|Publication number||US7456116 B2|
|Application number||US 11/018,381|
|Publication date||25 Nov 2008|
|Filing date||20 Dec 2004|
|Priority date||19 Sep 2002|
|Also published as||US20050142895|
|Publication number||018381, 11018381, US 7456116 B2, US 7456116B2, US-B2-7456116, US7456116 B2, US7456116B2|
|Inventors||Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won B. Bang, Yen-Kun V. Wang, Zheng Yuan|
|Original Assignee||Applied Materials, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (104), Non-Patent Citations (10), Referenced by (39), Classifications (19), Legal Events (6)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application is a continuation-in-part of U.S. patent application Ser. No. 10/247,672, entitled “METHOD USING TEOS RAMP-UP DURING TEOS/OZONE CVD FOR IMPROVED GAP-FILL,” filed Sep. 19, 2002 by Nitin K. Ingle, Xinyua Xia, and Zheng Yuan, the entire contents of which is herein incorporated by reference for all purposes. This application also claims the benefit of U.S. Provisional Patent Application No. 60/605,116, entitled “IMPROVED GAP-FILL DEPOSITIONS INTRODUCING HYDROXYL-CONTAINING PRECURSORS IN THE FORMATION OF SILICON CONTAINING DIELECTRIC MATERIALS,” filed Aug. 27, 2004 by Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won B. Bang, and Yen-Kun V. Wang, the entire disclosure of which is also herein incorporated by reference for all purposes.
The fabrication sequence of integrated circuits often includes several patterning processes. The patterning processes may define a layer of conductors, such as a patterned metal or polysilicon layer, or may define isolation structures, such as trenches. In many cases the trenches are filled with an insulating, or dielectric, material. This insulating material can serve several functions. For example, in some applications the material serves to both electrically isolate one region of the IC from another, and electrically passivate the surface of the trench. The material also typically provides a base for the next layer of the semiconductor to be built upon.
After patterning a substrate, the patterned material is not flat. The topology of the pattern can interfere with or degrade subsequent wafer processing. It is often desirable to create a flat surface over the patterned material. Several methods have been developed to create such a flat, or “planarized”, surface. Examples include depositing a conformal layer of material of sufficient thickness and polishing the wafer to obtain a flat surface, depositing a conformal layer of material of sufficient thickness and etching the layer back to form a planarized surface, and forming a layer of relatively low-melting point material, such as doped silicon oxide, and then heating the wafer sufficiently to cause the doped silicon oxide to melt and flow as a liquid, resulting in a flat surface upon cooling. Each process has attributes that make that process desirable for a specific application.
As semiconductor design has advanced, the feature size of the semiconductor devices has dramatically decreased. Many circuits now have features, such as traces or trenches less than a micron across. While the reduction in feature size has allowed higher device density, more chips per wafer, more complex circuits, lower operating power consumption and lower cost among other benefits, the smaller geometries have also given rise to new problems, or have resurrected problems that were once solved for larger geometries.
An example of the type of manufacturing challenge presented by sub-micron devices is the ability to completely fill a narrow trench in a void-free manner. To fill a trench with silicon oxide, a layer of silicon oxide is first deposited on the patterned substrate. The silicon oxide layer typically covers the field, as well as walls and bottom of the trench. If the trench is wide and shallow, it is relatively easy to completely fill the trench. As the trench gets narrower and the aspect ratio (the ratio of the trench height to the trench width) increases, it becomes more likely that the opening of the trench will “pinch off”.
Pinching off a trench may trap a void within the trench.
One approach to forming fewer voids is to slow down the dielectric deposition rate. Slower deposition rates facilitate a more conformal deposition of the dielectric material on the trench surfaces, which reduces excess buildup of dielectric materials on the top corners of the trench that can result in pinching off. As a result, trenches are more evenly filled from the bottom up. However, lowering the deposition rate of the dielectric material also reduces process efficiency by increasing the total dielectric deposition time. The slower dielectric deposition rates not only increase the time for filling trench 1, but also the bulk dielectric layer 3 on top of trench 1.
Another challenge encountered in gap-fill processes is the formation of weak seams at the interface of the dielectric material with a trench surface, as well as between surfaces of the dielectric materials itself. Weak seams can form when the deposited dielectric materials adhere weakly, or not at all, to the inside surfaces of a trench. Subsequent process steps (e.g., annealing) can detach the dielectric material from the trench surface and create a fissure in the gap-filled trench. Weak seams can also be formed between dielectric surfaces as illustrated in
The dielectric material along seam 9 has a lower density and higher porosity than other portions of the dielectric material 6, which can cause an enhanced rate of etching along the seam 9.
In some circumstances, voids and weak seams in dielectric trench fills may be filled in or “healed” using a reflow process. For example, some doped silicon oxide dielectric materials experience viscous flow at elevated temperatures, permitting the reduction of voids and weak seams with high-temperature reflow processes. However, as the trench becomes narrower, it becomes more likely that the void will not be filled during these reflow process. In addition, reflow processes are not practical in many applications where high melting point dielectrics, such as undoped silicon oxide, are used for the gapfill. Thus, there remains a need for new systems and methods to reduce or eliminate voids and weak seams in dielectric gapfills.
Embodiments of the invention include methods to form a silicon oxide layer, where the methods include the step of providing a continuous flow of a silicon-containing precursor to a chamber housing a substrate, where the silicon-containing precursor is selected from TMOS, TEOS, OMTS, OMCTS, and TOMCATS. The methods may also include the steps of providing a flow of an oxidizing precursor to the chamber, and causing a reaction between the silicon-containing precursor and the oxidizing precursor to form a silicon oxide layer. In addition, the methods include varying over time a ratio of the silicon-containing precursor:oxidizing precursor flowed into the chamber to alter a rate of deposition of the silicon oxide on the substrate.
Embodiments of the invention also include substrate processing apparatuses that include a processing chamber, and a substrate support configured to support a substrate within the processing chamber. The apparatuses may also include a precursor delivery system configured to receive a silicon-containing precursor and an oxidizing precursor and to deliver the silicon-containing precursor and the oxidizing precursor to the processing chamber. The silicon-containing precursor is selected from the group consisting of TMOS, TEOS, OMTS, OMCTS, and TOMCATS. The apparatuses may further include a controller configured to control the precursor delivery system and the substrate support, where the controller is operable to (i) direct the precursor delivery system to introduce the silicon-containing precursor and the oxidizing precursor into processing chamber at a first relative concentration, and (ii) direct the precursor deliver system to vary the concentration of the silicon-containing precursor relative to the oxidizing precursor over time to deposit silicon oxide on the substrate, as the silicon-containing precursor is continuously flowed into the chamber.
Embodiments of the invention still further include a chemical vapor deposition method for forming a dielectric material in a trench formed on a substrate. The method includes flowing a silicon-containing precursor into a process chamber housing the substrate, flowing an oxidizing gas into the chamber, and providing a hydroxyl-containing precursor in the process chamber. The method also includes reacting the silicon-containing precursor, oxidizing gas and hydroxyl-containing precursor to form the dielectric material in the trench. The ratio of the silicon-containing precursor to the oxidizing gas flowed into the chamber is increased over time to alter a rate of deposition of the dielectric material.
The method may also include increasing, over time, a ratio of the silicon-containing precursor to the hydroxyl-containing precursor flowing into the chamber. The hydroxyl-containing precursor may include water and/or hydrogen peroxide. The step of providing the hydroxyl-containing precursor in the processing chamber may include combusting hydrogen and oxygen in the chamber to form in-situ generated steam (ISSG). Alternatively, the process of providing the hydroxyl-containing precursor in the process chamber may include injecting the water into the process chamber, or bubbling a carrier gas through water to form a wet carrier gas and flowing the wet carrier gas into the chamber. The carrier gas may be the oxidizing gas. The water may be provided to the chamber at a flow rate of about 10 grams/minute.
In addition, a dopant precursor may flow into the chamber at the same or a different time than the other precursor gases. The dopant may be triethylborate (TEB), triethylphosphate (TEPO), or diborane, among other dopants.
The dielectric material may be formed in trench at a temperature of about 500° C. to about 600° C. The annealing of the dielectric material in the trench may be done at a temperature of about 800° C. to about 1400° C.
Embodiments of the invention also include a chemical vapor deposition method for forming a dielectric layer on a substrate. The method includes providing a silicon-containing precursor, an oxidizing processing gas, and a hydroxyl-containing precursor to a chamber housing the substrate. These precursors react to form the dielectric layer on the substrate. The ratio of the silicon-containing precursor to the oxidizing processing gas flowed into the chamber may be altered to change the deposition rate of the dielectric layer. The method may also include annealing the dielectric layer to increase a density of the dielectric layer. Also, the ratio of the silicon-containing precursor to the oxidizing processing gas may be varied by increasing a flow rate of the silicon-containing precursor relative to a flow rate of the oxidizing processing gas.
Embodiments of the invention further include a substrate processing apparatus. The apparatus may include a substrate support configured to support a substrate within a processing chamber, and a gas delivery system configured to receive a silicon-containing precursor, a hydroxyl-containing precursor and an oxidizing processing gas and deliver them to the processing chamber. The apparatus may further include a controller configured to control the gas delivery system and the substrate support. The controller may introduce the silicon-containing precursor, the hydroxyl-containing precursor and oxidizing processing gas into the processor chamber to form a dielectric layer on the substrate, and alter the position of the substrate support relative to the gas delivery system during the deposition of the dielectric layer.
The controller may also vary the concentration of the silicon-containing precursor to the oxidizing processing gas over time during the deposition of the dielectric layer on the substrate, as the silicon-containing precursor gas is continuously flowed into the chamber. In addition, the controller may move the substrate support closer to the gas delivery system during the deposition of the dielectric layer to increase a deposition rate for the dielectric layer. Embodiments of a substrate processing apparatus may also include a gas delivery system having separate channels to deliver the silicon-containing precursor and the hydroxyl-containing precursor to the processing chamber.
Additional embodiments and features are set forth in part in the description that follows, and in part will become apparent to those skilled in the art upon examination of the specification or may be learned by the practice of the invention. The features and advantages of the invention may be realized and attained by means of the instrumentalities, combinations, and methods described in the specification.
As noted above, the development of voids and weak seams in trench isolations has become an increasing problem, particularly as trench widths get smaller (e.g., about 90 nm or less) and trench aspect ratios get higher (e.g., about 6:1 or higher). The present invention includes systems and methods of forming dielectric materials in these trenches using a high-aspect ratio process (HARP). In some embodiments, HARP may include the use of a hydroxyl-containing precursor (e.g., H2O, hydrogen peroxide (H2O2), etc.) to help reduce voids and weak seams in the gapfill. The hydroxyl-containing precursor enhances the flowability and density of the silicon oxide material, helping to heal weak seams and fill in voids formed during the deposition.
Hydroxyl-containing precursors also increase the density of the silicon oxide material formed in the trench. The higher density of the material may provide advantages over less dense material, including giving the material a slower wet etch rate. Less dense materials deposited in the trenches by, for example, conventional, moisture free chemical vapor deposition typically have wet etch rates of about 5:1 or more. The high wet etch rates of the material can result in the overetching during subsequent planarization and/or oxide etching processes. This overetching may result in the formation of bowls or gaps at the tops of the trench isolations.
Embodiments of the invention include depositing the dielectric materials using high aspect ratio processes (HARPs). These processes include depositing the dielectric material at different rates in different stages of the process. For example, a lower deposition rate may be used to form a more conformal dielectric layer in a trench, while a higher deposition rate is used to form a bulk dielectric layer above the trench. In other examples, multiple rates (e.g., 3 or more rates) are used at various stages of the formation of the dielectric layer. Performing the deposition at a plurality of dielectric deposition rates reduces the number of voids and weak seams in the trenches without significantly reducing the efficiency of the deposition process. In additional embodiements, HARP may include hydroxyl-containing precursors that permit the efficient formation of low defect, high-density dielectric materials in trenches and bulk dielectric layers.
Exemplary Oxide Deposition Processes
The present invention provides methods, apparatuses, and devices related to chemical vapor deposition of silicon oxide. In one embodiment, a single-step deposition process is used to efficiently form a silicon oxide layer with good gap-filling properties. During a pre-deposition gas flow stabilization stage and an initial deposition stage, a relatively low ratio of silicon-containing gas:ozone is flowed, resulting in the formation at relatively slow rates of silicon oxide exhibiting a highly conformal character. Over the course of the process step, the ratio of silicon-containing gas:ozone is increased to deposit less-conformal oxide material at relatively rapid rates during later stages.
In the example shown in
In order to overcome the intrinsic limitation of uncontrollable TEOS flows at low TEOS flow rates, embodiments in accordance with the present invention may allow the gas to stabilize at a small, non-zero flow prior to elevation to the desired set point. This pre-deposition flow stabilization phase is shown as A′ in
In the pre-deposition phase A′ of the process shown in
As described in detail below, the relative concentration of the TEOS or other silicon-containing gas in the process gas flowed to the chamber will vary over the course of the deposition step. However, an oxide CVD step in accordance with the present invention is characterized in that once the silicon-containing gas is introduced into the chamber, it continues to flow into the chamber for the duration of the oxide CVD step.
Beginning with the first deposition stage A of the process shown in
After about 300 seconds from the point that TEOS was originally flowed, in stage C the TEOS:O3 flow ratio is again steadily increased to provide deposition of additional silicon oxide material at even higher rates. Such additional deposition may again be useful to fill large volumes of space between features, or to create a bulk layer of oxide overlying the filled features (see description of
In addition to the first vertical axis labeled % TEOS,
In final stage D of the process illustrated in
Embodiments in accordance with the present invention offer a number of advantages over deposition of silicon oxide utilizing conventional approaches. One advantage is high conformality and favorable step coverage and gap-fill, while maintaining a high throughput.
Specifically, conventional processes allow for a flow of processing gas comprising an unvarying concentration of TEOS for a set duration. Under such conditions, a low TEOS:ozone ratio provides deposition conditions optimal for gap-fill and film conformity. However, the rate of oxide deposition is low, adversely affecting process throughput.
One possible compromise is a conventional two-step process described briefly above, wherein a first step is performed under process conditions with a low TEOS:ozone ratio and low deposition rate for achieving the desired gap-fill. The flow of silicon-containing gas to the chamber is interrupted, and then a second distinct step is performed under different conditions with a high TEOS:ozone ratio and a high deposition rate for bulk fill. However, such a two-step process may exhibit reduced throughput due to the extended time required in the first step, and also the time consumed in halting the flow of process gas to the chamber and changing the apparatus configuration between the first and second steps. By contrast, embodiments in accordance with the present invention accomplish deposition of conformal oxide layers with acceptable throughput by increasing the amount of TEOS in a controlled manner over the course of the unitary deposition step.
While the above is a complete description of specific embodiments of the present invention, various modifications, variations, and alternatives may be employed. For example, while the embodiment of a process in accordance with the present invention shown and described in conjunction with
Moreover, other techniques for varying the parameters of deposition of an oxide layer could be employed in conjunction with the variation in concentration of the process gas flow components described so far. One example of a process parameter that can be varied is the wafer-to-gas distribution plate spacing described and illustrated in conjunction with
The specific process illustrated in
Changes in composition of process gases flowed during deposition of silicon oxide in accordance with the present invention may be accomplished in a variety of ways. In the process shown in
Moreover, a change in the relative ratio of components of the processing gas mixture may be accomplished by other than changing the flow rates of the components. For example, ozone is frequently formed by flowing oxygen through an ozone generator, resulting in a gas flow comprising oxygen and some percentage of ozone. Changes in the concentration of silicon-containing gas relative to ozone could also be accomplished by altering the conditions of generation of the ozone to increase its concentration, without altering the flow rate of the ozone into the processing chamber.
After the substrate is placed in the process chamber, the precursor materials may flow through the manifold. This may include flowing an oxidizing gas precursor 306 (e.g., O2, O3, NO, NO2, mixtures thereof, etc.), a silicon-containing precursor 308 (e.g., silane, dimethylsilane, trimethylsilane, tetramethylsilane, diethylsilane, tetramethylorthosilicate (TMOS), tetraethylorthosilicate (TEOS), octamethyltrisiloxane (OMTS), octamethylcyclotetrasiloxane (OMCTS), tetramethylcyclotetrasiloxane (TOMCATS), mixtures thereof, etc.) through the mainfold. Each precursor flows through the manifold and into the process chamber at an initial flow rate. For example, the silicon-containing precursor may initially flow through the manifold at about 20 to about 100 sccm, while the oxidizing precursor flows at about 60 to about 1000 sccm.
Depending on the type of CVD process used, the precursor materials may first help form a plasma whose products are used to form the dielectric layer on the substrate. Embodiments of the invention may be used with plasma CVD techniques such as plasma enhanced CVD (PECVD), and high density plasma CVD (HDPCVD), as well as thermal CVD techniques such as atmospheric pressure CVD (APCVD), sub-atmospheric CVD (SACVD), and low-pressure CVD (LPCVD), among others.
The initial flow rates of the precursors establish first flow rate ratios for the silicon-containing precursor:oxidizing gas precursor. When the initial deposition of dielectric materials includes trench fills, the ratio of silicon-containing precursor:oxidizing gas precursor may be relatively low to provide a slower deposition of dielectric materials in the trenches. As the deposition progresses, the ratio of silicon-containing precursor:oxidizing gas precursor may be adjusted in step 312. For example, once a portion of the trenches has been filled, the ratio of silicon-containing precursor:oxidizing gas precursor may be increased to increase the deposition rate of the dielectric material. The adjustment is made at a stage of the deposition when there is reduced risk of the higher deposition rate causing voids or weak seams in the trenches.
Moreover, a change in the relative ratio of components of the processing gas mixture may be accomplished by other than changing the flow rates of the components. For example, when ozone is used as the oxidizing gas precursor, it's frequently formed by flowing oxygen through an ozone generator, resulting in a gas flow comprising oxygen and some percentage of ozone. Changes in the concentration of silicon-containing precursor relative to ozone (i.e., the oxidizing gas precursor) could also be accomplished by altering the conditions of generation of the ozone to increase its concentration, without altering the flow rate of the ozone into the processing chamber.
The deposition rate of the dielectric layer may also be changed by adjusting the distance between the substrate and manifold to a second distance 314. The process chamber may include an adjustable lift that can vary the space between the substrate and the manifold during the deposition. As the substrate moves closer to the manifold, it enters a zone where the precursor materials are more concentrated, and form the dielectric layer at a faster rate. Thus, when the dielectric materials can be deposited on the substrate at a higher deposition rate without causing voids or weak seams, the substrate may be moved from an initial first distance to a second distance that is closer to the process chamber manifold.
At the completion of the deposition of the dielectric layer, the precursor materials stop flowing into the chamber 316. Additional process steps (e.g., annealing, chemical-mechanical polishing, etc.) may follow the dielectric deposition, before the substrate is removed from the process chamber.
After the substrate is placed in the process chamber, the precursor materials may flow through the manifold. This may include flowing an oxidizing gas precursor 306 (e.g., O2, O3, NO, NO2, mixtures thereof, etc.), a silicon-containing precursor 308 (e.g., silane, dimethylsilane, trimethylsilane, tetramethylsilane, diethylsilane, tetramethylorthosilicate (TMOS), tetraethylorthosilicate (TEOS), octamethyltrisiloxane (OMTS), octamethylcyclotetrasiloxane (OMCTS), tetramethylcyclotetrasiloxane (TOMCATS), mixtures thereof, etc.), and a hydroxyl-containing precursor 310 (e.g., H2O, H2O2, etc.) through the manifold. Each precursor flows through the manifold and into the process chamber at an initial flow rate. For example, the silicon-containing precursor may initially flow through the manifold at about 20 to about 100 sccm, while the oxidizing precursor flows at about 60 to about 1000 sccm, and the hydroxyl-containing precursor flow at about 60 to about 200 sccm.
The initial flow rates of the precursors establish first flow rate ratios for the silicon-containing precursor:oxidizing gas precursor, and the silicon-containing precursor:hydroxyl-containing precursor. When the initial deposition of dielectric materials includes trench fills, the ratio of silicon-containing precursor:oxidizing gas precursor may be relatively low to provide a slower deposition of dielectric materials in the trenches. As the deposition progresses, the ratio of silicon-containing precursor:oxidizing gas precursor may be adjusted in step 312. For example, once a portion of the trenches has been filled, the ratio of silicon-containing precursor:oxidizing gas precursor may be increased to increase the deposition rate of the dielectric material. The adjustment is made at a stage of the deposition when there is reduced risk of the higher deposition rate causing voids or weak seams in the trenches.
The flow rate ratio of the silicon-containing precursor to the hydroxyl-containing precursor may also be relatively low in the initial deposition stage. When the flow rate ratio of silicon-containing precursor:oxidizing gas precursor is increased, the ratio of silicon-containing precursor:hydroxyl-containing precursor may increase as well. Alernatively, the ratio of silicon-containing precursor:hydroxyl-containing precursor may remain substantially constant as the ratio of silicon-containing precursor:oxidizing gas varies, such as embodiments where the silicon-containing and hydroxyl-containing precursors flow together into the process chamber.
Changes in composition of process gases flowed during the dielectric deposition may be accomplished in a variety of ways. Embodiments of the method have an increasing relative percentage of the silicon-containing precursor to the overall precursor mixture flow. Such an increase could be produced by elevating the flow rate of the silicon-containing precursor, reducing the flow rate of the oxidizing gas precursor, reducing the flow rate of the hydroxyl-containing precursor, or any combination of a change in flow rates of the components of the processing gas mixture which results in a change in the overall percentage composition of the silicon-containing precursor.
Referring now to
Precursor materials are provided to the heated substrate by flowing oxidizing gas precursor, silicon-containing precursor, and hydroxyl-containing precursor to the process chamber in steps 305, 306 and 307. The precursors may be mixed together and flow through a single channel into the process chamber at a constant flow rate until the flows are stopped at the end of the deposition 311. Alternatively, the silicon-containing precursor may flow though a channel that is independent of the oxidizing gas precursor and/or hydroxyl-containing precursor, and the flow rates of the precursors may be independently varied over the course of the deposition. The timing of the precursor materials may also be varied such that, for example, the oxidizing gas precursor and/or hydroxyl-containing precursor may be introduced before the silicon-containing precursor, or alternatively, all three precursors being introduced at the same time.
The dielectric layer formed on the substrate may be annealed in step 313. The anneal may be performed in the process chamber, or the substrate may be transferred to a separate annealing chamber. Exemplary anneal processes that may be used with embodiments of the invention will now be described.
Exemplary Post-Deposition Anneal Processes
Following the formation of the dielectric material, a post-deposition anneal may optionally be performed. The dielectric material may be annealed in an atmosphere such as N2, N2O, NO or NH3. In one embodiment, the annealing process includes heating the substrate and flowing N2O into the chamber or furnace. The N2O interacts with the silicon oxide material at high temperatures and strengthens any remaining weak seams. The annealed layer is substanitally seam-free and suited for further treatments such as CMP.
Annealing may take place in situ or ex situ. For example, the annealing may take place in the CVD chamber immediately after the depostion. Annealing alternatively may take place in another chamber of a multi-chamber system or in a different chamber system (e.g., a furnace). In some embodiments, annealing comprises a Rapid Thermal Process (RTP) as more fully described in U.S. Pat. No. 5,660,472, the entire disclosure of which is herein incorporated by reference for all purposes.
The annealing temperature may range from about 750° C. to about 1000° C. for furnace anneal and up to about 1200° C. for RTP anneal. The annealing duration is temperature dependent and may range from about 10 minutes to around 2 hours for furnace anneal and as few as 5 seconds up to around 3 minutes for RTP. As a result, in most cases, the layer is annealed by restructuring the SiO2 network without exceeding the SiO2 reflow temperature.
In other embodiments, the anneal process may include a multi-step anneal similar to those described in co-assigned U.S. Prov. Patent App. Ser. No. 60/598,939, titled “MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL,” filed Aug. 4, 2004, by Nitin K. Ingle et al., the entire contents of which is hereby incorporated by reference for all purposes.
In these examples, silicon oxide (SiO2) dielectric materials were deposited in substrate trenches using TEOS as the silicon-containing precursor, ozone as the oxidizing gas precursor and water vapor as the hydroxyl-containing precursor. The depositions are performed in a process chamber configured for thermal CVD.
Silicon oxide gap-fills were performed according to embodiments of the methods of the invention and comparative examples using conventional gap-fill techniques were also run.
Referring now to
Exemplary Semiconductor Structure
Trenches like the ones shown in
A premetal dielectric (PMD) layer 221 separates the transistors 203 and 206 from the metal layer 240, with connections between metal layer 240 and the transistors made by contacts 224. The premetal dielectric layer 221 may comprise a single layer or multiple layers. The metal layer 240 is one of four metal layers, 240, 242, 244, and 246, included in the integrated circuit 200. Each metal layer is separated from adjacent metal layers by intermetal dielectric layers 227, 228, and 229. Adjacent metal layers are connected at selected openings by vias 226. Planarized passivation layers 230 are deposited over the metal layer 246.
A silicon oxide layer according to the present invention may be used to form one or more of the dielectric layers shown in integrated circuit 200. For example, a silicon oxide layer deposited according to the present invention may be used to create trench isolation structure 220. A silicon oxide layer deposited according to the present invention may also be used to create PMD layer 221, or the higher layer intermetal dielectric layers 227-229 of the overlying interconnect structure.
A silicon oxide layer according to the present invention may also be used in damascene layers, which are included in some integrated circuits. In damascene layers, a blanket layer is deposited over a substrate, selectively etched through to the substrate, and then filled with metal and etched back or polished to form metal contacts 224. After the metal layer is deposited, a second blanket deposition is performed and selectively etched. The etched areas are then filled with metal and etched back or polished to form vias 226.
It should be understood that the simplified integrated circuit 200 is for illustrative purposes only. One of ordinary skill in the art could implement the present method for fabrication of other integrated circuits, such as microprocessors, application-specific integrated circuits (ASICs), memory devices, and the like.
Exemplary Deposition System
The CVD apparatus 10 includes an enclosure assembly 102 housing a vacuum chamber 15 with a gas reaction area 16. A gas distribution plate 20 is provided above the gas reaction area 16 for dispersing reactive gases and other gases, such as purge gases, through perforated holes in the gas distribution plate 20 to a wafer (not shown) that rests on a vertically movable heater 25 (also referred to as a wafer support pedestal). The heater 25 can be controllably moved between a lower position, where a wafer can be loaded or unloaded, for example, and a processing position closely adjacent to the gas distribution plate 20, indicated by a dashed line 13, or to other positions for other purposes, such as for an etch or cleaning process. A center board (not shown) includes sensors for providing information on the position of the wafer.
The heater 25 includes an electrically resistive heating element (not shown) enclosed in a ceramic. The ceramic protects the heating element from potentially corrosive chamber environments and allows the heater to attain temperatures up to about 800° C. In an exemplary embodiment, all surfaces of the heater 25 exposed to the vacuum chamber 15 are made of a ceramic material, such as aluminum oxide (Al2O3 or alumina) or aluminum nitride.
Reactive and carrier gases are supplied through the supply line 43 into a gas mixing box (also called a gas mixing block) 273, where they are preferably mixed together and delivered to the gas distribution plate 20. For example, silicon-containing precursor, such as silane, dimethylsilane, trimethylsilane, tetramethylsilane, diethylsilane, tetramethylorthosilicate (TMOS), tetraethylorthosilicate (TEOS), octamethyltetrasiloxane (OMTS), octamethylcyclotetrasiloxane (OMCTS), tetramethylcyclotetrasiloxane (TOMCATS), or mixtures thereof may be supplied to supply line 43 along with an oxide gas, such as oxygen (O2), ozone (O3), NO, NO2, or mixtures thereof, and a hydroxyl-containing precursors such as H2O, hydrogen peroxide, or mixtures thereof.
In alternate embodiments, the hydroxyl-containing precursor may be generated by combustion reactions that occur in (or near) vacuum chamber 15. For example, the hydroxyl-containing precursor may be in-situ generated steam (ISSG) that is generated by the combustion of hydrogen (H2) and oxygen (O2) in or near vacuum chamber 15 to form water vapor.
The gas mixing box 273 is preferably a dual input mixing block coupled to a process gas supply line 43 and to a cleaning/etch gas conduit 47. A valve 280 operates to admit or seal gas or plasma from the gas conduit 47 to the gas mixing block 273. The gas conduit 47 receives gases from an integral remote microwave plasma system 55, which has an inlet 57 for receiving input gases. During deposition processing, gas supplied to the plate 20 is vented toward the wafer surface (as indicated by arrows 21), where it may be uniformly distributed radially across the wafer surface, typically in a laminar flow.
Purging gas may be delivered into the vacuum chamber 15 from the plate 20 and/or an inlet port or tube (not shown) through the bottom wall of enclosure assembly 102. The purging gas flows upward from the inlet port past the heater 25 and to an annular pumping channel 40. An exhaust system then exhausts the gas (as indicated by arrows 22) into the annular pumping channel 40 and through an exhaust line 60 to a vacuum system 88, which includes a vacuum pump (not shown). Exhaust gases and entrained particles are drawn from the annular pumping channel 40 through the exhaust line 60 at a rate controlled by a throttle valve system 63.
In other embodiments (not shown) the silicon-containing precursors and the hydroxyl-containing precursors may travel through separate supply lines to a gas distribution plate in order to prevent them from reacting prematurely before reaching the substrate. As example of the dual channel supply line and showerhead design is described in co-assigned U.S. Pat. No. 6,624,091, titled “METHODS OF FORMING GAP FILL AND LAYERS FORMED THEREBY,” filed May 7, 2001, the entire contents of which is hereby incorporated by this reference for all purposes.
The remote microwave plasma system 55 can produce a plasma for selected applications, such as chamber cleaning or etching native oxide or residue from a process wafer. Plasma species produced in the remote plasma system 55 from precursors supplied via the input line 57 are sent via the conduit 47 for dispersion through the plate 20 to the vacuum chamber 15. Precursor gases for a cleaning application may include fluorine, chlorine, and other reactive elements. The remote microwave plasma system 55 also may be adapted to deposit plasma-enhanced CVD films by selecting appropriate deposition precursor gases for use in the remote microwave plasma system 55.
The system controller 53 controls activities and operating parameters of the deposition system. The processor 50 executes system control software, such as a computer program stored in a memory 70 coupled to the processor 50. Preferably, the memory 70 may be a hard disk drive, but of course the memory 70 may be other kinds of memory, such as read-only memory or flash memory. In addition to a hard disk drive (e.g., memory 70), the CVD apparatus 10 in a preferred embodiment includes a floppy disk drive and a card rack (not shown).
The processor 50 operates according to system control software, which includes sets of instructions that dictate the timing, mixture of gases, chamber pressure, chamber temperature, microwave power levels, susceptor position, and other parameters of a particular process. Other computer programs such as those stored on other memory including, for example, a floppy disk or another computer program product inserted in a disk drive or other appropriate drive, may also be used to operate the processor 50 to configure the CVD system 10 into various apparatus.
The processor 50 has a card rack (not shown) that contains a single-board computer, analog and digital input/output boards, interface boards and stepper motor controller boards. Various parts of the CVD system 10 conform to the Versa Modular European (VME) standard which defines board, card cage, and connector dimensions and types. The VME standard also defines the bus structure having a 16-bit data bus and 24-bit address bus.
In the preferred embodiment two monitors 73 a are used, one mounted in the clean room wall 71 for the operators, and the other behind the wall 72 for the service technicians. Both monitors 73 a simultaneously display the same information, but only one light pen 73 b is enabled. The light pen 73 b detects light emitted by the CRT display with a light sensor in the tip of the pen. To select a particular screen or function, the operator touches a designated area of the display screen and pushes the button on the pen 73 b. The touched area changes its highlighted color, or a new menu or screen is displayed, confirming communication between the light pen and the display screen. Of course, other devices, such as a keyboard, mouse, or other pointing or communication device, may be used instead of or in addition to the light pen 73 b to allow the user to communicate with the processor.
The remote microwave plasma system 55 is integrally located and mounted below the chamber 15 with the conduit 47 coming up alongside the chamber 15 to the gate valve 280 and the gas mixing box 273, located above the chamber 15. Microwave generator 110 and ozonator 115 are located remote from the clean room. Supply lines 83 and 85 from the gas supply panel 80 provide reactive gases to the gas supply line 43. The gas supply panel 80 includes lines from gas or liquid sources 90 that provide the process gases for the selected application. The gas supply panel 80 has a mixing system 93 that mixes selected gases before flow to the gas mixing box 273. In some embodiments, gas mixing system 93 includes a liquid injection system for vaporizing reactant liquids including silicon-containing precursors such as tetrammethylorthosilicate (“TMOS”), tetraethylorthosilicate (“TEOS”), octamethyltrisiloxane (OMTS), octamethylcyclotetrasiloxane (OMCTS), tetramethylcyclotetrasiloxane (TOMCATS), hydroxyl-containing precursors such as water, and hydrogen peroxide, and dopants such as triethylborate (“TEB”), triethylphosphate (“TEPO”) and diborane (B2H6). Vapor from the liquids is usually combined with a carrier gas, such as helium. Supply lines for the process gases may include (i) shut-off valves 95 that can be used to automatically or manually shut off the flow of process gas into line 85 or line 57, and (ii) liquid flow meters (LFM) 100 or other types of controllers that measure the flow of gas or liquid through the supply lines.
As an example, a mixture including TEOS as a silicon source may be used with gas mixing system 93 in a deposition process for forming a silicon oxide film. The TEOS is a liquid source that may be vaporized by conventional boiler-type or bubbler-type hot boxes. However, a liquid injection system is preferred as it provides greater control of the volume of reactant liquid introduced into the gas mixing system. The liquid is typically injected as a fine spray or mist into the carrier gas flow before being delivered to a heated gas delivery line 85 to the gas mixing block and chamber. One or more sources, such as oxygen (O2), ozone (O3), NO or NO2 flow to the chamber through another gas delivery line 83, to be combined with the reactant gases from heated gas delivery line 85 near or in the chamber. Of course, it is recognized that other sources of dopants, silicon, and oxygen also may be used.
CVD deposition apparatus 400 comprises oxidizing gas source 416 and hydroxyl containing precursor source 417 in fluid communication with vacuum chamber 15 through gas mixing box 273. The oxidizing gas source 416 may contain oxygen (O2), ozone (O3), NO, NO2, and mixtures of these gases, among other oxidizing gases. The hydroxyl containing precursor source 417 may contain H2O, hydrogen peroxide (H2O2), and mixtures thereof, among other hydroxyl containing precursors. The hydroxyl containing precursors and oxidizing gases may be stored in sources 416 and 417 as liquids and/or gases.
Carrier gas source 410, silicon-containing gas source 411, first dopant gas (e.g., TEPO) source 412, and second dopant gas (e.g., TEB) source 413 are in fluid communication with vacuum chamber 15 through select valve 414 gas mixing system 93, and gas mixing box 273. Select valve 414 is selectively operable to shunt silicon- and dopant-containing gases such as TEOS vapor through divert line 402 to foreline 408 of chamber exhaust system 88, thereby circumventing vacuum chamber 15 entirely. Select valve 414 and divert line 402 allow the flow of silicon-containing gas to stabilize prior to its being routed to the vacuum chamber to commence an oxide CVD step in accordance with an embodiment of the present invention.
As noted above, the systems and methods of the invention may also be implemented on plasma based chemical vapor deposition systems. For example, the present invention may be used with plasma systems like the one described in commonly assigned U.S. Pat. No. 6,734,155, titled “PLASMA PROCESSES FOR DEPOSITING LOW DIELECTRIC CONSTANT FILMS,” filed Aug. 27, 2002, and HDP-CVD systems like the one described in commonly-assigned U.S. Pat. No. 6,740,601, titled “HDP-CVD DEPOSITION PROCESSES FOR FILLING HIGH ASPECT RATIO GAPS,” filed May 11, 2001, the entire contents of both patents being hereby incorporated by reference for all purposes.
While the above is a complete description of specific embodiments of the present invention, various modifications, variations, and alternatives may be employed. Alternative embodiments of process recipes in accordance with the present invention could call for flowing the silicon-containing component of the process gas flow at a sufficiently high initial concentration to allow the process gases to be introduced directly into the chamber, without an initial flow diversion phase.
Moreover, other techniques for varying the parameters of deposition of an oxide layer could be employed in conjunction with the variation in concentration of the process gas flow components described so far. Examples of other possible parameters to be varied include but are not limited to the temperature of deposition, the pressure of deposition, and the flow rate of processing gases containing dopants such as arsenic (As), boron (B), and phosphorous (P).
Having described several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the invention. Additionally, a number of well known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.
Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed within the invention. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included in the invention.
As used herein and in the appended claims, the singular forms “a”, “and”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a process” includes a plurality of such processes and reference to “the electrode” includes reference to one or more electrodes and equivalents thereof known to those skilled in the art, and so forth.
Also, the words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, or groups.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US2861009||19 Feb 1954||18 Nov 1958||Exchange Bank Chemical Corn||Process of decorating a sheet|
|US2889704||4 Nov 1954||9 Jun 1959||Sheffield Corp||Amplifying apparatus for gauging product characteristics|
|US3046177||31 Mar 1958||24 Jul 1962||C H Masland And Sons||Method of applying polyurethane foam to the backs of carpets and equipment therefor|
|US3048888||5 Feb 1960||14 Aug 1962||Nylonge Corp||Apparatus for the production of artificial sponge|
|US3109703||6 Feb 1961||5 Nov 1963||Nylonge Corp||Method for the production of cleaning devices|
|US3142714||20 Dec 1961||28 Jul 1964||Nylonge Corp||Method for the production of cleaning devices|
|US3166454||15 Jan 1962||19 Jan 1965||Union Carbide Corp||Method for producing corrugated polyurethane foam panels|
|US4297162||17 Oct 1979||27 Oct 1981||Texas Instruments Incorporated||Plasma etching using improved electrode|
|US4590042||24 Dec 1984||20 May 1986||Tegal Corporation||Plasma reactor having slotted manifold|
|US4732761||21 Mar 1986||22 Mar 1988||Nippon Telegraph And Telephone Corporation||Thin film forming apparatus and method|
|US4792378||15 Dec 1987||20 Dec 1988||Texas Instruments Incorporated||Gas dispersion disk for use in plasma enhanced chemical vapor deposition reactor|
|US4854263||14 Aug 1987||8 Aug 1989||Applied Materials, Inc.||Inlet manifold and methods for increasing gas dissociation and for PECVD of dielectric films|
|US4892753||26 Oct 1988||9 Jan 1990||Applied Materials, Inc.||Process for PECVD of silicon oxide using TEOS decomposition|
|US4962063||10 Mar 1989||9 Oct 1990||Applied Materials, Inc.||Multistep planarized chemical vapor deposition process with the use of low melting inorganic material for flowing while depositing|
|US4989541||14 Feb 1990||5 Feb 1991||Nobuo Mikoshiba||Thin film forming apparatus|
|US5051380||14 Dec 1990||24 Sep 1991||Semiconductor Process Laboratory Co., Ltd.||Process for producing semiconductor device|
|US5089442||20 Sep 1990||18 Feb 1992||At&T Bell Laboratories||Silicon dioxide deposition method using a magnetic field and both sputter deposition and plasma-enhanced cvd|
|US5124014||11 Apr 1991||23 Jun 1992||At&T Bell Laboratories||Method of forming oxide layers by bias ECR plasma deposition|
|US5204288||4 Mar 1992||20 Apr 1993||Applied Materials, Inc.||Method for planarizing an integrated circuit structure using low melting inorganic material|
|US5244841||10 Dec 1991||14 Sep 1993||Applied Materials, Inc.||Method for planarizing an integrated circuit structure using low melting inorganic material and flowing while depositing|
|US5264040||17 Nov 1992||23 Nov 1993||Sematech, Inc.||Rapid-switching rotating disk reactor|
|US5314845||2 Feb 1990||24 May 1994||Applied Materials, Inc.||Two step process for forming void-free oxide layer over stepped surface of semiconductor wafer|
|US5356722||10 Jun 1992||18 Oct 1994||Applied Materials, Inc.||Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity|
|US5439524||5 Apr 1993||8 Aug 1995||Vlsi Technology, Inc.||Plasma processing apparatus|
|US5474955||25 Apr 1995||12 Dec 1995||Micron Technology, Inc.||Method for optimizing thermal budgets in fabricating semconductors|
|US5492858||20 Apr 1994||20 Feb 1996||Digital Equipment Corporation||Shallow trench isolation process for high aspect ratio trenches|
|US5567267||19 Nov 1993||22 Oct 1996||Tokyo Electron Limited||Method of controlling temperature of susceptor|
|US5589002||24 Mar 1994||31 Dec 1996||Applied Materials, Inc.||Gas distribution plate for semiconductor wafer processing apparatus with means for inhibiting arcing|
|US5597439||26 Oct 1994||28 Jan 1997||Applied Materials, Inc.||Process gas inlet and distribution passages|
|US5660472||19 Dec 1994||26 Aug 1997||Applied Materials, Inc.||Method and apparatus for measuring substrate temperatures|
|US5710079 *||24 May 1996||20 Jan 1998||Lsi Logic Corporation||Method and apparatus for forming dielectric films|
|US5728223||10 Jun 1996||17 Mar 1998||Ebara Corporation||Reactant gas ejector head and thin-film vapor deposition apparatus|
|US5728260||29 May 1996||17 Mar 1998||Applied Materials, Inc.||Low volume gas distribution assembly and method for a chemical downstream etch tool|
|US5789322||5 Jun 1997||4 Aug 1998||Applied Materials, Inc.||Low volume gas distribution assembly for a chemical downstream etch tool|
|US5807785||2 Aug 1996||15 Sep 1998||Applied Materials, Inc.||Low dielectric constant silicon dioxide sandwich layer|
|US5812403||13 Nov 1996||22 Sep 1998||Applied Materials, Inc.||Methods and apparatus for cleaning surfaces in a substrate processing system|
|US5840631||27 Nov 1995||24 Nov 1998||Nec Corporation||Method of manufacturing semiconductor device|
|US5939763||5 Sep 1996||17 Aug 1999||Advanced Micro Devices, Inc.||Ultrathin oxynitride structure and process for VLSI applications|
|US5965203 *||6 May 1996||12 Oct 1999||Siemens Aktiengesellschaft||Method for depositing a silicon oxide layer|
|US5976261||11 Jul 1996||2 Nov 1999||Cvc Products, Inc.||Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment|
|US5980686||15 Apr 1998||9 Nov 1999||Applied Komatsu Technology, Inc.||System and method for gas distribution in a dry etch process|
|US6001175||4 Mar 1996||14 Dec 1999||Maruyama; Mitsuhiro||Crystal producing method and apparatus therefor|
|US6013584||19 Feb 1997||11 Jan 2000||Applied Materials, Inc.||Methods and apparatus for forming HDP-CVD PSG film used for advanced pre-metal dielectric layer applications|
|US6024799||11 Jul 1997||15 Feb 2000||Applied Materials, Inc.||Chemical vapor deposition manifold|
|US6043136||24 Jul 1998||28 Mar 2000||Taiwan Semiconductor Manufacturing Company, Ltd.||Trench filling method employing oxygen densified gap filling CVD silicon oxide layer|
|US6050506||13 Feb 1998||18 Apr 2000||Applied Materials, Inc.||Pattern of apertures in a showerhead for chemical vapor deposition|
|US6079353||28 Mar 1998||27 Jun 2000||Quester Technology, Inc.||Chamber for reducing contamination during chemical vapor deposition|
|US6079356||13 Feb 1998||27 Jun 2000||Applied Materials, Inc.||Reactor optimized for chemical vapor deposition of titanium|
|US6099647||30 Sep 1999||8 Aug 2000||Applied Materials, Inc.||Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films|
|US6106663||19 Jun 1998||22 Aug 2000||Lam Research Corporation||Semiconductor process chamber electrode|
|US6106678||22 May 1998||22 Aug 2000||Lam Research Corporation||Method of high density plasma CVD gap-filling|
|US6133160||11 Jun 1998||17 Oct 2000||Semiconductor Process Laboratory Co., Ltd.||Method for reforming undercoating surface and method for production of semiconductor device|
|US6136685||3 Jun 1997||24 Oct 2000||Applied Materials, Inc.||High deposition rate recipe for low dielectric constant films|
|US6140242||1 Dec 1998||31 Oct 2000||Samsung Electronics Co., Ltd.||Method of forming an isolation trench in a semiconductor device including annealing at an increased temperature|
|US6149987 *||7 Apr 1998||21 Nov 2000||Applied Materials, Inc.||Method for depositing low dielectric constant oxide films|
|US6150209||23 Apr 1999||21 Nov 2000||Taiwan Semiconductor Manufacturing Company||Leakage current reduction of a tantalum oxide layer via a nitrous oxide high density annealing procedure|
|US6150286||3 Jan 2000||21 Nov 2000||Advanced Micro Devices, Inc.||Method of making an ultra thin silicon nitride film|
|US6156114||6 Feb 1997||5 Dec 2000||E. I. Du Pont De Nemours And Company||Treatment of deagglomerated particles with plasma-activated species|
|US6171901||16 Jul 1999||9 Jan 2001||National Semiconductor Corporation||Process for forming silicided capacitor utilizing oxidation barrier layer|
|US6184155||19 Jun 2000||6 Feb 2001||Taiwan Semiconductor Manufacturing Company||Method for forming a ultra-thin gate insulator layer|
|US6190973||18 Dec 1998||20 Feb 2001||Zilog Inc.||Method of fabricating a high quality thin oxide|
|US6194038||20 Mar 1998||27 Feb 2001||Applied Materials, Inc.||Method for deposition of a conformal layer on a substrate|
|US6197705||18 Mar 1999||6 Mar 2001||Chartered Semiconductor Manufacturing Ltd.||Method of silicon oxide and silicon glass films deposition|
|US6203863||27 Nov 1998||20 Mar 2001||United Microelectronics Corp.||Method of gap filling|
|US6206972||8 Jul 1999||27 Mar 2001||Genus, Inc.||Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes|
|US6217658||9 Jun 1999||17 Apr 2001||Applied Materials, Inc.||Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing|
|US6218268||5 May 1998||17 Apr 2001||Applied Materials, Inc.||Two-step borophosphosilicate glass deposition process and related devices and apparatus|
|US6232580||14 Apr 2000||15 May 2001||Micron Technology, Inc.||Apparatus for uniform gas and radiant heat dispersion for solid state fabrication processes|
|US6236105||24 Sep 1997||22 May 2001||Nec Corporation||Semiconductor device with improved planarity achieved through interlayer films with varying ozone concentrations|
|US6239002||19 Oct 1998||29 May 2001||Taiwan Semiconductor Manufacturing Company||Thermal oxidizing method for forming with attenuated surface sensitivity ozone-teos silicon oxide dielectric layer upon a thermally oxidized silicon substrate layer|
|US6245192||30 Jun 1999||12 Jun 2001||Lam Research Corporation||Gas distribution apparatus for semiconductor processing|
|US6245689||8 Sep 1998||12 Jun 2001||Advanced Micro Devices, Inc.||Process for reliable ultrathin oxynitride formation|
|US6248397 *||3 Nov 1998||19 Jun 2001||Pilkington Plc||Method of depositing a silicon oxide coating on glass and the coated glass|
|US6248628||25 Oct 1999||19 Jun 2001||Advanced Micro Devices||Method of fabricating an ONO dielectric by nitridation for MNOS memory cells|
|US6267074||24 Feb 1998||31 Jul 2001||Foi Corporation||Plasma treatment systems|
|US6276072||15 Sep 1999||21 Aug 2001||Applied Materials, Inc.||Method and apparatus for heating and cooling substrates|
|US6302965||15 Aug 2000||16 Oct 2001||Applied Materials, Inc.||Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces|
|US6319849||11 Jan 1999||20 Nov 2001||Mitsubishi Denki Kabushiki Kaisha||Semiconductor device and a process for forming a protective insulating layer thereof|
|US6331494||30 Dec 1999||18 Dec 2001||Novellus Systems, Inc.||Deposition of low dielectric constant thin film without use of an oxidizer|
|US6337256||16 Nov 1999||8 Jan 2002||Hyundai Electronics Industries Co., Ltd.||Impurity ion segregation precluding layer, fabrication method thereof, isolation structure for semiconductor device using the impurity ion segregation precluding layer and fabricating method thereof|
|US6340435||9 Jun 1999||22 Jan 2002||Applied Materials, Inc.||Integrated low K dielectrics and etch stops|
|US6348421||16 Jun 1999||19 Feb 2002||National Semiconductor Corporation||Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD|
|US6436193||24 Mar 2000||20 Aug 2002||Tokyo Electron Limited||Gas processing apparatus baffle member, and gas processing method|
|US6444039||7 Mar 2000||3 Sep 2002||Simplus Systems Corporation||Three-dimensional showerhead apparatus|
|US6454860||27 Oct 1998||24 Sep 2002||Applied Materials, Inc.||Deposition reactor having vaporizing, mixing and cleaning capabilities|
|US6468853||18 Aug 2000||22 Oct 2002||Chartered Semiconductor Manufacturing Ltd.||Method of fabricating a shallow trench isolation structure with reduced local oxide recess near corner|
|US6475284||20 Sep 1999||5 Nov 2002||Moore Epitaxial, Inc.||Gas dispersion head|
|US6479405||5 Nov 2001||12 Nov 2002||Samsung Electronics Co., Ltd.||Method of forming silicon oxide layer in semiconductor manufacturing process using spin-on glass composition and isolation method using the same method|
|US6489254||29 Aug 2000||3 Dec 2002||Atmel Corporation||Method of forming pre-metal dielectric film on a semiconductor substrate including first layer of undoped oxide of high ozone:TEOS volume ratio and second layer of low ozone doped BPSG|
|US6500771||31 Jan 2000||31 Dec 2002||Chartered Semiconductor Manufacturing Ltd.||Method of high-density plasma boron-containing silicate glass film deposition|
|US6512264||14 Jun 2000||28 Jan 2003||Advanced Micro Devices, Inc.||Flash memory having pre-interpoly dielectric treatment layer and method of forming|
|US6527910||8 Dec 2000||4 Mar 2003||Applied Materials, Inc.||Staggered in-situ deposition and etching of a dielectric layer for HDP-CVD|
|US6541367||18 Jan 2000||1 Apr 2003||Applied Materials, Inc.||Very low dielectric constant plasma-enhanced CVD films|
|US6541401||31 Jul 2000||1 Apr 2003||Applied Materials, Inc.||Wafer pretreatment to decrease rate of silicon dioxide deposition on silicon nitride compared to silicon substrate|
|US6565661||4 Jun 1999||20 May 2003||Simplus Systems Corporation||High flow conductance and high thermal conductance showerhead system and method|
|US6583069||13 Dec 1999||24 Jun 2003||Chartered Semiconductor Manufacturing Co., Ltd.||Method of silicon oxide and silicon glass films deposition|
|US6586886||19 Dec 2001||1 Jul 2003||Applied Materials, Inc.||Gas distribution plate electrode for a plasma reactor|
|US6602792||2 Aug 2001||5 Aug 2003||Macronix International Co., Ltd.||Method for reducing stress of sidewall oxide layer of shallow trench isolation|
|US6617259||8 May 2002||9 Sep 2003||Samsung Electronics Co., Ltd.||Method for fabricating semiconductor device and forming interlayer dielectric film using high-density plasma|
|US6624091||7 May 2001||23 Sep 2003||Applied Materials, Inc.||Methods of forming gap fill and layers formed thereby|
|US6677712||20 May 2003||13 Jan 2004||Applied Materials Inc.||Gas distribution plate electrode for a plasma receptor|
|US6713127||28 Dec 2001||30 Mar 2004||Applied Materials, Inc.||Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD|
|US6733955||10 May 1999||11 May 2004||Applied Materials Inc.||Methods for forming self-planarized dielectric layer for shallow trench isolation|
|US20060046427 *||26 Aug 2005||2 Mar 2006||Applied Materials, Inc., A Delaware Corporation||Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials|
|1||Applied Materials Website Printout: "SACVD (Sub-Atmospheric Chemical Vapor Deposition)" from www.appliedmaterials.com/products/sacvd.html, printed Jun. 20, 2003.|
|2||Baker, F. et al. "STI TEOS Densification for Furnaces and RTP Tools" 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 1999, pp. 394-399.|
|3||Definitions of "furnace", Merriam-Webster Online, 2006.|
|4||Fujino et al., "Dependence of Deposition Characteristics on Base Materials in TEOS and Ozone CVD at Atmospheric Pressure," J. Electrochem. Soc., 138(2):550-554 (1991).|
|5||Kuo, Yue, "Etch Mechanism In The Low Refractive Index Silicon Nitride Plasma-Enhanced Chemical Vapor Deposition Process," Appl. Phys. Lett., vol. 63, No. 2, pp. 144-146, Jul. 12, 1993.|
|6||Kwok et al., "Surface Related Phenomena in Integrated PECVD / Ozone-TEOS SACVD Process for Sub-Half Micron Gap Fill: Electrostatic Effects," J. Electrochem. Soc., 141(8):2172-2177 (1994).|
|7||Lassig, Stephan E. et al., "Intermetal Dielectric Deposition By Electron Cyclotron Resonance Chemical Vapor Deposition (ECR CVD)," pp. cover and 1-21, no date.|
|8||Li, Junling et al., "Modeling Studies Of The Mechanisms In Biased ECR CVD," 3 pages, no date.|
|9||Machida, Katsuyuki et al., "SiO2 Planarization Technology With Biasing And Electron Cyclotron Resonance Plasma Deposition For Submicron Interconnections," J Vac. Sc. Technol. B, vol. 4, No. 4, pp. 818-821, Jul./Aug. 1986.|
|10||Romanelli, Alex, Semiconductor International website article: AMD Details 45nm Technology, at www.e-insite.net/semiconductor/; Jun. 12, 2003.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US7943531||22 Oct 2007||17 May 2011||Applied Materials, Inc.||Methods for forming a silicon oxide layer over a substrate|
|US7989365||18 Aug 2009||2 Aug 2011||Applied Materials, Inc.||Remote plasma source seasoning|
|US7994019 *||27 Sep 2010||9 Aug 2011||Applied Materials, Inc.||Silicon-ozone CVD with reduced pattern loading using incubation period deposition|
|US8012887||22 Jun 2009||6 Sep 2011||Applied Materials, Inc.||Precursor addition to silicon oxide CVD for improved low temperature gapfill|
|US8232176||20 Jun 2007||31 Jul 2012||Applied Materials, Inc.||Dielectric deposition and etch back processes for bottom up gapfill|
|US8236708||13 Aug 2010||7 Aug 2012||Applied Materials, Inc.||Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor|
|US8242031||27 Sep 2010||14 Aug 2012||Applied Materials, Inc.||High quality silicon oxide films by remote plasma CVD from disilane precursors|
|US8304351||20 Dec 2010||6 Nov 2012||Applied Materials, Inc.||In-situ ozone cure for radical-component CVD|
|US8318584||3 Jun 2011||27 Nov 2012||Applied Materials, Inc.||Oxide-rich liner layer for flowable CVD gapfill|
|US8329262||2 Sep 2010||11 Dec 2012||Applied Materials, Inc.||Dielectric film formation using inert gas excitation|
|US8357435||15 Sep 2008||22 Jan 2013||Applied Materials, Inc.||Flowable dielectric equipment and processes|
|US8445078||20 Sep 2011||21 May 2013||Applied Materials, Inc.||Low temperature silicon oxide conversion|
|US8449942||28 Sep 2010||28 May 2013||Applied Materials, Inc.||Methods of curing non-carbon flowable CVD films|
|US8450191||19 Apr 2011||28 May 2013||Applied Materials, Inc.||Polysilicon films by HDP-CVD|
|US8466073||17 Apr 2012||18 Jun 2013||Applied Materials, Inc.||Capping layer for reduced outgassing|
|US8476142||21 Mar 2011||2 Jul 2013||Applied Materials, Inc.||Preferential dielectric gapfill|
|US8524004||15 Jun 2011||3 Sep 2013||Applied Materials, Inc.||Loadlock batch ozone cure|
|US8551891||20 Jun 2012||8 Oct 2013||Applied Materials, Inc.||Remote plasma burn-in|
|US8563445||10 Feb 2011||22 Oct 2013||Applied Materials, Inc.||Conformal layers by radical-component CVD|
|US8584965 *||18 Apr 2007||19 Nov 2013||Kemstream||Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device|
|US8617989||19 Apr 2012||31 Dec 2013||Applied Materials, Inc.||Liner property improvement|
|US8629067||16 Dec 2010||14 Jan 2014||Applied Materials, Inc.||Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio|
|US8647992||21 Dec 2010||11 Feb 2014||Applied Materials, Inc.||Flowable dielectric using oxide liner|
|US8664127||14 Jul 2011||4 Mar 2014||Applied Materials, Inc.||Two silicon-containing precursors for gapfill enhancing dielectric liner|
|US8716154||3 Oct 2011||6 May 2014||Applied Materials, Inc.||Reduced pattern loading using silicon oxide multi-layers|
|US8741788||21 Jul 2010||3 Jun 2014||Applied Materials, Inc.||Formation of silicon oxide using non-carbon flowable CVD processes|
|US8781308 *||22 Sep 2011||15 Jul 2014||Sokudo Co., Ltd.||Apparatus for and method of heat-treating film formed on surface of substrate|
|US8889566||5 Nov 2012||18 Nov 2014||Applied Materials, Inc.||Low cost flowable dielectric films|
|US8980382||15 Jul 2010||17 Mar 2015||Applied Materials, Inc.||Oxygen-doping for non-carbon radical-component CVD films|
|US9018108||15 Mar 2013||28 Apr 2015||Applied Materials, Inc.||Low shrinkage dielectric films|
|US9285168||28 Sep 2011||15 Mar 2016||Applied Materials, Inc.||Module for ozone cure and post-cure moisture treatment|
|US9387447||11 Oct 2013||12 Jul 2016||Kemstream||Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device|
|US9404178||12 Jun 2012||2 Aug 2016||Applied Materials, Inc.||Surface treatment and deposition for reduced outgassing|
|US9412581||16 Jul 2014||9 Aug 2016||Applied Materials, Inc.||Low-K dielectric gapfill by flowable deposition|
|US20080268608 *||6 Dec 2007||30 Oct 2008||Hynix Semiconductor Inc.||Method of fabricating a flash memory device|
|US20090078791 *||18 Apr 2007||26 Mar 2009||Kemstream||Device for Introducing, Injecting or Spraying a Mixture of a Carrier Gas and Liquid Compounds and Method for Implementing Said Device|
|US20100159711 *||22 Jun 2009||24 Jun 2010||Applied Materials, Inc.||Precursor addition to silicon oxide cvd for improved low temperature gapfill|
|US20110223774 *||13 Aug 2010||15 Sep 2011||Applied Materials, Inc.||REDUCED PATTERN LOADING USING BIS(DIETHYLAMINO)SILANE (C8H22N2Si) AS SILICON PRECURSOR|
|US20120213501 *||22 Sep 2011||23 Aug 2012||Masahiko Harumoto||Apparatus for and method of heat-treating film formed on surface of substrate|
|U.S. Classification||438/787, 257/E21.279, 438/788, 438/789, 438/790, 257/E21.273|
|International Classification||C23C16/455, H01L21/31, C23C16/52, C23C16/44, C23C16/40|
|Cooperative Classification||C23C16/52, C23C16/45512, C23C16/401, C23C16/45523|
|European Classification||C23C16/52, C23C16/40B, C23C16/455F, C23C16/455B|
|1 Mar 2005||AS||Assignment|
Owner name: APPLIED MATERIALS, INC., CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:INGLE, NITIN K.;WONG, SHAN;XIA, XINYUN;AND OTHERS;REEL/FRAME:015811/0201;SIGNING DATES FROM 20050128 TO 20050201
|14 Feb 2012||CC||Certificate of correction|
|24 Apr 2012||FPAY||Fee payment|
Year of fee payment: 4
|8 Jul 2016||REMI||Maintenance fee reminder mailed|
|25 Nov 2016||LAPS||Lapse for failure to pay maintenance fees|
|17 Jan 2017||FP||Expired due to failure to pay maintenance fee|
Effective date: 20161125