US6739132B2 - Thermal micro-actuator based on selective electrical excitation - Google Patents
Thermal micro-actuator based on selective electrical excitation Download PDFInfo
- Publication number
- US6739132B2 US6739132B2 US10/137,771 US13777102A US6739132B2 US 6739132 B2 US6739132 B2 US 6739132B2 US 13777102 A US13777102 A US 13777102A US 6739132 B2 US6739132 B2 US 6739132B2
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- US
- United States
- Prior art keywords
- substrate
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- distal end
- actuator
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime, expires
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/04—Electrothermal relays wherein the thermally-sensitive member is only heated directly
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01B—MACHINES OR ENGINES, IN GENERAL OR OF POSITIVE-DISPLACEMENT TYPE, e.g. STEAM ENGINES
- F01B29/00—Machines or engines with pertinent characteristics other than those provided for in preceding main groups
- F01B29/08—Reciprocating-piston machines or engines not otherwise provided for
- F01B29/10—Engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G1/00—Hot gas positive-displacement engine plants
- F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
- F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N10/00—Electric motors using thermal effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G2250/00—Special cycles or special engines
- F02G2250/31—Nano- or microengines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
Abstract
Description
Claims (26)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/137,771 US6739132B2 (en) | 2002-04-30 | 2002-04-30 | Thermal micro-actuator based on selective electrical excitation |
PCT/US2003/011876 WO2003093165A2 (en) | 2002-04-30 | 2003-04-17 | Thermal micro-actuator based on selective electrical excitation |
AU2003228562A AU2003228562A1 (en) | 2002-04-30 | 2003-04-17 | Thermal micro-actuator based on selective electrical excitation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/137,771 US6739132B2 (en) | 2002-04-30 | 2002-04-30 | Thermal micro-actuator based on selective electrical excitation |
Publications (2)
Publication Number | Publication Date |
---|---|
US20030200749A1 US20030200749A1 (en) | 2003-10-30 |
US6739132B2 true US6739132B2 (en) | 2004-05-25 |
Family
ID=29249758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/137,771 Expired - Lifetime US6739132B2 (en) | 2002-04-30 | 2002-04-30 | Thermal micro-actuator based on selective electrical excitation |
Country Status (3)
Country | Link |
---|---|
US (1) | US6739132B2 (en) |
AU (1) | AU2003228562A1 (en) |
WO (1) | WO2003093165A2 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050039453A1 (en) * | 1998-09-09 | 2005-02-24 | Kia Silverbrook | Micro-electromechanical actuator with control logic circuitry |
US20070201797A1 (en) * | 2006-02-28 | 2007-08-30 | Grzybowski Richard R | Glass-based micropositioning systems and methods |
US20080061913A1 (en) * | 2006-09-07 | 2008-03-13 | Innovative Micro Technology | Singly attached MEMS thermal device and method of manufacture |
WO2008033269A2 (en) * | 2006-09-11 | 2008-03-20 | Lucent Technologies Inc. | Micro-acutuator and locking switch |
US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
US20090040008A1 (en) * | 2007-08-10 | 2009-02-12 | Lucent Technologies Inc. | Thermal actuator for a mems-based relay switch |
US20110037809A1 (en) * | 1998-10-16 | 2011-02-17 | Silverbrook Research Pty Ltd | Nozzle assembly for an inkjet printhead |
WO2019108889A1 (en) * | 2017-12-02 | 2019-06-06 | Bellutech Llc | Sensing devices, sensors, and methods for monitoring environmental conditions |
US11011323B2 (en) | 2017-12-02 | 2021-05-18 | Bellutech Llc | Sensing devices, sensors, and methods for monitoring environmental conditions |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0610392D0 (en) * | 2006-05-25 | 2006-07-05 | Univ Durham | Electro-mechanical actuator and apparatus incorporating such device |
US10018238B2 (en) * | 2013-11-01 | 2018-07-10 | Sabanci University | Variable negative stiffness actuation |
CN109756147B (en) * | 2018-12-13 | 2020-03-31 | 西安交通大学 | Electric actuating inchworm bionic structure based on liquid crystal elastic polymer and manufacturing process |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4423401A (en) | 1982-07-21 | 1983-12-27 | Tektronix, Inc. | Thin-film electrothermal device |
US5343422A (en) | 1993-02-23 | 1994-08-30 | International Business Machines Corporation | Nonvolatile magnetoresistive storage device using spin valve effect |
US5347485A (en) | 1992-03-03 | 1994-09-13 | Mitsubishi Denki Kabushiki Kaisha | Magnetic thin film memory |
US5477482A (en) | 1993-10-01 | 1995-12-19 | The United States Of America As Represented By The Secretary Of The Navy | Ultra high density, non-volatile ferromagnetic random access memory |
US5541868A (en) | 1995-02-21 | 1996-07-30 | The United States Of America As Represented By The Secretary Of The Navy | Annular GMR-based memory element |
US5640343A (en) | 1996-03-18 | 1997-06-17 | International Business Machines Corporation | Magnetic memory array using magnetic tunnel junction devices in the memory cells |
US5650958A (en) | 1996-03-18 | 1997-07-22 | International Business Machines Corporation | Magnetic tunnel junctions with controlled magnetic response |
US5734605A (en) | 1996-09-10 | 1998-03-31 | Motorola, Inc. | Multi-layer magnetic tunneling junction memory cells |
US5909078A (en) | 1996-12-16 | 1999-06-01 | Mcnc | Thermal arched beam microelectromechanical actuators |
US5949707A (en) | 1996-09-06 | 1999-09-07 | Nonvolatile Electronics, Incorporated | Giant magnetoresistive effect memory cell |
US5955817A (en) | 1996-12-16 | 1999-09-21 | Mcnc | Thermal arched beam microelectromechanical switching array |
US5959376A (en) | 1998-09-10 | 1999-09-28 | Sandia Corporation | Microelectromechanical reciprocating-tooth indexing apparatus |
US5966322A (en) | 1996-09-06 | 1999-10-12 | Nonvolatile Electronics, Incorporated | Giant magnetoresistive effect memory cell |
US6021065A (en) | 1996-09-06 | 2000-02-01 | Nonvolatile Electronics Incorporated | Spin dependent tunneling memory |
US6067797A (en) | 1997-07-15 | 2000-05-30 | Silverbrook Research Pty, Ltd. | Thermal actuator |
US6124711A (en) | 1996-01-19 | 2000-09-26 | Fujitsu Limited | Magnetic sensor using tunnel resistance to detect an external magnetic field |
US6147900A (en) | 1997-11-06 | 2000-11-14 | Nonvolatile Electronics, Incorporated | Spin dependent tunneling memory |
US6211598B1 (en) | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
US20010010488A1 (en) | 1999-03-26 | 2001-08-02 | Minners R. Sjhon | Bistable micro-switch and method of manufacturing the same |
US6275411B1 (en) | 1993-07-23 | 2001-08-14 | Nonvolatile Electronics, Incorporated | Spin dependent tunneling memory |
US6275325B1 (en) | 2000-04-07 | 2001-08-14 | Microsoft Corporation | Thermally activated microelectromechanical systems actuator |
WO2002023574A1 (en) | 2000-09-12 | 2002-03-21 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US6438954B1 (en) * | 2001-04-27 | 2002-08-27 | 3M Innovative Properties Company | Multi-directional thermal actuator |
US6485273B1 (en) * | 2000-09-01 | 2002-11-26 | Mcnc | Distributed MEMS electrostatic pumping devices |
-
2002
- 2002-04-30 US US10/137,771 patent/US6739132B2/en not_active Expired - Lifetime
-
2003
- 2003-04-17 AU AU2003228562A patent/AU2003228562A1/en not_active Abandoned
- 2003-04-17 WO PCT/US2003/011876 patent/WO2003093165A2/en not_active Application Discontinuation
Patent Citations (28)
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US4423401A (en) | 1982-07-21 | 1983-12-27 | Tektronix, Inc. | Thin-film electrothermal device |
US5347485A (en) | 1992-03-03 | 1994-09-13 | Mitsubishi Denki Kabushiki Kaisha | Magnetic thin film memory |
US5343422A (en) | 1993-02-23 | 1994-08-30 | International Business Machines Corporation | Nonvolatile magnetoresistive storage device using spin valve effect |
US6275411B1 (en) | 1993-07-23 | 2001-08-14 | Nonvolatile Electronics, Incorporated | Spin dependent tunneling memory |
US5477482A (en) | 1993-10-01 | 1995-12-19 | The United States Of America As Represented By The Secretary Of The Navy | Ultra high density, non-volatile ferromagnetic random access memory |
US5541868A (en) | 1995-02-21 | 1996-07-30 | The United States Of America As Represented By The Secretary Of The Navy | Annular GMR-based memory element |
US6124711A (en) | 1996-01-19 | 2000-09-26 | Fujitsu Limited | Magnetic sensor using tunnel resistance to detect an external magnetic field |
US5650958A (en) | 1996-03-18 | 1997-07-22 | International Business Machines Corporation | Magnetic tunnel junctions with controlled magnetic response |
US5640343A (en) | 1996-03-18 | 1997-06-17 | International Business Machines Corporation | Magnetic memory array using magnetic tunnel junction devices in the memory cells |
US5949707A (en) | 1996-09-06 | 1999-09-07 | Nonvolatile Electronics, Incorporated | Giant magnetoresistive effect memory cell |
US6021065A (en) | 1996-09-06 | 2000-02-01 | Nonvolatile Electronics Incorporated | Spin dependent tunneling memory |
US5966322A (en) | 1996-09-06 | 1999-10-12 | Nonvolatile Electronics, Incorporated | Giant magnetoresistive effect memory cell |
US5734605A (en) | 1996-09-10 | 1998-03-31 | Motorola, Inc. | Multi-layer magnetic tunneling junction memory cells |
US5978257A (en) | 1996-09-10 | 1999-11-02 | Motorola, Inc. | Multi-layer magnet tunneling junction memory cells |
US5994816A (en) | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US6114794A (en) | 1996-12-16 | 2000-09-05 | Cronos Integrated Microsystems, Inc. | Thermal arched beam microelectromechanical valve |
US5955817A (en) | 1996-12-16 | 1999-09-21 | Mcnc | Thermal arched beam microelectromechanical switching array |
US5909078A (en) | 1996-12-16 | 1999-06-01 | Mcnc | Thermal arched beam microelectromechanical actuators |
US6067797A (en) | 1997-07-15 | 2000-05-30 | Silverbrook Research Pty, Ltd. | Thermal actuator |
US6147900A (en) | 1997-11-06 | 2000-11-14 | Nonvolatile Electronics, Incorporated | Spin dependent tunneling memory |
US5959376A (en) | 1998-09-10 | 1999-09-28 | Sandia Corporation | Microelectromechanical reciprocating-tooth indexing apparatus |
US20010010488A1 (en) | 1999-03-26 | 2001-08-02 | Minners R. Sjhon | Bistable micro-switch and method of manufacturing the same |
US6211598B1 (en) | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
US6410361B2 (en) * | 1999-09-13 | 2002-06-25 | Jds Uniphase Corporation | Methods of fabricating in-plane MEMS thermal actuators |
US6275325B1 (en) | 2000-04-07 | 2001-08-14 | Microsoft Corporation | Thermally activated microelectromechanical systems actuator |
US6485273B1 (en) * | 2000-09-01 | 2002-11-26 | Mcnc | Distributed MEMS electrostatic pumping devices |
WO2002023574A1 (en) | 2000-09-12 | 2002-03-21 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US6438954B1 (en) * | 2001-04-27 | 2002-08-27 | 3M Innovative Properties Company | Multi-directional thermal actuator |
Non-Patent Citations (9)
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Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090244194A1 (en) * | 1998-09-09 | 2009-10-01 | Silverbrook Research Pty Ltd | Micro-Electromechanical Integrated Circuit Device With Laminated Actuators |
US20050279090A1 (en) * | 1998-09-09 | 2005-12-22 | Silverbrook Research Pty Ltd | Micro-electromechanical integrated circuit device with laminated actuators |
US20050039453A1 (en) * | 1998-09-09 | 2005-02-24 | Kia Silverbrook | Micro-electromechanical actuator with control logic circuitry |
US8061795B2 (en) | 1998-10-16 | 2011-11-22 | Silverbrook Research Pty Ltd | Nozzle assembly of an inkjet printhead |
US20110037797A1 (en) * | 1998-10-16 | 2011-02-17 | Silverbrook Research Pty Ltd | Control of a nozzle of an inkjet printhead |
US8087757B2 (en) | 1998-10-16 | 2012-01-03 | Silverbrook Research Pty Ltd | Energy control of a nozzle of an inkjet printhead |
US8066355B2 (en) | 1998-10-16 | 2011-11-29 | Silverbrook Research Pty Ltd | Compact nozzle assembly of an inkjet printhead |
US7028474B2 (en) * | 1998-10-16 | 2006-04-18 | Silverbook Research Pty Ltd | Micro-electromechanical actuator with control logic circuitry |
US8057014B2 (en) | 1998-10-16 | 2011-11-15 | Silverbrook Research Pty Ltd | Nozzle assembly for an inkjet printhead |
US8047633B2 (en) | 1998-10-16 | 2011-11-01 | Silverbrook Research Pty Ltd | Control of a nozzle of an inkjet printhead |
US7556358B2 (en) | 1998-10-16 | 2009-07-07 | Silverbrook Research Pty Ltd | Micro-electromechanical integrated circuit device with laminated actuators |
US20110090288A1 (en) * | 1998-10-16 | 2011-04-21 | Silverbrook Research Pty Ltd | Nozzle assembly of an inkjet printhead |
US7918541B2 (en) | 1998-10-16 | 2011-04-05 | Silverbrook Research Pty Ltd | Micro-electromechanical integrated circuit device with laminated actuators |
US20110037796A1 (en) * | 1998-10-16 | 2011-02-17 | Silverbrook Research Pty Ltd | Compact nozzle assembly of an inkjet printhead |
US20110037809A1 (en) * | 1998-10-16 | 2011-02-17 | Silverbrook Research Pty Ltd | Nozzle assembly for an inkjet printhead |
US7480432B2 (en) | 2006-02-28 | 2009-01-20 | Corning Incorporated | Glass-based micropositioning systems and methods |
US20070201797A1 (en) * | 2006-02-28 | 2007-08-30 | Grzybowski Richard R | Glass-based micropositioning systems and methods |
US20080061913A1 (en) * | 2006-09-07 | 2008-03-13 | Innovative Micro Technology | Singly attached MEMS thermal device and method of manufacture |
US7724121B2 (en) * | 2006-09-07 | 2010-05-25 | Innovative Micro Technology | Singly attached MEMS thermal device and method of manufacture |
US8120133B2 (en) | 2006-09-11 | 2012-02-21 | Alcatel Lucent | Micro-actuator and locking switch |
WO2008033269A3 (en) * | 2006-09-11 | 2008-06-05 | Lucent Technologies Inc | Micro-acutuator and locking switch |
WO2008033269A2 (en) * | 2006-09-11 | 2008-03-20 | Lucent Technologies Inc. | Micro-acutuator and locking switch |
US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
US20110012703A1 (en) * | 2007-02-21 | 2011-01-20 | Reseaux Mems, Societe En Commandite | Mems actuators and switches |
US20090040008A1 (en) * | 2007-08-10 | 2009-02-12 | Lucent Technologies Inc. | Thermal actuator for a mems-based relay switch |
US8154378B2 (en) * | 2007-08-10 | 2012-04-10 | Alcatel Lucent | Thermal actuator for a MEMS-based relay switch |
WO2019108889A1 (en) * | 2017-12-02 | 2019-06-06 | Bellutech Llc | Sensing devices, sensors, and methods for monitoring environmental conditions |
US11011323B2 (en) | 2017-12-02 | 2021-05-18 | Bellutech Llc | Sensing devices, sensors, and methods for monitoring environmental conditions |
Also Published As
Publication number | Publication date |
---|---|
WO2003093165A2 (en) | 2003-11-13 |
AU2003228562A1 (en) | 2003-11-17 |
US20030200749A1 (en) | 2003-10-30 |
WO2003093165A3 (en) | 2004-04-08 |
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