US20070172983A1 - Three-dimensional package and method of making the same - Google Patents

Three-dimensional package and method of making the same Download PDF

Info

Publication number
US20070172983A1
US20070172983A1 US11/645,039 US64503906A US2007172983A1 US 20070172983 A1 US20070172983 A1 US 20070172983A1 US 64503906 A US64503906 A US 64503906A US 2007172983 A1 US2007172983 A1 US 2007172983A1
Authority
US
United States
Prior art keywords
conductive layer
wafer
pad
hole
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/645,039
Inventor
Min-Lung Huang
Wei-Chung Wang
Po-Jen Cheng
Kuo-Chung Yee
Ching-Huei Su
Jian-Wen Lo
Chian-Chi Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Semiconductor Engineering Inc
Original Assignee
Advanced Semiconductor Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Engineering Inc filed Critical Advanced Semiconductor Engineering Inc
Assigned to ADVANCED SEMICONDUCTOR ENGINEERING, INC. reassignment ADVANCED SEMICONDUCTOR ENGINEERING, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHENG, PO-JEN, HUANG, MIN-LUNG, LIN, CHIAN-CHI, LO, JIAN-WEN, SU, CHING-HUEI, WANG, WEI-CHUNG, YEE, KUO-CHUNG
Publication of US20070172983A1 publication Critical patent/US20070172983A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657—Stacked arrangements of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a package and a method of making the same, and more particularly to a three-dimensional package and a method of making the same.
  • FIG. 1 it shows a schematic view of a three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655.
  • the conventional three-dimensional package 1 comprises a first unit 10 and a second unit 20 .
  • the first unit 10 comprises a first wafer 11 , at least one first hole 12 , a first conductive layer 13 and a first solder 14 .
  • the first wafer 11 has a first surface 111 and a second surface 112 .
  • the first surface 111 has at least one first pad (not shown) and a first protection layer 113 exposing the first pad.
  • the first hole 12 penetrates the first wafer 11 .
  • the first conductive layer 13 is disposed on the side wall of the first hole 12 and covers the first pad and the first protection layer 113 .
  • the first solder 14 is disposed in the first hole 12 and is electrically connected to the first pad via the first conductive layer 13 .
  • the upper end of the first solder 14 extends above the first surface 111 of the first wafer 11 , and the lower end extends below the second surface 112 of the first wafer 11 .
  • the second unit 20 is stacked on the first unit 10 .
  • the second unit 20 comprises a second wafer 21 , at least one second hole 22 , a second conductive layer 23 and a second solder 24 .
  • the second wafer 21 has a first surface 211 and a second surface 212 .
  • the first surface 211 has at least one second pad (not shown) and a second protection layer 213 exposing the second pad.
  • the second hole 22 penetrates the second wafer 21 .
  • the second conductive layer 23 is disposed on the side wall of the second hole 22 and covers the second pad and the second protection layer 213 .
  • the second solder 24 is disposed in the second hole 22 and is electrically connected to the second pad via the second conductive layer 23 .
  • the upper end of the second solder 24 extends above the first surface 211 of the second wafer 21 , and the lower end of the second solder 24 extends below the second surface 212 of the second wafer 21 .
  • the lower end of the second solder 24 is aligned with and contacts the upper end of the first solder 14 .
  • the first solder 14 and the second solder 24 are formed by disposing the first wafer 11 and the second wafer 21 above a solder bath, and the solder enter the first hole 12 and the second hole 22 according to the capillary phenomenon so as to form the first solder 14 and the second solder 24 .
  • the disadvantages of the conventional three-dimensional package 1 are described as follows.
  • the first solder 14 and the second solder 24 are formed according to the capillary phenomenon, the upper and the lower ends of the foregoing solders are in a hemispherical shape ( FIG. 1 ).
  • the first unit 10 and the second unit 20 are aligned and joined, alignment becomes more difficult and the joining between the first unit 10 and the second unit 20 after reflow is not stable.
  • the overall height cannot be effectively reduced due to the excess hemispherical solders.
  • the main objective of the invention is to provide a method of making a three-dimensional package, which comprises the following steps:
  • the lower end of the conductive layer is exposed below the second surface of the wafer. Therefore, during the reflow process after stacking, the lower end of the conductive layer is inserted into the solder of the lower wafer, so as to enhance the joint between the conductive layer and the solder, and effectively reduce the overall height of the three-dimensional package after joining.
  • Another objective of the present invention is to provide a three-dimensional package, which comprises a first unit and a second unit.
  • the first unit comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, and a first solder.
  • the first wafer has a first surface and a second surface.
  • the first surface has at least one first pad and a first protection layer exposing the first pad.
  • the first hole penetrates the first wafer.
  • the first isolation layer is disposed on the side wall of the first hole.
  • the first conductive layer covers the first pad, a part of the first protection layer, and the first isolation layer. The lower end of the first conductive layer extends below the second surface of the first wafer.
  • the first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer.
  • the second unit is stacked on the first unit.
  • the second unit comprises a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder.
  • the second wafer has a first surface and a second surface.
  • the first surface has at least one second pad and a second protection layer exposing the second pad.
  • the second hole penetrates the second wafer.
  • the second isolation layer is disposed on the side wall of the second hole.
  • the second conductive layer covers the second pad, a part of the second protection layer, and the second isolation layer.
  • the lower end of the second conductive layer extends to below the second surface of the second wafer and contacts the upper end of the first solder.
  • the second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.
  • FIG. 1 shows a schematic view of the three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655;
  • FIG. 2 shows a schematic view of the three-dimensional package after reflow disclosed in U.S. Pat. No. 4,499,655;
  • FIG. 3 shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention
  • FIGS. 4 to 17 show the schematic views of each step of the method of making a three-dimensional package according to the first embodiment of the present invention
  • FIG. 18 shows a schematic flow chart of the method for making a three-dimensional package according to the second embodiment of the present invention.
  • FIGS. 19 to 21 show the schematic views of a part of the steps of the method for making a three-dimensional package according to the second embodiment of the present invention.
  • FIG. 22 shows a cross-sectional view of the three-dimensional package according to the present invention.
  • FIG. 3 it shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention.
  • FIGS. 4 to 17 the schematic views of each step of the method for making a three-dimensional package according to the first embodiment of the present invention are shown.
  • a wafer 31 is provided.
  • the wafer 31 has a first surface 311 and a second surface 312 .
  • the first surface 311 has at least one pad 32 and a protection layer 33 exposing the pad 32 .
  • step S 302 at least one blind hole 34 is formed in the first surface 311 of the wafer 31 .
  • the blind hole 34 is disposed beside the pad 32 .
  • the blind hole 34 can penetrate the pad 32 .
  • an isolation layer 35 is formed on the side wall of the blind hole 34 .
  • a conductive layer 36 is formed to cover the pad 32 , the protection layer 33 , and the isolation layer 35 .
  • the conductive layer 36 is made of Ti, Cu, Cu/Ti alloy, or other metals.
  • a dry film 37 is formed on the conductive layer 36 .
  • the dry film 37 has an opening 371 at the position corresponding to the blind hole 34 .
  • the blind hole 34 is filled with a solder 38 .
  • the blind hole 34 is filled with the solder 38 by plating.
  • the blind hole 34 can be filled with the solder 38 by other manners.
  • step S 307 the dry film 37 is removed, and the conductive layer 36 is patterned.
  • a passivation layer 39 is formed on the conductive layer 36 to protect the patterned conductive layer 36 .
  • the passivation layer 39 can be formed by any conventional manners. Moreover, it should be understood that this step is optional.
  • step S 309 a part of the second surface 312 of the wafer 31 and a part of the isolation layer 35 are removed to expose a part of the conductive layer 36 .
  • the second surface 312 of the wafer 31 is first ground by means of backside grinding until the second surface 312 and the lower end of the isolation layer 35 are at the same level, i.e., the lower end of the isolation layer 35 is exposed on the second surface 312 .
  • the second surface 312 of the wafer 31 and the lower end of the isolation layer 35 are etched to expose the lower end of the conductive layer 36 .
  • the lower end of the conductive layer 36 extends below the second surface 312 of the wafer 31 , as shown in FIG. 13 .
  • the second surface 312 of the wafer 31 can be directly etched to expose the lower end of the conductive layer 36 , without using the backside grinding method.
  • a barrier layer 40 is formed on the lower end of the conductive layer 36 , and covers the lower end of the exposed conductive layer 36 .
  • the barrier layer 40 is Ni, Cr, Cr/Cu alloy, or other metals. It should be understood that this step is optional.
  • a lower solder 41 is further formed below the barrier layer 40 or the conductive layer 36 and is attached to the barrier layer 40 or the lower end of the exposed conductive layer 36 . It should be understood that this step is also optional.
  • step S 311 a plurality of the wafers 31 are stacked.
  • the conductive layers 36 and the solders 38 of the upper and lower wafers 31 are aligned with each other.
  • step S 312 the reflow process is performed to make the wafers 31 joined by welding the conductive layer 36 and the solder 38 .
  • step S 313 the stacked wafer 31 is cut to form a plurality of three-dimensional package structures 42 .
  • step S 314 at least one solder ball 43 is formed below the three-dimensional package structure 42 .
  • the solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31 . It should be understood that this step is optional.
  • FIG. 18 it shows the schematic flow chart of the method for making a three-dimensional package structure according to the second embodiment of the present invention.
  • the steps S 401 to S 410 are identical to the steps S 301 to S 310 of the first embodiment.
  • the difference between the second embodiment and the first embodiment is described as follows.
  • the wafer 31 is cut to form a plurality of units 44 , 45 , as shown in FIG. 19 .
  • the units 44 , 45 are stacked, wherein the conductive layers 36 and the solders 38 of the upper and the lower wafers 31 are aligned with each other, as shown in FIG. 20 .
  • step S 413 the reflow process is performed to form a plurality of three-dimensional package structures 42 , as shown in FIG. 21 .
  • the three-dimensional package structure 42 ( FIG. 21 ) made according to this embodiment is identical to the three-dimensional package structure 42 ( FIG. 17 ) made according to the first embodiment.
  • step S 414 at least one solder ball 43 is formed below the three-dimensional package structure 42 .
  • the solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31 . It should be understood that this step is optional.
  • FIG. 22 it shows a cross-sectional view of the three-dimensional package of the present invention.
  • the three-dimensional package 5 in this figure is identical to the three-dimensional package 42 in FIGS. 17 and 21 . However, for the convenience of illustration, the identical elements are designated by different reference numbers.
  • the three-dimensional package 5 comprises a first unit 50 and a second unit 60 .
  • the first unit 50 comprises a first wafer 51 , at least one first hole 52 , a first isolation layer 53 , a first conductive layer 54 , and a first solder 55 .
  • the first wafer 51 is a wafer or a chip, and has a first surface 511 and a second surface 512 .
  • the first surface 511 has at least one first pad 513 and a first protection layer 514 exposing the first pad 513 .
  • the first hole 52 penetrates the first wafer 51 .
  • the first hole 52 is disposed beside the first pad 513 .
  • the first hole 52 can penetrate the first pad 513 .
  • the first isolation layer 53 is disposed on the side wall of the first hole 52 .
  • the first conductive layer 54 covers the first pad 513 , a part of the first protection layer 514 , and the first isolation layer 53 .
  • the lower end of the first conductive layer 54 extends below the lower end of the second surface 512 of the first wafer 51 .
  • the first unit 50 further comprises a first barrier layer (not shown) covering the lower end of the first conductive layer 54 .
  • the first solder 55 is disposed inside the first hole 52 , and is electrically connected to the first pad 513 via the first conductive layer 54 .
  • a passivation layer (not shown) is further disposed above the first conductive layer 54 and covers the first conductive layer 54 to protect the first conductive layer 54 .
  • the second unit 60 is stacked above the first unit 50 .
  • the second unit 60 comprises a second wafer 61 , at least one second hole 62 , a second isolation layer 63 , a second conductive layer 64 , and a second solder 65 .
  • the second wafer 61 is a wafer or a chip, and has a first surface 611 and a second surface 612 .
  • the first surface 611 has at least one second pad 613 and a second protection layer 614 exposing the second pad 613 .
  • the second hole 62 penetrates the second wafer 61 .
  • the second hole 62 is disposed beside the second pad 613 . However, in other applications, the second hole 62 can penetrate the second pad 613 .
  • the second isolation layer 63 is dispose on the side wall of the second hole 62 .
  • the second conductive layer 64 covers the second pad 613 , a part of the second protection layer 614 , and the second isolation layer 63 .
  • the lower end of the second conductive layer 64 extends below the second surface 612 of the second wafer 61 and contacts the upper end of the first solder 55 .
  • the second unit 60 further comprises a second barrier layer (not shown) covering the lower end of the second conductive layer 64 .
  • the second solder 65 is disposed inside the second hole 62 and is electrically connected to the second pad 613 via the second conductive layer 64 .
  • a passivation layer (not shown) is disposed above the second conductive layer 64 and covers the second conductive layer 64 to protect the second conductive layer 64 .
  • the three-dimensional package structure 5 further comprises at least one solder ball 43 disposed on the lower end of the first conductive layer 54 .
  • the lower end of the second conductive layer 64 is inserted into the first solder 55 , so as to enhance the joint between the second conductive layer 64 and the first solder 55 .
  • the first hole 52 and the second hole 62 can be designed as a taper shape to enhance the foregoing joint.
  • the lower end of the second conductive layer 64 is inserted into the first solder 55 , such that the overall height of the three-dimensional package 5 after joining can be effectively reduced.

Abstract

The present invention relates to a three-dimensional package and a method of making the same. The three-dimensional package comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, a first solder, a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder. The first wafer has at least one first pad and a first protection layer exposing the first pad. The first hole penetrates the first wafer. The first isolation layer is disposed on the side wall of the first hole. The lower end of the first conductive layer extends below the surface of the first wafer. The first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer. The second wafer has at least one second pad and a second protection layer exposing the second pad. The second hole penetrates the second wafer. The second isolation layer is disposed on the side wall of the second hole. The lower end of the second conductive layer extends to below the surface of the second wafer and contacts the upper end of the first solder. The second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • The present invention relates to a package and a method of making the same, and more particularly to a three-dimensional package and a method of making the same.
  • 2. Description of the Related Art
  • Referring to FIG. 1, it shows a schematic view of a three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655. The conventional three-dimensional package 1 comprises a first unit 10 and a second unit 20. The first unit 10 comprises a first wafer 11, at least one first hole 12, a first conductive layer 13 and a first solder 14. The first wafer 11 has a first surface 111 and a second surface 112. The first surface 111 has at least one first pad (not shown) and a first protection layer 113 exposing the first pad. The first hole 12 penetrates the first wafer 11. The first conductive layer 13 is disposed on the side wall of the first hole 12 and covers the first pad and the first protection layer 113. The first solder 14 is disposed in the first hole 12 and is electrically connected to the first pad via the first conductive layer 13. The upper end of the first solder 14 extends above the first surface 111 of the first wafer 11, and the lower end extends below the second surface 112 of the first wafer 11.
  • The second unit 20 is stacked on the first unit 10. The second unit 20 comprises a second wafer 21, at least one second hole 22, a second conductive layer 23 and a second solder 24. The second wafer 21 has a first surface 211 and a second surface 212. The first surface 211 has at least one second pad (not shown) and a second protection layer 213 exposing the second pad. The second hole 22 penetrates the second wafer 21. The second conductive layer 23 is disposed on the side wall of the second hole 22 and covers the second pad and the second protection layer 213. The second solder 24 is disposed in the second hole 22 and is electrically connected to the second pad via the second conductive layer 23. The upper end of the second solder 24 extends above the first surface 211 of the second wafer 21, and the lower end of the second solder 24 extends below the second surface 212 of the second wafer 21. The lower end of the second solder 24 is aligned with and contacts the upper end of the first solder 14. After performing a reflow process, the first unit 10 and the second unit 20 are joined to form a conventional three-dimensional package 1, as shown in FIG. 2.
  • In the conventional three-dimensional package 1, the first solder 14 and the second solder 24 are formed by disposing the first wafer 11 and the second wafer 21 above a solder bath, and the solder enter the first hole 12 and the second hole 22 according to the capillary phenomenon so as to form the first solder 14 and the second solder 24.
  • The disadvantages of the conventional three-dimensional package 1 are described as follows. As the first solder 14 and the second solder 24 are formed according to the capillary phenomenon, the upper and the lower ends of the foregoing solders are in a hemispherical shape (FIG. 1). As such, when the first unit 10 and the second unit 20 are aligned and joined, alignment becomes more difficult and the joining between the first unit 10 and the second unit 20 after reflow is not stable. Moreover, after the joining of the first unit 10 and the second unit 20, the overall height cannot be effectively reduced due to the excess hemispherical solders.
  • Therefore, it is necessary to provide a three-dimensional package and a method of making the same to solve the above problems.
    • SUMMARY OF THE INVENTION
  • The main objective of the invention is to provide a method of making a three-dimensional package, which comprises the following steps:
  • (a) providing a wafer, having a first surface and a second surface, the first surface having at least one pad and a protection layer exposing the pad;
  • (b) forming at least one blind hole on the first surface of the wafer;
  • (c) forming an isolation layer on the side wall of the blind hole;
  • (d) forming a conductive layer covering the pad, the protection layer, and the isolation layer;
  • (e) forming a dry film on the conductive layer, wherein the dry film has an opening at the position corresponding to the blind hole;
  • (f) filling the blind hole with a solder;
  • (g) removing the dry film;
  • (h) patterning the conductive layer;
  • (i) removing a part of the second surface of the wafer and a part is of the isolation layer, so as to expose a part of the conductive layer;
  • (j) stacking a plurality of the wafers, so as to perform the reflow process; and
  • (k) cutting the stacked wafers, so as to form a plurality of three-dimensional packages.
  • As such, the lower end of the conductive layer is exposed below the second surface of the wafer. Therefore, during the reflow process after stacking, the lower end of the conductive layer is inserted into the solder of the lower wafer, so as to enhance the joint between the conductive layer and the solder, and effectively reduce the overall height of the three-dimensional package after joining.
  • Another objective of the present invention is to provide a three-dimensional package, which comprises a first unit and a second unit. The first unit comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, and a first solder.
  • The first wafer has a first surface and a second surface. The first surface has at least one first pad and a first protection layer exposing the first pad. The first hole penetrates the first wafer. The first isolation layer is disposed on the side wall of the first hole. The first conductive layer covers the first pad, a part of the first protection layer, and the first isolation layer. The lower end of the first conductive layer extends below the second surface of the first wafer. The first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer.
  • The second unit is stacked on the first unit. The second unit comprises a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder. The second wafer has a first surface and a second surface. The first surface has at least one second pad and a second protection layer exposing the second pad. The second hole penetrates the second wafer. The second isolation layer is disposed on the side wall of the second hole. The second conductive layer covers the second pad, a part of the second protection layer, and the second isolation layer. The lower end of the second conductive layer extends to below the second surface of the second wafer and contacts the upper end of the first solder. The second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 shows a schematic view of the three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655;
  • FIG. 2 shows a schematic view of the three-dimensional package after reflow disclosed in U.S. Pat. No. 4,499,655;
  • FIG. 3 shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention;
  • FIGS. 4 to 17 show the schematic views of each step of the method of making a three-dimensional package according to the first embodiment of the present invention;
  • FIG. 18 shows a schematic flow chart of the method for making a three-dimensional package according to the second embodiment of the present invention;
  • FIGS. 19 to 21 show the schematic views of a part of the steps of the method for making a three-dimensional package according to the second embodiment of the present invention; and
  • FIG. 22 shows a cross-sectional view of the three-dimensional package according to the present invention.
    •  DETAILED DESCRIPTION OF THE INVENTION
  • Referring to FIG. 3, it shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention. Referring to FIGS. 4 to 17, the schematic views of each step of the method for making a three-dimensional package according to the first embodiment of the present invention are shown. First, referring to FIGS. 3 and 4, as shown in step S301, a wafer 31 is provided. The wafer 31 has a first surface 311 and a second surface 312. The first surface 311 has at least one pad 32 and a protection layer 33 exposing the pad 32.
  • Then, referring to FIGS. 3 and 5, as shown in step S302, at least one blind hole 34 is formed in the first surface 311 of the wafer 31. In the embodiment, the blind hole 34 is disposed beside the pad 32. However, in other applications, the blind hole 34 can penetrate the pad 32.
  • Next, referring to FIGS. 3 and 6, as shown in step S303, an isolation layer 35 is formed on the side wall of the blind hole 34.
  • Afterward, referring to FIGS. 3 and 7, as shown in step S304, a conductive layer 36 is formed to cover the pad 32, the protection layer 33, and the isolation layer 35. The conductive layer 36 is made of Ti, Cu, Cu/Ti alloy, or other metals.
  • Then, referring to FIGS. 3 and 8, as shown in step S305, a dry film 37 is formed on the conductive layer 36. The dry film 37 has an opening 371 at the position corresponding to the blind hole 34.
  • After that, referring to FIGS. 3 and 9, preferably, as shown in step S306, the blind hole 34 is filled with a solder 38. In the embodiment, the blind hole 34 is filled with the solder 38 by plating. However, it should be understood that the blind hole 34 can be filled with the solder 38 by other manners.
  • Then, referring to FIGS. 3 and 10, as shown in step S307, the dry film 37 is removed, and the conductive layer 36 is patterned.
  • Afterward, referring to FIGS. 3 and 11, preferably, as shown in step S308, a passivation layer 39 is formed on the conductive layer 36 to protect the patterned conductive layer 36. The passivation layer 39 can be formed by any conventional manners. Moreover, it should be understood that this step is optional.
  • Then, as shown in step S309, a part of the second surface 312 of the wafer 31 and a part of the isolation layer 35 are removed to expose a part of the conductive layer 36. Referring to FIG. 12, in the present embodiment, the second surface 312 of the wafer 31 is first ground by means of backside grinding until the second surface 312 and the lower end of the isolation layer 35 are at the same level, i.e., the lower end of the isolation layer 35 is exposed on the second surface 312. Then, the second surface 312 of the wafer 31 and the lower end of the isolation layer 35 are etched to expose the lower end of the conductive layer 36. At this moment, the lower end of the conductive layer 36 extends below the second surface 312 of the wafer 31, as shown in FIG. 13. However, it should be understood that in other applications, the second surface 312 of the wafer 31 can be directly etched to expose the lower end of the conductive layer 36, without using the backside grinding method.
  • Afterward, referring to FIGS. 3 and 14, preferably, as shown in step S310, a barrier layer 40 is formed on the lower end of the conductive layer 36, and covers the lower end of the exposed conductive layer 36. The barrier layer 40 is Ni, Cr, Cr/Cu alloy, or other metals. It should be understood that this step is optional. Moreover, preferably, a lower solder 41 is further formed below the barrier layer 40 or the conductive layer 36 and is attached to the barrier layer 40 or the lower end of the exposed conductive layer 36. It should be understood that this step is also optional.
  • Next, referring to FIGS. 3 and 15, as shown in step S311, a plurality of the wafers 31 are stacked. The conductive layers 36 and the solders 38 of the upper and lower wafers 31 are aligned with each other.
  • Then, referring to FIGS. 3 and 16, as shown in step S312, the reflow process is performed to make the wafers 31 joined by welding the conductive layer 36 and the solder 38.
  • Finally, referring to FIGS. 3 and 17, as shown in step S313, the stacked wafer 31 is cut to form a plurality of three-dimensional package structures 42. Preferably, as shown in step S314, at least one solder ball 43 is formed below the three-dimensional package structure 42. The solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31. It should be understood that this step is optional.
  • Referring to FIG. 18, it shows the schematic flow chart of the method for making a three-dimensional package structure according to the second embodiment of the present invention. The steps S401 to S410 are identical to the steps S301 to S310 of the first embodiment. The difference between the second embodiment and the first embodiment is described as follows. In the step S411 of the present embodiment, the wafer 31 is cut to form a plurality of units 44, 45, as shown in FIG. 19. Then, in step S412, the units 44, 45 are stacked, wherein the conductive layers 36 and the solders 38 of the upper and the lower wafers 31 are aligned with each other, as shown in FIG. 20. Finally, in step S413, the reflow process is performed to form a plurality of three-dimensional package structures 42, as shown in FIG. 21. The three-dimensional package structure 42 (FIG. 21) made according to this embodiment is identical to the three-dimensional package structure 42 (FIG. 17) made according to the first embodiment.
  • Preferably, in step S414, at least one solder ball 43 is formed below the three-dimensional package structure 42. The solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31. It should be understood that this step is optional.
  • Referring to FIG. 22, it shows a cross-sectional view of the three-dimensional package of the present invention. The three-dimensional package 5 in this figure is identical to the three-dimensional package 42 in FIGS. 17 and 21. However, for the convenience of illustration, the identical elements are designated by different reference numbers. The three-dimensional package 5 comprises a first unit 50 and a second unit 60. The first unit 50 comprises a first wafer 51, at least one first hole 52, a first isolation layer 53, a first conductive layer 54, and a first solder 55.
  • The first wafer 51 is a wafer or a chip, and has a first surface 511 and a second surface 512. The first surface 511 has at least one first pad 513 and a first protection layer 514 exposing the first pad 513. The first hole 52 penetrates the first wafer 51. In the present embodiment, the first hole 52 is disposed beside the first pad 513. However, in other applications, the first hole 52 can penetrate the first pad 513.
  • The first isolation layer 53 is disposed on the side wall of the first hole 52. The first conductive layer 54 covers the first pad 513, a part of the first protection layer 514, and the first isolation layer 53. The lower end of the first conductive layer 54 extends below the lower end of the second surface 512 of the first wafer 51. Preferably, the first unit 50 further comprises a first barrier layer (not shown) covering the lower end of the first conductive layer 54.
  • The first solder 55 is disposed inside the first hole 52, and is electrically connected to the first pad 513 via the first conductive layer 54. Preferably, a passivation layer (not shown) is further disposed above the first conductive layer 54 and covers the first conductive layer 54 to protect the first conductive layer 54.
  • The second unit 60 is stacked above the first unit 50. The second unit 60 comprises a second wafer 61, at least one second hole 62, a second isolation layer 63, a second conductive layer 64, and a second solder 65. The second wafer 61 is a wafer or a chip, and has a first surface 611 and a second surface 612. The first surface 611 has at least one second pad 613 and a second protection layer 614 exposing the second pad 613. The second hole 62 penetrates the second wafer 61. In the present embodiment, the second hole 62 is disposed beside the second pad 613. However, in other applications, the second hole 62 can penetrate the second pad 613.
  • The second isolation layer 63 is dispose on the side wall of the second hole 62. The second conductive layer 64 covers the second pad 613, a part of the second protection layer 614, and the second isolation layer 63. The lower end of the second conductive layer 64 extends below the second surface 612 of the second wafer 61 and contacts the upper end of the first solder 55. Preferably, the second unit 60 further comprises a second barrier layer (not shown) covering the lower end of the second conductive layer 64.
  • The second solder 65 is disposed inside the second hole 62 and is electrically connected to the second pad 613 via the second conductive layer 64. Preferably, a passivation layer (not shown) is disposed above the second conductive layer 64 and covers the second conductive layer 64 to protect the second conductive layer 64.
  • Preferably, the three-dimensional package structure 5 further comprises at least one solder ball 43 disposed on the lower end of the first conductive layer 54.
  • In the three-dimensional package structure 5, as the lower end of the second conductive layer 64 is exposed below the second surface 612 of the second unit 60, during the reflow process, the lower end of the second conductive layer 64 is inserted into the first solder 55, so as to enhance the joint between the second conductive layer 64 and the first solder 55. Further, the first hole 52 and the second hole 62 can be designed as a taper shape to enhance the foregoing joint. Moreover, the lower end of the second conductive layer 64 is inserted into the first solder 55, such that the overall height of the three-dimensional package 5 after joining can be effectively reduced.
  • While several embodiments of the present invention have been illustrated and described, various modifications and improvements can be made by those skilled in the art. The embodiments of the present invention are therefore described in an illustrative but not restrictive sense. It is intended that the present invention may not be limited to the particular forms as illustrated, and that all modifications which maintain the spirit and scope of the present invention are within the scope as defined in the appended claims.

Claims (8)

1. A three-dimensional package, comprising:
a first unit, comprising:
a first wafer, having a first surface and a second surface, the first surface having at least one first pad and a first protection layer exposing the first pad;
at least one first hole, penetrating the first wafer;
a first isolation layer, disposed on the side wall of the first hole;
a first conductive layer, covering the first pad, a part of the first protection layer, and the first isolation layer, wherein the lower end of the first conductive layer extends below the second surface of the first wafer; and
a first solder, disposed in the first hole and electrically connected to the first pad via the first conductive layer; and
a second unit stacked on the first unit, comprising:
a second wafer, having a first surface and a second surface, wherein the first surface has at least one second pad and a second protection layer exposing the second pad;
at least one second hole penetrating the second wafer;
a second isolation layer, disposed on the side wall of the second hole;
a second conductive layer, covering the second pad, a part of the second protection layer, and the second isolation layer, wherein the lower end of the second conductive layer extends to below the second surface of the second wafer and contacts the upper end of the first solder, and
a second solder, disposed in the second hole and electrically connected to the second pad via the second conductive layer.
2. The three-dimensional package according to claim 1, wherein the first hole penetrates the first pad.
3. The three-dimensional package according to claim 1, wherein the second hole penetrates the second pad.
4. The three-dimensional package according to claim 1, wherein the first unit further comprises a first passivation layer covering the first conductive layer.
5. The three-dimensional package according to claim 1, wherein the second unit further comprises a second passivation layer covering the second conductive layer.
6. The three-dimensional package according to claim 1, wherein the first unit further comprises a first barrier layer covering the lower end of the first conductive layer.
7. The three-dimensional package according to claim 1, wherein the second unit further comprises a second barrier layer covering the lower end of the second conductive layer.
8. The three-dimensional package according to claim 1, further comprising at least one solder ball disposed at the lower end of the first conductive layer.
US11/645,039 2006-01-25 2006-12-26 Three-dimensional package and method of making the same Abandoned US20070172983A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW095102836 2006-01-25
TW095102836A TWI293499B (en) 2006-01-25 2006-01-25 Three dimensional package and method of making the same

Publications (1)

Publication Number Publication Date
US20070172983A1 true US20070172983A1 (en) 2007-07-26

Family

ID=38286045

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/645,040 Active 2028-11-10 US7741152B2 (en) 2006-01-25 2006-12-26 Three-dimensional package and method of making the same
US11/645,039 Abandoned US20070172983A1 (en) 2006-01-25 2006-12-26 Three-dimensional package and method of making the same

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US11/645,040 Active 2028-11-10 US7741152B2 (en) 2006-01-25 2006-12-26 Three-dimensional package and method of making the same

Country Status (2)

Country Link
US (2) US7741152B2 (en)
TW (1) TWI293499B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100072599A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Top and Bottom Solder Bump Interconnection
US20100072618A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Bump Interconnection
US20100320591A1 (en) * 2009-06-19 2010-12-23 Zigmund Ramirez Camacho Integrated circuit packaging system with contact pads and method of manufacture thereof
US8940636B2 (en) 2008-03-27 2015-01-27 STATS ChipPAC, Ltc. Through hole vias at saw streets including protrusions or recesses for interconnection

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100871382B1 (en) * 2007-06-26 2008-12-02 주식회사 하이닉스반도체 Through silicon via stack package and method for manufacturing of the same
US20090051046A1 (en) * 2007-08-24 2009-02-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method for the same
US7833895B2 (en) * 2008-05-12 2010-11-16 Texas Instruments Incorporated TSVS having chemically exposed TSV tips for integrated circuit devices
US7741156B2 (en) * 2008-05-27 2010-06-22 Stats Chippac, Ltd. Semiconductor device and method of forming through vias with reflowed conductive material
US7872332B2 (en) 2008-09-11 2011-01-18 Micron Technology, Inc. Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods
US8053898B2 (en) * 2009-10-05 2011-11-08 Samsung Electronics Co., Ltd. Connection for off-chip electrostatic discharge protection
TWI392069B (en) * 2009-11-24 2013-04-01 Advanced Semiconductor Eng Package structure and packaging process thereof
TWI446420B (en) 2010-08-27 2014-07-21 Advanced Semiconductor Eng Releasing carrier method for semiconductor process
TWI445152B (en) 2010-08-30 2014-07-11 Advanced Semiconductor Eng Semiconductor structure and method for manufacturing the same
US9007273B2 (en) 2010-09-09 2015-04-14 Advances Semiconductor Engineering, Inc. Semiconductor package integrated with conformal shield and antenna
TWI434387B (en) 2010-10-11 2014-04-11 Advanced Semiconductor Eng Semiconductor element having a via and package having a semiconductor element with a via and method for making the same
TWI527174B (en) 2010-11-19 2016-03-21 日月光半導體製造股份有限公司 Package having semiconductor device
TWI445155B (en) 2011-01-06 2014-07-11 Advanced Semiconductor Eng Stacked semiconductor package and method for making the same
US8853819B2 (en) 2011-01-07 2014-10-07 Advanced Semiconductor Engineering, Inc. Semiconductor structure with passive element network and manufacturing method thereof
US8541883B2 (en) 2011-11-29 2013-09-24 Advanced Semiconductor Engineering, Inc. Semiconductor device having shielded conductive vias
US8803316B2 (en) * 2011-12-06 2014-08-12 Taiwan Semiconductor Manufacturing Company, Ltd. TSV structures and methods for forming the same
US8975157B2 (en) 2012-02-08 2015-03-10 Advanced Semiconductor Engineering, Inc. Carrier bonding and detaching processes for a semiconductor wafer
US8963316B2 (en) 2012-02-15 2015-02-24 Advanced Semiconductor Engineering, Inc. Semiconductor device and method for manufacturing the same
US8786060B2 (en) 2012-05-04 2014-07-22 Advanced Semiconductor Engineering, Inc. Semiconductor package integrated with conformal shield and antenna
US9153542B2 (en) 2012-08-01 2015-10-06 Advanced Semiconductor Engineering, Inc. Semiconductor package having an antenna and manufacturing method thereof
US9343393B2 (en) 2012-08-15 2016-05-17 Industrial Technology Research Institute Semiconductor substrate assembly with embedded resistance element
TWI497661B (en) 2012-08-15 2015-08-21 Ind Tech Res Inst Semiconductor substrate assembly
US8937387B2 (en) 2012-11-07 2015-01-20 Advanced Semiconductor Engineering, Inc. Semiconductor device with conductive vias
US8952542B2 (en) 2012-11-14 2015-02-10 Advanced Semiconductor Engineering, Inc. Method for dicing a semiconductor wafer having through silicon vias and resultant structures
US9406552B2 (en) 2012-12-20 2016-08-02 Advanced Semiconductor Engineering, Inc. Semiconductor device having conductive via and manufacturing process
JP2014127623A (en) * 2012-12-27 2014-07-07 Shinko Electric Ind Co Ltd Wiring board and method of manufacturing the same
US8841751B2 (en) 2013-01-23 2014-09-23 Advanced Semiconductor Engineering, Inc. Through silicon vias for semiconductor devices and manufacturing method thereof
US9978688B2 (en) 2013-02-28 2018-05-22 Advanced Semiconductor Engineering, Inc. Semiconductor package having a waveguide antenna and manufacturing method thereof
US9089268B2 (en) 2013-03-13 2015-07-28 Advanced Semiconductor Engineering, Inc. Neural sensing device and method for making the same
US8987734B2 (en) 2013-03-15 2015-03-24 Advanced Semiconductor Engineering, Inc. Semiconductor wafer, semiconductor process and semiconductor package
US9173583B2 (en) 2013-03-15 2015-11-03 Advanced Semiconductor Engineering, Inc. Neural sensing device and method for making the same
EP3401695A1 (en) 2017-05-08 2018-11-14 Koninklijke Philips N.V. Cooling a gradient coil of a magnetic resonance imaging system
CN109673112B (en) * 2017-10-13 2021-08-20 鹏鼎控股(深圳)股份有限公司 Flexible circuit board and manufacturing method thereof
US11784111B2 (en) 2021-05-28 2023-10-10 Advanced Semiconductor Engineering, Inc. Semiconductor device and method for manufacturing the same
US11631631B2 (en) 2021-05-28 2023-04-18 Advanced Semiconductor Engineering, Inc. Semiconductor device including via structure for vertical electrical connection

Citations (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3761782A (en) * 1971-05-19 1973-09-25 Signetics Corp Semiconductor structure, assembly and method
US4394712A (en) * 1981-03-18 1983-07-19 General Electric Company Alignment-enhancing feed-through conductors for stackable silicon-on-sapphire wafers
US4499655A (en) * 1981-03-18 1985-02-19 General Electric Company Method for making alignment-enhancing feed-through conductors for stackable silicon-on-sapphire
US4807021A (en) * 1986-03-10 1989-02-21 Kabushiki Kaisha Toshiba Semiconductor device having stacking structure
US4842699A (en) * 1988-05-10 1989-06-27 Avantek, Inc. Method of selective via-hole and heat sink plating using a metal mask
US4897708A (en) * 1986-07-17 1990-01-30 Laser Dynamics, Inc. Semiconductor wafer array
US4982265A (en) * 1987-06-24 1991-01-01 Hitachi, Ltd. Semiconductor integrated circuit device and method of manufacturing the same
US5166097A (en) * 1990-11-26 1992-11-24 The Boeing Company Silicon wafers containing conductive feedthroughs
US5191405A (en) * 1988-12-23 1993-03-02 Matsushita Electric Industrial Co., Ltd. Three-dimensional stacked lsi
US5229647A (en) * 1991-03-27 1993-07-20 Micron Technology, Inc. High density data storage using stacked wafers
US5239448A (en) * 1991-10-28 1993-08-24 International Business Machines Corporation Formulation of multichip modules
US5241454A (en) * 1992-01-22 1993-08-31 International Business Machines Corporation Mutlilayered flexible circuit package
US5266912A (en) * 1992-08-19 1993-11-30 Micron Technology, Inc. Inherently impedance matched multiple integrated circuit module
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5380681A (en) * 1994-03-21 1995-01-10 United Microelectronics Corporation Three-dimensional multichip package and methods of fabricating
US5399898A (en) * 1992-07-17 1995-03-21 Lsi Logic Corporation Multi-chip semiconductor arrangements using flip chip dies
US5401689A (en) * 1992-12-21 1995-03-28 Motorola, Inc. Method for forming a semiconductor chip carrier
US5404044A (en) * 1992-09-29 1995-04-04 International Business Machines Corporation Parallel process interposer (PPI)
US5411918A (en) * 1990-07-18 1995-05-02 Raychem Limited Processing microchips
US5419806A (en) * 1993-02-11 1995-05-30 Siemens Aktiengesellschaft Method for manufacturing a three-dimensional circuit apparatus
US5432999A (en) * 1992-08-20 1995-07-18 Capps; David F. Integrated circuit lamination process
US5466634A (en) * 1994-12-20 1995-11-14 International Business Machines Corporation Electronic modules with interconnected surface metallization layers and fabrication methods therefore
US5561622A (en) * 1993-09-13 1996-10-01 International Business Machines Corporation Integrated memory cube structure
US5567654A (en) * 1994-09-28 1996-10-22 International Business Machines Corporation Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging
US5571754A (en) * 1995-07-26 1996-11-05 International Business Machines Corporation Method of fabrication of endcap chip with conductive, monolithic L-connect for multichip stack
US5608264A (en) * 1995-06-05 1997-03-04 Harris Corporation Surface mountable integrated circuit with conductive vias
US5618752A (en) * 1995-06-05 1997-04-08 Harris Corporation Method of fabrication of surface mountable integrated circuits
US5627106A (en) * 1994-05-06 1997-05-06 United Microelectronics Corporation Trench method for three dimensional chip connecting during IC fabrication
US5637912A (en) * 1994-08-22 1997-06-10 International Business Machines Corporation Three-dimensional monolithic electronic module having stacked planar arrays of integrated circuit chips
US5675180A (en) * 1994-06-23 1997-10-07 Cubic Memory, Inc. Vertical interconnect process for silicon segments
US5682062A (en) * 1995-06-05 1997-10-28 Harris Corporation System for interconnecting stacked integrated circuits
US5699234A (en) * 1995-05-30 1997-12-16 General Electric Company Stacking of three dimensional high density interconnect modules with metal edge contacts
US5767001A (en) * 1993-05-05 1998-06-16 Siemens Aktiengesellschaft Process for producing semiconductor components between which contact is made vertically
US5872025A (en) * 1995-07-26 1999-02-16 International Business Machines Corporation Method for stacked three dimensional device manufacture
US5891761A (en) * 1994-06-23 1999-04-06 Cubic Memory, Inc. Method for forming vertical interconnect process for silicon segments with thermally conductive epoxy preform
US5998292A (en) * 1997-11-12 1999-12-07 International Business Machines Corporation Method for making three dimensional circuit integration
US6124149A (en) * 1997-11-19 2000-09-26 Hyundai Electronics Industries Co., Ltd. Method of making stackable semiconductor chips to build a stacked chip module
US6146992A (en) * 1995-11-22 2000-11-14 Siemens Aktiengesellschaft Vertically integrated semiconductor component and method of producing the same
US6168969B1 (en) * 1996-02-16 2001-01-02 Micron Technology, Inc. Surface mount IC using silicon vias in an area array format or same size as die array
US6187677B1 (en) * 1997-08-22 2001-02-13 Micron Technology, Inc. Integrated circuitry and methods of forming integrated circuitry
US6221769B1 (en) * 1999-03-05 2001-04-24 International Business Machines Corporation Method for integrated circuit power and electrical connections via through-wafer interconnects
US6228470B1 (en) * 1998-07-06 2001-05-08 International Business Machines Corporation Composite substrate for electronic components
US6429509B1 (en) * 1999-05-03 2002-08-06 United Microelectronics Corporation Integrated circuit with improved interconnect structure and process for making same
US6451624B1 (en) * 1998-06-05 2002-09-17 Micron Technology, Inc. Stackable semiconductor package having conductive layer and insulating layers and method of fabrication
US6451626B1 (en) * 2001-07-27 2002-09-17 Charles W.C. Lin Three-dimensional stacked semiconductor package
US6475831B2 (en) * 1998-08-21 2002-11-05 Micron Technology, Inc. Methods for a low profile multi-IC chip package connector
US6566232B1 (en) * 1999-10-22 2003-05-20 Seiko Epson Corporation Method of fabricating semiconductor device
US6577013B1 (en) * 2000-09-05 2003-06-10 Amkor Technology, Inc. Chip size semiconductor packages with stacked dies
US6583030B1 (en) * 1998-11-20 2003-06-24 Giesecke & Devrient Gmbh Method for producing an integrated circuit processed on both sides
US6642081B1 (en) * 2002-04-11 2003-11-04 Robert Patti Interlocking conductor method for bonding wafers to produce stacked integrated circuits
US6645796B2 (en) * 2001-11-21 2003-11-11 International Business Machines Corporation Method and semiconductor structure for implementing reach through buried interconnect for silicon-on-insulator (SOI) devices
US6645832B2 (en) * 2002-02-20 2003-11-11 Intel Corporation Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
US6667551B2 (en) * 2000-01-21 2003-12-23 Seiko Epson Corporation Semiconductor device and manufacturing thereof, including a through-hole with a wider intermediate cavity
US6677235B1 (en) * 2001-12-03 2004-01-13 National Semiconductor Corporation Silicon die with metal feed through structure
US6693361B1 (en) * 1999-12-06 2004-02-17 Tru-Si Technologies, Inc. Packaging of integrated circuits and vertical integration
US6716737B2 (en) * 2002-07-29 2004-04-06 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
US6720661B2 (en) * 2000-06-02 2004-04-13 Seiko Epson Corporation Semiconductor device, method of fabricating the same, stack-type semiconductor device, circuit board and electronic instrument
US6723577B1 (en) * 1998-02-26 2004-04-20 Micron Technology, Inc. Method of forming an optical fiber interconnect through a semiconductor wafer
US6727116B2 (en) * 2002-06-18 2004-04-27 Micron Technology, Inc. Semiconductor devices including peripherally located bond pads, assemblies, packages, and methods
US6744127B2 (en) * 2001-05-31 2004-06-01 Infineon Technologies Ag Semiconductor chip, memory module and method for testing the semiconductor chip
US6756681B1 (en) * 2002-12-23 2004-06-29 Nokia Corporation Radio frequency integrated circuit having increased substrate resistance enabling three dimensional interconnection with feedthroughs
US6774477B2 (en) * 2002-08-13 2004-08-10 Hynix Semiconductor Inc. Structure and method of stacking multiple semiconductor substrates of a composite semiconductor device
US6809421B1 (en) * 1996-12-02 2004-10-26 Kabushiki Kaisha Toshiba Multichip semiconductor device, chip therefor and method of formation thereof
US6812549B2 (en) * 2001-03-07 2004-11-02 Seiko Epson Corporation Wiring board and fabricating method thereof, semiconductor device and fabricating method thereof, circuit board and electronic instrument
US6828175B2 (en) * 2002-08-29 2004-12-07 Micron Technology, Inc. Semiconductor component with backside contacts and method of fabrication
US20040245623A1 (en) * 2003-03-28 2004-12-09 Kazumi Hara Semiconductor device, circuit substrate and electronic instrument
US20040245523A1 (en) * 2003-06-05 2004-12-09 Tean-Sen Jen Circular thin film transistor structure
US6841849B2 (en) * 2002-03-19 2005-01-11 Seiko Epson Corporation Semiconductor device and method of manufacturing the same, circuit board and electronic instrument
US6848177B2 (en) * 2002-03-28 2005-02-01 Intel Corporation Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
US6853085B2 (en) * 1999-05-03 2005-02-08 Infineon Technologies Ag Method and device for securing a multi-dimensionally constructed chip stack and chip configuration
US6894386B2 (en) * 2001-10-08 2005-05-17 Micron Technology, Inc. Apparatus and method for packaging circuits
US6908845B2 (en) * 2002-03-28 2005-06-21 Intel Corporation Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
US20050224921A1 (en) * 2001-05-01 2005-10-13 Subhash Gupta Method for bonding wafers to produce stacked integrated circuits
US20060138629A1 (en) * 2004-12-24 2006-06-29 Seiko Epson Corporation Method of manufacturing semiconductor device, semiconductor device, stacked semiconductor device, circuit board and electronic instrument
US7190078B2 (en) * 2004-12-27 2007-03-13 Khandekar Viren V Interlocking via for package via integrity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882030B2 (en) * 1996-10-29 2005-04-19 Tru-Si Technologies, Inc. Integrated circuit structures with a conductor formed in a through hole in a semiconductor substrate and protruding from a surface of the substrate
EP2270845A3 (en) * 1996-10-29 2013-04-03 Invensas Corporation Integrated circuits and methods for their fabrication
EP0926723B1 (en) * 1997-11-26 2007-01-17 STMicroelectronics S.r.l. Process for forming front-back through contacts in micro-integrated electronic devices
JP4113679B2 (en) 2001-02-14 2008-07-09 イビデン株式会社 Manufacturing method of three-dimensional mounting package
KR100570514B1 (en) * 2004-06-18 2006-04-13 삼성전자주식회사 Manufacturing method for wafer level chip stack package
US7429529B2 (en) * 2005-08-05 2008-09-30 Farnworth Warren M Methods of forming through-wafer interconnects and structures resulting therefrom

Patent Citations (87)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3761782A (en) * 1971-05-19 1973-09-25 Signetics Corp Semiconductor structure, assembly and method
US4394712A (en) * 1981-03-18 1983-07-19 General Electric Company Alignment-enhancing feed-through conductors for stackable silicon-on-sapphire wafers
US4499655A (en) * 1981-03-18 1985-02-19 General Electric Company Method for making alignment-enhancing feed-through conductors for stackable silicon-on-sapphire
US4807021A (en) * 1986-03-10 1989-02-21 Kabushiki Kaisha Toshiba Semiconductor device having stacking structure
US4897708A (en) * 1986-07-17 1990-01-30 Laser Dynamics, Inc. Semiconductor wafer array
US4982265A (en) * 1987-06-24 1991-01-01 Hitachi, Ltd. Semiconductor integrated circuit device and method of manufacturing the same
US4842699A (en) * 1988-05-10 1989-06-27 Avantek, Inc. Method of selective via-hole and heat sink plating using a metal mask
US5191405A (en) * 1988-12-23 1993-03-02 Matsushita Electric Industrial Co., Ltd. Three-dimensional stacked lsi
US5411918A (en) * 1990-07-18 1995-05-02 Raychem Limited Processing microchips
US5510655A (en) * 1990-11-26 1996-04-23 The Boeing Company Silicon wafers containing conductive feedthroughs
US5166097A (en) * 1990-11-26 1992-11-24 The Boeing Company Silicon wafers containing conductive feedthroughs
US5229647A (en) * 1991-03-27 1993-07-20 Micron Technology, Inc. High density data storage using stacked wafers
US5239448A (en) * 1991-10-28 1993-08-24 International Business Machines Corporation Formulation of multichip modules
US5241454A (en) * 1992-01-22 1993-08-31 International Business Machines Corporation Mutlilayered flexible circuit package
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5399898A (en) * 1992-07-17 1995-03-21 Lsi Logic Corporation Multi-chip semiconductor arrangements using flip chip dies
US5266912A (en) * 1992-08-19 1993-11-30 Micron Technology, Inc. Inherently impedance matched multiple integrated circuit module
US5432999A (en) * 1992-08-20 1995-07-18 Capps; David F. Integrated circuit lamination process
US5404044A (en) * 1992-09-29 1995-04-04 International Business Machines Corporation Parallel process interposer (PPI)
US5401689A (en) * 1992-12-21 1995-03-28 Motorola, Inc. Method for forming a semiconductor chip carrier
US5419806A (en) * 1993-02-11 1995-05-30 Siemens Aktiengesellschaft Method for manufacturing a three-dimensional circuit apparatus
US5767001A (en) * 1993-05-05 1998-06-16 Siemens Aktiengesellschaft Process for producing semiconductor components between which contact is made vertically
US5561622A (en) * 1993-09-13 1996-10-01 International Business Machines Corporation Integrated memory cube structure
US5563086A (en) * 1993-09-13 1996-10-08 International Business Machines Corporation Integrated memory cube, structure and fabrication
US5481133A (en) * 1994-03-21 1996-01-02 United Microelectronics Corporation Three-dimensional multichip package
US5380681A (en) * 1994-03-21 1995-01-10 United Microelectronics Corporation Three-dimensional multichip package and methods of fabricating
US5627106A (en) * 1994-05-06 1997-05-06 United Microelectronics Corporation Trench method for three dimensional chip connecting during IC fabrication
US6177296B1 (en) * 1994-06-23 2001-01-23 Cubic Memory Inc. Method for forming vertical interconnect process for silicon segments with thermally conductive epoxy preform
US5891761A (en) * 1994-06-23 1999-04-06 Cubic Memory, Inc. Method for forming vertical interconnect process for silicon segments with thermally conductive epoxy preform
US5837566A (en) * 1994-06-23 1998-11-17 Cubic Memory, Inc. Vertical interconnect process for silicon segments
US5675180A (en) * 1994-06-23 1997-10-07 Cubic Memory, Inc. Vertical interconnect process for silicon segments
US5637912A (en) * 1994-08-22 1997-06-10 International Business Machines Corporation Three-dimensional monolithic electronic module having stacked planar arrays of integrated circuit chips
US5567654A (en) * 1994-09-28 1996-10-22 International Business Machines Corporation Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging
US5517057A (en) * 1994-12-20 1996-05-14 International Business Machines Corporation Electronic modules with interconnected surface metallization layers
US5466634A (en) * 1994-12-20 1995-11-14 International Business Machines Corporation Electronic modules with interconnected surface metallization layers and fabrication methods therefore
US5699234A (en) * 1995-05-30 1997-12-16 General Electric Company Stacking of three dimensional high density interconnect modules with metal edge contacts
US5682062A (en) * 1995-06-05 1997-10-28 Harris Corporation System for interconnecting stacked integrated circuits
US5618752A (en) * 1995-06-05 1997-04-08 Harris Corporation Method of fabrication of surface mountable integrated circuits
US5608264A (en) * 1995-06-05 1997-03-04 Harris Corporation Surface mountable integrated circuit with conductive vias
US5872025A (en) * 1995-07-26 1999-02-16 International Business Machines Corporation Method for stacked three dimensional device manufacture
US5571754A (en) * 1995-07-26 1996-11-05 International Business Machines Corporation Method of fabrication of endcap chip with conductive, monolithic L-connect for multichip stack
US6313517B1 (en) * 1995-11-22 2001-11-06 Siemens Aktiengesellshaft Vertically integrated semiconductor component
US6146992A (en) * 1995-11-22 2000-11-14 Siemens Aktiengesellschaft Vertically integrated semiconductor component and method of producing the same
US6168969B1 (en) * 1996-02-16 2001-01-02 Micron Technology, Inc. Surface mount IC using silicon vias in an area array format or same size as die array
US6809421B1 (en) * 1996-12-02 2004-10-26 Kabushiki Kaisha Toshiba Multichip semiconductor device, chip therefor and method of formation thereof
US6187677B1 (en) * 1997-08-22 2001-02-13 Micron Technology, Inc. Integrated circuitry and methods of forming integrated circuitry
US5998292A (en) * 1997-11-12 1999-12-07 International Business Machines Corporation Method for making three dimensional circuit integration
US6124149A (en) * 1997-11-19 2000-09-26 Hyundai Electronics Industries Co., Ltd. Method of making stackable semiconductor chips to build a stacked chip module
US6723577B1 (en) * 1998-02-26 2004-04-20 Micron Technology, Inc. Method of forming an optical fiber interconnect through a semiconductor wafer
US6451624B1 (en) * 1998-06-05 2002-09-17 Micron Technology, Inc. Stackable semiconductor package having conductive layer and insulating layers and method of fabrication
US6228470B1 (en) * 1998-07-06 2001-05-08 International Business Machines Corporation Composite substrate for electronic components
US6773955B2 (en) * 1998-08-21 2004-08-10 Micron Technology, Inc. Low profile multi-IC chip package connector
US6475831B2 (en) * 1998-08-21 2002-11-05 Micron Technology, Inc. Methods for a low profile multi-IC chip package connector
US6583030B1 (en) * 1998-11-20 2003-06-24 Giesecke & Devrient Gmbh Method for producing an integrated circuit processed on both sides
US6221769B1 (en) * 1999-03-05 2001-04-24 International Business Machines Corporation Method for integrated circuit power and electrical connections via through-wafer interconnects
US6429509B1 (en) * 1999-05-03 2002-08-06 United Microelectronics Corporation Integrated circuit with improved interconnect structure and process for making same
US6853085B2 (en) * 1999-05-03 2005-02-08 Infineon Technologies Ag Method and device for securing a multi-dimensionally constructed chip stack and chip configuration
US6838310B1 (en) * 1999-05-03 2005-01-04 United Microelectronics Corporation Integrated circuit with improved interconnect structure and process for making same
US6566232B1 (en) * 1999-10-22 2003-05-20 Seiko Epson Corporation Method of fabricating semiconductor device
US6693361B1 (en) * 1999-12-06 2004-02-17 Tru-Si Technologies, Inc. Packaging of integrated circuits and vertical integration
US6852621B2 (en) * 2000-01-21 2005-02-08 Seiko Epson Corporation Semiconductor device and manufacturing method therefor, circuit board, and electronic equipment
US6667551B2 (en) * 2000-01-21 2003-12-23 Seiko Epson Corporation Semiconductor device and manufacturing thereof, including a through-hole with a wider intermediate cavity
US7102219B2 (en) * 2000-06-02 2006-09-05 Seiko Epson Corporation Semiconductor device, method of fabricating the same, stack-type semiconductor device, circuit board and electronic instrument
US6720661B2 (en) * 2000-06-02 2004-04-13 Seiko Epson Corporation Semiconductor device, method of fabricating the same, stack-type semiconductor device, circuit board and electronic instrument
US6577013B1 (en) * 2000-09-05 2003-06-10 Amkor Technology, Inc. Chip size semiconductor packages with stacked dies
US6812549B2 (en) * 2001-03-07 2004-11-02 Seiko Epson Corporation Wiring board and fabricating method thereof, semiconductor device and fabricating method thereof, circuit board and electronic instrument
US20050224921A1 (en) * 2001-05-01 2005-10-13 Subhash Gupta Method for bonding wafers to produce stacked integrated circuits
US6744127B2 (en) * 2001-05-31 2004-06-01 Infineon Technologies Ag Semiconductor chip, memory module and method for testing the semiconductor chip
US6451626B1 (en) * 2001-07-27 2002-09-17 Charles W.C. Lin Three-dimensional stacked semiconductor package
US6894386B2 (en) * 2001-10-08 2005-05-17 Micron Technology, Inc. Apparatus and method for packaging circuits
US6645796B2 (en) * 2001-11-21 2003-11-11 International Business Machines Corporation Method and semiconductor structure for implementing reach through buried interconnect for silicon-on-insulator (SOI) devices
US6677235B1 (en) * 2001-12-03 2004-01-13 National Semiconductor Corporation Silicon die with metal feed through structure
US6645832B2 (en) * 2002-02-20 2003-11-11 Intel Corporation Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
US6841849B2 (en) * 2002-03-19 2005-01-11 Seiko Epson Corporation Semiconductor device and method of manufacturing the same, circuit board and electronic instrument
US6848177B2 (en) * 2002-03-28 2005-02-01 Intel Corporation Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
US6908845B2 (en) * 2002-03-28 2005-06-21 Intel Corporation Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
US6642081B1 (en) * 2002-04-11 2003-11-04 Robert Patti Interlocking conductor method for bonding wafers to produce stacked integrated circuits
US6727116B2 (en) * 2002-06-18 2004-04-27 Micron Technology, Inc. Semiconductor devices including peripherally located bond pads, assemblies, packages, and methods
US6716737B2 (en) * 2002-07-29 2004-04-06 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
US6774477B2 (en) * 2002-08-13 2004-08-10 Hynix Semiconductor Inc. Structure and method of stacking multiple semiconductor substrates of a composite semiconductor device
US6828175B2 (en) * 2002-08-29 2004-12-07 Micron Technology, Inc. Semiconductor component with backside contacts and method of fabrication
US6903442B2 (en) * 2002-08-29 2005-06-07 Micron Technology, Inc. Semiconductor component having backside pin contacts
US6756681B1 (en) * 2002-12-23 2004-06-29 Nokia Corporation Radio frequency integrated circuit having increased substrate resistance enabling three dimensional interconnection with feedthroughs
US20040245623A1 (en) * 2003-03-28 2004-12-09 Kazumi Hara Semiconductor device, circuit substrate and electronic instrument
US20040245523A1 (en) * 2003-06-05 2004-12-09 Tean-Sen Jen Circular thin film transistor structure
US20060138629A1 (en) * 2004-12-24 2006-06-29 Seiko Epson Corporation Method of manufacturing semiconductor device, semiconductor device, stacked semiconductor device, circuit board and electronic instrument
US7190078B2 (en) * 2004-12-27 2007-03-13 Khandekar Viren V Interlocking via for package via integrity

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8940636B2 (en) 2008-03-27 2015-01-27 STATS ChipPAC, Ltc. Through hole vias at saw streets including protrusions or recesses for interconnection
US20100072599A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Top and Bottom Solder Bump Interconnection
US20100072618A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Bump Interconnection
US7888181B2 (en) 2008-09-22 2011-02-15 Stats Chippac, Ltd. Method of forming a wafer level package with RDL interconnection over encapsulant between bump and semiconductor die
US20110101524A1 (en) * 2008-09-22 2011-05-05 Stats Chippac, Ltd. Semiconductor Device with Bump Interconnection
US8546189B2 (en) 2008-09-22 2013-10-01 Stats Chippac, Ltd. Semiconductor device and method of forming a wafer level package with top and bottom solder bump interconnection
US9129971B2 (en) 2008-09-22 2015-09-08 Stats Chippac, Ltd. Semiconductor device with bump interconnection
US9589876B2 (en) 2008-09-22 2017-03-07 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming a wafer level package with top and bottom solder bump interconnection
US20100320591A1 (en) * 2009-06-19 2010-12-23 Zigmund Ramirez Camacho Integrated circuit packaging system with contact pads and method of manufacture thereof

Also Published As

Publication number Publication date
US20070172984A1 (en) 2007-07-26
US7741152B2 (en) 2010-06-22
TWI293499B (en) 2008-02-11
TW200729417A (en) 2007-08-01

Similar Documents

Publication Publication Date Title
US7741152B2 (en) Three-dimensional package and method of making the same
US7446404B2 (en) Three-dimensional package and method of making the same
US7642132B2 (en) Three-dimensional package and method of making the same
US7485967B2 (en) Semiconductor device with via hole for electric connection
KR101542478B1 (en) A method of fabricating an interconnection element having conductive posts
KR100575591B1 (en) CSP for wafer level stack package and manufacturing method thereof
TWI627721B (en) Method of manufacturing semiconductor device
KR101085656B1 (en) Semiconductor device and method of manufacturing the same
US20150091187A1 (en) 3d device packaging using through-substrate posts
US20180135185A1 (en) Fabrication method of substrate having electrical interconnection structures
KR20050067062A (en) Semiconductor device and manufacturing method thereof
JP2005064451A5 (en)
US8324714B2 (en) Semiconductor device and method for making the same
US7521289B2 (en) Package having dummy package substrate and method of fabricating the same
JP2009124042A (en) Semiconductor device
KR20140084517A (en) Interposer inculding buffer cavity, stack type interposer and method for manufacturing the same
CN100511617C (en) Solid encapsulation structure and making method thereof
EP2615638A2 (en) Semiconductor Package Structure and Method for Manufacturing The Same
JP4282514B2 (en) Manufacturing method of semiconductor device
CN100565830C (en) Solid encapsulation structure and manufacture method thereof
CN110767559B (en) Manufacturing method of redistribution layer, wafer level packaging method and redistribution layer
US7129581B2 (en) Semiconductor device, method of manufacturing thereof, circuit board and electronic apparatus
JP2007059493A (en) Semiconductor device and its manufacturing method
CN100547753C (en) Solid encapsulation structure and manufacture method thereof
TWI401754B (en) Method of manufacturing semiconductor device

Legal Events

Date Code Title Description
AS Assignment

Owner name: ADVANCED SEMICONDUCTOR ENGINEERING, INC., TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HUANG, MIN-LUNG;WANG, WEI-CHUNG;CHENG, PO-JEN;AND OTHERS;REEL/FRAME:018742/0789

Effective date: 20061215

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION