US5212390A - Lead inspection method using a plane of light for producing reflected lead images - Google Patents
Lead inspection method using a plane of light for producing reflected lead images Download PDFInfo
- Publication number
- US5212390A US5212390A US07/878,371 US87837192A US5212390A US 5212390 A US5212390 A US 5212390A US 87837192 A US87837192 A US 87837192A US 5212390 A US5212390 A US 5212390A
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- United States
- Prior art keywords
- lead
- light
- leads
- plane
- reflected
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53022—Means to assemble or disassemble with means to test work or product
Abstract
Description
displacement 32=(variation 43)×cotangent (angle 29).
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US07/878,371 US5212390A (en) | 1992-05-04 | 1992-05-04 | Lead inspection method using a plane of light for producing reflected lead images |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/878,371 US5212390A (en) | 1992-05-04 | 1992-05-04 | Lead inspection method using a plane of light for producing reflected lead images |
Publications (1)
Publication Number | Publication Date |
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US5212390A true US5212390A (en) | 1993-05-18 |
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US07/878,371 Expired - Lifetime US5212390A (en) | 1992-05-04 | 1992-05-04 | Lead inspection method using a plane of light for producing reflected lead images |
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Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5401979A (en) * | 1992-11-09 | 1995-03-28 | U.S. Philips Corporation | Methods for investigating an object by means of a reflectable radiation beam and devices suitable for carrying out the methods having an image sensor rigidly interconnected with an optical detector |
US5663799A (en) * | 1996-01-24 | 1997-09-02 | Competitive Technologies Of Pa, Inc. | Optical diffraction method and apparatus for integrated circuit lead inspection |
WO1998004882A1 (en) * | 1996-07-12 | 1998-02-05 | Linker Frank V Jr | Split optics arrangement for vision inspection/sorter module |
US5774227A (en) * | 1997-01-28 | 1998-06-30 | The Whitaker Corporation | Anomally detection machine for fabricated parts formed on a carrier strip and method of use |
US5910844A (en) * | 1997-07-15 | 1999-06-08 | Vistech Corporation | Dynamic three dimensional vision inspection system |
US5929459A (en) * | 1997-09-23 | 1999-07-27 | Synergistech, Inc. | Methods and apparatus for inspecting a workpiece with edge and co-planarity determination |
US5956134A (en) * | 1997-07-11 | 1999-09-21 | Semiconductor Technologies & Instruments, Inc. | Inspection system and method for leads of semiconductor devices |
US6064483A (en) * | 1997-08-07 | 2000-05-16 | Siemens Aktiengesellschaft | Device for checking the position the coplanarity and the separation of terminals of components |
US6097477A (en) * | 1994-05-27 | 2000-08-01 | American Research Corporation Of Virginia | Laser speckle strain and deformation sensor using linear array image cross-correlation method for specifically arranged triple-beam triple-camera configuration |
US6128034A (en) * | 1994-02-18 | 2000-10-03 | Semiconductor Technologies & Instruments, Inc. | High speed lead inspection system |
US6307210B1 (en) * | 1996-09-17 | 2001-10-23 | Cognex Technology And Investment Corporation | Device for imaging object to be inspected and device for inspecting semiconductor package |
SG85125A1 (en) * | 1998-08-05 | 2001-12-19 | Nat Semiconductor Corp | Grid array inspection system and method |
US6332269B1 (en) * | 1997-08-21 | 2001-12-25 | Micron Technology, Inc. | Component alignment methods |
US20020018219A1 (en) * | 1998-09-10 | 2002-02-14 | Hallerman Gregory R. | Method for three-dimensional inspection using patterned light projection |
US20020195496A1 (en) * | 1999-06-07 | 2002-12-26 | Metrologic Instruments, Inc. | Planar LED-based illumination array (PLIA) chips |
US20030019932A1 (en) * | 1998-03-24 | 2003-01-30 | Tsikos Constantine J. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the temporal-coherence of the planar laser illumination beam before it illuminates the target object by applying temporal frequency modulation techniques during the transmission of the PLIB towards the target |
US20030042303A1 (en) * | 1999-06-07 | 2003-03-06 | Metrologic Instruments, Inc. | Automatic vehicle identification (AVI) system employing planar laser illumination imaging (PLIIM) based subsystems |
US20030042308A1 (en) * | 1995-12-18 | 2003-03-06 | Tsikos Constantine J. | Pliim-based semiconductor chips |
US20030089779A1 (en) * | 2000-11-24 | 2003-05-15 | Metrologic Instruments, Inc | Planar light illumination and imaging device with modulated coherent illumination that reduces speckle noise induced by coherent illumination |
US20030091244A1 (en) * | 2000-11-24 | 2003-05-15 | Metrologic Instruments, Inc. | Imaging engine employing planar light illumination and linear imaging |
US6629641B2 (en) | 2000-06-07 | 2003-10-07 | Metrologic Instruments, Inc. | Method of and system for producing images of objects using planar laser illumination beams and image detection arrays |
US6631842B1 (en) | 2000-06-07 | 2003-10-14 | Metrologic Instruments, Inc. | Method of and system for producing images of objects using planar laser illumination beams and image detection arrays |
US6732929B2 (en) | 1990-09-10 | 2004-05-11 | Metrologic Instruments, Inc. | Led-based planar light illumination beam generation module employing a focal lens for reducing the image size of the light emmiting surface of the led prior to beam collimation and planarization |
US6988660B2 (en) | 1999-06-07 | 2006-01-24 | Metrologic Instruments, Inc. | Planar laser illumination and imaging (PLIIM) based camera system for producing high-resolution 3-D images of moving 3-D objects |
US20070138284A1 (en) * | 2001-11-21 | 2007-06-21 | Metrologic Instruments, Inc. | Planar light illumination and imaging device with modulated coherent illumination that reduces speckle noise induced by coherent illumination |
US20080252985A1 (en) * | 2000-11-24 | 2008-10-16 | Metrologic Instruments, Inc. | Tunnel-type digital imaging-based self-checkout system for use in retail point-of-sale environments |
CN108565225A (en) * | 2018-03-19 | 2018-09-21 | 厦门多彩光电子科技有限公司 | A kind of test method and device of LED package metals line |
US10871456B2 (en) * | 2019-02-07 | 2020-12-22 | Kabushiki Kaisha Toshiba | Semiconductor inspection system and semiconductor inspection apparatus |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4696047A (en) * | 1985-02-28 | 1987-09-22 | Texas Instruments Incorporated | Apparatus for automatically inspecting electrical connecting pins |
US4741621A (en) * | 1986-08-18 | 1988-05-03 | Westinghouse Electric Corp. | Geometric surface inspection system with dual overlap light stripe generator |
US4874956A (en) * | 1987-04-14 | 1989-10-17 | Kabushiki Kaisha Toshiba | Method and apparatus for inspecting semiconductor devices for their bonding status |
JPH01272126A (en) * | 1988-04-25 | 1989-10-31 | Sony Corp | Apparatus for inspecting lead bend of semiconductor device |
US5012524A (en) * | 1989-02-27 | 1991-04-30 | Motorola, Inc. | Automatic inspection method |
US5102224A (en) * | 1989-04-05 | 1992-04-07 | Nkk Corporation | Apparatus for measuring three-dimensional curved surface shapes |
-
1992
- 1992-05-04 US US07/878,371 patent/US5212390A/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4696047A (en) * | 1985-02-28 | 1987-09-22 | Texas Instruments Incorporated | Apparatus for automatically inspecting electrical connecting pins |
US4741621A (en) * | 1986-08-18 | 1988-05-03 | Westinghouse Electric Corp. | Geometric surface inspection system with dual overlap light stripe generator |
US4874956A (en) * | 1987-04-14 | 1989-10-17 | Kabushiki Kaisha Toshiba | Method and apparatus for inspecting semiconductor devices for their bonding status |
JPH01272126A (en) * | 1988-04-25 | 1989-10-31 | Sony Corp | Apparatus for inspecting lead bend of semiconductor device |
US5012524A (en) * | 1989-02-27 | 1991-04-30 | Motorola, Inc. | Automatic inspection method |
US5102224A (en) * | 1989-04-05 | 1992-04-07 | Nkk Corporation | Apparatus for measuring three-dimensional curved surface shapes |
Non-Patent Citations (2)
Title |
---|
Petros Maragos; "Tutorial on Advances in Morphological Image Processing and Analysis,"; Optical Engineering, vol. 26, No. 7, pp. 623-632; Jul. 1987. |
Petros Maragos; Tutorial on Advances in Morphological Image Processing and Analysis, ; Optical Engineering, vol. 26, No. 7, pp. 623 632; Jul. 1987. * |
Cited By (132)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6732929B2 (en) | 1990-09-10 | 2004-05-11 | Metrologic Instruments, Inc. | Led-based planar light illumination beam generation module employing a focal lens for reducing the image size of the light emmiting surface of the led prior to beam collimation and planarization |
US5401979A (en) * | 1992-11-09 | 1995-03-28 | U.S. Philips Corporation | Methods for investigating an object by means of a reflectable radiation beam and devices suitable for carrying out the methods having an image sensor rigidly interconnected with an optical detector |
US6128034A (en) * | 1994-02-18 | 2000-10-03 | Semiconductor Technologies & Instruments, Inc. | High speed lead inspection system |
US6097477A (en) * | 1994-05-27 | 2000-08-01 | American Research Corporation Of Virginia | Laser speckle strain and deformation sensor using linear array image cross-correlation method for specifically arranged triple-beam triple-camera configuration |
US6736321B2 (en) | 1995-12-18 | 2004-05-18 | Metrologic Instruments, Inc. | Planar laser illumination and imaging (PLIIM) system employing wavefront control methods for reducing the power of speckle-pattern noise digital images acquired by said system |
US20030042308A1 (en) * | 1995-12-18 | 2003-03-06 | Tsikos Constantine J. | Pliim-based semiconductor chips |
US6971578B2 (en) | 1995-12-18 | 2005-12-06 | Metrologic Instruments, Inc. | Planar laser illumination and imaging module (PLIIN) based semiconductor chips |
US5663799A (en) * | 1996-01-24 | 1997-09-02 | Competitive Technologies Of Pa, Inc. | Optical diffraction method and apparatus for integrated circuit lead inspection |
US6188784B1 (en) | 1996-07-12 | 2001-02-13 | American Tech Manufacturing, Inc. | Split optics arrangement for vision inspection/sorter module |
WO1998004882A1 (en) * | 1996-07-12 | 1998-02-05 | Linker Frank V Jr | Split optics arrangement for vision inspection/sorter module |
US6307210B1 (en) * | 1996-09-17 | 2001-10-23 | Cognex Technology And Investment Corporation | Device for imaging object to be inspected and device for inspecting semiconductor package |
US5774227A (en) * | 1997-01-28 | 1998-06-30 | The Whitaker Corporation | Anomally detection machine for fabricated parts formed on a carrier strip and method of use |
US5956134A (en) * | 1997-07-11 | 1999-09-21 | Semiconductor Technologies & Instruments, Inc. | Inspection system and method for leads of semiconductor devices |
US5910844A (en) * | 1997-07-15 | 1999-06-08 | Vistech Corporation | Dynamic three dimensional vision inspection system |
US6064483A (en) * | 1997-08-07 | 2000-05-16 | Siemens Aktiengesellschaft | Device for checking the position the coplanarity and the separation of terminals of components |
US6332269B1 (en) * | 1997-08-21 | 2001-12-25 | Micron Technology, Inc. | Component alignment methods |
US6463653B1 (en) | 1997-08-21 | 2002-10-15 | Micron Technology, Inc. | Component alignment apparatuses |
US6845555B1 (en) * | 1997-08-21 | 2005-01-25 | Micron Technology, Inc. | Component alignment methods |
US7017262B1 (en) | 1997-08-21 | 2006-03-28 | Micron Technology, Inc. | Component alignment methods |
US7222414B2 (en) | 1997-08-21 | 2007-05-29 | Micron Technology, Inc. | Component transfer systems |
US6895661B1 (en) | 1997-08-21 | 2005-05-24 | Micron Technology, Inc. | Component alignment apparatuses and methods |
US20050138802A1 (en) * | 1997-08-21 | 2005-06-30 | Micron Technology, Inc. | Component alignment apparatus and methods |
US6606791B1 (en) | 1997-08-21 | 2003-08-19 | Micron Technology, Inc. | Component alignment methods |
US5929459A (en) * | 1997-09-23 | 1999-07-27 | Synergistech, Inc. | Methods and apparatus for inspecting a workpiece with edge and co-planarity determination |
US20030019932A1 (en) * | 1998-03-24 | 2003-01-30 | Tsikos Constantine J. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the temporal-coherence of the planar laser illumination beam before it illuminates the target object by applying temporal frequency modulation techniques during the transmission of the PLIB towards the target |
US6863216B2 (en) | 1998-03-24 | 2005-03-08 | Constantine J. Tsikos | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the spatial-coherence of the planar laser illumination beam before it illuminates the target object by applying spatial phase modulation techniques during the transmission of the plib towards the target |
US6971577B2 (en) | 1998-03-24 | 2005-12-06 | Metrologic Instruments, Inc. | Method of and system for automatically producing digital images of a moving object, with pixels having a substantially uniform white level independent of the velocity of said moving object |
US6923374B2 (en) | 1998-03-24 | 2005-08-02 | Metrologic Instruments, Inc. | Neutron-beam based scanning system having an automatic object identification and attribute information acquisition and linking mechanism integrated therein |
US6827265B2 (en) | 1998-03-24 | 2004-12-07 | Metrologic Instruments, Inc. | Automatic vehicle identification and classification (AVIC) system employing a tunnel-arrangement of PLIIM-based subsystems |
US20030042304A1 (en) * | 1998-03-24 | 2003-03-06 | Knowles C. Harry | Automatic vehicle identification and classification (AVIC) system employing a tunnel-arrangement of PLIIM-based subsystems |
US20070012777A1 (en) * | 1998-03-24 | 2007-01-18 | Tsikos Constantine J | Planar laser illumination and imaging (PLIIM) systems with integrated despeckling mechanisms provided therein |
US6837432B2 (en) | 1998-03-24 | 2005-01-04 | Metrologic Instruments, Inc. | Method of and apparatus for automatically cropping captured linear images of a moving object prior to image processing using region of interest (roi) coordinate specifications captured by an object profiling subsystem |
US6880756B2 (en) | 1998-03-24 | 2005-04-19 | Metrologic Instruments, Inc. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the temporal-coherence of the planar laser illumination beam (plib) after it illuminates the target by applying temporal intensity modulation techniques during the detection of the reflected/scattered plib |
US20030034396A1 (en) * | 1998-03-24 | 2003-02-20 | Tsikos Constantine J. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the spatial-coherence of the planar laser illumination beam before it illuminates the target object by applying spatial phase modulation techniques during the transmission of the PLIB towards the target |
US20030062414A1 (en) * | 1998-03-24 | 2003-04-03 | Metrologic Instruments, Inc. | Method of and apparatus for automatically cropping captured linear images of a moving object prior to image processing using region of interest (ROI) coordinate specifications captured by an object profiling subsystem |
US6857570B2 (en) | 1998-03-24 | 2005-02-22 | Metrologic Instruments, Inc. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the temporal-coherence of the planar laser illumination beam before it illuminates the target object by applying temporal frequency modulation techniques during the transmission of the plib towards the target |
US20030019931A1 (en) * | 1998-03-24 | 2003-01-30 | Metrologic Instruments, Inc. | Method of speckle-noise pattern reduction and apparatus therefor based on reducing the temporal-coherence of the planar laser illumination beam (PLIB) after it illuminates the target by applying temoporal intensity modulation techniques during the detection of the reflected/scattered PLIB |
US7527200B2 (en) | 1998-03-24 | 2009-05-05 | Metrologic Instruments, Inc. | Planar laser illumination and imaging (PLIIM) systems with integrated despeckling mechanisms provided therein |
US6518997B1 (en) | 1998-08-05 | 2003-02-11 | National Semiconductor Corporation | Grid array inspection system and method |
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US7075662B2 (en) * | 1998-09-10 | 2006-07-11 | Siemens Energy And Automation, Inc. | Method for three-dimensional inspection using patterned light projection |
US20020018219A1 (en) * | 1998-09-10 | 2002-02-14 | Hallerman Gregory R. | Method for three-dimensional inspection using patterned light projection |
US6851610B2 (en) | 1999-06-07 | 2005-02-08 | Metrologic Instruments, Inc. | Tunnel-type package identification system having a remote image keying station with an ethernet-over-fiber-optic data communication link |
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US6953151B2 (en) | 1999-06-07 | 2005-10-11 | Metrologic Instruments, Inc. | Planar laser illumination and imaging (pliim) based camera system for automatically producing digital linear images of a moving object, containing pixels having a substantially square aspect-ratio independent of the measured range and/or a velocity of said moving object |
US6957775B2 (en) | 1999-06-07 | 2005-10-25 | Metrologic Instruments, Inc. | Internet-based method of and system for remotely monitoring, configuring and servicing planar laser illumination and imaging (pliim) based networks with nodes for supporting object identification and attribute information acquisition functions |
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