|
| US3998718 | 18 Feb 1976 | 21 Dec 1976 | Bell Telephone Laboratories, Incorporated | Ion milling apparatus |
| US4038171 | 31 Mar 1976 | 26 Jul 1977 | Battelle Memorial Institute | Supported plasma sputtering apparatus for high deposition rate over large area |
| US4138284 | 9 Jan 1978 | 6 Feb 1979 | PPG Industries, Inc. | Method of forming graded shade band on substrate |
| US4401546 | 25 Mar 1982 | 30 Aug 1983 | Nihon Shinku Gijutsu Kabushiki Kaisha | Ferromagnetic high speed sputtering apparatus |
| US4491509 | 9 Mar 1984 | 1 Jan 1985 | AT&T Technologies, Inc. | Methods of and apparatus for sputtering material onto a substrate |
| US5458754 | 15 Apr 1994 | 17 Oct 1995 | Multi-Arc Scientific Coatings | Plasma enhancement apparatus and method for physical vapor deposition |
| US6139964 | 6 Jun 1995 | 31 Oct 2000 | Multi-Arc Inc. | Plasma enhancement apparatus and method for physical vapor deposition |
| US6168690 | 29 Sep 1997 | 2 Jan 2001 | Lam Research Corporation | Methods and apparatus for physical vapor deposition |
