US7114237B2 - Manufacturing method for precise multi-pole magnetic components - Google Patents

Manufacturing method for precise multi-pole magnetic components Download PDF

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US7114237B2
US7114237B2 US10/718,626 US71862603A US7114237B2 US 7114237 B2 US7114237 B2 US 7114237B2 US 71862603 A US71862603 A US 71862603A US 7114237 B2 US7114237 B2 US 7114237B2
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circuit
magnetic
layer
pole
manufacturing
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US20050046535A1 (en
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Kuo-Chi Chiu
Der-Ray Huang
Han-Ping Shieh
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Industrial Technology Research Institute ITRI
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/80Manufacturing details of magnetic targets for magnetic encoders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/165Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed inductors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126Assembling bases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128Assembling formed circuit to base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49131Assembling to base an electrical component, e.g., capacitor, etc. by utilizing optical sighting device
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • Y10T29/49135Assembling to base an electrical component, e.g., capacitor, etc. with component orienting and shaping, e.g., cutting or bending, etc.

Definitions

  • the invention relates to a precise multi-pole magnetic component and the manufacturing method thereof.
  • the invention pertains to a precise multi-pole magnetic component that formed by using the printed circuit board (PCB) technology and the corresponding manufacturing method.
  • PCB printed circuit board
  • Magnetic encoders are widely used to detect the rotation speed, angle and position in many precise control systems. They are quite rigid with simple structures, offering reliable operation in adverse environments where high vibration, temperature, moisture or dust may exist. Since the motor size is getting smaller, a strict condition is required for magnetic encoders with high resolution. Therefore, conventional magnetic encoders with wide magnetic pole pitch are not enough for using in precise control systems anymore.
  • a precise magnetic encoder consists of a magnetic reading device and a multi-pole magnetic component with fine magnetic pole pitch. Its resolution is determined by the size of the magnetic pole pitch. The dimension of a monopole means the magnetic pole pitch. A smaller of the magnetic pole pitch provides a higher resolution in detection.
  • the signals in the multi-pole magnetic component can be detected using a magnetic reading device like Hall element or MR (magneto-resistance) element.
  • the position and speed of a moving object can be obtained from detecting the rotation angle and direction of magnetic encoder.
  • the multi-pole magnetic component with fine magnetic pole pitch in the magnetic encoder is achieved by magnetization.
  • An unmagnetized magnetic component is placed onto the surface of a magnetizing head.
  • the magnetizing coil is wound on the magnetizing head and the winding pattern is depended upon the design of the magnetizing head. Connecting the terminals of magnetizing coil to a magnetization machine which can provide the magnetizing current. After releasing a magnetizing current, the strong magnetic field is induced to magnetize the magnetic component.
  • the multi-pole magnetizing head is obtained from the line-cutting process and the smallest magnetic pole pitch can be acquired about 1 mm by magnetization using the magnetizing head.
  • the magnetic pole pitch of less than 1 mm is very difficult to achieve because it is limited by the precision of the machining tools and the bending angle of the magnetizing coils.
  • the surface of the magnetizing head is divided into eight equal parts (16, 16′, 18, 18′, 20, 20′. . . 30 and 30′) by line-cutting process and the magnetizing coil ( 34 ) is wound into the groove as shown in FIG. 1 .
  • the grooves are located between any two parts.
  • An alternate multi-pole magnetic field distribution is formed with an appropriate arrangement of the magnetizing coil.
  • Both terminals ( 36 and 38 ) of the magnetizing coil are connected to a magnetization machine which can provide the magnetizing current.
  • a strong magnetic field is induced instantaneously after the magnetization machine releases a magnetizing current.
  • the magnetic component ( 40 ) is magnetized with a multi-pole structure.
  • the distance between the magnetic poles is limited by the machining technique and the minimum is about 1 mm.
  • the insulating layer of the magnetizing coil can not withstand the stress and then breaks. It is caused by the large bending angle of the magnetizing coil being used in a magnetizing head with fine magnetic pole pitch. Therefore, a short circuit is happened on the bases ( 12 and 12 ′) of the magnetizing head. Since the bases are made of a ferromagnetic material with high permeability, the magnetizing coil and head are exploded frequently during the magnetization. Thus this way is very dangerous.
  • FIG. 2 The disclosed in the proceeding of Electrical Electronics Insulation Conference and Electrical Manufacturing & Coil Winding Conference (Chicago '93 EEIC/ICWA Exposition, P.237–242, 1993) is shown in FIG. 2 .
  • the magnetizing coils ( 200 ) are wound on the magnetizing head ( 201 ).
  • the leakage of the magnetic filed from the magnetizing head is used to write the magnetic pole pairs (i.e. N and S pole) onto the surface of the magnetic component ( 202 ).
  • the magnetic pole pitch of less than 1 mm is accomplished successfully.
  • the magnetic component Before magnetization, the magnetic component is mounted on a base which is usually supported and rotated by a high precision spindle motor. Then, the magnetic component is magnetized with magnetic pole pairs intermittently controlling by using a magnetization machine.
  • the precise position control of the spindle motor is highly required; otherwise, an asymmetric magnetic file distribution will happen in the multi-pole magnetic component after magnetization and it is not good for subsequent processing of signals.
  • the dimension of the magnetic component must be controlled uniformly. During the magnetization, the magnetic component will often collide with the magnetizing head if its radial run-out is too large and thus result in damages both of them. Moreover, the leaking gap in the magnetizing head and the air gap between the magnetizing head and the magnetic component have to be properly controlled.
  • the waveform of the magnetizing current from the magnetization machine is required to modify in order to magnetize the magnetic component with different magnetic properties using the single-pulse magnetizing technique. Because the waveform of the magnetizing current highly depends upon the magnetic material property and this can be achieved only through a precise magnetization machine. In addition to controlling the tiny radial run-out and the material homogeneity on the magnetic component, it has to be mounted on a spindle motor under a precision position control. The desired magnetic pole pitch can be accomplished by tuning an appropriate leaking gap and the magnetizing air gap during the magnetization. Despite the fact that this technique can narrow the magnetic pole pitch to around 200 ⁇ m, the process is very complicated and difficult. The high precision machining, the techniques for making the precise magnetizing head and the magnetization machine are essential, and therefore the single-pulse magnetizing technique is costly and not economical at all.
  • the invention provides a precise multi-pole magnetic component and the corresponding manufacturing method.
  • an appropriate circuit pattern is designed and formed on the printed circuit board (PCB).
  • An alternate and regular magnetic pole distribution is induced after a current is supplied to the circuit and then a multi-pole magnetic component is formed.
  • the fine magnetic pole pitch in the multi-pole magnetic component is obtained from making the high-density wire circuit on the substrate using PCB manufacturing technology.
  • the invention designs a special circuit pattern and then it is formed on the PCB. After supplying a current to the circuit, the magnetic field is generated and its distribution is determined by the circuit pattern. Using this property and designing a special circuit pattern possessing with a meander structure, let the current flow in opposite directions on the circuit to generate an alternate magnetic pole distribution. At present, the minimum wire width on the circuit can be achieved is about 75 ⁇ m using PCB manufacturing technology. Thus the multi-pole magnetic component with fine magnetic pole pitch can be accomplished by forming the special circuit pattern on the PCB.
  • This disclosed precise multi-pole magnetic component can have both single-layer and multi-layer structures.
  • the single-layer structure contains a substrate and a circuit built on the surface of the substrate.
  • the multi-layer structure has more than one layer of circuit built on the surface of the substrate.
  • An insulating layer is inserted between any two layers of circuits. All circuits on different layers are connected into a single circuit by drilling holes and filling them with soldering tin.
  • the current input and output (I/O) terminals are reserved for connecting to a current source. After supplying a current, the multi-layer structure can enhance the magnetic field and it is good for signal detection.
  • the above-mentioned precise multi-pole magnetic component can be accomplished using the PCB manufacturing technology.
  • the size of the magnetic pole pitch is closely related to the manufacturing technology and the minimum value of 150 ⁇ m can be easily achieved at present.
  • the PCB manufacturing technology greatly improves the resolution of magnetic encoders for high precision requirements.
  • the multi-pole magnetic field distribution of the disclosed precise multi-pole magnetic component is not formed by actually magnetizing a magnetic component. It is generated from supplying a current into the circuit on the PCB.
  • One can readily obtain a desired precise multi-pole magnetic field distribution by designing an appropriate circuit pattern on a substrate using PCB manufacturing technology.
  • FIG. 1 is the embodiment of the magnetizing head in the prior art
  • FIG. 2 is the embodiment of the single-pulse magnetizing method in the prior art
  • FIG. 3 is the first embodiment of the invention
  • FIG. 4 is a schematic view of the magnetic field distribution in the first embodiment
  • FIG. 5 is a schematic view of the circuit structure in the second embodiment of the invention.
  • FIG. 6 is a schematic view of the magnetic field distribution in the second embodiment
  • FIG. 7 shows the measured result of a partial magnetic field distribution produced by the disclosed linear 9-pole magnetic component
  • FIG. 8 shows the manufacturing procedure of the first embodiment of the invention.
  • the invention fabricates a special circuit pattern on the surface of a substrate.
  • the multi-pole magnetic field distribution is generated after a current supplying to the circuit for producing the precise multi-pole magnetic component.
  • Different magnetic pole pitches can be achieved easily by modifying the circuit patterns on PCB.
  • the multi-layer structure of circuits is formed using PCB manufacturing process repeatedly. It can enhance the strength of the magnetic field and this is good for the signal detection.
  • a special circuit pattern which has a meander structure for providing the current to flow in opposite directions, is designed and formed on the PCB.
  • the magnetic field is induced in different directions among the circuits to generate an alternate magnetic pole distribution. Then the multi-pole magnetic component is accomplished.
  • FIG. 3 shows the first embodiment of the invention.
  • a circuit pattern which is a linear type extending along one-dimensional direction and has a meander structure for providing the current to flow in opposite directions. Therefore, magnetic fields pointing in different directions can be induced among the circuit, thereby producing an alternate magnetic pole distribution.
  • FIG. 4 is the schematic view of the magnetic field distribution in the first embodiment and the magnetic field has an alternate magnetic pole distribution extending along one-dimensional direction.
  • the magnetic flux density produced by the circuit pattern on the substrate can be detected using a Hall sensor, or a magneto-resistance (MR) sensor/giant magneto-resistance (GMR) sensor.
  • MR magneto-resistance
  • GMR giant magneto-resistance
  • the magnetic field distribution can be easily extended from the one-dimensional structure to a two-dimensional one.
  • An annular meander structure which provides the current to flow in opposite directions for producing the magnetic field in different directions among the circuit, can be obtained from modifying the circuit pattern on the PCB.
  • FIG. 5 this is the schematic view of circuit structure in the second embodiment of the invention.
  • An annular meander circuit pattern ( 110 ) is formed on the surface of a substrate ( 100 ).
  • the current input terminal ( 111 ) and output terminal ( 112 ) are connected to a current source. Once a current is supplied, an alternate magnetic field distribution is induced among the circuit ( 110 ).
  • the magnetic field distribution is an annular type in radial direction as shown in FIG. 6 .
  • FIG. 7 It is the measured results of a partial magnetic filed distribution of the disclosed linear 9-pole magnetic component.
  • Three consecutive magnetic poles of the magnetic flux density distributions are measured at a detection spacing of 200 ⁇ m and 300 ⁇ m above the surface by using a precise Hall probe with a high sensitivity of 0.1 gauss.
  • the width of the circuit wires on the substrate is designed and formed with 200 ⁇ m and the gap between two adjacent circuit wires is also 200 ⁇ m. Therefore, the size of the magnetic pole pitch is 400 ⁇ m.
  • the measured magnetic field distribution is not only uniform but also the obvious boundaries existing between the magnetic poles.
  • the signals of the magnetic field distributions are enough to be as the signals for detection.
  • FIG. 8 shows the manufacturing procedure of the disclosed first embodiment of the invention.
  • a substrate is prepared (step 10 ).
  • the first layer of the circuit pattern is formed on the surface of the substrate using the PCB manufacturing technology (step 20 ).
  • An insulating layer is then added on the circuit layer using the PCB manufacturing technology (step 30 ).
  • the second layer of the circuit pattern is formed on the insulating layer using the PCB manufacturing technology (step 40 ). Steps 30 and 40 are repeated until the desired circuit layers are completed. All circuits on different layers have to be connected into a single circuit by drilling holes and filling them with soldering tin.
  • Each layer of the circuit has a meander structure for providing a current to flow in opposite directions and then an alternate magnetic pole distribution is generated.
  • the magnetic field distribution of each layer of the circuit on the substrate is arranged appropriately to stack with an enhancing configuration.

Abstract

A method is proposed to manufacture a precise multi-pole magnetic component for using in magnetic encoders. A special layout of the circuit pattern is designed and formed on a printed circuit board (PCB). Alternate and regular magnetic field is induced according to Ampere's law after a current flowing through the circuit on the PCB. The multi-pole magnetic component with fine magnetic pole pitch is achieved by forming the high-density circuit patterns on a substrate using the PCB technology.

Description

This Nonprovisional application claims priority under 35 U.S.C. § 119 (a) on patent application Ser. No(s). 092124245 filed in TAIWAN on Sep. 2, 2003, the entire contents of which are hereby incorporated by reference.
BACKGROUND OF THE INVENTION
1. Field of Invention
The invention relates to a precise multi-pole magnetic component and the manufacturing method thereof. In particular, the invention pertains to a precise multi-pole magnetic component that formed by using the printed circuit board (PCB) technology and the corresponding manufacturing method.
2. Related Art
Magnetic encoders are widely used to detect the rotation speed, angle and position in many precise control systems. They are quite rigid with simple structures, offering reliable operation in adverse environments where high vibration, temperature, moisture or dust may exist. Since the motor size is getting smaller, a strict condition is required for magnetic encoders with high resolution. Therefore, conventional magnetic encoders with wide magnetic pole pitch are not enough for using in precise control systems anymore. A precise magnetic encoder consists of a magnetic reading device and a multi-pole magnetic component with fine magnetic pole pitch. Its resolution is determined by the size of the magnetic pole pitch. The dimension of a monopole means the magnetic pole pitch. A smaller of the magnetic pole pitch provides a higher resolution in detection.
The signals in the multi-pole magnetic component can be detected using a magnetic reading device like Hall element or MR (magneto-resistance) element. The position and speed of a moving object can be obtained from detecting the rotation angle and direction of magnetic encoder. Generally, the multi-pole magnetic component with fine magnetic pole pitch in the magnetic encoder is achieved by magnetization. An unmagnetized magnetic component is placed onto the surface of a magnetizing head. The magnetizing coil is wound on the magnetizing head and the winding pattern is depended upon the design of the magnetizing head. Connecting the terminals of magnetizing coil to a magnetization machine which can provide the magnetizing current. After releasing a magnetizing current, the strong magnetic field is induced to magnetize the magnetic component. Therefore, a precise magnetizing head and a magnetization machine are required for narrowing the magnetic pole pitch of the multi-pole magnetic component. Traditionally, the multi-pole magnetizing head is obtained from the line-cutting process and the smallest magnetic pole pitch can be acquired about 1 mm by magnetization using the magnetizing head. The magnetic pole pitch of less than 1 mm is very difficult to achieve because it is limited by the precision of the machining tools and the bending angle of the magnetizing coils.
As described in the U.S. Pat. No. 4,920,326, the surface of the magnetizing head is divided into eight equal parts (16, 16′, 18, 18′, 20, 20′. . . 30 and 30′) by line-cutting process and the magnetizing coil (34) is wound into the groove as shown in FIG. 1. The grooves are located between any two parts. An alternate multi-pole magnetic field distribution is formed with an appropriate arrangement of the magnetizing coil. Both terminals (36 and 38) of the magnetizing coil are connected to a magnetization machine which can provide the magnetizing current. A strong magnetic field is induced instantaneously after the magnetization machine releases a magnetizing current. Then the magnetic component (40) is magnetized with a multi-pole structure. It is seen that the distance between the magnetic poles is limited by the machining technique and the minimum is about 1 mm. Besides, the insulating layer of the magnetizing coil can not withstand the stress and then breaks. It is caused by the large bending angle of the magnetizing coil being used in a magnetizing head with fine magnetic pole pitch. Therefore, a short circuit is happened on the bases (12 and 12′) of the magnetizing head. Since the bases are made of a ferromagnetic material with high permeability, the magnetizing coil and head are exploded frequently during the magnetization. Thus this way is very dangerous.
To overcome the limitation of 1 mm in the magnetic pole pitch, a new magnetization method is introduced using the single-pulse magnetizing technique like the magnetic recording technology. The disclosed in the proceeding of Electrical Electronics Insulation Conference and Electrical Manufacturing & Coil Winding Conference (Chicago '93 EEIC/ICWA Exposition, P.237–242, 1993) is shown in FIG. 2. The magnetizing coils (200) are wound on the magnetizing head (201). The leakage of the magnetic filed from the magnetizing head is used to write the magnetic pole pairs (i.e. N and S pole) onto the surface of the magnetic component (202). The magnetic pole pitch of less than 1 mm is accomplished successfully. Before magnetization, the magnetic component is mounted on a base which is usually supported and rotated by a high precision spindle motor. Then, the magnetic component is magnetized with magnetic pole pairs intermittently controlling by using a magnetization machine. The precise position control of the spindle motor is highly required; otherwise, an asymmetric magnetic file distribution will happen in the multi-pole magnetic component after magnetization and it is not good for subsequent processing of signals. In addition, the dimension of the magnetic component must be controlled uniformly. During the magnetization, the magnetic component will often collide with the magnetizing head if its radial run-out is too large and thus result in damages both of them. Moreover, the leaking gap in the magnetizing head and the air gap between the magnetizing head and the magnetic component have to be properly controlled. These are the key factors to affect the dimension of the magnetic pole pitch in magnetization. As the magnetic pole pitch on the magnetic component gets smaller, the leaking gap in the magnetizing head has to be narrowed as well. The air gap between the magnetizing head and the magnetic component must be appropriately tuned to obtain the desired magnetic pole pitch. Therefore, the manufacturing of a multi-pole magnetic component can be accomplished only under a precise controlling in magnetization and it is difficulty.
Besides, the waveform of the magnetizing current from the magnetization machine is required to modify in order to magnetize the magnetic component with different magnetic properties using the single-pulse magnetizing technique. Because the waveform of the magnetizing current highly depends upon the magnetic material property and this can be achieved only through a precise magnetization machine. In addition to controlling the tiny radial run-out and the material homogeneity on the magnetic component, it has to be mounted on a spindle motor under a precision position control. The desired magnetic pole pitch can be accomplished by tuning an appropriate leaking gap and the magnetizing air gap during the magnetization. Despite the fact that this technique can narrow the magnetic pole pitch to around 200 μm, the process is very complicated and difficult. The high precision machining, the techniques for making the precise magnetizing head and the magnetization machine are essential, and therefore the single-pulse magnetizing technique is costly and not economical at all.
SUMMARY OF THE INVENTION
In view of the foregoing problems in the prior art, the invention provides a precise multi-pole magnetic component and the corresponding manufacturing method. Using the electromagnetic principles, an appropriate circuit pattern is designed and formed on the printed circuit board (PCB). An alternate and regular magnetic pole distribution is induced after a current is supplied to the circuit and then a multi-pole magnetic component is formed. The fine magnetic pole pitch in the multi-pole magnetic component is obtained from making the high-density wire circuit on the substrate using PCB manufacturing technology.
According to electromagnetism, supplying a long straight wire with a current will induce an annular magnetic field around the wire. The magnetic flux density is proportional to the current input, but inversely proportional to the distance. The invention designs a special circuit pattern and then it is formed on the PCB. After supplying a current to the circuit, the magnetic field is generated and its distribution is determined by the circuit pattern. Using this property and designing a special circuit pattern possessing with a meander structure, let the current flow in opposite directions on the circuit to generate an alternate magnetic pole distribution. At present, the minimum wire width on the circuit can be achieved is about 75 μm using PCB manufacturing technology. Thus the multi-pole magnetic component with fine magnetic pole pitch can be accomplished by forming the special circuit pattern on the PCB.
This disclosed precise multi-pole magnetic component can have both single-layer and multi-layer structures. The single-layer structure contains a substrate and a circuit built on the surface of the substrate. The multi-layer structure has more than one layer of circuit built on the surface of the substrate. An insulating layer is inserted between any two layers of circuits. All circuits on different layers are connected into a single circuit by drilling holes and filling them with soldering tin. On the top circuit layer, the current input and output (I/O) terminals are reserved for connecting to a current source. After supplying a current, the multi-layer structure can enhance the magnetic field and it is good for signal detection.
The above-mentioned precise multi-pole magnetic component can be accomplished using the PCB manufacturing technology. The size of the magnetic pole pitch is closely related to the manufacturing technology and the minimum value of 150 μm can be easily achieved at present. The PCB manufacturing technology greatly improves the resolution of magnetic encoders for high precision requirements.
We give a list of comparison among the conventional magnetization technology, the single-pulse magnetization technology, and the PCB manufacturing technology in Table 1.
TABLE 1
Basic Magneti- Mag- Minimum
Requirements zation netizing Precision Pole
Technology Machine Head Machining Pitch Price
Conventional Yes Yes Yes  ~1 mm High
Magnetization
Single-Pulse Yes Yes Yes ~200 μm Very High
Magnetization
PCB No No No ~150 μm Cheap
Manufacturing
Technology
To obtain a precise multi-pole magnetic component for being used in magnetic encoders. The precision machining, the magnetizing head and magnetization machine are necessary in the prior art for narrowing the pitch size to improve the resolution of magnetic encoders. Otherwise, it is impossible to do the job and the manufacturing cost is thus very high. However, if one uses the disclosed PCB manufacturing technology to make the precise multi-pole magnetic component with fine magnetic pole pitch, neither the precision machining nor the uses of magnetizing head and magnetization machine are required. The invention is not only simple but also completely feasible. PCB manufacturing technology is convenient for mass production at a lower cost.
The multi-pole magnetic field distribution of the disclosed precise multi-pole magnetic component is not formed by actually magnetizing a magnetic component. It is generated from supplying a current into the circuit on the PCB. One can readily obtain a desired precise multi-pole magnetic field distribution by designing an appropriate circuit pattern on a substrate using PCB manufacturing technology.
Further scope of the applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS
The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings, which are given by way of illustration only, and thus are not limitative of the present invention, and wherein:
FIG. 1 is the embodiment of the magnetizing head in the prior art;
FIG. 2 is the embodiment of the single-pulse magnetizing method in the prior art;
FIG. 3 is the first embodiment of the invention;
FIG. 4 is a schematic view of the magnetic field distribution in the first embodiment;
FIG. 5 is a schematic view of the circuit structure in the second embodiment of the invention;
FIG. 6 is a schematic view of the magnetic field distribution in the second embodiment;
FIG. 7 shows the measured result of a partial magnetic field distribution produced by the disclosed linear 9-pole magnetic component; and
FIG. 8 shows the manufacturing procedure of the first embodiment of the invention.
DETAILED DESCRIPTION OF THE INVENTION
The invention fabricates a special circuit pattern on the surface of a substrate. The multi-pole magnetic field distribution is generated after a current supplying to the circuit for producing the precise multi-pole magnetic component. Different magnetic pole pitches can be achieved easily by modifying the circuit patterns on PCB. The multi-layer structure of circuits is formed using PCB manufacturing process repeatedly. It can enhance the strength of the magnetic field and this is good for the signal detection. According to the invention, a special circuit pattern, which has a meander structure for providing the current to flow in opposite directions, is designed and formed on the PCB. Thus, the magnetic field is induced in different directions among the circuits to generate an alternate magnetic pole distribution. Then the multi-pole magnetic component is accomplished.
FIG. 3 shows the first embodiment of the invention. As shown in the photo, on the surface of the PCB has a circuit pattern, which is a linear type extending along one-dimensional direction and has a meander structure for providing the current to flow in opposite directions. Therefore, magnetic fields pointing in different directions can be induced among the circuit, thereby producing an alternate magnetic pole distribution. FIG. 4 is the schematic view of the magnetic field distribution in the first embodiment and the magnetic field has an alternate magnetic pole distribution extending along one-dimensional direction. The magnetic flux density produced by the circuit pattern on the substrate can be detected using a Hall sensor, or a magneto-resistance (MR) sensor/giant magneto-resistance (GMR) sensor.
The magnetic field distribution can be easily extended from the one-dimensional structure to a two-dimensional one. An annular meander structure, which provides the current to flow in opposite directions for producing the magnetic field in different directions among the circuit, can be obtained from modifying the circuit pattern on the PCB. As shown in FIG. 5, this is the schematic view of circuit structure in the second embodiment of the invention. An annular meander circuit pattern (110) is formed on the surface of a substrate (100). The current input terminal (111) and output terminal (112) are connected to a current source. Once a current is supplied, an alternate magnetic field distribution is induced among the circuit (110). The magnetic field distribution is an annular type in radial direction as shown in FIG. 6.
To prove that the magnetic field produced by the circuit with a tiny wire width can be effectively detected and please refer to FIG. 7. It is the measured results of a partial magnetic filed distribution of the disclosed linear 9-pole magnetic component. Three consecutive magnetic poles of the magnetic flux density distributions are measured at a detection spacing of 200 μm and 300 μm above the surface by using a precise Hall probe with a high sensitivity of 0.1 gauss. The width of the circuit wires on the substrate is designed and formed with 200 μm and the gap between two adjacent circuit wires is also 200 μm. Therefore, the size of the magnetic pole pitch is 400 μm. After supplying 1A current, the measured magnetic field distribution is not only uniform but also the obvious boundaries existing between the magnetic poles. The signals of the magnetic field distributions are enough to be as the signals for detection.
The precise multi-pole magnetic component made by using the PCB manufacturing technology can also have double-layer or even multi-layer structures to enhance the strength of the magnetic fields among the circuits. FIG. 8 shows the manufacturing procedure of the disclosed first embodiment of the invention. First, a substrate is prepared (step 10). The first layer of the circuit pattern is formed on the surface of the substrate using the PCB manufacturing technology (step 20). An insulating layer is then added on the circuit layer using the PCB manufacturing technology (step 30). The second layer of the circuit pattern is formed on the insulating layer using the PCB manufacturing technology (step 40). Steps 30 and 40 are repeated until the desired circuit layers are completed. All circuits on different layers have to be connected into a single circuit by drilling holes and filling them with soldering tin. Only the current input and output (I/O) terminals on the top circuit layer are reserved for connecting to a current source. Each layer of the circuit has a meander structure for providing a current to flow in opposite directions and then an alternate magnetic pole distribution is generated. The magnetic field distribution of each layer of the circuit on the substrate is arranged appropriately to stack with an enhancing configuration.
Certain variations would be apparent to those skilled in the art, which variations are considered within the spirit and scope of the claimed invention.

Claims (6)

1. A manufacturing method for precise multi-pole magnetic components, comprising the steps of:
providing a substrate having at least one surface; and
forming a plurality of circuit layers having circuits formed thereon on the surface of the substrate using the PCB manufacturing technology, wherein a top layer of the plurality of circuit layers includes a current input terminal and an current output terminal;
wherein each of the circuit layers is separated from another by an insulating layer; the circuits on the circuit layers are connected into a single circuit by drilling holes filled with soldering tin; the current input and output terminals on the top layer are reserved for connecting to a current source; each of the circuit layer has a meander structure having a linear type extending along one-dimensional direction for providing a current to flow in opposite directions to produce an alternate magnetic pole distribution such that the magnetic field distribution of each of the circuit layer is arranged by way of enhancing configuration.
2. The manufacturing method of claim 1, wherein the width of the circuit on each of the circuit layer is between 75 μm to 2500 μm.
3. The manufacturing method of claim 1, wherein the gap between two adjacent circuits on each of the circuit layer is between 75 μm to 2500 μm.
4. A manufacturing method for precise multi-pole magnetic components, comprising the steps of:
providing a substrate having at least one surface; and
forming a plurality of circuit layers having circuits formed thereon on the surface of the substrate using the PCB manufacturing technology ,wherein a top layer of the plurality of circuit layers includes a current input terminal and an current output terminal;
wherein each of the circuit layers is separated from another by an insulating layer; the circuits on the circuit layers are connected into a single circuit by drilling holes filled with soldering tin; the current input and output terminals on the top layer are reserved for connecting to a current source; each of the circuit layer has a meander structure having an annular pattern for providing a current to flow in opposite directions to produce an alternate magnetic pole distribution such that the magnetic field distribution of each of the circuit layer is arranged by way of enhancing configuration.
5. The manufacturing method of claim 4, wherein the width of the circuit on each of the circuit layer is between 75 μm to 2500 μm.
6. The manufacturing method of claim 4, wherein the gap between two adjacent circuits on each of the circuit layer is between 75 μm to 2500 μm.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060038646A1 (en) * 2003-09-02 2006-02-23 Industrial Technology Research Institute Precise multi-pole magnetic component and manufacturing method thereof
US20080068007A1 (en) * 2006-09-19 2008-03-20 Hiroyuki Hoshiya Magnetic encoder apparatus
US20100035785A1 (en) * 1997-01-09 2010-02-11 Advanced Technology Materials Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7352270B1 (en) 2006-10-27 2008-04-01 Itt Manufacturing Enterprises, Inc. Printed circuit board with magnetic assembly
US9870861B2 (en) 2015-09-21 2018-01-16 Apple Inc. Multiple step shifted-magnetizing method to improve performance of multi-pole array magnet
CN108925038A (en) * 2018-07-25 2018-11-30 深圳市华星光电技术有限公司 Inductance, circuit board and inductance measurement method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920326A (en) 1989-01-26 1990-04-24 Eastman Kodak Company Method of magnetizing high energy rare earth alloy magnets
US5949321A (en) * 1996-08-05 1999-09-07 International Power Devices, Inc. Planar transformer
US6150915A (en) * 1997-12-18 2000-11-21 National University Of Ireland, Cork Magnetic components and their production
US6831544B2 (en) * 2000-02-01 2004-12-14 Hewlett-Packard Development Company, L.P. Apparatus and method for PCB winding planar magnetic devices
US6834426B1 (en) * 2000-07-25 2004-12-28 International Business Machines Corporation Method of fabricating a laminate circuit structure
US6884945B2 (en) * 2000-04-11 2005-04-26 Lg Electronics Inc. Multi-layer printed circuit board and a BGA semiconductor package using the multi-layer printed circuit board
US6902660B2 (en) * 2002-08-21 2005-06-07 Korea Advanced Institute Of Science And Technology Method of manufacturing printed circuit board and multi-layered PCB

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2722617A (en) * 1951-11-28 1955-11-01 Hartford Nat Bank & Trust Comp Magnetic circuits and devices
US3893059A (en) * 1974-03-13 1975-07-01 Veeder Industries Inc Pulse generator with asymmetrical multi-pole magnet
JPS5445712A (en) * 1977-09-19 1979-04-11 Hitachi Ltd Motor
US4271370A (en) * 1979-09-21 1981-06-02 Litton Systems, Inc. Double air gap printed circuit rotor
US4644643A (en) * 1984-02-22 1987-02-24 Kangyo Denkikiki Kabushiki Kaisha Method of electrically interconnecting a laminated printed circuit by use of a compressed, solder-plated connector pin
US4621231A (en) * 1984-06-19 1986-11-04 Westinghouse Electric Corp. Toroidal sensor coil and method
US4613843A (en) * 1984-10-22 1986-09-23 Ford Motor Company Planar coil magnetic transducer
GB8725467D0 (en) * 1987-10-30 1987-12-02 Honeywell Control Syst Making current sensor
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
US5021736A (en) * 1989-09-19 1991-06-04 Texas Instruments Incorporated Speed/position sensor calibration method with angular adjustment of a magnetoresistive element
KR960006848B1 (en) * 1990-05-31 1996-05-23 가부시끼가이샤 도시바 Plane magnetic elements
DE59308911D1 (en) * 1992-06-03 1998-10-01 Landis & Gyr Tech Innovat Coin detector
US5525941A (en) * 1993-04-01 1996-06-11 General Electric Company Magnetic and electromagnetic circuit components having embedded magnetic material in a high density interconnect structure
US5648693A (en) * 1994-12-02 1997-07-15 Teac Corporation Disk driving motor with low noise lead wire arrangement for frequency generator
US5889403A (en) * 1995-03-31 1999-03-30 Canon Denshi Kabushiki Kaisha Magnetic detecting element utilizing magnetic impedance effect
US5849355A (en) * 1996-09-18 1998-12-15 Alliedsignal Inc. Electroless copper plating
JP3600415B2 (en) * 1997-07-15 2004-12-15 株式会社東芝 Distributed constant element
JPH11265831A (en) * 1998-03-18 1999-09-28 Fuji Elelctrochem Co Ltd Sheet transformer
JPH11335833A (en) * 1998-05-21 1999-12-07 Victor Co Of Japan Ltd Substrate heater
KR100713319B1 (en) * 1999-05-07 2007-05-04 후루카와 덴키 고교 가부시키가이샤 Wiring Method and wiring device
JP2001116814A (en) * 1999-10-22 2001-04-27 Canon Electronics Inc Magnetic impedance element
US6373404B1 (en) * 1999-10-25 2002-04-16 Chin-Wen Chou Encoding sensor switch
US6420953B1 (en) * 2000-05-19 2002-07-16 Pulse Engineering. Inc. Multi-layer, multi-functioning printed circuit board
JP2001345212A (en) * 2000-05-31 2001-12-14 Tdk Corp Laminated electronic part
TW540284B (en) * 2001-09-05 2003-07-01 Zeon Corp Process for manufacturing multi-layer circuit substrate
US6970064B2 (en) * 2001-09-05 2005-11-29 Zhang Minghao Mary Center-tap transformers in integrated circuits
JP4055609B2 (en) * 2003-03-03 2008-03-05 株式会社デンソー Magnetic sensor manufacturing method
TWI227502B (en) * 2003-09-02 2005-02-01 Ind Tech Res Inst Precise multi-pole magnetic components and manufacturing method thereof
EP1513168B1 (en) * 2003-09-02 2017-03-08 Albert Maurer Method and apparatus for magnetising a magnet system
US7078895B1 (en) * 2003-09-18 2006-07-18 Tdk Corporation Eddy-current probe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920326A (en) 1989-01-26 1990-04-24 Eastman Kodak Company Method of magnetizing high energy rare earth alloy magnets
US5949321A (en) * 1996-08-05 1999-09-07 International Power Devices, Inc. Planar transformer
US6150915A (en) * 1997-12-18 2000-11-21 National University Of Ireland, Cork Magnetic components and their production
US6831544B2 (en) * 2000-02-01 2004-12-14 Hewlett-Packard Development Company, L.P. Apparatus and method for PCB winding planar magnetic devices
US6884945B2 (en) * 2000-04-11 2005-04-26 Lg Electronics Inc. Multi-layer printed circuit board and a BGA semiconductor package using the multi-layer printed circuit board
US6834426B1 (en) * 2000-07-25 2004-12-28 International Business Machines Corporation Method of fabricating a laminate circuit structure
US6902660B2 (en) * 2002-08-21 2005-06-07 Korea Advanced Institute Of Science And Technology Method of manufacturing printed circuit board and multi-layered PCB

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Yin-Jao Luo et al., Chicago '93 EEIC/ICWA Exposition; Multi-pole Magnetization of High Resolution Magnetic Encoder; pp. 237-242 (1993).

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100035785A1 (en) * 1997-01-09 2010-02-11 Advanced Technology Materials Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
US20060038646A1 (en) * 2003-09-02 2006-02-23 Industrial Technology Research Institute Precise multi-pole magnetic component and manufacturing method thereof
US7656259B2 (en) * 2003-09-02 2010-02-02 Industrial Technology Research Institute Precise multi-pole magnetic component
US7884690B2 (en) 2003-09-02 2011-02-08 Industrial Technology Research Institute Precise multi-pole magnetic component
US20080068007A1 (en) * 2006-09-19 2008-03-20 Hiroyuki Hoshiya Magnetic encoder apparatus
US7456758B2 (en) * 2006-09-19 2008-11-25 Hitachi Metals, Ltd. Magnetic encoder apparatus

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