|
| US5123218 | 23 Jul 1991 | 23 Jun 1992 | Speedfam Corporation | Circumferential pattern finishing method |
| US5187901 | 2 Feb 1990 | 23 Feb 1993 | Speedfam Corporation | Circumferential pattern finishing machine |
| US5224304 | 7 Nov 1991 | 6 Jul 1993 | Speedfam Corporation | Automated free abrasive machine for one side piece part machining |
| US5398459 | 24 Nov 1993 | 21 Mar 1995 | Kabushiki Kaisha Toshiba
Ebara Corporation | Method and apparatus for polishing a workpiece |
| US5607341 | 8 Aug 1994 | 4 Mar 1997 | | Method and structure for polishing a wafer during manufacture of integrated circuits |
| US5702290 | 8 Apr 1996 | 30 Dec 1997 | | Block for polishing a wafer during manufacture of integrated circuits |
| US5733175 | 25 Apr 1994 | 31 Mar 1998 | | Polishing a workpiece using equal velocity at all points overlapping a polisher |
| US5836807 | 25 Apr 1996 | 17 Nov 1998 | | Method and structure for polishing a wafer during manufacture of integrated circuits |
