US6618187B2 - Blazed micro-mechanical light modulator and array thereof - Google Patents
Blazed micro-mechanical light modulator and array thereof Download PDFInfo
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- US6618187B2 US6618187B2 US09/901,728 US90172801A US6618187B2 US 6618187 B2 US6618187 B2 US 6618187B2 US 90172801 A US90172801 A US 90172801A US 6618187 B2 US6618187 B2 US 6618187B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Definitions
- the present invention relates to micro-mechanical light modulators and to Spatial Light Modilators (SLMs) including arrays of such modulators.
- SLMs Spatial Light Modilators
- SLMs Spatial Light Modulators
- LVs Light Valves
- Distinctive class SLMs work in diffractive mode; An activated individual member of the SLM array diffracts the incoming light beam at a discrete multitude of angles, these angels being a function of the light wavelength and the dimensions of the modulator.
- modulators based on Micro Elctro-Mechanical Systems (MEMS) technology and called Deformable Diffractive Gratings, are described, for example, in U.S.
- MEMS Micro Elctro-Mechanical Systems
- the diffractive element is usually of “piston” type or cantilever mirror type. Both types of diffractive elements have some advantages, while suffering from some drawbacks. For example, a piston diffractive grating element is always faster than a cantilever mirror diffractive grating element, however, its efficiency is lower.
- FIGS. 1, 2 a , 2 b and 2 c show a typical conventional art design of a piston diffractive type element and demonstrate its operation. Throughout the figures, similar elements are noted with similar numeral references.
- FIG. 1 is a schematic isometric view of a conventional art piston type deformable grating element 10 .
- the element 10 consists of several beams, noted 25 , created by a photolithographic process in a frame 20 .
- the beams 25 define a diffractive grating 22 , supported by the etched structure 30 .
- the bee 25 rest on a silicon substrate base 40 .
- Beams 21 of the beams 25 are movable and are suspended over gaps 41 , which are etched in the silicon substrate base 40 , while other beams 23 of the beams 25 are static.
- the beams 25 are coated with a reflective layer 60 .
- This reflective layer 60 is conductive and functions as an electrode.
- An opposite electrode 50 is deposited on the opposite side of the silicon substrate 40 .
- FIGS. 2 a and 2 b show the A—A cross-section of the conventional art modulator 10 of FIG. 1 in non-active and active states, respectively.
- no voltage is applied between the suspended beams 21 and the common electrode 50 .
- all the beams 21 and 23 are coplanar and the diffractive element works as a plane mirror, i.e. incident beam 70 and reflected beam 71 are in the exact opposite directions.
- the suspended beams 21 are deformed in the direction of the electrical field created by the applied voltage.
- the non-suspended beams 23 and the suspended beams 21 define a diffractive structure returing an incident beam 70 in directions 171 .
- the directions 171 and the direction 70 of the incident beam constitute an angle ⁇ which follows the laws of diffractive optics and is called a diffractive angle.
- the angle ⁇ is a function of the light wavelength ⁇ and the grating period d.
- the diffraction efficiency is a function of the grating amplitude.
- the optimal amplitude for achieving optimal efficiency is ⁇ /4, as illustrated in FIG. 2 b .
- FIG. 2 c shows the angular distribution of the light energy for non-active (thin line) and active (thick line) ⁇ /4 optimize piston type deformable grating light modulating element.
- optical light systems having spatial filtering of the “zero” order there are two kinds of distinctive optical systems that utilize diffractive type light modulators: optical light systems having spatial filtering of the “zero” order, and optical light systems having spatial filtering of the ⁇ 1 st and higher orders.
- the maximal theoretical energy efficiency is 70%
- the maximal theoretical energy efficiency can be as high as 90%.
- the maximal theoretical contrast ratio (the ratio between the energies passing the spatial filter in the active and non-active states, respectively) that can be achieved is 1:12.
- a light valve of deformable grating type includes at least three beams, one beam of being of a substantially fixed-position, and at least two beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, and first and second electrodes for transmitting electrostatic force to at least the deformable beams.
- a light valve of deformable grating type which includes at least three beams, one beam being of a substantially fixed-position, and the three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam and a first electrode and a second electrode, the electrodes transmitting electrostatic force to the deformable beams.
- a method for light modulation includes the steps of:
- the light valve includes at least three beams, at least the first beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam;
- the light valve includes at least three beams, at least the first beam of the at least three beams being of a substantially fixed-position, and the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam;
- the deformable beams form the first electrode and the second electrode is common to all the deformable beams.
- the deformable beams form the first electrode and the second electrode includes an array of electrodes, each electrode of the array of electrodes associated with one of the deformable beams.
- the first electrode includes an array of electrodes, each electrode of the array of electrodes associated with one of the deformable beams, and the second electrode is common to all the deformable beams.
- a spatial light modulator is formed as an array of light valves.
- the beam of a substantially fixed-position is deformable by electrostatic force.
- the at least three beams form the first electrode and the second electrode is common to all the deformable beams.
- the at least three beams form the first electrode and the second electrode includes an array of electrodes, each electrode of the array of electrodes associated with one of the at least three beams.
- the first electrode includes an array of electrodes, each electrode of the array of electrodes associated with one of the at least three beams, and the second electrode is common to all the at least three beams.
- FIG. 1 is an isometric view of a conventional art diffractive modulator of piston deformable grating type
- FIGS. 2 a , 2 b and 2 c illustrate the performance of the conventional art diffractive modulator of FIG. 1;
- FIGS. 3 a and 3 b are schematic isometric views of diffractive modulators of blazed deformable grating type according to the present invention.
- FIGS. 4 a , 4 b and 4 c illustrate the performance of diffractive modulators of blazed deformable grading type according to the present invention
- FIGS. 5 a - 5 d are schematic views of additional diffractive modulators of blazed deformable grating type according to the present invention.
- FIG. 6 is a schematic view of a diffractive SLM utilizing diffractive modulators of blazed deformable grating type according to the present invention.
- Modulator 100 consists of a plurality of beams 21 and 23 , the beams 21 being suspended over a silicon structure base 40 coated with insulation layer 45 .
- the beams 21 can be made, for example, from low stress silicon nitride and are etched in a frame 25 by sacrificial layer method.
- the beams 21 that, as will be explained below, form a diffractive grating, are the active part of the modulator and are coated with a highly reflective layer 60 .
- Layer 60 may be chosen of a material such that high reflectivity will be achieved, in accordance wit the wavelet of the light to be modulated and can be, for example, of aluminum, silver, gold or wavelength optimized metal—dielectric mirror.
- the layer 60 acts as the first electrode for applying a voltage between the beams 21 and the second electrode 50 .
- FIGS. 4 a and 4 b illustrate the A—A cross-section of the diffractive modulator 100 of FIG. 3 a
- base 40 of the modulator is shaped in a star case structure 80 , so that the beams 21 are suspended at different distances from the base 40 . Faker, the beam 23 is fixed and rests on the base 40 .
- the way of determining the parameters of the staircase structure 80 i.e. the pitch d 0 of the beams 21 and 23 and the amplitude H will be addressed below.
- all the suspended beams 21 are in their uppermost position and are preferably coplanar with the fixed beam 23 .
- An optical beam 70 impinging the surface of modulator 100 at an angle ⁇ with respect to the normal 73 will be diffracted in multitude directions 171 , with specific angular distribution of the energy (for clarity reasons, only one direction of the directions 171 is shown in the figure).
- FIG. 3 b An additional embodiment of the present invention is shown in FIG. 3 b . It differs from the arrangement shown in FIG. 3 a in the design of the base 40 and the electrode 23 .
- the beam 23 is also suspended rather than rested on the base 40 . Beam 23 however, does not have electrical connection with the rest of the beams 21 and therefore its position is not affected by applying an electrical field to these beams.
- This design has the same performance as the design of FIG. 3 a and can be optimized using the same procedure explained above with regard to FIGS. 4 a and 4 b , The advantage of such a design is that its process of production is more convenient, especially when a plurality of such modulators are arranged in an array.
- the diffractive light modulator 200 of the present invention has the same basic structure as the embodiments of FIGS. 3 a and 3 b , respectively, but for the common electrode 50 (FIGS. 3 a and 3 b ), which is replaced by an array of electrodes 51 , 52 and 53 , each associated wit a corresponding suspended beam 21 A, 21 B and 21 C, respectively. Accordingly, while the suspended beams still present one first electrode, the second electrode is now an array of electrodes.
- This configuration allows for fine tuning of the non-diffractive state, by applying small different bias voltages U 1 , U 2 and U 3 to each suspended beam 21 A, 21 B and 21 C respectively, thus arranging them to be essentially coplanar with the beam 23 .
- a counter electrode 50 a can be added to beam 23 of the embodiment of FIG. 5 b (shown with dashed line) for receiving voltage U 0 for fine-tuning.
- the beam 23 should be short-circuited to the suspended beams 21 A, 21 B and 21 C as schematically shown by the dashed curve 24 .
- beam 23 of the design of FIG. 5 d can also be supplied with electrical connection (shown with dashed line) for receiving voltage U 0 for fine-tuning.
- the common counter electrode 50 should be extended, as shown by the dashed line 50 b.
- the exemplary light modulators discussed above consist of four beams—one fixed and three suspended, it is appreciated that other configurations, with different number of suspended beams, are also possible. Furthermore, a higher number of suspended beams enables tuning (blazing) the grating modulator to higher diffractive orders, while maintaining similarly high EE and CR.
- FIG. 6 is a schematic illustration of an array of blazed modulators of deformable grating type 300 according to the present invention.
- the modulators are placed on one common silicon wafer base 40 , by employing standard, well known in the art technology.
- the figure illustrates part of the array 300 , consisting of five individual modulators 101 through 105 .
- Modulators 101 and 104 are in a non-active state, thus working as plane mirrors.
- Modulators 102 , 103 and 105 are active and diffract the incoming beam, as indicated by arrows 171 . All the suspended beams can be short-circuited to form one common first electrode, while a dedicated second electrode 151 to 155 is assigned to each individual modulator 101 to 105 , respectively.
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US09/901,728 US6618187B2 (en) | 2000-07-13 | 2001-07-11 | Blazed micro-mechanical light modulator and array thereof |
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Also Published As
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CA2352729A1 (en) | 2002-01-13 |
EP1172681A3 (en) | 2004-06-09 |
US20020021485A1 (en) | 2002-02-21 |
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