|
| US5224235 | 28 Jun 1991 | 6 Jul 1993 | Digital Equipment Corporation | Electronic component cleaning apparatus |
| US5531861 | 17 Jan 1995 | 2 Jul 1996 | Motorola, Inc. | Chemical-mechanical-polishing pad cleaning process for use during the fabrication of semiconductor devices |
| US5603892 | 9 Jun 1994 | 18 Feb 1997 | Fujitsu Limited | System for maintaining a controlled atmosphere in an electronic circuit package |
| US5690544 | 28 Mar 1996 | 25 Nov 1997 | NEC Corporation | Wafer polishing apparatus having physical cleaning means to remove particles from polishing pad |
| US5735965 | 19 Dec 1995 | 7 Apr 1998 | Reynolds Wheels International Ltd. | Method for the removal of paint from wheel hubs |
| US5911259 | 8 Jan 1998 | 15 Jun 1999 | Reynolds Wheels International Ltd. | Equipment for the removal of paint from wheel hubs |
| US6098640 | 8 Apr 1997 | 8 Aug 2000 | Advanced Micro Devices, Inc. | Pressurized cleaning of developer dispenser nozzles |
| US6395097 | 16 Dec 1999 | 28 May 2002 | LSI Logic Corporation | Method and apparatus for cleaning and removing flux from an electronic component package |
| US6427929 | 19 Jun 2000 | 6 Aug 2002 | Advanced Micro Devices, Inc. | Pressurized cleaning of developer dispenser nozzles |
| US6779239 | 20 Sep 2002 | 24 Aug 2004 | Siemens Aktiengesellschaft | Method for removing a seal |
| US8062409 | 22 Jan 2009 | 22 Nov 2011 | Dürr Ecoclean GmhB | Cleaning device and method for cleaning a workpiece |
