US8627511B2 - Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam - Google Patents
Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam Download PDFInfo
- Publication number
- US8627511B2 US8627511B2 US13/575,809 US201113575809A US8627511B2 US 8627511 B2 US8627511 B2 US 8627511B2 US 201113575809 A US201113575809 A US 201113575809A US 8627511 B2 US8627511 B2 US 8627511B2
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- US
- United States
- Prior art keywords
- probe
- transformer
- particle beam
- sample
- local
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Drive or control circuitry or methods for piezoelectric or electrostrictive devices not otherwise provided for
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
-
- an excitation voltage generated by excitation means is applied to the piezoelectric resonator through a first galvanic isolation transformer, and in that a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to preamplification means on the output side,
- the first and second transformers have a sufficiently high primary/secondary breakdown voltage to resist the overvoltage generated by the particle beam,
- the impedances of the transformer windings are sufficiently low so that the electrical current generated in the conducting elements by the electrical pulse induced by the particle beam is incapable of damaging the first stage of the preamplification means placed on the output side.
f 1 =X 1min/(2*pi*L prim)
where Lprim is the inductance of the primary and X1min is the minimum reactance to achieve an attenuation G (in dB) of the signal amplitude at frequency f1. This reactance depends on the resistance of the input source, such that:
X 1min =Rg/(2*√{square root over ((A 2−1))})
where Rg is the resistance of the voltage source, and A=10(G/20)
The high cutoff frequency fh of the transformer is determined by the leakage inductance Lleak, and the inter-winding capacitance Ci such that:
fh=1/(2*pi*√{square root over ((L leak *C i)))}
Saturation of the magnetic core of the transformer may induce a distortion of the signal output from the secondary. The E.T. constant denoted KET gives the limitation of the signal frequency that can pass through the transformer without any distortion effect for a given amplitude in volts of the signal input into the primary, such that:
K ET =U*T
where U is the amplitude of the input signal in volts and T is the period of the signal in microseconds. The theoretical parameter settings or the experimental measurement of dynamic parameters of the transformer are well known to those skilled in the art. Concerning calculation methods to configure the frequency passband of the transformer, it would for example be possible to use the document reference [6]. Document reference [7] discloses an accepted equivalent model known to those skilled in the art, to digitally simulate the transformer at low and high frequency, for example on a SPICE digital simulation engine. Methods of experimental characterisation of dynamic parameters of the transformer are given in reference document [8].
-
- a very low voltage excitation stage comprising a first operational amplifier for which the non-inverting (+) input is connected to the ground, and in which the inverting (−) input is connected to a generator through a first resistance and to one end of a second resistance, and the output of which is connected to the other end of the second resistance,
- a first galvanic isolation comprising a first symmetric point transformer connected to the output from the first operational amplifier through a third resistance of an impedance matching stage, the capacitor of which is connected to the ground, the first end of the secondary of this first transformer being connected to the ground through a variable capacitor, the second end of the secondary of this first transformer being connected to a first electrode of a piezoelectric resonator, the second electrode of which is connected to the microtip and to the ground,
- a second galvanic isolation comprising a second transformer, of which one end of the primary is connected to the mid-point of the secondary of the first transformer, the other end being connected to the ground, and of which one end of the secondary is connected to the ground through a fourth resistance,
- a first preamplification stage comprising a second operational amplifier, of which the non-inverting (+) input is connected to the ground and of which the inverting (−) input is connected to the second end of the secondary of the second transformer through a capacitor and to one end of a fifth resistance, the other end of which is connected to the output from this second operational amplifier,
- a second amplification stage comprising a first differential instrumentation amplifier connected to the output from the second operational amplifier through a sixth resistance.
-
- a first preamplification stage comprising a third operational amplifier and a current-voltage conversion resistance connected between its inverting (−) input and its output, the inverting (−) input of this third operational amplifier also being connected to the sample, and the non-inverting (+) input of this third operational amplifier being connected to a voltage source to polarise the sample relative to the ground,
- a second amplification stage comprising a second differential instrumentation amplifier.
-
- a very low
voltage excitation stage 15, - a first
galvanic isolation 16, - a second
galvanic isolation 17, - a first preamplification stage 18 (current-voltage amplifier called transimpedance amplifier), for local mechanical characterisation,
- a second mechanical
characterisation amplification stage 19,
thereforemodules
- a very low
-
- a first local electrical characterisation preamplification stage 20 (current-voltage amplifier called transimpedance amplifier),
- a second local electrical
characterisation amplification stage 21,
thereforemodules
-
- a very low voltage excitation stage comprising a first operational amplifier U1 for which the non-inverting (+) input is connected to the ground, the inverting (−) input is connected to a Vexc generator through a first resistance R1 and to one end of a second resistance R2, and the output of which is connected to the other end of the second resistance R2,
- a first galvanic isolation comprising a first symmetric point transformer TR_1 connected to the output from the first operational amplifier U1 through a third resistance R3 of an impedance matching stage R3, C3, of which the capacitor C3 is connected to the ground, the first end of the secondary of this transformer being connected to the ground through a variable capacitor C_comp, the second end of the secondary of this transformer being connected to a first electrode of a
piezoelectric resonator 23, the second electrode of which is connected to themicrotip 22 and to the ground, - a second galvanic isolation comprising a second transformer TR_2 of which one end of the primary is connected to the mid-point of the secondary of the first transformer TR_1, the other end being connected to the ground, and of which a first end of the secondary is connected to the ground through a fourth resistance R4,
- a first preamplification stage comprising a second operational transimpedance amplifier U2, of which the non-inverting (+) input is connected to the ground and of which the inverting (−) input is connected to the second end of the secondary of the second transformer TR_2 through a capacitor C4 and to one end of a fifth resistance R_trans_mecha the other end of which is connected to the output from this second operational amplifier U2,
- a second amplification stage comprising a first differential instrumentation amplifier U3 with a gain resistance R_INA, connected to the output from the second operational amplifier U2 through a sixth resistance R6.
-
- a first preamplification stage comprising a third transimpedance operational amplifier U4 and a current-voltage conversion resistance R_trans_elec connected between its inverting (−) input and its output, the input of this third operational amplifier being connected to the
sample 10, - a second amplification stage comprising a second differential instrumentation amplifier U5 with a gain resistance R_INA.
- a first preamplification stage comprising a third transimpedance operational amplifier U4 and a current-voltage conversion resistance R_trans_elec connected between its inverting (−) input and its output, the input of this third operational amplifier being connected to the
- [1] <<Advances in atomic force microscopy>> by Franz D. Giessibl (Review of Modern Physics, volume 75, July 2003, pages 949-983)
- [2] <<Transparently combining SEM, TEM and FIBS with AFM/SPM and NSOM>> (Nanonics, Issue 2.3 (2002), http://nanonics.co.il/)
- [3] US 2004/0216 518
- [4] U.S. Pat. No. 6,006,594
- [5] <<Electrostatic force microscopy using a quartz tuning fork>> by Yongho Seo, Wonho the and Cheol Seong Hwang (Applied Physics Letters, volume 80,
number 23, Jun. 10 2002, pages 4324 to 4326) - [6] Technical Note <<Midcom Transformer Theory>>, by Dave LeVasseur (Technical Note 69, Jun. 1, 1998)
- [7] Technical Note by Rhombus Industries Inc. (<<pulse transformers>>)
- [8] <<Application Notes—Appendix 6>>, p.24, BH Electronics, www.bhelectronics.com
- [9] <<A Guide to Scanning Microscope Observation>> (JEOL)
- [10] “Scanning Probe Microscopy and Scanning Electron Microscopy for Electrical Characterization of Semiconductors” by J. C. González, M. I. N. da Silva, K. L. Bunker and P. E. Russell, (Current Issues on Multidisciplinary Microscopy Research and Education, p.274, FORMATEX 2004)
- [11] “Dielectric breakdown mechanisms in gate oxides” by S. Lombardo et al. (J. Appl. Phys. 98, 121301, 2005)
- [12] “Gate oxide breakdown in FET devices and circuits: From nanoscale physics to system-level reliability” by B. Kaczer et al., (Microelectronics Reliability 47, 559-566, 2007).
Claims (13)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1050633 | 2010-01-29 | ||
FR1050633A FR2955938B1 (en) | 2010-01-29 | 2010-01-29 | ELECTRONIC PILOTAGE AND AMPLIFICATION DEVICE FOR A PIEZOELECTRIC LOCAL PROBE OF FORCE MEASUREMENT UNDER A BEAM OF PARTICLES |
PCT/EP2011/051096 WO2011092225A1 (en) | 2010-01-29 | 2011-01-27 | Electronic control and amplification device for a piezoelectric local probe for measuring force beneath a particle beam |
Publications (2)
Publication Number | Publication Date |
---|---|
US20120304341A1 US20120304341A1 (en) | 2012-11-29 |
US8627511B2 true US8627511B2 (en) | 2014-01-07 |
Family
ID=42845849
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/575,809 Expired - Fee Related US8627511B2 (en) | 2010-01-29 | 2011-01-27 | Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam |
Country Status (5)
Country | Link |
---|---|
US (1) | US8627511B2 (en) |
EP (1) | EP2529239B1 (en) |
JP (1) | JP2013518269A (en) |
FR (1) | FR2955938B1 (en) |
WO (1) | WO2011092225A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160258820A1 (en) * | 2013-10-03 | 2016-09-08 | Technelec Ltd | Galvanically isolated monitoring circuit |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106950742B (en) * | 2017-05-24 | 2019-08-27 | 京东方科技集团股份有限公司 | A kind of curved-surface display device and preparation method thereof |
Citations (11)
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US20060076489A1 (en) * | 2004-10-12 | 2006-04-13 | Takashi Ohshima | Charged particle beam apparatus |
US20080149832A1 (en) * | 2006-12-20 | 2008-06-26 | Miguel Zorn | Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application |
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US20090242764A1 (en) * | 2008-03-31 | 2009-10-01 | Seagate Technology Llc | Spin-torque probe microscope |
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US6006594A (en) | 1994-05-11 | 1999-12-28 | Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts | Scanning probe microscope head with signal processing circuit |
IL145136A0 (en) | 2001-08-27 | 2002-06-30 | Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes | |
JP2005292012A (en) * | 2004-04-02 | 2005-10-20 | Jeol Ltd | Surface analyzer |
EP1783910B1 (en) * | 2005-11-07 | 2012-10-31 | Bosch Rexroth AG | Circuit and a method for the galvanically separated control of a semiconductor switch |
JP2008204813A (en) * | 2007-02-20 | 2008-09-04 | Univ Of Tokyo | Probe positioning device |
JP4700119B2 (en) * | 2009-03-19 | 2011-06-15 | エスアイアイ・ナノテクノロジー株式会社 | Microfabrication method using atomic force microscope |
-
2010
- 2010-01-29 FR FR1050633A patent/FR2955938B1/en not_active Expired - Fee Related
-
2011
- 2011-01-27 US US13/575,809 patent/US8627511B2/en not_active Expired - Fee Related
- 2011-01-27 JP JP2012550432A patent/JP2013518269A/en active Pending
- 2011-01-27 WO PCT/EP2011/051096 patent/WO2011092225A1/en active Application Filing
- 2011-01-27 EP EP11700855.7A patent/EP2529239B1/en not_active Not-in-force
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US3750010A (en) * | 1970-03-25 | 1973-07-31 | Reliance Electric Co | Vibration analyzer probe with reduced temperature sensitivity |
US4602308A (en) * | 1983-08-31 | 1986-07-22 | Control Concepts Corporation | Circuit for suppressing transients occurring in either common or transverse modes |
US5127077A (en) * | 1988-07-25 | 1992-06-30 | Abbott Laboratories | Fiber-optic physiological probes |
US5383354A (en) * | 1993-12-27 | 1995-01-24 | Motorola, Inc. | Process for measuring surface topography using atomic force microscopy |
US20060057566A1 (en) * | 1996-01-23 | 2006-03-16 | Qiagen Genomics, Inc. | Methods and compositions for analyzing nucleic acid molecules utilizing sizing techniques |
US5892223A (en) * | 1997-06-30 | 1999-04-06 | Harris Corporation | Multilayer microtip probe and method |
US20050269510A1 (en) * | 2004-06-07 | 2005-12-08 | National Applied Research Laboratories | Electrical scanning probe microscope apparatus |
US20060076489A1 (en) * | 2004-10-12 | 2006-04-13 | Takashi Ohshima | Charged particle beam apparatus |
US20080149832A1 (en) * | 2006-12-20 | 2008-06-26 | Miguel Zorn | Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application |
WO2009085772A2 (en) | 2007-12-20 | 2009-07-09 | The Regents Of The University Of California | Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus |
US20100320171A1 (en) | 2007-12-20 | 2010-12-23 | The Regents Of The University Of California | Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus |
US20090242764A1 (en) * | 2008-03-31 | 2009-10-01 | Seagate Technology Llc | Spin-torque probe microscope |
Non-Patent Citations (15)
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"Application Notes", Appendix 6, BH Electronics, pp. 24-26. |
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"Transparently Combining SEM, TEM & FIBs with AFM/SPM & NSOM", A Nanonics Imaging Solution, Issue 2.3, Dec. 2002, 4 pages. |
Atsushi Kikukawa et al., "Magnetic Force Microscope Combined with a Scanning Electron Microscope", 8257a Journal of Vacuum Science & Technology A, vol. 11, No. 6, XP-000412888, Nov. 1, 1993, pp. 3092-3098. |
B. Kaczer et al., "Gate Oxide Breakdown in FET Devices and Circuits: From Nanoscale Physics to System-level Reliability", Microelectronics Reliability 47, 2007, pp. 559-566. |
C. L. Jahncke et al., "Choosing a preamplifier for Tuning Fork Signal Detection in Scanning Force Microscopy", Review of Scientific Instruments, vol. 75, No. 8, XP-012072007, Aug. 18, 2004, pp. 2759-2761. |
Dave LeVasseur, "Midcom Transformer Theory", Technical Note 69, Jun. 1, 1998, pp. 1-70. |
Franz J. Giessibl, "Advances in Atomic Force Microscopy", Reviews of Modern Physics, vol. 75, Jul. 2003, pp. 949-983. |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160258820A1 (en) * | 2013-10-03 | 2016-09-08 | Technelec Ltd | Galvanically isolated monitoring circuit |
US10168231B2 (en) * | 2013-10-03 | 2019-01-01 | Technelec Ltd | Galvanically isolated monitoring circuit |
Also Published As
Publication number | Publication date |
---|---|
WO2011092225A1 (en) | 2011-08-04 |
FR2955938A1 (en) | 2011-08-05 |
FR2955938B1 (en) | 2012-08-03 |
EP2529239A1 (en) | 2012-12-05 |
JP2013518269A (en) | 2013-05-20 |
EP2529239B1 (en) | 2015-02-25 |
US20120304341A1 (en) | 2012-11-29 |
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Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:POLESEL, JEROME;REEL/FRAME:028710/0662 Effective date: 20120703 |
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