US3662498A - Redressing of laps in lapping or honing machines - Google Patents

Redressing of laps in lapping or honing machines Download PDF

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Publication number
US3662498A
US3662498A US853143A US3662498DA US3662498A US 3662498 A US3662498 A US 3662498A US 853143 A US853143 A US 853143A US 3662498D A US3662498D A US 3662498DA US 3662498 A US3662498 A US 3662498A
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Prior art keywords
lap
rings
abrading
laps
ring
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Expired - Lifetime
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US853143A
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Willi Caspers
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PETER WOLTERS KRATZENFABRIK
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PETER WOLTERS KRATZENFABRIK
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Priority claimed from DE19681797055 external-priority patent/DE1797055B2/en
Priority claimed from DE19681777055 external-priority patent/DE1777055C3/en
Application filed by PETER WOLTERS KRATZENFABRIK filed Critical PETER WOLTERS KRATZENFABRIK
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools

Abstract

The annular working surfaces of cast-iron laps in a two-lap lapping or honing machine are redressed by three or more redressing units each having an abrading ring surrounded by and secured to a gear which constitutes the planet pinion of a planetary transmission. The redressing units can be used interchangeably with gear-shaped workholders and their rings remove material from the working surfaces when the gears are rotated about their respective axes while the laps rotate in opposite directions.

Description

United States Patent Caspers 14s1 May 16, 1972 [72] Inventor:
[73] Assignee:
Willi Caspers, Mettmann, Germany Peter Walters Kratzenfabrilt und Maschinenfabrilt, Mettmann am Rhineland, Germany [22] Filed: Aug. 26, 1969 [21] Appl.No.: 853,143
2,772,521 12/1956 Voytech ..51/129 3,089,292 5/1963 Hunt ..5 III 18 3,110,988 11/1963 Boettcher. .....51/131 2,709,321 5/1955 lndge v51/118 1,634,745 7/1927 Fraser ..51/117 X 2,688,215 9/1954 Roshong .51/129 Primary ExaminerHaro1d D. Whitehead Attorney-Michael S. Striker [5 7] ABSTRACT The annular working surfaces of cast-iron laps in a two-lap 1 Fm'elgn Application Data lapping or honing machine are redressed by three or more Aug 29 W68 Germany "p '7 97 055.7 redressing units each having an abrading ring surrounded by and secured to a gear which constitutes the plane! pinion of a 52 us. c1. ..s1/11s, 125/11 DF Planetary transmissim- The redressing can be used [51] 824', 5/00, B24b 53/02 terchangeably with gear-shaped workhoiders and their rings [58] Field 0 Search "125/1 51/1 1 l 1 l7 1 18 129 remove material from the working surfaces when the gears are 5 i 3 rotated about their respective axes while the laps rotate in opposite directions. [5 6] Rderenc cued 3 Claims, 4 Drawing Figures UNITED STATES PATENTS 2,883,802 4/1959 Katzke 51/131 X I I) I6 I 1 1 I [0 l2 1 1 17 L I 1.1:
I j 2/ I I I9 7 PATENTEUMAY 16 m2 SLEU 2 BF 3 lawn/0r.-
PATENTEBKH 16 m2 SHEET 3 UF 3 In yen for 3 M4 04 M54 x REDRESSING F LAPS IN LAPPING OR I'IONING MACHINES BACKGROUND OF THE INVENTION The present invention relates to lapping or honing machines in general, and more particularly to improvements in preparation and redressing of laps in two-lap lapping or honing machines. Still more particularly, the invention relates to improvements in devices which can be utilized for redressing of flat, concave, convex and/or otherwise configurated working surfaces of laps consisting of cast-iron or the like and serving for forming lapping or equalizing lapping of flat, rounded and/or other surfaces of workpieces.
It is known to redress the working surfaces of cast-iron laps in lapping or honing machines by resorting to turning or analogous tools including diamonds, steel bits or the like. It is also known to redress by lapping the laps, i.e., by offsetting the upper spindle from the lower and by driving one of the laps while its working surface engages the working surface of the other lap which is free to rotate. A drawback of the first method is that the redressing consumes much time and that, subsequent to material removal by means of a bit or diamond, the thus treated working surfaces must be subjected to a further treatment (such as superfinishing) in order to remove tool marks which develop during turning. Furthermore, tuming of the upper lap (which is normally mounted in such a way that it can perform wobbling movements) necessitates the provision of special bearings which hold it against all other but rotary movements during removal of material from its working surface.
Lapping of the laps can be resorted to only when the working surfaces should be flat and when the wear on the working surfaces prior to redressing is such that one surface resembles a funnel and the other surface resembles a roof or cone.
SUMMARY OF THE INVENTION An object of the invention is to provide a two-lap lapping or honing machine with a novel redressing or preparing device which can impart to the working surfaces of the laps a desirable flat, concave or convex configuration and which is capable of completing the operation within a short period of time and in such a way that the laps are ready for renewed use without any additional treatment of their working surfaces.
Another object of the invention is to provide a lapping or honing machine wherein the redressing device comprises certain parts which can serve other useful purposes, particularly to engage and to move the workholders in the course of a lapping or honing operation.
A further object of the invention is to provide a device which can redress the laps irrespective of the nature of wear to which the working surfaces were subjected during the preceding use of the machine.
The invention is embodied in a lapping or honing machine of the type wherein two laps are rotatable with reference to each other and include adjacent but spaced preferably annular working surfaces. The device for preparing and redressing the working surfaces of the laps comprises at least one rotary redressing unit (but preferably at least three redressing units) having a pair of material removing surfaces and being insertable between the laps so that each of its surfaces engages one of the working surfaces, and drive means for rotating the redressing unit about its own axis while the laps rotate with reference to each other so that the surfaces of the redressing unit remove material from the working surfaces while the unit rotates.
The redressing unit preferably includes a gear which constitutes the planet pinion of a planetary transmission having two additional gears which form part of the drive means. One of the additional gears is preferably stationary and the other additional gear is preferably driven by a reversible variablespeed motor to constitute a sun gear which causes the gear of the redressing unit to rotate about its own axis and to simultaneously orbit about the common axis of the laps.
The redressing unit can be used interchangeably with gearshaped workholders for workpieces, i.e., the drive means may fonn that part of a lapping or honing machine which is provided mainly for the purpose of rotating the workholders.
The novel features which are considered as characteristic of the invention are set forth in particular in the appended claims. The improved machine itself, however, both as to its construction and its mode of operation, together with additional features and advantages thereof, will be best understood upon perusal of the following detailed description of certain specific embodiments with reference to the accompanying drawing.
BRIEF DESCRIPTION OF THE DRAWING FIG. I is a schematic vertical sectional view of a vertical lapping machine which embodies the invention;
FIG. 2 is an enlarged horizontal sectional view taken along the line [1-]! of FIG. I and showing three gear-shaped workholders;
FIG. 3 is a similar horizontal sectional view but showing three redressing units; and
FIG. 4 is a vertical sectional view taken along the line IV- IV of FIG. 3.
DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring first to FIG. 1, there is shown a vertical lapping machine with annular cast-iron laps l and II. The lower lap I is attached to a coaxial disk-shaped carrier 2 which is rigid with a hollow vertical shaft 3. The latter is connected with a pulley 4 which is driven by a pulley 6 by way of an endless belt 5. The pulley 6 is driven by a transmission 7 which receives torque from the output member of an electric motor 8 mounted in the frame 22 of the lapping machine. The transmission 7 comprises two mating gears.
The upper lap 11 is affixed to a coaxial disk-shaped carrier I2 which is connected with a vertical shaft 13. The latter is driven by a pulley 14 which is rotated by a pulley 16 by way of an endless belt 15. The pulley I6 is driven by a transmission 17 which also receives torque from the motor 8. The transmission 17 includes three mating gears so that the shafts 3, l3 (and hence the laps 1, II) rotate in opposite directions when the circuit of the motor 8 is completed.
A vertical drive shaft 9 extends axially through the hollow shaft 3 and its lower end carries a pulley driven by a second pulley on the output shaft of a reversible variable-speed electric motor 18. The two pulleys are connected to each other by means of an endlex belt 10. Theupper end of the shaft 9 carries a disk 19 which is provided with an annulus of equidistant upwardly extending vertical pins 20 (see also FIG. 2) so that the parts 19, 20 together form a gear which is the sun gear of a planetary transmission further including a stationary ring gear having a ring 21 fixedly mounted in the frame 22 and an annulus of pins 23 which extend upwardly from the ring 21. The distance between the pins 23 is the same as that between the pins 20. The ring 21 surrounds the lower lap I and the diameter of the disk I9 is less than the internal diameters of annular working surfaces on the laps I and l I.
FIG. 2 shows several workpieces 24 which can be treated by the working surfaces of the laps 1 and 11 when the machine of FIG. 1 is in use. These workpieces are inserted into holes 25 provided in gear-shaped workholders or adaptors 26 whose teeth 27 mate with the pins 20 and 23. Thus, the workholders 26 constitute the planet pinions of the planetary transmission and are set in rotary motion about their own axes as well as in orbital motion about the axis of the shaft 9 when the motor 8 drives the shafts 3, 13 while the motor 18 drives the shaft 9. In FIG. 2, the workpieces 24 are of prismatic shape and the configuration of holes 25 in the workholders 26 is of similar out line.
When the motor 8 is on to rotate the laps 1, II in opposite directions and the workholders 26 are located between the two laps, the motor 18 is started to rotate the shaft 9 and the sun gear 19, 20. As a rule, the laps 1, 11 are rotated at the same speed or at substantially identical speeds. The rotating sun gear 19, 20 causes the workholders 26 to rotate about their own axes with reference to the stationary ring gear 21, 23 whereby the workholders 26 travel slowly about the sun gear and move the workpieces 24 with reference to the frame 22.
In accordance with the present invention, the redressing of laps I, I1 is carried out in a manner as shown in FIGS. 3 and 4. The workholders 26 are then replaced by at least three redressing units having rings or gears 28 which are provided with external teeth 29 mating with the pins 23 on the fixed ring 21 and with the pins 20 of the rotary disk 19. Thus, the rings 28 can be rotated and orbited in the same way as the workholders 26. Each of these rings accommodates a redressing or abrading wheel or ring 30 which is non-rotatably secured thereto by one or more keys 3 l or similar coupling means. The two material removing surfaces of each abrading ring 30 abut against the adjacent working surfaces of the laps l and ll, i.e., all of the rings 30 have the same axial length. As shown in FIG. 4, the height of each ring 30 exceeds the height of the corresponding ring gear 28. Also, the internal diameters of the rings 30 exceed at least slightly the width (as seen in radial direction) of working surfaces on the laps 1 and 11. H6. 4 shows clearly that the space surrounded by the cylindrical internal surface of each ring 30 extends radially inwardly as well as outwardly beyond the cylindrical internal and external surfaces of the laps l and 11.
The rotational speed and/or the direction of rotation of the abrading rings 30 are preferably variable (by employing a reversible motor 18) to thereby regulate the removal of material from the working surfaces of the laps l and ll. Such material removal in turn depends on the nature of wear on the working surfaces of the laps. The redressing operation is carried out in such a way that the relative speed between the abrading rings 30 and the lap 1 or 11 is relatively high when the rings 30 engage those portions of the working surfaces from which they should remove substantial quantities of material. When the machine is used for lapping of workpieces of the type shown in F IG. 2, the wear on the working surfaces of the laps 1, I1 is normally such that a portion of the surface on the lap l which was subjected to substantial wear is located opposite a portion of the surface on the lap 11 which was subjected to lesser wear, and vice versa. Analogously, when the outer zone of the working surface on the lap l or I] was subjected to greater wear, the radially innermost zone of the working surface on the lap II or 1 was subjected to lesser wear. Since the laps i, ll rotate in opposite directions when their working surfaces undergo a redressing treatment. the relative speed between the abrading rings 30 and one of the laps I, 11 is the sum of the speeds of a ring 30 and the one lap whereas the relative speed between the rings 30 and the other lap equals the difference of the speeds of a ring 30 and the other lap; this is obvious since the laps l, 11 rotate in opposite directions. The rate at which the abrading rings 30 remove material from the working surfaces depends on such relative speed which, in turn, can be readily varied and maintained by changing the direction of rotation and/or the speed of the motor 18. In this way, the operator can treat the working surfaces to a desired finish in a continuous operation without necessitating any additional treatment which is essential when the laps are redressed in accordance with certain presently known procedures. The just described mode of redressing can be used to provide the laps 1, H with flat, concave or convex working surfaces. For example, one of the working surfaces can be slightly concave and the other working surface can be of slightly convex outline.
lt will be seen that the parts 9, 10, 18-20, 21 and 23 together constitute a drive of the redressing device which further includes the redressing units 28-31 and that such drive serves the additional (main) purpose of rotating the workholders 26 which are used interchangeably with the redressing units. Though FIG. 3 shows only three redressing units, it is clear that the machine may em loy four or even more such units in order to insure rapid an accurate redressing of working surfaces on the laps.
Without further analysis, the foregoing will so fully reveal the gist of the present invention that others can, by applying current knowledge, readily adapt it for various applications without omitting features which fairly constitute essential characteristics of the generic and specific aspects of my contribution to the art.
What is claimed as new and desired to be protected by Letters Patent is set forth in the appended 1. In a lapping machine, a combination comprising, two lap plates rotatable relative to each other about a common axis and having annular lap surfaces axially spaced from and parallel to each other; at least three abrading rings having opposed abrading surfaces and arranged between and contacting said lap surfaces, the outer diameter of each of said rings being at least equal to the width of said lap surfaces; a plurality of ringshaped gears, one for each of said abrading rings, each surrounding a respective ring and being fixed thereto; and gear means meshing with said ring-shaped gears for driving the latter and said abrading rings fixed thereto about their axes so as to dress said lap surfaces while said lap plates rotate.
2. A combination as defined in claim I, wherein said gear means comprise a first additional gear surrounded by said ring-shaped gears and a second additional gear surrounding said ring-shaped gears, one of said additional gears being ar ranged to rotate with reference to the other additional gear.
3. in a lapping machine, a combination comprising two lap plates rotatable in opposite directions relative to each other about a common axis and having annular lap surfaces axially spaced from and substantially parallel to each other; at least three abrading rings having opposed abrading surfaces and ar ranged between and contacting said lap surfaces, the outer diameter of each of said rings being at least equal to the width of said lap surfaces; a plurality of ring-shaped gears, one for each of said abrading rings, each surrounding a respective ring and being fixed thereto; gear means meshing with said ringshaped gears for driving the latter and said abrading rings fixed thereto about their axes so as to dress said lap surfaces while said lap plates rotate in opposite directions; and reversible drive means connected to said gear means for rotating said abrading rings either in the direction of rotation of one or the other of said lap plates.

Claims (3)

1. In a lapping machine, a combination comprising, two lap plates rotatable relative to each other about a common axis and having annular lap surfaces axially spaced from and parallel to each other; at least three abrading rings having opposed abrading surfaces and arranged between and contacting said lap surfaces, the outer diameter of each of said rings being at least equal to the width of said lap surfaces; a plurality of ring-shaped gears, one for each of said abrading rings, each surrounding a respective ring and being fixed thereto; and gear means meshing with said ring-shaped gears for driving the latter and said abrading rings fixed thereto about their axes so as to dress said lap surfaces while said lap plates rotate.
2. A combination as defined in claim 1, wherein said gear means comprise a first additional gear surrounded by said ring-shaped gears and a second additional gear surrounding said ring-shaped gears, one of said additional gears being arranged to rotate with reference to the other additional gear.
3. In a lapping machine, a combination comprising two lap plates rotatable in opposite directions relative to each other about a common axis and having annular lap surfaces axially spaced from and substantially parallel to each other; at least three abrading rings having opposed abrading surfaces and arranged between and contacting said lap surfaces, the outer diameter of each of said rings being at least equal to the width of said lap surfaces; a plurality of ring-shaped gears, one for each of said abrading rings, each surrounding a respective ring and being fixed thereto; gear means meshing with said ring-shaped gears for driving the latter and said abrading rings fixed thereto about their axes so as to dress said lap surfaces while said lap plates rotate in opposite directions; and reversible drive means connected to said gear means for rotating said abrading rings either in the direction of rotation of one or the otHer of said lap plates.
US853143A 1968-08-29 1969-08-26 Redressing of laps in lapping or honing machines Expired - Lifetime US3662498A (en)

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Application Number Priority Date Filing Date Title
DE19681797055 DE1797055B2 (en) 1967-08-16 1968-08-29 HEADLIGHT FOR ROAD VEHICLES
DE19681777055 DE1777055C3 (en) 1968-08-29 1968-08-29 Abrichlring for use on two-disc lapping and / or honing machines

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890114A (en) * 1972-06-15 1975-06-17 Wolters Peter Double-disc flat-lapping or honing machine including a free-wheeling drive connection
US4157637A (en) * 1977-08-30 1979-06-12 Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana Planetary-type lapping machine for lapping a group of workpieces
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
US4720938A (en) * 1986-07-31 1988-01-26 General Signal Corp. Dressing fixture
US5697832A (en) * 1995-10-18 1997-12-16 Cerion Technologies, Inc. Variable speed bi-directional planetary grinding or polishing apparatus
WO1998055262A1 (en) * 1997-06-03 1998-12-10 Speedfam-Ipec Corporation Methods and apparatus for conditioning grinding stones
US6030280A (en) * 1997-07-23 2000-02-29 Speedfam Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6210259B1 (en) * 1999-11-08 2001-04-03 Vibro Finish Tech Inc. Method and apparatus for lapping of workpieces
US6338672B1 (en) * 1998-12-21 2002-01-15 White Hydraulics, Inc. Dressing wheel system
US20090258581A1 (en) * 2008-04-09 2009-10-15 Seagate Technology Llc Double concentric solid wheel diamond dressers
US20110223838A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Fixed-spindle and floating-platen abrasive system using spherical mounts
US20110223835A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Three-point spindle-supported floating abrasive platen
US20110223836A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Three-point fixed-spindle floating-platen abrasive system
US20110223837A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Fixed-spindle floating-platen workpiece loader apparatus
US20130084783A1 (en) * 2011-09-30 2013-04-04 Sony Corporation Grinding apparatus and grinding method
US20150165585A1 (en) * 2012-06-25 2015-06-18 Sumco Corporation Method and apparatus for polishing work
US20160199964A1 (en) * 2015-01-14 2016-07-14 Siltronic Ag Method for dressing polishing pads

Citations (7)

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US1634745A (en) * 1924-10-08 1927-07-05 Warren F Fraser Lapping machine and method of truing the lapping elements
US2688215A (en) * 1951-05-04 1954-09-07 Crane Packing Co Double lap for lapping parallel faces
US2709321A (en) * 1951-03-14 1955-05-31 Norton Co Lapping machine
US2772521A (en) * 1953-12-18 1956-12-04 Charles F Voytech Method and apparatus for automatically conditioning a lap
US2883802A (en) * 1956-09-24 1959-04-28 Crane Packing Co Method of and apparatus for lapping shoulders
US3089292A (en) * 1961-04-14 1963-05-14 Norton Co Lapping machine
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1634745A (en) * 1924-10-08 1927-07-05 Warren F Fraser Lapping machine and method of truing the lapping elements
US2709321A (en) * 1951-03-14 1955-05-31 Norton Co Lapping machine
US2688215A (en) * 1951-05-04 1954-09-07 Crane Packing Co Double lap for lapping parallel faces
US2772521A (en) * 1953-12-18 1956-12-04 Charles F Voytech Method and apparatus for automatically conditioning a lap
US2883802A (en) * 1956-09-24 1959-04-28 Crane Packing Co Method of and apparatus for lapping shoulders
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine
US3089292A (en) * 1961-04-14 1963-05-14 Norton Co Lapping machine

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890114A (en) * 1972-06-15 1975-06-17 Wolters Peter Double-disc flat-lapping or honing machine including a free-wheeling drive connection
US4157637A (en) * 1977-08-30 1979-06-12 Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana Planetary-type lapping machine for lapping a group of workpieces
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
US4720938A (en) * 1986-07-31 1988-01-26 General Signal Corp. Dressing fixture
US5697832A (en) * 1995-10-18 1997-12-16 Cerion Technologies, Inc. Variable speed bi-directional planetary grinding or polishing apparatus
US5938506A (en) * 1997-06-03 1999-08-17 Speedfam-Ipec Corporation Methods and apparatus for conditioning grinding stones
WO1998055262A1 (en) * 1997-06-03 1998-12-10 Speedfam-Ipec Corporation Methods and apparatus for conditioning grinding stones
GB2341127A (en) * 1997-06-03 2000-03-08 Speedfam Ipec Corp Methods and apparatus for conditioning grinding stones
US6030280A (en) * 1997-07-23 2000-02-29 Speedfam Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6338672B1 (en) * 1998-12-21 2002-01-15 White Hydraulics, Inc. Dressing wheel system
US7101264B2 (en) 1998-12-21 2006-09-05 White Drive Products, Inc. Dressing wheel system
US6210259B1 (en) * 1999-11-08 2001-04-03 Vibro Finish Tech Inc. Method and apparatus for lapping of workpieces
US20090258581A1 (en) * 2008-04-09 2009-10-15 Seagate Technology Llc Double concentric solid wheel diamond dressers
US8317573B2 (en) * 2008-04-09 2012-11-27 Seagate Technology Llc Double annular abrasive element dressers
US20110223835A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Three-point spindle-supported floating abrasive platen
US8602842B2 (en) 2010-03-12 2013-12-10 Wayne O. Duescher Three-point fixed-spindle floating-platen abrasive system
US20110223837A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Fixed-spindle floating-platen workpiece loader apparatus
US20110223838A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Fixed-spindle and floating-platen abrasive system using spherical mounts
US8328600B2 (en) 2010-03-12 2012-12-11 Duescher Wayne O Workpiece spindles supported floating abrasive platen
US8740668B2 (en) 2010-03-12 2014-06-03 Wayne O. Duescher Three-point spindle-supported floating abrasive platen
US8500515B2 (en) 2010-03-12 2013-08-06 Wayne O. Duescher Fixed-spindle and floating-platen abrasive system using spherical mounts
US20110223836A1 (en) * 2010-03-12 2011-09-15 Duescher Wayne O Three-point fixed-spindle floating-platen abrasive system
US8647171B2 (en) 2010-03-12 2014-02-11 Wayne O. Duescher Fixed-spindle floating-platen workpiece loader apparatus
US20130084783A1 (en) * 2011-09-30 2013-04-04 Sony Corporation Grinding apparatus and grinding method
US20150165585A1 (en) * 2012-06-25 2015-06-18 Sumco Corporation Method and apparatus for polishing work
US9289876B2 (en) * 2012-06-25 2016-03-22 Sumco Corporation Method and apparatus for polishing work
US20160199964A1 (en) * 2015-01-14 2016-07-14 Siltronic Ag Method for dressing polishing pads
US11148250B2 (en) * 2015-01-14 2021-10-19 Siltronic Ag Method for dressing polishing pads

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