US5577948A - Magnetorheological polishing devices and methods - Google Patents
Magnetorheological polishing devices and methods Download PDFInfo
- Publication number
- US5577948A US5577948A US08/525,453 US52545395A US5577948A US 5577948 A US5577948 A US 5577948A US 52545395 A US52545395 A US 52545395A US 5577948 A US5577948 A US 5577948A
- Authority
- US
- United States
- Prior art keywords
- workpiece
- magnetorheological fluid
- clearance
- fluid
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 133
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000012530 fluid Substances 0.000 claims abstract description 67
- 239000000463 material Substances 0.000 claims description 66
- 239000002245 particle Substances 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims 2
- 230000003134 recirculating effect Effects 0.000 claims 2
- 230000001052 transient effect Effects 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 abstract description 7
- 238000007517 polishing process Methods 0.000 abstract description 5
- 230000033001 locomotion Effects 0.000 description 18
- 239000010410 layer Substances 0.000 description 16
- 238000006073 displacement reaction Methods 0.000 description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000006249 magnetic particle Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- -1 tubes Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
- B24B39/02—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor designed for working internal surfaces of revolution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/44—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids
- H01F1/442—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids the magnetic component being a metal or alloy, e.g. Fe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/44—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids
- H01F1/447—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids characterised by magnetoviscosity, e.g. magnetorheological, magnetothixotropic, magnetodilatant liquids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
- Y10S977/838—Magnetic property of nanomaterial
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/888—Shaping or removal of materials, e.g. etching
Abstract
Description
(I) U.sub.z =2R.sub.z /t
(II) U.sub.z ≦2R.sub.z V/k.sub.3
t≦k.sub.3 /V
K=k.sub.1 +k.sub.2
N=K/k.sub.3
t.sub.c =R.sub.w /U.sub.z
T=NR.sub.w /U.sub.z
I=r/2R.sub.z
t.sub.d =k.sub.3 I/V
n.sub.s =R.sub.w /r
N=K/k.sub.3
T=t.sub.d n.sub.s N
t.sub.d =k.sub.3 I/V[R.sub.z ]
cos α.sub.max =(R.sub.sf -L)/R.sub.sf
L=R.sub.sf -R.sup.2.sub.sf -R.sup.2.sub.w
cos β=(R.sub.sf -h.sub.0)/R.sub.sf
h.sub.0 =R.sub.sf -R.sup.2.sub.sf -R.sup.2.sub.z
ω.sub.z ≧βV/k.sub.3
t.sub.c =α.sub.max /ω.sub.z
K=k.sub.1 +k.sub.2
N=K/k.sub.3
T=t.sub.c N
I=α.sub.s /β
α.sub.s =α.sub.max /n.sub.s
n.sub.s =α.sub.max /β
α=α.sub.s N.sub.s
K=k.sub.1 +k.sub.2
N=K/k.sub.3
t.sub.d =k.sub.3 I/V
T=t.sub.d n.sub.s N
______________________________________ a) Glass type BK7 b) Shape Spherical c) Diameter, mm 20 d) Radius of curvature, mm 40 e) Center thickness, mm 15 f) Initial fit to shape, waves 0.5 g) Initial surface roughness, nm,rms 100 ______________________________________
______________________________________ Component Weight Percentage ______________________________________ Polirit (cerium oxide) 10 Carbonyl iron powder 60 Aerosil (fumed silica) 2.5 Glycerin 5.5 Distilled water balance ______________________________________
______________________________________ R, mm H, μm ______________________________________ 0.0 15.2 3.3 19.5 5.1 21.5 6.4 20.9 7.5 19.2 8.9 16.8 10.8 11.9 12.4 9.8 13.8 6.7 15 5.1 16.2 3.8 17.2 3.0 18.2 1.9 18.6 1.3 19.3 1.3 19.7 0.5 ______________________________________
TABLE 1 ______________________________________ Time Control Angle, α coefficient radiuses, mm ______________________________________ 0.00 1.000 0.00 1.79 1.000 1.25 3.58 1.000 2.49 5.37 1.000 3.74 7.16 1.000 4.98 8.95 1.000 6.22 10.74 1.208 7.45 12.53 1.208 8.68 14.32 1.208 9.89 16.11 1.416 11.10 17.90 1.624 12.29 19.70 1.832 13.48 21.49 2.040 14.65 23.28 2.040 15.81 25.07 2.040 16.95 26.86 1.624 18.07 28.65 1.832 19.18 30.44 38.119 20.26 ______________________________________
Claims (22)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/525,453 US5577948A (en) | 1992-04-14 | 1995-09-08 | Magnetorheological polishing devices and methods |
US08/676,598 US6503414B1 (en) | 1992-04-14 | 1996-07-03 | Magnetorheological polishing devices and methods |
US10/299,189 US7261616B2 (en) | 1992-04-14 | 2002-11-18 | Magnetorheological polishing devices and methods |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US86846692A | 1992-04-14 | 1992-04-14 | |
US93011692A | 1992-08-14 | 1992-08-14 | |
US96692992A | 1992-10-27 | 1992-10-27 | |
US96691992A | 1992-10-27 | 1992-10-27 | |
US08/071,813 US5449313A (en) | 1992-04-14 | 1993-06-04 | Magnetorheological polishing devices and methods |
US08/525,453 US5577948A (en) | 1992-04-14 | 1995-09-08 | Magnetorheological polishing devices and methods |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US96692992A Continuation-In-Part | 1992-04-14 | 1992-10-27 | |
US08/071,813 Continuation US5449313A (en) | 1992-04-14 | 1993-06-04 | Magnetorheological polishing devices and methods |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/676,598 Division US6503414B1 (en) | 1992-04-14 | 1996-07-03 | Magnetorheological polishing devices and methods |
Publications (1)
Publication Number | Publication Date |
---|---|
US5577948A true US5577948A (en) | 1996-11-26 |
Family
ID=27535901
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/071,813 Expired - Lifetime US5449313A (en) | 1992-04-14 | 1993-06-04 | Magnetorheological polishing devices and methods |
US08/525,453 Expired - Lifetime US5577948A (en) | 1992-04-14 | 1995-09-08 | Magnetorheological polishing devices and methods |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/071,813 Expired - Lifetime US5449313A (en) | 1992-04-14 | 1993-06-04 | Magnetorheological polishing devices and methods |
Country Status (1)
Country | Link |
---|---|
US (2) | US5449313A (en) |
Cited By (32)
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WO1997014532A1 (en) * | 1995-10-16 | 1997-04-24 | Byelocorp Scientific, Inc. | Deterministic magnetorheological finishing |
US5775976A (en) * | 1997-03-27 | 1998-07-07 | Scientific Manufacturing Technologies, Inc. | Method and device for magnetic-abrasive machining of parts |
US5813901A (en) * | 1997-03-27 | 1998-09-29 | Scientific Manufacturing Technologies Inc | Method and device for magnetic-abrasive machining of parts |
US5931718A (en) * | 1997-09-30 | 1999-08-03 | The Board Of Regents Of Oklahoma State University | Magnetic float polishing processes and materials therefor |
US5951369A (en) * | 1999-01-06 | 1999-09-14 | Qed Technologies, Inc. | System for magnetorheological finishing of substrates |
US5957753A (en) * | 1997-12-30 | 1999-09-28 | The Board Of Regents For Oklahoma State University | Magnetic float polishing of magnetic materials |
US5971835A (en) * | 1998-03-25 | 1999-10-26 | Qed Technologies, Inc. | System for abrasive jet shaping and polishing of a surface using magnetorheological fluid |
US6267651B1 (en) * | 2000-01-10 | 2001-07-31 | Qed Technologies, Inc. | Magnetic wiper |
US6325696B1 (en) | 1999-09-13 | 2001-12-04 | International Business Machines Corporation | Piezo-actuated CMP carrier |
US6395193B1 (en) | 2000-05-03 | 2002-05-28 | Lord Corporation | Magnetorheological compositions |
US6402978B1 (en) | 1999-05-06 | 2002-06-11 | Mpm Ltd. | Magnetic polishing fluids for polishing metal substrates |
WO2002049082A2 (en) * | 2000-12-11 | 2002-06-20 | Rodel Holdings, Inc. | Process of shaping a semiconductor substrate and/or a lithographic mask |
US20020145738A1 (en) * | 2000-12-08 | 2002-10-10 | Lex Robert M. | Monolithic corrector plate |
US20030040259A1 (en) * | 1999-06-10 | 2003-02-27 | Nisca Corporation | Polishing material, grinding particle body for abrasion-grinding, method for producing a polishing material, and method for polishing or grinding, and polishing apparatus |
EP1321227A1 (en) * | 2001-12-19 | 2003-06-25 | MPM Ltd. | A polishing method and device using magnetorheological fluid |
US6626742B2 (en) | 2000-05-04 | 2003-09-30 | Mpm Ltd. | Polishing method and device |
US20040077292A1 (en) * | 2002-10-21 | 2004-04-22 | Kim Andrew Tae | Real-time polishing pad stiffness control using magnetically controllable fluid |
WO2004040621A2 (en) * | 2002-10-28 | 2004-05-13 | Acute, Inc. | Method and apparatus for planarizing a semiconductor wafer |
US20040217324A1 (en) * | 2003-05-02 | 2004-11-04 | Henry Hsu | Magnetorheological fluid compositions and prosthetic knees utilizing same |
US20060052039A1 (en) * | 2004-06-24 | 2006-03-09 | Gennady Kremen | Method of and apparatus for magnetic-abrasive machining of wafers |
KR100564425B1 (en) * | 1999-12-30 | 2006-03-28 | 주식회사 하이닉스반도체 | Device For Polishing The Semiconductor Device Using Magnetic Field And Method Thereof |
US7217372B2 (en) | 2000-05-03 | 2007-05-15 | Lord Corporation | Magnetorheological composition |
US7252576B1 (en) * | 2006-02-21 | 2007-08-07 | The Board Of Regents For Oklahoma State University | Method and apparatus for magnetic float polishing |
US7261616B2 (en) | 1992-04-14 | 2007-08-28 | Qed Technologies International, Inc. | Magnetorheological polishing devices and methods |
US7309953B2 (en) | 2005-01-24 | 2007-12-18 | Principia Lightworks, Inc. | Electron beam pumped laser light source for projection television |
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US5840629A (en) * | 1995-12-14 | 1998-11-24 | Sematech, Inc. | Copper chemical mechanical polishing slurry utilizing a chromate oxidant |
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