|
| US4042850 | 17 Mar 1976 | 16 Aug 1977 | Fusion Systems Corporation | Microwave generated radiation apparatus |
| US4207452 | 19 Apr 1978 | 10 Jun 1980 | Tokyo Shibaura Electric Co., Ltd. | Activated gas generator |
| US4292344 | 23 Feb 1979 | 29 Sep 1981 | Union Carbide Corporation | Fluidized bed heating process and apparatus |
| US4877999 | 7 Apr 1988 | 31 Oct 1989 | Anton Paar KG | Method and apparatus for producing an hf-induced noble-gas plasma |
| US4883570 | 8 Jun 1987 | 28 Nov 1989 | Research-Cottrell, Inc. | Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves |
| US5470541 | 28 Dec 1993 | 28 Nov 1995 | E. I. Du Pont de Nemours and Company | Apparatus and process for the preparation of hydrogen cyanide |
| US5517085 | 25 Oct 1993 | 14 May 1996 | Jurgen Engemann | Apparatus including ring-shaped resonators for producing microwave plasmas |
| US5798137 | 7 Jun 1995 | 25 Aug 1998 | Advanced Silicon Materials, Inc. | Method for silicon deposition |
| US5810934 | 7 Jun 1995 | 22 Sep 1998 | Advanced Silicon Materials, Inc. | Silicon deposition reactor apparatus |
| US5843236 | 15 Sep 1995 | 1 Dec 1998 | Daihen Corporation | Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber |
| US5874705 | 8 Apr 1997 | 23 Feb 1999 | EA Technology Limited | Method of and apparatus for microwave-plasma production |
| US6049170 | 30 Oct 1997 | 11 Apr 2000 | Matsushita Electric Industrial Co., Ltd. | High frequency discharge energy supply means and high frequency electrodeless discharge lamp device |
| US6057645 | 31 Dec 1997 | 2 May 2000 | Eaton Corporation | Plasma discharge device with dynamic tuning by a movable microwave trap |
| US6193878 | 26 Nov 1997 | 27 Feb 2001 | ZPM, Inc. | Multi-modal method and apparatus for treating a solution |
| US6204603 | 22 Feb 1999 | 20 Mar 2001 | Ralf Spitzl | Coaxial resonator microwave plasma generator |
| US6362449 | 12 Aug 1998 | 26 Mar 2002 | Massachusetts Institute of Technology | Very high power microwave-induced plasma |
| US6537493 | 6 Sep 2000 | 25 Mar 2003 | Microlizer Ltd. | Sterilization apparatus |
| US6657171 | 20 Nov 2002 | 2 Dec 2003 | Maytag Corporation | Toroidal waveguide for a microwave cooking appliance |
| US6870123 | 26 Mar 2001 | 22 Mar 2005 | Canon Kabushiki Kaisha | Microwave applicator, plasma processing apparatus having same, and plasma processing method |
