|
| US4015613 | 17 Oct 1975 | 5 Apr 1977 | | Tank cleaning apparatus |
| US5224235 | 28 Jun 1991 | 6 Jul 1993 | Digital Equipment Corporation | Electronic component cleaning apparatus |
| US5409025 | 6 Oct 1993 | 25 Apr 1995 | Semler Industries Inc. | Apparatus and method for cleaning underground liquid fuel storage tanks |
| US6249932 | 29 Jan 1999 | 26 Jun 2001 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for removing fine particles |