US20080186561A1 - Hybrid light modulator - Google Patents
Hybrid light modulator Download PDFInfo
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- US20080186561A1 US20080186561A1 US12/099,048 US9904808A US2008186561A1 US 20080186561 A1 US20080186561 A1 US 20080186561A1 US 9904808 A US9904808 A US 9904808A US 2008186561 A1 US2008186561 A1 US 2008186561A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
Abstract
The present invention provides a hybrid light modulator. The hybrid light modulator of the present invention includes an element having a protrusion to diffract incident light even at an early light receiving stage and to control the diffractive angle of the light using a microactuator, unlike conventional diffractive light modulators which reflect and diffract incident light using a plurality of micromirror actuators. Therefore, the present invention realizes device miniaturization and assures easy digital operation. Furthermore, piezoelectric force may be used to provide an actuating force to the element of the hybrid light modulator. Alternatively, electrostatic or electromagnetic force may be used as an actuating force for the hybrid light modulator.
Description
- This application is a divisional of U.S. patent application Ser. No. 11/152,831, filed Jun. 13, 2005, which is a continuation-in-part of U.S. patent application Ser. No. 10/951,556, filed Sep. 28, 2004 (now U.S. Pat. No. 7,170,668), the disclosures of which are hereby expressly incorporated by reference.
- 1. Field of the Invention
- The present invention relates generally to light modulators, and more particularly, to a hybrid light modulator which includes a plurality of ribbons each having a plurality of protrusions to diffract incident light from an early light receiving stage and to control a diffractive angle of the light beam using a microactuator, thereby realizing the miniaturization of a device and assuring the ease of digital operation, unlike conventional diffractive optical modulators in which incident light is reflected and diffracted by the operation of a plurality of micromirror actuators.
- 2. Description of the Related Art
- Generally, an optical signal processing technology has advantages in that a great amount of data is quickly processed in a parallel manner unlike a conventional digital information processing technology in which it is impossible to process a great amount of data in real time, and studies have been conducted on the design and production of a binary phase only filter, an optical logic gate, a light amplifier, an image processing technique, an optical device, and a light modulator using a spatial light modulation theory.
- The spatial light modulator is applied to optical memory, optical display device, printer, optical interconnection, and hologram fields, and studies have been conducted to develop a display device employing it.
- The spatial light modulator is embodied by a reflective deformable
grating light modulator 10 as shown inFIG. 1 . Thelight modulator 10 is disclosed in U.S. Pat. No. 5,311,360 by Bloom et al. Thelight modulator 10 includes a plurality of reflectivedeformable ribbons 18, which have reflective surface parts, are suspended on an upper part of asilicon substrate 16, and are spaced apart from each other at regular intervals. Aninsulating layer 11 is deposited on thesilicon substrate 16. Subsequently, a sacrificialsilicon dioxide film 12 and a low-stresssilicon nitride film 14 are deposited. - The
nitride film 14 is patterned by theribbons 18, and a portion of thesilicon dioxide film 12 is etched, thereby maintaining theribbons 18 on theoxide spacer layer 12 by anitride frame 20. - In order to modulate light having a single wavelength of λo, the modulator is designed so that thicknesses of the
ribbon 18 andoxide spacer 12 are each λo/4. - Limited by a vertical distance (d) between a
reflective surface 22 of eachribbon 18 and a reflective surface of thesubstrate 16, a grating amplitude of themodulator 10 is controlled by applying a voltage between the ribbon 18 (thereflective surface 22 of theribbon 18 acting as a first electrode) and the substrate 16 (aconductive layer 24 formed on a lower side of thesubstrate 16 to act as a second electrode). - In an undeformed state of the light modulator with no voltage application, the grating amplitude is λo/2 while a total round-trip path difference between light beams reflected from the ribbon and substrate is λo. Thus, a phase of reflected light is reinforced.
- Accordingly, in the undeformed state, the
modulator 10 acts as a plane mirror when it reflects incident light. InFIG. 2 , thereference numeral 20 denotes the incident light reflected by themodulator 10 in the undeformed state. - When a proper voltage is applied between the
ribbon 18 andsubstrate 16, the electrostatic force enables theribbon 18 to move downward toward the surface of thesubstrate 16. At this time, the grating amplitude is changed to λo/4. The total round-trip path difference is a half of a wavelength, and light reflected from thedeformed ribbon 18 and light reflected from thesubstrate 16 are subjected to destructive interference. - The modulator diffracts
incident light 26 using the interference. InFIG. 3 , thereference numerals - However, the Bloom light modulator adopts an electrostatic method to control a position of the micromirror, which has disadvantages in that an operating voltage is relatively high (usually, 20 V or so) and a correlation between the applied voltage and displacement is not linear, resulting in poor reliability in the course of controlling light.
- Conventional light modulators disclosed in the patent filed by Bloom et al. have been used to form structures which display images. In such light modulator, two neighboring elements form one pixel. Of course, three neighboring elements may form one pixel. Alternatively, four neighboring elements may form one pixel. As a further alternative, six neighboring elements may form one pixel. In the case that a display device has an optical system which detects only diffracted light, when no voltage is applied to elements, such as ribbons, the ribbons are maintained in those original positions. At this time, pixels are dark, that is, are in a state of being turned off. Otherwise, when voltage is applied to the ribbons, the ribbons are warped downwards toward the silicon substrate. At this time, the pixels are bright, that is, attain a state of being turned on. A contrast ratio between a dark pixel and a bright pixel is a significant factor in forming the display system. In addition, an important matter in forming the display system is to accommodate the recent trend of miniaturization and high integration of electronic products.
- However, the conventional light modulators disclosed in the patent filed by Bloom et al. have reached the limit in miniaturization. In other words, the conventional light modulators cannot be reduced under 3 μm in the width of the element. Furthermore, an interval between neighboring elements cannot be reduced under 0.5 μm.
- Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a hybrid light modulator which includes ribbons having uneven upper surfaces, so that incident light is diffracted by the uneven upper surfaces of the ribbons from an early light receiving stage, but not by controlling the height difference between moving ribbons, thus realizing miniaturization and high integration of the hybrid light modulator.
- In an aspect, the present invention provides a hybrid light modulator, including: a substrate; a light modulating unit mounted on the substrate, the light modulating unit including an intermediate portion spaced apart from the substrate; at least one protrusion extending in a direction away from the substrate, at least one depression adjacent to each protrusion; and wherein the protrusion and the depression each having a reflective surface to reflect incident light, so that diffractive light is formed by light reflected by the protrusion and by light reflected by the depression; and an actuating unit to move the intermediate portion of the light modulating unit spaced apart from the substrate towards and away from the substrate, so that the angle of the diffracted light varies.
- In another aspect, the present invention provides a hybrid light modulator, including: a substrate; a support structure supported on the substrate so that portions of the support structure are spaced from the substrate by a predetermined distance, the support structure being movable towards or away from the substrate; a piezoelectric mirror layer disposed on the support structure such that the piezoelectric mirror layer is spaced from the substrate, said piezoelectric mirror layer comprising a piezoelectric material layer, whereby a predetermined portion of the piezoelectric mirror layer moves toward and away from the substrate when voltage is applied to opposite sides of the piezoelectric material layer, thus reflecting incident light; and at least one mirror layer disposed on the support structure at a distance from the substrate that is different from the distance that the piezoelectric mirror layer is located from the substrate, thus reflecting incident light.
- In a further aspect, the present invention provides a hybrid light modulator, including: a substrate; a lower support structure supported by the substrate and configured so that portions of the support structure are spaced from the substrate by a predetermined distance; a first piezoelectric layer placed at a first location on the support structure, the first piezoelectric layer comprising a first piezoelectric material layer that generates an actuating force toward or away from the substrate by shrinking and expanding when a voltage is applied to the first thin-film piezoelectric material layer, thus reflecting incident light; a second piezoelectric layer placed at a second location on the support structure, the second piezoelectric layer comprising a second piezoelectric material layer that generates an actuating force toward or away from the substrate by shrinking and expanding when a voltage is applied to the second thin-film piezoelectric material layer, thus reflecting incident light; and a mirror layer disposed on the lower support structure at a location between the first and second piezoelectric layers and positioned at a different distance from the substrate relative to the location of the first and second piezoelectric layers, thus reflecting incident light.
- In yet another aspect, the present invention provides a hybrid light modulator, including: a substrate; a support structure supported by the substrate and configured so that portions of the support structures are spaced from the substrate by a predetermined distance, the support structure being movable toward or away from the substrate; a piezoelectric mirror layer mounted on the support structure such that the entire piezoelectric mirror layer is on the portion of the support structure that is spaced apart from the substrate, and comprising a thin-film piezoelectric material layer, so that a predetermined portion of the piezoelectric mirror layer spaced apart from the substrate moves towards or away from the substrate when voltage is applied to the piezoelectric material layer, thus reflecting incident light; at least one mirror layer disposed on the support structure and positioned so that the mirror layer is spaced apart from the piezoelectric mirror layer relative to the support structure, thus reflecting incident light.
- In still another aspect, the present invention provides a hybrid light modulator, including: a substrate; a support structure supported by the substrate and configured so that portions of the support structure are spaced from the substrate by a predetermined distance; a first piezoelectric layer disposed on the support structure such that a portion of the first piezoelectric layer is disposed on the portion of the support structure not spaced from the substrate; a second piezoelectric layer disposed on the support structure such that a portion of the second piezoelectric layer is disposed on the portion of the support structure not spaced from the substrate; and at least one mirror layer disposed on the support structure at locations between the first and second piezoelectric layers and said at least one mirror layer located at a relative distance from the locations of the piezoelectric layers, thus reflecting incident light.
- In still another aspect, the present invention provides a hybrid light modulator, including: a substrate; a plurality of light modulating units arranged relative to each other, each of the light modulating units attached to the substrate and spaced apart at an intermediate portion thereof from the substrate, and comprising at least one first light reflecting surface at a first position relative to the substrate and at least one second light reflecting surface at a second position relative to the substrate and relative to the first light reflecting surface, thereby to diffract incident light, the light modulating units being movable toward or away from the substrate at the intermediate portion thereof that is spaced apart from the substrate, thus varying the angle of the diffracted light; and a plurality of actuating units to move the intermediate portions of the plurality of light modulating units toward or away from the substrate, so that an angle of the diffracted light varies.
- The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
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FIG. 1 illustrates an electrostatic-type grating light modulator according to a conventional technology; -
FIG. 2 illustrates reflection of incident light by the electrostatic-type grating light modulator according to a conventional technology in an undeformed state; -
FIG. 3 illustrates diffraction of incident light by the grating light modulator, in a deformed state due to an electrostatic force, according to a conventional technology; -
FIGS. 4 a through 4 f are partial perspective views of hybrid light modulators having elements, according to first through sixth embodiment of the present invention, respectively; -
FIGS. 5 a through 5 f are sectional views of the hybrid light modulators having the elements ofFIGS. 4 a through 4 f, respectively; -
FIG. 6 is a sectional view of a hybrid light modulator, according to a seventh embodiment of the present invention; -
FIG. 7 is a sectional view of a hybrid light modulator, according to an eighth embodiment of the present invention; -
FIG. 8 is a sectional view of a hybrid light modulator, according to a ninth embodiment of the present invention; and -
FIGS. 9 a through 9 c are views showing operation of the hybrid light modulator, according to the present invention. - Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.
- Reference now should be made to the drawings, in which the same reference numerals are used throughout the different drawings to designate the same or similar components.
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FIGS. 4 a through 4 f are perspective views of hybrid light modulators having elements, according to first through sixth embodiments of the present invention, respectively. -
FIG. 4 a is a perspective view showing anelement 510 a of a recess-type hybrid thin-film piezoelectric light modulator, according to a first embodiment of the present invention. Referring toFIG. 4 a, theelement 510 a includes a plurality of protrusions 520 a 1, 520 a 2, 520 a 3, 520 a 4 and 520 a 5 which are disposed on amicromirror layer 515 a of theelement 510 a to reflect and diffract incident light. Each of the protrusions 520 a 1, 520 a 2, 520 a 3, 520 a 4 and 520 a 5 has a rectangular column shape (ribbon shape). However, the protrusions can be of other shapes, such as square or oval. The protrusions 520 a 1, 520 a 2, 520 a 3, 520 a 4 and 520 a 5 are arranged along a longitudinal axis of theelement 510 a, passing over the recess, to be spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520 a 1, 520 a 2, 520 a 3, 520 a 4, 520 a 5). Each protrusion 520 a 1, 520 a 2, 520 a 3, 520 a 4, 520 a 5 includes a support layer 521 a 1, 521 a 2, 521 a 3, 521 a 4, 521 a 5 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 a of theelement 510 a. Each protrusion 520 a 1, 520 a 2, 520 a 3, 520 a 4, 520 a 5 further includes a mirror layer 522 a 1, 522 a 2, 522 a 3, 522 a 4, 522 a 5 which is layered on the support layer 521 a 1, 521 a 2, 521 a 3, 521 a 4, 521 a 5 to reflect and diffract incident light. - At this time, a pixel is formed by both the mirror layer 522 a 1, 522 a 2, 522 a 3, 522 a 4, 522 a 5 of one protrusion 520 a 1, 520 a 2, 520 a 3, 520 a 4, 520 a 5 and one depression 530 a 1, 530 a 2, 530 a 3, 530 a 4 of the
micromirror layer 515 a of theelement 510 a exposed from the protrusions 520 a 1, 520 a 2, 520 a 3, 520 a 4 and 520 a 5. Therefore, in the hybrid light modulator ofFIG. 4 a, at least one pixel is embodied in asingle element 510 a, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 a is a sectional view taken along the line A-A′ ofFIG. 4 a. With reference toFIG. 5 a, the arrangement of the protrusions 520 a 1, 520 a 2, 520 a 3, 520 a 4 and 520 a 5 along the longitudinal axis of theelement 510 a will be distinctly understood. - Furthermore, the hybrid light modulator of the present invention can form a display device having the same number of pixels despite having a reduced number of elements compared with conventional technologies.
- For example, in conventional technologies, at least two elements having ribbon shapes are required to form one pixel. In addition, when two elements are used to form one pixel, diffractive efficiency is less than 50%. Therefore, in order to increase diffractive efficiency, in conventional technologies, four, six or eight elements form one pixel. If four or more conventional elements are used to form one pixel, diffractive efficiency becomes higher than 70%. As such, as the number of elements is increased, diffractive efficiency is also increased so as to reach a desired level. However, in the first embodiment of the present invention, four sets of protrusions and depressions (the reference numerals 520 a 1 and 530 a 1 defines one set of protrusion and depression, 520 a 2 and 530 a 2 defines another set of protrusion and depression, 520 a 3 and 530 a 3 defines a further set of protrusion and depression, and 520 a 4 and 530 a 4 defines still another set of protrusion and depression) provided on the upper surface of one
element 510 a can achieve the same diffractive efficiency as when eight elements form one pixel in convention technologies. - In detail, in the first embodiment, the first protrusion 520 a 1 of the four sets of protrusions and depressions acts like a single element in the conventional technology that reflects incident light. The first depression 530 a 1 acts like another single element to reflect incident light. The second protrusion 520 a 2 acts like another single element that reflects incident light. The second depression 530 a 2 acts like yet another single element to reflect incident light. The third protrusion 520 a 3 acts like still another single element that reflects incident light. The third depression 530 a 3 acts like still another single element to reflect incident light. The fourth protrusion 520 a 4 acts like still another single element that reflects incident light. The fourth depression 530 a 4 acts like still another single element to reflect incident light. As such, the single element according to the first embodiment having four sets of protrusions and depressions can achieve the same diffractive efficiency as eight elements forming one pixel in the conventional technology.
- For example, when a high definition digital television having a 1080×1920 format is embodied using the hybrid light modulator having the above-mentioned structure, 1080 pixels are vertically arranged, and 1920 vertical lines each comprising 1080 pixels are horizontally arranged, thus 1920 light modulating processes are conducted to form a single frame. If 1080 pixels are formed using the conventional technology which forms one pixel using four, six or eight elements, 1080×4 (or 6 or 8) elements are necessary. However, if the element of the present invention having two, three or four sets of protrusions and depressions is used, 1080 pixels are formed by only 1080×1 elements. Therefore, a process of manufacturing products is simplified, thereby productivity is increased. As well, the present invention makes it possible to produce a small device.
- In the hybrid light modulator of
FIG. 4 a, a plurality ofelements 510 a having regular widths are arranged at regular intervals to constitute the hybrid light modular. Alternatively, theelements 510 a having different widths may alternate to constitute the hybrid light modulator. As a further alternative, theelements 510 a may be spaced apart from each other at regular intervals (each interval is almost the same as the width of eachelement 510 a), in which a micromirror layer formed on an upper side of asilicon substrate 501 a reflects and diffracts incident light. - The
silicon substrate 501 a has a recess to provide a space to theelements 510 a. An insulatinglayer 502 a is deposited or otherwise disposed on an upper surface of thesilicon substrate 501 a. Both ends of theelements 510 a are attached to upper sides of a wall of the recess. - The
elements 510 a each may have an elongated, thin ribbon shape. However, theelements 510 a can be formed in other shapes, such as rectangular, square, oval, etc. Lower sides of the both ends of theelements 510 a are attached to or otherwise supported by the remaining upper side of thesilicon substrate 501 a except for the recess so that the centers of theelements 510 a are spaced from the recess of thesilicon substrate 501 a. Themicromirror layer 515 a is formed on an upper side of eachelement 510 a. Additionally, eachelement 510 a includes alower supporter 511 a which has a vertically movable portion corresponding in position to the recess of thesilicon substrate 501 a. - Furthermore, the
element 510 a includes alower electrode layer 512 a which is laminated or otherwise disposed on thelower supporter 511 a to provide a piezoelectric voltage, and apiezoelectric material layer 513 a which is laminated or otherwise disposed on thelower electrode layer 512 a and shrinks and expands to generate a vertical actuating force when voltage is applied to upper and lower surfaces thereof. Theelement 510 a further includes anupper electrode layer 514 a which is laminated or otherwise disposed on thepiezoelectric material layer 513 a and provides a piezoelectric voltage to thepiezoelectric material layer 513 a. Theelement 510 a further includes themicromirror layer 515 a which is laminated or otherwise disposed on theupper electrode layer 514 a to reflect and diffract incident light. -
FIG. 4 b is a perspective view showing anelement 510 b of a recess-type hybrid thin-film piezoelectric light modulator, according to a second embodiment of the present invention. Referring toFIG. 4 b, theelement 510 b includes a plurality of protrusions 520b 1, 520 b 2 and 520 b 3 which is placed on amicromirror layer 515 b of theelement 510 b that reflects and diffracts incident light. Each protrusion 520b 1, 520b 2, 520 b 3 has a rectangular column shape (ribbon shape). When the longitudinal axis of theelement 510 b is defined as the axis passing over the recess, the protrusions 520b 1, 520 b 2 and 520 b 3 are arranged along a latitudinal axis of theelement 510 b, unlike theelement 510 a ofFIG. 4 a. The protrusions 520b 1, 520 b 2 and 520 b 3 are spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520b 1, 520b 2, 520 b 3). Each protrusion 520b 1, 520b 2, 520 b 3 includes a support layer 521b 1, 521b 2, 521 b 3 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 b of theelement 510 b. Each protrusion 520b 1, 520b 2, 520 b 3 further includes a mirror layer 522b 1, 522b 2, 522 b 3 which is layered on the support layer 521b 1, 521b 2, 521 b 3 to reflect and diffract incident light. - At this time, one pixel is formed by both the mirror layer 522
b 1, 522b 2, 522 b 3 of one protrusion 520b 1, 520b 2, 520 b 3 and one part (one depression) of themicromirror layer 515 b of theelement 510 b exposed from the protrusions 520b 1, 520 b 2 and 520 b 3. Therefore, in the hybrid light modulator ofFIG. 4 b, two or more pixels are embodied in asingle element 510 b, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 b is a sectional view taken along the line B-B′ ofFIG. 4 b. With reference toFIG. 5 b, the arrangement of the protrusions 520b 1, 520 b 2 and 520 b 3 along the latitudinal axis of theelement 510 b will be distinctly understood. Furthermore, the construction of theelement 510 b of the second embodiment is substantially the same as that of theelement 510 a of the first embodiment, therefore further explanation is deemed unnecessary. -
FIG. 4 c is a perspective view showing anelement 510 c of a recess-type hybrid thin-film piezoelectric light modulator, according to a third embodiment of the present invention. Referring toFIG. 4 c, theelement 510 c includes a plurality of protrusions 520 c 1, 520 c 2 and 520 c 3 which is placed on amicromirror layer 515 c of theelement 510 c that reflects and diffracts incident light. Each protrusion 520 c 1, 520c 2, 520 c 3 has a rectangular column shape (ribbon shape). The protrusions 520 c 1, 520 c 2 and 520 c 3 are arranged along a longitudinal axis of theelement 510 c, passing over the recess, to be spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520 c 1, 520c 2, 520 c 3). Each protrusion 520 c 1, 520c 2, 520 c 3 includes a support layer 521c 1, 521c 2, 521 c 3 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 c of theelement 510 c. The protrusion 520 c 1, 520c 2, 520 c 3 further includes a mirror layer 522c 1, 522c 2, 522 c 3 which is layered on the support layer 521c 1, 521c 2, 521 c 3 to reflect and diffract incident light. - At this time, one pixel is formed by both the mirror layer 522
c 1, 522c 2, 522 c 3 of one protrusion 520 c 1, 520c 2, 520 c 3 and one part (one depression) of themicromirror layer 515 c of theelement 510 c exposed from the protrusions 520 c 1, 520 c 2 and 520 c 3. Therefore, in the hybrid light modulator ofFIG. 4 c, two or more pixels are embodied in asingle element 510 c, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 c is a sectional view taken along the line C-C′ ofFIG. 4 c. With reference toFIG. 5 c, the arrangement of the protrusions 520 c 1, 520 c 2 and 520 c 3 along the longitudinal axis of theelement 510 c will be distinctly understood. - In the hybrid light modulator of
FIG. 4 c, a plurality ofelements 510 c having regular widths is arranged at regular intervals to constitute the hybrid light modular. Alternatively,elements 510 c having different widths may alternate to constitute the hybrid light modulator. As a further alternative, theelements 510 c may be spaced apart from each other at regular intervals (each interval is almost the same as the width of eachelement 510 c), in which a micromirror layer formed on an upper side of asilicon substrate 501 c reflects and diffracts incident light. - The
silicon substrate 501 c has a recess to provide an air space to theelements 510 c. An insulatinglayer 502 c is deposited on an upper surface of thesilicon substrate 501 c. Both ends of theelements 510 c are attached to upper sides of a wall of the recess. - The
elements 510 c each may have a ribbon shape. Lower sides of both ends of theelements 510 c are attached to or are otherwise supported by the remaining upper side of thesilicon substrate 501 c except for the recess so that the centers of theelements 510 c are spaced from the recess of thesilicon substrate 501 c. Additionally, eachelement 510 c includes alower supporter 511 c which has a vertically movable portion (movable toward or away from the recess) corresponding in position to the recess of thesilicon substrate 501 c. - Furthermore, the
element 510 c includes a firstlower electrode layer 512 c which is laminated or otherwise disposed on a first end of thelower supporter 511 c to provide a piezoelectric voltage, and a firstpiezoelectric material layer 513 c which is laminated or otherwise disposed on the firstlower electrode layer 512 c and shrinks and expands to generate a vertical (relative toFIG. 4 c) actuating force when a voltage is applied to upper and lower surfaces thereof. Theelement 510 c further includes a firstupper electrode layer 514 c which is laminated or otherwise disposed on the firstpiezoelectric material layer 513 c and provides a piezoelectric voltage to the firstpiezoelectric material layer 513 c. - In addition, the
element 510 c includes a secondlower electrode layer 512 c′ which is laminated or otherwise disposed on a second end of thelower supporter 511 c to provide a piezoelectric voltage, and a secondpiezoelectric material layer 513 c′ which is laminated or otherwise disposed on the secondlower electrode layer 512 c′ and shrinks and expands to generate a vertical (relative toFIG. 4 c) actuating force when voltage is applied to upper and lower surfaces thereof. Theelement 510 c further includes a secondupper electrode layer 514 c′ which is laminated or otherwise disposed on the secondpiezoelectric material layer 513 c′ and provides a piezoelectric voltage to the secondpiezoelectric material layer 513 c′. -
FIG. 4 d is a perspective view showing anelement 510 d of a recess-type hybrid thin-film piezoelectric light modulator, according to a fourth embodiment of the present invention. Referring toFIG. 4 d, theelement 510 d includes a plurality of protrusions 520d 1 and 520d 2 which is placed on amicromirror layer 515 d of theelement 510 d that reflects and diffracts incident light. Each protrusion 520d 1, 520d 2 has a rectangular column shape (ribbon shape). When the longitudinal axis of theelement 510 d is defined as the axis passing over the recess, the protrusions 520d 1 and 520d 2 are arranged along a latitudinal axis of theelement 510 d, unlike theelement 510 c ofFIG. 4 c. The protrusions 520d 1 and 520d 2 are spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520d 1, 520 d 2). Each protrusion 520d 1, 520d 2 includes a support layer 521d 1, 521d 2 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 d of theelement 510 d. The protrusion 520d 1, 520d 2 further includes a mirror layer 522d 1, 522d 2 which is layered on the support layer 521d 1, 521d 2 to reflect and diffract incident light. - At this time, one pixel is formed by both the mirror layer 522
d 1, 522d 2 of one protrusion 520d 1, 520d 2 and one part (one depression) of themicromirror layer 515 d of theelement 510 d exposed from the protrusions 520d 1 and 520d 2. Therefore, in the hybrid light modulator ofFIG. 4 d, two pixels are embodied in a thesingle element 510 d, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 d is a sectional view taken along the line D-D′ ofFIG. 4 d. With reference toFIG. 5 d, the arrangement of the protrusions 520d 1 and 520d 2 along the latitudinal axis of theelement 510 d will be distinctly understood. Furthermore, the construction of theelement 510 d of the fourth embodiment is the same as that of theelement 510 c of the third embodiment, therefore further explanation is deemed unnecessary. -
FIG. 4 e is a perspective view showing anelement 510 e of a recess-type hybrid thin-film piezoelectric light modulator, according to a fifth embodiment of the present invention. Referring toFIG. 4 e, theelement 510 e includes a plurality of protrusions 520e 1, 520e 2 and 520 e 3 which is placed on amicromirror layer 515 e of theelement 510 e that reflects and diffracts incident light. Each of the protrusions 520e 1, 520e 2 and 520 e 3 has a rectangular column shape (ribbon shape). The protrusions 520e 1, 520e 2 and 520 e 3 are arranged along a longitudinal axis of theelement 510 e, passing over the recess, to be spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520e 1, 520e 2, 520 e 3). Each protrusion 520e 1, 520e 2, 520 e 3 includes a support layer 521e 1, 521e 2, 521 e 3 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 e of theelement 510 e. The protrusion 520e 1, 520e 2, 520 e 3 further includes a mirror layer 522e 1, 522e 2, 522 e 3 which is layered on the support layer 521e 1, 521e 2, 521 e 3, respectively, to reflect and diffract incident light. - At this time, one pixel is formed by both the mirror layer 522
e 1, 522e 2, 522 e 3 of one protrusion 520e 1, 520e 2, 520 e 3 and one part (one depression) of themicromirror layer 515 e of theelement 510 e exposed from the protrusions 520e 1, 520e 2 and 520 e 3. Therefore, in the hybrid light modulator ofFIG. 4 e, two or more pixels are embodied in asingle element 510 e, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 e is a sectional view taken along the line E-E′ ofFIG. 4 e. With reference toFIG. 5 e, the arrangement of the protrusions 520e 1, 520e 2 and 520 e 3 along the longitudinal axis of theelement 510 e will be understood. - In the hybrid light modulator of
FIG. 4 e, a plurality ofelements 510 e having regular widths are arranged at regular intervals to constitute the hybrid light modulator. Alternatively, theelements 510 e having different widths may alternate to constitute the hybrid light modulator. As a further alternative, theelements 510 e may be spaced apart from each other at regular intervals (each interval is almost the same as the width of eachelement 510 e), in which a micromirror layer formed on an upper side of asilicon substrate 501 e reflects and diffracts incident light. - The
silicon substrate 501 e has a recess to provide a space to theelements 510 e. An insulatinglayer 502 e is deposited on an upper surface of thesilicon substrate 501 e. Both ends of theelements 510 e are attached to upper sides of a wall of the recess. - The
elements 510 e each have a ribbon shape. Lower sides of the both ends of theelements 510 e are attached to the remaining upper side of thesilicon substrate 501 e except for the recess so that the centers of theelements 510 e are spaced from the recess of thesilicon substrate 501 e. Themicromirror layer 515 e is formed on an upper side of eachelement 510 e above the recess of thesilicon substrate 501 e. That is, portions of themicromirror layer 515 e, which are aligned with the remaining upper side of thesilicon substrate 501 e other than the recess, are removed by an etching process. Additionally, eachelement 510 e includes alower supporter 511 e which has a vertically (relative toFIG. 4 e) movable portion corresponding in position to the recess of thesilicon substrate 501 e. - Furthermore, the
element 510 e includes alower electrode layer 512 e which is laminated or otherwise disposed on thelower supporter 511 e above the recess of thesilicon substrate 501 e to provide a piezoelectric voltage. At this time, portions of thelower electrode layer 512 e, which are aligned with the remaining upper side of thesilicon substrate 501 e other than the recess, are removed by an etching process. Theelement 510 e further includes apiezoelectric material layer 513 e which is laminated or otherwise disposed on thelower electrode layer 512 e and shrinks and expands to generate a vertical (relative toFIG. 4 e) actuating force when voltage is applied to upper and lower surfaces thereof. Theelement 510 e further includes anupper electrode layer 514 e which is laminated or otherwise disposed on thepiezoelectric material layer 513 e and provides a piezoelectric voltage to thepiezoelectric material layer 513 e. Theelement 510 e further includes themicromirror layer 515 e which is laminated or otherwise disposed on theupper electrode layer 514 e to reflect and diffract incident light. -
FIG. 4 f is a perspective view showing anelement 510 f of a recess-type hybrid thin-film piezoelectric light modulator, according to a sixth embodiment of the present invention. Referring toFIG. 4 f, theelement 510 f includes a plurality of protrusions 520f 1 and 520f 2 which is placed on amicromirror layer 515 f of theelement 510 f that reflects and diffracts incident light. Each protrusion 520f 1, 520f 2 has a rectangular column shape (ribbon shape). When it is defined that the longitudinal axis of theelement 510 f is aligned with the direction passing over the recess, the protrusions 520f 1 and 520f 2 are arranged along a latitudinal axis of theelement 510 f, unlike theelement 510 e ofFIG. 4 e. The protrusions 520f 1 and 520f 2 are spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 520f 1, 520 f 2). Each protrusion 520f 1, 520f 2 includes a support layer 521f 1, 521f 2 which is attached at a lower surface thereof to an upper surface of themicromirror layer 515 f of theelement 510 f. The protrusion 520f 1, 520f 2 further includes a mirror layer 522f 1, 522f 2 which is layered on the support layer 521f 1, 521f 2 to reflect and diffract incident light. - At this time, one pixel is formed by both the mirror layer 522
f 1, 522f 2 of one protrusion 520f 1, 520f 2 and one part of themicromirror layer 515 f of theelement 510 f exposed from the protrusions 520f 1 and 520f 2. Therefore, in the hybrid light modulator ofFIG. 4 f, two pixels are embodied in asingle element 510 f, thus realizing miniaturization and high integration of the hybrid light modulator.FIG. 5 f is a sectional view taken along the line F-F′ ofFIG. 4 f. Reference toFIG. 5 f, the arrangement of the protrusions 520f 1 and 520f 2 along the latitudinal axis of theelement 510 f will be distinctly understood. Furthermore, the construction of theelement 510 f of the sixth embodiment is the same as that of theelement 510 e of the fifth embodiment, therefore further explanation is deemed unnecessary. - In the meantime, the
elements FIGS. 4 a through 4 f can be adapted to a protrusion-type diffractive thin-film piezoelectric light modulator disclosed in U.S. patent application Ser. No. 10/952,556, entitled “Diffractive Thin-Film Piezoelectric Light Modulator and a Method of Producing the Same” and incorporated herein by reference. -
FIG. 6 is a sectional view of a hybrid light modulator, according to a seventh embodiment of the present invention. Referring toFIG. 6 , anelement 710 of the hybrid light modulator according to the seventh embodiment is placed on asilicon substrate 701 while being partially spaced from a bottom of a recess of thesilicon substrate 701. Theelement 710 includes alower supporter 711 which is attached at both ends thereof (or otherwise supported by) thesilicon substrate 701 along upper ends of sidewalls of the recess. Theelement 710 further includes a firstlower electrode layer 712 a which is laminated or otherwise disposed on a first end of thelower supporter 711 such that a first end of the firstlower electrode layer 712 a is aligned with the first end of thelower supporter 711 and a second end of the firstlower electrode layer 712 a is placed on a predetermined position of thelower supporter 711 spaced to the first side from the center line of the recess. Theelement 710 further includes a firstpiezoelectric material layer 713 a which is laminated or otherwise disposed on the firstlower electrode layer 712 a and generates a vertical actuating force when voltage is applied to the firstlower electrode layer 713 a. Theelement 710 further includes a firstupper electrode layer 714 a which is laminated or otherwise disposed on the firstpiezoelectric material layer 713 a and provides a piezoelectric voltage to the firstpiezoelectric material layer 713 a. Theelement 710 further includes thefirst micromirror layer 715 a which is laminated or otherwise disposed on the firstupper electrode layer 714 a to reflect and diffract incident light. - The
element 710 further includes athird micromirror layer 715 c which is laminated or otherwise disposed on an intermediate portion of thelower supporter 711 to reflect and diffract incident light. - The
element 710 further includes a secondlower electrode layer 712 b which is laminated or otherwise disposed on a second end of thelower supporter 711 such that a second end of the secondlower electrode layer 712 b is aligned with the second end of thelower supporter 711 and a first end of the secondlower electrode layer 712 b is placed on a predetermined position of thelower supporter 711 spaced to the second side from the center line of the recess. Theelement 710 further includes a secondpiezoelectric material layer 713 b which is laminated or otherwise disposed on the secondlower electrode layer 712 b and generates a vertical actuating force when a voltage is applied to the secondlower electrode layer 713 b. Theelement 710 further includes a secondupper electrode layer 714 b which is laminated or otherwise disposed on the secondpiezoelectric material layer 713 b and provides a piezoelectric voltage to the secondpiezoelectric material layer 713 b. Theelement 710 further includes thesecond micromirror layer 715 b which is laminated or otherwise disposed on the secondupper electrode layer 714 b to reflect and diffract incident light. - In the hybrid light modulator of
FIG. 6 , one pixel is formed by both thefirst micromirror layer 715 a and a part of thethird micromirror layer 715 c which is placed to the first side based on the line A-A′ ofFIG. 6 . The other pixel is formed by both thesecond micromirror layer 715 b and a part of thethird micromirror layer 715 c which is placed to the second side based on the line A-A′ ofFIG. 6 . As a result, two pixels are embodied in asingle element 710. -
FIG. 7 is a sectional view of a hybrid light modulator, according to an eighth embodiment of the present invention. Referring toFIG. 7 , in the hybrid light modulator according to the eighth embodiment, a plurality ofprotrusions third micromirror layer 715 c of anelement 710 which has essentially the same structure as that of theelement 710 of the seventh embodiment. At this time, theprotrusions element 710. Theelement 710 of the eight embodiment includes first and second micromirror layers 715 a and 715 b which are laminated or otherwise disposed on first and second upper electrode layers 714 a and 714 b, respectively, unlike theelement 510 c of the third embodiment shown inFIG. 4 c. - Each
protrusion support layer third micromirror layer 715 c, and amirror layer support layer - In the hybrid light modulator of
FIG. 7 , one pixel is formed by both thefirst micromirror layer 715 a and a part of thethird micromirror layer 715 c which is exposed between thefirst micromirror layer 715 a and thefirst protrusion 720 a. - Another pixel is formed by both the
first protrusion 720 a and a part of thethird micromirror layer 715 c which is exposed between thefirst protrusion 720 a and thesecond protrusion 720 b. In the same manner as above, a plurality of pixels can be embodied in asingle element 710. The general construction of theelement 710 of the eighth embodiment, aside from the above-mentioned structure, remains the same as the seventh embodiment, therefore further explanation is deemed unnecessary. -
FIG. 8 is a sectional view of a hybrid light modulator, according to a ninth embodiment of the present invention. - Referring to
FIG. 8 , anelement 910 of the hybrid light modulator according to the ninth embodiment includes first and third micromirror layers 915 a and 915 c which are provided on both ends of alower supporter 911, unlike theelement 510 e of the fifth embodiment shown inFIG. 4 e. In the hybrid light modulator ofFIG. 8 , one pixel is formed by both thefirst micromirror layer 915 a and a part of thesecond micromirror layer 915 b which is on one side of line A-A′ ofFIG. 8 . The other one pixel is formed by both thethird micromirror layer 715 c and a part of thesecond micromirror layer 715 b which is on the other side of the line A-A′ ofFIG. 8 . The general construction of theelement 910 of the ninth embodiment, aside from the above-mentioned structure, remains the same as the fifth embodiment ofFIG. 4 e, therefore further explanation is deemed unnecessary. -
FIGS. 9 a through 9 c are views showing operation of the hybrid light modulator, according to the present invention. - Referring to
FIG. 9 a, the hybrid light modulator includes a plurality ofprotrusions FIG. 9 b, if alower supporter 1011 is rigid, theprotrusions FIG. 9 a, move without being stepped. - However, as shown in
FIG. 9 c, if thelower supporter 1011 is flexible, theprotrusions - Typically, in conventional technologies, the amount of diffracted light is changed, while the diffractive angle of light determined by a grating (ribbon) width is fixed. However, in the present invention, the diffractive angle of light can also be changed. When such a hybrid light modulator of the present invention is used in a display device, the ON/OFF state of the modulator can be controlled by the principle by which light is passed through a fixed slit or not by changing the diffractive angle of the light.
- Furthermore, according to a degree of the rigidity of the
lower supporter 1011, the direction of diffracted light may be maintained or changed. Therefore, the hybrid light modulator of the present invention can diffract incident lights in a wide direction. - Meanwhile, in the preferred embodiments of the present invention, piezoelectric force is used to provide a vertical actuating force to the element of the hybrid light modulator. However, electrostatic or electromagnetic force may be used as a vertical actuating force for the hybrid light modulator.
- In the case in which electrostatic force is used as a vertical actuating force for the hybrid light modulator, one layer of an element is embodied as a first electrode layer. A second electrode layer is provided over or below the element (in the case of the second electrode layer provided below the element, it is preferred that the second electrode layer be placed in a recess of the element). Thus, when a voltage is applied to the first and second electrode layers, the element is moved upwards and downwards by electrostatic force, thus being convex or concave. When a voltage is cut off, the element is returned to the initial horizontal state by a restoring force.
- In the case in which electromagnetic force is used as a vertical actuating force, a first electromagnetic force generating unit is provided on a element. A second electromagnetic force generating unit is provided over or below the element, so that the element is moved upwards and downwards by attraction and repulsion between the first and second electromagnetic force generating units.
- In the meantime, in the preferred embodiments using piezoelectric force, the actuating unit having a single piezoelectric material layer has been explained. However, multiple piezoelectric material layers may be used. In detail, the actuating unit may have a structure in which a first piezoelectric material layer is placed on a lower electrode layer, and an intermediate electrode layer is laminated on the first piezoelectric material layer, and, consecutively, a second piezoelectric material layer is placed on the intermediate electrode layer, and an upper electrode layer is laminated on the second piezoelectric material layer.
- As described above, the present invention provides a hybrid light modulator which realizes miniaturization of products, thus reducing production costs.
- For example, in the conventional technology, at least two elements having ribbon shapes are required to form one pixel. In addition, when two elements are used to form one pixel, diffractive efficiency is less than 50%. Therefore, in order to increase diffractive efficiency, in conventional technologies, four or six elements are used to form one pixel. If four or more conventional elements form one pixel, diffractive efficiency becomes higher than 70%. As such, as the number of elements is increased, diffractive efficiency is also increased so as to reach a desired level. However, in the present invention, three sets of protrusions and depressions provided on the upper surface of one element can achieve the same diffractive efficiency as when six conventional elements form one pixel.
- Therefore, in a high definition digital television having a 1080×1920 format embodied by the hybrid light modulator of the present invention, 1080 pixels are vertically arranged, and 1920 vertical lines each comprising 1080 pixels are horizontally arranged, thus 1920 light modulating processes are conducted to form a single frame. If 1080 pixels are formed using the conventional technology which forms one pixel using four or six elements, 1080×4 (or 6) elements are necessary. However, if the element of the present invention having two or three sets of protrusions and depressions is used, 1080 pixels are formed by only 1080×1 elements. Therefore, a process of manufacturing products is simplified, thereby the productivity is increased. As well, the present invention makes it possible to produce a small device.
- Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
Claims (5)
1. A hybrid light modulator, comprising:
a substrate support;
a support structure supported on the substrate so that portions of the support structure are spaced from the substrate by a predetermined distance, the support structure being movable towards or away from the substrate;
a piezoelectric mirror layer disposed on the support structure such that the piezoelectric mirror layer is spaced from the substrate, said piezoelectric mirror layer comprising a piezoelectric material layer, whereby a predetermined portion of the piezoelectric mirror layer moves toward or away from the substrate when voltage is applied to opposite sides of the piezoelectric material layer, thus reflecting incident light; and
at least one mirror layer disposed on the support structure at a distance from the substrate that is different from the distance that the piezoelectric mirror layer is located from the substrate, thus reflecting incident light.
2. A hybrid light modulator, comprising:
a substrate;
a support structure supported by the substrate and configured so that portions of the support structure are spaced from the substrate by a predetermined distance;
a first piezoelectric layer placed at a first location on the support structure, the first piezoelectric layer comprising a first piezoelectric material layer that generates an actuating force toward or away from the substrate by shrinking and expanding when a voltage is applied to the first piezoelectric material layer, thus reflecting incident light;
a second piezoelectric layer placed at a second location on the support structure, the second piezoelectric layer comprising a second piezoelectric material layer that generates an actuating force toward or away from the substrate by shrinking and expanding when a voltage is applied to both sides of the second thin-film piezoelectric material layer, thus reflecting incident light; and
a mirror layer disposed on the lower support structure at a location between the first and second piezoelectric layers, and positioned at different distance from the substrate relative to the locations of the first and second piezoelectric layers, thus reflecting incident light.
3. A hybrid light modulator, comprising:
a substrate;
a support structure supported by the substrate and configured so that portions of the support structure are spaced from the substrate by a predetermined distance, the support structure being movable toward or away from the substrate;
a piezoelectric mirror layer mounted on the support structure such that the entire piezoelectric mirror layer is positioned on the portion of the support structure that is spaced apart from the substrate, and comprising a piezoelectric material layer, so that a predetermined portion of the piezoelectric mirror layer spaced apart from the substrate moves towards or away from the substrate when voltage is applied to the piezoelectric material layer, thus reflecting incident light; and
at least one mirror layer disposed on the support structure and positioned so that the mirror layer is spaced apart from the piezoelectric mirror layer relative to the support structure, thus reflecting incident light.
4. A hybrid light modulator, comprising:
a substrate;
a support structure supported by the substrate and configured so that portions of the support structure are spaced from the substrate by a predetermined distance;
a first piezoelectric layer disposed on the support structure such that a portion of the first piezoelectric layer is disposed on the portion of the support structure not spaced from the substrate; a second piezoelectric layer disposed on the support structure such that a portion of the second piezoelectric layer is disposed on the portion of the support structure not spaced from the substrate; and
at least one mirror layer disposed on the support structure at locations between the first and second piezoelectric layers, and said at least one mirror layer located at a relative distance from the locations of the piezoelectric layers, thus reflecting incident light.
5. A hybrid light modulator, comprising:
a substrate;
a plurality of light modulating units arranged relative to each other, each of the light modulating units attached to the substrate and spaced apart at an intermediate portion thereof from the substrate, and comprising at least one first light reflecting surface at a first position relative to the substrate and at least one second light reflecting surface at a second position relative to the substrate and relative to the first light reflecting surface thereby to diffract incident light; the light modulating units being moveable toward or away from the substrate at the intermediate portion thereof that is spaced apart from the substrate, thus varying an angle of the diffracted light; and
a plurality of actuating units to move the intermediate portion of the plurality of light modulating units toward or away from the substrate, so that an angle of the diffracted light varies.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US12/099,048 US20080186561A1 (en) | 2004-09-28 | 2008-04-07 | Hybrid light modulator |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/951,556 US7170668B2 (en) | 2004-04-29 | 2004-09-28 | Hybrid light modulator |
KR10-2005-0000904 | 2005-01-05 | ||
KR1020050000904A KR20050118104A (en) | 2004-04-29 | 2005-01-05 | Hybrid spatial optical modulator |
KR1020050034686A KR100722616B1 (en) | 2004-04-29 | 2005-04-26 | Hybrid spatial optical modulator |
KR10-2005-0034686 | 2005-04-26 | ||
US11/152,831 US7382517B2 (en) | 2004-09-28 | 2005-06-13 | Hybrid light modulator |
US12/099,048 US20080186561A1 (en) | 2004-09-28 | 2008-04-07 | Hybrid light modulator |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US11/152,831 Division US7382517B2 (en) | 2004-09-28 | 2005-06-13 | Hybrid light modulator |
Publications (1)
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US20080186561A1 true US20080186561A1 (en) | 2008-08-07 |
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US11/152,831 Expired - Fee Related US7382517B2 (en) | 2004-09-28 | 2005-06-13 | Hybrid light modulator |
US12/099,048 Abandoned US20080186561A1 (en) | 2004-09-28 | 2008-04-07 | Hybrid light modulator |
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US11/152,831 Expired - Fee Related US7382517B2 (en) | 2004-09-28 | 2005-06-13 | Hybrid light modulator |
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Cited By (1)
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US20060267858A1 (en) * | 2005-05-25 | 2006-11-30 | Yun Sang K | Optical modulators including incorporated into mobile terminal projector |
Families Citing this family (1)
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US7486263B2 (en) * | 2004-03-05 | 2009-02-03 | Hewlett-Packard Development Company, L.P. | Electrostatic device |
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US5311360A (en) * | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
US5550373A (en) * | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
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US20060077517A1 (en) | 2006-04-13 |
US7382517B2 (en) | 2008-06-03 |
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