US6759318B1 - Translation pad flip chip (TPFC) method for improving micro bump pitch IC substrate structure and manufacturing process - Google Patents
Translation pad flip chip (TPFC) method for improving micro bump pitch IC substrate structure and manufacturing process Download PDFInfo
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- US6759318B1 US6759318B1 US10/414,597 US41459703A US6759318B1 US 6759318 B1 US6759318 B1 US 6759318B1 US 41459703 A US41459703 A US 41459703A US 6759318 B1 US6759318 B1 US 6759318B1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/243—Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09436—Pads or lands on permanent coating which covers the other conductors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09481—Via in pad; Pad over filled via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09536—Buried plated through-holes, i.e. plated through-holes formed in a core before lamination
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0315—Oxidising metal
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
- H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3473—Plating of solder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/385—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by conversion of the surface of the metal, e.g. by oxidation, whether or not followed by reaction or removal of the converted layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/427—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in metal-clad substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
Definitions
- the invention relates to a method used in Translation Pad Flip Chip (TPFC) IC substrate manufacturing process, and more particularly to a method used in manufacturing micro bump pitch IC substrates.
- TPFC Translation Pad Flip Chip
- the conventional structure of IC substrates is a 4 to 10 layers of multi-layer printed circuit board, which is made of ceramics or organic materials.
- the conductive circuits between the layers are micro vias, mechanical or laser drilled, and wired to form bump pads for connecting IC bumps.
- Solder resist is used to define bump pad lands, and solders are applied by stencil printing. Conventionally, there are two ways to define the bump pad lands. The first is use solder resist to define the lands, as shown in FIG. 1, and the other is called metal defined lands, as shown in FIG. 2 .
- the line between the bump pads will decrease the area of bump pad lands, which may cause solder paste unable to enter and fill solder mask opening where the grain size of the solder 102 is too large to be applied into the bump pad 101 .
- This is problematic as the bonding strength is not sufficient to hold the IC chips, due to the lack of sufficient solder applied, as shown in FIG. 1 .
- the solder resist 201 , 202 covers less than 75 um in width, the solder resist 202 usually will not stick and is prone to peel off, as shown in FIG. 2 .
- conventional methods are unable to manufacture micro bump pitch substrates.
- the present invention provides a method to improve micro bump pitch IC substrates manufacturing process. It uses a dielectric layer to replace the conventional solder resist, then uses CCD high precision alignment laser drill to open up the defined bump pad lands, fills them with via plating filled metal accompanied by etching to enlarge the bump pads, and finally surface finishing the bump pads with various materials, such as solder, Ni/Au, or organic coating. This can simultaneously solve the problems of insufficient strength of bump pads, limitation of printing technology and being unable to apply the solder in the conventional technologies. Furthermore, the present invention can also translate the bump pads, passive component pads (e.g., capacitor pads), fiducial marks to the surface level, and avoid burying the pads in the solder resist that occurs in the conventional methods.
- passive component pads e.g., capacitor pads
- the substrate structure also improves the underfilling step following the IC connection in the packaging process, and solves the micro bump pitch IC packaging problem.
- the present invention applies small bump pad at original design bump layer, and provides more circuit routability and higher packaging density. Further more, it can reduce layer count, get higher yield rate, and provide a total solution to the next generation high density IC design.
- FIG. 1 shows the conventional method of solder resist defined bump pad lands
- FIG. 2 shows the conventional method of metal defined bump pad lands
- FIGS. 3A to 3 V show a method of manufacturing micro bump pitch IC substrates, where the present invention is applicable.
- FIGS. 3A to 3 V show the complete method of manufacturing Translation Pad for Micro bump pad pitch IC substrates, with feature steps of the present invention in FIGS. 3P to 3 V.
- FIGS. 3A to 3 C show a process of providing a substrate.
- FIG. 3A shows a core 301 which may be a laminate made of Bismaleimide Triazine (BT), other organic material, or even ceramics.
- a first metal layer 302 which may be made of copper (Cu), is made on said substrate 301 .
- FIG. 3B shows a plurality of through holes 303 drilled on said substrate 301 .
- FIG. 3C shows that a first metal plated layer 304 , which may be made of copper (Cu), is formed on said first metal layer 302 and said through holes 303 .
- FIGS. 3D to 3 E show a step of forming an inner layer circuit.
- FIG. 3D uses a dry film 305 by image transfer pattern as the inner layer circuit.
- a part of said first metal plated layer 304 and a part of said first metal layer 302 are etched to form traces 306 .
- the remained portions of said first metal plated layer 304 and said first metal layer 302 are left as the inner layer circuit 306 .
- FIG. 3F shows a step of black-oxidizing the inner layer circuit.
- a black oxide inner layer circuit 307 is formed in said inner layer circuit 306 by oxidizing the inner layer circuit 306 .
- FIGS. 3G to 3 H show a step of forming a dielectric layer and a second metal layer.
- FIG. 3G shows using the dielectric material in the traces and the through holes of the substrate to form a dielectric layer 308 .
- the dielectric layer 308 is made of Bismaleimide Triazing (BT) or other dielectric material.
- a metal foil 309 which may be made of copper (Cu), is laminated on said dielectric layer 308 .
- FIG. 3G shows the metal foil thickness of said foil 309 is reduced, by chemical micro etching, to form the second metal layer 309 a.
- FIGS. 3I to 3 L show a step of forming vias in the dielectric layer.
- FIG. 3I shows the dry film 310 used to form laser conformal mask 311 , as shown in FIG. 3J.
- a plurality of micro vias 312 are drilled as shown in FIG. 3K.
- a second metal plated layer 313 is formed in said micro vias 312 and said second metal plated layer 313 , as shown in FIG. 3 L.
- FIGS. 3M to 3 O show a step of forming a circuit layer.
- FIG. 3M shows an image of photo resist 315 is used as a mask.
- Plating filled copper 314 is applied in said dielectric circuit second metal plated layer 313 and said vias 312 according to the area exposed by said photo resist mask 315 .
- a Ni/Au or Sn/Pb 316 is plated to act as an etching resist as FIG. 3N shows.
- FIG. 3M shows an image of photo resist 315 is used as a mask.
- Plating filled copper 314 is applied in said dielectric circuit second metal plated layer 313 and said vias 312 according to the area exposed by said photo resist mask 315 .
- a Ni/Au or Sn/Pb 316 is plated to act as an etching resist as FIG. 3N shows.
- FIG. 3N shows an etching resist
- 3O shows the stripping of said photo resist mask 315 , using said Ni/Au or Sn/Pb 316 as an etching resist to etch on said second metal layer 309 a wherein the remained portion is the circuit layer 317 , including bump pads 318 a , 318 b , and 318 c.
- FIG. 3P shows a step of forming a layer of dielectric.
- a layer of dielectric 319 is formed on the bump pad side of the substrate to replace the solder resist used in conventional methods.
- a solder resist layer 320 is formed on the ball pad side of the substrate.
- FIGS. 3Q to 3 R show a step of forming a plurality of micro vias drilled by CCD alignment then laser ablation.
- Use CCD alignment laser to ablate a plurality of micro vias 321 on said dielectric layer 319 , so that the bump pads, passive component pads and fiducial marks are open to the surface level.
- use the conventional exposure printing method to form solder resist ball pads 322 on said solder resist 320 , and electro-plate a thin metal conductive layer, as shown in FIG. 3 Q.
- FIG. 3R shows the plating filled vias step.
- Use plating resist 323 to protect said ball pads from electro-plating, and the exposed bump pads are applied with a layer of plating filled metal 324 to fill up said micro vias.
- FIGS. 3S-3U shows a step enlarging the bump pads. Remove the electro-plating resist 323 protecting said ball pads to expose the ball pads. Apply photo plating resist 325 on bump pad side, and use the image as a mask. The exposed areas (such as passive component pads, fiducial marks) and exposed ball pads are applied with a layer of Ni/Au or Sn/Pb 326 , as shown in FIG. 3 S.
- FIG. 3T shows the stripping of the photo plating resist 325 , applying photo etching resist 327 . Use the image as a mask to cover the areas of the enlarged bump pads on said bump pad side metal layer 324 .
- FIG. 3T shows the stripping of the photo plating resist 325 , applying photo etching resist 327 .
- Ni/Au or Sn/Pb combined with etching resist mask 327 , is used to form a layer of Ni/Au or Sn/Pb on passive component pads 328 , fiducial marks 329 , and flexible adjust bump pads 330 to match wafer side bump size on said dielectric layer 319 and ball pads 331 in the etching process.
- FIG. 3V shows the step of applying eutectic solder paste, or the environmentally friendly lead-free solder onto said enlarged bump pads, and flattening said bump pads 332 .
- the step of using plating filled vias solves the problem of insufficient bonding strength due to the under-sized bump pads.
- the final surface finishing e.g., electro-plating Ni/Au, Sn/Pb Paste, lead-free material or organic solderability coating
- the final surface finishing can provide more IC connecting methods, such as, IC Gold Stub/Tin Stub connection, and gold wiring. If solder paste, or lead-free solder paste, is applied to make the Sn/Pb solder bump, and the bumps are flattened, the flip chip packaging methods can also be used.
- the present invention can also be used to improve the routing density in conventional flip chip packaging methods.
- conventional methods require at least the bump pads with the size of 150 um in diameter.
- the size of the bump pads can be reduced to below 80 um.
- the saved 70 um can be used to increase the routing density, and further reduce the substrate's 6- to 10-layer structure to a 4- to 8-layer structure. This will further reduce the manufacturing cost.
Abstract
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US10/414,597 US6759318B1 (en) | 2003-04-15 | 2003-04-15 | Translation pad flip chip (TPFC) method for improving micro bump pitch IC substrate structure and manufacturing process |
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US10/414,597 US6759318B1 (en) | 2003-04-15 | 2003-04-15 | Translation pad flip chip (TPFC) method for improving micro bump pitch IC substrate structure and manufacturing process |
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Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040012097A1 (en) * | 2002-07-17 | 2004-01-22 | Chien-Wei Chang | Structure and method for fine pitch flip chip substrate |
US20050106854A1 (en) * | 2003-11-18 | 2005-05-19 | Hajime Saiki | Process for manufacturing a wiring substrate |
US7102371B1 (en) * | 2004-05-19 | 2006-09-05 | National Semiconductor Corporation | Bilevel probe |
US20070111557A1 (en) * | 2004-09-29 | 2007-05-17 | Masahiro Higashiguchi | Printed circuit board, a printed circuit assembly and electronic apparatus |
US20070218676A1 (en) * | 2006-03-17 | 2007-09-20 | Advanced Semiconductor Engineering Inc. | Method for forming metal bumps |
US20070271782A1 (en) * | 2004-07-01 | 2007-11-29 | Christian Block | Electrical Multilayer Component with Solder Contact |
US20080014738A1 (en) * | 2006-07-10 | 2008-01-17 | Stats Chippac Ltd. | Integrated circuit mount system with solder mask pad |
US20080283998A1 (en) * | 2007-05-18 | 2008-11-20 | Haengcheol Choi | Electronic system with expansion feature |
US20090038838A1 (en) * | 2007-08-08 | 2009-02-12 | Phoenix Precision Technology Corporation | Circuit board and method for fabricating the same |
US20090042382A1 (en) * | 2007-08-06 | 2009-02-12 | Barry Thomas Hawkey | Device packages |
US20090146316A1 (en) * | 2007-12-05 | 2009-06-11 | International Business Machines Corporation | Flip-chip assembly with organic chip carrier having mushroom-plated solder resist opening |
WO2011023556A1 (en) * | 2009-08-24 | 2011-03-03 | Epcos Ag | Carrier device, arrangement comprising such a carrier device, and method for patterning a layer stack comprising at least one ceramic layer |
US20130200509A1 (en) * | 2012-02-02 | 2013-08-08 | Samsung Electronics Co., Ltd. | Semiconductor package |
US8698306B2 (en) | 2010-05-20 | 2014-04-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Substrate contact opening |
CN103871907A (en) * | 2014-03-26 | 2014-06-18 | 华进半导体封装先导技术研发中心有限公司 | Manufacturing technology of ultra-thin substrate |
CN112492755A (en) * | 2020-11-02 | 2021-03-12 | 江西旭昇电子有限公司 | Method for manufacturing micro solder mask definition bonding pad of lead-free tin-spraying plate |
USRE49045E1 (en) * | 2011-10-31 | 2022-04-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package on package devices and methods of packaging semiconductor dies |
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Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040012097A1 (en) * | 2002-07-17 | 2004-01-22 | Chien-Wei Chang | Structure and method for fine pitch flip chip substrate |
US20050106854A1 (en) * | 2003-11-18 | 2005-05-19 | Hajime Saiki | Process for manufacturing a wiring substrate |
US7202156B2 (en) * | 2003-11-18 | 2007-04-10 | Ngk Spark Plug Co., Ltd. | Process for manufacturing a wiring substrate |
US7102371B1 (en) * | 2004-05-19 | 2006-09-05 | National Semiconductor Corporation | Bilevel probe |
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US20070111557A1 (en) * | 2004-09-29 | 2007-05-17 | Masahiro Higashiguchi | Printed circuit board, a printed circuit assembly and electronic apparatus |
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US20070218676A1 (en) * | 2006-03-17 | 2007-09-20 | Advanced Semiconductor Engineering Inc. | Method for forming metal bumps |
US20080014738A1 (en) * | 2006-07-10 | 2008-01-17 | Stats Chippac Ltd. | Integrated circuit mount system with solder mask pad |
US8124520B2 (en) | 2006-07-10 | 2012-02-28 | Stats Chippac Ltd. | Integrated circuit mount system with solder mask pad |
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