US4796975A - Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto - Google Patents
Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto Download PDFInfo
- Publication number
- US4796975A US4796975A US07/050,254 US5025487A US4796975A US 4796975 A US4796975 A US 4796975A US 5025487 A US5025487 A US 5025487A US 4796975 A US4796975 A US 4796975A
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- United States
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- waveguide
- substrate
- waveguide substrate
- slabs
- fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Definitions
- This invention relates to substrate optical waveguides, and more specifically, to a substrate optical waveguide having fibers pigtailed thereto, as well as to the method of pigtailing or attaching the fibers thereto.
- the invention relates to the attaching of such optical fibers to optical waveguide substrates of the type relating to lithium niobate (LiNbO 3 ) technology or alternatively, lithium tantalate (LiTaO 3 ) technology, and devices employing said technology which are manufactured as integrated optical circuit components such as phase modulators.
- LiNbO 3 lithium niobate
- LiTaO 3 lithium tantalate
- optical radiation entering a crystal divides into two rays, called the ordinary ray and the extraordinary ray.
- the rays have polarization vectors at right angles to each other and in general, have different phase velocities implying the existence of two refractive indices in such crystals, which are termed in the ordinary refractive index n 0 the extraordinary index n e .
- the waveguides employed in integrated optics are typically a channel waveguide, more typically a thin narrow region having somewhat higher refractive index than the surrounding medium, with typical transverse dimensions of one to several micrometers of the radiation. The last requirement translates into typical transverse dimensions of integrated optics channel waveguides of one to several micrometers.
- Such guiding structures are produced by lithographic techniques akin to those used in integrated circuit technology.
- U.S. Pat. No. 4,639,074 teaches a method of aligning a fiber waveguide to a waveguide substrate wherein one or more fibers are held in silicon v-grooves and mated in an overlap fashion with the waveguide substrate such that the plurality of degrees of freedom are automatically aligned.
- the silicon substrate is set to overlap the top surface of the waveguide substrate, and since the waveguide defined in the waveguide substrate, is generated by in-diffusion thereinto, precise alignment between fiber and light guiding region is not always possible.
- a further disadvantage with this arrangement is that it requires an active alignment along one axis before the fiber array is secured.
- a method for precisely aligning fibers with a waveguide in a waveguide substrate which provides for substantially exact coincidence between the fibers and the waveguide with reduced losses in the transmission of light. This is achieved by wholly passive means as contrasted to prior art active alignment techniques.
- two slabs of preferentially etchable material and a waveguide substrate are placed face down on a flat surface for aligning the tops of the slabs with the top of the waveguide substrate, and with each of the slabs respectively positioned abutting the ends of the waveguide.
- the position of the slabs and the waveguide substrate are secured by attaching a backplate support to the bottom of the slabs and waveguide substrate.
- v-grooves are formed in the top surfaces of the silicon slabs in a manner wherein the v-grooves are preferably aligned coextensively with the waveguide on the waveguide substrate.
- the method also involves securing fibers in the v-grooves in a manner abutting the ends of the waveguide on the waveguide substrate.
- the v-grooves are formed on silicon by photolithographic processing.
- the fibers are preferably secured within the v-groove with a conventional adhesive and to insure that the top surfaces of the slabs in the waveguide substrate are maintained level, when a back plate is attached to the slabs and waveguide substrate, potting material is interposed therebetween to assure that the tops of the slabs and waveguide substrate are maintained in substantially the same plane, and serves as an adhesive to hold the assembly together.
- the waveguide substrate preferably it is a lithium niobate waveguide substrate having a titanium in-diffused light waveguide region thereon.
- the slabs and substrate Prior to attaching the back plate to the waveguide substrate and the silicon slabs, the slabs and substrate are held together positioned by vacuumed suction on the downward facing top surfaces thereof.
- the invention comprises a substrate waveguide having fibers pigtailed thereto which is manufactured in accordance with the above-described method.
- FIG. 1 is a perspective view of a waveguide substrate in accordance with the invention, having silicon slabs attached thereto with fibers secured in alignment with the light guiding path of the substrate.
- FIG. 2 is a side cross sectional schematic view of the arrangement for assembling the pigtailed waveguide substrate in accordance with the invention.
- the device manufactured in accordance with the invention is generally shown in FIG. 1.
- the device generally comprises a waveguide substrate 1 having a light guiding region 11 thereon.
- this waveguide substrate is of a material such as lithium niobate or lithium tantalate having the light guiding region 11 defined, for example, by titanium indiffusion as discussed in the previously referenced patents.
- two slabs 3 of etchable material are secured to the ends of the waveguide substrate 1.
- the etchable material is, for example, silicon.
- the top surfaces of the slabs 3 and the waveguide substrate 1 are optically aligned and the slabs 3 can be etched to have v-grooves 13 by conventional photolithographic techniques as will be readily apparent to those of ordinary skill in the art.
- the etching processes on silicon are self-limiting such that the v-grooves will, after reaching a predetermined size, stop growing. With the v-grooves so etched, the device can then has fibers 9 secured in the v-grooves 13 so that the fibers 9 are pigtailed in precise alignment with the light guiding region 11.
- a backing plate 7 is secured to all three by means of a potting adhesive 5 which can make up for differences in thickness of the slabs 3 relative to the waveguide substrate 1 such that between the backing plate 7 and potting adhesive 5, the top surfaces of the slabs 3 and waveguide substrate 1 can be maintained optically aligned.
- a table 15 having a flat top surface 15a.
- a plurality of openings 17 are on the top surface 15a which open into a plenum chamber 19 which leads into a vacuum line 21 through which a vacuum can be drawn in the direction of arrow A.
- the waveguide substrate 1 is placed on the top surface 15a top side down with silicon slabs 3 located on either side of the waveguide substrate 1 abutting the ends of the light guiding region 11.
- a potting material/adhesive 5 is placed on the back of the slabs 3 and waveguide substrate 1 in a manner such that any differences in dimension and height are compensated for and thereafter a backing plate 7 is placed on the potting material/adhesive 5 to secure entire arrangement together. While this is being performed, vacuum is being drawn through the line 21 to hold the top surfaces of the slabs 3 and waveguide substrate 1 flat. After the potting material 5 is set, the vacuum is released and the assembled components can be turned right side up. Of course as can be appreciated, equivalent mechanical means can be employed in place of the vacuum to perform the hold down function.
- a masking of the silicon slabs 3 is performed by conventional photolithographic techniques and v-grooves 13 are formed by etching.
- v-grooves 13 are formed by etching.
- fibers 9 are then secured in the v-groove 13, in precise alignment with the light guiding region 11, by conventional adhesive to result in an optical fiber waveguide substrate having fibers pigtailed thereto which when light is transmitted through the device, little or no losses in transmission occurs as a result of the precise alignment between the light guiding region 11 and the optical fibers 9.
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US07/050,254 US4796975A (en) | 1987-05-14 | 1987-05-14 | Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US07/050,254 US4796975A (en) | 1987-05-14 | 1987-05-14 | Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto |
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US4796975A true US4796975A (en) | 1989-01-10 |
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US07/050,254 Expired - Fee Related US4796975A (en) | 1987-05-14 | 1987-05-14 | Method of aligning and attaching optical fibers to substrate optical waveguides and substrate optical waveguide having fibers attached thereto |
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Cited By (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4867524A (en) * | 1988-09-08 | 1989-09-19 | United Technologies Corporation | Metallic bond for mounting of optical fibers to integrated optical chips |
US4895425A (en) * | 1988-02-26 | 1990-01-23 | Nippon Telegraph And Telephone Corporation | Plug-in optical fiber connector |
US4904037A (en) * | 1987-08-28 | 1990-02-27 | Hitachi, Ltd. | Waveguide type optical device with thermal compensation layers |
US4930854A (en) * | 1989-03-03 | 1990-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Optical fiber-to-channel waveguide coupler |
US4953936A (en) * | 1988-09-20 | 1990-09-04 | Standard Elektrik Lorenz Aktiengesellschaft | Optical waveguide module with fiber coupling |
WO1991002271A1 (en) * | 1989-08-02 | 1991-02-21 | E.I. Du Pont De Nemours And Company | Opto-electronic component having a positioned optical fiber associated therewith |
FR2661514A1 (en) * | 1990-04-27 | 1991-10-31 | Alcatel Fibres Optiques | Device for butt-joining optical fibres on an integrated-optics substrate |
US5153935A (en) * | 1991-01-15 | 1992-10-06 | Siemens Aktiengesellschaft | Arrangement for converting an optical wave having a small spot width into a wave having a larger spot width |
US5175781A (en) * | 1991-10-11 | 1992-12-29 | United Technologies Corporation | Attaching optical fibers to integrated optic chips |
WO1993005416A1 (en) * | 1991-08-30 | 1993-03-18 | E.I. Du Pont De Nemours And Company | Opto-electronic component having positioned optical fiber associated therewith |
US5231683A (en) * | 1991-10-11 | 1993-07-27 | United Technologies Corporation | Attaching optical fibers to integrated optic chips |
US5243673A (en) * | 1989-08-02 | 1993-09-07 | E. I. Du Pont De Nemours And Company | Opto-electronic component having positioned optical fiber associated therewith |
US5280550A (en) * | 1991-06-26 | 1994-01-18 | Centre Suisse D'electronique Et De Microtechnique S.A. | Method of coupling an optical fiber to an optoelectronic component and connector devices obtained thereby |
US5359687A (en) * | 1993-08-23 | 1994-10-25 | Alliedsignal Inc. | Polymer microstructures which facilitate fiber optic to waveguide coupling |
EP0682276A1 (en) * | 1994-05-12 | 1995-11-15 | Fujitsu Limited | Waveguide-optical fiber connection structure and waveguide-optical fiber connection method |
US5553182A (en) * | 1995-02-14 | 1996-09-03 | Mcdonnell Douglas Corporation | Alignment fixture and associated method for controllably positioning on optical fiber |
US5555331A (en) * | 1994-05-10 | 1996-09-10 | Radiall | Device for connecting optical fibres to waveguides formed in a substrate |
US5602955A (en) * | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5606635A (en) * | 1995-06-07 | 1997-02-25 | Mcdonnell Douglas Corporation | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5881198A (en) * | 1995-06-07 | 1999-03-09 | Mcdonnell Douglas Corporation | Microactuator for precisely positioning an optical fiber and an associated method |
GB2334788A (en) * | 1997-12-16 | 1999-09-01 | Northern Telecom Ltd | Grooves formed in substrate after optical waveguide formation |
WO1999050890A1 (en) * | 1998-03-27 | 1999-10-07 | Trustees Of Princeton University | Method for making multilayer thin-film electronics |
US6266472B1 (en) | 1999-09-03 | 2001-07-24 | Corning Incorporated | Polymer gripping elements for optical fiber splicing |
US6324323B1 (en) * | 1999-01-07 | 2001-11-27 | Nu-Wave Photonics Inc. | Adhesive-free lens-attached optical fibers to optical waveguide packaging system |
US6393175B1 (en) | 2000-11-15 | 2002-05-21 | Optical Switch Corporation | Integrated fiber array optical switch and method of operation |
US6393174B1 (en) | 2000-11-15 | 2002-05-21 | Optical Switch Corporation | Integrated fiber array optical switch using double-pass propagation and method of operation |
WO2002044780A1 (en) * | 2000-11-30 | 2002-06-06 | Institut National D'optique | Grating assisted asymmetric directional coupler |
US20020196998A1 (en) * | 2000-11-16 | 2002-12-26 | Steinberg Dan A. | Optical assembly for coupling with integrated optical devices and method for making |
US6516111B1 (en) | 2000-11-15 | 2003-02-04 | Optical Switch Corporation | Cascaded integrated fiber array optical switch and method of operation |
US6516107B1 (en) | 2000-11-15 | 2003-02-04 | Optical Switch Corporation | 2×2 integrated fiber array optical switch and method of operation |
US6563814B2 (en) | 1998-04-07 | 2003-05-13 | Northern Telecom Limited | Method and apparatus for controlling the operation of a digital telephone switchboard |
US20030133183A1 (en) * | 2001-08-15 | 2003-07-17 | Photon-X, Inc. | Ultra-wide bandwidth optical amplifier |
US20030174943A1 (en) * | 2002-03-14 | 2003-09-18 | Caracci Stephen J. | Optical devices and methods of manufacture |
US20030175000A1 (en) * | 2002-03-14 | 2003-09-18 | Caracci Stephen J. | Fiber and lens grippers, optical devices and methods of manufacture |
WO2003089968A1 (en) * | 2002-04-19 | 2003-10-30 | Microsolutions, Inc. | Apparatus for aligning optical devices |
US6731841B1 (en) * | 2002-05-24 | 2004-05-04 | Alliance Fiber Optic Products, Inc. | Folded waveguide optical devices |
US20040114874A1 (en) * | 2002-12-12 | 2004-06-17 | Katsumi Bono | Optical fiber array devices and methods of manufacture |
US20040120682A1 (en) * | 2002-12-19 | 2004-06-24 | Bhagavatula Venkata A. | Securing optical elements and optical devices |
US20040165829A1 (en) * | 2003-02-25 | 2004-08-26 | Botet Alfredo D. | Passive alignment of optical fibers with optical elements |
US20050042796A1 (en) * | 1998-03-27 | 2005-02-24 | Sigurd Wagner | Method for making multilayer thin-film electronics |
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Cited By (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4904037A (en) * | 1987-08-28 | 1990-02-27 | Hitachi, Ltd. | Waveguide type optical device with thermal compensation layers |
US4895425A (en) * | 1988-02-26 | 1990-01-23 | Nippon Telegraph And Telephone Corporation | Plug-in optical fiber connector |
US4867524A (en) * | 1988-09-08 | 1989-09-19 | United Technologies Corporation | Metallic bond for mounting of optical fibers to integrated optical chips |
US4953936A (en) * | 1988-09-20 | 1990-09-04 | Standard Elektrik Lorenz Aktiengesellschaft | Optical waveguide module with fiber coupling |
US5007700A (en) * | 1989-03-03 | 1991-04-16 | The United States Of America As Represented By The Secretary Of The Navy | Edge-emitting diode-to-optical fiber coupling technique |
US4930854A (en) * | 1989-03-03 | 1990-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Optical fiber-to-channel waveguide coupler |
WO1991002271A1 (en) * | 1989-08-02 | 1991-02-21 | E.I. Du Pont De Nemours And Company | Opto-electronic component having a positioned optical fiber associated therewith |
US5243673A (en) * | 1989-08-02 | 1993-09-07 | E. I. Du Pont De Nemours And Company | Opto-electronic component having positioned optical fiber associated therewith |
FR2661514A1 (en) * | 1990-04-27 | 1991-10-31 | Alcatel Fibres Optiques | Device for butt-joining optical fibres on an integrated-optics substrate |
US5153935A (en) * | 1991-01-15 | 1992-10-06 | Siemens Aktiengesellschaft | Arrangement for converting an optical wave having a small spot width into a wave having a larger spot width |
US5280550A (en) * | 1991-06-26 | 1994-01-18 | Centre Suisse D'electronique Et De Microtechnique S.A. | Method of coupling an optical fiber to an optoelectronic component and connector devices obtained thereby |
WO1993005416A1 (en) * | 1991-08-30 | 1993-03-18 | E.I. Du Pont De Nemours And Company | Opto-electronic component having positioned optical fiber associated therewith |
US5175781A (en) * | 1991-10-11 | 1992-12-29 | United Technologies Corporation | Attaching optical fibers to integrated optic chips |
US5231683A (en) * | 1991-10-11 | 1993-07-27 | United Technologies Corporation | Attaching optical fibers to integrated optic chips |
US5359687A (en) * | 1993-08-23 | 1994-10-25 | Alliedsignal Inc. | Polymer microstructures which facilitate fiber optic to waveguide coupling |
US5555331A (en) * | 1994-05-10 | 1996-09-10 | Radiall | Device for connecting optical fibres to waveguides formed in a substrate |
US5784509A (en) * | 1994-05-12 | 1998-07-21 | Fujitsu Limited | Waveguide-optical fiber connection structure and waveguide-optical fiber connection method |
EP0940699A1 (en) * | 1994-05-12 | 1999-09-08 | Fujitsu Limited | Waveguide-optical fiber connection structure and waveguide-optical fiber connection method, waveguide substrate for use for waveguide-optical fiber connection and method of producing waveguide substrate as well as optical fiber with fiber substrate for use for waveguide-optical fiber connection |
US5557695A (en) * | 1994-05-12 | 1996-09-17 | Fujitsu Limited | Waveguide-optical fiber connection structure and waveguide-optical fiber connection method |
EP0682276A1 (en) * | 1994-05-12 | 1995-11-15 | Fujitsu Limited | Waveguide-optical fiber connection structure and waveguide-optical fiber connection method |
US5553182A (en) * | 1995-02-14 | 1996-09-03 | Mcdonnell Douglas Corporation | Alignment fixture and associated method for controllably positioning on optical fiber |
US5602955A (en) * | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5606635A (en) * | 1995-06-07 | 1997-02-25 | Mcdonnell Douglas Corporation | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5881198A (en) * | 1995-06-07 | 1999-03-09 | Mcdonnell Douglas Corporation | Microactuator for precisely positioning an optical fiber and an associated method |
GB2334788A (en) * | 1997-12-16 | 1999-09-01 | Northern Telecom Ltd | Grooves formed in substrate after optical waveguide formation |
WO1999050890A1 (en) * | 1998-03-27 | 1999-10-07 | Trustees Of Princeton University | Method for making multilayer thin-film electronics |
US7115983B2 (en) | 1998-03-27 | 2006-10-03 | The Trustees Of Princeton University | Multilayer, thin-film electronic devices |
US6893896B1 (en) | 1998-03-27 | 2005-05-17 | The Trustees Of Princeton University | Method for making multilayer thin-film electronics |
US20050042796A1 (en) * | 1998-03-27 | 2005-02-24 | Sigurd Wagner | Method for making multilayer thin-film electronics |
US6563814B2 (en) | 1998-04-07 | 2003-05-13 | Northern Telecom Limited | Method and apparatus for controlling the operation of a digital telephone switchboard |
US6324323B1 (en) * | 1999-01-07 | 2001-11-27 | Nu-Wave Photonics Inc. | Adhesive-free lens-attached optical fibers to optical waveguide packaging system |
US6266472B1 (en) | 1999-09-03 | 2001-07-24 | Corning Incorporated | Polymer gripping elements for optical fiber splicing |
US6516111B1 (en) | 2000-11-15 | 2003-02-04 | Optical Switch Corporation | Cascaded integrated fiber array optical switch and method of operation |
US6516107B1 (en) | 2000-11-15 | 2003-02-04 | Optical Switch Corporation | 2×2 integrated fiber array optical switch and method of operation |
US6393175B1 (en) | 2000-11-15 | 2002-05-21 | Optical Switch Corporation | Integrated fiber array optical switch and method of operation |
US6393174B1 (en) | 2000-11-15 | 2002-05-21 | Optical Switch Corporation | Integrated fiber array optical switch using double-pass propagation and method of operation |
US6839474B2 (en) | 2000-11-16 | 2005-01-04 | Shipley Company, L.L.C. | Optical assembly for coupling with integrated optical devices and method for making |
US20020196998A1 (en) * | 2000-11-16 | 2002-12-26 | Steinberg Dan A. | Optical assembly for coupling with integrated optical devices and method for making |
US6510266B2 (en) | 2000-11-30 | 2003-01-21 | Institut National D'optique | Tunable optoelectronic frequency filter |
WO2002044780A1 (en) * | 2000-11-30 | 2002-06-06 | Institut National D'optique | Grating assisted asymmetric directional coupler |
US20030133183A1 (en) * | 2001-08-15 | 2003-07-17 | Photon-X, Inc. | Ultra-wide bandwidth optical amplifier |
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