US20090032945A1 - Solder bump on a semiconductor substrate - Google Patents
Solder bump on a semiconductor substrate Download PDFInfo
- Publication number
- US20090032945A1 US20090032945A1 US12/244,699 US24469908A US2009032945A1 US 20090032945 A1 US20090032945 A1 US 20090032945A1 US 24469908 A US24469908 A US 24469908A US 2009032945 A1 US2009032945 A1 US 2009032945A1
- Authority
- US
- United States
- Prior art keywords
- layer
- opening
- solder bump
- passivation layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05075—Plural internal layers
- H01L2224/0508—Plural internal layers being stacked
- H01L2224/05082—Two-layer arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05556—Shape in side view
- H01L2224/05558—Shape in side view conformal layer on a patterned surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
- H01L2224/05572—Disposition the external layer being disposed in a recess of the surface the external layer extending out of an opening
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05647—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13022—Disposition the bump connector being at least partially embedded in the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01028—Nickel [Ni]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0504—14th Group
- H01L2924/05042—Si3N4
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Definitions
- the present invention relates to semiconductor fabrication, in particular, to solder bumps on a semiconductor substrate and fabrication methods thereof.
- US Publication No. 20040182915 to Bachman et al. discloses a method comprising forming a copper bond pad for attaching the integrated circuit to a package. Copper oxide is removed from the pad by reduction in a hydrogen ion atmosphere. Alternatively, the structure further comprises an aluminum pad disposed overlying the reduced copper pad.
- U.S. Pat. No. 6,617,674 to Becker et al. discloses a semiconductor package comprising a wafer having an active surface comprising at least one integrated circuit, wherein each integrated circuit has a plurality of bond pads; a cured silicone layer covering the surface of the wafer, provided that at least a portion of each bond pad is not covered with the silicone layer and wherein the silicone layer is prepared by the method of the invention.
- the invention can further prevent the copper bond pad from oxidation in a thermal ambient.
- Another object of the invention is to reduce the stresses created by the package of the integrated circuit chip.
- An embodiment of a method of forming a solder bump on a semiconductor substrate is provided.
- a semiconductor substrate having a top copper pad thereon is provided.
- a protective layer is formed on the semiconductor substrate and the top copper pad.
- At least one inorganic passivation layer is formed overlying the protective layer.
- the inorganic passivation layer is selectively etched to form a first opening above the top copper pad until the protective layer is exposed.
- a soft passivation layer is globally formed on the inorganic passivation layer, wherein the soft passivation layer fills the first opening.
- the soft passivation layer is selectively removed to form a second opening exposing the protective layer.
- An under bump metal layer is conformally formed along the first opening and the second opening followed by forming a solder bump on the under bump metal layer.
- An embodiment of the solder bump on a semiconductor substrate comprises a semiconductor substrate having a top copper pad thereon, a protective layer on the semiconductor substrate and at least one inorganic passivation layer overlying the protective layer with a first opening exposing the top copper pad, wherein the inorganic passivation layer has a thinner portion adjacent a top portion of the first opening.
- the solder bump further comprises a soft passivation layer on the inorganic passivation layer with a second opening larger than the first opening, an under bump metal layer conformally formed along the first opening and the second opening and a solder bump formed on the under bump metal layer.
- the second opening is smaller than the first opening so that the soft passivation layer covers the sidewalls of the first opening.
- FIG. 1 a to FIG. 8 b are cross-sections of an embodiment of a method of forming a solder bump on a semiconductor substrate.
- FIG. 9 to FIG. 16 are cross-sections of another embodiment of a method of forming a solder bump on a semiconductor substrate.
- FIG. 17 shows an embodiment of a solder bump structure on a semiconductor substrate.
- FIG. 18 shows another embodiment of a solder bump structure on a semiconductor substrate.
- FIG. 1 a shows a semiconductor substrate 100 having integrated circuits. At least one dielectric layer 102 and top copper pad 104 are formed on the semiconductor substrate 100 .
- the dielectric layer 102 comprises a low-k material with a dielectric constant less than 3.2, for example an organic polymer based dielectric or an inorganic material such as a carbon-doped oxide or fluorinated silicate glass.
- Wiring interconnects (not shown) comprising copper are formed within the dielectric layer 102 .
- Top copper pad 104 is disposed, e.g., by damascene technology, within the dielectric layer 102 and serves as a bond pad to connect internal integrated circuits formed on the semiconductor substrate 100 and external circuits.
- the top copper pad 104 is substantially coplanar with the dielectric layer 102 .
- a protective layer 106 is formed on the dielectric layer 102 and the top copper pad 104 .
- a silicon nitride layer having a thickness of about 300 to about 1000 ⁇ , preferably 750 ⁇ , is deposited on the semiconductor substrate 100 by low pressure chemical vapor deposition using dichlorosilane (SiH 2 Cl 2 ) and ammonia (NH 3 ).
- SiH 2 Cl 2 dichlorosilane
- NH 3 ammonia
- silicon nitride can be replaced by silicon oxynitride or silicon carbide.
- an inorganic passivation layer 114 consisting of a first silicon oxide layer 108 , a silicon nitride layer 110 and a second silicon oxide layer 112 is formed overlying the protective layer 106 .
- the first silicon oxide layer 108 having a thickness of about 1000 ⁇ to 3000 ⁇
- the silicon nitride layer 110 having a thickness of about 2000 ⁇ to 5000 ⁇
- the second silicon oxide layer 112 having a thickness of about 1000 ⁇ to 3000 ⁇ are sequentially deposited on the protective layer 106 .
- the inorganic passivation layer 114 a can comprise the first silicon nitride layer 108 a directly on the protective layer 106 a , a second silicon nitride layer 112 a , and a silicon oxide layer 110 a sandwiched between the first and the second silicon nitride layers 108 a and 112 a while using silicon oxide layer as the protective layer 106 a.
- a photoresist pattern (not shown) is formed on the inorganic passivation layer 114 by photolithography.
- the inorganic passivation layer 114 is then selectively etched to form a first opening 116 above the top copper pad 104 until the protective layer 106 is exposed while using the photoresist pattern as the etching mask.
- the inorganic passivation layer 114 is etched by ion reactive etching (RIE) introducing CF 4 and O 2 or CHF 3 and O 2 . Alternately, RIE can be replaced with wet etching. In this step, aluminum via and fuse trench (not shown) are simultaneously formed.
- RIE ion reactive etching
- semiconductor substrate 100 is placed in a chamber with H 2 118 introduced therein and annealed at about 390 to 410°, preferably about 400° for about 30 minutes.
- the charge damage caused by the aforementioned reactive ion etching can be repaired by annealing.
- a soft passivation layer 120 is globally coated on the inorganic passivation layer 114 and filled into the first opening 116 by spin-coating.
- the soft passivation layer 120 is preferably a photosensitive polymer such as polyimide, photoresist or other non-photosensitive stress buffer dielectric materials.
- material density of the soft passivation layer 120 is smaller than the inorganic passivation layer 114 .
- the soft passivation layer 120 is then selectively removed to form a second opening 122 exposing the protective layer 106 and connecting to the first opening 116 .
- the soft passivation layer 120 in some embodiments is initially insoluble in the developer and becomes soluble as a result of UV light irradiation so that the soft passivation layer 120 is removed by exposing UV light through a predetermined photomask and dissolved with the developer.
- the second opening 122 in the remaining soft passivation layer 120 a can be larger than the first opening 116 as shown in FIG. 5 a .
- the second opening 122 ′ in the remaining soft passivation layer 120 b is smaller than the first opening 116 as shown in FIG. 5 b , thus the soft passivation layer 120 b covers the sidewalls of the first opening 116 .
- the first opening 116 can be substantially equal to the second opening 122 in size.
- the remaining soft passivation layer 120 a is cured by a thermal treatment at 150 to 350° for 0.1 to 1 hours thus a soft passivation layer 120 a ′ which is slightly reduced in size as compared to the soft passivation layer 120 a is formed.
- the soft passivation layer 120 a ′ serves as the stress buffer to release or absorb thermal or mechanical stresses resulting from the packaging process.
- the top copper pad 104 is protected by the protective layer 106 from oxidation or damage while the soft passivation layer 120 a ′ is cured.
- the protective layer 106 is removed through the first opening 116 and second opening 122 to expose the top copper pad 104 by dry etching with a reactive gas comprising CF 4 and O 2 or CHF 3 and O 2 .
- a wet etchant such as phosphoric acid solution can be utilized to remove the protective layer 106 .
- the second silicon oxide layer 112 is partially removed during removal of the protective layer 106 so that the inorganic passivation layer 114 has a thinner portion 112 b at the top portion of the first opening 116 .
- the thinner portion 112 b is a detectable feature by for example TEM or SEM analysis.
- an under bump metal layer 124 such as titanium, nickel or an alloy thereof is conformally formed along the first opening 116 and the second opening 122 by physical vapor deposition (PVD) or sputtering.
- PVD physical vapor deposition
- a solder bump 126 made of Ag, Sn, Cu or an alloy thereof is formed on the under bump metal layer 124 .
- FIG. 8 a shows a semiconductor device 10 with a solder bump 126 on a semiconductor substrate 100 fabricated by the described exemplary process.
- the semiconductor device 10 comprises a semiconductor substrate 100 having a top copper pad 104 formed within the dielectric layer 102 .
- the semiconductor device 10 further comprises the protective layer 106 and at least one inorganic passivation layer 114 overlying the protective layer 106 with a first opening 116 exposing the top copper pad 104 .
- the protective layer 106 covers the dielectric layer 102 and a part of the top copper pad 104 .
- the inorganic passivation layer 114 has a thinner portion 112 b adjacent the top portion of the first opening 116 .
- the semiconductor device 10 further includes a soft passivation layer 120 a ′ on the inorganic passivation layer 114 with the second opening 122 larger than the first opening 116 .
- the device 10 further comprises the under bump metal layer 124 conformally formed along the first opening 116 and the second opening 122 and on the top copper pad 104 and the solder bump 126 formed on the under bump metal layer 124 .
- the soft passivation layer 120 a ′ of the semiconductor device 10 has relatively more opening shrinkage margin. Also, the semiconductor device 10 has larger opening 122 thus it has higher bump electro-migration resistance. Moreover, the adhesion between the under bump metal layer 124 and the top copper pad 104 will be better.
- FIG. 8 b shows a semiconductor device 20 with a solder bump 126 on a semiconductor substrate 100 fabricated followed by the device as shown in FIG. 5 b .
- the device of FIG. 5 b is substantially similar to that of FIG. 5 a except that the second opening 122 ′ in the soft passivation layer 120 b is smaller than the first opening 116 and the soft passivation layer 120 b covers the inorganic passivation layer 114 and sidewalls of the first opening 116 .
- the semiconductor device 20 comprises a semiconductor substrate 100 having a top copper pad 104 thereon and a protective layer 106 on a dielectric layer 102 .
- the protective layer 106 covers a part of the top copper pad 104 .
- the semiconductor device 20 comprises at least one inorganic passivation layer 114 overlying the protective layer 106 with a first opening 116 exposing the top copper pad 104 .
- a soft passivation layer 120 b with a second opening 122 ′ smaller than the first opening 116 covers the inorganic passivation layer 114 and sidewalls of the first opening 116 .
- the under bump metal layer 124 of the semiconductor device 20 is conformally formed along the second opening 122 ′ and on the soft passivation layer 120 b .
- the semiconductor device 20 further comprises a solder bump 126 formed on the under bump metal layer 124 .
- the semiconductor device 20 has relatively lower package stress on the dielectric layer 102 , since the soft passivation layer 120 b extends to the sidewall of the first opening 116 and contacts the top copper pad 104 .
- the lowermost portion, for example first silicon oxide layer 108 , of the inorganic passivation layer 114 serves as the protective layer of the top copper pad 104 .
- FIG. 9 to FIG. 16 are cross-sections of another embodiment of a method of forming a solder bump on a semiconductor substrate.
- the semiconductor device as shown in FIG. 9 is substantially similar to that of FIG. 1 a except that the inorganic passivation layer 214 is a single layer and comprises silicon oxide having a thickness of about 1000 ⁇ to 10,000 ⁇ .
- Top copper pad 104 is disposed within the dielectric layer 102 and serves as a bond pad on the semiconductor substrate 100 .
- the top copper pad 104 is substantially coplanar with the dielectric layer 102 .
- a protective layer 106 is formed on the dielectric layer 102 and the top copper pad 104 .
- a silicon nitride layer having thickness of about 500 to about 1000 ⁇ , preferably 750 ⁇ is deposited on the semiconductor substrate 100 by low pressure chemical vapor deposition using dichlorosilane (SiH 2 Cl 2 ) and ammonia (NH 3 ).
- silicon nitride can be replaced with silicon oxynitride or silicon carbide.
- the inorganic passivation layer 214 is formed on the protective layer 106 by chemical vapor deposition.
- the inorganic passivation layer 214 may comprise silicon nitride, silicon oxynitride, or silicon carbide while using silicon oxide as the material of the protective layer 106 . That is, the etch selectivity between the inorganic passivation layer 214 and the underlying protective layer 106 is preferably 1.2 to 10.
- the inorganic passivation layer 214 is selectively etched to form a first opening 116 above the top copper pad 104 until the protective layer 106 is exposed by ion reactive etching (RIE) introducing CF 4 and O 2 .
- RIE ion reactive etching
- semiconductor substrate 100 is placed in chamber with H 2 118 introduced therein and annealed at about 300 to 450°, preferably about 400° for about 30 minutes.
- the charge damage caused by the previous reactive ion etching can be repaired by the thermal treatment.
- a soft passivation layer 120 is globally coated on the inorganic passivation layer 114 and filled into the first opening 116 .
- the soft passivation layer 120 is preferably a photosensitive polymer such as polyimide or other stress buffer materials. Then, the soft passivation layer 120 is selectively removed to form a second opening 122 exposing the protective layer 106 and connecting to the first opening 116 .
- the second opening 122 in the remaining soft passivation layer 120 a can be larger than the first opening 116 as shown in FIG. 13 .
- the remaining soft passivation layer 120 a is cured by thermal treatment at 200 to 300° for 0.5 to 1 hours thus a soft passivation layer 120 a ′ which is slightly reduced in size as compared to the soft passivation layer 120 a is formed.
- the soft passivation layer 120 a ′ serves as the stress buffer to release or absorb thermal or mechanical stresses resulting from the packaging process.
- the top copper pad 104 is protected by the protective layer 106 from oxidation or damage while the soft passivation layer is cured.
- the protective layer 106 is removed through the first opening 116 and second opening 122 to expose the top copper pad 104 by dry etching with a reactive gas comprising CF 4 and O 2 or CHF 3 and O 2 .
- a wet etchant such as phosphoric acid solution can be used.
- the inorganic passivation layer 214 is partially removed during removal of the protective layer 106 so that the inorganic passivation layer 214 has a thinner portion 214 a at the top portion of the first opening 116 .
- the thinner portion 214 a is detectable feature by for example TEM or SEM analysis.
- an under bump metal layer 124 such as titanium, nickel or an alloy thereof is conformally formed along the first opening 116 and the second opening 122 by physical vapor deposition (PVD) or sputtering.
- PVD physical vapor deposition
- a solder bump 126 made of Ag, Sn, Cu or an alloy thereof is formed on the under bump metal layer 124 thus a semiconductor device 30 is formed.
- FIG. 17 shows a semiconductor device 40 with a solder bump 126 on a semiconductor substrate 100 .
- the semiconductor device 40 is substantially similar to semiconductor device 30 except that the second opening 122 through the soft passivation layer 120 a ′ is tapered from the top of the soft passivation layer 120 a′.
- FIG. 18 shows a semiconductor device 50 with a solder bump 126 on a semiconductor substrate 100 .
- the semiconductor device 50 is substantially similar to semiconductor device 30 except that the under bump metal layer 124 is coplanar with the soft passivation layer 120 a ′ and the solder bump 126 is relatively smaller.
- the solder bump process can be simplified. Furthermore, the top copper pad 104 is protected by the protective layer 106 from oxidation or damage while the soft passivation layer is cured. Moreover, the stresses such as thermal or mechanical stresses created by the package of the integrated circuit chip can be reduced.
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
A solder bump on a semiconductor substrate is provided. The solder bump has a semiconductor substrate with a top copper pad thereon, a protective layer on the semiconductor substrate and at least one inorganic passivation layer overlying the protective layer with a first opening exposing the top copper pad, wherein the inorganic passivation layer has a thinner portion adjacent a top portion of the first opening. The solder bump further has a soft passivation layer on the inorganic passivation layer with a second opening larger than the first opening, an under bump metal layer conformally formed along the first opening and the second opening and a solder bump formed on the under bump metal layer.
Description
- This patent application is a Divisional of co-pending application Ser. No. 11/347,378, filed on Feb. 6, 2006 and entitled “SOLDER BUMP ON A SEMICONDUCTOR SUBSTRATE,” for which priority is claimed under 35 U.S.C. § 120; the entire contents of which are hereby incorporated by reference.
- 1. Field of the Invention
- The present invention relates to semiconductor fabrication, in particular, to solder bumps on a semiconductor substrate and fabrication methods thereof.
- 2. Brief Discussion of the Related Art
- The reduction of the feature sizes of semiconductor devices using advanced semiconductor techniques, such as high-resolution lithography and directional etching, have dramatically increased the device packing density on integrated circuit chips formed on a substrate. However, as device packing density increases, the number of electrical metal interconnect layers on the chip must be increased to effectively wire up the discrete devices on the substrate while reducing the chip size. Typically after completing the multilevel interconnect structure, aluminum bonding pads are formed on the top surface of the interconnect structure to provide external electrical connections to the chip. A passivation layer is then applied to passivate the chip from moisture and contamination.
- US Publication No. 20040182915 to Bachman et al. discloses a method comprising forming a copper bond pad for attaching the integrated circuit to a package. Copper oxide is removed from the pad by reduction in a hydrogen ion atmosphere. Alternatively, the structure further comprises an aluminum pad disposed overlying the reduced copper pad.
- U.S. Pat. No. 6,617,674 to Becker et al. discloses a semiconductor package comprising a wafer having an active surface comprising at least one integrated circuit, wherein each integrated circuit has a plurality of bond pads; a cured silicone layer covering the surface of the wafer, provided that at least a portion of each bond pad is not covered with the silicone layer and wherein the silicone layer is prepared by the method of the invention. There are, however, still some problems regarding bond pad oxidation and stress.
- Therefore, there is still a need to provide a solder bump on a semiconductor substrate and fabrication method thereof to further prevent the copper bond pad from oxidation during a thermal ambient.
- Furthermore, there is still a need to provide a solder bump on a semiconductor substrate and fabrication method thereof to reduce the stresses created by the package of the integrated circuit chip.
- It is therefore an object of the invention to provide a solder bump on a semiconductor substrate and fabrication method thereof. The invention can further prevent the copper bond pad from oxidation in a thermal ambient.
- Another object of the invention is to reduce the stresses created by the package of the integrated circuit chip.
- An embodiment of a method of forming a solder bump on a semiconductor substrate is provided. A semiconductor substrate having a top copper pad thereon is provided. A protective layer is formed on the semiconductor substrate and the top copper pad. At least one inorganic passivation layer is formed overlying the protective layer. The inorganic passivation layer is selectively etched to form a first opening above the top copper pad until the protective layer is exposed. A soft passivation layer is globally formed on the inorganic passivation layer, wherein the soft passivation layer fills the first opening. The soft passivation layer is selectively removed to form a second opening exposing the protective layer. An under bump metal layer is conformally formed along the first opening and the second opening followed by forming a solder bump on the under bump metal layer.
- An embodiment of the solder bump on a semiconductor substrate comprises a semiconductor substrate having a top copper pad thereon, a protective layer on the semiconductor substrate and at least one inorganic passivation layer overlying the protective layer with a first opening exposing the top copper pad, wherein the inorganic passivation layer has a thinner portion adjacent a top portion of the first opening. The solder bump further comprises a soft passivation layer on the inorganic passivation layer with a second opening larger than the first opening, an under bump metal layer conformally formed along the first opening and the second opening and a solder bump formed on the under bump metal layer.
- Another embodiment of the invention, the second opening is smaller than the first opening so that the soft passivation layer covers the sidewalls of the first opening.
- Further scope of the applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
- The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and thus are not limitative of the present invention, and wherein:
-
FIG. 1 a toFIG. 8 b are cross-sections of an embodiment of a method of forming a solder bump on a semiconductor substrate. -
FIG. 9 toFIG. 16 are cross-sections of another embodiment of a method of forming a solder bump on a semiconductor substrate. -
FIG. 17 shows an embodiment of a solder bump structure on a semiconductor substrate. -
FIG. 18 shows another embodiment of a solder bump structure on a semiconductor substrate. -
FIG. 1 a shows asemiconductor substrate 100 having integrated circuits. At least onedielectric layer 102 andtop copper pad 104 are formed on thesemiconductor substrate 100. Thedielectric layer 102 comprises a low-k material with a dielectric constant less than 3.2, for example an organic polymer based dielectric or an inorganic material such as a carbon-doped oxide or fluorinated silicate glass. Wiring interconnects (not shown) comprising copper are formed within thedielectric layer 102.Top copper pad 104 is disposed, e.g., by damascene technology, within thedielectric layer 102 and serves as a bond pad to connect internal integrated circuits formed on thesemiconductor substrate 100 and external circuits. Thetop copper pad 104 is substantially coplanar with thedielectric layer 102. Aprotective layer 106 is formed on thedielectric layer 102 and thetop copper pad 104. For example, a silicon nitride layer having a thickness of about 300 to about 1000 Å, preferably 750 Å, is deposited on thesemiconductor substrate 100 by low pressure chemical vapor deposition using dichlorosilane (SiH2Cl2) and ammonia (NH3). Alternately, silicon nitride can be replaced by silicon oxynitride or silicon carbide. - In some embodiments of the invention, an
inorganic passivation layer 114 consisting of a firstsilicon oxide layer 108, asilicon nitride layer 110 and a secondsilicon oxide layer 112 is formed overlying theprotective layer 106. The firstsilicon oxide layer 108 having a thickness of about 1000 Å to 3000 Å, thesilicon nitride layer 110 having a thickness of about 2000 Å to 5000 Å, and the secondsilicon oxide layer 112 having a thickness of about 1000 Å to 3000 Å are sequentially deposited on theprotective layer 106. - Alternately, as shown in
FIG. 1 b, theinorganic passivation layer 114 a can comprise the firstsilicon nitride layer 108 a directly on theprotective layer 106 a, a secondsilicon nitride layer 112 a, and asilicon oxide layer 110 a sandwiched between the first and the secondsilicon nitride layers protective layer 106 a. - As shown in
FIG. 1 a andFIG. 2 , a photoresist pattern (not shown) is formed on theinorganic passivation layer 114 by photolithography. Theinorganic passivation layer 114 is then selectively etched to form afirst opening 116 above thetop copper pad 104 until theprotective layer 106 is exposed while using the photoresist pattern as the etching mask. Theinorganic passivation layer 114 is etched by ion reactive etching (RIE) introducing CF4 and O2 or CHF3 and O2. Alternately, RIE can be replaced with wet etching. In this step, aluminum via and fuse trench (not shown) are simultaneously formed. - Optionally, as shown in
FIG. 3 ,semiconductor substrate 100 is placed in a chamber withH 2 118 introduced therein and annealed at about 390 to 410°, preferably about 400° for about 30 minutes. The charge damage caused by the aforementioned reactive ion etching can be repaired by annealing. - Referring now to
FIG. 4 , asoft passivation layer 120 is globally coated on theinorganic passivation layer 114 and filled into thefirst opening 116 by spin-coating. Thesoft passivation layer 120 is preferably a photosensitive polymer such as polyimide, photoresist or other non-photosensitive stress buffer dielectric materials. Preferably, material density of thesoft passivation layer 120 is smaller than theinorganic passivation layer 114. Thesoft passivation layer 120 is then selectively removed to form asecond opening 122 exposing theprotective layer 106 and connecting to thefirst opening 116. Thesoft passivation layer 120 in some embodiments is initially insoluble in the developer and becomes soluble as a result of UV light irradiation so that thesoft passivation layer 120 is removed by exposing UV light through a predetermined photomask and dissolved with the developer. Thesecond opening 122 in the remainingsoft passivation layer 120 a can be larger than thefirst opening 116 as shown inFIG. 5 a. Alternately, thesecond opening 122′ in the remainingsoft passivation layer 120 b is smaller than thefirst opening 116 as shown inFIG. 5 b, thus thesoft passivation layer 120 b covers the sidewalls of thefirst opening 116. Also, thefirst opening 116 can be substantially equal to thesecond opening 122 in size. - Referring now to
FIG. 5 a andFIG. 6 , the remainingsoft passivation layer 120 a is cured by a thermal treatment at 150 to 350° for 0.1 to 1 hours thus asoft passivation layer 120 a′ which is slightly reduced in size as compared to thesoft passivation layer 120 a is formed. Thesoft passivation layer 120 a′ serves as the stress buffer to release or absorb thermal or mechanical stresses resulting from the packaging process. Furthermore, thetop copper pad 104 is protected by theprotective layer 106 from oxidation or damage while thesoft passivation layer 120 a′ is cured. - As shown in
FIG. 7 , theprotective layer 106 is removed through thefirst opening 116 andsecond opening 122 to expose thetop copper pad 104 by dry etching with a reactive gas comprising CF4 and O2 or CHF3 and O2. Alternately, a wet etchant such as phosphoric acid solution can be utilized to remove theprotective layer 106. The secondsilicon oxide layer 112 is partially removed during removal of theprotective layer 106 so that theinorganic passivation layer 114 has athinner portion 112 b at the top portion of thefirst opening 116. Thethinner portion 112 b is a detectable feature by for example TEM or SEM analysis. - Thereafter, as shown in
FIG. 8 a, an underbump metal layer 124 such as titanium, nickel or an alloy thereof is conformally formed along thefirst opening 116 and thesecond opening 122 by physical vapor deposition (PVD) or sputtering. Next, asolder bump 126 made of Ag, Sn, Cu or an alloy thereof is formed on the underbump metal layer 124. - That is,
FIG. 8 a shows asemiconductor device 10 with asolder bump 126 on asemiconductor substrate 100 fabricated by the described exemplary process. Thesemiconductor device 10 comprises asemiconductor substrate 100 having atop copper pad 104 formed within thedielectric layer 102. Thesemiconductor device 10 further comprises theprotective layer 106 and at least oneinorganic passivation layer 114 overlying theprotective layer 106 with afirst opening 116 exposing thetop copper pad 104. Theprotective layer 106 covers thedielectric layer 102 and a part of thetop copper pad 104. Theinorganic passivation layer 114 has athinner portion 112 b adjacent the top portion of thefirst opening 116. Thesemiconductor device 10 further includes asoft passivation layer 120 a′ on theinorganic passivation layer 114 with thesecond opening 122 larger than thefirst opening 116. Thedevice 10 further comprises the underbump metal layer 124 conformally formed along thefirst opening 116 and thesecond opening 122 and on thetop copper pad 104 and thesolder bump 126 formed on the underbump metal layer 124. Thesoft passivation layer 120 a′ of thesemiconductor device 10 has relatively more opening shrinkage margin. Also, thesemiconductor device 10 haslarger opening 122 thus it has higher bump electro-migration resistance. Moreover, the adhesion between the underbump metal layer 124 and thetop copper pad 104 will be better. - Alternately,
FIG. 8 b shows asemiconductor device 20 with asolder bump 126 on asemiconductor substrate 100 fabricated followed by the device as shown inFIG. 5 b. The device ofFIG. 5 b is substantially similar to that ofFIG. 5 a except that thesecond opening 122′ in thesoft passivation layer 120 b is smaller than thefirst opening 116 and thesoft passivation layer 120 b covers theinorganic passivation layer 114 and sidewalls of thefirst opening 116. Thesemiconductor device 20 comprises asemiconductor substrate 100 having atop copper pad 104 thereon and aprotective layer 106 on adielectric layer 102. Theprotective layer 106 covers a part of thetop copper pad 104. Thesemiconductor device 20 comprises at least oneinorganic passivation layer 114 overlying theprotective layer 106 with afirst opening 116 exposing thetop copper pad 104. Asoft passivation layer 120 b with asecond opening 122′ smaller than thefirst opening 116 covers theinorganic passivation layer 114 and sidewalls of thefirst opening 116. The underbump metal layer 124 of thesemiconductor device 20 is conformally formed along thesecond opening 122′ and on thesoft passivation layer 120 b. Thesemiconductor device 20 further comprises asolder bump 126 formed on the underbump metal layer 124. Thesemiconductor device 20 has relatively lower package stress on thedielectric layer 102, since thesoft passivation layer 120 b extends to the sidewall of thefirst opening 116 and contacts thetop copper pad 104. - Alternately, there is no
protective layer 106 under theinorganic passivation layer 114 in another embodiment of the invention. That is, the lowermost portion, for example firstsilicon oxide layer 108, of theinorganic passivation layer 114 serves as the protective layer of thetop copper pad 104. -
FIG. 9 toFIG. 16 are cross-sections of another embodiment of a method of forming a solder bump on a semiconductor substrate. The semiconductor device as shown inFIG. 9 is substantially similar to that ofFIG. 1 a except that theinorganic passivation layer 214 is a single layer and comprises silicon oxide having a thickness of about 1000 Å to 10,000 Å.Top copper pad 104 is disposed within thedielectric layer 102 and serves as a bond pad on thesemiconductor substrate 100. Thetop copper pad 104 is substantially coplanar with thedielectric layer 102. Aprotective layer 106 is formed on thedielectric layer 102 and thetop copper pad 104. For example, a silicon nitride layer having thickness of about 500 to about 1000 Å, preferably 750 Å is deposited on thesemiconductor substrate 100 by low pressure chemical vapor deposition using dichlorosilane (SiH2Cl2) and ammonia (NH3). Alternately, silicon nitride can be replaced with silicon oxynitride or silicon carbide. Theinorganic passivation layer 214 is formed on theprotective layer 106 by chemical vapor deposition. Alternately, theinorganic passivation layer 214 may comprise silicon nitride, silicon oxynitride, or silicon carbide while using silicon oxide as the material of theprotective layer 106. That is, the etch selectivity between theinorganic passivation layer 214 and the underlyingprotective layer 106 is preferably 1.2 to 10. - As shown in
FIG. 10 , theinorganic passivation layer 214 is selectively etched to form afirst opening 116 above thetop copper pad 104 until theprotective layer 106 is exposed by ion reactive etching (RIE) introducing CF4 and O2. - Optionally, as shown in
FIG. 11 ,semiconductor substrate 100 is placed in chamber withH 2 118 introduced therein and annealed at about 300 to 450°, preferably about 400° for about 30 minutes. The charge damage caused by the previous reactive ion etching can be repaired by the thermal treatment. - Referring now to
FIG. 12 andFIG. 13 , asoft passivation layer 120 is globally coated on theinorganic passivation layer 114 and filled into thefirst opening 116. Thesoft passivation layer 120 is preferably a photosensitive polymer such as polyimide or other stress buffer materials. Then, thesoft passivation layer 120 is selectively removed to form asecond opening 122 exposing theprotective layer 106 and connecting to thefirst opening 116. Thesecond opening 122 in the remainingsoft passivation layer 120 a can be larger than thefirst opening 116 as shown inFIG. 13 . - Referring now to
FIG. 13 andFIG. 14 , the remainingsoft passivation layer 120 a is cured by thermal treatment at 200 to 300° for 0.5 to 1 hours thus asoft passivation layer 120 a′ which is slightly reduced in size as compared to thesoft passivation layer 120 a is formed. Thesoft passivation layer 120 a′ serves as the stress buffer to release or absorb thermal or mechanical stresses resulting from the packaging process. Furthermore, thetop copper pad 104 is protected by theprotective layer 106 from oxidation or damage while the soft passivation layer is cured. - As shown in
FIG. 15 , theprotective layer 106 is removed through thefirst opening 116 andsecond opening 122 to expose thetop copper pad 104 by dry etching with a reactive gas comprising CF4 and O2 or CHF3 and O2. A wet etchant such as phosphoric acid solution can be used. Theinorganic passivation layer 214 is partially removed during removal of theprotective layer 106 so that theinorganic passivation layer 214 has athinner portion 214 a at the top portion of thefirst opening 116. Thethinner portion 214 a is detectable feature by for example TEM or SEM analysis. - As shown in
FIG. 16 , an underbump metal layer 124 such as titanium, nickel or an alloy thereof is conformally formed along thefirst opening 116 and thesecond opening 122 by physical vapor deposition (PVD) or sputtering. Next, asolder bump 126 made of Ag, Sn, Cu or an alloy thereof is formed on the underbump metal layer 124 thus asemiconductor device 30 is formed. -
FIG. 17 shows asemiconductor device 40 with asolder bump 126 on asemiconductor substrate 100. Thesemiconductor device 40 is substantially similar tosemiconductor device 30 except that thesecond opening 122 through thesoft passivation layer 120 a′ is tapered from the top of thesoft passivation layer 120 a′. -
FIG. 18 shows asemiconductor device 50 with asolder bump 126 on asemiconductor substrate 100. Thesemiconductor device 50 is substantially similar tosemiconductor device 30 except that the underbump metal layer 124 is coplanar with thesoft passivation layer 120 a′ and thesolder bump 126 is relatively smaller. - According the invention, formation of an aluminum pad is not necessary. Therefore, the solder bump process can be simplified. Furthermore, the
top copper pad 104 is protected by theprotective layer 106 from oxidation or damage while the soft passivation layer is cured. Moreover, the stresses such as thermal or mechanical stresses created by the package of the integrated circuit chip can be reduced. - While the invention has been described with reference to various illustrative embodiments, the description is not intended to be construed in a limiting sense. Various modifications of the illustrative embodiments, as well as other embodiments of the invention, will be apparent to those people skilled in the art upon reference to this description. It is therefore contemplated that the appended claims will cover any such modifications or embodiments as may fall within the scope of the invention defined by the following claims and their equivalents.
Claims (10)
1. A solder bump on a semiconductor substrate, comprising:
a semiconductor substrate having a top copper pad thereon;
a protective layer on the semiconductor substrate;
at least one inorganic passivation layer overlying the protective layer with a first opening exposing the top copper pad;
a soft passivation layer with a second opening smaller than the first opening covering the inorganic passivation layer and sidewalls of the first opening;
an under bump metal layer conformally formed along the second opening and on the soft passivation layer; and
a solder bump formed on the under bump metal layer.
2. The solder bump as claimed in claim 1 , wherein the top copper pad is embedded in a low-k dielectric material with a dielectric constant less than 3.2 and connects to copper wiring interconnects.
3. The solder bump as claimed in claim 1 , wherein the protective layer comprises silicon nitride, silicon oxynitride, or silicon carbide.
4. The solder bump as claimed in claim 3 , wherein the inorganic passivation layer is a single layer and comprises silicon oxide.
5. The solder bump as claimed in claim 1 , wherein the inorganic passivation layer is triple-layered and comprises a first silicon oxide layer, a second silicon oxide layer and a silicon nitride layer sandwiched between the first and the second silicon oxide layers.
6. The solder bump as claimed in claim 5 , wherein the soft passivation layer comprises a photosensitive polymer.
7. The solder bump as claimed in claim 6 , wherein the photosensitive polymer comprises polyimide.
8. The solder bump as claimed in claim 1 , wherein the protective layer comprises silicon oxide.
9. The solder bump as claimed in claim 8 , wherein the inorganic passivation layer is a single layer and comprises silicon nitride, silicon oxynitride, or silicon carbide.
10. The solder bump as claimed in claim 8 , wherein the inorganic passivation is triple-layered and comprises a first silicon nitride layer, a second silicon nitride layer and a silicon oxide layer sandwiched between the first and the second silicon nitride layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/244,699 US20090032945A1 (en) | 2006-02-06 | 2008-10-02 | Solder bump on a semiconductor substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/347,378 US7449785B2 (en) | 2006-02-06 | 2006-02-06 | Solder bump on a semiconductor substrate |
US12/244,699 US20090032945A1 (en) | 2006-02-06 | 2008-10-02 | Solder bump on a semiconductor substrate |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/347,378 Division US7449785B2 (en) | 2006-02-06 | 2006-02-06 | Solder bump on a semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
US20090032945A1 true US20090032945A1 (en) | 2009-02-05 |
Family
ID=38333209
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/347,378 Active US7449785B2 (en) | 2006-02-06 | 2006-02-06 | Solder bump on a semiconductor substrate |
US12/244,699 Abandoned US20090032945A1 (en) | 2006-02-06 | 2008-10-02 | Solder bump on a semiconductor substrate |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/347,378 Active US7449785B2 (en) | 2006-02-06 | 2006-02-06 | Solder bump on a semiconductor substrate |
Country Status (2)
Country | Link |
---|---|
US (2) | US7449785B2 (en) |
TW (1) | TWI311349B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120129335A1 (en) * | 2010-11-22 | 2012-05-24 | Fujitsu Semiconductor Limited | Method of manufacturing semiconductor device |
CN109300905A (en) * | 2018-10-08 | 2019-02-01 | 长江存储科技有限责任公司 | The forming method of semiconductor devices |
CN109346453A (en) * | 2018-10-08 | 2019-02-15 | 长江存储科技有限责任公司 | Semiconductor devices |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006051491A1 (en) * | 2006-10-31 | 2008-05-15 | Advanced Micro Devices, Inc., Sunnyvale | Metallization layer stack with an aluminum termination metal layer |
US7713860B2 (en) * | 2007-10-13 | 2010-05-11 | Wan-Ling Yu | Method of forming metallic bump on I/O pad |
DE102007057689A1 (en) * | 2007-11-30 | 2009-06-04 | Advanced Micro Devices, Inc., Sunnyvale | Semiconductor device having a chip area, which is designed for an aluminum-free solder bump connection, and a test structure, which is designed for an aluminum-free wire connection |
KR101468875B1 (en) * | 2008-03-14 | 2014-12-10 | 삼성전자주식회사 | Flip Chip Package |
WO2009140798A1 (en) * | 2008-05-21 | 2009-11-26 | 精材科技股份有限公司 | Electronic component package body and its packaging method |
US20110057307A1 (en) * | 2009-09-10 | 2011-03-10 | Topacio Roden R | Semiconductor Chip with Stair Arrangement Bump Structures |
US8569887B2 (en) * | 2009-11-05 | 2013-10-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post passivation interconnect with oxidation prevention layer |
CN102157404A (en) * | 2010-02-11 | 2011-08-17 | 中芯国际集成电路制造(上海)有限公司 | Method for manufacturing semiconductor device |
US8482125B2 (en) | 2010-07-16 | 2013-07-09 | Qualcomm Incorporated | Conductive sidewall for microbumps |
US8835301B2 (en) | 2011-02-28 | 2014-09-16 | Stats Chippac, Ltd. | Semiconductor device and method of forming bump structure with insulating buffer layer to reduce stress on semiconductor wafer |
TWI575684B (en) * | 2011-06-13 | 2017-03-21 | 矽品精密工業股份有限公司 | Chip-scale package structure |
CN103165481B (en) * | 2011-12-13 | 2015-07-15 | 颀邦科技股份有限公司 | Bump manufacture technology and structure thereof |
US9337154B2 (en) * | 2014-08-28 | 2016-05-10 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and method of manufacturing the same |
CN106252244A (en) * | 2016-09-22 | 2016-12-21 | 全球能源互联网研究院 | A kind of terminal passivating method and semiconductor power device |
US10658318B2 (en) * | 2016-11-29 | 2020-05-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Film scheme for bumping |
US10290596B2 (en) * | 2016-12-14 | 2019-05-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device having a passivation layer and method of making the same |
US10777450B2 (en) | 2018-12-27 | 2020-09-15 | Nanya Technology Corporation | Semiconductor substrate and method of processing the same |
FR3135347A1 (en) * | 2022-05-09 | 2023-11-10 | Stmicroelectronics (Crolles 2) Sas | Method of manufacturing an integrated circuit interconnection structure |
Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5834844A (en) * | 1995-03-24 | 1998-11-10 | Shinko Electric Industries Co., Ltd. | Semiconductor device having an element with circuit pattern thereon |
US6293457B1 (en) * | 2000-06-08 | 2001-09-25 | International Business Machines Corporation | Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization |
US20020043723A1 (en) * | 2000-10-16 | 2002-04-18 | Hironobu Shimizu | Semiconductor device and manufacturing method thereof |
US6468898B1 (en) * | 1999-09-29 | 2002-10-22 | Nec Corporation | Method of manufacturing semiconductor device |
US6617674B2 (en) * | 2001-02-20 | 2003-09-09 | Dow Corning Corporation | Semiconductor package and method of preparing same |
US20040182915A1 (en) * | 2002-12-20 | 2004-09-23 | Bachman Mark Adam | Structure and method for bonding to copper interconnect structures |
US20050074966A1 (en) * | 1999-09-02 | 2005-04-07 | Micron Technology, Inc. | Local multilayered metallization |
US20050082685A1 (en) * | 2003-10-20 | 2005-04-21 | Bojkov Christo P. | Direct bumping on integrated circuit contacts enabled by metal-to-insulator adhesion |
US7015133B2 (en) * | 2004-04-14 | 2006-03-21 | Taiwan Semiconductor Manufacturing Company | Dual damascene structure formed of low-k dielectric materials |
US7033929B1 (en) * | 2002-12-23 | 2006-04-25 | Lsi Logic Corporation | Dual damascene interconnect structure with improved electro migration lifetimes |
US7119439B2 (en) * | 2002-06-06 | 2006-10-10 | Fujitsu Limited | Semiconductor device and method for manufacturing the same |
US20070023919A1 (en) * | 2005-07-29 | 2007-02-01 | Mou-Shiung Lin | Bonding pad on ic substrate and method for making the same |
US20070096313A1 (en) * | 2005-10-28 | 2007-05-03 | Megic Corporation | Semiconductor chip with post-passivation scheme formed over passivation layer |
US7224063B2 (en) * | 2001-06-01 | 2007-05-29 | International Business Machines Corporation | Dual-damascene metallization interconnection |
US7247555B2 (en) * | 2004-01-29 | 2007-07-24 | Chartered Semiconductor Manufacturing Ltd. | Method to control dual damascene trench etch profile and trench depth uniformity |
US7326645B2 (en) * | 2003-12-31 | 2008-02-05 | Dongbu Electronics Co., Ltd. | Methods for forming copper interconnect of semiconductor devices |
US20090014869A1 (en) * | 2004-10-29 | 2009-01-15 | Vrtis Joan K | Semiconductor device package with bump overlying a polymer layer |
-
2006
- 2006-02-06 US US11/347,378 patent/US7449785B2/en active Active
- 2006-07-31 TW TW095127959A patent/TWI311349B/en active
-
2008
- 2008-10-02 US US12/244,699 patent/US20090032945A1/en not_active Abandoned
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5834844A (en) * | 1995-03-24 | 1998-11-10 | Shinko Electric Industries Co., Ltd. | Semiconductor device having an element with circuit pattern thereon |
US20050074966A1 (en) * | 1999-09-02 | 2005-04-07 | Micron Technology, Inc. | Local multilayered metallization |
US6468898B1 (en) * | 1999-09-29 | 2002-10-22 | Nec Corporation | Method of manufacturing semiconductor device |
US6293457B1 (en) * | 2000-06-08 | 2001-09-25 | International Business Machines Corporation | Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization |
US20020043723A1 (en) * | 2000-10-16 | 2002-04-18 | Hironobu Shimizu | Semiconductor device and manufacturing method thereof |
US6617674B2 (en) * | 2001-02-20 | 2003-09-09 | Dow Corning Corporation | Semiconductor package and method of preparing same |
US7224063B2 (en) * | 2001-06-01 | 2007-05-29 | International Business Machines Corporation | Dual-damascene metallization interconnection |
US7241676B2 (en) * | 2002-06-06 | 2007-07-10 | Fujitsu Limited | Semiconductor device and method for manufacturing the same |
US7119439B2 (en) * | 2002-06-06 | 2006-10-10 | Fujitsu Limited | Semiconductor device and method for manufacturing the same |
US20040182915A1 (en) * | 2002-12-20 | 2004-09-23 | Bachman Mark Adam | Structure and method for bonding to copper interconnect structures |
US7033929B1 (en) * | 2002-12-23 | 2006-04-25 | Lsi Logic Corporation | Dual damascene interconnect structure with improved electro migration lifetimes |
US20050082685A1 (en) * | 2003-10-20 | 2005-04-21 | Bojkov Christo P. | Direct bumping on integrated circuit contacts enabled by metal-to-insulator adhesion |
US7326645B2 (en) * | 2003-12-31 | 2008-02-05 | Dongbu Electronics Co., Ltd. | Methods for forming copper interconnect of semiconductor devices |
US7247555B2 (en) * | 2004-01-29 | 2007-07-24 | Chartered Semiconductor Manufacturing Ltd. | Method to control dual damascene trench etch profile and trench depth uniformity |
US7015133B2 (en) * | 2004-04-14 | 2006-03-21 | Taiwan Semiconductor Manufacturing Company | Dual damascene structure formed of low-k dielectric materials |
US20090014869A1 (en) * | 2004-10-29 | 2009-01-15 | Vrtis Joan K | Semiconductor device package with bump overlying a polymer layer |
US20070023919A1 (en) * | 2005-07-29 | 2007-02-01 | Mou-Shiung Lin | Bonding pad on ic substrate and method for making the same |
US20070096313A1 (en) * | 2005-10-28 | 2007-05-03 | Megic Corporation | Semiconductor chip with post-passivation scheme formed over passivation layer |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120129335A1 (en) * | 2010-11-22 | 2012-05-24 | Fujitsu Semiconductor Limited | Method of manufacturing semiconductor device |
CN109300905A (en) * | 2018-10-08 | 2019-02-01 | 长江存储科技有限责任公司 | The forming method of semiconductor devices |
CN109346453A (en) * | 2018-10-08 | 2019-02-15 | 长江存储科技有限责任公司 | Semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
TWI311349B (en) | 2009-06-21 |
US20070182007A1 (en) | 2007-08-09 |
TW200731435A (en) | 2007-08-16 |
US7449785B2 (en) | 2008-11-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7449785B2 (en) | Solder bump on a semiconductor substrate | |
US6756294B1 (en) | Method for improving bump reliability for flip chip devices | |
US7160756B2 (en) | Polymer encapsulated dicing lane (PEDL) technology for Cu/low/ultra-low k devices | |
US20070176292A1 (en) | Bonding pad structure | |
US8581366B2 (en) | Method and system for forming conductive bumping with copper interconnection | |
US8035215B2 (en) | Semiconductor device and manufacturing method of the same | |
US20080136038A1 (en) | Integrated circuits with conductive features in through holes passing through other conductive features and through a semiconductor substrate | |
EP1239514A2 (en) | Low fabrication cost, fine pitch and high reliability solder bump | |
JP2001015403A (en) | Semiconductor device | |
US9691703B2 (en) | Bond pad structure with dual passivation layers | |
JP2012507163A (en) | Semiconductor device including reduced stress structure for metal pillars | |
TW202119476A (en) | Method for manufacturing semiconductor device | |
US7485949B2 (en) | Semiconductor device | |
TWI487044B (en) | A semiconductor device including a die region designed for aluminum-free solder bump connection and a test structure designed for aluminum-free wire bonding | |
US7648902B2 (en) | Manufacturing method of redistribution circuit structure | |
US20060145332A1 (en) | Semiconductor devices having post passivation interconnections with a second connection pattern | |
US10658316B2 (en) | Bond pad reliability of semiconductor devices | |
US9136234B2 (en) | Semiconductor device with improved metal pillar configuration | |
US9059110B2 (en) | Reduction of fluorine contamination of bond pads of semiconductor devices | |
US7372156B2 (en) | Method to fabricate aligned dual damascene openings | |
KR20090075883A (en) | A metallization layer stack without a terminal aluminum metal layer | |
US9397048B1 (en) | Semiconductor structure and manufacturing method thereof | |
US8841140B2 (en) | Technique for forming a passivation layer without a terminal metal | |
CN112582274A (en) | Method for forming semiconductor device | |
KR100835428B1 (en) | Method for fabricating a semiconductor including a fuse |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |