US20110071775A1 - Pressure measurement using a mems device - Google Patents
Pressure measurement using a mems device Download PDFInfo
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- US20110071775A1 US20110071775A1 US12/956,611 US95661110A US2011071775A1 US 20110071775 A1 US20110071775 A1 US 20110071775A1 US 95661110 A US95661110 A US 95661110A US 2011071775 A1 US2011071775 A1 US 2011071775A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
- G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Definitions
- Microelectromechanical systems include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices.
- MEMS device One type of MEMS device is called an interferometric modulator.
- interferometric modulator or interferometric light modulator refers to a device that selectively absorbs, transmits, and/or reflects light using the principles of optical interference.
- an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal.
- one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap.
- the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator.
- Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
- the device of the current invention is intended to measure the pressure about the device, and although it has a similar structure as an interferometric modulator, it may or may not have the optical properties of a typical interference modulator.
- One aspect of the invention is a device for measuring pressure comprising at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.
- Another aspect of the invention is a method of measuring ambient pressure comprising applying a voltage across two layers of a MEMS device, measuring a value characteristic of the response time of the device, and determining a pressure about the device based on the measured value.
- Yet another aspect of the invention is a device for measuring pressure comprising at least one element comprising two conductive layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a change in voltage applied across the two layers, a measuring module configured to measure current flowing between the two conductive layers as a function of time when there is a change in voltage applied between the two conductive plates, and a processor configured to determine the time difference between when the voltage pulse is applied and when the local maximum of the motion current occurs, wherein the processor is further configured to associate the time difference with an ambient pressure.
- FIG. 1A shows an embodiment of the invention in the released state.
- FIG. 2 is a flowchart which shows a method of measuring pressure according to one embodiment of the invention.
- the bistable nature of such a MEMS device is enabled by a linear mechanical force competing with a nonlinear electrostatic force. This creates hysteresis in the device.
- the position of the first layer 24 is apart from the second layer, and the device is in the relaxed state, indicated as point A.
- the MEMS device remains in the relaxed state until a threshold is reached, indicated as point B.
- the first layer 24 changes position to be closer to the second layer 26 and the MEMS device is in the actuated state, indicated by point C.
- the device may be used to measure ambient pressure as a barometer.
- the device may be used as an altimeter.
- the device may be used to measure blood pressure as part of a sphygmomanometer.
- the device may be used to record pressure applied by a user.
- the device is further configured as an interferometric modulator has particularly configurable optical properties, as described below. As such, it may be possible to use the device as part of a touch-screen display.
- the device is described to measure air pressure, it is noted that other forms of pressure may also be measured such a configured MEMS device.
- the first layer, a movable reflective layer 14 a is illustrated in a relaxed position at a predetermined distance from the second layer, an optical stack 16 a , which includes a partially reflective layer.
- the movable reflective layer 14 b is illustrated in an actuated position adjacent to the optical stack 16 b.
- Some embodiments of the invention may include a display element with which to output the measured ambient pressure.
- the display element may be an LCD display, such as those used in wristwatches, or the display element may be an interferometric array. In the case an interferometric array is used to display the ambient pressure, it may be possible to configure the array to both measure and display the ambient pressure about the device.
Abstract
A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and is indicative of the ambient pressure about the device.
Description
- This application is a continuation of U.S. application Ser. No. 12/141,326, filed Jun. 18, 2008, which is hereby incorporated by reference in its entirety.
- Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs, transmits, and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
- The device of the current invention is intended to measure the pressure about the device, and although it has a similar structure as an interferometric modulator, it may or may not have the optical properties of a typical interference modulator.
- One aspect of the invention is a device for measuring pressure comprising at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.
- Another aspect of the invention is a method of measuring ambient pressure comprising applying a voltage across two layers of a MEMS device, measuring a value characteristic of the response time of the device, and determining a pressure about the device based on the measured value.
- Yet another aspect of the invention is a device for measuring pressure comprising at least one element comprising two conductive layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a change in voltage applied across the two layers, a measuring module configured to measure current flowing between the two conductive layers as a function of time when there is a change in voltage applied between the two conductive plates, and a processor configured to determine the time difference between when the voltage pulse is applied and when the local maximum of the motion current occurs, wherein the processor is further configured to associate the time difference with an ambient pressure.
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FIG. 1A shows an embodiment of the invention in the released state. -
FIG. 1B shows an embodiment of the invention in the actuated state. -
FIG. 1C shows an applied voltage and the current response of one embodiment of the invention due to the applied voltage. -
FIG. 2 is a flowchart which shows a method of measuring pressure according to one embodiment of the invention. -
FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of a MEMS device. -
FIG. 4 is an isometric view depicting a portion of one embodiment of the invention as an interferometric modulator display in which the first layer, a movable reflective layer, of a first interferometric modulator is in a relaxed position and the first layer of a second interferometric modulator is in an actuated position. -
FIG. 5 is an exemplary embodiment of the invention. - Typical usage of an interferometric light modulator involves taking advantage of the optical properties of the device. In some embodiments, the interferometric light modulator is a bistable device having two states, each with different optical properties. The state a particular modulator is in is controllable by the application of an appropriate electrical signal. Thus, the interferometric light modulator is well-suited for display applications. However, other properties of a MEMS device having similar structure to an interferometric light modulator, can be used for other purposes, e.g. the measurement of the ambient pressure about the device.
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FIG. 1A shows an embodiment of the invention in the relaxed state at a first time, andFIG. 1B shows the same MEMS device in the actuated state at a second time.FIG. 1C shows an applied voltage, capable of causing actuation, and the current response of one embodiment of the invention due to the applied voltage. The MEMS device shown inFIGS. 1A and 1B comprises afirst layer 24 and asecond layer 26. The two layers may be separated bysupports 28. When a voltage is immediately applied across the two layers of the device, the device takes some time to change states, from the relaxed state shown inFIG. 1A to the actuated state shown inFIG. 1B . It is appreciated that the device may be designed without supports 28, or that both layers may move towards each other upon the application of a voltage. - The time it takes for such a MEMS device to actuate or release depends on the design of the device, the voltage signal, and the ambient pressure. In one embodiment, the actuation time of the modulator is a linear function of the ambient pressure. As such, the MEMS device can be used, with appropriate control and measurement circuitry, as a pressure sensor.
- In one embodiment, an applied
voltage 30 changing from afirst value 32 to asecond value 34 causes thefirst layer 24 to begin moving towards thesecond layer 26. The resultingcurrent response 36 may exhibit multiple peaks, as measured by anammeter 22 connected between thefirst layer 24 and thesecond layer 26. In general, thecurrent response 36 can be described by the following equation: -
- The
first peak 38 is caused by the change in the appliedvoltage 30 from afirst value 32 to asecond value 34, as described by the first term in the above equation. Thesecond peak 40 is caused by the change in capacitance associated with the movement of thefirst layer 24 relative to thesecond layer 26, as described by the second term in the above equation. The motion of thefirst layer 24 relative to the second 26, and thus, thesecond peak 40 in thecurrent response 36 is affected by the ambient pressure. - As the
first layer 24 picks up speed as it moves towards thesecond layer 26 there is an increase in the measured current corresponding to the left half of thesecond peak 40. At a point of maximum velocity, thefirst layer 24 begins to slow down as it pushes air out from between it and thesecond layer 26. This point is indicated by a maximum in thesecond peak 40 of thecurrent response 36. Finally, thefirst layer 24 comes to rest, with the device in an actuated state. The actuation time of the device can thus be measured in a number of ways. For instance, the actuation time can be considered the amount of time required for thefirst layer 24 to reach maximum velocity. The actuation time can also be considered the amount of time required for the first layer to move fully from a relaxed state to an actuated state. The actuation time may be characterized by measuring the sharpness of thesecond peak 40, e.g. measuring the time between when thesecond peak 40 reaches 50% of the maximum for the first time while increasing and when thesecond peak 40 reaches 50% of the maximum for the second time while decreasing. The release time, i.e. the time it takes the change from the actuate state to the release state, is also a function of the pressure and can also be used to measure the ambient pressure to which the device is exposed. -
FIG. 2 is a flowchart which shows amethod 50 of measuring pressure according to one embodiment of the invention. In a first stage, a voltage is applied across two layers of aMEMS device 72. In the next stage, the current response resulting from this applied voltage is measured 74. In the next stage, a value characteristic of the response time of the device is obtained based on the measuredcurrent response 76. In the final stage, the pressure about the device is obtained based on the value characteristic of theresponse time 78. - The bistable nature of such a MEMS device is enabled by a linear mechanical force competing with a nonlinear electrostatic force. This creates hysteresis in the device. In one embodiment of the invention, as shown in
FIG. 3 , when no voltage is applied across thefirst layer 24 and thesecond layer 26, the position of thefirst layer 24 is apart from the second layer, and the device is in the relaxed state, indicated as point A. As the voltage across the two layers is increased, the MEMS device remains in the relaxed state until a threshold is reached, indicated as point B. After the voltage across the two layers exceeds this threshold, thefirst layer 24 changes position to be closer to thesecond layer 26 and the MEMS device is in the actuated state, indicated by point C. As the voltage is decreased, the MEMS device stays in the actuated state even as the voltage is decreased below the voltage which first caused the actuation of the element, indicated by point D. After the voltage has been decreased below a second threshold, the MEMS device enters the relaxed state, indicated again by point A. The hysteresis effect occurs regardless of the polarity of the voltage, i.e. the same is true if a negative voltage rather than a positive voltage is used. - As just described, one embodiment of invention exhibits hysteresis. Thus, the applied voltage to actuate or release the device can take many forms. As shown in
FIG. 1C , the applied voltage may be a step function from a release voltage to an actuation voltage. However, a change from a hold voltage (e.g. 5 volts) to an actuation voltage (e.g. 10 volts) can also cause actuation in a device in the release state. Similarly, although a step function is shown inFIG. 1C , a periodic function, such as a square wave, may be advantageous to repeatedly measure the pressure about the device as it repeatedly changes states. - The use of a bilayer MEMS device or an array of such MEMS devices, as a pressure sensor, has many advantages over typical pressure sensors. In some embodiments, the construction of such a MEMS device lends itself to the creation of an array of such devices. The use of an array adds redundancy to the measurement. If an element or even a fraction of the elements fail to operate, the device as a whole can still be used to measure pressure.
- As a pressure sensor, the device may be used to measure ambient pressure as a barometer. The device may be used as an altimeter. The device may be used to measure blood pressure as part of a sphygmomanometer. With appropriate design, the device may be used to record pressure applied by a user. In one embodiment of the invention, the device is further configured as an interferometric modulator has particularly configurable optical properties, as described below. As such, it may be possible to use the device as part of a touch-screen display. Also, although the device is described to measure air pressure, it is noted that other forms of pressure may also be measured such a configured MEMS device.
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FIG. 4 is an isometric view depicting a portion of one embodiment of an interferometric modulator array in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position. As described, a MEMS device designed to measure pressure can be further configured with specific optical properties. Similarly, standard interference modulators can be used as a general MEMS device to measure ambient pressure. The depicted portion of the modulator array inFIG. 4 includes two adjacentinterferometric modulators interferometric modulator 12 a on the left, the first layer, a movablereflective layer 14 a, is illustrated in a relaxed position at a predetermined distance from the second layer, anoptical stack 16 a, which includes a partially reflective layer. In theinterferometric modulator 12 b on the right, the movablereflective layer 14 b is illustrated in an actuated position adjacent to theoptical stack 16 b. - The optical stacks 16 a and 16 b (collectively referred to as optical stack 16) typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent, and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a
transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials. - In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable
reflective layers posts 18 and an intervening sacrificial material deposited between theposts 18. When the sacrificial material is etched away, the movablereflective layers optical stacks gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device. - With no applied voltage, the
gap 19 remains between the movablereflective layer 14 a andoptical stack 16 a, with the movablereflective layer 14 a in a mechanically relaxed state, as illustrated by thepixel 12 a inFIG. 4 . However, when a potential difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not illustrated in this Figure) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by interferometriclight modulator 12 b on the right inFIG. 4 . The behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies. - Some embodiments of the invention may include a display element with which to output the measured ambient pressure. The display element may be an LCD display, such as those used in wristwatches, or the display element may be an interferometric array. In the case an interferometric array is used to display the ambient pressure, it may be possible to configure the array to both measure and display the ambient pressure about the device.
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FIG. 5 is an exemplary embodiment of the invention. In this embodiment, thedevice 50 comprises aprocessor 52, amemory 54, aninput 56, animage source module 58, atransceiver 60, a measuring module 62, acontroller 64, adriver 66, and adisplay 68. In an exemplary operation, a user wishing to measure the pressure about the device indicates this desire using theinput 56. Theprocessor 52 passes this instruction thecontroller 64, which activates adriver 66 which drives thedisplay 68. A measuring module 62 connected to display 68 measures the current response of at least one of the MEMS device embodied in thedisplay 68 and passes this information to theprocessor 52. The processor may accessmemory 54 storing code to calculate the pressure about the device from the measured current response. The device may be embodied in a general display unit which receives images from animage source module 58. Further, theimage source module 58 is connected to atransceiver 60, which may act as a transmitter and a receiver, in order to receiver new images. - The foregoing description sets forth various preferred embodiments and other exemplary but non-limiting embodiments of the inventions disclosed herein. The description gives some details regarding combinations and modes of the disclosed inventions. Other variations, combinations, modifications, modes, and/or applications of the disclosed features and aspects of the embodiments are also within the scope of this disclosure, including those that become apparent to those of skill in the art upon reading this specification. Thus, the scope of the inventions claimed herein should be determined only by a fair reading of the claims that follow.
Claims (40)
1. A device for measuring pressure comprising:
at least one element comprising two layers separated by a space, wherein a dimension of the space changes in response to an applied stimulus; and
a processor configured to determine a time period over which the dimension of the space changes from a first dimension to a second dimension, and determine, based on the determined time period, an ambient pressure about the device.
2. The device of claim 1 , wherein the at least one element comprises at least one microelectromechanical systems (MEMS) element.
3. The device of claim 1 , wherein the at least one element comprises at least one interferometric modulator.
4. The device of claim 1 , wherein the at least one element comprises a plurality of elements comprising two layers, and the processor is configured to determine a plurality of respective time periods, and determine, based on the determined time periods, an ambient pressure about the device.
5. The device of claim 1 , wherein the processor is further configured to apply a stimulus to the at least one element.
6. The device of claim 5 , wherein the stimulus comprises an applied voltage across the two layers.
7. The device of claim 1 , further comprising a display configured to display the determined pressure.
8. The device of claim 1 , wherein the processor is further configured to determine an altitude based on the determined ambient pressure, further comprising a display configured to display the determined altitude.
9. The device of claim 1 , wherein the processor is configured to determine the time period by measuring an electrical current induced by a motion of at least one of the layers.
10. The device of claim 9 , wherein the processor is configured to determine the time period by determining a time between when a voltage is applied across the two layers and when the electrical current reaches a relative maximum.
11. The device of claim 9 , wherein the processor is configured to determine the time period by determining a time between a first time and a second time, the first time and second time each being when the electrical current reaches a predetermined percentage of a relative maximum.
12. The device of claim 1 , wherein the processor is configured to determine the time period by measuring a capacitance across the two layers.
13. The device of claim 1 , wherein the processor is configured to determine the time period as a release time or actuation time of the at least one element.
14. A method of measuring pressure comprising:
applying a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
determining a time period over which the dimension of the space changes from a first dimension to a second dimension; and
determining, based on the determined time period, an ambient pressure about the element.
15. The method of claim 14 , wherein applying the stimulus comprises applying a voltage across the two layers.
16. The method of claim 14 , wherein applying the stimulus comprises applying the stimulus to a microelectromechanical systems (MEMS) element.
17. The method of claim 14 , wherein applying the stimulus comprises applying a voltage across two layers of an interferometric modulator.
18. The method of claim 14 , further comprising a displaying the determined pressure.
19. The method of claim 14 , further comprising determining an altitude based on the determined ambient pressure and displaying the determined altitude.
20. The method of claim 14 , wherein determining the time period comprises measuring an electrical current induced by a motion of at least one of the layers.
21. The method of claim 20 , wherein determining the time period comprises determining a time between when a voltage is applied across the two layers and when the electrical current reaches a relative maximum.
22. The method of claim 20 , wherein determining the time period comprises determining a time between a first time and a second time, the first time and second time each being when the electrical current reaches a predetermined percentage of a relative maximum.
23. The method of claim 14 , wherein determining the time period comprises determining the capacitance across the two layers.
24. The method of claim 14 , wherein determining the time period comprises determining a release time or actuation time of the element.
25. A system for measuring pressure comprising:
means for applying a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
means for determining a time period over which the dimension of the space changes from a first dimension to a second dimension; and
means for determining, based on the determined time period, an ambient pressure about the element.
26. The system of claims 25 , wherein the means for applying the stimulus comprises means for applying a voltage across the two layers.
27. The system of claim 25 , wherein the means for applying the stimulus comprises means for applying the stimulus to a microelectromechanical systems (MEMS) element.
28. The system of claim 25 , wherein the means for applying the stimulus comprises means for applying a voltage across two layers of an interferometric modulator.
29. The system of claim 25 , further comprising means for displaying the determined pressure.
30. The system of claim 25 , further comprising means for determining an altitude based on the determined ambient pressure and means for displaying the determined altitude.
31. The system of claim 25 , wherein the means for determining the time period comprises means for measuring an electrical current induced by a motion of at least one of the layers.
32. The system of claim 31 , wherein the means for determining the time period comprises means for determining a time between when a voltage is applied across the two layers and when the electrical current reaches a relative maximum.
33. The system of claim 31 , wherein the means for determining the time period comprises means for determining a time between a first time and a second time, the first time and second time each being when the electrical current reaches a predetermined percentage of a relative maximum.
34. The system of claim 25 , wherein the means for determining the time period comprises determining the capacitance across the two layers.
35. The system of claim 25 , wherein the means for determining the time period comprises determining a release time or actuation time of the element.
36. The system of claim 25 , wherein at least one of the means for applying a stimulus to an element, the means for means for determining a time period, and the means for determining an ambient pressure about the element comprises a processor.
37. A non-transitory computer-readable storage medium comprising instructions which, when executed by an apparatus, cause the apparatus to:
apply a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
determine a time period over which the dimension of the space changes from a first dimension to a second dimension; and
determine, based on the determined time period, an ambient pressure about the element.
38. The non-transitory computer-readable storage medium of claim 37 , wherein the instructions which cause the apparatus to apply a stimulus comprise instructions which cause the apparatus to apply a voltage across the two layers.
39. The non-transitory computer-readable storage medium of claim 37 , further comprising instructions, which when executed by the apparatus, cause the apparatus to display the determined pressure.
40. The non-transitory computer-readable storage medium of claim 37 , wherein the instructions which cause the apparatus to determine a time period comprise instructions, which cause the apparatus to determining a time between when a voltage is applied across the two layers and when the electrical current reaches a relative maximum.
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US12/141,326 US7860668B2 (en) | 2008-06-18 | 2008-06-18 | Pressure measurement using a MEMS device |
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Also Published As
Publication number | Publication date |
---|---|
US20090319220A1 (en) | 2009-12-24 |
CN102788657A (en) | 2012-11-21 |
US7860668B2 (en) | 2010-12-28 |
CN102066891A (en) | 2011-05-18 |
CN102066891B (en) | 2012-09-05 |
KR20110016995A (en) | 2011-02-18 |
WO2009155298A1 (en) | 2009-12-23 |
BRPI0915349A2 (en) | 2015-10-27 |
RU2011101312A (en) | 2012-07-27 |
EP2307867A1 (en) | 2011-04-13 |
JP2011524988A (en) | 2011-09-08 |
CA2728433A1 (en) | 2009-12-23 |
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STCB | Information on status: application discontinuation |
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Owner name: SNAPTRACK, INC., CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:QUALCOMM MEMS TECHNOLOGIES, INC.;REEL/FRAME:039891/0001 Effective date: 20160830 |