US20080093256A1 - Photomask container - Google Patents
Photomask container Download PDFInfo
- Publication number
- US20080093256A1 US20080093256A1 US11/958,169 US95816907A US2008093256A1 US 20080093256 A1 US20080093256 A1 US 20080093256A1 US 95816907 A US95816907 A US 95816907A US 2008093256 A1 US2008093256 A1 US 2008093256A1
- Authority
- US
- United States
- Prior art keywords
- container
- photomask
- exterior surface
- pair
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/38—Packaging materials of special type or form
- B65D65/44—Applications of resilient shock-absorbing materials, e.g. foamed plastics material, honeycomb material
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67396—Closed carriers characterised by the presence of antistatic elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Containers Having Bodies Formed In One Piece (AREA)
Abstract
A container suitable for storing and transporting photomasks and including a container body, a cover, first and second cushions and left and right channels disposed in slots formed in the container body. In one embodiment, the container of this invention is formed in a one-piece design by rotomolding. The cover is subsequently separated from the body and machined so as to provide a slidingly sufficient seal and disposed therein.
Description
- This application is a divisional of application Ser. No. 11/286,696 filed Nov. 23, 2005, which claims the benefit of U.S. Provisional Application No. 60/630,907 filed Nov. 24, 20024, each of which is hereby fully incorporated herein by reference.
- This invention relates to containers and, in particular, this invention relates to reusable containers for storing and transporting fragile devices such as photomasks.
- Typically fragile substrate devices, such as larger photomasks, for example larger than 24 inches in length, are stored and shipped in prefabricated plastic boxes. Due to their size, these prefabricated plastic boxes, particularly for photomasks, are relatively expensive to make and are typically used only a single time. Therefore, it would be advantageous to the industry to provide containers suitable for photomasks, or other substrates, that are inexpensive to manufacture, yet protect the product from damage during transport and shipping.
- The container herein is suitable for storing and transporting large, that is having a major dimension of at least 24 inches, photomasks. In one embodiment, the carrier of this invention is substantially a singular piece, which may be rotationally molded, then machined to separate the cover from the body. The instant container may be molded from a static dissipative material, such as polyethylene with an electrical conductor dispersed therein. Upper and lower cushions may be disposed within the instant container to secure the photomask disposed therein and to protect the photomask from damage due to mechanical shock. The upper and lower cushions may be made with a static dissipative synthetic resin, such as polyethylene foam with an electrical conductor dispersed therein. Channels may be machined in side inserts of the instant container to insure that photomasks slide easily into and out of the instant container.
- There is provided a method for making a container of this invention and suitable for protectively securing a photomask therewithin, the method including forming a unitary container body, removing portions from two sides of the container body to form slots, inserting channels in the side slots, and forming a cover for the container. The lid or cover is preferably part of the original molded “body preform” which is cut into portions one or more times to form the body or container portion with an open end and the cover. The container body and/or the lid may be formed from a synthetic resin such as polyethylene, the polyethylene optionally comprising an electrostatically dissipative material. The slots may be formed by machining. The channels may be welded in the slots by a stream of heated air. Alternatively, the mold can have metal inserts to form the channels during the mold process.
- There is also provided a method of disposing a photomask in a container, in which the container has a generally integral body having channels insertably sealed to the body, the method comprising inserting the photomask into a cavity of the body such that edges of the photomask contact the channels; and sealing the container with a lid.
- It is a feature of the instant invention to provide a molded, one-piece container. It is an advantage of the foregoing feature that the provided container is more cheaply made and stronger, e.g., by the absence of welded seams.
- It is a feature of this invention to provide one embodiment of the manufactured from polyethylene. It is an advantage of the foregoing feature that the instant container is more readily recycled.
- It is yet another feature of this invention that the provided container is made using wide tolerance rotomolded synthetic resin with inserts from narrow tolerance-machine bar stock (e.g., polyethylene) to meet the functional requirements presented. It is an advantage of the foregoing feature that utilization of the bar stock provides a suitable container at a significantly lower cost than the fabricated designs of the prior art.
- It is a feature of the instant invention that one embodiment thereof may be substantially entirely constructed from electrostatically dissipative material. It is an advantage of the foregoing feature that damage to the contents of the container due to electrostatic discharge may be greatly minimized or essentially eliminated.
- It is yet another feature of this invention that the rotomolding process and design may be used to create a singularly uni-dimensional container. It is an advantage of the foregoing feature that the container created thereby may be cut to adjust the height thereof thereby customizing lengths to fit photomasks of varying heights and dimensions.
- It is yet another feature of this invention that the body and lid of the provided container may be molded from the same tool. It is an advantage of the foregoing feature that the provided container is constructed at a greatly reduced cost.
- It is yet another feature of this invention that containers may be made by a protocol of welding synthetic resins by a heated air stream. It is an advantage of the foregoing feature that containers for such items as photomasks and semiconductor wafers made by such a welding protocol are made more cheaply and are potentially stronger than containers made otherwise.
- In certain embodiments the channels providing the grooves for supporting the photomask or other substrate can be inserted in the mold before the rotational molding process. Such inserts can have metal blanks to protect a preformed channel to be subsequently removed and can be made of a plastic or other compatible material that has a higher melt temperature that the resin used for formation of the container body.
- These and other features and advantages of the instant invention will become apparent from the description which follows, when considered in view of the accompanying drawings.
-
FIG. 1A is a perspective view of the container of this invention. -
FIG. 1B is a front view of the container ofFIG. 1A . -
FIG. 2 is a front view of a body preform for making the container herein. -
FIG. 3 is a side elevational view of the container ofFIG. 1 . -
FIG. 3A is a side view of a body preform of the container ofFIG. 1A . -
FIG. 3B is a side view showing portions of the body preform severed to form the present container. -
FIG. 3C is a side view of the present container. -
FIG. 3D is a side view showing a closeup cutaway portion of the cover ofFIG. 3C . -
FIG. 4 is a cross sectional view of the container ofFIG. 3 along lines 4-4. -
FIG. 5A is a cross sectional view of the container ofFIG. 1B alonglines 5A-5A. -
FIG. 5B is a top view of the cover of the instant container. -
FIG. 6 is a cross sectional perspective view of the container similar to the view ofFIG. 4 . -
FIG. 7 is an exploded view of the container ofFIG. 1 . -
FIG. 8 is a perspective view of a mold for molding the body preform. - It is understood that the above-described figures are only illustrative of the present invention and are not contemplated to limit the scope thereof.
- References to relative terms such as upper and lower, front and back, left and right, or the like, are intended for convenience of description and are not contemplated to limit the present invention, or its components, to any one positional or special orientation. All dimensions depicted in the figures may vary with a potential design and the intended use of a specific embodiment of this invention without departing from the scope thereof. Although the container is depicted upright with a height being the major dimension, in use the container may be primarily used with the major dimension and the photomask therein in the horizontal.
- Each of the additional figures and methods disclosed herein may be used separately, or in conjunction with other features and methods, to provide improved containers and methods for making and using the same. Therefore, combinations of features and methods disclosed herein may not be necessary to practice the invention in its broadest sense and are instead disclosed merely to particularly describe representative and preferred embodiments of the instant invention.
- One embodiment of the container of this invention is depicted in the figures generally at 10 and may include a
body 104 or container portion, acover 106, aclosed bottom 107 with abottom wall 109, respective first (upper) and second (lower) supports configured ascushions channels 113. The foregoing elements cooperating to provide a container for safely and securely storing and transporting aphotomask 116. The container has a height h, a depth d, and a width w. - The
body 104, in turn, has respective front andback walls exterior surfaces right sidewalls exterior surfaces 125 and 127. Left andright slots right sides inserts slots weldments 131. In one method theinserts right slots channels slots - When being made, the container 100 is unitarily formed, then the
cover 106 is separated from the remainder of the container 100 and machined as appropriate so as to slidingly fit over the body portion in a snug, optionally air tight, manner. The other end of thebody 104 includes anenlarged base 132. Thebase 132 provides stability and shock resistance to the container 100 during transport and use. By way of illustration and not limitation and referring to FIGS. 2, 3A-D, abody preform 133 made by molding. As shown inFIGS. 2 and 3 A, the body preform has respective body, cover, andbase portions lines body 104,cover 106, andbase 132. The cut at 152 may be positioned to provide the container sized as desired in length. The portion of thebody portion 142 completely severed from the remainder thereof (between theplanes 150 and 152) is discarded. Thecover 106, optionally machined to provide beveling, can then be disposed over thebody 104 as indicated by the arrow 154. Referring now toFIG. 3D , thecover 106, when disposed as shown, ideally fits snugly over thebody 104, thereby providing an air-tight seal protecting the enclosed photomask from ambient contamination and retaining the enclosed photomask in the container 100. - Because of the molded one-piece design, the instant container is made less expensively and is stronger than many containers of the prior art. One reason the instant container is stronger and more durable is that the instant container has welded seams. Additionally, all components of the instant container may be manufactured from a synthetic resin such as polyethylene. If polyethylene is utilized, the instant container is more readily recycled. Manufacturing the instant container combines the use of wide tolerance rotomolding with narrow-tolerance machined polyethylene bar stock to meet the functional requirements of the
channels - Referring to
FIG. 8 , amold 160 suitable for rotationally molding thebody preform 133 is illustrated. The mold has twohalves surfaces 165 defining acavity 166 havingcavity portions 170, and anadjacent cavity midportion 172. - Resin, for example in bead form, is put into the open mold. The mold is closed, heated and rotated to disperse molten resin to cover the inside surfaces. The heat is removed, the mold allowed to cool, the mold is opened and the body preform is removed. The top cover is severed, the container portion cut to a desired size, and the slots in the sidewalls may be cut. The inserts, with channels machined or otherwise in place on the inserts, are attached to the slots, preferably by welding.
- Additionally
suitable graphics 200, such as graphics on a thin film substrate may be put in the cavity on one of the surfaces, such as 180 onFIG. 8 , and affixed thereto. Then the molten resin can overmold the thin film and securely fix the graphics in place. Additionally, inserts may be secured in the mold such as at 182 having channels therein as an alternative to the cutting of slots and welding the inserts therein. In this option, the insert would preferably be formed of a polymer or other material that has a melt temperature higher than the resin being added to the mold for forming the body preform. Additionally, blanks may be necessary to cover the channel during the molding. Such can be subsequently removed after the plastic has hardened. - Because numerous modifications of this invention may be made without departing from the spirit thereof, the scope of the invention is not to be limited to the embodiments illustrated and described. Rather, the scope of the invention is to be determined by the appended claims and their equivalents.
Claims (8)
1. A container for transporting photomasks in combination with a photomask, the photomask being generally rectangular and planar and having two ends, two sides, and a thickness, the container comprising:
an elongate polymer container portion having a closed top wall with an exterior surface, a closed bottom wall with a exterior surface, a closed end and an open front, a pair of opposite side walls each with an exterior surface, each of the pair of sidewalls comprising an elongate polymer insert with an channel extending lengthwise and secured into the sidewall by weldments, the photomask positioned in the channels,
a cover closing the open end and partially extending over and engaging the exterior surface of the top wall, the exterior surface of the bottom wall, and the exterior surfaces of the two sidewalls, and
a pair of end supports positioned at each end of the photomask in the container, the end supports engaging and securing the photomask in position when the cover closes the open end.
2. The combination of claim 1 wherein the container portion and the side wall inserts are comprised of polyethelene.
3. The combination of claim 1 wherein the end supports are comprised of a foamed polymer.
4. The combination of claim 1 wherein the photomask has a length of at least 24 inches.
5. A container for transporting photomasks, the photomask being generally rectangular and planar and having two ends, two sides, and a thickness, the container comprising:
an elongate polymer container portion having a closed top wall with an exterior surface, a closed bottom wall with a exterior surface, a closed end and an open front, a pair of opposite side walls each with an exterior surface, each of the pair of sidewalls comprising an elongate polymer insert with an channel extending lengthwise and secured into the sidewall by weldments, the photomask positioned in the channels,
a cover closing the open end and partially extending over and engaging the exterior surface of the top wall, the exterior surface of the bottom wall, and the exterior surfaces of the two sidewalls, and
a pair of end supports positioned at each end of the photomask in the container, the end supports engaging and securing the photomask in position when the cover closes the open end.
6. The container of claim 1 wherein the container portion and the side wall inserts are comprised of polyethelene.
7. The container of claim 1 wherein the end supports are comprised of a foamed polymer.
8. The container of claim 1 wherein the photomask has a length of at least 24 inches.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/958,169 US20080093256A1 (en) | 2004-11-24 | 2007-12-17 | Photomask container |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63090704P | 2004-11-24 | 2004-11-24 | |
US11/286,696 US7309460B2 (en) | 2004-11-24 | 2005-11-23 | Photomask container |
US11/958,169 US20080093256A1 (en) | 2004-11-24 | 2007-12-17 | Photomask container |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/286,696 Division US7309460B2 (en) | 2004-11-24 | 2005-11-23 | Photomask container |
Publications (1)
Publication Number | Publication Date |
---|---|
US20080093256A1 true US20080093256A1 (en) | 2008-04-24 |
Family
ID=36459965
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/286,696 Expired - Fee Related US7309460B2 (en) | 2004-11-24 | 2005-11-23 | Photomask container |
US11/958,169 Abandoned US20080093256A1 (en) | 2004-11-24 | 2007-12-17 | Photomask container |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/286,696 Expired - Fee Related US7309460B2 (en) | 2004-11-24 | 2005-11-23 | Photomask container |
Country Status (5)
Country | Link |
---|---|
US (2) | US7309460B2 (en) |
EP (1) | EP1817245A2 (en) |
JP (1) | JP2008522414A (en) |
KR (1) | KR20070084503A (en) |
WO (1) | WO2006058197A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140116909A1 (en) * | 2012-10-29 | 2014-05-01 | Nitto Denko Corporation | Encapsulating sheet container |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8231005B2 (en) * | 2005-09-27 | 2012-07-31 | Entegris, Inc. | Reticle pod |
JP4726867B2 (en) * | 2007-07-11 | 2011-07-20 | 信越ポリマー株式会社 | Substrate storage container and manufacturing method thereof |
US10100402B2 (en) * | 2011-10-07 | 2018-10-16 | International Business Machines Corporation | Substrate holder for graphene film synthesis |
JP7333925B2 (en) | 2020-08-21 | 2023-08-28 | 積水成型工業株式会社 | photomask container |
Citations (27)
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---|---|---|---|---|
US3132909A (en) * | 1963-07-08 | 1964-05-12 | Plastison Corp | Plastic container |
US3489265A (en) * | 1967-05-22 | 1970-01-13 | Product Packaging Corp | Fragile plate carrier |
US3615006A (en) * | 1969-06-26 | 1971-10-26 | Ibm | Storage container |
UST927008I4 (en) * | 1973-10-23 | 1974-10-01 | Container for shipping or storing fragile plates | |
US3874567A (en) * | 1967-11-13 | 1975-04-01 | Phillips Petroleum Co | Snap action closure with concentric annular flex zones |
US4427114A (en) * | 1983-05-09 | 1984-01-24 | F. M. Howell & Company | Protective packaging container for electrostatic discharge sensitive devices |
US4511038A (en) * | 1984-01-30 | 1985-04-16 | Ekc Technology, Inc. | Container for masks and pellicles |
US4564880A (en) * | 1984-03-14 | 1986-01-14 | Motorola, Inc. | Apparatus and method for protecting integrated circuits |
US4574950A (en) * | 1983-04-25 | 1986-03-11 | Sumitomo Electric Industries, Ltd. | Wafer box |
US4624557A (en) * | 1983-07-28 | 1986-11-25 | Ray Winn | Photomask carrier and container for photomask carrier |
US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
US4817793A (en) * | 1986-08-27 | 1989-04-04 | U.S. Philips Corporation | Protective package for a display tube window |
US4842136A (en) * | 1987-02-13 | 1989-06-27 | Canon Kabushiki Kaisha | Dust-proof container having improved construction for holding a reticle therein |
US4892223A (en) * | 1988-11-09 | 1990-01-09 | Unipac, Inc. | Process of making a lined container and the product |
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US5330053A (en) * | 1991-02-07 | 1994-07-19 | Dai Nippon Printing Co., Ltd. | Case for photomask |
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US3399398A (en) * | 1965-07-27 | 1968-08-27 | Mine Safety Appliances Co | Combustible gas monitoring system |
JP3788163B2 (en) | 2000-02-15 | 2006-06-21 | 日本板硝子株式会社 | Glass substrate packaging |
-
2005
- 2005-11-23 US US11/286,696 patent/US7309460B2/en not_active Expired - Fee Related
- 2005-11-25 EP EP05852173A patent/EP1817245A2/en not_active Withdrawn
- 2005-11-25 KR KR1020077011693A patent/KR20070084503A/en not_active Application Discontinuation
- 2005-11-25 WO PCT/US2005/042710 patent/WO2006058197A2/en active Application Filing
- 2005-11-25 JP JP2007543514A patent/JP2008522414A/en not_active Withdrawn
-
2007
- 2007-12-17 US US11/958,169 patent/US20080093256A1/en not_active Abandoned
Patent Citations (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3132909A (en) * | 1963-07-08 | 1964-05-12 | Plastison Corp | Plastic container |
US3489265A (en) * | 1967-05-22 | 1970-01-13 | Product Packaging Corp | Fragile plate carrier |
US3874567A (en) * | 1967-11-13 | 1975-04-01 | Phillips Petroleum Co | Snap action closure with concentric annular flex zones |
US3615006A (en) * | 1969-06-26 | 1971-10-26 | Ibm | Storage container |
UST927008I4 (en) * | 1973-10-23 | 1974-10-01 | Container for shipping or storing fragile plates | |
US4574950A (en) * | 1983-04-25 | 1986-03-11 | Sumitomo Electric Industries, Ltd. | Wafer box |
US4427114A (en) * | 1983-05-09 | 1984-01-24 | F. M. Howell & Company | Protective packaging container for electrostatic discharge sensitive devices |
US4624557A (en) * | 1983-07-28 | 1986-11-25 | Ray Winn | Photomask carrier and container for photomask carrier |
US4511038A (en) * | 1984-01-30 | 1985-04-16 | Ekc Technology, Inc. | Container for masks and pellicles |
US4564880A (en) * | 1984-03-14 | 1986-01-14 | Motorola, Inc. | Apparatus and method for protecting integrated circuits |
US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
US4817793A (en) * | 1986-08-27 | 1989-04-04 | U.S. Philips Corporation | Protective package for a display tube window |
US4842136A (en) * | 1987-02-13 | 1989-06-27 | Canon Kabushiki Kaisha | Dust-proof container having improved construction for holding a reticle therein |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140116909A1 (en) * | 2012-10-29 | 2014-05-01 | Nitto Denko Corporation | Encapsulating sheet container |
Also Published As
Publication number | Publication date |
---|---|
US20060108250A1 (en) | 2006-05-25 |
JP2008522414A (en) | 2008-06-26 |
KR20070084503A (en) | 2007-08-24 |
WO2006058197B1 (en) | 2007-06-21 |
US7309460B2 (en) | 2007-12-18 |
WO2006058197A2 (en) | 2006-06-01 |
WO2006058197A3 (en) | 2007-04-12 |
EP1817245A2 (en) | 2007-08-15 |
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