US20080174749A1 - In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles - Google Patents
In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles Download PDFInfo
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- US20080174749A1 US20080174749A1 US12/055,250 US5525008A US2008174749A1 US 20080174749 A1 US20080174749 A1 US 20080174749A1 US 5525008 A US5525008 A US 5525008A US 2008174749 A1 US2008174749 A1 US 2008174749A1
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- reticle
- electret fibers
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- sensor
- fibers
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Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
Definitions
- Lithography is used in the fabrication of semiconductor devices.
- a light sensitive material called a “photoresist” coats a wafer substrate, such as silicon.
- the lithography tool may include a mask with a pattern including transparent and opaque regions. When the wafer and mask are illuminated, light is transmitted through the transparent regions of the mask and onto the photoresist, causing the exposed regions of the photoresist to undergo chemical reactions. The photoresist is then developed to produce a replicated pattern of the mask on the wafer.
- Conventional lithography systems may include a pellicle to block particles from reaching the mask surface.
- a pellicle is a thin transparent layer stretched over a frame above the surface of the mask. Any particles that land on the pellicle are out of the focal plane and should not form an image on the wafer being exposed.
- EUV lithography is a promising future lithography technique.
- EUV light may be produced using a small, hot plasma that will efficiently radiate at a desired wavelength, e.g., in a range of approximately 11 nm to 15 nm.
- the plasma may be created in a vacuum chamber, typically by driving a pulsed electrical discharge through the target material or by focusing a pulsed laser beam onto the target material.
- the light produced by the plasma is then collected by nearby mirrors and sent downstream to the rest of the lithography tool.
- EUV lithography systems use reflective masks.
- Conventional pellicle materials are not suitable for such systems.
- the strategy is to simply handle the mask in such a way to minimize the chance of particles from falling onto the mask.
- even one particle falling on a pellicle-less EUV mask may significantly affect the yield, making it very important to keep the mask surface free from defects.
- FIG. 1 is a block diagram of an EUV lithography tool.
- FIG. 2 is a plot showing the dipole moments of electret fibers in a grid.
- FIG. 3 is a perspective view of a reticle carrier including nested grids of electret fibers.
- FIG. 4A is a sectional view of a reticle carrier including an in-line monitoring system.
- FIG. 4B is a plan view of the reticle carrier shown in FIG. 4A .
- FIG. 5 is a sectional view of a reticle carrier including an in-line monitoring system and a funnel.
- FIG. 6 is a sectional view of an EUV pellicle including a double-layer grid of electret fibers.
- FIG. 7 shows an EUV mask with no protective pellicle being illuminated.
- FIG. 1 illustrates an exemplary Extreme Ultraviolet (EUV) lithography tool 100 .
- EUV lithography is a projection lithography technique which may use a reduction optical system and illumination in the soft X-ray spectrum (wavelengths in the range of about 11 nm to 15 nm).
- the lithography tool 100 may include a source of EUV light, condenser optics 105 , a mask 110 , and an optical system including mirrors 115 - 118 .
- the mirrors in the system are made to be reflective to EUV light of a particular wavelength (e.g., 13.4 nm) by means of multilayer coatings (typically of Mo and Si).
- the lithography process may be carried out in a vacuum, and a reflective, rather than transmissive, mask (also referred to as a “reticle”) 110 may be used.
- the source of soft X-rays may be a compact high-average-power, high-repetition-rate laser 120 which impacts a target material 125 to produce broad band radiation with significant EUV emission.
- the target material may be, for example, a noble gas, such as Xenon (Xe), condensed into liquid or solid form.
- Xe Xenon
- the target material may convert a portion of the laser energy into a continuum of radiation peaked in the EUV.
- Other approaches may also be taken to produce the EUV plasma, such as driving an electrical discharge through the noble gas.
- the condenser optics 105 may collect EUV light from the source and condition the light to uniformly illuminate the mask.
- the radiation from the condenser optics 105 may be directed to the mask 110 .
- the mask may include reflecting and absorbing regions.
- the reflected EUV radiation from the mask 110 may carry an IC pattern on the mask 110 to a photoresist layer on a wafer 130 via the optical system including the multilayer mirrors.
- the entire mask may be exposed onto the wafer 130 by synchronously scanning the mask and the wafer, e.g., by a step-and-scan exposure.
- EUV masks are very sensitive to defects. Even one particle falling onto an EUV mask may significantly affect the yield. Also, EUV masks may include a conductive film on the backside of the mask to aid in electrostatic chucking to the stage. Accordingly, it is very important to protect both sides of the mask from contamination while out of the tool, e.g., for shipping or storage.
- electret fibers are used to provide active protection in the reticle carrier. Grids of these electret fibers act as particle traps, preventing particles from depositing onto the surfaces of the mask.
- Electret fibers 202 are imbued with an electret dipole field 204 , as shown in FIG. 2 .
- This field in turn attracts charged particles 206 to the fibers.
- the electret dipole field also attracts neutral particles 208 ; the field generates a dipole moment in the uncharged particles 208 , which then follow the gradient of the field into the fiber.
- Electret fibers are commercially available. Electret fibers may be produced by polymer melt-blowing with either corona charging or electrostatic fiber spinning. In the latter technique, the fibers are continuously released in liquid state out of a die and into a region of a strong electric field. After some distance the fiber crystallizes with the electric field embedded in it. Fiber thickness can reach below 1 micron, although 100 micron fibers may be used in the electret grids of the reticle carrier for mechanical reliability.
- FIG. 3 shows a reticle carrier 300 according to an embodiment.
- Two nested grids 302 of electrets 202 may be attached to the reticle carrier 300 to protect the surface of the mask from particles.
- the layers of electret fibers in each nested grid may be arranged in a staggered fashion. This may help to capture particles that might pass through one of the layers.
- the electret fibers have a diameter of 100 ⁇ m and a dipole of polarization 10 nC/cm 2 and radius of 1 mm.
- the electric fields generated by the fibers in the grid may be strong enough to sweep charged particles and to induce a polarization in the neutral particles, thus effectively preventing them from depositing onto the mask.
- the dipole moments of the electret fibers may be chosen to be aligned in their minimum energy configuration, as shown in FIG. 2 . If any other configuration were attempted the wires would have a tendency to twist until they again reached the minimum energy state.
- the grids may accumulate particles over time. It may be desirable to replace he grids at appropriate time intervals in order to minimize any degradation of the protection over time.
- the mask surfaces may need to be inspected for contaminants before they are loaded into the lithography tool.
- the mask surfaces may need to be inspected for contaminants before they are loaded into the lithography tool.
- in-line sensors are used for monitoring surface contamination inside an EUV reticle carrier. This provides in-situ data on the contamination levels inside the carrier without having to take the mask out of the carrier for inspection, thereby avoiding the risk of contamination during inspection.
- FIGS. 4A and 4B are section and plan views of a reticle carrier 400 that enables in-situ monitoring of the mask surface.
- Quartz crystal microbalance (QCM) or surface acoustic wave (SAW) sensors may be used as in-line sensors.
- QCM sensors are piezoelectric devices fabricated for a thin plate of quartz with electrodes affixed to each side of the plate.
- QCM sensors utilize the converse piezoelectric effect to determine mass changes as a result of frequency change of the crystal.
- QCM sensors are an extremely sensitive mass sensor, capable of measuring mass changes in the nanogram range.
- SAW sensors operate similarly to the QCM sensors.
- a vibratory resonance wave is excited in a piezoelectric crystal, usually quartz. The resonant frequency decreases as mass is deposited on the surface. In a SAW sensor, the wave travels along the surface instead of traveling through the crystal bulk, as in QCM.
- the reticle carrier 400 in FIGS. 4A and 4B include QCM foil 402 in-line sensors.
- the sensors may be embedded into the walls of the reticle carrier with an external I/O (Input/Output) interface for measuring the contamination levels. This circumvents the need for taking the mask out of the carrier for inspection and also provides real-time, in-situ data on the contamination levels inside the carrier.
- I/O Input/Output
- the mask 110 may be placed upside down in a mask holder 405 , with the patterned side facing the bottom of the carrier.
- One sensor may be placed directly below the patterned area to monitor contamination levels there.
- There may be additional sensors placed on the sidewalls of the carrier.
- Sticky polymers or other appropriate materials may be put on the surface of these QCM foils to capture the particles. However, care needs to be taken to ensure that these materials do not outgas or generate particles.
- QCM foils with a 7.995-MHz fundamental frequency, density of 2.684 g/cm 3 , and shear modulus of 2.947 ⁇ 10 11 g/cm ⁇ s 2 are used for sensors.
- the functioning of the QCMs is based on the following equation:
- f 0 is the resonant frequency of the fundamental mode of the crystal
- A is the area of the disk coated onto the crystal
- ⁇ is the density of the crystal
- ⁇ is the shear modulus of quartz.
- a non-stick funnel 500 may be placed under the mask 110 to concentrate the particles onto the QCM foil, as shown in FIG. 5 .
- a funnel with a 100:1 contraction ratio would allow a 100 ⁇ smaller area, and thus would make ⁇ f 100 ⁇ more sensitive.
- 1 Hz would correspond to about 0.01 ng, or a single SiO 2 particle of about 2 microns in radius. Particles may also stick to the funnel, which may be replaced periodically.
- the readouts from the QCM or SAW sensors may be done at specified points in the flow, such as at incoming inspection in the fab or prior to loading into the exposure tool. Based on the surface contamination levels, the operator can decide if the mask needs to be cleaned in the fab or not.
- a power supply may be built into the reticle management system or storage rack to enable constant monitoring of the sensors for real-time data acquisition during storage.
- the electret fiber particle trap and in-line monitoring system may be used separately or in combination in the reticle carrier.
- the mask may also be susceptible to contamination while in the lithography tool.
- Sources of contamination include the plasma EUV source, residue deposited on the optics from hydrocarbon cracking, or any points of mechanical contact within the tool.
- grid(s) of electret fibers may be used as a pellicle.
- a pellicle is a thin transparent layer held a sufficient distance above the mask that any particles are out of focus.
- conventional pellicle materials are not transparent to for EUV light.
- FIG. 6 shows a sectional view of an EUV pellicle 600 according to an embodiment.
- the electret fibers 202 may be attached to a frame, e.g., by threading though laser-drilled holes in the frame or by directly bonding the fibers to the frame.
- the electret fibers have a diameter of 50 ⁇ m and a dipole of polarization 10 nC/cm 2 and radius of 1 mm.
- the electret fibers may be arranged in a double-layer grid, including a first layer 602 and a second layer 604 .
- the second layer of electret fibers may be needed because the field gradient in between the fibers in the first layer may be small and thus the force on a neutral particle may also be small. Placing the second layer of fibers in a staggered fashion helps to capture particles that might otherwise pass through the weak fields midway between fibers in the first layer.
- the dipole moments of the electret fibers may be chosen to be aligned in their minimum energy configuration, as shown in FIG. 2 , to minimize twisting due to the interactions between the fibers.
- the pellicle is placed 40 mm above the reticle.
- the illumination cone 700 will be about 7 mm wide, as shown in FIG. 7 .
- the illumination cone will capture about fourteen fibers so that the illumination uniformity will not change significantly as the reticle is scanned.
- the pellicle may remain attached to the mask to provide both in-tool and out-of-tool protection.
- the principle advantage of the electret fibers over wire-based electrostatic grids is that they need no power supply, and thus can more easily ride along with the reticle both inside and outside of the lithography tool.
- the electret fiber pellicle may also have a compact nature that is straightforward to implement in tool or on the reticle and avoids the possibility of releasing particles due to the loss of power.
Abstract
A reticle carrier for an Extreme Ultraviolet (EUV) reticle may include nested grids of electret fibers to provide active protection from contamination without a power supply. The reticle carrier may include in-line sensors for in-situ monitoring of contamination. Grids of electret fibers may also be used in an EUV pellicle.
Description
- This application is a divisional application of and claims priority to U.S. patent application Ser. No. 10/789,670, filed Feb. 27, 2004. The content of the prior application is considered part of (and is incorporated by reference by) the instant application.
- Lithography is used in the fabrication of semiconductor devices. In lithography, a light sensitive material, called a “photoresist”, coats a wafer substrate, such as silicon. The lithography tool may include a mask with a pattern including transparent and opaque regions. When the wafer and mask are illuminated, light is transmitted through the transparent regions of the mask and onto the photoresist, causing the exposed regions of the photoresist to undergo chemical reactions. The photoresist is then developed to produce a replicated pattern of the mask on the wafer.
- Conventional lithography systems may include a pellicle to block particles from reaching the mask surface. A pellicle is a thin transparent layer stretched over a frame above the surface of the mask. Any particles that land on the pellicle are out of the focal plane and should not form an image on the wafer being exposed.
- Extreme Ultraviolet (EUV) lithography is a promising future lithography technique. EUV light may be produced using a small, hot plasma that will efficiently radiate at a desired wavelength, e.g., in a range of approximately 11 nm to 15 nm. The plasma may be created in a vacuum chamber, typically by driving a pulsed electrical discharge through the target material or by focusing a pulsed laser beam onto the target material. The light produced by the plasma is then collected by nearby mirrors and sent downstream to the rest of the lithography tool.
- EUV lithography systems use reflective masks. Conventional pellicle materials are not suitable for such systems. Currently, the strategy is to simply handle the mask in such a way to minimize the chance of particles from falling onto the mask. However, even one particle falling on a pellicle-less EUV mask may significantly affect the yield, making it very important to keep the mask surface free from defects.
-
FIG. 1 is a block diagram of an EUV lithography tool. -
FIG. 2 is a plot showing the dipole moments of electret fibers in a grid. -
FIG. 3 is a perspective view of a reticle carrier including nested grids of electret fibers. -
FIG. 4A is a sectional view of a reticle carrier including an in-line monitoring system. -
FIG. 4B is a plan view of the reticle carrier shown inFIG. 4A . -
FIG. 5 is a sectional view of a reticle carrier including an in-line monitoring system and a funnel. -
FIG. 6 is a sectional view of an EUV pellicle including a double-layer grid of electret fibers. -
FIG. 7 shows an EUV mask with no protective pellicle being illuminated. -
FIG. 1 illustrates an exemplary Extreme Ultraviolet (EUV)lithography tool 100. EUV lithography is a projection lithography technique which may use a reduction optical system and illumination in the soft X-ray spectrum (wavelengths in the range of about 11 nm to 15 nm). Thelithography tool 100 may include a source of EUV light,condenser optics 105, amask 110, and an optical system including mirrors 115-118. The mirrors in the system are made to be reflective to EUV light of a particular wavelength (e.g., 13.4 nm) by means of multilayer coatings (typically of Mo and Si). As EUV is strongly absorbed by materials and gases, the lithography process may be carried out in a vacuum, and a reflective, rather than transmissive, mask (also referred to as a “reticle”) 110 may be used. - The source of soft X-rays may be a compact high-average-power, high-repetition-
rate laser 120 which impacts atarget material 125 to produce broad band radiation with significant EUV emission. The target material may be, for example, a noble gas, such as Xenon (Xe), condensed into liquid or solid form. The target material may convert a portion of the laser energy into a continuum of radiation peaked in the EUV. Other approaches may also be taken to produce the EUV plasma, such as driving an electrical discharge through the noble gas. - The
condenser optics 105 may collect EUV light from the source and condition the light to uniformly illuminate the mask. The radiation from thecondenser optics 105 may be directed to themask 110. The mask may include reflecting and absorbing regions. The reflected EUV radiation from themask 110 may carry an IC pattern on themask 110 to a photoresist layer on awafer 130 via the optical system including the multilayer mirrors. The entire mask may be exposed onto thewafer 130 by synchronously scanning the mask and the wafer, e.g., by a step-and-scan exposure. - EUV masks are very sensitive to defects. Even one particle falling onto an EUV mask may significantly affect the yield. Also, EUV masks may include a conductive film on the backside of the mask to aid in electrostatic chucking to the stage. Accordingly, it is very important to protect both sides of the mask from contamination while out of the tool, e.g., for shipping or storage.
- In an embodiment, “electret” fibers are used to provide active protection in the reticle carrier. Grids of these electret fibers act as particle traps, preventing particles from depositing onto the surfaces of the mask.
-
Electret fibers 202 are imbued with anelectret dipole field 204, as shown inFIG. 2 . This field in turn attractscharged particles 206 to the fibers. The electret dipole field also attractsneutral particles 208; the field generates a dipole moment in theuncharged particles 208, which then follow the gradient of the field into the fiber. - Electret fibers are commercially available. Electret fibers may be produced by polymer melt-blowing with either corona charging or electrostatic fiber spinning. In the latter technique, the fibers are continuously released in liquid state out of a die and into a region of a strong electric field. After some distance the fiber crystallizes with the electric field embedded in it. Fiber thickness can reach below 1 micron, although 100 micron fibers may be used in the electret grids of the reticle carrier for mechanical reliability.
-
FIG. 3 shows areticle carrier 300 according to an embodiment. Twonested grids 302 ofelectrets 202, one for each side of themask 110 may be attached to thereticle carrier 300 to protect the surface of the mask from particles. - The layers of electret fibers in each nested grid may be arranged in a staggered fashion. This may help to capture particles that might pass through one of the layers. In an embodiment, the electret fibers have a diameter of 100 μm and a dipole of
polarization 10 nC/cm2 and radius of 1 mm. The electric fields generated by the fibers in the grid may be strong enough to sweep charged particles and to induce a polarization in the neutral particles, thus effectively preventing them from depositing onto the mask. The dipole moments of the electret fibers may be chosen to be aligned in their minimum energy configuration, as shown inFIG. 2 . If any other configuration were attempted the wires would have a tendency to twist until they again reached the minimum energy state. - The grids may accumulate particles over time. It may be desirable to replace he grids at appropriate time intervals in order to minimize any degradation of the protection over time.
- Since the dipoles in the
electret fibers 202 are permanent, no external power supply is needed for implementing this electrostatic protection in thereticle carrier 300. Thus, the danger of power supplies failing during transport or storage is avoided. - In the absence of active protection, the mask surfaces may need to be inspected for contaminants before they are loaded into the lithography tool. However, there is a high probability of particles and contaminants depositing onto the mask each time the mask is taken out for inspection.
- In an embodiment, in-line sensors are used for monitoring surface contamination inside an EUV reticle carrier. This provides in-situ data on the contamination levels inside the carrier without having to take the mask out of the carrier for inspection, thereby avoiding the risk of contamination during inspection.
-
FIGS. 4A and 4B are section and plan views of areticle carrier 400 that enables in-situ monitoring of the mask surface. Quartz crystal microbalance (QCM) or surface acoustic wave (SAW) sensors may be used as in-line sensors. QCM sensors are piezoelectric devices fabricated for a thin plate of quartz with electrodes affixed to each side of the plate. QCM sensors utilize the converse piezoelectric effect to determine mass changes as a result of frequency change of the crystal. QCM sensors are an extremely sensitive mass sensor, capable of measuring mass changes in the nanogram range. SAW sensors operate similarly to the QCM sensors. A vibratory resonance wave is excited in a piezoelectric crystal, usually quartz. The resonant frequency decreases as mass is deposited on the surface. In a SAW sensor, the wave travels along the surface instead of traveling through the crystal bulk, as in QCM. - The
reticle carrier 400 inFIGS. 4A and 4B includeQCM foil 402 in-line sensors. The sensors may be embedded into the walls of the reticle carrier with an external I/O (Input/Output) interface for measuring the contamination levels. This circumvents the need for taking the mask out of the carrier for inspection and also provides real-time, in-situ data on the contamination levels inside the carrier. - The
mask 110 may be placed upside down in amask holder 405, with the patterned side facing the bottom of the carrier. One sensor may be placed directly below the patterned area to monitor contamination levels there. There may be additional sensors placed on the sidewalls of the carrier. Sticky polymers or other appropriate materials may be put on the surface of these QCM foils to capture the particles. However, care needs to be taken to ensure that these materials do not outgas or generate particles. - In an embodiment, QCM foils with a 7.995-MHz fundamental frequency, density of 2.684 g/cm3, and shear modulus of 2.947×1011 g/cm·s2 are used for sensors. The functioning of the QCMs is based on the following equation:
-
Δƒ=−2ƒ0 Δm/[A√{square root over (μρ)}] - Where f0 is the resonant frequency of the fundamental mode of the crystal, A is the area of the disk coated onto the crystal, ρ is the density of the crystal, and μ is the shear modulus of quartz. Using the equation, it can be seen that a net change of 1 Hz corresponds to 1.36 ng of material adsorbed or desorbed onto a crystal surface with an area of 0.196 cm2.
- In an embodiment, a
non-stick funnel 500 may be placed under themask 110 to concentrate the particles onto the QCM foil, as shown inFIG. 5 . For particle monitoring, a funnel with a 100:1 contraction ratio would allow a 100× smaller area, and thus would makeΔf 100× more sensitive. Thus 1 Hz would correspond to about 0.01 ng, or a single SiO2 particle of about 2 microns in radius. Particles may also stick to the funnel, which may be replaced periodically. - The readouts from the QCM or SAW sensors may be done at specified points in the flow, such as at incoming inspection in the fab or prior to loading into the exposure tool. Based on the surface contamination levels, the operator can decide if the mask needs to be cleaned in the fab or not.
- In an embodiment, a power supply may be built into the reticle management system or storage rack to enable constant monitoring of the sensors for real-time data acquisition during storage.
- The electret fiber particle trap and in-line monitoring system may be used separately or in combination in the reticle carrier.
- The mask may also be susceptible to contamination while in the lithography tool. Sources of contamination include the plasma EUV source, residue deposited on the optics from hydrocarbon cracking, or any points of mechanical contact within the tool.
- In an embodiment, grid(s) of electret fibers may be used as a pellicle. In conventional (transmissive) lithography systems, a pellicle is a thin transparent layer held a sufficient distance above the mask that any particles are out of focus. However, conventional pellicle materials are not transparent to for EUV light.
-
FIG. 6 shows a sectional view of anEUV pellicle 600 according to an embodiment. Theelectret fibers 202 may be attached to a frame, e.g., by threading though laser-drilled holes in the frame or by directly bonding the fibers to the frame. In an embodiment, the electret fibers have a diameter of 50 μm and a dipole ofpolarization 10 nC/cm2 and radius of 1 mm. - The electret fibers may be arranged in a double-layer grid, including a
first layer 602 and asecond layer 604. The second layer of electret fibers may be needed because the field gradient in between the fibers in the first layer may be small and thus the force on a neutral particle may also be small. Placing the second layer of fibers in a staggered fashion helps to capture particles that might otherwise pass through the weak fields midway between fibers in the first layer. As described above, the dipole moments of the electret fibers may be chosen to be aligned in their minimum energy configuration, as shown inFIG. 2 , to minimize twisting due to the interactions between the fibers. - It is important that the pellicle not absorb too much light or form an image on the wafer. In an embodiment, the pellicle is placed 40 mm above the reticle. At a nominal distance of 40 mm from the reticle, the
illumination cone 700 will be about 7 mm wide, as shown inFIG. 7 . For a fiber size of 50 μm and a fiber spacing of 1 mm in two staggered layers, the illumination cone will capture about fourteen fibers so that the illumination uniformity will not change significantly as the reticle is scanned. There will be a geometrical loss of approximately 20% from the fibers, counting the double-pass after reflection off the reticle. Lower losses could be obtained with thinner fibers, although such wires would be less robust. - In an embodiment, the pellicle may remain attached to the mask to provide both in-tool and out-of-tool protection.
- The principle advantage of the electret fibers over wire-based electrostatic grids is that they need no power supply, and thus can more easily ride along with the reticle both inside and outside of the lithography tool. The electret fiber pellicle may also have a compact nature that is straightforward to implement in tool or on the reticle and avoids the possibility of releasing particles due to the loss of power.
- A number of embodiments have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the invention. Accordingly, other embodiments are within the scope of the following claims.
Claims (20)
1. A reticle carrier comprising:
a plurality of walls, each wall having an interior side and an exterior side, wherein the interior sides of the walls are arranged to define a sealable cavity;
a reticle holder disposed within the cavity
a sensor within said cavity, wherein said sensor is to sensitive to a property of particles in the cavity; and
an output to convey particle information from the sensor out of the cavity of the reticle carrier.
2. The reticle carrier of claim 1 , wherein the sensor comprises a mass sensor.
3. The reticle carrier of claim 2 , wherein the mass sensor comprises a quartz crystal microbalance.
4. The reticle carrier of claim 2 , wherein the mass sensor comprises a surface acoustic wave (SAW) sensor.
5. The reticle carrier of claim 1 , wherein the sensor is mounted on a first interior side of one of said plurality of walls.
6. The reticle carrier of claim 1 , wherein the sensor comprises a surface coating having a high sticking coefficient for the particles to be monitored.
7. The reticle carrier of claim 1 , further comprising a first plurality of electret fibers within the cavity.
8. The reticle carrier of claim 7 , further comprising a second plurality of electret fibers within the cavity, wherein first plurality of electret fibers is arranged in a first layer and the second plurality of electret fibers is arranged in a second layer.
9. The reticle carrier of claim 8 , wherein:
the reticle holder is positioned to hold a patterned side of a reticle facing the first layer of the first plurality of electret fibers.
10. The reticle carrier of claim 1 , further comprising a funnel disposed between the reticle holder and the sensor.
11. A device comprising:
a debris trap dimensioned to be positionable between an illumination source and a reticle in a lithography system, wherein the debris trap comprises a frame and a plurality of electret fibers attached to the frame.
12. The device of claim 11 , further comprising an extreme ultraviolet lithography system.
13. The device of claim 11 , wherein the debris trap comprises a pellicle.
14. The device of claim 11 , wherein the plurality of electret fibers are incorporated into a grid including a first layer of electret fibers and a second layer of electret fibers.
15. The device of claim 14 , wherein the electret fibers in the first layer and the electret fibers in the second layer are arranged in a staggered orientation.
16. The device of claim 11 , wherein the electret fibers have a thickness of about 50 μm.
17. The device of claim 11 , wherein the electret fibers have a dipole field with a polarity of about 10 nC/cm2.
18. The device of claim 11 , wherein adjacent electret fibers in the plurality of electret fibers are spaced apart by about 1 mm.
19. The device of claim 11 , wherein the plurality of said electret fibers are aligned with dipole fields in a minimum energy configuration.
20. A lithography system comprising:
a plurality of walls, each wall having an interior side and an exterior side, wherein the interior sides of the walls are arranged to define a sealable chamber that is dimensioned to receive a reticle;
a reticle holder within the chamber, wherein the reticle holder is dimensioned to hold a patterning face of a reticle facing a first direction;
a frame holder; and
a frame having a plurality of electret fibers attached thereto,
wherein the frame holder is positioned to hold the
Priority Applications (1)
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US12/055,250 US20080174749A1 (en) | 2004-02-27 | 2008-03-25 | In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles |
Applications Claiming Priority (2)
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US10/789,670 US7413586B2 (en) | 2004-02-27 | 2004-02-27 | In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles |
US12/055,250 US20080174749A1 (en) | 2004-02-27 | 2008-03-25 | In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles |
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US10/789,670 Division US7413586B2 (en) | 2004-02-27 | 2004-02-27 | In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles |
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US20080174749A1 true US20080174749A1 (en) | 2008-07-24 |
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US10/789,670 Active 2026-04-20 US7413586B2 (en) | 2004-02-27 | 2004-02-27 | In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles |
US12/055,250 Abandoned US20080174749A1 (en) | 2004-02-27 | 2008-03-25 | In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles |
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US10/789,670 Active 2026-04-20 US7413586B2 (en) | 2004-02-27 | 2004-02-27 | In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7367997B1 (en) * | 2004-07-12 | 2008-05-06 | Donaldson Company, Inc. | Electronic enclosure filter for very small spaces |
EP2462486B1 (en) * | 2009-08-04 | 2020-04-15 | ASML Netherlands BV | Object inspection systems and methods |
US8207504B2 (en) * | 2009-11-19 | 2012-06-26 | Applied Materials Israel, Ltd. | Inspection of EUV masks by a DUV mask inspection tool |
JP2011238921A (en) * | 2010-05-06 | 2011-11-24 | Asml Netherlands Bv | Radiation source, method of controlling radiation source, lithographic apparatus, and method for manufacturing device |
US9851643B2 (en) | 2012-03-27 | 2017-12-26 | Kla-Tencor Corporation | Apparatus and methods for reticle handling in an EUV reticle inspection tool |
US9454090B2 (en) | 2012-08-28 | 2016-09-27 | Micron Technology, Inc. | Methods and apparatuses for template cooling |
US8968971B2 (en) | 2013-03-08 | 2015-03-03 | Micro Lithography, Inc. | Pellicles with reduced particulates |
US9057957B2 (en) | 2013-06-13 | 2015-06-16 | International Business Machines Corporation | Extreme ultraviolet (EUV) radiation pellicle formation method |
US9182686B2 (en) | 2013-06-13 | 2015-11-10 | Globalfoundries U.S. 2 Llc | Extreme ultraviolet radiation (EUV) pellicle formation apparatus |
JP6261004B2 (en) * | 2014-01-20 | 2018-01-17 | 信越化学工業株式会社 | EUV pellicle, EUV assembly using the same, and method of assembling the same |
US20220075279A1 (en) * | 2019-02-08 | 2022-03-10 | Asml Netherlands B.V. | Component for Use in a Lithographic Apparatus, Method of Protecting a Component and Method of Protecting Tables in a Lithographic Apparatus |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4323374A (en) * | 1979-05-04 | 1982-04-06 | Nitta Belting Co., Ltd. | Air filter assembly |
US6162535A (en) * | 1996-05-24 | 2000-12-19 | Kimberly-Clark Worldwide, Inc. | Ferroelectric fibers and applications therefor |
US6421113B1 (en) * | 2000-02-14 | 2002-07-16 | Advanced Micro Devices, Inc. | Photolithography system including a SMIF pod and reticle library cassette designed for ESD protection |
US20020187025A1 (en) * | 2001-01-10 | 2002-12-12 | Speasl Jerry A. | Transportable container including an internal environment monitor |
US6513184B1 (en) * | 2000-06-28 | 2003-02-04 | S. C. Johnson & Son, Inc. | Particle entrapment system |
US20030138172A1 (en) * | 2001-11-14 | 2003-07-24 | Nsk Ltd. | Liner motion device, rolling device and separator for rolling device |
US6646720B2 (en) * | 2001-09-21 | 2003-11-11 | Intel Corporation | Euv reticle carrier with removable pellicle |
US6763608B2 (en) * | 1999-12-30 | 2004-07-20 | Intel Corporation | Method of transporting a reticle |
US20050028593A1 (en) * | 2003-08-04 | 2005-02-10 | Particle Measuring Systems, Inc. | Method and apparatus for high sensitivity monitoring of molecular contamination |
US20050056441A1 (en) * | 2002-10-01 | 2005-03-17 | Rider Gavin Charles | Reduction of electric-field-induced damage in field-sensitive articles |
-
2004
- 2004-02-27 US US10/789,670 patent/US7413586B2/en active Active
-
2008
- 2008-03-25 US US12/055,250 patent/US20080174749A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4323374A (en) * | 1979-05-04 | 1982-04-06 | Nitta Belting Co., Ltd. | Air filter assembly |
US6162535A (en) * | 1996-05-24 | 2000-12-19 | Kimberly-Clark Worldwide, Inc. | Ferroelectric fibers and applications therefor |
US6763608B2 (en) * | 1999-12-30 | 2004-07-20 | Intel Corporation | Method of transporting a reticle |
US6421113B1 (en) * | 2000-02-14 | 2002-07-16 | Advanced Micro Devices, Inc. | Photolithography system including a SMIF pod and reticle library cassette designed for ESD protection |
US6513184B1 (en) * | 2000-06-28 | 2003-02-04 | S. C. Johnson & Son, Inc. | Particle entrapment system |
US20020187025A1 (en) * | 2001-01-10 | 2002-12-12 | Speasl Jerry A. | Transportable container including an internal environment monitor |
US6646720B2 (en) * | 2001-09-21 | 2003-11-11 | Intel Corporation | Euv reticle carrier with removable pellicle |
US20030138172A1 (en) * | 2001-11-14 | 2003-07-24 | Nsk Ltd. | Liner motion device, rolling device and separator for rolling device |
US20050056441A1 (en) * | 2002-10-01 | 2005-03-17 | Rider Gavin Charles | Reduction of electric-field-induced damage in field-sensitive articles |
US20050028593A1 (en) * | 2003-08-04 | 2005-02-10 | Particle Measuring Systems, Inc. | Method and apparatus for high sensitivity monitoring of molecular contamination |
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US20050191565A1 (en) | 2005-09-01 |
US7413586B2 (en) | 2008-08-19 |
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