorphix, Inc.Dielectric barrier layer films
US727068120 Jan 200418 Sep 2007Warsaw Orthopedic, Inc.Articulating spinal implant
US736119222 Apr 200522 Apr 2008Doty Keith LSpinal disc prosthesis and methods of use
US737835616 Mar 200227 May 2008Springworks, LlcBiased pulse DC reactive sputtering of oxide films
US73816571 Oct 20043 Jun 2008Springworks, LlcBiased pulse DC reactive sputtering of oxide films
US74048778 Nov 200229 Jul 2008Springworks, LlcLow temperature zirconia based thermal barrier layer by PVD
US741399816 Sep 200519 Aug 2008Springworks, LlcBiased pulse DC reactive sputtering of oxide films
US746955810 Jul 200130 Dec 2008Springworks, LlcAs-deposited planar optical waveguides with low scattering loss and methods for their manufacture
US749123918 Aug 200517 Feb 2009Joint Synergy, LlcInterior insert ball and dual socket joint
US754427616 Sep 20059 Jun 2009Springworks, LlcBiased pulse DC reactive sputtering of oxide films
US779908029 Sep 200621 Sep 2010Doty Keith LSpinal disc prosthesis and methods of use
US78381332 Sep 200523 Nov 2010Springworks, LlcDeposition of perovskite and other compound ceramic films for dielectric applications
US792772230 Jul 200419 Apr 2011United Technologies CorporationDispersion strengthened rare earth stabilized zirconia
US79597697 Nov 200614 Jun 2011Infinite Power Solutions, Inc.Deposition of LiCoO2
US799377321 Aug 20099 Aug 2011Infinite Power Solutions, Inc.Electrochemical apparatus with barrier layer protected substrate
US802177823 Aug 200520 Sep 2011Infinite Power Solutions, Inc.Electrochemical apparatus with barrier layer protected substrate
US80458326 Apr 200525 Oct 2011Springworks, LlcMode size converter for a planar waveguide
US806270826 Sep 200722 Nov 2011Infinite Power Solutions, Inc.Masking of and material constraint for depositing battery layers on flexible substrates
US807447231 Jul 200713 Dec 2011Zircoa Inc.Grinding beads and method of producing the same
US807600522 Mar 200713 Dec 2011Springworks, LlcEnergy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
US810546627 Jul 200531 Jan 2012Springworks, LlcBiased pulse DC reactive sputtering of oxide films
US81977815 Nov 200712 Jun 2012Infinite Power Solutions, Inc.Sputtering target of Li3PO4 and method for producing same
US823644316 Mar 20077 Aug 2012Infinite Power Solutions, Inc.Metal film encapsulation
US826020310 Sep 20094 Sep 2012Infinite Power Solutions, Inc.Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof
US826848823 Jan 200918 Sep 2012Infinite Power Solutions, Inc.Thin film electrolyte for thin film batteries
US83505192 Apr 20098 Jan 2013Infinite Power Solutions, IncPassive over/under voltage control and protection for energy storage devices associated with energy harvesting
US839452229 Apr 200812 Mar 2013Infinite Power Solutions, Inc.Robust metal film encapsulation
EP0631995A124 Jun 19944 Jan 1995Dentsply GmbHDental prosthesis