US20080122397A1 - Planar motor - Google Patents
Planar motor Download PDFInfo
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- US20080122397A1 US20080122397A1 US11/605,376 US60537606A US2008122397A1 US 20080122397 A1 US20080122397 A1 US 20080122397A1 US 60537606 A US60537606 A US 60537606A US 2008122397 A1 US2008122397 A1 US 2008122397A1
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- axis
- movable stage
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- common electrode
- electrode plate
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Abstract
A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.
Description
- 1. Field of the Invention
- The present invention relates to a planar motor used for a fine positional control of a stage of an optical microscope, for example.
- 2. Description of the Related Art
- As a device for two-dimensionally driving a subject in X-Y directions so as to be positioned, an X-Y stage structured by combining a servo motor with a linear guide is well known.
- As the aforementioned X-Y stage, an XYθ stage for linearly moving and turning the stage has been proposed, in which three sides of a square table are provided with linear actuators, respectively and output shafts of the respective linear actuators are connected to the corresponding sides of the square table (Japanese Unexamined Patent Application Publication No. 2002-341942).
- In the aforementioned XYθ stage, the driving force is constantly applied to one of the connection parts of inclined linear guides even when only a first or second driving unit is driven by providing an inclination angle between the linear guide directions of the respective linear guides functioning as the direction motion guiding member connected with two linear actuators functioning as a pair of first driving units. The driving force is applied to at least two connection parts together with the connection part connected with the driving unit to supply the driving force with sufficient balance.
- The XYθ stage is of semi-close control type having its linear actuator driven by, for example, a stepping motor for controlling movement positions of the X-axis and Y-axis, and the turning angle in accordance with the pulse number. As the accurate positional control is likely to be influenced by precisions of the parts that constitute the transmission mechanism and by the backlash upon transmission of the driving force, it is difficult for such XYθ stage of semi-close control type to achieve the highly accurate positioning.
- The planar motor for controlling directions of the X-axis and Y-axis, and the turning angle has been proposed by the applicant of the present invention (Japanese Unexamined Patent Application Publication No. 2005-168154). According to the disclosure, the permanent magnet for the linear motor is attached to the movable stage, and a coil for linear motor is attached to the fixed stage, and electricity is applied to the coil to constitute the coreless linear motor that moves the movable stage in the directions of the X-axis, Y-axis, and θ. A cross-shaped common electrode is mounted on the movable stage, and a pair of fixed electrodes is provided to each end of the cross-shaped common electrode. Each displacement in the directions of the X-axis, Y-axis and θ is derived from the respective displacements in the electrostatic capacities of the capacitors formed between the cross-shaped common electrode and the fixed electrode. The positioning control in the directions of X-axis, Y-axis and θ may be executed based on the derived displacements in the respective directions.
- According to the disclosure, the planar motor of thin and low vibration type is capable of executing a highly accurate positioning.
- Unlike the generally employed motor, the planar motor disclosed in Japanese Unexamined Patent Application Publication No. 2005-168154 is suitable for the use in the device that requires accurate position control as it is capable of executing highly accurate positioning. In the case where the external force is applied to the stage although such force is relatively small, the stage is likely to move. As it is not intended to move the movable stage with relatively large force, it is unsuitable for the use as the mechanism for moving the stage that is required to have both accurate position control and the thrust force.
- The use of a plurality of linear actuators may be considered to drive the movable stage in directions of the X-axis, Y-axis and θ so as to be moved with a large force. Because of the error in the combined parts or the backlash of the transmission mechanism which may influence the positioning control, and the semi-closed control mode, it is difficult for the aforementioned planar motor to establish the highly accurate position control.
- Accordingly, it is an object of the present invention to provide a planar motor that forms the stage movable in directions of the X-axis, Y-axis and θ of fully closed control mode, which is intended to improve the thrust force for moving the movable stage, and after the movement of the movable stage, to prevent the movement caused by the external force for realizing the highly accurate positional control without requiring the precision of the combined parts.
- In the embodiment of the present invention, a planar motor includes a movable stage, a common electrode plate including an electrode block in a crisscross arrangement to move on a plane together with the movable stage, a split electrode plate apart from the common electrode plate at a predetermined interval, which is formed of a plurality of pairs of electrode blocks that face the electrode blocks of the common electrode plate, a main base to which the split electrode plate is attached, a plurality of linear actuators attached to the main base, and a transmission mechanism that transmits displacement amounts of output shafts of the plurality of the linear actuators. A differential structure is provided in which electrostatic capacities of two capacitors formed of a pair of the electrode blocks of the split electrode plate, which face the electrode blocks of the common electrode plate are kept unchanged with respect to a movement in an axial direction of the capacitors, and one of the electrostatic capacities is increased while the other is decreased in proportion to a displacement of the movement with respect to the other axial direction. The plurality of linear actuators are driven to perform one of driving the movable stage in a direction of an X-axis and a Y-axis, and of turning the movable stage so as to output a change in the electrostatic capacity between the split electrode plate and the common electrode plate in accordance with the movement of the movable stage.
- According to the embodiment, the transmission mechanism includes a bearing attached to an output shaft of the linear actuator having a turning axis vertical to the plane on which the movable stage moves, a bearing guide attached to the movable stage, against which the bearing is pressed, and an elastic member set between the main base and the bearing guide to apply an urging force that presses the bearing against the bearing guide.
- According to the embodiment, four units of the linear actuators are used, which are arranged at each side end of the main base. The bearing guide is attached to each of four ends of the movable stage corresponding to the four respective linear actuators, and the bearing attached to each of the output shaft of the four linear actuators abuts against the bearing guide attached to each of the four ends of the movable stage.
- According to the embodiment, two opposite linear actuators among the four linear actuators are arranged symmetrically with respect to a center of the main base to have the output shafts opposite with each other. When the output shafts of the two opposite linear actuators are driven in a same direction, the movable stage is linearly moved in one of directions of X-axis and Y-axis, and when the output shafts are driven in opposite directions, the movable stage is turned.
- According to the embodiment, at least a portion of a comparative arithmetic circuit is provided for calculating displacements in directions of X-axis, Y-axis and turning based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates. A positional control with respect to the directions of X-axis, Y-axis and turning is executed based on each displacement output from the comparative arithmetic circuit.
- According to the embodiment, at least a portion of a comparative arithmetic circuit is provided for calculating displacements in directions of X-axis and Y-axis based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates. A positional control with respect to the directions of X-axis and Y-axis is executed based on each displacement output from the comparative arithmetic circuit.
- The aforementioned structure is capable of providing a large thrust force to move the movable stage, and executing the highly accurate position control without requiring high precision processing with respect to the respective parts that constitute the planar motor. The fully closed loop control may be realized by feed-backing the outputs of the comparative arithmetic circuit. This makes it possible to execute accurate control of the respective directions on the plane surface. Further, after the position control of the movable stage is finished, such position is not easily moved even by the large mechanical force externally applied thereto, resulting in the highly reliable stage for the optical microscope.
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FIG. 1 is a schematic exploded view of a planar motor according to an embodiment of the present invention; -
FIG. 2 shows a plan view and a side view of the planar motor according to the embodiment of the present invention; -
FIG. 3 shows a cross-section taken along line A-A of the side view shown inFIG. 2 , and the side view thereof when seen above from the common electrode plate; -
FIG. 4 shows a cross-section taken along line B-B and the side view thereof when seen below from the split electrode plate; -
FIG. 5 two-dimensionally shows configuration and arrangement of electrodes for the electrostatic capacity sensor which detects directions of the X-axis and Y-axis; -
FIG. 6 shows operations of the comparative arithmetic circuit; -
FIG. 7 shows the island-like common electrode having electrode blocks to which the comparativearithmetic circuit 31 shown inFIG. 6( b) is applied; -
FIG. 8 shows the feedback circuit for an integrated control of the planar motor according to the embodiment of the present invention; and -
FIG. 9 shows the feedback circuit for an individual control of the planar motor according to the embodiment of the present invention. - An embodiment of the present invention will be described in detail referring to the drawings.
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FIG. 1 is a schematic exploded view of a planar motor according to the embodiment of the present invention. The embodiment includes a linear actuator mechanism having fourlinear actuators 19 each attached to an opposite side surface of amain base 6 as a fixed stage for moving themovable stage 1 in directions of the X-axis, Y-axis, and for turning it, and an electrostatic capacity displacement sensor formed of a cross-shapedcommon electrode plate 3 attached to themovable stage 1, and asplit electrode plate 4 attached to themain base 6, which faces the respective ends of thecommon electrode plate 3. - A center hole 1 a is formed through the center of the
movable stage 1 of the metal plate so as to allow insertion of a centeringpin 7 therethrough, around which fourholes 1 b are formed. Fourholes 1 c are further formed at the respective corners of themovable stage 1 for the purpose of movably supporting themovable stage 1. A pair ofscrew holes 1 d are also formed through the respective sides of themovable stage 1 for fixingbearing guides 11. - A cross-shaped
common electrode base 2 is formed of a metal, and has its back surface provided with aglass material 3 a. Thecommon electrode plate 3 including four island-like electrode blocks is chrome-plate deposited on the back surface of theglass material 3 a crosswise. Ahole 2 a is formed through the center of thecommon electrode base 2, around which four screw holes 2 b are formed. Eachscrew 27 is inserted into each of the fourholes 1 b formed through themovable stage 1 so as to be screwed with the corresponding screw hole 2 b formed through thecommon electrode base 2. Thecommon electrode base 2 to which thecommon electrode plate 3 is attached is then fixed to themovable stage 1. In the aforementioned state, the centering for attaching thecommon electrode base 2 is performed by inserting the centeringpin 7 from thehole 2 a into the hole 1 a. - Eight
holes 6 a are formed through themain base 6 formed of a metal plate for attaching thesplit electrode base 5, and a pair ofscrew holes 6 b (12 holes in total) are also formed through the respective sides of themain base 6 for fixing thelinear actuators 19. Although not shown inFIG. 1 , agroove 6 e (seeFIG. 2 ) is formed on the upper surface of themain base 6 for guiding the lead wire outward from the respective pre-amplified electrodes. - The
split electrode base 5 is formed of a metal, and has its upper surface provided with aglass material 4 a. Asplit electrode plate 4 is chrome-plate deposited on the upper surface of theglass material 4 a. A square throughhole 5 a is formed through the center of thesplit electrode base 5, and eightscrew holes 5 b are formed along the respective sides. Fourholes 5 c are further formed at the respective corners for the purpose of movably supporting themovable stage 1.Screws 25 are inserted into those eightholes 6 a formed through themain base 6, respectively to be screwed with the screw holes 5 b of thesplit electrode base 5 to which thesplit electrode plate 4 is attached, which is then fixed to themain base 6. Thecommon electrode plate 3 and thesplit electrode plate 4 face with each other at apredetermined interval 26 as shown inFIG. 4 . - An
octagonal recess portion 5 d is formed on the lower surface of thesplit electrode base 5, four pairs of sides of which each facing with each other are connected to twolead wire grooves 5 e, respectively. Each end of the connectedlead wire grooves 5 e is further connected to ahole 5 f formed toward the surface of the split electrode plate 4 (seeFIG. 4 ). - The
octagonal recess portion 5 d accommodates a preamplifier (not shown). The lead wire connected to thecommon electrode plate 3, and eight lead wires connected to the respective split electrodes are guided to theoctagonal recess portions 5 d through thehole 5 a, and through therespective holes 5 f andlead wire groove 5 e, respectively. Outputs (capacity voltage) of the capacitor formed of each of the respective split electrodes and the common electrode are input to the preamplifier so as to be amplified. The amplified outputs of the preamplifier is drawn to the outside from thegroove 6 e of themain base 6 connected to therecess portion 5 d. - The mechanism for movably supporting the
movable stage 1 on the plane surface is formed ofball bearings 8 each provided at four corners between themovable stage 1 and thesplit electrode base 5,ball stoppers 9 at the movable side,steel balls 10,ball stoppers 16 at the fixed side, andball bearings 21. - The
ball bearing 8 is inserted into one of theholes 1 c formed through four corners of themovable stage 1 so as to be fit with theball stopper 9 at the movable side. Meanwhile, theball bearing 21 is inserted into one of theholes 5 c formed through four corners of thesplit electrode base 5 so as to be fit with theball stopper 16 at the fixed side. In this state, thesteel balls 10 are put into theball stoppers 16 at the four respective corners for attaching themovable stage 1 such that theball stoppers 9 at the four respective corners of themovable stage 1 face theball stoppers 16 at the four corners, respectively. - As the
movable stage 1 is urged by four tension springs 12 (described later) against thesplit electrode base 5, it is movably supported thereon while interposing the foursteel balls 10 within the respective ball stoppers. The thus assembled support mechanism is shown in the side views ofFIGS. 3 and 4 . - The island-like electrode blocks (terminals) of the
common electrode plate 3 face pairs of electrodes of the split electrode plates 4 (seeFIG. 7( a)). Each space between the respective electrode blocks of thecommon electrode plate 3 and the pairs of electrodes of thesplit electrode plate 4 is kept at a predetermined interval such that the capacitor (capacity) is formed by the respective electrodes of thesplit electrode plates 4 and the respective electrode blocks of thecommon electrode plate 3. This makes it possible to allow themovable stage 1 to move freely within the required range (directions of X-axis, Y-axis, and θ (turning)) on thesplit electrode base 5. - The structure of the linear actuator mechanism will be described referring to
FIG. 2 . The linear actuator mechanisms are provided near the respective side ends of themain base 6. Themain base 6 includesmount portions 6 c on which thelinear actuators 19 are mounted at the respective side ends, andprotrusions 6 d each having twoholes 6 b formed therethrough. A motor bracket 20 with twoscrew holes 20 a is attached to thelinear actuator 19.Screws 23 are inserted into the twoholes 6 b so as to be screwed with the screw holes 20 a of the motor bracket 20. Thelinear actuator 19 is thus fixed to themain base 6. Thelinear actuator 19 at the opposite side end is also fixed. The bearingholder 18 is attached to arod 19 a of thelinear actuator 19 with the screw, and thebearing 17 is attached to the tip of the bearingholder 18. - Meanwhile, a bearing
guide 11 for guiding abearing 17 in abutment thereagainst is screwed into the screw holes 1 d formed through the side surface of themovable stage 1 using screws 14. Atension spring post 13 is embedded in an end portion of the bearingguide 11. When themovable stage 1 is assembled with thesplit electrode base 5, one end of thetension spring 12 is engaged with thetension spring post 13, and the other end is engaged with atension spring post 22 screwed with themain base 6. - In this way, the
tension spring 12 provided between the tension spring posts 13 and 22 allows the bearing 17 attached to thebearing holder 18 to be urged against asurface 11 a of the bearingguide 11, and themovable stage 1 to be urged against thesplit electrode base 5.Bolts 28 near the respective tension spring posts 22 are used to fix the planar motor to an enclosure (not shown). - The four linear actuator mechanisms drive the
rod 19 a of one of two oppositelinear actuators 19 forward, and reverse therod 19 a of the otherlinear actuator 19 such that themovable stage 1 is moved in the direction of either X-axis or Y-axis. In this case, thetension spring 12 set at thelinear actuator 19 with theadvanced rod 19 a further extends, and thetension spring 12 set at thelinear actuator 19 with the reversedrod 19 a contracts. Then the position of themovable stage 1 is regulated so as not to be moved by the extended or contractedtension spring 12 after the movement in the direction of X-axis or Y-axis. Thebearings 17 at the ends of the twolinear actuators 19 at the non-driven side are turned at thesurface 11 a of the bearingguide 11, and thetension spring 12 is maintained without being extended nor contracted such that the position of themovable stage 1 after the movement is not moved from the four directions. Themovable stage 1 is therefore not easily moved under the external pressure. - The
movable stage 1 may be turned by extending or contracting the rods of the fourlinear actuators 19 such that the position of themovable stage 1 is not easily moved by the action of four tension springs 12 after the rotation. -
FIGS. 5( a), 5(b) and 5(c) are two-dimensional views each showing the configuration and arrangement of electrodes for the electrostatic capacity sensor for detecting the directions of X-axis and Y-axis. The cross-shaped configuration of the common electrode plate shown in the drawing is different from that of the common electrode plate shown inFIG. 1 . - Eight split electrodes 32 a 1, 32 a 2 to 32 d 1, and 32 d 2 are disposed on the split electrode base to face a common electrode plate 29 of the
movable stage 1 in parallel therewith at a predetermined space. Four pairs of capacitors, each pair of which includes two capacitors, that is, eight capacitors in total are formed between electrode blocks 29 a, 29 b, 29 c, 29 d, and corresponding pairs of the split electrodes 32 a 1 and 32 a 2, 32 b 1 and 32 b 2, 32 c 1 and 32 c 2, and 32 d 1 and 32 d 2, respectively. The electrostatic capacity of each of the capacitors changes in accordance with the displacement of the common electrode plate 29, realizing the electrostatic capacity sensor. - The shaded portions shown in
FIGS. 5( a), 5(b), and 5(c) indicate areas of the overlapped portions of the common electrode plate 29 and the respective split electrodes 32 a 1, 32 a 2 to 32 d 1, and 32 d 2. Each area is proportional to the electrostatic capacity of the capacitor each formed by the respective electrodes. -
FIG. 5( a) shows that themovable stage 1 is at a zero position with respect to the X- and Y-axes, and each electrostatic capacity of those eight capacitors is the same. -
FIG. 5( b) shows that themovable stage 1 has moved from the zero position toward the positive X-axis direction to show the differential structure in which among two pairs of the split electrodes 32 a 1, 32 a 2 and 32 c 1, 32 c 2 along the X-axis direction, the electrostatic capacity corresponding to the electrodes 32 a 1 and 32 c 2 is increased, and the one corresponding to the other electrodes 32 a 2 and 32 c 1 is decreased. Meanwhile, each electrostatic capacity for two pairs of the split electrodes 32 b 1, 32 b 2, and 32 d 1, 32 d 2 arranged along the Y-axis direction is not changed. -
FIG. 5( c) shows that themovable stage 1 has moved from the position shown inFIG. 5( b) to the Y-axis direction. The respective electrostatic capacities of the two pairs of split electrodes arranged in the X-axis, that is, 32 a 1, 32 a 2, and 32 c 1, 32 c 2 are not changed. Meanwhile, the electrostatic capacities of the split electrodes arranged in the Y-axis, that is, 32 b 1, 32 b 2, and 32 d 1, 32 d 2 are differentially changed. - The common electrode is formed into a crisscross shape to form the electrostatic capacity sensor in accordance with displacement of the movable stage in directions of the X-axis and Y-axis.
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FIG. 6 shows block diagrams each showing the comparative arithmetic circuit for obtaining the movement on the plane surface in response to the electrostatic capacity change. - A comparative
arithmetic circuit 30 shown inFIG. 6( a) calculates displacement amounts of both X-axis and Y-axis using the following equations (1) to (4) based on outputs of four pairs, that is, eight differentially structured electrostatic capacity sensors, that is, Ca to Ch. The comparative arithmetic circuit uses the arithmetic expression (each change in the electrostatic capacities of a pair of differentially operating capacitors may be derived from the equation V0=(Ca−Cb)/(Ca+Cb)) as disclosed in Japanese Unexamined Patent Application Publication No. 2005-77280. -
X1=(Cb−Ca)/(Ca+Cb+Cc+Cd+Ce+Cf+Cg+Ch) (1) -
X2=(Ce−Cf)/(Ca+Cb+Cc+Cd+Ce+Cf+Cg+Ch) (2) -
Y1=(Cc−Cd)/(Ca+Cb+Cc+Cd+Ce+Cf+Cg+Ch) (3) -
Y2=(Ch−Cg)/(Ca+Cb+Cc+Cd+Ce+Cf+Cg+Ch) (4) - The displacement amount of the respective pairs of sensors derived from the comparative arithmetic calculation may be set as the feedback signal so as to allow the respective linear actuators to be positional controlled independently in directions of the X-axis and Y-axis with respect to the respective sensors (four pairs of electrostatic capacity sensors).
- A comparative
arithmetic circuit 31 shown inFIG. 6( b) calculates the respective displacement amounts in directions of the X-axis, Y-axis, and angle around the axis, that is, θ using the following equations (5) to (7) based on outputs of the differentially structured eight electrostatic capacities Ca to Ch. In this case, the feedback signal is used for integrated control with coordinate conversion instead of independent control for the purpose of improving the control performance. This may further improve the positional control performance of the planar motor because the interference of the respective axes may be corrected compared to the independent control. -
FIG. 7 shows the common electrode of the island-like electrode blocks shown inFIG. 1 , which allows the comparativearithmetic circuit 31 shown inFIG. 6( b) to be applied. Thecommon electrode plate 3 is formed of the island-like electrode blocks 3 a to 3 d formed on thecommon electrode base 5, aannular pattern 34 disposed at the center of thecommon electrode base 5, and linear patterns 33 a to 33 d each for connecting the respective ends of the electrode blocks 3 a to 3 d to theannular pattern 34. - The electrode blocks 3 a to 3 d of the
common electrode plate 3 are arranged like islands, and each shaded area of the overlapped portions of the electrode blocks 3 a to 3 d and thesplit electrodes movable stage 1 is moved in the directions of X-axis and Y-axis, and turned as shown inFIG. 7( a). This makes it possible to keep the total value (the denominator of the following equation (7)) of electrostatic capacities of eight capacitors. Accordingly, the comparative arithmetic calculation in the case shown inFIG. 6( b) may be performed. -
X=X1+X2 (5) -
Y=Y1+Y2 (6) -
θ=[(Cb+Cd+Cf+Ch)−(Ca+Cc+Ce+Cg)]/(Ca+Cb+Cc+Cd+Ce+Cf+Cg+Ch) (7) - The positional control of the
movable stage 1 in directions of the X-axis, Y-axis, and turning may be thus performed. -
FIG. 8 shows the feedback circuit for the integrated control of the planar motor according to the embodiment of the present invention. Assuming that thelinear actuators 19 arranged outside the respective split electrodes are designated as LA1, LA2, LA3, and LA4, and the displacement amounts thereof are designated as δLA1, δLA2, δLA3, and δLA4 as shown inFIG. 8( a), the movements in directions of the x, y and θ (the clockwise direction when seen from the upper surface of the stage is set as the positive direction) may be expressed as δLA1−δLA2, δLA3−δLA4, and −(δLA1+δLA2+δLA3+δLA4), respectively. The aforementioned equations correspond with the equations (5), (6) and (7). The code “+” for the “δLA” denotes the advance movement of the axis of the linear actuator, and “−” denotes the reverse thereof, respectively. - In the circuit shown in
FIG. 8( b), a x-direction command and a signal from the x-direction sensor (capacitors formed by thecommon electrode plate 3 and thesplit electrodes common electrode plate 3 and the split electrodes 4 c 1, 4 c 2) are input to anadder 40 such that the deviation in the x-direction is output. The deviation is added to the deviation in the direction of θ in anadder 42. The linear actuator LA1 will be driven based on the resultant output as a value of X1. The deviation in the x-direction output from theadder 40 is inversed by an invertingunit 41 so as to be added to the deviation in the direction of θ in anadder 44. The linear actuator LA2 is driven based on the resultant output as a value of X2. - A y-direction command and a signal from a y-direction sensor (capacitors formed by the
common electrode plate 3 and the split electrodes 4 b 1, 4 b 2, and by thecommon electrode plate 3 and the split electrodes 4 d 1, 4 d 2) are input to anadder 4.Adders inverting unit 46 operate in the same way as in the case of x-direction to drive the linear actuators LA3 and LA4, respectively to output values of Y1 and Y2. - A θ-direction command and a signal from a θ-direction sensor are input to an
adder 48. The resultant deviation is input to theadders movable stage 1 is moved in the x or y direction, the correction is made to prevent themovable stage 1 from turning in the θ-direction for the purpose of avoiding its movement caused by the turning oscillation. In order to turn themovable stage 1, the deviation in the θ-direction is output from theadder 48, and added to theadders -
FIG. 9 is a view of a feedback circuit for independent control of the planar motor according to the embodiment of the present invention. The independent control feedback is executed for controlling the respective linear actuators LA1 to LA4 individually. The x-direction command and the signal from the x-direction sensor (capacitor formed by the common electrode 29 and the split electrodes 32 a 1, 32 a 2) are input to anadder 50. The resultant deviation is input to the linear actuator LA1 so as to be driven. Likewise, x-direction command and the x-direction sensor (capacitor formed by the common electrode 29 and the split electrodes 32 c 1, 32 c 2) are input to anadder 51. The resultant deviation is input to the linear actuator LA2 so as to be driven. - The y-direction command and a signal from the y-direction sensor (capacitor formed by the common electrode 29 and the split electrodes 32 b 1 and 32 b 2) are input to an
adder 52. The resultant deviation is input to the linear actuator LA3 so as to be driven. Likewise, the y-direction command and a signal from the y-direction sensor (capacitor formed by the common electrode 29 and the split electrodes 32 d 1 and 32 d 2) are input to anadder 53. The resultant deviation is input to the linear actuator LA4 so as to be driven. - The positional control may be executed with respect to the respective displacement and turning amounts in the X-axis and Y-axis directions in ranges of 5 mm and 5°, for example.
- In the embodiment, four linear actuators are mounted at the respective side ends of the main base. However, four linear actuators may be mounted at the side surfaces of the main base.
- In the embodiment, a single steel ball is interposed between ball bearings formed on the lower surface of the movable stage and the upper surface of the split electrode base for supporting the movable stage on the electrode base so as to be movable on the plane surface. However, a plurality of the steel balls may be used.
- The member interposed between the split electrode base and the movable stage may be formed of the slidably movable member that exhibits high hardness.
- In the embodiment, the linear actuators are mounted on the main base. However, they may be mounted on the movable stage.
Claims (8)
1. A planar motor comprising:
a movable stage;
a common electrode plate including an electrode block in a crisscross arrangement to move on a plane together with the movable stage;
a split electrode plate apart from the common electrode plate at a predetermined interval, which is formed of a plurality of pairs of electrode blocks that face the electrode blocks of the common electrode plate;
a main base to which the split electrode plate is attached;
a plurality of linear actuators attached to the main base; and
a transmission mechanism that transmits displacement amounts of output shafts of the plurality of the linear actuators, wherein
a differential structure is provided in which electrostatic capacities of two capacitors formed of a pair of the electrode blocks of the split electrode plate, which face the electrode blocks of the common electrode plate are kept unchanged with respect to a movement in an axial direction of the capacitors, and one of the electrostatic capacities is increased while the other is decreased in proportion to a displacement of the movement with respect to the other axial direction; and
the plurality of linear actuators are driven to perform one of driving the movable stage in a direction of an X-axis and a Y-axis, and of turning the movable stage so as to output a change in the electrostatic capacity between the split electrode plate and the common electrode plate in accordance with the movement of the movable stage.
2. The planar motor according to claim 1 , wherein the transmission mechanism includes:
a bearing attached to an output shaft of the linear actuator having a turning axis vertical to the plane on which the movable stage moves;
a bearing guide attached to the movable stage, against which the bearing is pressed; and
an elastic member set between the main base and the bearing guide to apply an urging force that presses the bearing against the bearing guide.
3. The planar motor according to claim 2 , wherein
four units of the linear actuators are used, which are arranged at each side end of the main base; and
the bearing guide is attached to each of four ends of the movable stage corresponding to the four respective linear actuators, and the bearing attached to each of the output shaft of the four linear actuators abuts against the bearing guide attached to each of the four ends of the movable stage.
4. The planar motor according to claim 3 , wherein
two opposite linear actuators among the four linear actuators are arranged symmetrically with respect to a center of the main base to have the output shafts opposite with each other; and
when the output shafts of the two opposite linear actuators are driven in a same direction, the movable stage is linearly moved in one of directions of X-axis and Y-axis, and when the output shafts are driven in opposite directions, the movable stage is turned.
5. The planar motor according to claim 1 , comprising at least a portion of a comparative arithmetic circuit that calculates displacements in directions of X-axis, Y-axis and turning based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates, wherein a positional control with respect to the directions of X-axis, Y-axis and turning is executed based on each displacement output from the comparative arithmetic circuit.
6. The planar motor according to claim 4 , comprising at least a portion of a comparative arithmetic circuit that calculates displacements in directions of X-axis, Y-axis and turning based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates, wherein a positional control with respect to the directions of X-axis, Y-axis and turning is executed based on each displacement output from the comparative arithmetic circuit.
7. The planar motor according to claim 1 , comprising at least a portion of a comparative arithmetic circuit that calculates displacements in directions of X-axis and Y-axis based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates, wherein a positional control with respect to the directions of X-axis and Y-axis is executed based on each displacement output from the comparative arithmetic circuit.
8. The planar motor according to claim 4 , comprising at least a portion of a comparative arithmetic circuit that calculates displacements in directions of X-axis and Y-axis based on the electrostatic capacity of all the capacitors formed between the common electrode plates and the split electrode plates, wherein a positional control with respect to the directions of X-axis and Y-axis is executed based on each displacement output from the comparative arithmetic circuit.
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US11/605,376 US7504794B2 (en) | 2006-11-29 | 2006-11-29 | Planar motor |
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US11/605,376 US7504794B2 (en) | 2006-11-29 | 2006-11-29 | Planar motor |
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KR101829030B1 (en) | 2011-10-27 | 2018-03-29 | 더 유니버시티 오브 브리티쉬 콜롬비아 | Displacement devices and methods for fabrication, use and control of same |
CN105452812B (en) | 2013-08-06 | 2019-04-30 | 不列颠哥伦比亚大学 | Shift unit and method and apparatus for detecting and estimating movement associated there |
EP3152822B1 (en) | 2014-06-07 | 2019-08-07 | The University Of British Columbia | Methods and systems for controllably moving multiple moveable stages in a displacement device |
WO2015188281A1 (en) | 2014-06-14 | 2015-12-17 | The University Of British Columbia | Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same |
CN215772885U (en) * | 2020-07-10 | 2022-02-08 | 日本电产株式会社 | Vibration motor |
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