US20160238839A1 - Laser processing device - Google Patents
Laser processing device Download PDFInfo
- Publication number
- US20160238839A1 US20160238839A1 US15/139,460 US201615139460A US2016238839A1 US 20160238839 A1 US20160238839 A1 US 20160238839A1 US 201615139460 A US201615139460 A US 201615139460A US 2016238839 A1 US2016238839 A1 US 2016238839A1
- Authority
- US
- United States
- Prior art keywords
- mirror
- laser light
- laser
- processed
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/121—Coherent waves, e.g. laser beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0892—Controlling the laser beam travel length
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
Definitions
- the present invention relates to a laser processing device for processing an object to be processed by condensing and radiating laser light emitted from a laser oscillator to the object to be processed.
- Patent Literature 1 a laser processing device for processing an object to be processed by using laser light emitted from a laser oscillator has been well known (see, for example, Patent Literature 1).
- FIG. 7 is a block diagram schematically illustrating an optical path configuration of a related-art laser processing device described in Patent Literature 1.
- laser light L generated from a laser oscillator 1 is transmitted to a processing lens (not shown) in a processing head 4 via a transmission optical system to be condensed and radiated to an object to be processed (not shown) placed on a processing table 2 .
- the processing table 2 and the processing head 4 include moving means 5 capable of moving each of the processing table 2 and the processing head 4 in at least one axial direction.
- the moving means 5 can move a relative position between the laser light L and the object to be processed in a desired direction and can locate the relative position at a desired position.
- the moving means 5 is configured to move the processing table 2 in an X axis direction and to move the processing head 4 in a Y axis direction.
- the transmission optical system for the laser light L includes a reflective beam expander mechanism 106 that the laser light L from the laser oscillator 1 enters, and a reflection mirror 8 for introducing the laser light L emitted from the reflective beam expander mechanism 106 into the processing head 4 .
- the reflective beam expander mechanism 106 includes a reflection mirror 68 that the laser light L from the laser oscillator 1 enters, a spherical convex mirror 63 that the laser light L reflected by the reflection mirror 68 enters, and a spherical concave mirror 65 that the laser light L reflected by the spherical convex mirror 63 enters.
- the reflective beam expander mechanism 106 increases a beam diameter of the laser light L by a desired scaling factor irrespective of a divergence angle of the laser light L generated from the laser oscillator 1 , and maintains an appropriate condensed light diameter at a processing point on the processing table 2 .
- the reflective beam expander mechanism 106 for magnifying and collimating the laser light L is provided in the optical path in order to maintain an appropriate condensed light diameter at the processing point of the object to be processed.
- a spherical mirror is used in the reflective beam expander mechanism 106 , in order to inhibit astigmatism, it is necessary to restrict the incident angle with respect to the spherical mirror to an acute angle.
- the reflection mirror 68 in the reflective beam expander mechanism 106 restricts incident angles of the laser light L with respect to the spherical mirrors (spherical convex mirror 63 and spherical concave mirror 65 ) to acute angles, respectively.
- the optical path is complicated, and further, in a strict sense, the astigmatism cannot be inhibited. Further, through absorption of the laser light by optical elements in the complicated optical path, the thermal lens effect is produced, and thus increase in the number of the optical elements is a factor of processing instability.
- the reflection mirror for restricting the incident angle with respect to the spherical mirror is provided as in Patent Literature 1, but there are problems in that the optical path configuration is complicated and, in addition, that astigmatism cannot be satisfactorily inhibited.
- the present invention has been made in order to solve the above-mentioned problems, and an object of the present invention is to obtain a laser processing device capable of satisfactorily restricting a beam divergence angle and radiating laser light without aberration and having a desired beam diameter to an object to be processed by using a reflective beam expander mechanism whose optical path configuration is not particularly complicated.
- a laser processing device including: a laser oscillator for emitting laser light; a processing table for placing an object to be processed; a transmission optical system for transmitting the laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to the object to be processed; and moving means for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed,
- the transmission optical system includes: a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator; and a variable curvature spherical mirror, in which the reflective beam expander mechanism includes a spherical mirror and a mirror having different curvatures in two orthogonal axes, and in which the variable curvature spherical mirror is placed between the spherical mirror and the mirror having different curvatures in two orthogonal axes.
- the beam divergence angle can be satisfactorily restricted and the laser light without aberration and having a desired beam diameter can be radiated to the object to be processed, without using the transmission optical system having a particularly complicated structure.
- FIG. 1 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a first embodiment of the present invention.
- FIG. 2 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a second embodiment of the present invention.
- FIG. 3 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a third embodiment of the present invention.
- FIG. 4 is a block diagram schematically illustrating a principal part of a laser processing device according to a fourth embodiment of the present invention.
- FIG. 5 is a block diagram schematically illustrating a principal part of a laser processing device according to a fifth embodiment of the present invention.
- FIG. 6 is a block diagram schematically illustrating a principal part of a laser processing device according to a sixth embodiment of the present invention.
- FIG. 7 is a block diagram schematically illustrating an optical path configuration of a related-art laser processing device.
- FIG. 8 is a structural view schematically illustrating a mirror adjusting mechanism according to a seventh embodiment of the present invention.
- FIG. 1 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a first embodiment of the present invention.
- the laser processing device includes a laser oscillator 1 that emits laser light L, a processing table 2 on which an object to be processed (not shown) is placed, a transmission optical system including a reflective beam expander mechanism 6 and a reflection mirror 8 , and a processing head 4 that radiates the laser light L that has passed through the transmission optical system to the object to be processed.
- the laser light L emitted from the laser oscillator 1 is collimated and magnified by the reflective beam expander mechanism 6 provided in the transmission optical system, and then is introduced into the processing head 4 by the reflection mirror 8 . After that, the laser light L is condensed by a processing lens (not shown) in the processing head 4 , and then is radiated to the object to be processed on the processing table 2 .
- Moving means 5 is provided to the processing table 2 and the processing head 4 .
- the moving means 5 horizontally moves the processing table 2 and the processing head 4 in ranges from positions indicated by the solid lines to positions 2 ′ and 4 ′ indicated by the dotted lines, respectively.
- the moving means 5 moves the processing table 2 in an X axis (dotted arrow) direction and moves the processing head 4 in a Y axis (dotted arrow) direction under the control of control means (not shown), thereby changing a relative position between the laser light L and the object to be processed to enable processing at a desired position to be processed.
- the moving means 5 for changing the relative position between the processing table 2 and the processing head 4 is used, but moving means for driving only the processing head 4 may also be used.
- the reflective beam expander mechanism 6 includes at least one mirror having different curvatures in two orthogonal axes.
- the reflective beam expander mechanism 6 includes a spherical convex mirror 63 that reflects the laser light L from the laser oscillator 1 and a concave mirror 62 having different curvatures in two orthogonal axes.
- the two orthogonal axes of the concave mirror 62 have curvatures different from each other, and the concave mirror 62 further reflects the laser light L reflected by the spherical convex mirror 63 to cause the laser light L to enter the reflection mirror 8 on the processing table 2 side.
- the concave mirror 62 having different curvatures in two orthogonal axes and the spherical convex mirror 63 are used in the reflective beam expander mechanism 6 , but a convex mirror having different curvatures in two orthogonal axes and a spherical concave mirror may also be used.
- the arrangement order of the concave mirror 62 and the spherical convex mirror 63 is not limited to that in the configuration illustrated in FIG. 1 , and the arrangement order of the mirrors may be set in reverse order.
- the concave mirror 62 having different curvatures in two orthogonal axes is used in the reflective beam expander mechanism 6 , and the curvatures of the two axes of the concave mirror 62 are designed so that aberration is not caused in the reflected light.
- the beam diameter can be magnified and collimated not only without restricting the incident angle on the spherical convex mirror 63 but also without causing astigmatism.
- the laser processing device includes the laser oscillator 1 for emitting the laser light L, the processing table 2 on which the object to be processed is placed, the transmission optical system for transmitting the laser light L emitted from the laser oscillator 1 to the processing table 2 , the processing head 4 for condensing and radiating the laser light L transmitted via the transmission optical system to the object to be processed, and the moving means 5 for changing the relative position between the object to be processed and the laser light L to be radiated to the object to be processed.
- the transmission optical system includes the reflective beam expander mechanism 6 for collimating and magnifying the laser light L from the laser oscillator 1 , and the reflective beam expander mechanism 6 includes a mirror having different curvatures in two orthogonal axes.
- the reflective beam expander mechanism 6 includes the spherical convex mirror 63 and the concave mirror 62 having different curvatures in two orthogonal axes.
- the reflective beam expander mechanism 6 includes a spherical concave mirror and a convex mirror having different curvatures in two orthogonal axes.
- a beam divergence angle can be satisfactorily restricted and the laser light L without aberration and having a desired beam diameter can be radiated to an object to be processed by using the reflective beam expander mechanism 6 whose optical path configuration is not particularly complicated.
- the reflection mirror 68 for restricting the incident angle with respect to a spherical mirror as in the related-art device can be eliminated and the number of optical elements in the transmission optical system can be reduced to simplify the optical structure.
- influence of the thermal lens effect of the optical elements is reduced, which enables stable processing over a long period of time.
- the incident angle of the laser light L with respect to the spherical convex mirror 63 is restricted to an acute angle.
- the curvatures of the concave mirror 62 are designed so that astigmatism that occurs when the concave mirror 62 gives reflection and astigmatism of reflected light that occurs in accordance with the incident angle with respect to the spherical mirror 63 are canceled out, the incident angle of the laser light L with respect to the spherical convex mirror 63 is not restricted to an acute angle.
- FIG. 2 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a second embodiment of the present invention.
- the same components as those described above (see FIG. 1 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein.
- the reflective beam expander mechanism 6 A includes the convex mirror 61 having different curvatures in two orthogonal axes and the concave mirror 62 having different curvatures in two orthogonal axes.
- the transmission optical system can be used as reflection mirrors, and thus the reflection mirror 8 on the processing table 2 side becomes unnecessary.
- the transmission optical system can be further simplified.
- the influence of the thermal lens effect of the optical elements is further reduced, which enables stable processing over a long period of time.
- the processing table 2 movable in the X axis direction is used, but an immovable processing table 2 A may also be used as illustrated in FIG. 3 .
- FIG. 3 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a third embodiment of the present invention.
- the same components as those described above are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein.
- moving means 5 A is provided to the processing head 4 on the processing table 2 A, for moving the processing head 4 in the X axis direction and in the Y axis direction in ranges from the position indicated by the solid lines to positions 4 ′ indicated by the dotted lines.
- an optical path length fixing mechanism 7 is inserted between the reflective beam expander mechanism 6 A and the reflection mirror 8 on the processing table 2 A side.
- the processing table 2 A is larger than the processing table 2 described above and has a processing region larger than that of the processing table 2 . It is not efficient to drive the processing table 2 A, and hence the moving means 5 A changes the relative position between the laser light L and an object to be processed only by driving the processing head 4 .
- a reflection mirror 28 is also moved in a range from a position indicated by the solid lines to a position 28 ′ indicated by the dotted lines.
- an optical path length of the laser light L from the laser oscillator 1 to the processing head 4 greatly differs depending on a processing position on the processing table 2 A, which may cause an error in the condensed light diameter of a beam radiated to an object to be processed. Therefore, the optical path length fixing mechanism 7 for cancelling out fluctuations in optical path length to make compensation is provided.
- the optical path length fixing mechanism 7 includes a mirror group 78 including a plurality of mirrors for causing a direction of travel of incident light and a direction of travel of output light to be opposite and in parallel to each other.
- the optical path length fixing mechanism 7 includes a moving mechanism 79 for translating the mirror group 78 in a range from a position indicated by the solid lines to a position 78 ′ indicated by the dotted lines.
- the moving mechanism 79 adjusts, under the control of control means (not shown), the optical path length of the laser light L to be always at a predetermined value by moving the position of the mirror group 78 so as to cancel out change in optical path length caused by the movement of the processing head 4 .
- the laser light L emitted from the reflective beam expander mechanism 6 A is collimated, and thus the condensed light diameter of the laser light L radiated to an object to be processed on the processing table 2 A ideally does not change even when the optical path length changes.
- the transmission optical system according to the third embodiment ( FIG. 3 ) of the present invention includes the optical path length fixing mechanism 7
- the optical path length fixing mechanism 7 includes the mirror group 78 constructed by a plurality of mirrors and the moving mechanism 79 for translating the mirror group 78 .
- the plurality of mirrors constructing the mirror group 78 are placed so that the direction of travel of incident light to the mirror group 78 and the direction of travel of output light from the mirror group 78 are opposite and in parallel to each other.
- the moving mechanism 79 translates the mirror group 78 with respect to the directions of travel of the incident light and the output light so as to cancel out change in relative position between the laser light L to be radiated to an object to be processed and the object to be processed to maintain a fixed optical path length of the laser light L radiated to the object to be processed.
- the reflective beam expander mechanism 6 A including the convex mirror 61 having different curvatures in two orthogonal axes and the concave mirror 62 having different curvatures in two orthogonal axes is used, but, as illustrated in FIG. 4 , a reflective beam expander mechanism 6 B including the concave mirror 62 having different curvatures in two orthogonal axes, the spherical convex mirror 63 , a variable curvature spherical mirror 67 , and the reflection mirror 68 may also be used.
- FIG. 4 is a block diagram schematically illustrating a principal part of a laser processing device according to a fourth embodiment of the present invention.
- the same components as those described above are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein.
- the reflective beam expander mechanism 6 B includes, as a transmission optical system, the variable curvature spherical mirror 67 that reflects the laser light L from the laser oscillator 1 , the reflection mirror 68 that reflects the laser light L reflected by the variable curvature spherical mirror 67 , and the convex mirror 61 and the concave mirror 62 that reflect the laser light L reflected by the reflection mirror 68 .
- Two orthogonal axes of each of the convex mirror 61 and the concave mirror 62 have curvatures different from each other.
- the concave mirror 62 having different curvatures in two orthogonal axes reflects and introduces, into the optical path length fixing mechanism 7 , the laser light L reflected by the convex mirror 63 having different curvatures in two orthogonal axes.
- variable curvature spherical mirror 67 and the reflection mirror 68 is not limited to that in the configuration illustrated in FIG. 4 , and the arrangement order of the mirrors may be set in reverse order.
- the reflection mirror 68 it is possible to restrict the incident angle of the laser light L with respect to the variable curvature spherical mirror 67 so as to inhibit astigmatism that occurs in the laser light L reflected by the variable curvature spherical mirror 67 to a range in which the processing quality is not influenced.
- the condensed light diameter of the laser light L at a processing point on an object to be processed is fixed, but by providing the variable curvature spherical mirror 67 in the reflective beam expander mechanism 6 B as illustrated in FIG. 4 , the condensed light diameter of the laser light can be changed.
- the transmission optical system according to the fourth embodiment ( FIG. 4 ) of the present invention includes the variable curvature spherical mirror 67 and can change the condensed light diameter of the laser light L radiated to an object to be processed, and hence, processing at higher speed and with higher quality can be realized.
- the reflective beam expander mechanism 6 B including the reflection mirror 68 is used, but, as illustrated in FIG. 5 , a reflective beam expander mechanism 6 C that does not require the reflection mirror 68 may also be used.
- FIG. 5 is a block diagram schematically illustrating a principal part of a laser processing device according to a fifth embodiment of the present invention.
- the same components as those described above (see FIG. 4 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein.
- the reflective beam expander mechanism 6 C includes, as a transmission optical system, the spherical convex mirror 63 that reflects the laser light L from the laser oscillator 1 , the variable curvature spherical mirror 67 that reflects the laser light L reflected by the spherical convex mirror 63 , and the concave mirror 62 having different curvatures in two orthogonal axes.
- the spherical convex mirror 63 and the variable curvature spherical mirror 67 are placed so as to be substantially opposed to each other so that the laser light L that has entered the corresponding mirror is emitted to an opposite direction.
- the concave mirror 62 reflects the laser light L reflected by the variable curvature spherical mirror 67 to introduce the laser light L to the optical path length fixing mechanism 7 side.
- the reflective beam expander mechanism 6 B described above requires the reflection mirror 68 for restricting the incident angle with respect to the variable curvature spherical mirror 67 in order to inhibit astigmatism.
- the reflective beam expander mechanism 6 C illustrated in FIG. 5 does not require the reflection mirror 68 , because the spherical convex mirror 63 is placed on an incident side of the variable curvature spherical mirror 67 and the variable curvature spherical mirror 67 and the spherical convex mirror 63 are placed so as to be opposed to each other.
- the reflection mirror 68 is unnecessary and the incident angles of the laser light L with respect to the variable curvature spherical mirror 67 and the spherical convex mirror 63 , respectively, can be restricted to a range in which astigmatism does not influence the processing quality.
- simplification of the transmission optical system reduces the influence of thermal lenses of the optical elements, and thus, stable processing can be realized. Further, because the transmission optical system is simplified, the optical path design flexibility can be enhanced.
- the reflective beam expander mechanism 6 C includes the variable curvature spherical mirror 67 and the spherical convex mirror 63 (spherical mirror), and the variable curvature spherical mirror 67 is placed so as to be opposed to the spherical convex mirror 63 in the reflective beam expander mechanism 6 C.
- the reflective beam expander mechanism 6 C including the concave mirror 62 having different curvatures in two orthogonal axes and the variable curvature spherical mirror 67 is used, but, as illustrated in FIG. 6 , a reflective beam expander mechanism 6 D including a variable curvature mirror 64 having changeable curvatures in two orthogonal axes may also be used.
- FIG. 6 is a block diagram schematically illustrating a principal part of a laser processing device according to a sixth embodiment of the present invention.
- the same components as those described above (see FIG. 5 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein.
- the reflective beam expander mechanism 6 D includes, as a transmission optical system, the spherical convex mirror 63 that reflects the laser light L from the laser oscillator 1 and the variable curvature mirror 64 having changeable curvatures in two orthogonal axes.
- the transmission optical system is simplified and the number of the optical elements is reduced.
- the influence of thermal lenses can be further reduced, and in addition, stable processing can be realized.
- the transmission optical system is simplified, and hence the optical path design flexibility can be enhanced.
- the reflective beam expander mechanism 6 D includes the variable curvature mirror 64 having changeable curvatures in two orthogonal axes.
- the variable curvature mirror 64 both the mirror having different curvatures in two orthogonal axes and the variable curvature spherical mirror described above can be collected as a single optical element.
- the number of the optical elements can be reduced, and the stabilization of the processing precision can be realized through simplification of the optical path and reduction in thermal lens effect.
- the mirror adjusting mechanism 90 includes a mechanism that can move a fixed mirror in a horizontal direction and in a vertical direction and can rotate the fixed mirror within a mirror plane about a center of the mirror by using a horizontal direction adjustment screw 91 , a vertical direction adjustment screw 92 , and a rotational direction adjustment screw 93 .
- the convex mirror 61 and the concave mirror 62 each having different curvatures in two orthogonal axes have lower precision curvatures around edges thereof due to a problem of processing precision of a spherical surface, and thus it is desired to radiate the laser light L to the vicinity of centers thereof.
- a pass line of the laser light L changes depending on thermal loads of the transmission optical system and the oscillator and change in surrounding environments such as temperature and humidity.
- a beam has a shape of an ellipsoid of revolution, and the processing quality is lowered.
- the mirror adjusting mechanism 90 illustrated in FIG. 8 even if the pass line of the laser light L changes, the laser light L is radiated to centers of the convex mirror 61 and the concave mirror 62 each having different curvatures in two orthogonal axes, and the laser light can be transmitted without distortion of the beam shape.
- the mirror adjusting mechanism 90 is a mechanism that carries out adjustment with the horizontal direction adjustment screw 91 , the vertical direction adjustment screw 92 , and the rotational direction adjustment screw 93 , but a piezoelectric element may be used instead of a screw.
Abstract
A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes.
Description
- This application is a division of and claims the benefit of priority under 35 U.S.C. §120 from U.S. Ser. No. 14/401,572 filed Nov. 17, 2014, the entire contents of which is incorporated herein by reference. U.S. Ser. No. 14/401,572 is a National Stage of PCT/JP13/065214 filed May 31, 2013, which was not published under PCT Article 21(2) in English and claims the benefit of priority from Japanese Patent Application No. 2012-135988 filed Jun. 15, 2012.
- The present invention relates to a laser processing device for processing an object to be processed by condensing and radiating laser light emitted from a laser oscillator to the object to be processed.
- Hitherto, a laser processing device for processing an object to be processed by using laser light emitted from a laser oscillator has been well known (see, for example, Patent Literature 1).
-
FIG. 7 is a block diagram schematically illustrating an optical path configuration of a related-art laser processing device described inPatent Literature 1. - In
FIG. 7 , laser light L generated from alaser oscillator 1 is transmitted to a processing lens (not shown) in aprocessing head 4 via a transmission optical system to be condensed and radiated to an object to be processed (not shown) placed on a processing table 2. - The processing table 2 and the
processing head 4 include moving means 5 capable of moving each of the processing table 2 and theprocessing head 4 in at least one axial direction. The movingmeans 5 can move a relative position between the laser light L and the object to be processed in a desired direction and can locate the relative position at a desired position. - In this case, the moving
means 5 is configured to move the processing table 2 in an X axis direction and to move theprocessing head 4 in a Y axis direction. - The transmission optical system for the laser light L includes a reflective
beam expander mechanism 106 that the laser light L from thelaser oscillator 1 enters, and areflection mirror 8 for introducing the laser light L emitted from the reflectivebeam expander mechanism 106 into theprocessing head 4. - The reflective
beam expander mechanism 106 includes areflection mirror 68 that the laser light L from thelaser oscillator 1 enters, aspherical convex mirror 63 that the laser light L reflected by thereflection mirror 68 enters, and a sphericalconcave mirror 65 that the laser light L reflected by the sphericalconvex mirror 63 enters. - The reflective
beam expander mechanism 106 increases a beam diameter of the laser light L by a desired scaling factor irrespective of a divergence angle of the laser light L generated from thelaser oscillator 1, and maintains an appropriate condensed light diameter at a processing point on the processing table 2. - It is known that, generally, astigmatism in accordance with an incident angle occurs in light reflected by a spherical mirror such as the
spherical convex mirror 63 or the sphericalconcave mirror 65. In particular, when astigmatism occurs in the laser light L in a laser processing device, the light condensation ability is reduced and the beam shape becomes anisotropic at the processing point. - In this way, in a laser processing device of a type in which the
processing head 4 moves, the reflectivebeam expander mechanism 106 for magnifying and collimating the laser light L is provided in the optical path in order to maintain an appropriate condensed light diameter at the processing point of the object to be processed. When a spherical mirror is used in the reflectivebeam expander mechanism 106, in order to inhibit astigmatism, it is necessary to restrict the incident angle with respect to the spherical mirror to an acute angle. - Therefore, when a spherical mirror is used in the transmission optical system of the laser processing device, in order to avoid lowering of processing quality and occurrence of anisotropy in processing due to astigmatism, it is necessary to restrict the incident angle of the laser light L with respect to the spherical mirror to an acute angle so that the astigmatism does not adversely affect the processing quality.
- It is known that, generally, when the incident angle with respect to the spherical mirror is set to be an acute angle (desirably 15° or less), lowering of the processing quality due to astigmatism is negligible.
- Therefore, in
FIG. 7 (Patent Literature 1), thereflection mirror 68 in the reflectivebeam expander mechanism 106 restricts incident angles of the laser light L with respect to the spherical mirrors (spherical convex mirror 63 and spherical concave mirror 65) to acute angles, respectively. - However, when the reflection mirror 68 for restricting the incident angles with respect to the spherical mirrors is provided, the optical path is complicated, and further, in a strict sense, the astigmatism cannot be inhibited. Further, through absorption of the laser light by optical elements in the complicated optical path, the thermal lens effect is produced, and thus increase in the number of the optical elements is a factor of processing instability.
- [PTL 1] JP 05-305473 A
- In the related-art laser processing device, when the reflective beam expander mechanism including the spherical mirror is used as the transmission optical system, the reflection mirror for restricting the incident angle with respect to the spherical mirror is provided as in
Patent Literature 1, but there are problems in that the optical path configuration is complicated and, in addition, that astigmatism cannot be satisfactorily inhibited. - The present invention has been made in order to solve the above-mentioned problems, and an object of the present invention is to obtain a laser processing device capable of satisfactorily restricting a beam divergence angle and radiating laser light without aberration and having a desired beam diameter to an object to be processed by using a reflective beam expander mechanism whose optical path configuration is not particularly complicated.
- According to one embodiment of the present invention, there is provided a laser processing device, including: a laser oscillator for emitting laser light; a processing table for placing an object to be processed; a transmission optical system for transmitting the laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to the object to be processed; and moving means for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed, in which the transmission optical system includes: a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator; and a variable curvature spherical mirror, in which the reflective beam expander mechanism includes a spherical mirror and a mirror having different curvatures in two orthogonal axes, and in which the variable curvature spherical mirror is placed between the spherical mirror and the mirror having different curvatures in two orthogonal axes.
- According to one embodiment of the present invention, in the reflective beam expander mechanism constructing the transmission optical system, by using the mirror having different curvatures in two orthogonal axes, the beam divergence angle can be satisfactorily restricted and the laser light without aberration and having a desired beam diameter can be radiated to the object to be processed, without using the transmission optical system having a particularly complicated structure.
-
FIG. 1 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a first embodiment of the present invention. -
FIG. 2 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a second embodiment of the present invention. -
FIG. 3 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a third embodiment of the present invention. -
FIG. 4 is a block diagram schematically illustrating a principal part of a laser processing device according to a fourth embodiment of the present invention. -
FIG. 5 is a block diagram schematically illustrating a principal part of a laser processing device according to a fifth embodiment of the present invention. -
FIG. 6 is a block diagram schematically illustrating a principal part of a laser processing device according to a sixth embodiment of the present invention. -
FIG. 7 is a block diagram schematically illustrating an optical path configuration of a related-art laser processing device. -
FIG. 8 is a structural view schematically illustrating a mirror adjusting mechanism according to a seventh embodiment of the present invention. -
FIG. 1 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a first embodiment of the present invention. - In
FIG. 1 , the laser processing device according to the first embodiment of the present invention includes alaser oscillator 1 that emits laser light L, a processing table 2 on which an object to be processed (not shown) is placed, a transmission optical system including a reflectivebeam expander mechanism 6 and areflection mirror 8, and aprocessing head 4 that radiates the laser light L that has passed through the transmission optical system to the object to be processed. - The laser light L emitted from the
laser oscillator 1 is collimated and magnified by the reflectivebeam expander mechanism 6 provided in the transmission optical system, and then is introduced into theprocessing head 4 by thereflection mirror 8. After that, the laser light L is condensed by a processing lens (not shown) in theprocessing head 4, and then is radiated to the object to be processed on the processing table 2. - Moving means 5 is provided to the processing table 2 and the
processing head 4. The moving means 5 horizontally moves the processing table 2 and theprocessing head 4 in ranges from positions indicated by the solid lines topositions 2′ and 4′ indicated by the dotted lines, respectively. - The moving means 5 moves the processing table 2 in an X axis (dotted arrow) direction and moves the
processing head 4 in a Y axis (dotted arrow) direction under the control of control means (not shown), thereby changing a relative position between the laser light L and the object to be processed to enable processing at a desired position to be processed. - Note that, in
FIG. 1 , in order to adjust the relative position between the laser light L and the object to be processed, the moving means 5 for changing the relative position between the processing table 2 and theprocessing head 4 is used, but moving means for driving only theprocessing head 4 may also be used. - The reflective
beam expander mechanism 6 includes at least one mirror having different curvatures in two orthogonal axes. - In
FIG. 1 , the reflectivebeam expander mechanism 6 includes aspherical convex mirror 63 that reflects the laser light L from thelaser oscillator 1 and aconcave mirror 62 having different curvatures in two orthogonal axes. - The two orthogonal axes of the
concave mirror 62 have curvatures different from each other, and theconcave mirror 62 further reflects the laser light L reflected by thespherical convex mirror 63 to cause the laser light L to enter thereflection mirror 8 on the processing table 2 side. - Note that, in this case, the
concave mirror 62 having different curvatures in two orthogonal axes and thespherical convex mirror 63 are used in the reflectivebeam expander mechanism 6, but a convex mirror having different curvatures in two orthogonal axes and a spherical concave mirror may also be used. - Further, the arrangement order of the
concave mirror 62 and thespherical convex mirror 63 is not limited to that in the configuration illustrated inFIG. 1 , and the arrangement order of the mirrors may be set in reverse order. - As the simplest reflective beam expander mechanism that collimates and increases the beam diameter of the laser light L, it is conceivable to use a spherical convex mirror and a spherical concave mirror, but, as described above, astigmatism in accordance with an incident angle occurs in light reflected by a spherical mirror, and processing quality is significantly lowered due to the anisotropic beam shape and degraded light condensation ability caused by the astigmatism.
- On the other hand, in the first embodiment of the present invention, the
concave mirror 62 having different curvatures in two orthogonal axes is used in the reflectivebeam expander mechanism 6, and the curvatures of the two axes of theconcave mirror 62 are designed so that aberration is not caused in the reflected light. - As a result, no restriction is imposed on the incident angle of the laser light L, and thus an optical path design that uses the
concave mirror 62 as a reflection mirror is possible. Thus, the beam diameter can be magnified and collimated not only without restricting the incident angle on the sphericalconvex mirror 63 but also without causing astigmatism. - As described above, the laser processing device according to the first embodiment (
FIG. 1 ) of the present invention includes thelaser oscillator 1 for emitting the laser light L, the processing table 2 on which the object to be processed is placed, the transmission optical system for transmitting the laser light L emitted from thelaser oscillator 1 to the processing table 2, theprocessing head 4 for condensing and radiating the laser light L transmitted via the transmission optical system to the object to be processed, and the movingmeans 5 for changing the relative position between the object to be processed and the laser light L to be radiated to the object to be processed. - The transmission optical system includes the reflective
beam expander mechanism 6 for collimating and magnifying the laser light L from thelaser oscillator 1, and the reflectivebeam expander mechanism 6 includes a mirror having different curvatures in two orthogonal axes. - The reflective
beam expander mechanism 6 includes thespherical convex mirror 63 and theconcave mirror 62 having different curvatures in two orthogonal axes. Alternatively, the reflectivebeam expander mechanism 6 includes a spherical concave mirror and a convex mirror having different curvatures in two orthogonal axes. - By using a mirror designed so that two orthogonal axes thereof have curvatures different from each other so as to inhibit aberration when reflecting light in the reflective
beam expander mechanism 6 for magnifying and collimating the laser light L in this way, a beam divergence angle can be satisfactorily restricted and the laser light L without aberration and having a desired beam diameter can be radiated to an object to be processed by using the reflectivebeam expander mechanism 6 whose optical path configuration is not particularly complicated. - Further, no restriction is imposed on the incident angle of the laser light L with respect to the mirror having different curvatures in two orthogonal axes, and thus the optical path design flexibility is enhanced and the optical system is simplified.
- Further, the
reflection mirror 68 for restricting the incident angle with respect to a spherical mirror as in the related-art device (FIG. 7 ) can be eliminated and the number of optical elements in the transmission optical system can be reduced to simplify the optical structure. Thus, influence of the thermal lens effect of the optical elements is reduced, which enables stable processing over a long period of time. - Note that, in
FIG. 1 , in order to inhibit aberration during reflection, the incident angle of the laser light L with respect to the sphericalconvex mirror 63 is restricted to an acute angle. However, when the curvatures of theconcave mirror 62 are designed so that astigmatism that occurs when theconcave mirror 62 gives reflection and astigmatism of reflected light that occurs in accordance with the incident angle with respect to thespherical mirror 63 are canceled out, the incident angle of the laser light L with respect to the sphericalconvex mirror 63 is not restricted to an acute angle. - Note that, in the above-mentioned first embodiment (
FIG. 1 ), the reflectivebeam expander mechanism 6 including theconcave mirror 62 having different curvatures in two orthogonal axes and the sphericalconvex mirror 63 is used, but, as illustrated inFIG. 2 , a reflectivebeam expander mechanism 6A including aconvex mirror 61 having different curvatures in two orthogonal axes and theconcave mirror 62 having different curvatures in two orthogonal axes may also be used. -
FIG. 2 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a second embodiment of the present invention. The same components as those described above (seeFIG. 1 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein. - In
FIG. 2 , the reflectivebeam expander mechanism 6A includes theconvex mirror 61 having different curvatures in two orthogonal axes and theconcave mirror 62 having different curvatures in two orthogonal axes. - In the reflective
beam expander mechanism 6 described above (FIG. 1 ), only one mirror having different curvatures in two orthogonal axes is used, but, in the reflectivebeam expander mechanism 6A according to the second embodiment (FIG. 2 ) of the present invention, two mirrors each having different curvatures in two orthogonal axes (convex mirror 61 and concave mirror 62) are used. - By using two mirrors each having different curvatures in two orthogonal axes in the reflective
beam expander mechanism 6A in this way, no restriction is imposed on the incident angles of the laser light L with respect to the mirrors in the reflectivebeam expander mechanism 6A. Thus, the optical path design flexibility is enhanced and thereflection mirror 68 for restricting the incident angle becomes unnecessary, which reduces the influence of the thermal lens effect to stabilize the processing precision. - Further, all the mirrors in the transmission optical system can be used as reflection mirrors, and thus the
reflection mirror 8 on the processing table 2 side becomes unnecessary. Thus, the transmission optical system can be further simplified. - Further, the influence of the thermal lens effect of the optical elements is further reduced, which enables stable processing over a long period of time.
- Note that, in the above-mentioned first and second embodiments (
FIG. 1 andFIG. 2 ), the processing table 2 movable in the X axis direction is used, but an immovable processing table 2A may also be used as illustrated inFIG. 3 . -
FIG. 3 is a block diagram schematically illustrating an optical path configuration of a laser processing device according to a third embodiment of the present invention. The same components as those described above (seeFIG. 1 andFIG. 2 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein. - In
FIG. 3 , moving means 5A is provided to theprocessing head 4 on the processing table 2A, for moving theprocessing head 4 in the X axis direction and in the Y axis direction in ranges from the position indicated by the solid lines topositions 4′ indicated by the dotted lines. - Further, in the transmission optical system for the laser light L, an optical path
length fixing mechanism 7 is inserted between the reflectivebeam expander mechanism 6A and thereflection mirror 8 on the processing table 2A side. - In this case, the processing table 2A is larger than the processing table 2 described above and has a processing region larger than that of the processing table 2. It is not efficient to drive the processing table 2A, and hence the moving means 5A changes the relative position between the laser light L and an object to be processed only by driving the
processing head 4. - Note that, when the
processing head 4 is moved in the Y axis direction, areflection mirror 28 is also moved in a range from a position indicated by the solid lines to aposition 28′ indicated by the dotted lines. - Further, under this state, an optical path length of the laser light L from the
laser oscillator 1 to theprocessing head 4 greatly differs depending on a processing position on the processing table 2A, which may cause an error in the condensed light diameter of a beam radiated to an object to be processed. Therefore, the optical pathlength fixing mechanism 7 for cancelling out fluctuations in optical path length to make compensation is provided. - The optical path
length fixing mechanism 7 includes amirror group 78 including a plurality of mirrors for causing a direction of travel of incident light and a direction of travel of output light to be opposite and in parallel to each other. - Further, the optical path
length fixing mechanism 7 includes a movingmechanism 79 for translating themirror group 78 in a range from a position indicated by the solid lines to aposition 78′ indicated by the dotted lines. - The moving
mechanism 79 adjusts, under the control of control means (not shown), the optical path length of the laser light L to be always at a predetermined value by moving the position of themirror group 78 so as to cancel out change in optical path length caused by the movement of theprocessing head 4. - Note that, in
FIG. 3 , the optical pathlength fixing mechanism 7 is used with respect to the processing table 2A that changes the relative position between the laser light L and an object to be processed only by moving theprocessing head 4, but the optical pathlength fixing mechanism 7 can also be applied to a configuration in which both theprocessing head 4 and the processing table 2 are moved as described above (FIG. 1 andFIG. 2 ). - Further, a case where the reflective
beam expander mechanism 6A according to the above-mentioned second embodiment (FIG. 2 ) is used is described, but this embodiment is similarly applicable to a case where the reflectivebeam expander mechanism 6 according to the above-mentioned first embodiment (FIG. 1 ) is used. - The laser light L emitted from the reflective
beam expander mechanism 6A is collimated, and thus the condensed light diameter of the laser light L radiated to an object to be processed on the processing table 2A ideally does not change even when the optical path length changes. However, in a strict sense, it is impossible to completely restrict the divergence angle, and thus increase in condensed light diameter along with the increase in optical path length cannot be completely avoided. - On the other hand, by inserting the optical path
length fixing mechanism 7 as illustrated inFIG. 3 , even a laser processing device using the large processing table 2A causing the optical path length to be larger can maintain a fixed condensed light diameter on the processing table 2A, and the processing quality can be maintained. - As described above, the transmission optical system according to the third embodiment (
FIG. 3 ) of the present invention includes the optical pathlength fixing mechanism 7, and the optical pathlength fixing mechanism 7 includes themirror group 78 constructed by a plurality of mirrors and the movingmechanism 79 for translating themirror group 78. The plurality of mirrors constructing themirror group 78 are placed so that the direction of travel of incident light to themirror group 78 and the direction of travel of output light from themirror group 78 are opposite and in parallel to each other. - Further, the moving
mechanism 79 translates themirror group 78 with respect to the directions of travel of the incident light and the output light so as to cancel out change in relative position between the laser light L to be radiated to an object to be processed and the object to be processed to maintain a fixed optical path length of the laser light L radiated to the object to be processed. - The optical path
length fixing mechanism 7 is provided in this way, and hence the condensed light diameter of the laser light L radiated to an object to be processed can be maintained independently of the relative position between the laser light L and the object to be processed, and thus high quality processing can be maintained. - Note that, in the above-mentioned third embodiment (
FIG. 3 ), the reflectivebeam expander mechanism 6A including theconvex mirror 61 having different curvatures in two orthogonal axes and theconcave mirror 62 having different curvatures in two orthogonal axes is used, but, as illustrated inFIG. 4 , a reflectivebeam expander mechanism 6B including theconcave mirror 62 having different curvatures in two orthogonal axes, the sphericalconvex mirror 63, a variable curvaturespherical mirror 67, and thereflection mirror 68 may also be used. -
FIG. 4 is a block diagram schematically illustrating a principal part of a laser processing device according to a fourth embodiment of the present invention. The same components as those described above (seeFIG. 1 toFIG. 3 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein. - In
FIG. 4 , the reflectivebeam expander mechanism 6B according to the fourth embodiment of the present invention includes, as a transmission optical system, the variable curvaturespherical mirror 67 that reflects the laser light L from thelaser oscillator 1, thereflection mirror 68 that reflects the laser light L reflected by the variable curvaturespherical mirror 67, and theconvex mirror 61 and theconcave mirror 62 that reflect the laser light L reflected by thereflection mirror 68. Two orthogonal axes of each of theconvex mirror 61 and theconcave mirror 62 have curvatures different from each other. - The
concave mirror 62 having different curvatures in two orthogonal axes reflects and introduces, into the optical pathlength fixing mechanism 7, the laser light L reflected by theconvex mirror 63 having different curvatures in two orthogonal axes. - Note that, the arrangement order of the variable curvature
spherical mirror 67 and thereflection mirror 68 is not limited to that in the configuration illustrated inFIG. 4 , and the arrangement order of the mirrors may be set in reverse order. - With the
reflection mirror 68, it is possible to restrict the incident angle of the laser light L with respect to the variable curvaturespherical mirror 67 so as to inhibit astigmatism that occurs in the laser light L reflected by the variable curvaturespherical mirror 67 to a range in which the processing quality is not influenced. - In the above-mentioned first to third embodiments (
FIG. 1 toFIG. 3 ), the condensed light diameter of the laser light L at a processing point on an object to be processed is fixed, but by providing the variable curvaturespherical mirror 67 in the reflectivebeam expander mechanism 6B as illustrated inFIG. 4 , the condensed light diameter of the laser light can be changed. - In general, in drilling processing such as piercing processing, by appropriately changing the condensed light diameter during the processing, processing at higher speed can be carried out compared with a case where the condensed light diameter is fixed.
- Further, in processing a corner portion or the like, heat is liable to accumulate in the object to be processed and a cut surface may become rough, but by changing the condensed light diameter during the processing to change the range of irradiation of the laser light to the object to be processed, high quality and high precision processing can be carried out.
- As described above, the transmission optical system according to the fourth embodiment (
FIG. 4 ) of the present invention includes the variable curvaturespherical mirror 67 and can change the condensed light diameter of the laser light L radiated to an object to be processed, and hence, processing at higher speed and with higher quality can be realized. - Note that, in the above-mentioned fourth embodiment (
FIG. 4 ), the reflectivebeam expander mechanism 6B including thereflection mirror 68 is used, but, as illustrated inFIG. 5 , a reflectivebeam expander mechanism 6C that does not require thereflection mirror 68 may also be used. -
FIG. 5 is a block diagram schematically illustrating a principal part of a laser processing device according to a fifth embodiment of the present invention. The same components as those described above (seeFIG. 4 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein. - In
FIG. 5 , the reflectivebeam expander mechanism 6C according to the fifth embodiment of the present invention includes, as a transmission optical system, the sphericalconvex mirror 63 that reflects the laser light L from thelaser oscillator 1, the variable curvaturespherical mirror 67 that reflects the laser light L reflected by the sphericalconvex mirror 63, and theconcave mirror 62 having different curvatures in two orthogonal axes. - The spherical
convex mirror 63 and the variable curvaturespherical mirror 67 are placed so as to be substantially opposed to each other so that the laser light L that has entered the corresponding mirror is emitted to an opposite direction. - The
concave mirror 62 reflects the laser light L reflected by the variable curvaturespherical mirror 67 to introduce the laser light L to the optical pathlength fixing mechanism 7 side. - The reflective
beam expander mechanism 6B described above (FIG. 4 ) requires thereflection mirror 68 for restricting the incident angle with respect to the variable curvaturespherical mirror 67 in order to inhibit astigmatism. The reflectivebeam expander mechanism 6C illustrated inFIG. 5 does not require thereflection mirror 68, because the sphericalconvex mirror 63 is placed on an incident side of the variable curvaturespherical mirror 67 and the variable curvaturespherical mirror 67 and the sphericalconvex mirror 63 are placed so as to be opposed to each other. - Specifically, by using the reflective
beam expander mechanism 6C illustrated inFIG. 5 , thereflection mirror 68 is unnecessary and the incident angles of the laser light L with respect to the variable curvaturespherical mirror 67 and the sphericalconvex mirror 63, respectively, can be restricted to a range in which astigmatism does not influence the processing quality. - Further, simplification of the transmission optical system reduces the influence of thermal lenses of the optical elements, and thus, stable processing can be realized. Further, because the transmission optical system is simplified, the optical path design flexibility can be enhanced.
- As described above, the reflective
beam expander mechanism 6C according to the fifth embodiment (FIG. 5 ) of the present invention includes the variable curvaturespherical mirror 67 and the spherical convex mirror 63 (spherical mirror), and the variable curvaturespherical mirror 67 is placed so as to be opposed to the sphericalconvex mirror 63 in the reflectivebeam expander mechanism 6C. - This improves the processing precision as in the above description, and by placing the spherical
convex mirror 63 and the variable curvaturespherical mirror 67 so as to be opposed to each other, thereflection mirror 68 for restricting the incident angles of the laser light L with respect to the mirrors to acute angles, respectively, becomes unnecessary. Thus, the processing can be stabilized through simplification of the optical path and reduction in thermal lens effect. - Note that, in the above-mentioned fifth embodiment (
FIG. 5 ), the reflectivebeam expander mechanism 6C including theconcave mirror 62 having different curvatures in two orthogonal axes and the variable curvaturespherical mirror 67 is used, but, as illustrated inFIG. 6 , a reflectivebeam expander mechanism 6D including avariable curvature mirror 64 having changeable curvatures in two orthogonal axes may also be used. -
FIG. 6 is a block diagram schematically illustrating a principal part of a laser processing device according to a sixth embodiment of the present invention. The same components as those described above (seeFIG. 5 ) are denoted by the same reference symbols as those described above, and detailed description thereof is omitted herein. - In
FIG. 6 , the reflectivebeam expander mechanism 6D according to the sixth embodiment of the present invention includes, as a transmission optical system, the sphericalconvex mirror 63 that reflects the laser light L from thelaser oscillator 1 and thevariable curvature mirror 64 having changeable curvatures in two orthogonal axes. - The
variable curvature mirror 64 having changeable curvatures in two orthogonal axes has the function of both theconcave mirror 62 having different curvatures in two orthogonal axes and the variable curvaturespherical mirror 67 described above (FIG. 5 ), and thevariable curvature mirror 64 reflects the laser light L reflected by the sphericalconvex mirror 63 to introduce the laser light L to the optical pathlength fixing mechanism 7 side. - By using the reflective
beam expander mechanism 6D illustrated inFIG. 6 , the transmission optical system is simplified and the number of the optical elements is reduced. Thus, the influence of thermal lenses can be further reduced, and in addition, stable processing can be realized. Further, the transmission optical system is simplified, and hence the optical path design flexibility can be enhanced. - As described above, the reflective
beam expander mechanism 6D according to the sixth embodiment (FIG. 6 ) of the present invention includes thevariable curvature mirror 64 having changeable curvatures in two orthogonal axes. With thevariable curvature mirror 64, both the mirror having different curvatures in two orthogonal axes and the variable curvature spherical mirror described above can be collected as a single optical element. - Therefore, the number of the optical elements can be reduced, and the stabilization of the processing precision can be realized through simplification of the optical path and reduction in thermal lens effect.
- Note that, the
convex mirror 61 having different curvatures in two orthogonal axes and theconcave mirror 62 having different curvatures in two orthogonal axes of the above-mentioned first to sixth embodiments (FIG. 1 toFIG. 6 ) may be provided in amirror adjusting mechanism 90 illustrated inFIG. 8 . - In
FIG. 8 , themirror adjusting mechanism 90 includes a mechanism that can move a fixed mirror in a horizontal direction and in a vertical direction and can rotate the fixed mirror within a mirror plane about a center of the mirror by using a horizontaldirection adjustment screw 91, a verticaldirection adjustment screw 92, and a rotationaldirection adjustment screw 93. - The
convex mirror 61 and theconcave mirror 62 each having different curvatures in two orthogonal axes have lower precision curvatures around edges thereof due to a problem of processing precision of a spherical surface, and thus it is desired to radiate the laser light L to the vicinity of centers thereof. However, a pass line of the laser light L changes depending on thermal loads of the transmission optical system and the oscillator and change in surrounding environments such as temperature and humidity. - Further, when an incidence plane of the laser light L deviates from an axis along which the curvature is designed, a beam has a shape of an ellipsoid of revolution, and the processing quality is lowered.
- By the
mirror adjusting mechanism 90 illustrated inFIG. 8 , even if the pass line of the laser light L changes, the laser light L is radiated to centers of theconvex mirror 61 and theconcave mirror 62 each having different curvatures in two orthogonal axes, and the laser light can be transmitted without distortion of the beam shape. Note that, in this embodiment, themirror adjusting mechanism 90 is a mechanism that carries out adjustment with the horizontaldirection adjustment screw 91, the verticaldirection adjustment screw 92, and the rotationaldirection adjustment screw 93, but a piezoelectric element may be used instead of a screw.
Claims (2)
1. A laser processing device, comprising:
a laser oscillator for emitting laser light;
a processing table on which an object to be processed is placed;
a transmission optical system for transmitting the laser light emitted from the laser oscillator to the processing table;
a processing head for condensing and radiating the laser light transmitted via the transmission optical system to the object to be processed; and
moving means for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed,
wherein the transmission optical system comprises a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator, and
wherein the reflective beam expander mechanism comprises a mirror having different curvatures in two orthogonal axes.
2. A laser processing device according to claim 1 ,
wherein the transmission optical system comprises an optical path length fixing mechanism placed at a position capable of receiving the laser light emitted from the mirror having different curvatures in two orthogonal axes,
wherein the optical path length fixing mechanism comprises a mirror group including a plurality of mirrors and a moving mechanism for translating the mirror group,
wherein the plurality of mirrors of the mirror group are placed so that a direction of travel of incident light to the mirror group and a direction of travel of output light from the mirror group are opposite and in parallel to each other, and
wherein the moving mechanism translates the mirror group with respect to the direction of the travel of the incident light and the direction of the travel of the output light so as to cancel out change in relative position between the object to be processed and the laser light to be radiated to the object to be processed to maintain a fixed optical path length of the laser light radiated to the object to be processed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/139,460 US20160238839A1 (en) | 2012-06-15 | 2016-04-27 | Laser processing device |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-135988 | 2012-06-15 | ||
JP2012135988 | 2012-06-15 | ||
PCT/JP2013/065214 WO2013187259A1 (en) | 2012-06-15 | 2013-05-31 | Laser processing device |
US201414401572A | 2014-11-17 | 2014-11-17 | |
US15/139,460 US20160238839A1 (en) | 2012-06-15 | 2016-04-27 | Laser processing device |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/065214 Division WO2013187259A1 (en) | 2012-06-15 | 2013-05-31 | Laser processing device |
US14/401,572 Division US9348138B2 (en) | 2012-06-15 | 2013-05-31 | Laser processing device |
Publications (1)
Publication Number | Publication Date |
---|---|
US20160238839A1 true US20160238839A1 (en) | 2016-08-18 |
Family
ID=49758087
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/401,572 Active 2033-07-01 US9348138B2 (en) | 2012-06-15 | 2013-05-31 | Laser processing device |
US15/139,460 Abandoned US20160238839A1 (en) | 2012-06-15 | 2016-04-27 | Laser processing device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/401,572 Active 2033-07-01 US9348138B2 (en) | 2012-06-15 | 2013-05-31 | Laser processing device |
Country Status (5)
Country | Link |
---|---|
US (2) | US9348138B2 (en) |
JP (1) | JP5885173B2 (en) |
CN (1) | CN104379296B (en) |
DE (1) | DE112013002945T5 (en) |
WO (1) | WO2013187259A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015199114A (en) * | 2014-04-10 | 2015-11-12 | 三菱電機株式会社 | Laser processing device and laser processing method |
JP2015199113A (en) * | 2014-04-10 | 2015-11-12 | 三菱電機株式会社 | Laser processing device and laser processing method |
CN108292595B (en) * | 2015-12-25 | 2022-09-16 | 极光先进雷射株式会社 | Laser irradiation device |
KR20170087610A (en) * | 2016-01-21 | 2017-07-31 | 삼성전자주식회사 | Apparatus for cutting a wafer |
CN106312335B (en) * | 2016-09-14 | 2017-12-19 | 张立国 | A kind of laser drill and drilling fill system and method |
CN107908011B (en) * | 2017-11-14 | 2019-09-17 | 海信集团有限公司 | A kind of attenuator of variable focal point, laser light source and projection display apparatus |
JP7169746B2 (en) * | 2018-02-06 | 2022-11-11 | Jswアクティナシステム株式会社 | LASER Peeling Apparatus, Laser Peeling Method, and Organic EL Display Manufacturing Method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4336580A (en) * | 1978-08-25 | 1982-06-22 | General Instrument Corporation | Alpha-numeric display array and method of manufacture |
US6003997A (en) * | 1997-03-14 | 1999-12-21 | Autonomous Technologies Corporation | Constant path-length beam translating system and method |
US6518584B1 (en) * | 1999-10-25 | 2003-02-11 | James Woodruff | System and method for characterizing targets using two forms of optical irradiation and acoustic irradiation |
US20080212327A1 (en) * | 2004-08-23 | 2008-09-04 | Carl Zeiss Smt Ag | Illumination System of a Microlithographic Exposure Apparatus |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4480169A (en) | 1982-09-13 | 1984-10-30 | Macken John A | Non contact laser engraving apparatus |
JPH06277867A (en) * | 1991-08-05 | 1994-10-04 | Tanaka Seisakusho Kk | Laser beam machine |
US5365364A (en) * | 1991-12-10 | 1994-11-15 | Kollmorgen Corporation | Optical scanner and printer |
JPH05305473A (en) * | 1992-05-06 | 1993-11-19 | Amada Co Ltd | Laser beam machine |
GB2267340A (en) * | 1992-05-27 | 1993-12-01 | Roke Manor Research | Optical system for measuring surface curvature using a rotatable mirror |
JP2980788B2 (en) * | 1992-10-21 | 1999-11-22 | 三菱電機株式会社 | Laser device |
JPH07144291A (en) * | 1993-11-25 | 1995-06-06 | Mitsubishi Electric Corp | Method for reducing astigmatism of laser beam machine |
JP3139932B2 (en) | 1995-03-15 | 2001-03-05 | 新日本製鐵株式会社 | Laser processing equipment |
DE19782307T1 (en) * | 1997-12-26 | 2001-02-01 | Mitsubishi Electric Corp | Laser processing machine |
JPH11245074A (en) | 1998-03-06 | 1999-09-14 | Oimatsu Sangyo:Kk | Focal point spot diameter variable device of laser beam in laser processing machine |
CN100504496C (en) * | 2001-01-30 | 2009-06-24 | 松下电器产业株式会社 | Deformable mirror and information apparatus comprising the deformable mirror |
JP4370092B2 (en) * | 2002-03-27 | 2009-11-25 | オリンパス株式会社 | An optical apparatus comprising a control method for an optical element having variable optical characteristics and a control means based on the control method. |
US20040001677A1 (en) * | 2002-04-23 | 2004-01-01 | Kondis John P. | Telescopic collimator and method of manufacture |
JP2004247947A (en) * | 2003-02-13 | 2004-09-02 | Olympus Corp | Optical apparatus |
US7131740B2 (en) * | 2004-03-17 | 2006-11-07 | Olympus Corporation | Optical system and optical apparatus provided with the same |
US7229178B1 (en) * | 2004-12-20 | 2007-06-12 | Sandia Corporation | Variable focal length deformable mirror |
TW200923418A (en) * | 2005-01-21 | 2009-06-01 | Nikon Corp | Exposure device, exposure method, fabricating method of device, exposure system, information collecting device, and measuring device |
JP4291287B2 (en) * | 2005-03-09 | 2009-07-08 | ファナック株式会社 | Laser equipment |
CN100496855C (en) * | 2005-08-19 | 2009-06-10 | 中国科学院光电技术研究所 | Laser cutting machine tool for precision finishing |
JP2007148374A (en) * | 2005-10-26 | 2007-06-14 | Funai Electric Co Ltd | Variable-shape mirror and optical pickup apparatus therewith |
US7724436B2 (en) * | 2006-09-18 | 2010-05-25 | 3M Innovative Properties Company | Reflective corrector for optical projection engine |
JP4401410B2 (en) | 2007-11-21 | 2010-01-20 | 三菱電機株式会社 | Laser processing equipment |
EP2232322A2 (en) * | 2007-12-19 | 2010-09-29 | Optyka Limited | An optical system and method |
BRPI0906491A2 (en) * | 2008-01-30 | 2015-07-14 | Univ California | Method for image reconstruction. |
JP2009193008A (en) * | 2008-02-18 | 2009-08-27 | Sharp Corp | Image display device |
DE112009000774B4 (en) * | 2008-04-04 | 2018-02-15 | Mitsubishi Electric Corporation | Laser processing device including a process control device |
FR2930352B1 (en) * | 2008-04-21 | 2010-09-17 | Commissariat Energie Atomique | IMPROVED MEMBRANE, IN PARTICULAR FOR A DEFORMABLE MEMBRANE OPTICAL DEVICE |
WO2009148022A1 (en) * | 2008-06-04 | 2009-12-10 | 三菱電機株式会社 | Laser processing device and laser processing system |
US7649691B2 (en) * | 2008-06-20 | 2010-01-19 | The Boeing Company | Dynamic variable shape optical element |
CN101350495A (en) * | 2008-09-02 | 2009-01-21 | 清华大学 | Raman laser with various reflection index |
DE102010028111B4 (en) * | 2010-04-22 | 2016-01-21 | Technische Universität Dresden | Micromechanical element |
-
2013
- 2013-05-31 US US14/401,572 patent/US9348138B2/en active Active
- 2013-05-31 DE DE201311002945 patent/DE112013002945T5/en active Pending
- 2013-05-31 JP JP2014521265A patent/JP5885173B2/en active Active
- 2013-05-31 CN CN201380031615.4A patent/CN104379296B/en active Active
- 2013-05-31 WO PCT/JP2013/065214 patent/WO2013187259A1/en active Application Filing
-
2016
- 2016-04-27 US US15/139,460 patent/US20160238839A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4336580A (en) * | 1978-08-25 | 1982-06-22 | General Instrument Corporation | Alpha-numeric display array and method of manufacture |
US6003997A (en) * | 1997-03-14 | 1999-12-21 | Autonomous Technologies Corporation | Constant path-length beam translating system and method |
US6518584B1 (en) * | 1999-10-25 | 2003-02-11 | James Woodruff | System and method for characterizing targets using two forms of optical irradiation and acoustic irradiation |
US20080212327A1 (en) * | 2004-08-23 | 2008-09-04 | Carl Zeiss Smt Ag | Illumination System of a Microlithographic Exposure Apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN104379296B (en) | 2016-06-29 |
JP5885173B2 (en) | 2016-03-15 |
CN104379296A (en) | 2015-02-25 |
JPWO2013187259A1 (en) | 2016-02-04 |
DE112013002945T5 (en) | 2015-04-09 |
US20150137004A1 (en) | 2015-05-21 |
WO2013187259A1 (en) | 2013-12-19 |
US9348138B2 (en) | 2016-05-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20160238839A1 (en) | Laser processing device | |
US6873640B2 (en) | Laser diode collimating system | |
EP2206012B1 (en) | Beam-steering apparatus having five degrees of freedom of line-of-sight steering | |
EP3021153B1 (en) | Optical apparatus, processing apparatus, and article manufacturing method | |
US11906666B2 (en) | Optical device having two scanning components | |
EP3514575A2 (en) | Light emission apparatus, object information detection apparatus, optical path adjustment method, object information detection method, and light modulation unit | |
US20140253999A1 (en) | Compact internal field of view switch and pupil relay | |
US20170207605A1 (en) | Semiconductor laser device | |
US9876330B1 (en) | Wavelength tunable external cavity quantum cascade laser utilizing an angle tuned immersion grating as a wavelength selective filter element | |
US20210041535A1 (en) | Light irradiation apparatus and laser radar apparatus | |
US11520173B2 (en) | Transmission type adaptive optical system | |
US11121518B1 (en) | Systems and methods for laser beam expander alignment and stabilization | |
EP4025951A1 (en) | System and method for correcting for atmospheric jitter and high energy laser broadband interference using fast steering mirrors | |
JP2011251306A (en) | Polarization azimuth angle adjusting device and laser beam machining apparatus | |
KR101924540B1 (en) | Alignment Method for Off-axis Reflective Optical System | |
JP6595879B2 (en) | Optical apparatus, processing apparatus, and article manufacturing method | |
US20200088979A1 (en) | Optical apparatus | |
JP7124712B2 (en) | Optical communication device | |
EP3695261B1 (en) | Refocusing device | |
US9077137B2 (en) | Laser assembly with package beam pointing registration | |
US20220179225A1 (en) | Compact in-line reflective optical beam expander or reducer with adjustable focus | |
Huber et al. | Impact of absorption in fast axis collimation lenses | |
JP2010032630A (en) | Variable dispersion compensator and method of controlling the same | |
JPH0915472A (en) | Light source device and laser scanning optical device | |
JP2874806B2 (en) | Optical device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |